KR20180015091A - System for monitoring conditions of processing equipment - Google Patents

Abstract

According to an embodiment of the present invention, a process facility monitoring system comprises: a PLC server; a facility condition collection unit; a video collection unit; an air quality measurement unit; a display panel; a warning unit; a communication unit; a monitoring unit; and a portable terminal. The PLC server is each connected to the facility condition collection unit, the video collection unit, the air quality measurement unit, the display panel, and the warning unit, controls an output of the display panel and the warning unit based on information collected by the facility condition collection unit, the video collection unit, the air quality measurement unit, and shares data with the monitoring unit and the portable terminal unit through the communication unit. Furthermore, the PLC server is connected to the facility condition collection unit, the video collection unit, the air quality measurement unit, the display panel, and the warning unit with RS232, RS485 or USB communication methods, and is connected to the monitoring unit and the portable terminal with TCP communication, IP communication or Wi-Fi communication methods.

Description

SYSTEM FOR MONITORING CONDITIONS OF PROCESSING EQUIPMENT

The present invention relates to a process facility status monitoring system.

The display mode of the current test package device state is made up of three kinds of red, yellow, and green, etc., and the display mode continues to be used up to the present since the device is introduced.

However, such a display mode can not reflect the situation of the apparatus in detail, and it is difficult for the on-site technical personnel and the labor force to effectively distinguish between the priority matters and the urgent matters, and it affects the production efficiency, There is a problem.

Korean Patent Laid-Open Publication No. 10-2006-0039368 (Wafer Boat Table Display System of Semiconductor Manufacturing Equipment)

SUMMARY OF THE INVENTION It is an object of the present invention to provide a process facility status monitoring system capable of solving the conventional problems.

According to an aspect of the present invention, there is provided a process facility monitoring system including a PLC server, a facility status collecting unit, a video collecting unit, an air quality measuring unit, a display panel, an alarm unit, a communication unit, a monitoring unit, , The PLC server is connected to each of the facility state collecting unit, the video collecting unit, the air quality measuring unit, the display panel, and the alarm unit, and the PLC server receives information collected by the device state collecting unit, the video collecting unit, And the PLC server shares data with the monitoring unit and the portable terminal unit through the communication unit. The PLC server may be an RS232, an RS485, or a USB communication system A video collecting unit, an air quality measuring unit, a display panel, and an alarm unit, and may be connected to the equipment through the TCP communication, the IP communication, or the WIFI communication method. To the monitoring unit and the portable terminal.

According to an aspect of the present invention, there is provided a process facility monitoring system for estimating a process rate, a production rate, a production delay rate and a process abnormal rate of an entire process line on a line-by-line basis based on operation information of at least one process line facility Calculating PLC server; A monitoring unit monitoring the abnormality of the process information including at least one of a process rate, a production rate, and a production delay rate predicted and calculated by the server; And a warning alarm unit for visually and audibly providing a warning message when an abnormality occurs in the process information.

The solution of the above-mentioned problems does not list all the features of the present invention. Various means for solving the problems of the present invention can be understood in detail with reference to specific embodiments of the following detailed description.

Using the process facility monitoring system according to an embodiment of the present invention, it is possible to easily predict the operation state of facilities provided for each production process line, the normal operation rate of each process line and the entire process line, the process rate, the production rate, And can be grasped.

Through the above-described advantages, the task manager can check the operation rate of the process line in real time, thereby improving the error rate of the product.

1 is a block diagram showing a process facility monitoring system according to an embodiment of the present invention.
Fig. 2 is an exemplary view showing the display panel shown in Fig. 1. Fig.
3 is an exemplary diagram illustrating a process facility monitoring system according to an embodiment of the present invention.
4 is a block diagram showing the PLC server shown in FIG.
5 is a block diagram showing the monitoring unit shown in FIG.
6 and 7 are views of an example of the display panel shown in Fig.
8 is a flowchart illustrating a process facility monitoring method according to an embodiment of the present invention.
FIG. 9 is a flowchart showing S710 shown in FIG. 8 in more detail.
10 is a diagram illustrating an exemplary computing environment in which the embodiments disclosed herein may be implemented.

The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention, and are actually shown in a smaller scale than the actual dimensions in order to understand the schematic configuration.

Also, the terms first and second, etc. may be used to describe various components, but the components should not be limited by the terms.

The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

On the other hand, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not

Hereinafter, a process facility monitoring system according to various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram showing a process facility monitoring system according to an embodiment of the present invention.

1, a process facility monitoring system 10 according to an embodiment of the present invention includes a PLC server, a facility status collecting unit, a video collecting unit, an air quality measuring unit, a display panel, an alarm unit, a communication unit, Wherein the PLC server is connected to the equipment condition collecting unit, the video collecting unit, the air quality measuring unit, the display panel, and the alarm unit, and the PLC server includes a device status collecting unit, a video collecting unit, Wherein the PLC server controls the output of the display panel and the alarm unit based on information collected from the base, and the PLC server shares data with the monitoring unit and the portable terminal unit via the communication unit, An air quality measurement unit, a display panel, and an alarm unit in the form of an RS 485 or a USB communication system, and is capable of performing TCP communication, IP communication, or WI-FI communication method To is characterized in that connected to the monitoring unit and the portable terminal.

The portable terminal includes a smart phone and a tablet PC connected to the PLC server by a communication unit

 The PLC server receives the signal collected by the facility status collector and displays the current facility status information in real time through the display panel which is a double-sided LED display to distinguish the normal operation state and the failure state of the facility in detail, You can get to know your work.

Therefore, production efficiency can be greatly improved and safe operation of the facility can be effectively ensured.

Since the PLC server receives the signals collected by the video collector and transmits signals to the monitoring unit and the portable terminal through the communication unit, the monitoring personnel can remotely monitor the on-site workforce in real time, Can be.

In addition, the PLC server receives the signal collected by the air quality measuring unit, compares the signal with the set value, and controls the output of the alarm, thereby effectively monitoring the on-site air quality.

2 is an exemplary view of the display panel shown in Fig.

Referring to FIG. 2, the display panel includes a first LED display surface 1 and a second LED display surface 2, and a rotation support 3 is provided at the bottom of the display panel.

Since the angle of the display panel can be adjusted from time to time by the rotating pedestal 3, it becomes easier to observe the field workforce from time to time.

In view of the above, the process facility monitoring system, which is an embodiment of the present invention, collects signals by the equipment status collecting unit and displays the current equipment status information in real time through a display panel which is a double- It distinguishes between state and failure state in detail, so that the field workforce can know the work matters first, thereby greatly improving the production efficiency and effectively ensuring safe operation of the apparatus.

In addition, the air quality measuring unit collects the signals and transmits them to the PLC server. The PLC server compares the signals with the set values and controls the output of the alarm to effectively monitor the on-site air quality.

In addition, the video collecting unit collects the signals and transmits them to the PLC server. The PLC server transmits signals to the monitoring center and the portable terminal through the communication unit so that the monitoring personnel can remotely monitor the field workforce in real time , And the ability to facilitate on-site command and control.

3 is a block diagram showing a PLC server shown in FIG. 3. FIG. 5 is a block diagram showing a monitoring unit shown in FIG. 3. FIG. And FIGS. 6 and 7 are views of an example of the display panel shown in FIG.

3, the process facility monitoring system 100 according to another embodiment of the present invention includes a PLC server 110, a monitoring unit 120, a display panel 130, and a warning alarm unit 140 ).

The process facility monitoring system 100 according to another embodiment of the present invention can grasp the facility status of the process line in real time and provide the operation rate, the process rate, the production rate, the production delay rate, And so on.

First, the PLC server 110 predicts and calculates the process information including the process rate, the production rate, the production delay rate, and the process abnormal occurrence rate of the entire process line based on the operation information of at least one process line facility.

4, the PLC server 110 may include an operation information collecting unit 111, a process rate calculating unit 112, a production rate predicting unit 113, and a process error rate predicting unit 114 have.

The operation information collection unit 111 collects and classifies operation information of facilities located in at least one process line, and classifies the operation information into predetermined data units.

The process rate calculating unit 112 calculates a process rate of each process line based on an error between N-1 time (previous time) operation information and N time (current time) operation information of the facilities.

The production rate predicting unit 113 predicts the production rate and the production delay rate of the corresponding process line through the difference between the process rate calculated by the process rate calculating unit 112 and the reference process rate.

The production rate means a real time predictable production rate of each process line, and the production rate disclosed in the present invention can have a variation value according to a change of a user-set reference process rate.

Next, the process error rate predicting unit 114 determines whether or not the facilities are in an abnormal state based on the operation information of the facilities located in the process line and the reference operation information per hour, Predict the rate of process error occurrence in the line.

In this case, the process error rate predicting unit may calculate a process error rate predictor based on a multiple linear regression (MLR), a partial least squares (PLS), a RIDGE, a minimum absolute straight shaper and selection operator (SCL), a minimax concave penalty Support Vector Machine), Bagging, Boosting, and Random Forest.

5, the monitoring unit 120 monitors the operation information of the facilities and the abnormality of the process information including at least one of the process rate, the production rate, and the production delay rate predicted and calculated by the PLC server 110 Monitoring.

More specifically, the monitoring unit 120 may include an equipment abnormality determination unit 121, a process information abnormality determination unit 122, and an information visualization unit 123.

The facility abnormality determination unit 121 compares the operation information of the facilities located in each process line with the reference operation information to determine whether or not the facility is abnormal.

The process information abnormality determination unit 122 determines whether there is an abnormality in the process information by comparing the process information including at least one of the process rate, the production rate, and the production delay rate predicted and calculated by the PLC server 110 and the reference process information do.

Here, the comparison object may be the variability and continuity of the classification data included in the process information.

The classification data variability means a state in which the numerical value of the classification data is irregularly out of the reference error range, and the continuity of the classification data means a state in which the classification data is missing.

The information visualization unit 123 converts the result of comparison between the equipment abnormality determination unit 121 and the process information abnormality determination unit 122 into a diagram and outputs the result.

The diagram may include information on occurrence time of an abnormal state.

6 and 7, the display panel 130 displays the process rate, the production rate, the production delay rate, and the process abnormal occurrence rate of the entire process line predicted and calculated by the server.

More specifically, the display panel 130 may include a first panel 131, a second panel 132, and a rotation unit 133.

The first panel 131 displays operation information and status abnormality information of the first facility of the process line.

The second panel 132 displays process information of the process line, operation information of the second facility, and status abnormality information.

The first panel 131 and the second panel 122 may include at least one display section for displaying the process rate, the production rate, the production delay rate, and the process error probability of the process line calculated and predicted by the PLC server, .

The rotation unit 133 functions to rotate the double-sided type display panel.

The display panel 130 may further include a height and tilt angle controller 134.

The first panel 131 and the second panel 132 may be formed of a liquid crystal display (LCD), a plasma display panel (PDP), a light emitting diode (LED), an organic light emitting diode (OLED) ). ≪ / RTI >

The first panel 131 and the second panel 132 may be panels in which at least one or more display intervals indicating the process rate, the production rate, the production delay rate, and the process error probability included in the process information are partitioned.

In addition, each display section can display the corresponding process information in a different color, and display it in different fonts and font sizes.

Meanwhile, the first panel 131 and the second panel 132 may simultaneously or sequentially display the information included in the process information.

Also, the process information may be displayed in units of a predetermined time. For example, the process rate, the production rate and the production delay rate may be displayed in predetermined time units, but may be displayed in a blinking manner.

The height and tilt angle adjuster 134 may adjust the height and the tilt angle of the first panel 121 and the second panel 122, respectively.

The height and the inclination angle adjuster 134 can adjust the heights of the first panel 131 and the second panel 132 using a gear, a hydraulic pressure, and / or a pneumatic cylinder.

The height and tilt angle adjusting unit 133 can adjust the inclination angles of the first panel 131 and the second panel 132 using the rotating member 134a (see FIG. 7).

Referring again to FIG. 3, the warning alarm unit 140 outputs a warning signal when abnormality of the process information calculated by the PLC server 110, the process information determined by the monitoring unit 130, And to provide visual and auditory information to the operator.

In addition, the process facility monitoring system 100 according to an embodiment of the present invention may include a process information monitoring system 100 for monitoring process information, such as reference information of process information, a blinking pattern, partition information (e.g., color and shape) And may further include a setting unit 150.

The information setting unit 150 includes a communication medium for transmitting and receiving data between the wireless terminal and the network.

The communication medium may communicate with a wireless terminal using a predetermined network, and the network may be an Internet, a LAN (Local Area Network), a wireless LAN (Local Area Network), a WAN (Personal Area Network), 3G, 4G, LTE, Wi-Fi, and the like. The Internet can be divided into several services, such as HyperText Transfer Protocol (HTTP), Telnet, File Transfer Protocol (FTP), Domain Name System (DNS), Simple Mail Transfer Protocol (SMTP) Simple Network Management Protocol (NFS), Network File Service (NFS), and Network Information Service (NIS).

Therefore, by using the process facility monitoring system according to an embodiment of the present invention, it is possible to control the operation state and operation abnormal state of equipment provided for each process line, the process rate of each process line and the entire process line, the production rate, And the like can be easily grasped by the operator and the manager.

FIG. 8 is a flowchart illustrating a process facility monitoring method according to an embodiment of the present invention, and FIG. 9 is a flowchart illustrating S710 shown in FIG. 8 in more detail.

Referring to FIG. 8, a process facility monitoring method (S700) according to an embodiment of the present invention first collects and classifies facility operation information of facilities located in each process line in the PLC server (S710). At this time, the collected operation information is classified and stored in predetermined data units.

Then, the PLC server 110 calculates and predicts the process information including the process rate, the production rate, the production delay rate, and the process error rate of the process line based on the collected operation information (S720).

More specifically, in step S720, the process rate calculator 112 of the PCL server 110 calculates the difference between the N-1 time point (previous point in time) and the N point (current point) (S721), and the production rate predicting unit 113 predicts the production rate and the production delay rate of the corresponding process line through the difference between the process rate calculated by the process rate calculating unit 112 and the reference process rate (S722).

Here, the production rate means a real time predictable production rate of each process line, and the production rate disclosed in the present invention can have a variation value according to a change in the reference process rate set by the user.

Next, the process error rate predicting unit 114 determines whether or not the facilities are in an abnormal state based on the operation information of the facilities located in the process line and the reference operation information per hour, (Step S723).

In this case, the process error rate predicting unit may calculate a process error rate predictor based on a multiple linear regression (MLR), a partial least squares (PLS), a RIDGE, a minimum absolute straight shaper and selection operator (SCL), a minimax concave penalty Support Vector Machine), Bagging, Boosting, and Random Forest.

On the other hand, when the process of step S720 is completed, the monitoring unit 120 detects abnormality of the equipment status and abnormality of the process information (S730).

More specifically, the monitoring unit 120 compares the operation information of the facilities located in each process line with the reference operation information through the equipment abnormality determination unit 121 to determine whether or not there is an abnormality in the facility, The process information including the at least one of the process rate, the production rate, and the production delay rate predicted and calculated by the PLC server 110 through the input / output unit 122 and the reference process information.

Here, the comparison object may be the variability and continuity of the classification data included in the process information.

The classification data variability means a state in which the numerical value of the classification data is irregularly out of the reference error range, and the continuity of the classification data means a state in which the classification data is missing.

The monitoring unit 120 converts the result of comparison between the equipment abnormality determination unit 121 and the abnormality determination unit 122 through the information visualization unit 123 into a diagram and outputs the result to the outside. The diagram may include information on occurrence time of an abnormal state.

Thereafter, when the abnormality of the equipment condition or the abnormality of the process information occurs in the monitoring, the warning alarm unit 130 outputs a warning message visually and / or audibly.

Finally, the display panel 130 displays the process information including the normal operation and failure state information of the facility, the process rate of each process line, the production rate, the production delay rate, and the process abnormal occurrence rate.

FIG. 10 is a diagram illustrating an exemplary computing environment in which one or more embodiments disclosed herein may be implemented. An example of a system 1000 including a computing device 1100 configured to implement one or more of the embodiments described above / RTI > For example, the computing device 1100 may be a personal computer, a server computer, a handheld or laptop device, a mobile device (mobile phone, PDA, media player, etc.), a multiprocessor system, a consumer electronics device, A distributed computing environment including any of the above-described systems or devices, and the like.

The computing device 1100 may include at least one processing unit 1110 and memory 1120. [ The processing unit 1110 may include, for example, a central processing unit (CPU), a graphics processing unit (GPU), a microprocessor, an application specific integrated circuit (ASIC), a field programmable gate array And may have a plurality of cores.

The memory 1120 can be a volatile memory (e.g., RAM, etc.), a non-volatile memory (e.g., ROM, flash memory, etc.) or a combination thereof. In addition, the computing device 1100 may include additional storage 1130. Storage 1130 includes, but is not limited to, magnetic storage, optical storage, and the like. The storage 1130 may store computer readable instructions for implementing one or more embodiments as disclosed herein, and other computer readable instructions for implementing an operating system, application programs, and the like. The computer readable instructions stored in storage 1130 may be loaded into memory 1120 for execution by processing unit 1110. In addition, computing device 1100 may include input device (s) 1140 and output device (s) 1150.

Here, input device (s) 1140 may include, for example, a keyboard, a mouse, a pen, a voice input device, a touch input device, an infrared camera, a video input device, or any other input device. Also, output device (s) 1150 can include, for example, one or more displays, speakers, printers, or any other output device. In addition, computing device 1100 may use an input device or output device included in another computing device as input device (s) 1140 or output device (s) 1150. [ The computing device 1100 may also include communication connection (s) 1160 that allow the computing device 1100 to communicate with other devices (e.g., computing device 1300).

(S) 1160 may include a modem, a network interface card (NIC), an integrated network interface, a radio frequency transmitter / receiver, an infrared port, a USB connection or other Interface. Also, the communication connection (s) 1160 may include a wired connection or a wireless connection. Each component of the computing device 1100 described above may be connected by various interconnects (e.g., peripheral component interconnect (PCI), USB, firmware (IEEE 1394), optical bus architecture, etc.) And may be interconnected by the network 1200. As used herein, the terms "component," "system," and the like generally refer to a computer-related entity, which is hardware, a combination of hardware and software, software, or software in execution.

For example, an element may be, but is not limited to being, a processor, an object, an executable, an executable thread, a program and / or a computer running on a processor. For example, both the application running on the controller and the controller may be components. One or more components may reside within a process and / or thread of execution, and the components may be localized on one computer and distributed among two or more computers.

The present invention has been described above with reference to the embodiments. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. Therefore, the disclosed embodiments should be considered in an illustrative rather than a restrictive sense. Therefore, the scope of the present invention is not limited to the above-described embodiments, but should be construed to include various embodiments within the scope of the claims and equivalents thereof.

100: Process facility status monitoring display
110: PLC
111: Operation information collecting unit
112:
113:
114: Process abnormal prediction unit
120: Display panel
121: first panel
122: second panel
123: Height and inclination angle adjustment section
130: Warning alarm section
140: standard process rate setting unit

Claims (5)

A PLC server, a facility status collecting unit, a video collecting unit, an air quality measuring unit, a display panel, an alarm unit, a communication unit, a monitoring unit and a portable terminal,
The PLC server
The air condition measuring unit, the display panel, and the alarm unit,
The PLC server controls the outputs of the display panel and the alarm unit based on the information collected by the apparatus state collecting unit, the video collecting unit, and the air quality measuring unit,
Wherein the PLC server shares data with the monitoring unit and the portable terminal unit through the communication unit,
The PLC server is connected to the equipment status collecting unit, the video collecting unit, the air quality measuring unit, the display panel, and the alarm unit by RS232, RS485 or USB communication method. The PLC server is connected to the monitoring unit and the portable And the terminal is connected to the terminal.
A PLC server for predicting and calculating the process information including the process rate, the production rate, the production delay rate, and the process abnormal occurrence rate of the entire process line based on the operation information of at least one process line facility;
A monitoring unit monitoring the abnormality of the process information including at least one of a process rate, a production rate, and a production delay rate predicted and calculated by the PLC server; And
And a warning alarm unit for visually and auditorily providing a warning message when an abnormality occurs in the process information.
The method according to claim 1,
Further comprising an air quality measuring unit for measuring the air quality of the at least one process line,
Wherein the monitoring unit monitors the state of the air quality measured by the air quality measuring unit, and the warning alarm unit provides a warning message when the state of the air quality is below the reference value.
The method according to claim 1,
And a display panel for displaying the process rate, the production rate, the production delay rate, and the process abnormal occurrence rate of the entire process line predicted and calculated by the PLC server.
The method of claim 3,
The display panel
A first panel for displaying operation information and status abnormality information of the first facility of the process line;
A second panel for displaying operation information and status abnormality information of a second facility of the process line; And
And a rotation unit for rotating the first panel and the second panel.

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