KR20170135013A - Separationg mask and glass deposition apparatus having the same - Google Patents

Abstract

Disclosed are a split mask and a substrate deposition apparatus having the same. According to an embodiment of the present invention, the substrate deposition apparatus comprises: a chamber in which a deposition process for a substrate is performed; and a split mask which is arranged in parallel with respect to the substrate when the deposition process is performed, and which transfers a deposition material from a source to the substrate. The split mask comprises: a plurality of sheet mask sticks having a plurality of through-holes through which a deposition material from a source passes; a mask frame in which the sheet mask sticks are extended and coupled; and a stick supporter which is arranged between the mask frame and the sheet mask stick and supports the sheet mask sticks while forming one surface with the sheet mask sticks so as to prevent a shadow phenomenon from occurring in the sheet mask sticks during the deposition process.

Description

TECHNICAL FIELD [0001] The present invention relates to a split mask and a substrate deposition apparatus having the split mask.

The present invention relates to a split mask and a substrate deposition apparatus having the same, and more particularly, to a simple and compact structure that can prevent a shadow phenomenon from occurring during a deposition process, And a substrate deposition apparatus having the same.

OLED (Organic Light Emitting Display), which is one of flat panel display element substrates, is a cemented carbide type display device which realizes a color image by self-emission of organic materials, and has a simple structure and high optical efficiency It has attracted attention as a promising display device.

The organic light emitting display OLED includes an anode, a cathode, and organic layers interposed between the anode and the cathode. Here, the organic layers include at least a light emitting layer and may further include a hole injecting layer, a hole transporting layer, an electron transporting layer, and an electron injecting layer in addition to the light emitting layer.

The organic electroluminescent display device can be divided into a polymer organic electroluminescent device and a low molecular weight organic electroluminescent device depending on an organic film, particularly a material forming the light emitting layer.

In order to realize a full color, a light emitting layer must be patterned. As a method of manufacturing a large OLED, a direct patterning method using a fine metal mask (FMM) and a laser induced thermal imaging (LITI) And a method of using a color filter.

When an OLED (hereinafter referred to as a substrate) is manufactured by applying a mask method, a substrate and a patterned mask are horizontally disposed in a chamber, and then a substrate is deposited by spraying an evaporation material toward a mask in a lower region of the mask The so-called horizontal type upward deposition method is widely applied.

In applying the horizontal upward deposition method, it is necessary to increase the mask size for a large substrate in order to deposit a large substrate having a width of 2 meters (m) or longer, unlike a conventional small substrate.

Therefore, when such a large substrate is used, a split mask can be applied instead of a conventional sheet mask.

A split mask is a mask in which a plurality of sheet mask sticks are welded to a mask frame while stretching the sheet mask sticks one by one.

On the other hand, when the split mask is applied, the sheet mask stick may be bended by welding the sheet mask stick to the mask frame at a level required by the process, for example, 30 mu m, A shadow phenomenon, that is, a bending phenomenon, may occur on the mask stick, so that a uniform deposition film can not be formed on the substrate, and as a result, the deposition quality of the substrate may deteriorate.

It is conceivable to preliminarily apply a means capable of supporting the sheet mask stick on the mask frame when the sheet mask stick is to be pulled and welded to the mask frame. If such a means is applied, It is impossible to completely prevent the occurrence of the shadow phenomenon in the deposition process when the sheet mask stick is supported. Therefore, it is necessary to develop a technique to solve all of these problems.

Korea Patent Office Publication No. 10-2012-0077382

Accordingly, it is an object of the present invention to provide a split mask capable of preventing a shadow phenomenon from occurring during a deposition process through a simple and compact structure, thereby improving deposition quality of a substrate, And a substrate deposition apparatus.

According to an aspect of the present invention, there is provided a plasma processing apparatus comprising: a chamber in which a deposition process for a substrate proceeds; And a partitioned mask disposed in parallel with the substrate in the course of the deposition process and transferring deposition material from a source to the substrate, wherein the partitioned mask comprises: A plurality of sheet mask sticks having a plurality of through holes; A mask frame to which the sheet mask stick is coupled in tension; And a shadow mask which is disposed between the mask frame and the sheet mask stick and forms a surface with the sheet mask stick so as to prevent a shadow phenomenon from occurring in the sheet mask stick during the deposition process, And an anti-stick stick supporter.

The shadow preventive stick supporter includes a plurality of cover mask parts arranged in parallel with each other; And a plurality of crossbar mask parts disposed in parallel to the plurality of cover mask parts and arranged in parallel with each other.

The cover mask portion and the cross bar mask portion have the same thickness and can be manufactured as one body.

The through hole of the sheet mask stick may be disposed in a space formed between the cover mask portion and the cross bar mask portion.

The cover mask portion and the crossbar mask portion may have different thicknesses.

The crossbar mask part may have a thickness greater than the thickness of the cover mask part, and the crossbar mask part may be formed with a slot for insertion of the cover mask part.

The depth of the insertion recess for seat arrangement and the thickness of the cover mask portion may be the same.

The sheet mask stick may be welded to the mask frame at both ends after both ends are pulled in directions opposite to each other, and the shadow preventive stick supporter may be previously bonded onto the mask frame before the sheet mask stick is welded.

The thickness of the stick preventive stick supporter may be made larger than the thickness of the sheet mask stick, and the substrate may be a large OLED substrate.

According to another aspect of the present invention, there is provided a lithographic apparatus comprising: a plurality of sheet mask sticks having a plurality of through holes through which a deposition material from a source provided in a chamber passes; A mask frame to which the sheet mask stick is coupled in tension; And a shadow mask which is disposed between the mask frame and the sheet mask stick and forms a surface with the sheet mask stick so as to prevent a shadow phenomenon from occurring in the sheet mask stick during the deposition process, And an anti-stick stick supporter.

The shadow preventive stick supporter includes a plurality of cover mask parts arranged in parallel with each other; And a plurality of crossbar mask parts disposed in parallel to the plurality of cover mask parts and arranged in parallel with each other.

The cover mask portion and the cross bar mask portion may have the same thickness and may be integrally formed. The through hole of the sheet mask stick may be disposed in a space formed between the cover mask portion and the cross bar mask portion. have.

The cover mask portion and the crossbar mask portion may have different thicknesses.

The thickness of the crossbar mask portion may be greater than the thickness of the cover mask portion, and the crossbar mask portion may be formed with an insertion groove for insertion of the cover mask portion into which the insertion portion is inserted, And the thickness of the cover mask portion may be the same.

According to the present invention, it is possible to prevent the occurrence of a shadow phenomenon during the deposition process through a simple and compact structure, thereby improving the quality of the deposition of the substrate.

1 is a schematic structural view of an organic light emitting display device in which an organic film and an inorganic film are alternately deposited in 10 layers.
2 is a structural view of a substrate deposition apparatus according to an embodiment of the present invention.
FIGS. 3 to 6 are step-by-step operation diagrams for the substrate deposition process.
7 is a plan view of a split mask according to an embodiment of the present invention.
Fig. 8 is a perspective view of Fig. 7. Fig.
Fig. 9 is an exploded perspective view of Fig. 8. Fig.
Fig. 10 is a schematic cross-sectional view taken along the line AA in Fig. 7, illustrating the correlation with the substrate.
11 is a plan structural view of a split mask according to another embodiment of the present invention.
Fig. 12 is a perspective view of Fig. 11. Fig.
13 is an exploded perspective view of Fig.
14 is an exploded view of the cover mask part and the cross bar mask part in Fig.
Fig. 15 is a schematic cross-sectional view taken along the line BB in Fig. 11 and showing the correlation with the substrate. Fig.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

1 is a schematic structural view of an organic light emitting display device in which an organic film and an inorganic film are alternately deposited in 10 layers.

Referring to this figure, an organic light emitting display (OLED) 1 may include a substrate and an organic light emitting element 3 stacked on the substrate.

The substrate may be a substrate provided with glass. The organic light emitting element 3 has a stacked structure of an anode, three organic layers (a hole transporting layer, a light emitting layer, and an electron transporting layer), and a cathode. An organic molecule, when energized (and excited), tries to return to its original state (ground state), and has the property of emitting the energy it receives as light.

In the organic light emitting diode 3, when a voltage is applied, the hole (+) injected from the anode and the electrons injected from the cathode (-) recombine in the light emitting layer. (Red), G (Green), and B (Blue) light are emitted depending on the organic material on the organic light emitting device 3. In this case, (Full Color) is implemented using the characteristic of emitting a color.

On the other hand, since the organic light emitting element 3 can be easily damaged by gas or moisture in the atmosphere, life thereof may become a problem. To solve this problem, a plurality of organic layers and inorganic layers are alternately stacked The organic light emitting element 3 has been protected from the inflow of gas or moisture.

In Fig. 1, a total of ten organic films and inorganic films are alternately stacked. That is, a first organic film, a first inorganic film, a second organic film, a second inorganic film, a fifth organic film, and a fifth inorganic film are sequentially deposited from the organic light emitting element 3 in layers.

In detail, the first inorganic film completely covers the first organic film, the second organic film partially surrounds the first inorganic film, and the second inorganic film completely covers the second organic film. And a substrate deposition apparatus as shown in FIG. 2 below is required for such deposition.

FIG. 2 is a structural view of a substrate deposition apparatus according to an embodiment of the present invention, and FIGS. 3 to 6 are operation diagrams for progressing a substrate deposition process, respectively.

Referring to these drawings, the substrate deposition apparatus according to the present embodiment includes a chamber 100 in which a deposition process is carried out, a substrate 100 disposed in parallel with the substrate in the course of a deposition process, To the mask 120. The mask 120 may include a mask (not shown).

As described above, the substrate used in this embodiment is a large-sized substrate for an organic light emitting display (OLED), for example, a large OLED substrate having a length of about 2 meters (m) .

The chamber 100 is the location where the deposition process for the substrate proceeds. In the case of this embodiment, a horizontal upward deposition method is proposed in which a deposition process is performed on a substrate by an evaporation material that is directed upward after the substrate is horizontally disposed.

The interior of the chamber 100 forms a vacuum atmosphere so that the deposition process for the substrate can proceed reliably. To this end, a vacuum pump 101a may be connected to the lower portion of the chamber 100 as a means for maintaining the interior of the chamber 100 in a vacuum atmosphere. The vacuum pump 101a may be a so-called cryopump.

The side walls of the chamber 100 may be provided with gates 101b and 101c through which the substrates are introduced. Separate gate valves are provided in the gates 101b and 101c to prevent the vacuum in the chamber 100 from being arbitrarily released.

The source 110 is disposed in the lower region within the chamber 100 and serves to provide evaporation material toward the upper substrate. In the case of this embodiment, although the source 110 is shown as a fixed type, the substrate may be fixed and the source 110 may be rotated to perform the deposition process, all of which are within the scope of the present invention.

The substrate deposition apparatus may be mounted on the chamber 100 having such a structure as shown in FIG. At this time, structures such as the substrate, the split mask 120 and the cooling plate 140 are disposed in the chamber 100, and the up / down driving unit 181 and the rotation driving unit 183, which are driving means for driving them, And may be disposed outside the chamber 100 and connected to the cooling plate 140 or the like.

Prior to the description of the split mask 120, various configurations for the deposition process will be described first. First, the cooling plate 140 is a structure disposed on the opposite side of the partitioning type mask 120 with the substrate interposed therebetween. The cooling plate 140 functions to control (cool) the substrate temperature by contacting the substrate during the deposition process for the substrate.

The cooling plate 140 is provided to be able to approach or separate from the divided type mask 120 so that the cooling plate 140 contacts the surface of the substrate during the deposition process. To this end, the substrate deposition apparatus according to the present embodiment is provided with an up / down driving plate 160 and an up / down driving unit 181.

The up / down driving plate 160 is disposed adjacent to the cooling plate 140, that is, on the upper side of the cooling plate 140, and is driven up / down together with the cooling plate 140. That is, since the up / down driving plate 160 is driven up / down by the action of the up / down driving unit 181, the cooling plate 140 connected thereto is moved toward or away from the dividing type mask 120 .

At this time, in the present embodiment, the cooling plate 140 and the up / down driving plate 160 are connected to each other, but they are not completely fixed. In other words, the up / down driving plate 160 takes a floating state on the cooling plate 140. This is because the cooling plate 140 is lowered to the desired position due to the up / down driving plate 160, and then the cooling plate 140 is pressed against the surface of the substrate by the own load of the cooling plate 140 .

2, the up / down driving unit 181 is connected to the up / down driving plate 160 and drives the up / down driving plate 160 up / down .

The up / down driving unit 181 includes an up / down ball screw 181a, an up / down motor 181b for providing a driving force for up / down ball screw 181a to be operated up / down, And a first motion transmission portion 181c for transmitting the rotational motion of the motor 181b to the up / down linear movement of the up / down shaft 181a. The first motion transmission portion 181c may be applied in a belt and pulley structure. When the up / down motor 181b is operated, the up / down ball screw 181a is rotated in the forward or reverse direction by the first motion transmission portion 181c to move the up / down drive plate 160 up / down .

The periphery of the up / down driving unit 181 is connected to the cooling plate 140 and the split mask 120, and rotates and drives the cooling plate 140, the substrate, and the split mask 120 during the deposition process .

As mentioned above, in the case of the deposition method using the point source 110 and the open split mask 120 as in the present embodiment, since the uniformity of the material deposited on the substrate is uneven, The cooling plate 140, the substrate, and the split mask 120 are attached to each other, and then the deposition process is performed while rotating for several to several tens of minutes. At this time, the rotation driving unit 183 may be operated. Of course, conversely, the deposition process may be performed while the source 110 is being rotated while the cooling plate 140, the substrate, and the split mask 120 are fixed.

2, the rotation driving unit 183 includes a rotation frame 183a for supporting the cooling plate 140 and the split mask 120 together, including the up / down driving plate 160, And a second motion transmitting portion 183c for transmitting the rotational motion of the rotating motor 183b by the rotational motion of the rotating frame 183a. Accordingly, when the rotary motor 183b is operated, the rotary frame 183a can be rotated in one direction by the second motion transmission portion 183c, and the deposition process can proceed with the rotation of the substrate.

As described above, in the present embodiment, the substrate is rotated while being evaporated by the action of the rotation driving unit 183 during the deposition process. At this time, the substrate disposed between the cooling plate 140 and the split mask 120 is shaken or slipped, . That is, even if the rotation driving unit 183 is operated, the substrate should not slip, which requires proper assemble force between the cooling plate 140, the substrate, and the split mask 120. To this end, the magnetic force system is applied in this embodiment. That is, either a magnet is embedded in the cooling plate 140, or a separate magnet is provided on the back of the cooling plate 140, thereby pulling the split metal mask 120 to the cooling plate 140), and the substrate and the split mask 120 can be bonded together with an appropriate combination force. They are therefore not shaken during the deposition process.

On the other hand, in the case of this embodiment, as described above, since the mask type horizontal upward deposition method is applied to a large substrate, a split type mask 120 to be bonded to a substrate is required. Such a split mask 120 will be described in detail with reference to FIGS. 7 to 10. FIG.

8 is a perspective view of FIG. 7, FIG. 9 is an exploded perspective view of FIG. 8, and FIG. 10 is a schematic view of the divided mask according to the embodiment of FIG. Sectional view showing a correlation with a substrate.

Referring to these drawings, the split mask 120 according to the present embodiment can prevent a shadow phenomenon during a deposition process through a simple and compact structure. The sheet mask sticks 121, a mask frame 123 to which the sheet mask stick 121 is coupled in tension and a mask frame 123 to which the sheet mask stick 121 is attached while being supported on the sheet mask stick 121, (130).

The sheet mask stick 121 is a portion substantially in contact with the substrate. The sheet mask stick 121 may have a plurality of through holes 121a through which the deposition material passes. Since the size, shape, and number of the through holes 121a may be different from those shown in the drawings, the scope of the present invention is not limited to the shapes of the drawings. The deposition material from the source 110 described with reference to FIG. 2 can be deposited only through the through hole 121a of the sheet mask stick 121 to the substrate.

In order to deposit a large-size OLED substrate having a length of 2 m or more, the size of the split mask 120 must be increased to match the size of a large substrate, Can be applied. Three sheet mask sticks 121 are shown in the figure, which is shown for convenience only, and the number and size of sheet mask sticks 121 may be different from those in the drawings.

The sheet mask sticks 121 may all have the same structure. The sheet mask sticks 121 can be welded, i.e., laser welded, to the mask frame 123 while being stretched in opposite directions by a separate tensioner.

The mask frame 123 is a place where the sheet mask stick 121 is pulled and engaged. The mask frame 123 may have a hollow framed structure, as shown. The mask frame 123 as well as the sheet mask stick 121 may be made of a metal material as a magnetic material.

The shadow preventive stick supporter 130 is a magnetic substance made of a metal material disposed between the mask frame 123 and the sheet mask stick 121. The shadow mask stick 121 has a shadow phenomenon So that the sheet mask stick 121 is prevented from being damaged.

Particularly, in the present embodiment, the shadow preventive stick supporter 130 is provided with the sheet mask stick 121 in a state of being on one side of the sheet mask stick 121, that is, side by side with the sheet mask stick 121, . Therefore, even if the sheet mask stick 121 is pulled and welded to the mask frame 123, it is possible to prevent a shadow phenomenon due to bending of the sheet mask stick 121 from occurring.

In the present embodiment, the shadow preventive stick supporter 130 includes a plurality of cover mask parts 131 arranged in parallel with each other, a plurality of cover masks 131 arranged in a crossing manner to the plurality of cover mask parts 131, And a cross bar mask part 133. The cross bar mask part 133 may include a cross bar mask part.

At this time, in the case of this embodiment, the cover mask portion 131 and the cross bar mask portion 133 have the same thickness and can be manufactured as one body.

The cover mask portion 131 and the cross bar mask portion 133 have the same thickness and are integrally manufactured so that the shadow mask stick portion 131 and the cross bar mask portion 133, 130 can form a so-called plate-like sheet structure with no step, thereby avoiding bumping on the substrate or inducing bending on the substrate. Therefore, the shadowing phenomenon does not occur during the deposition process, and the deposition quality of the substrate can be improved.

Particularly, in this embodiment, since the cover mask portion 131 and the cross bar mask portion 133 are provided integrally with the same thickness, they cover between the sheet mask stick 121 and the sheet mask stick 121, But also to prevent the sheet mask stick 121 from being opened when it is attached to the substrate.

Such a shadow preventive stick supporter 130 may be made thicker than the thickness of the sheet mask stick 121 in the present embodiment and may be previously bonded onto the mask frame 123 before the sheet mask stick 121 is welded. have.

The through hole 121a of the sheet mask stick 121 may be disposed in a space formed between the cover mask portion 131 and the cross bar mask portion 133. [

Hereinafter, the process of depositing on the substrate through the substrate deposition apparatus according to the present embodiment will be described.

As shown in FIG. 3, the substrate is loaded on the divided type mask 120 with the cooling plate 140 being operated up.

Then, the up / down driving unit 181 is operated. When the up / down driving plate 160 is operated down by the operation of the up / down driving unit 181 as shown in FIG. 5, the cooling plate 140 is pressed down against the surface of the substrate while the cooling plate 140 is down .

At this time, due to the operation of the up / down driving plate 160 by the up / down driving unit 181, the cooling plate 140 is lowered to the position required in the process, and then the cooling plate 140 is cooled So that the plate 140 is pressed against the surface of the substrate.

10) can be applied to the cooling plate 140, a magnetic attracting force may be generated between the magnet and the split mask 120 when the cooling plate 140 is pressed against the surface of the substrate So that the cooling plate 140, the substrate, and the split mask 120 can be completely bonded together in one body.

When the attachment between the cooling plate 140, the substrate, and the split mask 120 is completed, the rotation driving unit 183 is operated. That is, when the rotary motor 183b of the rotary drive unit 183 is operated as shown in FIG. 6, the rotary frame 183a can be rotated in one direction by the second motion transmission unit 183c, The process can proceed.

6, the cooling plate 140, the substrate, and the partitioning type mask 120 are disposed as they are, and the deposition process is performed on the substrate while being rotated with the source 110. As described above, Even if any method is applied, a uniform deposition film can be formed on the substrate since no shadow phenomenon occurs in the division type mask 120 during the deposition process for the substrate.

According to this embodiment having the structure and operation as described above, it is possible to prevent the occurrence of a shadow phenomenon during a deposition process through a simple and compact structure, thereby improving the deposition quality of the substrate do.

12 is a perspective view of FIG. 11, FIG. 13 is an exploded perspective view of FIG. 12, and FIG. 14 is a cross-sectional view of the cover mask portion and the cross bar FIG. 15 is a schematic cross-sectional view taken along line BB of FIG. 11, and is a view for showing a correlation with a substrate. FIG.

Referring to these drawings, the split mask 220 according to the present embodiment also includes a sheet mask stick 121, a mask frame 123 to which the sheet mask stick 121 is coupled in tension, And a shadow preventive stick supporter 230 which supports the sheet mask stick 121 on one side with the sheet mask stick 121. [

The structure and role of the sheet mask stick 121 and the mask frame 123 are the same as those described in the above embodiment. Avoid duplicate descriptions.

The shadow preventive stick supporter 230 also includes a plurality of cover mask parts 231 arranged in parallel with each other and a plurality of cross bars 223 disposed crosswise to the plurality of cover mask parts 231 and arranged in parallel to each other. And a mask part 233 (cross bar mask part).

The cover mask portion 231 serves to prevent deposition by covering the space between the sheet mask stick 121 and the sheet mask stick 121. The cross bar mask portion 233 is provided on the sheet mask stick 121 ) To prevent this from happening.

The shadow preventive stick supporter 230 applied to the present embodiment also plays a role of supporting the sheet mask stick 121 on one side with the sheet mask stick 121. However, its structure is slightly different from the above-described embodiment.

That is, in this embodiment, the thicknesses of the cover mask portion 231 and the cross bar mask portion 233 are made different from each other. That is, the thickness of the crossbar mask portion 233 is made thicker than the thickness of the cover mask portion 231.

At this time, the crossbar mask portion 233 is formed with an insertion groove 233a in which the cover mask portion 231 is inserted and positioned. The depth of the insertion groove 233a for positioning and the depth of the cover mask portion 231 Are formed to have the same thickness.

Even if the thicknesses of the cover mask portion 231 and the cross bar mask portion 233 are different from each other, the upper surface of the cover mask portion 231 and the cross bar mask portion 233, which are in contact with the substrate, It is possible to form one side parallel to the substrate. Accordingly, since the shadow mask is not generated in the split mask 220 during the deposition process on the substrate, a uniform deposition film can be formed on the substrate.

Even if the present embodiment is applied, it is possible to prevent a shadow phenomenon from occurring in a deposition process through a simple and compact structure, thereby improving the deposition quality of the substrate.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. It is therefore intended that such modifications or alterations be within the scope of the claims appended hereto.

100: chamber 110: source
120: Split-type mask 121: Sheet mask stick
121a: through hole 123: mask frame
130: Shadow prevention stick supporter 131: Cover mask part
133: Crossbar mask part 140: Cooling plate
160: up / down driving plate 181: up / down driving part
183:

Claims (14)

A chamber in which a deposition process for the substrate proceeds; And
A split mask disposed parallel to the substrate in the course of the deposition process and delivering deposition material from a source to the substrate,
In the split mask,
A plurality of sheet mask sticks having a plurality of through holes through which the deposition material from the source passes;
A mask frame to which the sheet mask stick is coupled in tension; And
And a shadow mask disposed between the mask frame and the sheet mask so as to prevent a shadow phenomenon from occurring on the sheet mask stick during the deposition process, And a stick supporter. The method according to claim 1,
The shadow preventive stick supporter includes:
A plurality of cover mask parts arranged in parallel with each other; And
And a plurality of crossbar mask parts arranged crosswise to the plurality of cover mask parts and arranged in parallel with each other. 3. The method of claim 2,
Wherein the cover mask part and the cross bar mask part have the same thickness and are integrally formed. 3. The method of claim 2,
Wherein a through hole of the sheet mask stick is disposed in a space formed between the cover mask portion and the cross bar mask portion. 3. The method of claim 2,
Wherein the cover mask portion and the crossbar mask portion have different thicknesses. 6. The method of claim 5,
Wherein the crossbar mask portion is thicker than the cover mask portion, and the crossbar mask portion is formed with a slot for insertion of the cover mask portion. The method according to claim 6,
Wherein a depth of the insertion recess for seat arrangement and a thickness of the cover mask portion are the same. The method according to claim 1,
The both ends of the sheet mask stick are welded to the mask frame after both ends are pulled in directions opposite to each other,
Wherein the shadow preventive stick supporter is pre-coupled on the mask frame before the sheet mask stick is welded. The method according to claim 1,
The thickness of the shadow mask stick supporter is made thicker than the thickness of the sheet mask stick,
Wherein the substrate is a large OLED substrate. A plurality of sheet mask sticks having a plurality of through holes through which a deposition material from a source provided in the chamber passes;
A mask frame to which the sheet mask stick is coupled in tension; And
And a shadow mask disposed between the mask frame and the sheet mask so as to prevent a shadow phenomenon from occurring on the sheet mask stick during the deposition process, A split mask characterized by comprising a stick supporter. 11. The method of claim 10,
The shadow preventive stick supporter includes:
A plurality of cover mask parts arranged in parallel with each other; And
And a plurality of crossbar mask parts arranged crosswise to the plurality of cover mask parts and arranged in parallel with each other. 12. The method of claim 11,
Wherein the cover mask part and the cross bar mask part have the same thickness and are integrally formed,
Wherein a through hole of the sheet mask stick is disposed in a space formed between the cover mask portion and the cross bar mask portion. 12. The method of claim 11,
Wherein the cover mask portion and the crossbar mask portion have different thicknesses from each other. 14. The method of claim 13,
Wherein the crossbar mask portion is formed to have a thickness larger than the thickness of the cover mask portion, and the crossbar mask portion is formed with an insertion groove for positioning, into which the cover mask portion is inserted,
Wherein a depth of the insertion recess for seat arrangement and a thickness of the cover mask portion are the same.

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