KR20170114196A - Gate valve - Google Patents

Abstract

The present invention relates to a gate valve capable of preventing foreign matter from entering, comprising: a main body in which a first vacuum line and a second vacuum line are formed; Wherein the first vacuum line and the second vacuum line are opened in the first mode and the second vacuum line is opened in the second mode and the second vacuum line is closed in the first mode, A protection movable body provided so as to be movable forward and backward; A sealing member installed between the main body and the protection movable body to maintain airtightness between the main body and the protection movable body; And a wearer installed between the main body and the protection movable body and supporting the protection movable body and guiding movement of the protection movable body.

Description

Gate valve

The present invention relates to a gate valve, and more particularly, to a gate valve capable of preventing the entry of foreign matter.

Generally, the process atmosphere of a chamber for performing a process in a semiconductor device can be variously formed depending on the type of process, that is, etching, deposition, diffusion, and the like. Vacuum pressure may be required in some of the process conditions of such a chamber, and a representative one of them is an exhaust system.

A vacuum pump is indispensable for the formation of the vacuum pressure, and a gate valve may be connected to the pumping line of the vacuum pump.

The gate valve used in semiconductor equipment is connected to a vacuum line. When vacuum is formed in the gate valve to close the gate, various foreign substances generated in the chamber may adversely affect the gate valve. Therefore, A protection ring may be provided.

However, such a conventional protection ring is in direct contact with the valve body, so that the metal and the metal are in simple contact with each other and rubbed against each other. As a result, the contact surface is easily worn and friction force is increased so that the protection ring is caught in the valve body There are many problems such as poor driving performance and low durability.

In addition, in order to prevent foreign matter generated during the semiconductor manufacturing process from being stacked between the protection ring and the valve body to further promote the defective driving, a sealing member made of an elastic material has been conventionally provided. However, And it was easily damaged or the confidentiality failed.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a safety mover for a safety mover which can withstand heavy loads and wear resistance excellent in abrasion resistance, And to provide a gate valve which can improve both durability and airtightness as well as safety driving. However, these problems are exemplary and do not limit the scope of the present invention.

According to an aspect of the present invention, there is provided a gate valve comprising: a main body in which a first vacuum line and a second vacuum line are formed; Wherein the first vacuum line and the second vacuum line are opened in the first mode and the second vacuum line is opened in the second mode and the second vacuum line is closed in the first mode, A protection movable body provided so as to be movable forward and backward; A sealing member installed between the main body and the protection movable body to maintain airtightness between the main body and the protection movable body; And a wearer installed between the main body and the protection movable body and supporting the protection movable body and guiding movement of the protection movable body.

In addition, according to the present invention, the main body includes a suction pipe portion formed at one side so as to form the first vacuum line communicating with the semiconductor equipment, and an outlet pipe portion communicating with the vacuum pump at the opposite side, And a connection pipe portion connected to the cylinder portion is branched between the suction pipe portion and the discharge pipe portion so as to be branched.

According to another aspect of the present invention, there is provided a vacuum cleaner comprising: a vacuum cleaner having a first vacuum line and a second vacuum line, And may be in the form of a pipe which is in close contact with the suction pipe portion and communicates with the suction pipe portion and the discharge pipe portion.

According to the present invention, the protection movable body is formed with a pressure wing portion on a part of an outer diameter surface so that the protection movable body can be moved forward and backward, the body is formed with a receiving portion for receiving the pressure wing portion, A front pressure chamber in which a working medium can be supplied is formed in front of the pressure wing portion and a rear pressure chamber in which a working medium can be supplied is formed behind the pressure wing portion.

In addition, according to the present invention, the wear ring may include: a first wear ring installed on the main body to support the other portion of the outer diameter surface of the protection movable body; And a second wearer installed on the pressure wing portion of the protection movable body to support the body.

In addition, according to the present invention, the sealing member may include: a first sealing member installed on the main body so as to be in close contact with a front outer surface positioned forwardly of the pressure wing portion of the protection movable body; A second sealing member installed on the main body so as to be brought into close contact with a rear outer diameter surface located rearward of the pressure wing portion of the protection movable body; And a third sealing member provided on the pressure wing so as to be in close contact with the main body.

Further, according to the present invention, the wear ring is an open C-ring in which a part of the wear ring is made of a relatively hard material with little change in form when an external force acts, and the sealing member has a large change in shape Ring O-ring made of a soft material.

Also, according to the present invention, the wear ring may have a partial cross-section of a square shape so as to have an excellent load-bearing capacity, and the sealing member may have a circular or oval shape in cross-

Also, according to the present invention, the wear ring may include a fabric structure in which graphite is added.

According to some embodiments of the present invention as described above, the driving safety of the protection movable body can be ensured by using the wear ring, and the sealing member can be disposed in front of or behind the wear ring to provide safety driving as well as durability And the airtightness can be improved, so that the performance and the function of the product can be greatly improved. Of course, the scope of the present invention is not limited by these effects.

1 is an external perspective view of a gate valve in accordance with some embodiments of the present invention.
Fig. 2 is a side view showing the gate valve of Fig. 1 together with the cylinder portion. Fig.
3 is a cross-sectional view showing the second vacuum line opened state of the gate valve of FIG.
Fig. 4 is a cross-sectional view showing the second vacuum line closed state of the gate valve of Fig. 3;
Fig. 5 is an enlarged cross-sectional view showing a wear ring installed on the protection movable body of the gate valve of Fig. 3;
Fig. 6 is a perspective view showing an example of the wear ring of the gate valve of Fig. 3;
7 is a perspective view showing an example of a sealing member of the gate valve of Fig. 3;

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are described in order to more fully explain the present invention to those skilled in the art, and the following embodiments may be modified into various other forms, It is not limited to the embodiment. Rather, these embodiments are provided so that this disclosure will be more thorough and complete, and will fully convey the concept of the invention to those skilled in the art. In the drawings, the thickness and size of each layer are exaggerated for convenience and clarity of explanation.

It is to be understood that throughout the specification, when an element such as a film, region or substrate is referred to as being "on", "connected to", "laminated" or "coupled to" another element, It will be appreciated that elements may be directly "on", "connected", "laminated" or "coupled" to another element, or there may be other elements intervening therebetween. On the other hand, when one element is referred to as being "directly on", "directly connected", or "directly coupled" to another element, it is interpreted that there are no other components intervening therebetween do. Like numbers refer to like elements. As used herein, the term "and / or" includes any and all combinations of one or more of the listed items.

Although the terms first, second, etc. are used herein to describe various elements, components, regions, layers and / or portions, these members, components, regions, layers and / It is obvious that no. These terms are only used to distinguish one member, component, region, layer or section from another region, layer or section. Thus, a first member, component, region, layer or section described below may refer to a second member, component, region, layer or section without departing from the teachings of the present invention.

Also, relative terms such as "top" or "above" and "under" or "below" can be used herein to describe the relationship of certain elements to other elements as illustrated in the Figures. Relative terms are intended to include different orientations of the device in addition to those depicted in the Figures. For example, if the element is inverted in the figures, the elements depicted as being on the upper surface of the other elements will have a direction on the lower surface of the other elements. Thus, the example "top" may include both "under" and "top" directions depending on the particular orientation of the figure. If the elements are oriented in different directions (rotated 90 degrees with respect to the other direction), the relative descriptions used herein can be interpreted accordingly.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a," "an," and "the" include singular forms unless the context clearly dictates otherwise. Also, " comprise "and / or" comprising "when used herein should be interpreted as specifying the presence of stated shapes, numbers, steps, operations, elements, elements, and / And does not preclude the presence or addition of one or more other features, integers, operations, elements, elements, and / or groups.

Hereinafter, embodiments of the present invention will be described with reference to the drawings schematically showing ideal embodiments of the present invention. In the figures, for example, variations in the shape shown may be expected, depending on manufacturing techniques and / or tolerances. Accordingly, the embodiments of the present invention should not be construed as limited to the particular shapes of the regions shown herein, but should include, for example, changes in shape resulting from manufacturing.

Fig. 1 is an external perspective view of a gate valve 100 according to some embodiments of the present invention, Fig. 2 is a side view showing the gate valve 100 of Fig. 1 together with a cylinder portion 1, Fig. 3 is a cross- FIG. 4 is a cross-sectional view showing the second vacuum line closed state of the gate valve 100 of FIG. 3; FIG. 4 is a cross-sectional view showing the second vacuum line opened state of the gate valve 100 of FIG.

1 to 4, a gate valve 100 according to some embodiments of the present invention includes a main body 10, a protection movable body 20, a sealing member 30, And a wear ring 40.

1 to 4, the main body 10 includes a first vacuum line connected to a vacuum pump (not shown) and a branch line formed with a second vacuum line connected to the cylinder 1 Lt; RTI ID = 0.0 > pipe-shaped < / RTI >

More specifically, for example, as shown in FIGS. 1 to 4, the main body 10 has a suction pipe part 11 formed at one side so as to form the first vacuum line, and a discharge pipe part 12 And a connection pipe portion 13 connected to the cylinder portion 1 is formed between the suction pipe portion 11 and the discharge pipe portion 12 so as to form the second vacuum line. Shaped pipe shape. However, the shape of the main body 10 is not limited to the drawings, and a pipe shape including a plurality of branch tubes such as 4-way or 5-way can be applied.

1 to 4, the shape of the suction pipe part 11 and the discharge pipe part 12 is a circular pipe, and the shape of the connecting pipe part 13 is a square pipe shape Lt; / RTI > However, the present invention is not limited thereto, and pipes of various shapes can be applied.

3, a semiconductor process chamber is connected to the suction pipe unit 11 of FIG. 3, the vacuum pump is connected to the discharge pipe unit 12, Can be connected to the connecting tube portion (13).

3, the suction pipe part 11 and the discharge pipe part 12 communicate with each other, and the connection pipe part 13 is also connected to the suction pipe part 11 and the discharge pipe part 12 All of which can be communicated, so that the vacuum pressure can be applied to both the first vacuum line and the second vacuum line.

3, the protection movable body 20 is installed inside the main body 10 and can be moved. In the first mode, as shown in FIG. 3, A second vacuum line, a second vacuum line, a second vacuum line, a second vacuum line, a second vacuum line, and a second vacuum line, Structure.

Therefore, the protection movable body 20 can slide within the body 10, and the sliding movement can be a forward / backward linear reciprocation movement.

More specifically, for example, as shown in FIG. 3, when the vacuum pressure is formed in the second vacuum line, the protection movable body 20 prevents foreign matter from flowing in the direction of the cylinder 1 A communication hole 21 is formed in the second vacuum line so as to close the second vacuum line so that the second vacuum line can be closed and a pipe which is in close contact with the suction pipe part 11 to communicate the suction pipe part 11 and the discharge pipe part 12 Lt; / RTI >

The protection movable body 20 can be moved inside the main body 10 by the pressure of the working medium.

For example, as shown in FIG. 3, the protection movable body 20 has a pressure wing portion 22 formed at a portion of an outer diameter surface thereof so that the protection movable body 20 can be moved forward and backward, The main body 10 is formed with a receiving portion A for receiving the pressure wing portion 22 and the receiving portion A is provided at a front side of the pressure wing portion 22 with a front pressure A rear pressure chamber A2 can be formed in which a chamber A1 is formed and a working medium can be supplied to the rear of the pressure wing portion 22. [

Accordingly, when the working medium is supplied to the front pressure chamber A1 and the working medium of the rear pressure chamber A2 is discharged, positive pressure is applied to the front of the pressure wing portion 22 of the protection movable body 20 And a negative pressure acts on the rear of the pressure wing portion 22, so that the protection movable body 20 can be moved backward.

Conversely, when the working medium is supplied to the rear pressure chamber A2 and the working medium of the front pressure chamber A1 is discharged, positive pressure is applied to the rear side of the pressure wing portion 22 of the protection movable body 20 And a negative pressure acts on the front of the pressure wing portion 22, so that the protection movable body 20 can be advanced. Therefore, the protection movable body 20 can be moved back and forth by using the pressures of various working media such as air, gas, and oil.

3 and 4, the sealing member 30 is installed between the main body 10 and the protection movable body 20, and the main body 10 and the protection movable body 20, (20). ≪ / RTI >

3 and 4, the wearer 40 is installed between the main body 10 and the protection movable body 20, supports the protection movable body 20, And may be a hard wear-resistant member for guiding the movement of the protection movable body 20. [

3 and 4, the operation of the gate valve 100 according to some embodiments of the present invention will be described step by step. First, as shown in FIG. 3, When positive pressure acts on the front side of the pressure wing portion 22 of the protection movable body 20 when the working medium is supplied to the pressure chamber A1 and the working medium of the rear pressure chamber A2 is discharged, A negative pressure acts on the rear side of the portion 22 so that the protection movable body 20 can be moved backward.

The suction pipe portion 11 of the main body 10 communicates with the discharge pipe portion 12 by the communication hole 21 formed in the protection movable body 20 so that the first vacuum line And the second vacuum line can also be opened because the connection portion 13 is opened because the protection movable body 20 is moved backward.

Accordingly, vacuum pressure can always be formed in the chamber of the semiconductor equipment through the first vacuum line, and the cylinder part 1 can be operated through the second vacuum line to open and close the gate.

When the operation of the cylinder part 1 is completed, the protection movable body 20 can be advanced so that various foreign substances flowing in the first vacuum line in the direction of the cylinder part 1 are not moved.

That is, when the working medium is supplied to the rear pressure chamber A2 and the working medium of the front pressure chamber A1 is discharged, positive pressure is applied to the rear side of the pressure wing portion 22 of the protection movable body 20 And a negative pressure acts on the front of the pressure wing portion 22, so that the protection movable body 20 can be advanced.

The protection movable body 20 is brought into contact with the suction pipe unit 11 and is brought into close contact with the communication pipe unit 13 while being in close contact with the communication hole 21 and the suction pipe unit 11 of the protection movable body 20. [ Lt; / RTI >

At this time, the sealing member 30 keeps airtightness between the respective parts, and the wear ring 40 is excellent in wear resistance and durability, so that the protection movable body 20 is guided smoothly sliding, 20 can be firmly supported.

Therefore, it is possible to secure the driving safety of the protection movable body 20 by using the wear ring 40, which can withstand the heavy load and is excellent in abrasion resistance, and the sealing member 30 can be secured to the front or rear of the wear ring 40. [ So that the durability and the airtightness can be improved as well as the safety driving, and the performance and the function of the product can be greatly improved.

5 is an enlarged sectional view showing a wear ring 40 installed on the protection movable body 20 of the gate valve 100 of FIG.

5, the wearer 40 supports the other portion of the outer diameter surface of the protection movable body 20 so that the protection movable body 20 can be supported at two spaced apart points. A first wear ring 41 installed in the main body 10 and a second wear ring 42 installed in the pressure wing portion 22 of the protection movable body 20 to support the main body 10 have.

5, the sealing member 30 provided at the front or the rear of the wear ring 40 is positioned forward of the pressure wing portion 22 of the protection movable body 20, A first sealing member 31 installed on the main body 10 so as to be in close contact with a front outer surface of the protection movable body 20 and a second sealing member 31 disposed on the rear side of the pressure wing portion 22 of the protection movable body 20 A second sealing member 32 provided on the main body 10 so as to be in close contact with the rear outer surface and a third sealing member 33 mounted on the pressure wing 22 so as to be in close contact with the main body 10, ).

Thus, the wearer 40 and the sealing member 30 are disposed adjacent to each other to improve durability and maintain airtightness.

6 is a perspective view showing an example of the wear ring 40 of the gate valve 100 of FIG.

6, the wear ring 40 may be an open C-ring in which a part of the opening portion 40a made of a relatively hard material with little change in external force action is cut, The wing 40a facilitates the detachment or installation of the wearer 40. When the wing 40 is installed on the main body 10 or the protection movable body 20, the gap can be narrowed to be brought into contact with each other.

For example, the wearer 40 may include a fabric structure including graphite, which is excellent in wear resistance and durability and has a low coefficient of friction. Therefore, the fine fabric structure of the graphite material can greatly improve the movement and abrasion resistance of the protection movable body 20.

In addition, the wear ring 40 may have a rectangular cross-sectional shape so that the load resistance is excellent. However, the present invention is not limited to the drawings, and a wide variety of ring shapes and cross-sectional shapes can be applied.

7 is a perspective view showing an example of the sealing member 30 of the gate valve 100 of Fig.

As shown in FIG. 7, the sealing member 30 is a closed O-ring made of a relatively soft material having a large change in shape in the action of an external force and has a circular cross section or an elliptical cross section .

While the present invention has been described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

1:
10: Body
11:
12: exhaust pipe
13:
20: Protection movable body
21: communication hole
22: pressure wing
30: sealing member
40: Wear ring
100: Gate valve

Claims (9)

A main body in which a first vacuum line and a second vacuum line are formed;
Wherein the first vacuum line and the second vacuum line are opened in the first mode and the second vacuum line is opened in the second mode and the second vacuum line is closed in the first mode, A protection movable body provided so as to be movable forward and backward; And
A wearer installed between the main body and the protection movable body for supporting the protection movable body and guiding the movement of the protection movable body;
And a gate valve. The method according to claim 1,
The main body includes:
A suction pipe part is formed at one side so as to form the first vacuum line communicating with the semiconductor equipment and an outlet pipe part communicating with the vacuum pump is formed at the opposite side, Wherein the connecting pipe portion connected to the cylinder portion is formed in a branched shape. 3. The method of claim 2,
The protection movable body includes:
When a vacuum is formed in the second vacuum line, a communication hole is formed in the second vacuum line so as to close the second vacuum line so as to prevent foreign matter from flowing toward the cylinder, And is in the form of a pipe for communicating the suction pipe portion and the discharge pipe portion. The method of claim 3,
A pressure wing portion is formed on a portion of an outer diameter surface of the protection movable body so that the protection movable body can be moved forward and backward, and the main body is provided with a receiving portion for receiving the pressure wing portion, Wherein a front pressure chamber to which a medium can be supplied is formed and a rear pressure chamber in which a working medium can be supplied is formed behind the pressure wing portion. 5. The method of claim 4,
Preferably,
A first wearer installed on the main body to support the other portion of the outer diameter surface of the protection movable body; And
A second wearer installed on the pressure wing portion of the protection movable body to support the body;
And a gate valve. 6. The method of claim 5,
And a sealing member installed between the main body and the protection movable body to maintain airtightness between the main body and the protection movable body,
Wherein the sealing member comprises:
A first sealing member installed on the main body so as to be in close contact with a front outer diameter surface positioned forward with respect to the pressure wing portion of the protection movable body;
A second sealing member installed on the main body so as to be brought into close contact with a rear outer diameter surface located rearward of the pressure wing portion of the protection movable body; And
A third sealing member installed on the pressure wing so as to be in close contact with the main body;
. The method according to claim 6,
The wear ring is a partially cut open C-ring made of a relatively hard material with little change in shape when an external force acts,
Wherein the sealing member is a closed O-ring made of a material having a relatively large change in shape when an external force acts and is relatively soft. The method according to claim 6,
The wear ring has a rectangular cross-section at its partial cross section so as to have an excellent load-
Wherein the sealing member has a circular or elliptical shape in partial cross-section so as to provide excellent elastic contact. The method according to claim 1,
Wherein the wear ring includes a fabric structure with graphite added thereto.

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