KR20170094700A - Gas sensor and method for manufacturing the gas sensor - Google Patents

Gas sensor and method for manufacturing the gas sensor Download PDF

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Publication number
KR20170094700A
KR20170094700A KR1020160015809A KR20160015809A KR20170094700A KR 20170094700 A KR20170094700 A KR 20170094700A KR 1020160015809 A KR1020160015809 A KR 1020160015809A KR 20160015809 A KR20160015809 A KR 20160015809A KR 20170094700 A KR20170094700 A KR 20170094700A
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structure particles
hollow structure
nanospherical
sensing
particles
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KR1020160015809A
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Korean (ko)
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이성은
김선중
이병기
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엘지전자 주식회사
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Publication of KR20170094700A publication Critical patent/KR20170094700A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/304—Gas permeable electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases

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  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
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  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

The present invention provides a gas sensor and a method for manufacturing the gas sensor. The gas sensor comprises: a substrate; a sensing electrode formed on the substrate; and a sensing layer formed to cover the substrate and the sensing electrode and having a sensing material which reacts with a gas to be detected and causes an electrical change. The sensing material comprises: hollow structure particles composed of metal oxide; and nanospherical structure particles composed of metal oxide. The method for manufacturing the gas sensor comprises: a step in which the hollow structure particles composed of metal oxide and the nanospherical structure particles composed of metal oxide are respectively synthesized; a step in which an organic binder, the hollow structure particles, and the nanospherical structure particles are mixed and dispersed to prepare a paste composition; a step in which the paste composition is applied on the sensing electrode; and a step in which the organic binder is thermally decomposed to form the sensing layer on the sensing electrode.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a gas sensor,

The present invention relates to a gas sensor having a sensitive and highly durable sensing layer and a method of manufacturing the gas sensor.

The gas sensor refers to a device for detecting the presence or absence of a detection target gas and its concentration based on physical, electrical, or chemical changes that occur as a result of contact with a detection target gas.

Recently, smart gas sensors suitable for the Internet of Things (IOT) era are undergoing various studies, and demand for gas sensors with high sensitivity, low cost, low power consumption and high durability is expected to increase. In particular, traditional metal oxide based gas sensors are being applied to various applications, and the demand for high sensitivity and high durability is expected to be even higher.

However, studies on conventional gas sensors have mainly focused on improvement of sensitivity, and studies for improving the durability of gas sensors have been lacking relatively. If the durability of the gas sensor is insufficient, it can not be continuously used even if it is highly sensitive. Therefore, not only improving the sensitivity of the gas sensor but also improving the durability of the gas sensor is also an element for improving the performance of the gas sensor.

In order for the gas sensor to be used for a long time, it must have high durability and the resistance of the baseline should be stably maintained. However, conventional gas sensors do not have strong interfacial adhesion due to insufficient filling density and contact area.

An object of the present invention is to propose a sensing layer having both high sensitivity and high durability, a gas sensor including the sensing layer, and a method of manufacturing the gas sensor.

Another object of the present invention is to provide a sensing layer having a strong interfacial adhesion without being peeled from a substrate or a sensing electrode, a gas sensor including the sensing layer, and a method of manufacturing the gas sensor.

Another object of the present invention is to propose a sensing layer having a high sensitivity characteristic through a large surface area and smooth gas entry / exit structure, a gas sensor including the sensing layer, and a method of manufacturing the gas sensor.

According to an aspect of the present invention, there is provided a gas sensor comprising: a substrate; A sensing electrode formed on the substrate; And a sensing layer formed to cover the substrate and the sensing electrode, the sensing layer including a sensing material that reacts with the sensing target gas to cause an electrical change, the sensing material comprising hollow structure particles made of a metal oxide; And nanoscale spherical particles composed of a metal oxide.

According to one embodiment of the present invention, the hollow structure particles are contained in an amount of 10 to 60 wt% and the nanospherical structure particles are contained in an amount of 40 to 90 wt%.

According to another embodiment of the present invention, the hollow structure particles have a size of 400 to 1,500 nm.

According to another embodiment of the present invention, the nanoporous structure particles have a size of 10 to 150 nm.

According to another embodiment of the present invention, the sensing layer includes an additive that provides an adhesive force to be adhered to the substrate or the sensing material, and the additive is made of silica or alumina.

In order to achieve the above object, the present invention also discloses a method of manufacturing a gas sensor. A method of manufacturing a gas sensor includes the steps of synthesizing nanospherical structure particles each composed of hollow structure particles made of metal oxide and metal oxide; Mixing and dispersing the organic binder, the hollow structure particles and the nanospherical structure particles to prepare a paste composition; Applying the paste composition over the sensing electrode; And pyrolyzing the organic binder to form a sensing layer on the sensing electrode.

According to an embodiment of the present invention, the organic binder is 40 to 70% by weight in 100% by weight of the paste composition, and the sum of the hollow structure particles and the nanospherical structure particles is 30 to 60% by weight.

The hollow structure particles are 10 to 60 wt% and the nanospherical structure particles are 40 to 90 wt% in a total amount of 100 wt% of the hollow structure particles and the nanospherical structure particles.

According to another embodiment of the present invention, the organic binder is selected from the group consisting of alpha-terpineol, diethylene glycol butyl ether acetate (DGBEA), and butyl carbitol acetate carbitol acetate, and Texanol; And at least one polymer selected from the group consisting of Ethylcellulose and Nitrocellulose, which is formed to increase the viscosity of the organic solvent.

According to another embodiment of the present invention, the hollow structure particles have a size of 400 to 1,500 nm.

According to another embodiment of the present invention, the nanoporous structure particles have a size of 10 to 150 nm.

According to another embodiment of the present invention, the paste composition comprises an additive that provides adhesion, and the additive comprises a silica precursor or an alumina precursor.

The organic binder is 30 to 70 wt%, the additive is 2 to 10 wt%, and the sum of the hollow structure particles and the nanospherical structure particles is 20 to 60 wt% in 100 wt% of the paste composition.

The hollow structure particles are 10 to 60 wt% and the nanospherical structure particles are 40 to 90 wt% in a total amount of 100 wt% of the hollow structure particles and the nanospherical structure particles.

According to the present invention, the sensing layer includes a sensing material, and the sensing material includes hollow structure particles and nanospherical structure particles.

Since the hollow structure particles have a limited secondary aggregation phenomenon in the thermal decomposition process, the surface area due to the pyrolysis process is not greatly reduced in the hollow structure particles. The hollow structure particles also have holes in the center. Therefore, since the gas to be detected can flow smoothly into and out of the hollow structure particles, the hollow structure particles can realize a gas sensor with high sensitivity.

Nanospherical structure particles can fill the voids between hollow structure particles to improve the filling density of the sensing layer. The nanospherical structure particles can increase the interfacial adhesion with the substrate or the sensing electrode, thereby realizing a highly durable gas sensor.

1 is a conceptual view of a gas sensor according to an embodiment of the present invention.
2A is an enlarged view of hollow structure particles made of a metal oxide.
Fig. 2B is an enlarged view of a nanospherical structure particle made of a metal oxide.
FIG. 3A is a sectional view showing the sensing layer of the present invention formed on the sensing electrode.
3B is a cross-sectional image of hollow structure particles formed on the sensing electrode.
3C is a cross-sectional image of a nanoporous structure particle formed on the sensing electrode.
4 is a graph showing the sensitivity of the gas sensor having the sensing layer of the present invention compared with the sensitivity of other gas sensors.
5A to 5C are images showing the durability of the gas sensor having the sensing layer of the present invention compared with the durability of other gas sensors.
6 is a flowchart illustrating a method of manufacturing a gas sensor according to an embodiment of the present invention.

Hereinafter, a gas sensor according to the present invention and a method for manufacturing the gas sensor will be described in detail with reference to the drawings. As used herein, the singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise.

1. Gas sensor 100:

1 is a conceptual view of a gas sensor 100 according to an embodiment of the present invention.

The gas sensor 100 includes a substrate 110, a sensing electrode 120, and a sensing layer 130.

The substrate 110 is configured to support the sensing electrode 120 and the sensing layer 130. The substrate 110 may have the shape of a generally flat plate. The substrate 110 may be formed of an alumina substrate or a MEMS heater platform substrate. The sensing electrode 120 and the sensing layer 130 are formed on one surface of the substrate 110.

The substrate 110 may have ductility. Generally, since the gas sensor 100 is formed to have a very thin thickness, if the substrate 110 is not ductile, it can be easily broken by an external force. However, if the substrate 110 is ductile, the gas sensor 100 may have high reliability against repetitive mechanical deformation.

The sensing electrode 120 is formed on the substrate 110. Two sensing electrodes 120 are provided and may be spaced apart from each other. When the sensing material of the sensing layer 130 is brought into contact with the gas to be detected, an electrical change (for example, an impedance change) occurs. The sensing electrode 120 senses the electrical change and determines the presence / .

The sensing layer 130 comprises a sensing material. The sensing material is made to react with the gas to be detected to cause an electrical change. The electrical change is measured at the sensing electrode 120.

The sensing layer 130 is formed to cover the substrate 110 and the sensing electrode 120. The sensing layer 130 covers the two sensing electrodes 120 and the substrate 110. An interface is present between the sensing layer 130 and the substrate 110 and an interface is also present between the sensing layer 130 and the sensing electrode 120.

The present invention proposes a highly durable sensing layer 130 that can inhibit peeling of the sensing layer 130 from occurring at the interface. The sensing material includes hollow structure particles and nanospherical structure particles so that the sensing layer 130 can have high sensitivity and high durability.

Hollow structure particles and nanospherical structure particles will be described with reference to FIGS. 2A and 2B.

2A is an enlarged view of hollow structure particles made of a metal oxide. Fig. 2B is an enlarged view of a nanospherical structure particle made of a metal oxide.

Referring to FIG. 2A, hollow structure particles have a hollow structure. A hollow structure refers to a three-dimensional solid structure having a hole in the center. For example, a hollow cylinder corresponds to the hollow structure. Referring to FIG. 2A, it can be visually confirmed that holes are formed at the center of the particles.

The hollow structure particles are suitable for realizing the gas sensor 100 with high sensitivity. As will be described later, the manufacturing method of the gas sensor 100 includes a heat treatment step. Secondary agglomeration of the sensing material may occur in this heat treatment step, and secondary agglomeration may cause reduction of the surface area, thereby deteriorating the sensitivity of the gas sensor 100. However, the hollow structure particles have a limited secondary aggregation phenomenon in the heat treatment process. Therefore, if the sensing material includes hollow structure particles, it is possible to suppress a decrease in sensitivity due to reduction in surface area.

 The hollow structure particles also have holes in the center. Thus, the gas to be detected can flow smoothly into and out of the hollow structure particles. If the gas can be smoothly introduced into the hollow structure particles, the sensitivity of the gas sensor 100 increases because the chance of contact between the gas and the sensing material increases. Therefore, if the sensing material includes hollow structure particles, a gas sensor 100 with high sensitivity can be realized.

Referring to FIG. 2B, the nanoporous structure particles have a spherical structure. A spherical structure is a form closer to a sphere than a complete sphere. Referring to FIG. 2B, it can be visually confirmed that the particles have a shape close to a sphere.

Nanospherical structure particles are smaller than hollow structure particles because they consist of nano-sized particles. Thus, nanoporous structured particles can fill voids between hollow structure particles.

For example, hollow structure particles have a size of 400 to 1,500 nm. On the other hand, nanoporous structure particles have a size of 10 to 150 nm. There is a gap between the hollow structure particles. Since the nanospherical particles are smaller than the hollow particles, the nanospheres can fill the voids between the hollow particles.

The hollow structure particles do not have strong interfacial adhesion because they have a low filling density and a small contact area on the electrode surface compared with the nanospherical structure particles. However, as the nanospherical particles fill the voids between the hollow particles, the interfacial adhesion of the particles can be improved compared to the hollow particles.

On the contrary, in the heat treatment process, the surface area of the nanoparticle structure particles is reduced due to the secondary aggregation phenomenon, which may result in lowering of the sensitivity of the gas sensor. However, since the hollow structure particles compensate for the problem of lowering the sensitivity of the nanoparticle structure particles, the sensing material of the present invention can have a higher sensitivity characteristic than the sensing material composed only of the nanoparticle structure particles.

If the ratio of the hollow structure particles to the nanospherical structure particles in a certain amount of sensing material increases, the sensitivity of the gas sensor increases and the durability of the gas sensor deteriorates. On the contrary, when the ratio of the nanospherical structure particles to the hollow structure particles increases, the sensitivity of the gas sensor decreases and the durability of the gas sensor increases. Hollow structure particles and nanospherical structure particles are complementary. In the present invention, the hollow structure particles are set to 10 to 60 wt% and the nanospherical structure particles are set to 40 to 90 wt% in 100 wt% of the sensing material so that the gas sensor has appropriate sensitivity and proper durability .

Gas sensors are preferable as they have a high sensitivity, but durability is more important than sensitivity when they have a certain level of sensitivity. In the present invention, the gas sensor is designed to have high sensitivity and high durability by setting the ratio of the hollow structure particle to the nanospherical structure particle within the above range.

The hollow structure particles and the nanospherical structure particles are made of a metal oxide. In the present invention, a metal oxide which reacts with a detection target gas to cause an electrical change can be applied. For example, the metal oxide of the present invention includes SnO 2 , In 2 O 3 , WO 3 , ZnO and the like.

Referring again to FIG. 1, the sensing layer 130 may further include an additive. The sensing layer 130 should be adhered to the substrate 110 or the sensing electrode 120 to prevent peeling from the substrate 110 or the sensing electrode 120. The additive provides an adhesion force for adhesion. The additive may be composed of, for example, silica or alumina. Silica or alumina may provide an adhesion to the sensing layer 130 to improve the durability of the gas sensor.

Hereinafter, the sensing material of the present invention is compared with a sensing material made of only hollow structure particles and a sensing material made of only nanospherical structure particles.

FIG. 3A is a sectional view showing the sensing layer of the present invention formed on the sensing electrode. 3B is a cross-sectional image of hollow structure particles formed on the sensing electrode. 3C is a cross-sectional image of a nanoporous structure particle formed on the sensing electrode.

First, referring to FIG. 3A, it can be visually confirmed that nanospherical structure particles are filled in voids between hollow structure particles to increase the filling rate. The durability of the gas sensor can be increased since the void is filled by the nanospherical structure particles.

On the other hand, referring to FIG. 3B, it can be visually recognized that the sensing material made of only the hollow structure particles has a lower filling rate than the sensing material of FIG. 3A. Therefore, the gas sensor of FIG. 3B does not have sufficient durability.

Also, referring to FIG. 3C, it can be visually recognized that the sensing material made of only the nanospherical structure particles has the highest filling rate. However, the sensing material composed only of nanospherical particles undergoes a decrease in surface area due to secondary agglomeration in the heat treatment process, and therefore, it has a low sensitivity.

4 is a graph showing the sensitivity of the gas sensor having the sensing layer of the present invention compared with the sensitivity of other gas sensors.

The vertical axis of the graph represents the relative sensitivity. 10 ppm ethanol was selected as the gas to be detected and the relative sensitivity was measured at 400 ° C. Since the sensing material of the present invention includes both the hollow structure particles and the nanospherical structure particles, the sensing material exhibits higher sensitivity than the sensing material made of only the nanospherical structure particles.

The sensing material of the present invention exhibits lower sensitivity than that of the sensing material made only of the hollow structure particles, but has a higher durability than the sensing material made of only hollow structure particles.

5A to 5C are images showing the durability of the gas sensor having the sensing layer of the present invention compared with the durability of other gas sensors.

The durability test was carried out by attaching a commercial tape (peel force 250 N / m) on the substrate and the sensing layer formed on the sensing material and observing whether the sensing layer remained on the substrate and the sensing material or peeled off when the tape was removed from the substrate and the sensing material. .

FIG. 5A shows the sensing layer of the present invention, FIG. 5B shows the sensing layer having only the hollow structure particles, and FIG. 5C shows the sensing layer having the sensing material having only the nanospherical structure particles.

5b, the sensing layer is peeled off and the sensing electrode is exposed. The white portion of the image corresponds to the sensing electrode. by teeth

On the other hand, referring to FIGS. 5A and 5C, the sensing electrode is not exposed. This means that the sensing layer is bonded to the sensing electrode without peeling from the sensing electrode. From this, it can be seen that the sensing layer (FIG. 5A) having a sensing material including nanospherical structure particles and the sensing layer (FIG. 5C) having a sensing material made of only nanospherical structure particles have high durability.

2. Manufacturing method of gas sensor

6 is a flowchart illustrating a method of manufacturing a gas sensor according to an embodiment of the present invention.

The method of manufacturing the gas sensor includes a step (S100) of synthesizing the hollow structure particles and nanospherical structure particles, a step (S200) of producing the paste composition, a coating step (S300) and a heat treatment step (S400).

In order to manufacture a gas sensor, hollow structure particles and nanospherical structure particles are synthesized first (S100).

The hollow structure particles are made of a metal oxide. In the present invention, a metal oxide which reacts with a detection target gas to cause an electrical change can be applied. For example, the metal oxide of the present invention includes SnO 2 , In 2 O 3 , WO 3 , ZnO and the like.

Hollow structure particles can be prepared by hydrothermal synthesis using carbon templates. The metal oxide particles are synthesized on the outer surface of the spherical carbon template, and the hollow template particles are formed by burning the carbon template. The size of the carbon template is the factor that determines the hole size of the hollow structure particles.

The hollow structure particles have a size of 400 to 1,500 nm.

Nanospherical structure particles are composed of metal oxides. In the present invention, a metal oxide which reacts with a detection target gas to cause an electrical change can be applied. For example, the metal oxide of the present invention includes SnO 2 , In 2 O 3 , WO 3 , ZnO and the like.

Nanospherical structure particles have a size of 10 to 150 nm.

Subsequently, an organic binder, hollow structure particles and nanospherical structure particles are mixed and dispersed to prepare a paste composition (S200).

The organic binder is for the networking of hollow structure nanoparticles with metal oxide particles. Particle-to-particle networking refers to the effect that particles can be prevented from peeling off partially due to strong cohesion.

The organic binder includes an organic solvent and a polymer.

Organic solvents can be applied with low volatility and non-toxic liquids. The organic solvent is selected from the group consisting of alpha-terpineol, diethylene glycol butyl ether acetate (DGBEA), butyl carbitol acetate, and Texanol. Lt; / RTI >

The polymer may be a material capable of increasing the viscosity of the organic solvent. The polymer may be at least one selected from the group consisting of ethylcellulose and nitrocellulose. For example, the polymer may be a mixture of ethylcellulose and nitrocellulose. The polymer is made to increase the viscosity of the organic solvent.

The composition ratio of the paste composition may vary depending on the presence or absence of additives. Hereinafter, the case where no additive is present will be described first.

When no additive is present, the organic binder in the 100 wt% paste composition is 40-70 wt%, and the sum of the hollow structure particles and the nanospherical structure particles is 30-60 wt%. When the organic binder is less than 40% by weight or the sum of the hollow structure particles and the nanospherical structure particles exceeds 60% by weight, the amount of the organic binder in the paste composition is too small to achieve sufficient networking between the particles. When the organic binder is more than 70% by weight or the sum of the hollow structure particles and the nanospherical structure particles is less than 30% by weight, the ratio of the hollow structure particles to the nanospherical structure particles in the paste composition is too small to form the sensing material Loses.

The paste composition may further include an additive that provides an adhesive force. The additive provides adhesion to the paste composition. The additive may be, for example, a silica precursor or an alumina whole sphere. The silica precursor or alumina precursor changes to silica or alumina and provides adhesion to the sensing layer to improve the durability of the gas sensor.

When the additive is present, 30 to 70% by weight of the organic binder is contained in 100% by weight of the paste composition, 2 to 10% by weight of the additive is present, and the sum of the hollow structure particles and the nanospherical structure particles is 20 to 60% by weight. The ratio of organic binder, hollow structure particles and nanospherical structure particles is determined in view of sufficient networking and sensing material formation as described above. It is also undesirable for the additive to occupy too much of the paste composition because it can provide sufficient adhesion even at a small amount of 2% by weight or more, and limits its maximum value to 10% by weight or less.

Regardless of the presence or absence of the additive, the hollow structure particles are 10 to 60% by weight and the nanospherical structure particles are 40 to 90% by weight in 100% by weight of the sum of the hollow structure particles and the nanospherical structure particles. The ratio of the hollow structure particles to the nanospherical structure particles is determined in terms of the sensitivity of the gas sensor and the durability of the gas sensor. As the ratio of the hollow structure particles increases, the sensitivity of the gas sensor increases and the durability of the gas sensor increases as the ratio of the nanospherical structure particles increases.

Gas sensors are preferable as they have a high sensitivity, but durability is more important than sensitivity when they have a certain level of sensitivity. In the present invention, the gas sensor is designed to have high sensitivity and high durability by setting the ratio of the hollow structure particle to the nanospherical structure particle within the above range.

Next, the paste composition is applied onto the sensing electrode (S300). The sensing electrode is formed on the substrate, and the substrate may be formed of an alumina substrate or a MEMS heater platform substrate. Application of the paste composition may be by screen printing or by a dispensing method.

Finally, the paste composition is heat treated (S400). The heat treatment is for pyrolyzing the organic binder. When the organic binder is thermally decomposed to form a sensing layer on the sensing electrode, a sensing layer is formed on the sensing electrode and the substrate.

The sensing layer is composed of hollow structure particles and nanospherical structure particles, and may further include an additive.

The gas sensor and the method of manufacturing the gas sensor described above are not limited to the configurations and the methods of the embodiments described above, but the embodiments may be modified so that all or some of the embodiments are selectively combined .

100: Gas sensor
110: substrate
120: sensing electrode
130: sensing layer

Claims (14)

Board;
A sensing electrode formed on the substrate; And
And a sensing layer formed to cover the substrate and the sensing electrode, the sensing layer being configured to react with the detection target gas to cause an electrical change,
The sensing material may comprise,
Hollow structure particles made of a metal oxide; And
Wherein the gas sensor comprises nanospherical structure particles made of a metal oxide. The method according to claim 1,
Wherein the hollow structure particles in the 100 wt% of the sensing material are 10 to 60 wt%, and the nanospherical structure particles are 40 to 90 wt%. The method according to claim 1,
Wherein the hollow structure particles have a size of 400 to 1,500 nm. The method according to claim 1,
Wherein the nanoporous structure particles have a size of 10 to 150 nm. The method according to claim 1,
Wherein the sensing layer comprises an additive that provides an adhesive force to adhere to the substrate or the sensing material,
Wherein the additive is made of silica or alumina. Synthesizing nano spherical structure particles each composed of a hollow structure particle made of a metal oxide and a metal oxide;
Mixing and dispersing the organic binder, the hollow structure particles and the nanospherical structure particles to prepare a paste composition;
Applying the paste composition over the sensing electrode; And
And pyrolyzing the organic binder to form a sensing layer on the sensing electrode. The method according to claim 6,
Wherein the organic binder is 40 to 70% by weight in 100% by weight of the paste composition, and the sum of the hollow structure particles and the nanospherical structure particles is 30 to 60% by weight. 8. The method of claim 7,
Wherein the hollow structure particles are 10 to 60% by weight and the nanospherical structure particles are 40 to 90% by weight in a total amount of 100% by weight of the hollow structure particles and the nanospherical structure particles. The method according to claim 6,
Wherein the organic binder comprises
An organic acid selected from the group consisting of alpha-terpineol, diethylene glycol butyl ether acetate (DGBEA) and butyl carbitol acetate, Texanol, menstruum; And
Wherein the organic solvent comprises at least one polymer selected from the group consisting of Ethylcellulose and Nitrocellulose to increase the viscosity of the organic solvent. The method according to claim 6,
Wherein the hollow structure particles have a size of 400 to 1,500 nm. The method according to claim 6,
Wherein the nanoporous structure particles have a size of 10 to 150 nm. The method according to claim 6,
Wherein the paste composition comprises an additive providing an adhesive force,
Wherein the additive comprises a silica precursor or an alumina precursor. 13. The method of claim 12,
Wherein the organic binder is 30 to 70 wt%, the additive is 2 to 10 wt%, and the sum of the hollow structure particles and the nanospherical structure particles is 20 to 60 wt% in 100 wt% of the paste composition. The gas sensor comprising: 14. The method of claim 13,
Wherein the hollow structure particles are 10 to 60% by weight and the nanospherical structure particles are 40 to 90% by weight in a total amount of 100% by weight of the hollow structure particles and the nanospherical structure particles.
KR1020160015809A 2016-02-11 2016-02-11 Gas sensor and method for manufacturing the gas sensor KR20170094700A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190054479A (en) * 2017-11-13 2019-05-22 세종공업 주식회사 Catalyst for contact combustion mode gas sensor by using organic-inorganic hybrid binder and coating method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190054479A (en) * 2017-11-13 2019-05-22 세종공업 주식회사 Catalyst for contact combustion mode gas sensor by using organic-inorganic hybrid binder and coating method thereof

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