KR20170087096A - Manufacturing method of invasive bio device for diagnosis and therapy, and thereof bio device - Google Patents

Abstract

TECHNICAL FIELD The present invention relates to a method for manufacturing an invasive biological device for diagnosing and treating a probe and a biomedical device fabricated by the method. In particular, the present invention relates to a method for monitoring an ion and a biological factor present in a real- A method of manufacturing an invasive bioelement capable of releasing a drug suitable for the disease when the factor is detected, and a vertical type micro needle which can invade into a state without causing the death of cells constituting the internal organs and organs, And a biomedical device manufactured by the method. The present invention also provides a method of manufacturing a biomedical device based on a double structure of a micropillar and a nanowire.

Description

TECHNICAL FIELD [0001] The present invention relates to a method of manufacturing an invasive type biosensor for a diagnosis and a treatment probe, and a biosensor manufactured by the method.

The present invention relates to a method of manufacturing a biomedical device, and more particularly, to a method of manufacturing a biomedical device, which is capable of detecting a factor causing disease of the body and capable of releasing a drug for the treatment of the disease, Device manufacturing method and a biomedical device manufactured by the method.

In an aging society, the importance of continuous health monitoring technology is growing more important than ever in order to promote the public health welfare, and it is very important for society to take measures to prevent it through real-time or early diagnosis as well as treatment .

As a method for solving such a problem, a method of using a bio device has been attracting attention, and such a method has been actively adopted more medically.

The term " prevention through early diagnosis and treatment using a biomedical device " refers generally to a method of treating a disease by releasing a drug bound or supported on a biomolecule by attaching to a membrane part of a tissue after an incision, It refers to the detection and diagnosis of cell signaling through an extracellular matrix.

Until now, biomolecules, widely known to the general public, have the function of attaching to the outside of the body and detecting only physical changes such as temperature and pressure in a band form, and biomolecules that detect ions and biological factors occurring in the body are widely It is unknown.

On the other hand, biomedical devices have been developed for the fine detection of the above-described cell signals. Typically, one microneedle is inserted into a human tissue or a micro-extracellular matrix, and the other one is a human tissue Or when it is desired to perform microscopic measurement, it is inserted into a cell and diagnosed through a cell signal detected by ions and biological factors present therein.

However, such a biomolecule is difficult to perform early diagnosis through precise analysis because of microscale, and it causes a problem of tissue damage due to the micro-needle, and more finely cell death of the site, thereby exacerbating diseases caused by inflammation have.

In addition, since the incision is required depending on the part of the human body tissue, the number of treatment steps is increased, and not only the working time of the operation staff increases but also the patient's pain due to the incision and the wound caused thereby, In addition, there is a feeling of mental suffering and economic losses that are not yet popularized for a reason.

Biological devices for detecting ion and biological factors for early diagnosis and treatment of a specific disease include a method of binding a peptide and a drug to a biomolecule using various chemical bonding methods such as an antigen-antibody reaction method Research is actively underway. However, such peptides and the like are irregularly bound to the circuit and the electrodes constituting the bioelectronic element, and thus they are disadvantageous in that it is difficult to detect the electrical signals of the human tissue and the cells and biological factors constituting it.

Accordingly, there is a need for a biomolecule capable of detecting cells and biological factors constituting human tissue in vitro for early diagnosis of a healthy person, as well as not performing an incision process for treatment of a patient regardless of a site of a human body tissue.

In addition, the method of detecting minute electrical signals caused by cells, ions, and biological factors existing in the inside of the cell and blood as well as the extracellular matrix in the state where the cells constituting the target site live, Should be developed and techniques for binding the peptides and drugs necessary for treatment and early diagnosis to the desired site should be developed by controlling the release rate of the drug coated on the surface of the biomolecule at a site in contact with the body tissue requiring treatment .

Korean Patent Laid-Open Publication No. 10-2007-0086221 (public date: August 27, 2007) Korean Patent Laid-Open Publication No. 10-2013-0094214 (public date: Aug. 23, 2013)

A method for manufacturing an invasive biological element for a diagnostic and treatment probe according to the present invention and a bioelement manufactured by the method have the following problems.

First, the present invention relates to a method for monitoring an ion and a biological factor existing in the living body in a state of being attached to the skin in daily life, and a method for producing an invasive biological device capable of releasing a drug suitable for the disease when a specific disease factor is detected To provide.

Secondly, the present invention provides a method of manufacturing a biodegradable element based on a vertical nanowire capable of invading into a state without causing death of cells constituting body tissues and organs, and a biodegradable element manufactured by the method .

The present invention has been made in view of the above problems, and it is an object of the present invention to provide an apparatus and method for controlling the same.

According to a first aspect of the present invention, there is provided a method for manufacturing an invasive biological device for diagnosing and treating a probe, comprising the steps of: (a) forming a micro or nano structure on a substrate; (b) forming a first insulating layer on the substrate and the structure; (c) coating the structure with a conductive material to form an electrode line pattern; (d) forming a second insulating film on the substrate and the structure; (e) etching a second insulating layer over the structure to expose the conductive material and form a probe; And (f) detecting a source of disease in the probe and forming an optional dosage unit comprised of a biochemical that can be dosed.

Preferably, the step (a) is a step of forming at least two nanoproblem structures on a substrate, and the step (a) is a step of depositing 3-aminopropyltriethoxysilane (APTES) Depositing a liquid metal; And growing at least two nanowires on a vapor-deposited substrate by a Vapor-Liquid-Solid (VLS) technique, wherein the step (a) comprises: coating Cr on the substrate; Forming at least two holes of 100 nm to 200 nm on a coated substrate using a focused ion beam (FIB) technique; And forming a nanowire in the hole using a VLS method or a FIB method.

Preferably, the step (a) is a step of forming at least two microstructures by etching a part of the substrate, and the step (a) is a step of forming any one of materials belonging to the group of Al and Si Depositing and selectively etching at least two micro pillars through a high aspect ratio reactive ion etching (DIRE) process; And forming the top of the micropillar into a microneedle structure by a wet etching process or an anisotropic multiple loop etching process.

In addition, in the step (b), it is preferable to form a first insulating film made of SiO ₂ or Al ₂ O ₃ by chemical vapor deposition on the substrate on which the structure is formed, and the step (c) It is preferable that the structure includes a step of coating any one material belonging to the group of Au, Ag, Cu and Pt.

In the step (d), a second insulating layer made of SiO ₂ or Al ₂ O ₃ is formed on the substrate and the structure by chemical vapor deposition, and the step (a) nm to 300 nm and a height of 3 占 퐉 to 10 占 퐉 on a substrate, and the step (a) preferably includes a step of forming a nanostructure having a diameter of 20 占 퐉 to 400 占 퐉 and a height of 50 占 퐉 And forming a microstructure having a thickness of 1,000 占 퐉 on the substrate.

In addition, in the step (f), the selective administration part may be coupled to a top surface of the micro structure or a side surface of the nanostructure, the detection part comprising a spacer for detecting a disease source and a targeting residue. And a drug delivery portion composed of a spacer and a drug, and the spacer is preferably made of a biodegradable polymer.

According to a second aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising: (a) etching a substrate to form a micropillar; (b) forming a nanostructure on top of the micropillar; (c) forming a first insulating layer on the substrate, the micropillar, and the nanostructure; (d) coating a conductive material on the micro-pillars and the nanostructures and forming an electrode line pattern; (e) forming a second insulating film on the substrate, the micropillar, and the nanostructure; (f) etching a second insulating layer over the structure to expose the conductive material and form a probe; And (g) detecting a source of disease in the probe and forming an optional dosage unit comprised of a biochemical that can be dosed.

In the step (a), at least two micro pillars are formed by depositing any one material belonging to the group of Al and Si on the substrate and selectively etching through a high aspect ratio reactive ion etching (DIRE) process ; And forming a micro-needle structure by a wet etching process or an anisotropic-isotropic multi-loop etching process.

The step (b) may further include: depositing 3-aminopropyltriethoxysilane (APTES) on the substrate and depositing a liquid metal; And growing at least two nanowires on a vapor-deposited substrate by a Vapor-Liquid-Solid (VLS) technique, wherein the step (b) comprises: coating Cr on the substrate; Forming at least two holes of 100 nm to 200 nm on a coated substrate using a focused ion beam (FIB) technique; And forming a nanowire in the hole using a VLS method or a FIB method.

In addition, it is preferable that the step (a) is a step of forming a micropillar having a diameter of 20 탆 to 400 탆 and a height of 50 탆 to 1,000 탆 on a substrate, and the step (b) To 300 nm, and a height of 3 탆 to 10 탆, on the substrate.

The selective dosing unit may include a detection unit coupled to a micropillar or a nanostructure side and configured with a spacer and a targeting residue for detecting a disease source; And a drug delivery portion composed of a spacer and a drug.

A third aspect of the present invention is directed to an invasive biodegradable element for a diagnostic and treatment probe, which is manufactured by the above-described method.

A method for manufacturing an invasive biological device for a diagnostic and treatment probe according to the present invention and a bioelement manufactured by the method have the following effects.

First, the present invention is a simple manufacturing method, which can contact cells and blood vessels existing in the dermal layer and thus can detect elements existing in the body without an incision, and inevitably, when an incision process is required, Provided is a method for manufacturing an invasive biological device capable of contacting cells and blood vessels constituting an organ, and capable of detecting nano and pico units.

Secondly, the present invention provides a manufacturing method capable of widening selection of materials for nanowires and micro pillars having conductivity as a sensor element in the method of manufacturing an invasive type biodegradable element.

Thirdly, the present invention relates to a method for manufacturing an invasive type biodegradable device which can be used without difficulty in the skin and tissues and organs and the cells constituting them, taking into account the biocompatibility that does not cause side effects such as rejection when used in the body as well as outside the body. Thereby providing a living body element.

Fourthly, the present invention relates to a method for binding a polymer substance and a drug for treatment for early diagnosis and prevention of diseases to micro pillars and nanowires having a form of a biodegradable element, A method of manufacturing a living body element and a living body element thereof are provided.

The effects of the present invention are not limited to those mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the following description.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a flow chart of a method for manufacturing an invasive biological device for a diagnostic and treatment probe according to an embodiment of the present invention.
2 is a process schematic diagram of a method for manufacturing an invasive biodegradable element for a diagnostic and treatment probe according to an embodiment of the present invention having a nanowire probe structure.
FIG. 3 is a process schematic diagram of a method for manufacturing an invasive biological device for a diagnostic and treatment probe according to an embodiment of the present invention having a micropillar probe structure.
4 is a process schematic diagram of a method for manufacturing an invasive biological device for a diagnostic and treatment probe according to an embodiment of the present invention having a micropillar and a nanowire probe structure.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Wherever possible, the same or similar parts are denoted using the same reference numerals in the drawings.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular forms as used herein include plural forms as long as the phrases do not expressly express the opposite meaning thereto.

Means that a particular feature, region, integer, step, operation, element and / or component is specified and that other specific features, regions, integers, steps, operations, elements, components, and / It does not exclude the existence or addition of a group.

All terms including technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Predefined terms are further interpreted as having a meaning consistent with the relevant technical literature and the present disclosure, and are not to be construed as ideal or very formal meanings unless defined otherwise.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a flow chart of a method for manufacturing an invasive biological device for a diagnostic and treatment probe according to an embodiment of the present invention. As shown in FIG. 1, a method for manufacturing an invasive biological device for a diagnostic and treatment probe according to an embodiment of the present invention includes the steps of: (a) forming a micro or nano structure on a substrate; (b) forming a first insulating layer on the substrate and the structure; (c) coating the structure with a conductive material to form an electrode line pattern; (d) forming a second insulating film on the substrate and the structure; (e) etching a second insulating layer over the structure to expose the conductive material and form a probe; And (f) detecting a source of disease at the probe and forming an optional dosage unit comprised of a biochemical that can be dosed.

As described above, the embodiment of the present invention provides a method for monitoring ions and biological factors present in the living body in a state of being attached to the skin in daily life, and a method for monitoring the presence of a specific disease factor, And manufacturing a biomolecule based on a vertical micropillar, a nanowire, and a dual structure by these two types, which can invade into a state without causing the death of cells constituting the internal organs and organs, And a biomedical device manufactured by the method are proposed.

The embodiments of the present invention will now be described in detail with reference to the accompanying drawings, wherein: FIG. 1 is a perspective view of a biosensor according to a first embodiment of the present invention;

FIG. 2 is a schematic diagram of a process for manufacturing an invasive bioelement for a diagnostic and treatment probe according to an embodiment of the present invention having a nanowire probe structure. FIG. And FIG. 4 is a schematic view illustrating a method of manufacturing an invasive biological device for a diagnostic and therapeutic probe according to an embodiment of the present invention having a dual structure of a micropillar and a nanowire probe structure Fig.

In the embodiment of the present invention, a nanowire as a nanostructure formed of a probe structure is a hair-like nanomaterial having a diameter of 20 to 100 nm, but has a high aspect ratio of about several micrometers in length to be. In general, nanowires are the most promising building blocks in the implementation of bottom-up semiconductor nanomaterial devices because they exhibit new physical and chemical properties based on quantum effects and excellent electrical, optical and magnetic properties. Which is suitable for probe structures of biomedical devices.

In addition, nanowires are the ideal material system for understanding the source properties of materials due to their free-standing characteristics, which are free from defect-free, monocrystalline substrates. Particularly, since nanowires have a diameter of several tens nm and a length of several microns, they can overcome disadvantages of conventional micrometer or millimeter size biomolecules when used as a cell electrode have.

In addition, biomaterials with vertical nanowires of this type and size have three common ways of interacting with our bodies: 1) drug delivery by spatial circulation between body organs and cells, and 2) ) Binding of a membrane receptor and a drug present on the surface of a cell, and 3) drug delivery to a substrate part existing in a cell.

1 and 2, a method for fabricating an invasive biological device for a diagnostic and treatment probe according to an embodiment of the present invention includes the steps of (a ) Forming a nanostructure on a substrate; (b) forming a first insulating layer on the substrate and the structure; (c) coating the structure with a conductive material to form an electrode line pattern; (d) forming a second insulating film on the substrate and the structure; (e) etching a second insulating layer over the structure to expose the conductive material and form a probe; And (f) detecting a source of disease at the probe and forming an optional dosage unit comprised of a biochemical that can be dosed.

In this case, it is preferable that step (a) is a step of forming at least two nanostructured structures on a substrate. By forming at least one pair of nanostructured structures, the nanostructured structure can be connected to an external power source or circuit, And also functions as a connection electrode to a living body circuit that forms various biological signals between a pair of electrodes.

In a more specific embodiment, step (a) comprises depositing 3-aminopropyl triethoxysilane (APTES) on a substrate and depositing a liquid metal such as gold nanoclusters And a process of growing at least two nanowires on a deposited substrate using a Vapor-Liquid-Solid (VLS) technique to form a nano probe structure.

The deposition of 3-aminopropyltriethoxysilane (APTES) is performed by coating or depositing a hydrophilic molecular film (APTES) having a positive electric charge on the surface, This is because it is easy to form a silicon nanowire at a desired position on a substrate by using a dispersed nanowire solution and a Vapor-Liquid-Solid (VLS) technique.

In addition, the use of liquid metal is a simple process of the VLS technique because it is easy to grow nanowires.

In another embodiment, step (a) includes: coating Cr on the substrate; forming a hole having a diameter of 100 nm to 200 nm on the coated substrate using a focused ion beam (FIB) technique; Forming a nanowire using a FIB method when a VLC method or a material belonging to a group of Si, Au, and Pt is used in the hole when a liquid metal is used; And the like.

That is, unlike the embodiment in which a direct nanowire is grown by the VLS technique, a hole is formed by a focused ion beam method to form a more precise nanowire, and a nanowire is formed by using the VLS method or the FIB method in the hole .

As shown in FIGS. 1 and 3, a method for manufacturing an immersion type biodechanical device for a diagnostic and treatment probe according to an embodiment of the present invention having a micropillar probe structure includes the steps of: (a) forming a microstructure on a substrate; ; (b) forming a first insulating layer on the substrate and the structure; (c) coating the structure with a conductive material to form an electrode line pattern; (d) forming a second insulating film on the substrate and the structure; (e) etching a second insulating layer over the structure to expose the conductive material and form a probe; And (f) detecting a source of disease at the probe and forming an optional dosage unit comprised of a biochemical that can be dosed.

In general, the force acting on the volume (gravity and inertia force) that dominated the phenomenon in macro units is relatively small, and the force (friction force and surface tension) acting on the surface area that can be ignored in macro units is largely dominant do. Micro pillars are widely used in various fields as a structure that affects at this time. Accordingly, in the embodiment of the present invention, the top-down type high reactive ion etching (DRIE) process To form microstructures or micro pillars.

That is, in the embodiment of the present invention, a micropillar having a diameter of 20 to 400 μm or a height of about 50 to 1,000 μm with a length of one side is manufactured by the above-described process method, The present invention can be applied to a living body cell in which live cells and a dermal layer in which blood exists. In addition, when it is applied to a specific organ in the body, it can be applied to a biomedical device that requires an invasion to a cell existing in the inside of the organ and a layer in which blood exists, rather than an outer wall of the organ exposed in the air through an incision process.

Since the thickness and tensile strength of skin are different depending on any part or sex or age of the body, the micro pillars prepared by the DRIE process can not be invaded by the wet etching process. It can be made into a pointed shape to facilitate invasion.

As a more specific embodiment, it is preferable that step (a) is a step of forming at least two microstructures by partially etching the substrate. That is, any one of materials belonging to the group of Al and Si is deposited on the substrate and selectively etched through a high aspect ratio reactive ion etching (DIRE) process to form at least two micro pillars, It is preferable that the top is formed into a micro needle structure by a wet etching process or an anisotropic-isotropic multiple loop etching process.

The formation of the microneedle structure by the anisotropic-isotropic multi-loop etching process at the upper end of the micropillar structure can be achieved not only in vitro but also in the body, considering the biocompatibility that does not cause side effects such as rejection reaction, And functions as an invasive biosensor that can be used without difficulty in the cells constituting them.

The steps (b) and (d) of forming the first insulating layer and the second insulating layer, which are commonly applied to the embodiments illustrated in FIGS. 2 and 3, _2, or Al ₂ O _{3. In} the step (c) of forming the electrode and the electrode line pattern, the structure and the electrode line pattern are formed by sputtering using Au, Ag, Cu, and Pt It is preferable that one of the materials belonging to the group of < RTI ID = 0.0 >

The electrode and the electrode line pattern are formed of a conductive material as described above. That is, when the micro or nano probe structure of the biosensor of the invasive type functions as one electrode and functions as an external circuit or an external device Facilitates connection, and is utilized as a variety of bio-devices such as biomedical devices for monitoring, diagnosis, and treatment of biological signals.

The nanostructure illustrated in FIG. 2 is preferably a nanostructure having a diameter of 100 nm to 300 nm and a height of 3 占 퐉 to 10 占 퐉. The microstructure has a diameter of 20 占 퐉 to 400 占 퐉 and a height of 50 占 퐉 Lt; RTI ID = 0.0 > um. ≪ / RTI >

In order to apply the biomedical device without the incision process for the patient's treatment and the early diagnosis of the disease, the body structure of the human body is required to be 10 ~ 20 μm in the stratum corneum, 7 ~ 120 μm in the skin layer, ~ 3,000 μm thickness, it is necessary to have a device capable of invading the dermis to a depth of at least 500 μm to deliver the drug through cells, ions, biological factors, and blood vessels constituting our body .

In addition, even if the incision is included for the diagnosis of an unavoidable disease, when the internal organs are exposed to the air, the thickness of the internal organs 50 μm can not perform the normal function, and the detection of the cells and biological factors constituting the organ, In order to deliver the drug, a device with a structure capable of invasion to a depth of at least about 50 μm is required.

In the embodiment of FIGS. 2 and 3, step (e) is a step of etching the second insulating film on the structure to expose the conductive material and forming the probe, and step (f) Lt; RTI ID = 0.0 > biochemical < / RTI >

As shown in FIGS. 2 and 3, the selective administration part is a detection part which is coupled to the top of the micro structure or the side of the nanostructure and is composed of a spacer and a targeting residue for detecting a disease source. And a drug delivery portion composed of a spacer and a drug, and the spacer is preferably made of a biodegradable polymer.

That is, in the case of a nanostructure, a selective dosage unit is formed on the side surface and a selective dosage unit is formed on the upper end of the microstructure. The detection part of the selective administration part biochemically binds the peptide of the targeting residue to the structure through the spacer so that it can detect various viruses and cancer cells as a disease source in the human body.

Then, it is spaced a certain distance from the detection part, and a natural or synthetic biochemical material is bound to the structure through a spacer, which is a drug of a specific disease or a drug is contained and can be administered.

When such an optional dosage unit provides an invasive bioelectronic element formed in a probe structure, it is possible to detect a specific disease source early in the human body and to selectively and timely and appropriately respond to the corresponding drug, . ≪ / RTI >

In other words, biomolecules for ion and biological factor detection for early diagnosis and treatment of a specific disease are not limited to the antigen-antibody reaction, which is a chemical method, but also various methods such as peptides and drugs, It is possible to improve the disadvantage that it is difficult to detect the electrical signals of the human tissue and the cells and biological factors constituting the biological tissue.

As another embodiment of the present invention, the embodiment of FIG. 4 includes the steps of: (a) etching a substrate to form a micropillar; (b) forming a nanostructure on top of the micropillar; (c) forming a first insulating layer on the substrate, the micropillar, and the nanostructure; (d) coating a conductive material on the micro-pillars and the nanostructures and forming an electrode line pattern; (e) forming a second insulating film on the substrate, the micropillar, and the nanostructure; (f) etching a second insulating layer over the structure to expose the conductive material and form a probe; And (g) detecting a source of disease in the probe and forming an optional dosage unit comprised of a biochemical that can be dosed.

4, the probe structure according to the embodiment of the present invention shown in FIG. 4 is different from the embodiment of FIGS. 2 and 3 in that the probe structure forms a double structure of a micro- do.

In the embodiment of the present invention as described above, nanostructures such as nanowires are grown on the top of a microprobe structure to form a probe structure having a dual structure, whereby ions and biological The present invention provides an invasive biosensor capable of acquiring a specific biological signal in real time by attaching any part of the body based on the factor regardless of the site, or performing a medicament function for diagnosis and treatment of a disease source.

The embodiments and the accompanying drawings described in the present specification are merely illustrative of some of the technical ideas included in the present invention. Accordingly, the embodiments disclosed herein are for the purpose of describing rather than limiting the technical spirit of the present invention, and it is apparent that the scope of the technical idea of the present invention is not limited by these embodiments. It will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (21)

(a) forming a micro or nanostructure on a substrate;
(b) forming a first insulating layer on the substrate and the structure;
(c) coating the structure with a conductive material to form an electrode line pattern;
(d) forming a second insulating film on the substrate and the structure;
(e) etching a second insulating layer over the structure to expose the conductive material and form a probe; And
(f) detecting a source of disease in the probe and forming an optional dosage unit comprised of a biochemical material that can be dosed. The method according to claim 1,
The step (a)
And forming at least two nanostructured structures on the substrate. ≪ RTI ID = 0.0 > 11. < / RTI > The method of claim 2,
The step (a)
Depositing 3-aminopropyltriethoxysilane (APTES) on a substrate and depositing a liquid metal; And
Growing at least two nanowires on a deposited substrate using a Vapor-Liquid-Solid (VLS) technique. The method of claim 2,
The step (a)
Coating Cr on the substrate;
Forming at least two holes of 100 nm to 200 nm on a coated substrate using a focused ion beam (FIB) technique; And
And forming a nanowire in the hole using a VLS method or an FIB method. The method according to claim 1,
The step (a)
And etching at least a portion of the substrate to form at least two microstructures. ≪ RTI ID = 0.0 > 11. < / RTI > The method of claim 5,
The step (a)
Depositing at least one material belonging to the group of Al and Si on the substrate and selectively etching at least two micro-pillars through a high aspect ratio reactive ion etching (DIRE) process; And
And forming a top of the micro-column by a wet etching process or an anisotropic-isotropic multi-loop etching process into a microneedle structure. The method according to claim 1,
In the step (b)
And forming a first insulating film made of SiO ₂ or Al ₂ O ₃ on the substrate on which the structure is formed by a chemical vapor deposition method. The method according to claim 1,
The step (c)
And coating the structure with one of materials belonging to the group of Au, Ag, Cu and Pt by a sputtering method. The method according to claim 1,
The step (d)
And forming a second insulating layer made of SiO ₂ or Al ₂ O ₃ by chemical vapor deposition on the substrate and the structure. The method according to claim 1,
The step (a)
And forming a nanostructure having a diameter of 100 nm to 300 nm and a height of 3 to 10 탆 on a substrate. The method according to claim 1,
The step (a)
Forming a microstructure having a diameter of 20 탆 to 400 탆 and a height of 50 탆 to 1,000 탆 on a substrate. The method according to claim 1,
In the step (f)
Wherein the selective administration portion comprises:
Which is bonded to the top of the microstructure or to the side of the nanostructure,
A detection unit configured with a spacer and a targeting residue for detecting a disease source; And
And a drug delivery portion composed of a spacer and a drug. The method of claim 12,
Wherein the spacer is made of a biodegradable polymer. ≪ RTI ID = 0.0 > 11. < / RTI > (a) etching a substrate to form micro pillars;
(b) forming a nanostructure on top of the micropillar;
(c) forming a first insulating layer on the substrate, the micropillar, and the nanostructure;
(d) coating a conductive material on the micro-pillars and the nanostructures and forming an electrode line pattern;
(e) forming a second insulating film on the substrate, the micropillar, and the nanostructure;
(f) etching a second insulating layer over the structure to expose the conductive material and form a probe; And
(g) detecting the source of disease in the probe and forming an optional dosage unit comprised of a biochemical substance that can be dosed. 15. The method of claim 14,
The step (a)
Depositing at least one material belonging to the group of Al and Si on the substrate and selectively etching at least two micro-pillars through a high aspect ratio reactive ion etching (DIRE) process; And
And forming a micro-needle structure by wet etching or anisotropic-isotropic multi-loop etch-fixation of the top of the micro-pillars. 15. The method of claim 14,
The step (b)
Depositing 3-aminopropyltriethoxysilane (APTES) on a substrate and depositing a liquid metal; And
Growing at least two nanowires on a deposited substrate using a Vapor-Liquid-Solid (VLS) technique. Claim 14
The step (b)
Coating Cr on the substrate;
Forming at least two holes of 100 nm to 200 nm on a coated substrate using a focused ion beam (FIB) technique; And
And forming a nanowire in the hole using a VLS method or an FIB method. 15. The method of claim 14,
The step (a)
Wherein the step of forming a micropillar having a diameter of 20 to 400 占 퐉 and a height of 50 to 1,000 占 퐉 on a substrate is carried out. 15. The method of claim 14,
The step (b)
Forming a nanostructure having a diameter of 100 nm to 300 nm and a height of 3 탆 to 10 탆 on a substrate. 15. The method of claim 14,
Wherein the selective administration portion comprises:
Micro-pillar or nanostructure side,
A detection unit configured with a spacer and a targeting residue for detecting a disease source; And
And a drug delivery portion composed of a spacer and a drug. An invasive biodegradable element for a diagnostic and therapeutic probe, which is manufactured by the method of claim 1 or claim 14.

Images