KR20170079308A

KR20170079308A - Flow amplifier

Info

Publication number: KR20170079308A
Application number: KR1020150189737A
Authority: KR
Inventors: 우범제; 윤석문; 한명석; 김현신
Original assignee: 피코앤테라(주)
Priority date: 2015-12-30
Filing date: 2015-12-30
Publication date: 2017-07-10

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow rate amplifier, and more particularly, to a flow rate amplifier that amplifies and effectively discharges a discharge flow rate of a discharge fluid containing contaminants generated in a semiconductor processing field.

Description

FLOW AMPLIFIER

The present invention relates to a flow amplifier used in the field of semiconductor processing.

A flow amplifier is a device for moving a large amount of ambient air by using a supply fluid as a power source, and a large amount of the supply fluid is discharged together with a discharge fluid flowing into the flow amplifier by a Coanda effect.

Unlike a conventional fan, such a flow amplifier does not have a motor, so there is no problem of vibration or heat generation, and there is no power consumed in the flow amplifier itself.

Therefore, it is widely used as a technology for discharging polluted gas in a technical field where pollution gas is frequently generated, in particular, in the field of semiconductor processing. Such a flow amplifier is disclosed in Korean Patent No. 10-0567433 (hereinafter referred to as Patent Document 1) ) And Korean Patent No. 10-0582235 (hereinafter referred to as " Patent Document 2 ").

In the conventional flow amplifier 10, as shown in FIG. 1, a supply fluid flows through a supply pipe 11 formed on a side surface of the flow amplifier 10.

The supply fluid flows through the supply fluid channel 13 communicating with the supply pipe 11 and flows through the supply fluid injection unit 15 formed on the supply fluid channel 13 to the inside of the flow amplifier 10 And is discharged into the discharge fluid passage 17 formed in the discharge passage 17.

In this case, generally, the supply fluid uses a high-pressure compressed fluid, whereby the high-pressure supply fluid injected into the discharge fluid passage 17 flows into the discharge fluid passage 17 ). &Lt; / RTI > Accordingly, the inner area of the discharge fluid passage 17 is instantaneously low-pressure, so that the discharge fluid introduced through the discharge fluid passage 17 flows into the inner region of the discharge fluid passage 17 at the low- As shown in Fig.

2, the supply pipe 11 communicating with the discharge fluid flow path 17 is disposed in a line perpendicular to the central axis of the discharge fluid flow path 17, do.

In other words, the supply fluid channel 13 has an annular shape symmetrical to the left and right with respect to the supply pipe 11, whereby the supply fluid flowing through the supply pipe 11 flows into the supply fluid channel 11, (13). Accordingly, when the supply fluid flows along the supply fluid passage 13 and is injected into the discharge fluid passage 17 through the supply fluid injection portion 15, the pressure and the flow velocity of the supply fluid are lowered, As a result, the above-mentioned Coanda effect becomes insufficient and there is a problem that the discharge flow rate of the discharge fluid through the flow amplifier 10 is reduced.

Further, turbulence can be formed when the left and right supply fluid splits to the left and right of the supply fluid flow path 13 and then joins in a region located on the opposite side of the supply pipe 11. Due to such turbulence, the supply fluid may not be easily injected into the discharge fluid flow path 17 in a certain region of the supply fluid flow path 13. Further, the turbulence reduces the pressure and the flow rate of the supply fluid, thereby reducing the discharge flow rate of the discharge fluid through the flow amplifier 100. [

Korean Patent No. 10-0567433. Korean Patent No. 10-0582235.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to maximize the Coanda effect which acts on the supply fluid by maintaining the pressure and the velocity of the supply fluid supplied to the flow amplifier, And it is an object of the present invention to provide a flow rate amplifier that discharges a large amount of discharge fluid.

According to one aspect of the present invention, a flow rate amplifier includes: a through hole through which a discharge fluid flows; A circulation passage formed in an annular shape surrounding the through-hole; An inflow channel communicating with the circulation channel to introduce a supply fluid into the circulation channel, and being disposed eccentrically with respect to a center axis of the through-hole; And an injection part formed on the circulation flow path and injecting the supply fluid into the through hole, wherein the supply fluid is circulated in one direction along the circulation flow path and is injected into the through hole through the injection part And the circulation flow path is formed such that the cross-sectional area of the circulation flow path becomes smaller toward one direction in which the supply fluid circulates.

In addition, the circulation flow path is formed such that the width of the cross-sectional area becomes smaller toward one direction in which the supply fluid circulates.

In addition, the circulation flow path is formed such that the width of the cross-sectional area becomes smaller toward one direction in which the supply fluid circulates, and the depth of the cross-sectional area becomes shallower toward one direction in which the supply fluid circulates.

In addition, a first expanded portion is formed on the inflow side of the through-hole, through which the discharge fluid flows, and the first expanded portion has a larger diameter toward the inflow side.

In addition, a second expansion part is formed on the discharge side where the discharge fluid is discharged from the through hole, and the diameter of the second expansion part becomes larger toward the discharge side.

In addition, the one direction in which the supply fluid circulates along the circulation channel is a clockwise direction.

According to another aspect of the present invention, there is provided a flow rate amplifier including a first body, a second body coupled to a lower portion of the first body, and an injection portion formed by coupling the first body and the second body, The first body includes a first through-hole formed at the center of the first body, the second body includes a second through-hole formed at the center of the second body, An inlet flow path communicating with the circulation flow path to introduce the supply fluid into the circulation flow path and eccentrically disposed with respect to the central axis of the second through hole; Wherein the first through-hole and the second through-hole communicate with each other to form a through-hole by upward and downward engagement of the first body and the second body, the injection portion is formed on the circulating flow passage, The supply fluid is supplied to the circulation flow path The circulation flow path is formed so that the cross-sectional area of the circulation flow path becomes smaller as the supply fluid circulates in one direction.

The first body may have a rectangular shape, and the second body may have a rectangular shape corresponding to the first body.

In addition, an inflow tube portion is coupled to an upper portion of the first body, a discharge tube portion is coupled to a lower portion of the second body, the inflow tube portion has a rectangular shape corresponding to the rectangular first body, An inlet pipe flange coupled to an upper portion of the body; And an inlet pipe formed at the center of the inlet pipe flange and communicating with the first through hole, wherein the outlet pipe section has a rectangular shape corresponding to the rectangular second body, A discharge pipe flange coupled to the lower portion; And a discharge pipe formed at the center of the discharge pipe flange and communicating with the second through hole.

According to the flow amplifier of the present invention as described above, the following effects can be obtained.

The feed fluid having a high pressure and a high velocity is injected into the through hole through the injection section, thereby maximizing the action of the coanda effect, and thus the flow rate of the discharge fluid can be more efficiently amplified than in the conventional flow amplifier.

Further, since the supply fluid has a high flow rate and a high pressure, even if the length of the through hole is made shorter than that of the conventional flow rate amplifier, it is possible to sufficiently enjoy the Koanda effect acting on the supply fluid. It is possible to easily achieve the amplification of the discharge flow rate of the discharge fluid, so that the noise generated due to the supply fluid flowing along the inner surface of the through hole by the Coanda effect can be reduced.

1 is a cross-sectional view of a conventional flow amplifier;
2 is a plan sectional view of the supply line and the supply fluid flow path of FIG. 1;
3 is a perspective view of a flow amplifier according to a first preferred embodiment of the present invention.
FIG. 4 is an exploded perspective view of FIG. 3; FIG.
5 is a plan view showing the upper surface of the first body of Fig. 3;
6 is a plan view showing a bottom surface of the first body of FIG. 3;
FIG. 7 is a plan view showing the upper surface of the second body of FIG. 3; FIG.
8 is a sectional view of Fig. 3; Fig.
9 is a cross-sectional view of a flow amplifier according to a second preferred embodiment of the present invention.
10 is a graph showing a numerical analysis result of an internal voltage force distribution of a flow amplifier according to a first preferred embodiment of the present invention.
11 is a graph showing a numerical analysis result of an internal flow velocity vector distribution of a flow amplifier according to a first preferred embodiment of the present invention.
12 is a graph showing the result of numerical analysis of an internal voltage force distribution of a flow amplifier according to a second preferred embodiment of the present invention.
13 is a graph showing a numerical analysis result of an internal flow velocity vector distribution of a flow amplifier according to a second preferred embodiment of the present invention.
Fig. 14 is a diagram showing a numerical analysis result of the internal flow velocity distribution on the WW 'cross section in Fig. 13 (d); Fig.
15 is a graph comparing discharge flow rates of discharge fluids of flow amplifiers according to the first and second preferred embodiments of the present invention.
16 is a graph comparing discharge velocities of discharged fluids of flow amplifiers according to the first and second preferred embodiments of the present invention.

The 'discharge fluid' referred to below is a term collectively referred to as a fluid flowing into and discharged from the through-hole of the flow amplifier, and the term 'supply fluid' refers to a fluid supplied / injected into the flow amplifier to amplify the discharge flow rate of the discharge fluid It is. In this case, the supply fluid is preferably a compressed fluid such as compressed air.

The flow rate amplifier according to the first preferred embodiment of the present invention includes a through hole through which a discharge fluid flows, a circulation flow path formed in an annular shape surrounding the through hole, and a circulation flow path communicated with the circulation flow path to introduce the supply fluid into the circulation flow path, And an injection unit formed on the circulating flow path and injecting the supply fluid into the through hole.

The through hole is formed in the inside of the flow amplifier. A discharge fluid flows into the inlet side, a supply fluid is injected through the injection part, and a discharge fluid and a supply fluid are discharged to the discharge side.

The circulation flow path is formed in an annular shape surrounding the through hole, and the inflow path is communicated. In addition, the circulating flow path is provided with an injection section, whereby the supply fluid introduced through the inlet flow path is injected into the through hole through the injection section while circulating along the circulation flow path.

The inflow channel is disposed eccentrically with respect to the center axis of the through-hole, and communicates with the circulation channel to serve as a channel for supplying the supply fluid to the circulation channel.

The injection unit is formed on the circulation flow path, and serves as a passage through which the supply fluid circulating along the circulation flow path is injected into the through-hole.

The flow amplifier having the above-described components may be composed of a first body and a second body.

In this case, the first through hole is formed in the first body, and the second through hole is formed in the second body. When the two bodies are coupled up and down, the first and second through-holes communicate with each other to form through-holes.

Further, the inflow channel and the circulation channel may be formed in the second body, and the injection unit may be formed by combining the first and second bodies.

Hereinafter, one embodiment of the flow amplifier according to the first preferred embodiment of the present invention will be described with reference to a case where the flow amplifier is composed of the first body and the second body.

In this case, when the first body and the second body are coupled with each other by the upper and lower parts to form the flow amplifier, the first through-hole and the second through-hole communicate with each other.

Further, the inlet side of the through-hole is a hole extending in the upper side of the first through-hole, and the discharge side of the through-hole is a hole in the lower side of the second through hole.

Hereinafter, a flow amplifier 100 according to a first preferred embodiment of the present invention will be described with reference to the accompanying drawings.

3 is a perspective view of the flow amplifier according to the first preferred embodiment of the present invention, Fig. 4 is an exploded perspective view of Fig. 3, Fig. 5 is a plan view showing the upper surface of the first body of Fig. 3, 3 is a plan view showing the upper surface of the second body of Fig. 3, Fig. 8 is a sectional view of Fig. 3, and Fig. 9 is a cross- 10 is a graph showing a result of a numerical analysis of the internal voltage force distribution of the flow amplifier according to the first preferred embodiment of the present invention, and FIG. 11 is a graph showing the results of the numerical analysis according to the first preferred embodiment of the present invention 12 is a graph showing the result of numerical analysis of the internal voltage force distribution of the flow amplifier according to the second preferred embodiment of the present invention, and FIG. 13 is a graph showing the result of numerical analysis of the internal- In a second preferred embodiment of the invention FIG. 14 is a view showing a numerical analysis result of the internal flow velocity vector distribution of the flow amplifier, FIG. 14 is a diagram showing a numerical analysis result of the internal flow velocity vector distribution of the WW 'section in FIG. 13 (d) FIG. 16 is a graph comparing the discharge flow rates of the discharge fluids of the flow amplifiers according to the first and second preferred embodiments of the present invention, and FIG. 16 is a graph comparing the discharge flow rates of the discharge fluids of the flow amplifiers according to the first and second preferred embodiments of the present invention. Graph.

3 to 8, the flow amplifier 100 according to the first preferred embodiment of the present invention includes a first body 110a, a second body 110a coupled to a lower portion of the first body 110a, And an injection unit 130 formed by coupling the first body 110a and the second body 110b.

An inflow tube 200 for introducing the discharge fluid to the flow amplifier 100 may be coupled to the upper portion of the first body 110a of the flow amplifier 100. The lower portion of the second body 110b may be connected to the discharge A discharge tube portion 300 for discharging the fluid may be combined.

The inflow tube 200 includes an inflow tube flange 210 having a rectangular shape and an inflow tube 220 formed at the center of the inflow tube flange 210.

The inlet pipe flange 210 has a rectangular shape corresponding to the first body 110a to be described later and a plurality of first bolt holes 151 may be formed in the inlet pipe flange 210. [ A plurality of first bolt holes 151 may be formed in the first body 110a at positions corresponding to the first bolt holes 151 formed in the inlet pipe flange 210. [

Therefore, by inserting a bolt (not shown) into the plurality of first bolt holes 151 as described above, the inlet pipe flange 210 can be coupled to the upper portion of the first body 110a, The inlet tube 200 can be easily coupled to the upper portion of the tube 110a.

The inlet pipe 220 is formed at the center of the inlet pipe flange 210 so as to communicate with the first through hole 111a of the first body 110a and serves as a passage through which the outlet fluid flows into the flow amplifier 100 .

The discharge tube portion 300 includes a discharge tube flange 310 having a rectangular shape and a discharge tube 320 formed at the center of the discharge tube flange 310.

The discharge tube flange 310 has a rectangular shape corresponding to the second body 110b to be described later and a plurality of third bolt holes 153 may be formed in the inlet tube flange 210. [ A plurality of third bolt holes 153 may be formed in the second body 110b at positions corresponding to the plurality of third bolt holes 153 of the discharge tube flange 310. [

Accordingly, the bolt (not shown) is inserted into the plurality of third bolt holes 153 as described above, so that the discharge tube flange 310 can be coupled to the lower portion of the second body 110b, The discharge tube portion 300 can be easily coupled to the lower portion of the discharge tube 110b.

The discharge pipe 320 is formed at the center of the discharge pipe flange 310 so as to communicate with the second through hole 111b of the second body 110b and is configured to discharge the discharge fluid flowing into the inlet pipe 220 and the supply fluid And serves as a discharge passage.

In other words, the inlet pipe 220 and the outlet pipe 320 communicate with the first and second through holes 111, that is, the upper and lower portions of the through hole 111, respectively, and the outlet fluid and / 220, the discharge pipe 320, and the through-hole 111, respectively.

The inlet tube 200 and the outlet tube 300 may be installed at the upper and lower portions of the flow amplifier 100 to allow the through holes 111 to communicate with the inlet tube 220 and the outlet tube 320, The inflow pipe 220 and the discharge pipe 320 can be directly connected to the upper and lower portions of the through hole 111 to allow the through hole 111 to communicate with the inflow pipe 220 and the discharge pipe 320. [ Of course.

4 to 6 and 8, the first body 110a includes a first through hole 111a formed in the center of the first body 110a and a second through hole 111b formed in the first through hole 111a And a first bulging portion 113a.

The first body 110a has a thin plate shape in which a first through hole 111a is formed at the center. The overall shape of the first body 110a is a rectangular shape having a size corresponding to the second body 110b Shape.

A plurality of first bolt holes 151 and a plurality of second bolt holes 152 may be formed in the first body 110a.

The first bolt hole 151 serves to connect the inlet tube 200 and the first body 110a, as described above.

A plurality of second bolt holes 152 may be formed in the second body 110b and a plurality of second bolt holes 152 formed in the second body 110b may be formed in the first body 110a And is formed at a position corresponding to the plurality of second bolt holes 152 formed.

Therefore, by inserting a bolt (not shown) into the plurality of second bolt holes 152, the first body 110a and the second body 110b can be easily coupled with each other.

As described above, since the overall shapes of the first body 110a and the second body 110b are mutually corresponding, the compatibility of the flow amplifier 100 can be assured.

In detail, the rectangular shape may have the same size as that of the conventional rectangular fan unit, so that the flow amplifier 100 according to the first preferred embodiment of the present invention can be easily You can use it as a replacement.

In other words, the first body 110a and the second body 110b are connected to the inlet tube 200 coupled to the first body 110a and the outlet tube 300 coupled to the second body 110b, respectively, The flow amplifier 100 can be easily replaced only if a rectangular inlet pipe flange 210 and an outlet pipe flange 310 are formed.

Therefore, in order to solve the problems caused by the conventional fan unit in the semiconductor processing equipment used in the conventional semiconductor processing field, that is, the problems related to heat generation, vibration and power consumption, the flow amplifier 100) is used instead of the conventional fan unit, the flow amplifier 100 according to the first preferred embodiment of the present invention can be replaced easily without modification of existing equipment.

The first through hole 111a is formed at the center of the first body 110a and forms a through hole 111 together with the second through hole 111b as described above, It acts as a channel.

The upper portion of the first through hole 111a communicates with the inflow pipe 220 into which the discharge fluid flows and the lower portion of the first through hole 111a communicates with the second through hole 111b.

The first bulging portion 113a is formed to extend from the first through hole 111a so as to protrude downward from the center of the first body 110a. In other words, the first expanded portion 113a is formed on the inflow side of the through hole 111 when viewed from the side of the through hole 111 formed by the coupling of the first and second bodies 110a and 110b.

In this case, the first expanded portion 113a is formed to be inclined so that its diameter becomes larger toward the inflow side, that is, toward the upper portion of the first through hole 111a.

Due to the shape of the first expanded portion 113a, the flow rate of the discharge fluid flowing through the inflow pipe 220 can be increased.

In detail, the discharge fluid flowing through the inlet pipe 220 flows to the through-hole 111 through the first pipe-expanding portion 113a. In this case, the diameter of the first pipe-expanding portion 113a is set to be larger than the diameter Is larger than the diameter of the hole (111). Conversely, since the diameter of the through-hole 111 is smaller than the diameter of the first expanded portion 113a, the flow velocity of the exhausted fluid can be increased in a section flowing from the first expanded portion 113a to the through-hole 111.

6, the first bulge portion 113a is formed to protrude downward from the center of the first body 110a, so that the first body 110a and the second body 110b are separated from each other, The injection unit 130 can be easily formed, and a detailed description thereof will be described later.

4, 7 and 8, the second body 110b includes a second through hole 111b formed at the center of the second body 110b and a second through hole 111b formed in the second through hole 111b. A circulation flow path 121 formed in an annular shape surrounding the second through hole 111b and a circulation flow path 121 communicating with the circulation flow path 121 to supply the supply fluid An inflow channel 123 that flows into the circulation channel 121 and is eccentrically disposed with respect to the center axis f of the through hole 111 and an inflow channel 123 that communicates with the inflow channel 123 to supply an external supply fluid supply unit And a supply port 125 through which the supply fluid supplied from the first body 110b flows into the second body 110b.

The second body 110b is formed with a second through hole 111b at its center and has an annular circulation channel 121 surrounding the second through hole 111b and an inlet And has a rectangular shape having a size corresponding to that of the first body 110a.

The second body 110b may include a plurality of second bolt holes 152 and a plurality of third bolt holes 153 to which bolts (not shown) are inserted.

The second through hole 111b is formed at the center of the second body 110b and forms a through hole 111 together with the first through hole 111a as described above, It acts as a channel.

The upper portion of the second through hole 111b communicates with the first through hole 111a and the lower portion of the second through hole 111b communicates with the discharge pipe 320 through which the discharge fluid is discharged.

The second expanded portion 112b is formed at a lower portion of the second through hole 111b and is formed to be inclined so that its diameter becomes larger toward the lower portion of the second through hole 111b. In other words, the second expanded portion 112b is formed on the discharge side of the through hole 111 when viewed from the side of the through hole 111 formed by coupling the first and second bodies 110a and 110b.

Due to the above-described second expanded portion 112b, the flow rate of the discharge fluid discharged through the flow amplifier 100 can be increased.

Specifically, when the discharged fluid is discharged to the discharge pipe 320 through the first and second through holes 111 together with the supply fluid, the discharged fluid passes through the second expanded portion 112b. In this case, The diameter of the first through hole 112b is formed to be larger than the diameter of the second through hole 111b, so that a kind of inclined surface is formed. In this case, the supply fluid injected into the flow amplifier 100 through the injection unit 130, that is, the through hole 111 flows along the inclined surface, and the flow of the fluid is called a coanda effect do.

As described above, the second expanded portion 112b serves to provide a slope so that the supply fluid can flow by the Coanda effect, thereby increasing the flow rate of the discharge fluid discharged through the flow amplifier 100 , And increases the discharge efficiency of the flow amplifier (100).

And the third expansion portion 113b is formed on the upper portion of the second through hole 111b. The third expanded portion 113b is formed to be inclined so as to correspond to the first expanded portion 113a formed in the first through hole 111a and to have a larger diameter toward the upper portion of the second through hole 111b. In this case, when the first body 110a and the second body 110b are engaged with each other, the third bendable portion 113b is not engaged with the first bendable portion 113a, The injection unit 130 is formed between the first and second expansion units 113a and 113b. In other words, the spaced apart space, i.e., the gap, formed between the first and third expanded portions 113a and 113b is the injection portion 130. [

The circulation flow path 121 and the inflow path 123 are formed inside the second body 110b and serve as a passage through which the supply fluid introduced through the supply port 125 flows before being injected into the through hole 111 .

The supply port 125 is connected to an external supply fluid supply unit (not shown) to supply the supply fluid to the inside of the second body 110b, and is connected to the inflow path 123.

In this case, the supply port 125 is formed to be eccentric with respect to the center axis f of the through-hole 111.

The inlet flow path 123 communicates with the supply port 125 and the circulation flow path 121 and connects the supply port 125 and the circulation flow path 121 to supply the supply fluid flowing into the supply port 125 to the circulation flow path 121).

The inflow channel 123 is formed in the second body 110b in the shape of a groove and the upper surface of the inflow channel 123 is formed by the lower surface of the first body 110a. In other words, the first and second bodies 110a and 110b are coupled to each other to form the upper surface of the inflow passage 123, thereby allowing the inflow passage 123 to flow It becomes a closed passage.

The inflow channel 123 may be disposed eccentrically with respect to the center axis f of the through hole 111. [

Since the supply port 125 and the inflow path 123 are disposed eccentrically with respect to the central axis f of the through hole 111 as described above, the flow of circulating the supply fluid along the circulation path 121 is facilitated Lt; / RTI >

In this case, it is preferable that the circulation direction of the supply fluid circulating along the circulation flow path 121 is clockwise. This is because, in the case of the Northern Hemisphere, the biasing force acts on the right side with respect to the direction of motion of the fluid, so that as the supply fluid rotates clockwise along the circulation flow path 121, the clockwise circulation of the supply fluid is further accelerated by the biasing force Therefore, the supply fluid can be more easily injected into the through hole 111 through the injection unit 130, and the discharge efficiency of the flow amplifier 100 can be increased.

The supply port 125 and the inflow path 123 are disposed eccentrically with respect to the center axis f of the through hole 111 so that the supply fluid can be circulated in the circulating flow path 121 in a clockwise direction .

In the case where the location where the flow amplifier 100 is installed is the southern hemisphere, the direction of action of the deflecting force acts on the left side with respect to the direction of motion of the fluid, so that the circulation direction of the supply fluid is preferably counterclockwise, 125 and the inflow channel 123 are preferably arranged eccentrically with respect to the center axis f of the through hole 111 so that the supply fluid can be circulated in the circulation channel 121 in the counterclockwise direction Do.

As shown in FIG. 7, the circulation flow path 121 is formed inside the second body 110b so as to have an annular shape surrounding the second through hole 111b. In this case, the circulation flow path 121 may be regarded as an annular shape surrounding the through-hole 111 when the first and second bodies 110a and 110b are engaged.

The upper surface of the circulating flow path 121 is formed by the lower surface of the first body 110a. In other words, the first and second bodies 110a and 110b are engaged with each other, so that the lower surface of the first body 110a forms the upper surface of the circulating flow path 121. [

An injection part 130 is formed on the inner surface of the circulation flow path 121.

The circulating flow path 121 communicates with the inflow path 123, whereby the supply fluid flows into the circulation path 121 and circulates in one direction.

In the case of the flow amplifier 100 according to the first preferred embodiment of the present invention, the direction of the supply fluid circulating along the circulation flow path 121 is clockwise as shown by the arrow in Fig. 7, And that one direction is clockwise.

In addition, the circulation flow path 121 can be formed such that the cross-sectional area of the circulation flow path 121 becomes smaller in the clockwise direction in which the supply fluid circulates.

As described above, since the cross-sectional area of the circulation flow path 121 is made smaller in the clockwise direction, the pressure and velocity of the circulating fluid along the circulation flow path 121 can be increased. As a result, Can be easily injected into the through hole (111) through the through hole (130).

The injection unit 130 is formed by a gap formed between the first expansion unit 113a of the first body 110a and the third expansion unit 113b of the second body 110b. Therefore, the injection unit 130 may be formed on the inner surface of the circulation channel 121 so as to have the same annular shape as the circulation channel 121. The injection unit 130 injects the supply fluid circulating in the clockwise direction along the circulation flow path 121 into the through hole 111.

Hereinafter, the fluid flow of the flow amplifier 100 according to the first preferred embodiment of the present invention having the above-described configuration will be described.

First, the discharge fluid flows into the first and second through holes 111 of the flow amplifier 100 through the inlet pipe 220 of the inlet pipe 200, that is, the through hole 111.

The discharge fluid flows into the through hole 111 and flows into the through hole 111 to be discharged to the discharge pipe 320 of the discharge pipe portion 300 As shown in Fig.

In order to amplify the discharge flow rate of the discharge fluid as described above, an external supply fluid supply unit (not shown) is operated to supply the supply fluid into the flow rate amplifier 100.

The supply fluid flows through the supply port 125 and flows into the inflow path 123 and the circulation path 121.

The supply fluid flowing into the circulation flow path 121 is a structure in which the supply port 125 and the inflow path 123 are arranged eccentrically with respect to the center axis f of the through hole 111, The refrigerant circulates in the clockwise direction along the circulating flow path 121. When the flow rate of the circulating fluid flowing along the circulating flow path 121 is sufficiently secured and is increased by the upper and lower heights of the circulating flow path 121, a part of the supply fluid circulating along the circulating flow path 121 flows, Flows into the through hole (111).

The supply fluid injected into the through hole 111 flows along the inclined inner surface of the second expanded portion 112b by the Coanda effect.

As described above, due to the Coanda effect, the supply fluid flows along the inclined inner surface of the second bending portion 112b, so that the supply fluid inside the through bore 111 is inclined (inclined) of the second bending portion 112b The central region of the region flowing along the inner surface is temporarily in a low pressure state, so that the discharge fluid flowing through the inlet pipe 220 flows to the central region at a higher speed.

Accordingly, the flow rate of the discharge fluid flowing into the inlet pipe 220 is increased, and accordingly, the flow rate of the discharge fluid discharged through the discharge pipe 320 is increased. Thus, the amount of the discharge fluid discharged through the flow rate amplifier 100 Is amplified.

That is, since the supply fluid flows along the inclined inner surface of the second bendable portion 112b by the Coanda effect, the discharge fluid is discharged to the discharge side of the through hole 111 and discharged to the discharge pipe 320, , The flow rate of the discharge fluid discharged through the flow amplifier 100 can be amplified.

In the fluid flow of the flow amplifier 100 according to the first preferred embodiment of the present invention described above, the feed fluid injected into the flow amplifier 100, i.e., the through hole 111, Lt; RTI ID = 0.0 > higher < / RTI >

In detail, in the case of the flow amplifier 100 according to the first preferred embodiment of the present invention, unlike the conventional flow amplifier, the supply fluid supplied from the external supply fluid supply portion circulates along the circulation flow path 121, The supply fluid that has not been injected into the through hole 111 of the supply fluid continues to circulate together with the supply fluid that is newly introduced through the inlet flow path 123 and thereby circulates clockwise along the circulation flow path 121 The speed of the feed fluid can be further accelerated.

In other words, the flow amplifier 100 according to the first preferred embodiment of the present invention has a structure in which the supply fluid circulates unlike the conventional flow amplifier 100, so that the supply fluid flows through the injection part 130 When the fluid is injected into the through hole 111, the supply fluid has a higher flow velocity and a higher pressure than the conventional flow amplifier and can be easily injected into the through hole 111.

In addition, the circulation flow path 121 is formed to have a smaller cross-sectional area in the clockwise direction in which the supply fluid is circulated together with the above-described circulation structure, so that the through- The pressure and the flow rate of the supply fluid injected into the inside of the reactor are further increased. Therefore, the supply fluid injected into the through-hole 111 has a high pressure and a high flow velocity, so that the coanda effect that the supply fluid flows along the second expanded portion 112b can be more easily exerted Therefore, the inflow flow rate and the discharge flow rate of the discharge fluid can be further amplified.

Hereinafter, a flow amplifier 100 'according to a second preferred embodiment of the present invention will be described.

The flow amplifier 100 'according to the second preferred embodiment of the present invention differs from the flow amplifier 100 according to the preferred embodiment of the present invention only in the shape of the circulating flow path 121' . Therefore, the description of the same configuration as that of the flow amplifier 100 according to the first preferred embodiment of the present invention is omitted.

The circulation flow path 121 'of the flow amplifier 100' according to the second preferred embodiment of the present invention is configured such that the width of the cross-sectional area of the circulation flow path 121 'decreases in the one direction in which the supply fluid circulates, , And the cross-sectional area of the circulating flow path 121 'is shallow.

In this case, as described above in the flow amplifier 100 according to the first preferred embodiment of the present invention, when the flow rate of the predetermined supply fluid is secured in the circulation flow path 121 ' The circulation flow path 121 'is inclined upward in the direction of the second body 110b', so that the depth of the circulation flow path 121 'is shallower than that of the second body 110b'.

That is, in the circulating flow path 121 'of the flow amplifier 100' according to the second preferred embodiment of the present invention, the sectional area of the circulating flow path 121 'is shallower toward the upper direction of the second body 110b' And is different from the circulating flow path 121 of the flow amplifier 100 according to the first preferred embodiment of the present invention in that it is formed to be inclined.

The flow amplifier 100 'according to the second preferred embodiment of the present invention differs from the flow amplifier 100 according to the first preferred embodiment of the present invention in that the flow rate of the other discharge fluid A flow will appear, thereby enabling more effective flow rate amplification of the discharge fluid, and a detailed description thereof will be described later.

10 to 15, the flow of the discharge fluid of the flow amplifier 100 'according to the second preferred embodiment of the present invention is compared with the flow amplifier 100 according to the first preferred embodiment of the present invention .

10 to 15 are schematic diagrams for explaining the operation of applying the supply fluid to the flow amplifiers 100 and 100 'according to the first and second preferred embodiments of the present invention to measure the voltage of the fluid flowing inside the flow amplifiers 100 and 100' Fig. 6 is a diagram showing a numerical analysis result obtained by measuring a vector.

10 (a) to 10 (d) show a case where a supply fluid having a pressure of 0.1 Mpa, 0.2 Mpa, 0.3 Mpa and 0.4 Mpa is supplied to the flow amplifier 100 according to the first preferred embodiment of the present invention 11 (a) to 11 (d) are graphs showing the distribution of the internal voltage of the flow amplifier 100 when supplied to the flow amplifier 100 according to the first preferred embodiment of the present invention, 12 (a) to 12 (d) are graphs showing the distribution of internal flow velocities of the flow amplifier 100 when a supply fluid having a pressure of 0.2 Mpa, 0.3 Mpa and 0.4 Mpa is supplied. The distribution of the internal voltage of the flow amplifier 100 'when the supply fluid having the pressures of 0.1 Mpa, 0.2 Mpa, 0.3 Mpa and 0.4 Mpa is supplied to the flow amplifier 100' according to the second embodiment , 13 (a) to 13 (d) are sectional views showing a flow amplifier 100 'according to a second preferred embodiment of the present invention, in which 0.1 Mpa, 0.2 Mpa, 0.3 Mpa, and 0.4 Mpa 14 (a) to 14 (d) are diagrams showing the distribution of the internal voltage of the flow amplifier 100 'when supplying the supply fluid having the power of the power amplifier 100' according to the second preferred embodiment of the present invention. 100 'are supplied with a supply fluid having pressures of 0.1 Mpa, 0.2 Mpa, 0.3 Mpa, and 0.4 Mpa, respectively, in the flow amplifier 100'.

10 (a) to 10 (d) and 11 (a) to 11 (d) are inner regions of the inflow pipe 220, and the Y region is the same as the first preferred embodiment Is a region inside the through hole 111 of the flow amplifier 100 and the Z region is an inner region of the discharge pipe 320. [

The X 'region in FIGS. 12 (a) to 12 (d) and 13 (a) to 13 (d) is an inner region of the inflow pipe 220, and the Y' Is an inner region of the through hole 111 of the flow amplifier 100 'according to the embodiment, and the Z' region is an inner region of the discharge pipe 320.

The numerical analysis is the result of measurement using ANSYS CFX, a thermo-fluid analysis software. As a boundary condition of the numerical analysis, 'compressed air' is used as a feed fluid. In the flow amplifiers 100 and 100 ' Were tested under the conditions of no frictional force. In addition, the length of the inlet pipe 220 and the outlet pipe 320, which respectively couple to the flow amplifiers 100 and 100 ', is 1 m.

The flow amplifier 100 according to the first preferred embodiment of the present invention is configured such that the 0.1 MPa supply fluid circulates through the circulation flow path 121 and flows through the injection part 130, The voltage of the X region increases toward the inlet pipe 220 with respect to the Y region and the voltage of the Z region increases toward the outlet pipe 320 with respect to the Y region, Has a lower voltage than the X and Z regions.

The above-described voltage force distribution in the X region to the Z region increases the pressure of the supply fluid to 0.2 MPa, 0.3 MPa and 0.4 MPa, respectively, as shown in 10 (b) to 10 (d) The distribution of the voltage inside the flow amplifier 100 according to the first embodiment of the present invention is obtained by the numerical analysis according to the distribution of the voltage force, The voltage of the Y region is further reduced. This numerical analysis result is due to the fact that the Coanda effect is further developed as the supply fluid pressure increases.

As shown in Figs. 11 (a) to 11 (d), the flow amplifier 100 according to the first preferred embodiment of the present invention having the above-described voltage distribution has a characteristic that as the supply pressure of the supply fluid increases, The flow rate of the supply fluid flowing along the inclined surface of the second expanded portion 112b is increased by the effect of the flow of the supply fluid flowing along the inner surface of the discharge pipe 320. As a result, .

Accordingly, the supply fluid having a high flow rate along the inner surface of the discharge pipe 320 sucks the surrounding supply fluid and the discharge fluid and discharges the discharge fluid to the discharge pipe 320, The discharge flow rate is amplified.

The flow amplifier 100 'according to the second preferred embodiment of the present invention is configured such that the 0.1 MPa supply fluid circulates along the circulation flow path 121', as shown in FIG. 12 (a) The voltage of the X 'region increases toward the inlet pipe 220 with respect to the Y' region, and the voltage of the Z 'region increases toward the outlet pipe 320 with respect to the Y' region when injected into the through hole 111 ' As the voltage increases, the Y 'region has lower voltage than the X' and Z 'regions.

However, when the pressure of the supply fluid is increased to 0.2 MPa, 0.3 MPa and 0.4 MPa and supplied to the flow amplifier 100 ', as shown in FIGS. 12 (b) to 12 (d) , And this biased voltage distribution is more prominent when the supply pressure of the supply fluid is 0.4 MPa.

This biased voltage force distribution is caused by the biased Coanda effect as the supply pressure of the supply fluid increases.

Such a biased voltage distribution is obtained by connecting the circulation flow path 121 'of the flow amplifier 100' according to the second preferred embodiment of the present invention and the circulation flow path 121 'of the flow amplifier 100 according to the first preferred embodiment of the present invention ) Are different in shape.

In other words, in the case of the flow amplifier 100 'according to the second preferred embodiment of the present invention, the width of the cross-sectional area of the circulating flow path 121' becomes smaller as the supply fluid circulates in the circulating flow path 121 ' The flow rate of the supply fluid injected into the injection section 130 'is higher than that of the flow rate amplifier 100 according to the first preferred embodiment of the present invention, , A section where the pressure is extremely high in a certain region is generated.

Due to such a biased voltage distribution, the fluid in the region having the high-voltage power flows to the region having the low-voltage power, the supply fluid is rotated clockwise in the circulating flow path 121 ' A helical current flows in the flow amplifier 100 'in the clockwise direction along the inner surface of the through hole 111' of the flow amplifier 100 '.

The helical current is generated in the lower portion of the Y 'region, which is the inner region of the through hole 111', and is formed throughout the entire interior of the discharge pipe 320 communicating with the Z 'region, that is, the through hole 111' 13 (a) to 13 (d), it can be seen that the flow velocity distribution in the Z 'region becomes very high.

Also, as the supply pressure of the supply fluid becomes higher, the flow velocity distribution inside the flow amplifier 100 'can be clearly divided into the high velocity region and the low velocity region as shown in FIG. Therefore, the higher the supply pressure of the supply fluid is, the stronger the spiral flow is formed, and the flow velocity of the discharge fluid and the supply fluid discharged through the discharge pipe 320 becomes higher.

As described above, the flow amplifier 100 'according to the second preferred embodiment of the present invention forms a spiral flow that rotates clockwise inside the flow amplifier 100' and flows to the discharge pipe 320, The discharge flow rate of the discharge fluid discharged through the flow amplifier 100 according to the first preferred embodiment of the present invention and the discharge flow rate and discharge flow rate of the discharge fluid higher than the discharge flow rate can be obtained.

These effects can also be confirmed by the numerical analysis results of FIGS. 15 and 16, whereby the flow amplifier 100 'according to the second preferred embodiment of the present invention amplifies the discharge flow rate of the discharged fluid with higher efficiency .

The flow amplifier 100 according to the first preferred embodiment of the present invention and the flow amplifier 100 'according to the second preferred embodiment of the present invention can be used in the field of semiconductor processing, Can be used for discharge.

In this case, instead of the fan unit used in the conventional semiconductor processing equipment, the flow amplifiers 100 and 100 'according to the first and second preferred embodiments of the present invention can be used, Not only the discharge efficiency of the discharged fluid can be increased, but also the power consumption can be reduced and the vibration and the noise can be reduced at the same time.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. Or modified.

100, 100 ': Flow Amplifier 110a, 110a': First body
110b, 110b ': second body 111, 111': through-hole
111a, 111a ': first through hole 111b, 111b': second through hole
112b, 112b ': second expansion parts 113a, 113a': first expansion parts
113b, 113b ': third expansion portion 121, 121': circulation flow path
123, 123 ': inlet flow path 125, 125': inlet
130, 130 ': injection part 151: first bolt hole
152: second bolt hole 153: third bolt hole
200: inlet pipe 210: inlet pipe flange
220: inlet pipe 300: exhaust pipe
310: exhaust pipe flange 320: exhaust pipe

Claims

A through hole through which the discharge fluid flows;
A circulation passage formed in an annular shape surrounding the through-hole;
An inflow channel communicating with the circulation channel to introduce a supply fluid into the circulation channel, and being disposed eccentrically with respect to a center axis of the through-hole; And
And an injection part formed on the circulating flow path and injecting the supply fluid into the through hole,
The supply fluid circulates in one direction along the circulation flow path and is injected into the through-hole through the injection part,
Wherein the circulation flow path is formed such that the cross-sectional area of the circulation flow path becomes smaller in one direction in which the supply fluid circulates.

The method according to claim 1,
Wherein the circulation flow path is formed such that a width of a cross-sectional area of the circulation flow path becomes smaller toward one direction in which the supply fluid circulates.

The method according to claim 1,
Wherein the circulation flow path is formed such that the width of the cross-sectional area becomes smaller toward one direction in which the supply fluid circulates, and the depth of the cross-sectional area becomes shallower toward one direction in which the supply fluid circulates.

The method according to claim 1,
Wherein a first expansion part is formed on an inflow side of the through-hole to which the discharge fluid flows, and the first expansion part has a larger diameter toward the inflow side.

The method according to claim 1,
Wherein a second expansion part is formed on the discharge side where the discharge fluid is discharged from the through hole, and the diameter of the second expansion part becomes larger toward the discharge side.

The method according to claim 1,
Wherein one direction in which the supply fluid is circulated along the circulation flow passage is a clockwise direction.

A flow amplifier comprising a first body, a second body coupled to a lower portion of the first body, and an injection portion formed by coupling the first body and the second body,
The first body includes a first through hole formed at the center of the first body,
The second body includes a second through-hole formed at the center of the second body, a circulation channel formed in an annular shape surrounding the second through-hole, And an inflow passage which is introduced into the flow path and is disposed eccentrically with respect to the central axis of the second through hole,
The first through hole and the second through hole are communicated with each other to form a through hole by upward and downward coupling of the first body and the second body, the injection portion is formed on the circulating flow passage,
The supply fluid circulates in one direction along the circulation flow path and is injected into the through-hole through the injection part,
Wherein the circulation flow path is formed such that the cross-sectional area of the circulation flow path becomes smaller in one direction in which the supply fluid circulates.

8. The method of claim 7,
Wherein the first body has a rectangular shape and the second body has a rectangular shape corresponding to the first body.

9. The method of claim 8,
An inflow tube portion is coupled to an upper portion of the first body, a discharge tube portion is coupled to a lower portion of the second body,
Wherein the inflow tube portion has a rectangular shape corresponding to the rectangular first body and is connected to an upper portion of the first body; And an inflow pipe formed at the center of the inflow tube flange and communicating with the first through hole,
Wherein the discharge pipe portion has a rectangular shape corresponding to the rectangular second body and has a discharge pipe flange coupled to a lower portion of the second body; And a discharge pipe formed at the center of the discharge pipe flange and communicating with the second through hole.