KR20170050608A - The system and method for detecting defect of substrate using laser sensor unit - Google Patents

The system and method for detecting defect of substrate using laser sensor unit Download PDF

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Publication number
KR20170050608A
KR20170050608A KR1020150152371A KR20150152371A KR20170050608A KR 20170050608 A KR20170050608 A KR 20170050608A KR 1020150152371 A KR1020150152371 A KR 1020150152371A KR 20150152371 A KR20150152371 A KR 20150152371A KR 20170050608 A KR20170050608 A KR 20170050608A
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South Korea
Prior art keywords
substrate
unit
distance
photographing
laser sensor
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KR1020150152371A
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Korean (ko)
Inventor
김호진
최항석
양명곤
박창석
김재현
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주식회사 엘지화학
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Publication of KR20170050608A publication Critical patent/KR20170050608A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8914—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the material examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/12—Circuits of general importance; Signal processing
    • G01N2201/126—Microprocessor processing

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Textile Engineering (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Electromagnetism (AREA)
  • Quality & Reliability (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

An embodiment of the present invention relates to a system to detect a defect of a substrate using a laser sensor unit, and a method to detect a defect of a substrate using the same. According to an embodiment of the present invention, the system to detect a defect of a substrate using a laser sensor unit comprises: a substrate transport unit which transports the substrate; a filming unit distanced from the substrate transported by the substrate transport unit for a preset distance, filming a surface of the substrate; a light source placed to face the filming unit; the laser sensor unit placed near the filming unit; a distance control unit which controls a distance between the filming unit and the substrate; and a control unit which controls an operation of the substrate transport unit, the filming unit, the light source, the laser sensor unit, and the distance control unit. The laser sensor unit is capable of measuring the distance from the laser sensor unit to the transported substrate in real time. The present invention aims to provide a system to detect a defect of a substrate using a laser sensor unit and a method to detect a defect of a substrate using the same, capable of minimizing a rate of error in detecting a defect.

Description

TECHNICAL FIELD [0001] The present invention relates to a system for detecting a presence or absence of a defect in a substrate using a laser sensor unit, and a method for detecting presence or absence of a defect in the substrate through the system.

The present invention relates to a system for detecting the presence or absence of a defect in a substrate using a laser sensor unit and, more particularly, to a method and apparatus for measuring the distance between a substrate and a laser sensor unit in real time, To a system for quickly and accurately detecting the presence or absence of a defect in a base material by adjusting the distance between the photographing portion and the base material, and a method for detecting presence or absence of a base material using the system.

Recently, various thin film type display devices such as an organic light emitting diode display (OLED), a liquid crystal display (LCD), and a plasma display (PDP) have emerged due to the explosion of optical technology. These thin film type display devices are thinner, lighter, and operate at lower power than conventional CRT cathode tubes, and their usability is increasing. Such thin film type display devices generally have a structure including a polarizing plate for providing a specific polarized light to a display panel, and the polarizing plate includes a polarizer and a protective film or the like that can be attached to one or both sides of the polarizer to protect the polarizer .

Such a protective film or a polarizing film may generate bubbles during its manufacture and processing and may thus cause optical defects in the appearance of the film. Therefore, a system for detecting defects of an optical film has been used heretofore. Such a conventional automatic defect inspection system has a problem that a roll for transferring an optical member (substrate) such as an optical film, There is a problem that the accuracy of detecting defects due to film hunting may be somewhat lowered. In other words, the defects existing on the optical member due to the shaking of the transport roll, the wave phenomenon and the temporary film hunting may be out of the camera's depth range, and the detection of such defects may be missed or failed.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to minimize the defect detection failure rate by minimizing the defects existing on the optical member due to the shaking of the transport roll, the wave development and the temporary film hunting, I want to.

As an embodiment of the present invention, there can be provided a system for detecting presence or absence of a substrate using a laser sensor unit and a method for detecting presence or absence of a substrate through the system.

A system for detecting presence / absence of a substrate using a laser sensor unit according to an embodiment of the present invention includes a substrate transporting unit for transporting a substrate, a substrate transporting unit disposed apart from the substrate transported through the substrate transporting unit by a predetermined distance, A light source disposed opposite to the photographing section, a laser sensor section disposed adjacent to the photographing section, a distance adjusting section and a substrate conveying section for adjusting a distance between the photographing section and the substrate, a photographing section, a light source, and a laser sensor And a control unit for controlling the operation of the distance measuring unit and the distance adjusting unit, and the laser sensor unit can measure the distance from the laser sensor unit to the substrate to be transported in real time.

 In addition, the substrate carrying part may be formed to have a roll-to-roll structure, and at least one camera may be included in the photographing part for detecting presence or absence of a defect of the substrate, and depth control for the image to be photographed by the camera It can be possible.

When a plurality of cameras are included in the photographing unit, the laser sensor unit may be disposed adjacent to each camera, or may be disposed for each photographing group formed by grouping the plurality of cameras.

The control unit according to the embodiment of the present invention allows the laser sensor unit to measure the distance from the laser sensor unit to the substrate to be transported in real time and adjusts the distance to the distance control unit based on the information on the distance measured in real time by the laser sensor unit The distance between the photographing part and the substrate can be adjusted according to the state of the substrate to be conveyed.

In addition, at least one of depth adjustment for an image to be photographed through operation of a lens magnification in a camera and depth adjustment for an image to be photographed by adjusting a separation distance of the distance adjustment unit can be determined by a control unit.

A method for detecting presence / absence of a substrate using a laser sensor unit using a laser sensor unit according to an embodiment of the present invention includes the steps of transporting a substrate to be subjected to defect presence / absence detection, Measuring in real time the distance between the substrate to be photographed and the laser sensor unit using the laser sensor unit disposed adjacent to the photographing unit prior to the surface photographing of the substrate through the photographing unit for photographing the surface of the substrate, Determining whether or not the distance between the photographing unit and the substrate is adjusted based on the measured distance through the control unit, determining a distance between the photographing unit and the photographing unit, Based on the surface image of the substrate obtained through the photographing, Obligations may include the step of determining via the control unit.

Meanwhile, as an embodiment of the present invention, a computer-readable recording medium on which a program for causing the computer to execute the above-described method may be provided.

The use of the defect detection system for a substrate using the laser sensor unit according to an embodiment of the present invention can prevent defects existing on the substrate from moving out of the depth range of the camera due to trembling of the transport roll, The failure detection failure rate can be minimized.

In addition, defects existing on the substrate can be detected quickly and accurately.

FIG. 1 shows a system for detecting presence or absence of a defect using a laser sensor unit according to an embodiment of the present invention.
2A to 2C show a system for detecting the presence or absence of a defect in a substrate using a laser sensor unit according to another embodiment of the present invention.
3 is a flowchart showing a method of detecting the presence or absence of a defect in a substrate through a system for detecting presence / absence of a defect using a laser sensor unit according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, which will be readily apparent to those skilled in the art. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and similar parts are denoted by like reference characters throughout the specification.

The terms used in this specification will be briefly described and the present invention will be described in detail.

While the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not limited to the disclosed embodiments. Also, in certain cases, there may be a term selected arbitrarily by the applicant, in which case the meaning thereof will be described in detail in the description of the corresponding invention. Therefore, the term used in the present invention should be defined based on the meaning of the term, not on the name of a simple term, but on the entire contents of the present invention.

When an element is referred to as "including" an element throughout the specification, it is to be understood that the element may include other elements, without departing from the spirit or scope of the present invention. Also, the terms "part," " module, "and the like described in the specification mean units for processing at least one function or operation, which may be implemented in hardware or software or a combination of hardware and software . In addition, when a part is referred to as being "connected" to another part throughout the specification, it includes not only "directly connected" but also "connected with other part in between".

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 shows a system for detecting presence or absence of a defect using a laser sensor unit according to an embodiment of the present invention.

A substrate defect detection system 1000 using a laser sensor unit 400 according to an embodiment of the present invention includes a substrate transport unit 100 for transporting the substrate 1 and a substrate transport unit 100 for transporting the substrate 1, A photographing unit 200 disposed at a predetermined distance from the conveyed substrate 1 and for photographing the surface of the substrate 1; a light source 300 disposed opposite to the photographing unit 200; a photographing unit 200 A distance adjusting unit 500 for adjusting a distance between the photographing unit 200 and the substrate 1, a substrate conveying unit 100, a photographing unit 200, a light source And a controller 600 for controlling operations of the laser sensor unit 300 and the laser sensor unit 400 and the distance adjusting unit 500. The laser sensor unit 400 measures the distance between the substrate to be transferred and the laser sensor unit 400 It can be measured in real time.

The substrate 10 according to an embodiment of the present invention may be, but not limited to, an optical film, a polarizing plate, a sheet coated with a functional material, and the like.

 In addition, the substrate transport unit 100 may be configured to have a roll-to-roll structure, and at least one camera may be included in the image pickup unit 200 for detecting the presence or absence of a defect in the substrate 1, It is possible to adjust the depth for the image to be photographed by the camera. The plurality of rolls of the substrate conveying section 100 may be disposed such that they are mutually shifted as in FIG. 1 or the substrate 1 is conveyed through the upper or lower portion of the substrate conveying section 100.

Referring to FIG. 1, a laser sensor unit 400 may be used to prevent the substrate 1 from being out of the depth range of the photographing unit 200. The laser sensor unit 400 can measure and monitor the separation distance between the substrate 1 and the photographing unit 200. When the distance between the substrate 1 and the photographing unit 200 is changed based on a predetermined distance in the process of transferring the substrate 1, the controller 600 controls the distance adjusting unit 500 to move the substrate 1 and the photographing unit 200 200 can be adjusted. In other words, the distance adjusting unit 500 can be driven by the distance measured and monitored through the laser sensor unit 400 so that the distance between the base 1 and the photographing unit 200 is maintained at a predetermined distance. The depth range of the photographing unit 200 can be maintained by the driving of the distance adjusting unit 500.

According to an embodiment of the present invention, the photographing unit 200 may include at least one camera. Also, a plurality of photographing units 200 may be utilized for the presence or absence of a defect.

When a plurality of cameras are included in the photographing unit 200, the laser sensor unit 400 may be disposed adjacent to each camera or separately for each photographing group formed by grouping the cameras. In other words, when a plurality of photographing units 200 are utilized for the presence / absence of a defect, the laser sensor unit 400 may be disposed individually adjacent to each photographing unit (e.g., camera) Cameras) that are grouped and formed. This will be described later with reference to Figs. 2A to 2C.

2A to 2C show a system for detecting the presence or absence of a defect in a substrate using a laser sensor unit according to another embodiment of the present invention.

2A, a plurality of photographing units 201, 202, ... can be used for detecting the presence or absence of a defect in the substrate 1, and laser sensor units 401, 402, And can be disposed separately adjacent to the portion. Also, the distance adjusting unit 500 may be disposed separately adjacent to the respective photographing units, and may be connected to the photographing unit 200 and the laser sensor unit 400, respectively.

Also, referring to FIG. 2B, the plurality of photographing units 201, ..., 20n, and n may be grouped to form one photographing group. In other words, such a single photographing group (for example, a series of camera lines) can be used for detecting the presence or absence of defects in the substrate 1, and the photographing group can be connected to the distance adjusting unit 500 and the laser sensor unit 400 .

2C, a plurality of photographing units 201, 202, ... may be used for detecting the presence or absence of a defect in the substrate 1, and a plurality of photographing units 201, 202, A plurality of photographing groups (for example, g1, ..., gn, n are natural numbers). Each of the photographing groups may be provided with laser sensor units 401, ..., and 40n, and the distance adjusting units 501, ..., and 50n may be separately disposed and connected to the respective photographing groups .

Further, in the above-described example, at least one of the light sources 300 may be used to detect the presence or absence of defects in the substrate 1. [

The distance adjusting unit 500 according to an embodiment of the present invention may include a step motor, a servo motor, and the like. In other words, the distance between the base material 1 and the photographing unit 200 can be adjusted by the operation of the motor. The control unit 600 according to an embodiment of the present invention allows the laser sensor unit 400 to measure the distance from the laser sensor unit 400 to the substrate 1 in real time and controls the laser sensor unit 400, The distance adjusting unit 500 may adjust the distance between the photographing unit 200 and the substrate 1 according to the state of the substrate 1 to be transported.

In addition, the control unit 600 may adjust at least one of the depth adjustment for the image to be photographed through the lens magnification operation of the camera of the photographing unit 200 and the depth adjustment for the image to be photographed by adjusting the separation distance of the distance adjustment unit 500 One can be determined. In other words, the control unit 600 can directly control the camera of the photographing unit to adjust the depth for the image to be photographed. For example, the depth of field can be adjusted through lens magnification manipulation of the camera or the like. In addition, the control unit 600 can adjust the separation distance between the base material 1 and the photographing unit 200 based on the distance information measured and monitored through the laser sensor unit 400. For example, if the separation distance between the base material 1 and the photographing unit 200 is changed by more than a predetermined distance or less by a transportation shake of the base material 1 or the like, the control unit 600 adjusts the distance To adjust the separation distance between the base material 1 and the photographing unit 200. [

3 is a flowchart showing a method of detecting the presence or absence of a defect in a substrate through a system for detecting presence / absence of a defect using a laser sensor unit according to an embodiment of the present invention.

The method for detecting the presence or absence of a defect in the base material 1 through the system for detecting presence or absence of a defect 1000 using the laser sensor unit according to an embodiment of the present invention includes the steps of carrying the base material 1 S100) and prior to the surface photographing of the substrate 1 through the photographing unit 200 for photographing the surface of the substrate 1, the photographing unit 200 is disposed at a predetermined distance from the conveyed substrate 1, (S200) of measuring the distance between the substrate (1) and the laser sensor unit (400) to be photographed and carried by using the laser sensor unit (400) arranged adjacent to the laser sensor unit (400) 200) and the base material (1) through the control unit (600), determining whether or not the distance between the photographing unit (200) and the photographing unit (200) (S400) of photographing the surface of the base material 1 using the arranged light source, And a step (S500) of judging the presence or absence of a defect of the base material 1 through the control unit based on the surface image of the base material 1 obtained through photographing.

With respect to the method according to an embodiment of the present invention, the contents of the above-described system can be applied. Therefore, the description of the same contents as the above-mentioned system is omitted in connection with the method.

One embodiment of the present invention may also be embodied in the form of a recording medium including instructions executable by a computer, such as program modules, being executed by a computer. Computer readable media can be any available media that can be accessed by a computer and includes both volatile and nonvolatile media, removable and non-removable media. In addition, the computer-readable medium may include both computer storage media and communication media. Computer storage media includes both volatile and nonvolatile, removable and non-removable media implemented in any method or technology for storage of information such as computer readable instructions, data structures, program modules or other data. Communication media typically includes any information delivery media, including computer readable instructions, data structures, program modules, or other data in a modulated data signal such as a carrier wave, or other transport mechanism.

It will be understood by those skilled in the art that the foregoing description of the present invention is for illustrative purposes only and that those of ordinary skill in the art can readily understand that various changes and modifications may be made without departing from the spirit or essential characteristics of the present invention. will be. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. For example, each component described as a single entity may be distributed and implemented, and components described as being distributed may also be implemented in a combined form.

The scope of the present invention is defined by the appended claims rather than the detailed description and all changes or modifications derived from the meaning and scope of the claims and their equivalents are to be construed as being included within the scope of the present invention do.

1: substrate
100: substrate conveying section 200: photographing section
201: first photographing unit 202: second photographing unit
300: light source 400: laser sensor unit
401: first laser sensor unit 402: second laser sensor unit
500: distance adjusting unit 501: first distance adjusting unit
502: second distance adjusting unit 600:
g1: first photographing group g2: second photographing group
1000: Detection of presence or absence of defects of substrate using laser sensor unit

Claims (7)

A system for detecting presence or absence of a defect in a substrate using a laser sensor unit,
A substrate carrying part for carrying the substrate;
A photographing unit disposed at a predetermined distance from the substrate conveyed through the substrate conveying unit and for photographing the surface of the substrate;
A light source disposed opposite to the photographing unit;
A laser sensor unit disposed adjacent to the photographing unit;
A distance adjusting unit for adjusting a distance between the photographing unit and the substrate; And
And a control unit for controlling operations of the substrate carrying unit, the photographing unit, the light source, the laser sensor unit, and the distance adjusting unit,
Wherein the laser sensor unit measures in real time the distance from the laser sensor unit to the substrate to be conveyed.
The method according to claim 1,
The substrate carrying portion may be formed to have a roll-to-roll structure,
Wherein at least one camera for detecting the presence or absence of a defect of the base material can be included in the photographing unit and the depth can be adjusted for the image to be photographed by the camera by the control unit. Detection system.
3. The method of claim 2,
Wherein when the photographing unit includes a plurality of cameras, the laser sensor unit is disposed for each photographing group formed adjacent to each of the cameras or grouped into a plurality of cameras. Presence / absence detection system.
The method according to claim 1,
Wherein the control unit causes the laser sensor unit to measure a distance from the laser sensor unit to the substrate to be transported in real time and controls the distance adjuster to adjust the distance based on the information on the distance measured in real time by the laser sensor unit And the distance between the photographing unit and the substrate is adjusted according to the state of the substrate to be conveyed.
3. The method of claim 2,
Wherein at least one of a depth adjustment for an image to be photographed through operation of a lens magnification in the camera and a depth adjustment for an image to be photographed by adjusting the separation distance of the distance adjustment unit is determined by the control unit Detection system for presence or absence of defects in a substrate by using a part.
A method for detecting presence or absence of defects in a substrate through a defect detection system for a substrate using a laser sensor unit,
Carrying the substrate to be subjected to defect presence / absence detection;
Wherein the laser sensor unit is disposed at a predetermined distance from the conveyed substrate and prior to the surface photographing of the substrate through the photographing unit for photographing the surface of the substrate, Measuring a distance between the substrate and the laser sensor unit in real time;
Determining whether the distance between the photographing unit and the substrate is adjusted based on the measured distance through the control unit;
Photographing the surface of the base material using the photographing unit, the distance being adjustable according to a result of the determination, and the light source arranged opposite to the photographing unit; And
And judging, through the control unit, whether or not the substrate has a defect based on the surface image of the substrate obtained through the photographing.
A computer-readable recording medium on which a program for implementing the method of claim 6 is recorded.

KR1020150152371A 2015-10-30 2015-10-30 The system and method for detecting defect of substrate using laser sensor unit KR20170050608A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190113123A (en) * 2018-03-27 2019-10-08 국방과학연구소 A method and an apparatus for estimating a distance of a target by using an Laser Range-Gated Imaging sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190113123A (en) * 2018-03-27 2019-10-08 국방과학연구소 A method and an apparatus for estimating a distance of a target by using an Laser Range-Gated Imaging sensor

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