KR20170040689A - Non Powered Gas Sensor - Google Patents

Non Powered Gas Sensor Download PDF

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Publication number
KR20170040689A
KR20170040689A KR1020150139976A KR20150139976A KR20170040689A KR 20170040689 A KR20170040689 A KR 20170040689A KR 1020150139976 A KR1020150139976 A KR 1020150139976A KR 20150139976 A KR20150139976 A KR 20150139976A KR 20170040689 A KR20170040689 A KR 20170040689A
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Prior art keywords
adsorption
chamber
adsorption member
conductive surface
gas
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KR1020150139976A
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Korean (ko)
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KR101729732B1 (en
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서정환
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홍익대학교 산학협력단
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2214—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling by sorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2273—Atmospheric sampling

Abstract

A gas sensor comprises: a chamber in which an internal space is formed; a channel opened for gas to communicate into the chamber; an adsorption member having electrical conductivity, and formed in the internal space for a harmful substance contained in the gas flowing into the chamber to be attached thereto; and an electric circuit having the adsorption member as one resistance. Therefore, as the harmful substance is attached to the adsorption member, a change in resistance of the electric circuit is detected to detect the harmful substance.

Description

[0001] The present invention relates to a non-powered gas sensor,

The present invention relates to a gas sensor, and more particularly, to a gas sensor capable of sucking a gas without any additional power to enable identification and identification of the presence of harmful substances contained in the gas.

Unexpected leakage of harmful substances into the atmosphere in an industrial environment can lead to various safety accidents such as human accidents.

Depending on the kind of harmful substances, the effect on the human body may be different, and in some cases, it may seriously affect the human body in a very short time. Therefore, it is necessary to quickly detect the type and concentration of harmful substances contained in the air and take appropriate countermeasures.

Various sensor systems for detecting harmful substances in gas have been studied.

According to the prior art, there is a sensor system system which measures the change of electrical / chemical reaction with the surface of a sensor after the gas is transmitted to the inside of the sensor by using a power such as a pump for a predetermined time, And the response of the sensor to the sensor is measured.

However, according to the sensor system according to the related art, high power is used by using a pump or the like for guiding the gas to the inside of the sensor. In the method of detecting the gas by placing the sensor itself in the air, Since it is not easily induced in the human body, it takes less time to analyze harmful substances.

Therefore, it is difficult to suitably use in an industrial field where immediate measures are required when harmful gas is leaked.

In addition, the sensor system according to the prior art requires a lot of additional components such as a pump, and is complicated in configuration and large in size, so that it is limited to be universally used over the entire area of an industrial site.

Korean Patent Publication No. 10-1994-0015498

Disclosure of Invention Technical Problem [8] Accordingly, the present invention has been made to solve the above problems of the prior art, and it is an object of the present invention to provide a non-powered gas sensor which is capable of analyzing harmful substances in a gas by sucking gas without any separate power means, The purpose.

According to an aspect of the present invention, there is provided a plasma processing apparatus including a chamber having an internal space formed thereon, a channel opened to allow gas to flow into the chamber, And an electric circuit including the adsorption member as a resistor, wherein the adsorption member is disposed in the vicinity of the inlet of the adsorption member so that the harmful substance contained in the gas adheres to the adsorption member, There is provided a gas sensor for sensing a change in resistance and sensing the harmful substance.

According to one embodiment, the gas flows into the chamber through the channel with a diffusion action.

According to one embodiment, the adsorption member and the channel are formed to face each other, and the adsorption member extends parallel to the longitudinal direction of the channel.

According to one embodiment, the adsorption member is formed by densely arranging a plurality of adsorption columns spaced apart from each other.

According to one embodiment, the gas sensor includes a plurality of adsorption members and a plurality of channels, and one or more adsorption members are formed correspondingly for each channel.

According to one embodiment, the plurality of adsorption columns forming one adsorption member include adsorption columns having different lengths.

According to one embodiment, the length of the longest adsorption column among the plurality of adsorption columns forming one adsorption member is different for each of the plurality of adsorption members.

According to one embodiment, the plurality of adsorption columns forming one adsorption member include adsorption columns having different cross-sectional areas.

According to an embodiment, the plurality of channels include channels having different cross-sectional areas.

According to one embodiment, the gas sensor includes a conductive surface formed in the chamber, and a conductor formed outside the chamber and electrically connected to the conductive surface, wherein the adsorption member is formed on the conductive surface , The electric circuit comprises the conductive surface, the adsorption member and the conductor.

According to one embodiment, the conductive surface is formed by a conductive substrate attached on one side of the chamber.

According to one embodiment, the conductive surface is formed by penetrating conductive ions on one side of the chamber.

According to one embodiment, the adsorption member is formed of an activated nano-carbon material having conductivity capable of being hetero-bonded to the conductive surface.

According to one embodiment, the adsorption member is transferred onto the conductive surface in a grown or grown state on the conductive surface.

The adsorbing member is formed of a conductive nanomaterial that is transferred on the conductive surface in a grown or grown state on the conductive surface.

According to one embodiment, the adsorptive member is formed of an activated nanocarbon material capable of being heterojunction to the conductive surface.

According to one embodiment, the gas sensor estimates the kind of the harmful substance by comparing the resistance change library of the electric circuit experimentally obtained with respect to the hazardous substance with the actually sensed resistance change.

According to one embodiment, the resistance-change library includes information on a resistance change of the electric circuit when gas containing two or more kinds of harmful substances is introduced into the chamber.

According to one embodiment, the electric circuit is configured such that a resistance change is measured for each of the plurality of adsorption members.

1 is a perspective view conceptually showing a gas sensor according to an embodiment of the present invention.
Fig. 2 is a schematic representation of the gas sensor of Fig. 1 in side view.
Figure 3 shows the back side of the gas sensor of Figure 1;
4 is a view showing a state where harmful substances are introduced into a chamber of a gas sensor according to an embodiment of the present invention.
FIG. 5 shows a process in which different kinds of harmful substances are introduced into a gas sensor and detected.
Fig. 6 is an enlarged view of one adsorption member of Fig. 1;
7 is a graph exemplarily showing a result of detection of a gas containing a certain kind of harmful substances at a specific concentration through a gas sensor.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. Although the present invention has been described with reference to the embodiments shown in the drawings, it is to be understood that the technical idea of the present invention and its essential structure and action are not limited by this embodiment.

1 is a conceptual perspective view of a gas sensor 1 according to an embodiment of the present invention.

As shown in FIG. 1, the gas sensor 1 includes a substantially rectangular plate-shaped body 10 formed by joining an upper plate 100 and a lower plate 200. In FIG. 1, the upper plate 100 and the lower plate 200 are shown separately for convenience of explanation.

According to the present embodiment, the upper plate 100 is formed of a glass material, and the lower plate 200 is formed of a silicon material. The upper plate 100 and the lower plate 200 can be strongly bonded to each other by anodic bonding, which is a bonding method using a voltage at atmospheric pressure.

A chamber 210 having a predetermined inner space is formed in the lower plate 200. The chamber 210 includes gas outlets 211 and 212 formed at both ends thereof. The gas outlet 211 is opened in the lateral direction of the lower plate 200 and the other gas outlet 212 is opened in the upper side of the lower plate 200. According to the present embodiment, two gas outlets 211 and 212 are formed, but only one gas outlet 212 may be formed.

According to the present embodiment, the chamber 100 is formed by deep etching one side of the lower plate 200 using a deep reactive ion etching (DRIE) process. Therefore, the nano-sized structure can be finely formed, and the overall size of the gas sensor 1 can be reduced.

The inner space of the chamber 100 is etched in the form of a concave groove in the lower plate 200 and the upper plate 100 is bonded to complete the structure of the chamber 100 having the upper portion closed.

In the upper plate 100, a plurality of channels 110 are formed so as to pass through the upper and lower sides. The plurality of channels 110 serve as an inflow path through which the gas can flow into the chamber 100, and at the same time, the harmful substances contained in the gas are separated according to the diffusion, as described later.

The plurality of channels 110 may all have the same cross-sectional area or may be formed to be different from each other.

The plurality of channels 110 are densely formed so as to occupy only an area not exceeding the boundary of the chamber 100 when the gas sensor 1 is viewed from above.

A through hole 120 is formed in the upper plate 100 at a position corresponding to one gas outlet 212 of the chamber 210. The gas introduced into the chamber 210 through the channel 110 flows out through the gas outlet 212 so that a circulating flow of the gas leading to the outside of the chamber 100 can be formed.

In FIG. 1, the gas outlet 212 is communicated with the through hole 120 formed in the upper plate 100, but the present invention is not limited thereto.

A groove is formed in the lower plate 200 to extend from the gas outlet 212 through the upper surface of the lower plate 200 and open to the side surface of the lower plate 200 to allow the gas to escape from the chamber 210 Or the like. The upper part of the channel is closed by joining the upper plate 100 on the lower plate 200.

The channel may be formed simultaneously with the chamber 100 using a deep reactive-ion etching (DRIE) process.

Referring to FIG. 1, in the inner space of the chamber 210, a plurality of adsorption members 220 having electrical conductivity and capable of attaching toxic substances contained in the gas introduced into the chamber 210 are formed.

Fig. 2 is a schematic representation of the gas sensor 1 of Fig. 1 on the side.

As shown in FIG. 2, the adsorption members 220 are formed so as to face each other in correspondence with the channels 110, and extend in parallel with the longitudinal direction of the channels 110.

According to the present embodiment, the cross-sectional area of the channel 110 and that of the corresponding adsorption member 220 are similar to each other, and one adsorption member 220 is correspondingly formed for each channel 110, . That is, the cross-sectional area of the adsorbing member 220 may be smaller than the cross-sectional area of the corresponding channel 110, so that two or more adsorbing members 220 may be formed under one channel 110.

2, a conductive surface 211 having conductivity is formed on the lower surface of the chamber 210. The adsorption member 220 is formed on the conductive surface 211 to electrically connect the conductive surface 211 to the conductive surface 211, .

The conductive surface 211 may be formed by a conductive substrate attached on the lower surface of the chamber 210. According to the present embodiment, the lower surface of the chamber 210 has conductivity, Respectively.

More specifically, after the shape of the chamber 210 is etched in the lower plate 200, the lower surface of the silicon material is infiltrated with a conductive ion such as boron, for example, by ion-implantation. According to this method, the lower surface of the silicon material forms the conductive surface 211 having the electric conductivity.

Although not shown in detail, the conductive surface 211 may be formed so that the entire lower surface of the chamber 210 has conductivity, but in order to ensure the selectivity of the gas sensor 1, Conductive ions may be selectively injected into the portions where the adsorption member 220 is formed so that only the portion where the adsorption member 220 is formed has conductivity.

When the conductive surface 211 is formed by a conductive substrate, it is understood that the conductive substrate may be patterned in the same manner as the arrangement of the adsorption member 220 so that only the portion where the adsorption member 220 is formed may have conductivity will be.

According to this embodiment, the adsorption member 220 is formed of a carbon-based nanomaterial that is conductive and heterojunction. For example, an activated nanocarbon material such as a three-dimensional graphene sheet, a carbon nano tube (CNT), or the like. The adsorption member 220 according to this embodiment is formed of CNT.

The CNTs forming the adsorbent member 220 may be formed in such a manner that they grow on the conductive surface 211 to have a length or are transferred onto the conductive surface 211 in a state where they are already grown.

2, a conductor 230 electrically connected to the conductive surface 211 is formed on the outside of the chamber 210 (i.e., the lower surface of the lower plate 200).

When the conductive surface 211 is a conductive substrate formed in the chamber 210, the conductive surface 211 and the conductor 230 may be electrically connected to each other through a lower surface of the chamber 210 using electric wires or the like. When the lower surface of the chamber 210 itself forms the conductive surface 211 as shown in the figure, the conductive surface 211 and the conductor 230 can be formed only by bonding a metal such as platinum as the conductor 230 to the lower surface of the chamber 210. [ ).

Fig. 3 shows the back surface of the gas sensor 1. Fig.

3, a conductor 230 electrically connected to the conductive surface 211 is attached to the rear surface of the lower plate 200. A main conductor 234 is electrically connected to the conductor 230, At both ends of the electric wire 234, a terminal 233 to which an electric device such as the resistance measuring device 11 (see Fig. 1) can be connected is formed.

The resistance meter 11 is formed on the body of the sensor 1 not shown. The body of the sensor 1 may be equipped with a feedback device that can feedback the sensed result of the sensor 1 to the user, either visually or spontaneously.

3, when the portion of the conductive surface 211 that has conductivity does not correspond to the arrangement of the adsorption member 220 and has a single plate shape, the conductor 230 is also formed in the form of a plate .

On the other hand, when conductive portions of the conductive surface 211 are formed along the arrangement of the adsorption member 220, a plurality of conductors 231 may be disposed corresponding to the position of the adsorption member 220.

Each of the plurality of conductors 231 is connected to a wire 232, and each of the wires 232 is patterned to be electrically connected to the main wire 234.

According to this configuration, the adsorbing member 220, the conductive surface 211, and the conductor 230 constitute one electric circuit to be electrically connected, and the adsorbing member 220 is included as one of the resistances of the electric circuit. do.

When a change in the resistance of the electric circuit occurs when the gas is introduced into the chamber 210 and a harmful substance adheres to the adsorbing member 220, the gas sensor 1 according to the present embodiment is connected to the resistance meter 11 ) Is used to sense the change in resistance of the electric circuit and detect the attached harmful substance.

Although the electric circuit is not described in detail, when a plurality of conductors 231 are attached, the resistance change is measured for each of the plurality of adsorption members.

FIG. 4 shows a state in which harmful substances are introduced into the chamber 210 of the gas sensor 1 according to the present embodiment.

According to this embodiment, if harmful substances are discharged into the air in the industrial field, a concentration difference is generated in the inside and the outside of the chamber 210 of the gas sensor 1, while harmful substances are contained in the outside air (gas) of the gas sensor 1 .

Naturally, the concentration of the outside of the chamber 210 is high, so that the gas containing the harmful substance flows into the channel 110 by the diffusion action and flows into the chamber 210.

According to the present embodiment, the cross-sectional area of each channel 110 is small enough to neglect the influence of the air flow (wind or the like) outside the gas sensor 1 on the inside of the channel 110. Therefore, the gas containing the harmful substance introduced into the channel 110 flows through the channel 110 by a diffusion effect substantially corresponding to the inherent diffusion coefficient.

The harmful substances flowing into the channels 110 flow into the chamber 210 substantially simultaneously from the channel 110 irrespective of the difference in sectional area of the channels 110.

Since the length of each adsorption member 220 is smaller than the height of the chamber 210, an empty space having a length L2 is formed on the adsorption member 220.

The harmful substance M that has exited from the one channel 110-1 and flows into the chamber 210 diffuses toward the adjacent adsorption member 220-2 as well as the direction of the adsorption member 220-1 corresponding thereto However, most of the harmful substances (M) will diffuse downward in the lower concentration than in the higher side.

That is, the harmful substance M that has exited the one channel 110-1 moves toward the corresponding adsorption member 220-1 formed below the adsorption member 220-1, and contacts the adsorption member 220-1.

Similarly, the harmful substance M that has escaped from the second channel 110-2 by diffusion diffuses toward the second adsorption member 220-2 corresponding thereto, and diffuses from the n-th channel 110-n The noxious substances M that have escaped by the n-th adsorption member 220-n move toward the n-th adsorption member 220-n corresponding thereto.

When the harmful substance M adheres to the adsorption member 220, the concentration of the gas inside the chamber 210 becomes smaller than that outside the chamber 210, The gas containing the substance is continuously introduced. On the other hand, the gas that flows into the chamber 210 and collected by the adsorbing member 220 with the harmful substances is discharged to the outside through the gas outlet 212, and the gas is circulated.

The harmful substance M which is an organic compound is adhered to the adsorbing member 220 made of carbon nanotubes by the van der Waals force and collected. When the harmful substance M is attached to the adsorption member 220, a change occurs in the resistance of the electric circuit including the adsorption member 220 as a resistance.

As described above, when the electric circuit is configured to measure the change in resistance for each of the plurality of adsorption members, it is possible to detect the adsorption state of the harmful substances M to the adsorption members 220. In addition, the amount (i.e., concentration) of the harmful substance M adsorbed to the adsorption member 220 can be detected through the rate of change of the total resistance of the electric circuit.

The sampling rate S of the harmful substance M of the gas sensor 1 can be expressed as follows.

[Equation 1]

Figure pat00001

Where A 1 is the sum of the cross-sectional areas of the plurality of channels 110, A 2 is the area occupied by the plurality of adsorption members 220, L 1 is the length of the channel 110 And L 2 is a value obtained by subtracting the average height of the plurality of adsorption members 220 from the height of the chamber 210.

The sampling rate of the gas sensor 1 can be adjusted by adjusting the average height of the adsorbing member 220. [

According to the present embodiment, the gas sensor 1 is not limited to the case where one kind of harmful substance M is included in the gas, and even when various kinds of harmful substances are included in the gas, Can be detected and analyzed.

5 shows a process in which different kinds of harmful substances M are introduced into the gas sensor 1 and detected.

According to the present embodiment, one adsorption member 220 is formed by densely arranging a plurality of fine adsorption columns 221, 222, and 223 instead of one lump.

According to the gas law, different kinds of harmful substances M are diffused at different rates even if they enter the channel 110 at the same time according to their molecular weights (inherent diffusion coefficients).

Therefore, as shown in FIG. 5, the harmful substance A having excellent diffusivity comes out most quickly from the channel 110.

The toxic substance A that escapes the fastest in the channel 110 is concentratedly adsorbed on the uppermost one of the longest adsorption column 221 among the one adsorption column.

Since the upper part of the adsorption column 221 is highly likely to be saturated by the toxic substance A, the toxic substance B exiting the channel 110 is adsorbed on the adsorption column 222 at a lower height than the adsorption column 221 As shown in FIG. At this time, the harmful substance B may be adsorbed on the adsorption column 221 at a height approximately equal to the upper height of the adsorption column 222.

Similarly, the harmful substance (C) that is the latest to exit the channel 110 is adsorbed to the adsorption column 223 at a lower height than the adsorption column 222.

As described above, by diversifying the height of the plurality of adsorption columns forming one adsorption member, it is possible to adsorb and detect harmful substances without missing. That is, although the harmful substances (B, C) are included in the gas in addition to the harmful substances (A) having the fastest diffusion speed, the spaces in which the harmful substances (B, C) It is possible to avoid escaping from the gas sensor 1.

In addition, the sensitivity of the gas sensor 1 can be increased by making the plurality of adsorption columns 221, 222, and 223 forming one adsorption member 220 have different cross-sectional areas.

Although only three adsorption columns are shown in FIG. 5 as forming one adsorption member, it should be understood that this is for convenience of explanation.

Fig. 6 is an enlarged view of one adsorption member 220. Fig.

As shown in FIG. 6, since carbon nanotubes can be grown to have a thickness of several nanometers, tens of thousands of adsorption columns can be formed under one channel having a sectional area of several millimeters.

In order to increase the sensitivity of the gas sensor 1, a plurality of adsorption columns 221, 222, and 223 forming one adsorption member 220 include adsorption columns having different lengths or different cross- , And the length and the cross-sectional area are very variously combined.

On the other hand, even if the same harmful substance (M) is used, the kind of the harmful substance (M) can be distinguished by using the characteristic that the time taken to adsorbed column is slightly different depending on the length of the adsorption column.

For example, the length of the longest adsorption column among the adsorption columns forming the adsorption member 220 may be different for each adsorption member.

According to such a configuration, it becomes possible to identify different kinds of harmful substances.

FIG. 7 is a graph exemplarily showing a result of detection of a gas containing one harmful substance at a specific concentration through the gas sensor 1. FIG.

For example, when only the harmful substance A is detected by using the gas sensor 1 containing gas at a specific concentration, since the longest adsorption columns forming each adsorption member 220 are different in length from each other, 7, the rate of change in resistance with respect to each adsorption member 220 has a minute time difference and a size difference.

7 is a result of the resistance change of the electric circuit indicating the case where the harmful substance A is included in the gas at the concentration.

Likewise, the results of the resistance change of the electric circuit as shown in Fig. 7 can be obtained also for the gas containing the harmful substance (A) and other harmful substances alone or the gas containing two or more kinds of harmful substances. Each resistance change result can be used as a kind of fingerprint indicating the corresponding component depending on the concentration, kind, and combination of the harmful substance.

The results of the resistance change of the electric circuit obtained experimentally are sent to a memory of a computer (not shown) for analyzing the detection result of the gas sensor 1 to construct a resistance variation library of the electric circuit.

When the resistance change value of the actually sensed electric circuit sensed by the gas sensor 1 is compared with the resistance change library already constructed using the pattern recognition technology (chemometic technique), the kind of the harmful substance detected in the gas sensor 1 Concentration and the like can be quantitatively estimated.

According to the gas sensor 1 according to the present embodiment, the gas can be sucked without using a separate driving source by using gas diffusion, and the harmful substances contained in the gas can be analyzed.

In addition, carbon nanotubes having an adjustable height and cross-sectional area can be grown and selectively adsorbed using a unique diffusion coefficient of various harmful substances, thereby securing selectivity for harmful substances as a sensor itself.

In addition, it is possible to immediately analyze and identify different kinds of harmful substances even without separation process such as centrifugation.

Claims (17)

A chamber having an internal space formed therein;
A channel opened to allow gas communication into the chamber;
An adsorption member having electrical conductivity and formed in the inner space and capable of attaching toxic substances contained in the gas introduced into the chamber;
And an electric circuit including the adsorption member as one resistor,
Wherein the sensor detects a change in resistance of the electric circuit due to the attachment of the harmful substance to the adsorption member, and detects the harmful substance. The method according to claim 1,
Wherein the gas flows into the chamber through the channel in a diffusive manner. The method according to claim 1,
The adsorption member and the channel are formed to face each other,
And the adsorption member extends parallel to the longitudinal direction of the channel. The method of claim 3,
Wherein the adsorption member is formed by densely arranging a plurality of adsorption columns spaced apart from each other. 5. The method of claim 4,
A plurality of adsorption members and a plurality of channels,
Wherein at least one adsorption member is correspondingly formed for each channel. 5. The method of claim 4,
Wherein the plurality of adsorption columns forming one adsorption member include adsorption columns having different lengths. The method according to claim 6,
Wherein the length of the longest adsorption column among the plurality of adsorption columns forming one adsorption member is different for each of the plurality of adsorption members. 5. The method of claim 4,
Wherein the plurality of adsorption columns forming one adsorption member include adsorption columns having different cross-sectional areas. 6. The method of claim 5,
Wherein the plurality of channels comprise channels having different cross-sectional areas. The method according to claim 1,
A conductive surface formed in the chamber;
And a conductor formed outside the chamber and electrically connected to the conductive surface,
Wherein the adsorption member is formed on the conductive surface,
Wherein the electric circuit comprises the conductive surface, the adsorption member, and the conductor. 11. The method of claim 10,
Wherein the conductive surface is formed by a conductive substrate attached on one side of the chamber. 11. The method of claim 10,
Wherein the conductive surface is formed by penetrating conductive ions on one side of the chamber. 11. The method of claim 10,
Wherein the adsorption member is formed of an activated nano-carbon material having conductivity capable of being hetero-bonded to the conductive surface. 14. The method of claim 13,
Wherein the adsorbing member is transferred onto the conductive surface in a grown or grown state on the conductive surface. The method according to claim 1,
A resistance variation library of the electric circuit for each type and concentration of harmful substances obtained experimentally,
And comparing the actually sensed resistance change to infer the type and concentration of the harmful substance. 16. The method of claim 15,
Wherein the resistance variable library includes information on a resistance change of the electric circuit when a gas containing two or more kinds of harmful substances is introduced into the chamber. 6. The method of claim 5,
Wherein the electric circuit is configured to measure a resistance change for each of the plurality of adsorption members.
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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR940015498A (en) 1992-12-23 1994-07-21 랄프 홀거 베렌스.페터 뢰저 Sensor to measure gas content and gas concentration in gas mixture

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR940015498A (en) 1992-12-23 1994-07-21 랄프 홀거 베렌스.페터 뢰저 Sensor to measure gas content and gas concentration in gas mixture

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