KR20170019884A - Device for processing volatile organic gas enabling monitoring a filter - Google Patents

Device for processing volatile organic gas enabling monitoring a filter Download PDF

Info

Publication number
KR20170019884A
KR20170019884A KR1020150114355A KR20150114355A KR20170019884A KR 20170019884 A KR20170019884 A KR 20170019884A KR 1020150114355 A KR1020150114355 A KR 1020150114355A KR 20150114355 A KR20150114355 A KR 20150114355A KR 20170019884 A KR20170019884 A KR 20170019884A
Authority
KR
South Korea
Prior art keywords
gas
filter
unit
inlet
filter cell
Prior art date
Application number
KR1020150114355A
Other languages
Korean (ko)
Other versions
KR101748782B1 (en
Inventor
김기철
정병호
Original Assignee
(주) 세츠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주) 세츠 filed Critical (주) 세츠
Priority to KR1020150114355A priority Critical patent/KR101748782B1/en
Publication of KR20170019884A publication Critical patent/KR20170019884A/en
Application granted granted Critical
Publication of KR101748782B1 publication Critical patent/KR101748782B1/en

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0084—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours provided with safety means
    • B01D46/0086—Filter condition indicators
    • B01D46/0019—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B01D46/4254—Allowing or improving visual supervision, e.g. lamps, transparent parts, windows
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B01D46/429—Means for wireless communication
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B01D46/44—Auxiliary equipment or operation thereof controlling filtration
    • B01D46/442—Auxiliary equipment or operation thereof controlling filtration by measuring the concentration of particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/30—Controlling by gas-analysis apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2267/00—Multiple filter elements specially adapted for separating dispersed particles from gases or vapours
    • B01D2267/30—Same type of filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2275/00—Filter media structures for filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2275/20—Shape of filtering material
    • B01D2275/205—Rectangular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
    • B01D2279/45—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for electronic devices, e.g. computers, hard-discs, mobile phones

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The present invention relates to an apparatus comprising a body having an inlet portion and an outlet portion; A filter unit disposed between the inflow unit and the outflow unit and configured to absorb volatile harmful substances of untreated gas flowing through the inflow unit; A gas collecting portion disposed along one surface of the filter portion toward the outlet portion and configured to collect a process gas passing through the filter portion; And a gas inspecting unit configured to detect a component of the process gas collected through the gas collecting unit.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a volatile noxious gas treating apparatus,

The present invention relates to a volatile noxious gas treating apparatus capable of monitoring the state of a filter used for purifying volatile noxious gas or whether or not the filter is replaced.

Generally, volatile organic compounds (VOC) are used or discharged in the production processes of semiconductors, LCDs, and the like.

VOC is a substance that causes photochemical smog by producing photochemical oxidizing substance such as ozone and pan (peroxyacetyl nitrate) by causing photochemical reaction with nitrogen oxide in the air. These VOCs are air pollutants and precursors of carcinogenic photochemical oxides. It is also a source of global warming and includes odors. Therefore, in the factory where the VOC is used or discharged, a processing device for purifying the VOC is provided.

The volatile harmful substances are discharged in a gaseous state such as a gas, and in order to remove the volatile harmful substances, a filter is provided in the purifier to remove the harmful substances.

The filter is deteriorated in adsorbability when continuous adsorption of toxic substances is made. Therefore, unless the filter is replaced smoothly, volatile harmful substances can be discharged to the outside without being purified.

In order to solve such a problem, most VOC processing apparatuses have a filter regeneration device, and at a certain stage, the adsorbed VOC is removed to regenerate the filter.

Nevertheless, the filter is aged according to time or operating conditions, and the time for maintenance or replacement of the filter needs to be appropriately made.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a volatile noxious gas processing apparatus capable of monitoring the state of a filter efficiently.

According to an aspect of the present invention, there is provided a volatile noxious gas processing apparatus comprising: a body having an inlet and an outlet; A filter unit disposed between the inflow unit and the outflow unit and configured to absorb volatile harmful substances of untreated gas flowing through the inflow unit; A gas collecting portion disposed along one surface of the filter portion toward the outlet portion and configured to collect a process gas passing through the filter portion; And a gas inspection unit configured to detect a component of the process gas collected through the gas collection unit.

Here, the filter unit may include: a filter housing having a filter space; And a plurality of filter cells arranged in the filter space.

Here, the filter cell may include a sample filter formed to be detachable with respect to one of the entire regions.

Here, the gas testing unit may be configured to output a remaining lifetime by comparing a component of the sample filter separated from the filter cell with a reference value.

Here, the gas collecting unit may include: a gas inlet disposed toward the filter cell through which the process gas is discharged; And a gas transfer tube installed along a boundary between the plurality of filter cells and configured to connect the gas inlet and the gas inspecting unit.

Here, the gas inlet may include a contact portion extending toward the filter cell along a rim of the opening side.

Here, the gas inlet may be formed so that the opening faces the filter cell in use, and the opening can be rotated in parallel with the traveling direction of the process gas in an unused state.

Here, the gas inlet may include a first gas inlet and a second gas inlet, which are arranged to face different areas with respect to the same filter cell.

Here, the filter cell may include a recess formed in a region facing the gas inlet, and the gas inlet may be arranged to be accommodated in the recess.

The filter housing may further include a dividing portion configured to divide the filter space into a plurality of filter spaces.

Here, the gas inspecting unit may be disposed along the partition.

According to another embodiment of the present invention, there is provided a volatile noxious gas treating apparatus capable of monitoring, comprising: a body having an inlet and an outlet; A sample filter disposed between the inlet and the outlet to adsorb volatile harmful substances of the untreated gas flowing through the inlet through the plurality of filter cells and to be detachable with respect to one area of the entire area of the filter cell ; And a gas inspection unit configured to analyze a life state of the sample filter separated from the filter unit.

Here, the display unit may further include a display unit for displaying an analysis result of the gas inspection unit.

According to the volatile noxious gas processing apparatus capable of monitoring according to the present invention configured as described above, the state of the filter can be analyzed in real time.

It is also possible to selectively collect the process gas passing through the filter and to analyze the filter condition through the collected process gas.

In addition, the filter state can be analyzed by separating and inspecting only a part of the filter.

FIG. 1 is a conceptual diagram for explaining the structure of a volatile noxious gas processing apparatus 100 capable of monitoring according to an embodiment of the present invention.
FIG. 2 is a perspective view illustrating a structure of a filter unit 130, a gas collecting unit 150, and a gas testing unit 170 according to an embodiment of the present invention.
3 is a view for explaining the structure of a gas inlet 151 according to an embodiment of the present invention.
4 is a view for explaining a gas suction port 151 having a tight contact portion 152 according to an embodiment of the present invention.
5 is a view for explaining a rotation operation of the gas inlet 251 according to another embodiment of the present invention.
6 is a view for explaining a gas collecting part 350 having a plurality of gas inlets 351a and 351b directed to different areas with respect to the same filter cell 335 according to another embodiment of the present invention.
7 is a view for explaining a filter cell 435 having a sample filter 437 according to another embodiment of the present invention.
8 is a view for explaining a structure in which a gas suction port 551 is disposed in a recess 535a of a filter cell 535 according to another embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a volatile noxious gas processing apparatus according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the present specification, the same or similar reference numerals are given to different embodiments in the same or similar configurations.

FIG. 1 is a conceptual diagram for explaining the structure of a volatile noxious gas processing apparatus 100 capable of monitoring according to an embodiment of the present invention.

As shown in the figure, the volatile noxious gas processing apparatus 100 includes a filter unit 130 disposed inside a main body 110 having an inlet A1 and an outlet A2. The untreated gas G1 flowing through the inlet A1 flows through the filter 130 and the processing gas G2 from which volatile harmful substances have been removed through the filter 130 flows into the outlet A2 Can be discharged.

At this time, a gas collecting part 150 connected to the gas inspecting part 170 is disposed on one side of the filter part 130 facing the outflow part A2. The gas collecting part 150 may collect a part of the processing gas G2 passing through the filter part 130. [ The process gas G2 thus collected is transferred to the gas inspecting section 170.

The gas inspecting section 170 can inspect the component of the transferred process gas G2 and output information on the content of volatile harmful substances.

According to such a configuration, the volatile noxious gas processing apparatus 100 can output the component inspection result of the processing gas G2 filtered by the filter unit 130. [ Accordingly, the administrator can quickly determine whether or not the filter unit 130 is replaced based on the inspection result of the component.

The foregoing has described the schematic structure of a volatile hazardous gas treatment device that can be monitored. 2 and 3, the filter unit, the gas collecting unit, and the gas inspecting unit will be described in detail.

FIG. 2 is a perspective view illustrating a structure of a filter unit 130, a gas collecting unit 150, and a gas inspecting unit 170 according to an embodiment of the present invention. FIG. 4 is a view for explaining a gas inlet 151 having a tight fitting portion 152 according to an embodiment of the present invention. FIG.

As shown in FIG. 2, the apparatus for adsorbing volatile harmful substances in the untreated gas G1 and collecting and inspecting the process gas G2 includes a filter unit 130, a partition 140, A gas valve 160, and a gas inspecting unit 170, as shown in FIG.

The filter unit 130 can adsorb volatile harmful substances of the untreated gas G1. To this end, the filter unit 130 may include a filter housing 131 and a filter cell 135.

The filter housing 131 can form an outer appearance of the filter unit 130. Inside the filter housing 131, a filter space FA capable of accommodating the filter cell 135 may be formed. The filter space FA may be a space opened in the direction of the inflow section (not shown in FIG. 1, A1) and the outflow section (not shown in FIG. 2, A2). Although the filter housing 131 in this embodiment is formed in a rectangular shape, it may be formed in a different shape depending on the shape of the main body (FIGS. 1 and 110).

The filter cell 135 can adsorb the volatile harmful substance of the untreated gas G1. For example, the filter cell 135 may be made of a honeycomb structure made of zeolite. The plurality of filter cells 135 may be arranged in the filter space FA. The shape of the filter cell 135 can be variously applied, so that the arrangement structure of the filter cells 135 can be changed. In this embodiment, the filter cells 135 may be arranged in a lattice with a square shape. A plurality of filter cells 135 arranged in this way can be bounded between adjacent filter cells 135.

The partition 140 may partition the inner space of the filter housing 131 into a plurality of spaces. In other words, the partition 140 divides one internal space into a plurality of filter spaces FA having a partition wall structure, so that the filter cells 135 can be housed in different filter spaces FA. 2, the filter cells 135 may be accommodated in the respective filter spaces FA partitioned by the partitioning portions 140. As shown in FIG.

The gas collecting part 150 may be disposed along one surface of the filter part 130 facing the outlet part to collect the processing gas G2 passing through the filter part 130. [ At this time, the gas collecting unit 150 may be installed along the partition 140 when the partition 140 is disposed in the filter housing 131. In addition, in a state in which the plurality of filter cells 135 are continuously arranged without the partition 140, they can be installed along the boundary between the filter cells 135. The gas collecting portion 150 may include a gas inlet 151, a tight contact portion 152, and a gas transfer pipe 153.

The gas inlet 151 may be arranged to face the filter cell 135 with the opening facing the outlet as in FIG. Accordingly, the gas inlet 151 can collect the processing gas G2 that is moved to the region where the opening is located.

The adhered portion 152 may extend toward the filter cell 135 along the rim of the opening side as in Fig. Specifically, the adhered portion 152 may be formed in a funnel shape having a larger radius toward the filter cell 135. The gas inlet 151 having the tight contact portion 152 can collect the processing gas G2 passing through the filter cell 135 more easily.

The gas transfer pipe 153 may be disposed along one side of the filter unit 130 facing the outlet so as to connect the gas inlet 151 to the gas inspecting unit 170. Therefore, the gas transfer pipe 153 can serve as a path for transferring the process gas G2 collected through the gas inlet 151 to the gas inspecting unit 170. The gas transfer pipe 153 may include a first transfer pipe 153a connected to each gas inlet 151 and a second transfer pipe 153b connected to each first transfer pipe 153a .

The gas valve 160 can selectively block the introduction of the process gas G2 into the gas inspection unit 170. [ For this purpose, the gas valve 160 may be installed at one side of the gas conveying pipe 153 facing the gas inspecting unit 170. Further, the gas valve 160 may be composed of a main valve and a bypass valve, so that the gas valve 160 can be easily handled when the main valve fails.

The gas inspecting section 170 can detect the component of the process gas G2 collected through the gas collecting section 150. [ In other words, when the processing gas G2 collected through the gas collecting part 150 is transferred through the gas transfer pipe 153, the gas inspecting part 170 analyzes the constituent of the processing gas G2, The degree of content of the substance can be analyzed.

In addition, although not shown in the present embodiment, the volatile noxious gas processing apparatus (FIGS. 1 and 100) may further include a transport pipe cleaning unit, a gas movement control unit, a display unit, a speaker unit, and a communication unit in addition to the above- .

The transfer pipe cleaning section can clean the inside of the gas transfer pipe 153. For example, the transfer pipe cleaning unit may be connected to one end of the gas transfer pipe 153 and may inject a cleaning liquid or a cleaning gas toward the inside of the gas transfer pipe 153. The gas transfer pipe 153 may be contaminated by the adsorption of volatile harmful substances or may be bent on the passage during the continuous transfer of the process gas G2. Therefore, the inside of the gas transfer pipe 153 can be periodically cleaned through the transfer pipe cleaning unit.

The gas movement control section can restrict the movement of the process gas G2 that is moved to the gas transfer pipe 153. [ For example, the gas movement control unit may comprise a valve capable of selectively opening and closing the inside of the gas transfer pipe 153. Therefore, when the inspection of the process gas G2 is not required, it is not necessary to collect the process gas G2, so that the process gas G2 can be blocked from moving to the gas inspection unit 170 by closing the gas movement control unit . In addition, the gas movement control unit may be controlled by a control unit that is composed of an electronic stopper that selectively opens and closes the gas inlet 151, and integrally controls the electrical structures.

The display unit may display a result of the component inspection of the process gas (G2) performed by the gas inspection unit (170). Therefore, the display unit can visually inform the management site of the result of the component inspection.

The speaker unit can output a result of inspection of the component of the processing gas G2 performed by the gas inspection unit 170 or guidance on the overall operation of the volatile noxious gas processing apparatus 100 by voice or warning sound. For example, if it is determined that the filter cell 135 needs to be replaced as a result of the component inspection, the speaker unit may output a warning sound or output a guidance voice to inform the administrator.

The communication unit can transmit the result of the component inspection to the mobile communication terminal of the manager. Accordingly, the administrator can check the state of the filter cell 135 with his / her mobile communication terminal even outside the field.

The configurations of the filter section, the gas collecting section, and the gas inspecting section have been described. In Fig. 5, the gas inlet to be rotated will be described.

5 is a view for explaining a rotation operation of the gas inlet 251 according to another embodiment of the present invention.

5 (a), in the use state for inspecting the process gas G2 passing through the filter cell 235, the opening of the gas inlet 251 is arranged to face the filter cell 235 do. In other words, the processing gas G2 can be collected into the gas inlet 251 as the opening of the gas inlet 251 is disposed perpendicular to the moving direction of the processing gas G2.

The gas inlet 251 may be rotated such that the opening of the gas inlet 251 is parallel to the traveling direction of the processing gas G2 in the non-use state in which inspection of the filter cell 235 is not required as shown in FIG. 5 (b) have. At this time, the gas suction port 251 is rotated together with the first conveyance pipe (not shown in Fig. 2 and 153a) by the operation of rotating the second conveyance pipe (not shown in Figs. 2 and 153b) The gas suction port 251 and the first conveyance pipe may be rotated together. For this rotation, the first conveyance pipe or the second conveyance pipe may include a rotation driving unit.

When the opening of the gas inlet 251 is rotated in parallel with the processing gas G2 in this unused state, no collision occurs between the processing gas G2 and the gas inlet 251, and the processing gas G2 flows out The flow of the gas toward the portion (Figs. 1 and A2) can be made more smooth.

The above has been described with respect to the rotatable gas inlet. In Fig. 6, a plurality of gas inlets directed to different regions with respect to the same filter cell will be described.

6 is a view for explaining a gas collecting part 350 having a plurality of gas inlets 351a and 351b directed to different areas with respect to the same filter cell 335 according to another embodiment of the present invention

As shown in the figure, the filter unit 330 and the gas inspecting unit 370 of this embodiment are the same as the filter unit (FIGS. 1 and 130) and the gas inspecting unit (FIGS. 1 and 170) 350).

The gas collecting part 350 may include a first gas inlet 351a and a second gas inlet 351b arranged to face different areas with respect to the same filter cell 335. [ In other words, it may include a plurality of gas inlets 351a, 351b facing different regions of the single filter cell 335. [

In this embodiment, a plurality of gas inlets 351a and 351b may be arranged for two regions of one filter cell 335, respectively.

In this case, the gas movement control unit described above with reference to FIGS. 2 to 4 may be installed in each of the gas inlets 351a and 351b. Therefore, only the first gas inlet 351a can be opened to inspect the process gas. At this time, if there is no abnormality (satisfying the reference value range condition), the first gas inlet 351a may be closed and the second gas inlet 351b may be opened to rescan the process gas.

According to this inspection method, it is possible to inspect the multi-region of the filter cell 335, and it is possible to judge whether the filter unit is replaced more efficiently.

Here, the first gas inlet 351a and the second gas inlet 351b may share the same first transfer pipe 353a or may be respectively connected to different transfer pipes.

The foregoing has described a plurality of gas inlets which are arranged toward different regions of the same filter cell. In Fig. 7, the sample filter separated from the filter cell will be described.

7 is a view for explaining a filter cell 435 having a sample filter 437 according to another embodiment of the present invention.

As shown, the filter cell 435 may include a sample filter 437 that is removably formed for one region of the entire region. To this end, the filter cell 435 may be formed with a desorption space DA in which the sample filter 437 is detached.

The detachable space DA is formed to penetrate through one surface and the other surface of the filter cell 435 and a fixing groove 435a to which the sample filter 437 can be fixed may be formed on both sides.

The sample filter 437 is detached along the desorption space DA, and elastic protrusions 437a may be formed on both sides. Therefore, when housed in the detachable space DA, the elastic protrusions 437a can be fitted and fixed in the fixing grooves 435a. Although not shown in the present embodiment, a handle may protrude from one surface of the sample filter 437. The manager can separate the sample filter 437 from the filter cell 435 by pulling the handle. Here, when the handle is interlocked with the elastic protrusion 437a and an external force is applied to the handle, the inertia projection 437a protruding outward may be drawn into the sample filter 437. [ Whereby the sample filter 437 fixed to the fixing groove 435a can be separated.

When the sample filter 437 is provided, it is not necessary to separately provide the gas collecting part (FIGS. 1 and 150) as shown in FIG. 1 to FIG. In other words, when inspection of the filter cell 435 is required, only the sample filter 437 can be separated and inspected by the gas inspection unit 470. The gas inspecting section 470 can compare the components of the sample filter 437 with reference values to output the remaining service life.

When the sample filter 437 is separated from the filter cell 435 and the desorption space DA is opened, a temporary filter of the same standard as the sample filter 437 is connected to the desorption space DA, So that the cleaning operation can be continued.

8 is a view for explaining a structure in which a gas suction port 551 is disposed in a recess 535a of a filter cell 535 according to another embodiment of the present invention.

As shown in the figure, the filter cell 535 may include a concave portion 535a that is recessed inwardly in a region corresponding to the gas inlet 551. At this time, the gas inlet 551 is arranged to be accommodated in the concave portion 535a to collect the process gas G2 passing through the filter cell 535. [ Also, the first transfer pipe 553a connected to the gas inlet 551 may be accommodated in the recess 535a. In this embodiment, although the gas inlet 551 is spaced apart from the surface of the concave portion 535a, it is not limited thereto and may be disposed so as to be in contact with each other.

It is possible to eliminate the structure in which the gas suction port 551 and the first transfer pipe 553a are disposed in the same line as the inner or outer surface of the filter cell 535 so as to protrude outward.

The volatile noxious gas treating apparatus capable of monitoring such a kind of apparatus is not limited to the configuration and operation of the embodiments described above. The embodiments may be configured so that all or some of the embodiments may be selectively combined so that various modifications may be made.

100: Volatile noxious gas treatment device A1:
110: main body A2:
130: Filter part FA: Filter space
140: compartment DA: detachment space
150: gas collecting part G1: untreated gas
170: gas inspection part G2: process gas

Claims (13)

A body having an inlet and an outlet;
A filter unit disposed between the inflow unit and the outflow unit and configured to absorb volatile harmful substances of untreated gas flowing through the inflow unit;
A gas collecting portion disposed along one surface of the filter portion toward the outlet portion and configured to collect a process gas passing through the filter portion; And
And a gas inspecting unit configured to detect a component of the process gas collected through the gas collecting unit.
The method according to claim 1,
The filter unit includes:
A filter housing having a filter space; And
And a plurality of filter cells arranged in the filter space.
3. The method of claim 2,
Wherein the filter cell comprises:
And a sample filter that is removably formed for one region of the entire region.
The method of claim 3,
The gas testing unit,
Wherein the filter is configured to compare the components of the sample filter separated from the filter cell with a reference value to output a remaining lifetime.
3. The method of claim 2,
Wherein the gas-
A gas inlet disposed toward the filter cell through which the process gas is discharged; And
And a gas transfer pipe installed along a boundary between the plurality of filter cells and configured to connect the gas inlet and the gas inspecting unit.
6. The method of claim 5,
The gas-
And a tight contact portion extending toward the filter cell along the rim of the opening side.
6. The method of claim 5,
The gas-
Wherein the opening is formed such that the opening faces the filter cell in use and the opening is rotatable in parallel with the advancing direction of the process gas in an unused state.
6. The method of claim 5,
The gas-
Wherein the first gas inlet and the second gas inlet are arranged to face different areas of the same filter cell.
6. The method of claim 5,
Wherein the filter cell comprises:
And a concave portion formed in a region facing the gas inlet,
The gas-
Wherein the volatile noxious gas treating device is arranged to be accommodated in the concave portion.
3. The method of claim 2,
Further comprising a compartment formed to divide the filter space of the filter housing into a plurality of compartments.
11. The method of claim 10,
The gas testing unit,
Wherein the volatile noxious gas is disposed along the partition.
A body having an inlet and an outlet;
A sample filter disposed between the inlet and the outlet to adsorb volatile harmful substances of the untreated gas flowing through the inlet through the plurality of filter cells and to be detachable with respect to one area of the entire area of the filter cell ; And
And a gas inspecting unit configured to analyze a life state of the sample filter separated by the filter unit.
13. The method of claim 12,
And a display unit for displaying an analysis result of the gas inspecting unit.
KR1020150114355A 2015-08-13 2015-08-13 Device for processing volatile organic gas enabling monitoring a filter KR101748782B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150114355A KR101748782B1 (en) 2015-08-13 2015-08-13 Device for processing volatile organic gas enabling monitoring a filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150114355A KR101748782B1 (en) 2015-08-13 2015-08-13 Device for processing volatile organic gas enabling monitoring a filter

Publications (2)

Publication Number Publication Date
KR20170019884A true KR20170019884A (en) 2017-02-22
KR101748782B1 KR101748782B1 (en) 2017-07-04

Family

ID=58314907

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150114355A KR101748782B1 (en) 2015-08-13 2015-08-13 Device for processing volatile organic gas enabling monitoring a filter

Country Status (1)

Country Link
KR (1) KR101748782B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102123642B1 (en) * 2018-12-14 2020-06-16 연세대학교 원주산학협력단 Hazardous substance reduction apparatus for real-time analyzing performance of adsorbent and method for analyzing performance of absorbents thereof
KR20240002743A (en) 2022-06-30 2024-01-08 고등기술연구원연구조합 Adsorbent Reuse Cascade Control Method And Device For Hazardous Gas Treatment

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000185215A (en) * 1998-12-22 2000-07-04 Daikin Ind Ltd Method for measuring amount of voltage harmful chemical substance adsorbed in adsorbing material and air cleaner for removing volatile harmful chemical substance
JP2009125670A (en) * 2007-11-22 2009-06-11 Tokyo Metropolitan Industrial Technology Research Institute System for monitoring time of exchange of adsorbing vessel and apparatus for treating volatile organic compound waste gas equipped with the same
JP2011161301A (en) * 2010-02-04 2011-08-25 Mitsubishi Rayon Co Ltd Apparatus and method of recovering volatile organic solvent present in exhaust
JP4973817B2 (en) * 2012-01-06 2012-07-11 Ｊｆｅエンジニアリング株式会社 Removal and recovery of volatile organic compounds

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102123642B1 (en) * 2018-12-14 2020-06-16 연세대학교 원주산학협력단 Hazardous substance reduction apparatus for real-time analyzing performance of adsorbent and method for analyzing performance of absorbents thereof
KR20240002743A (en) 2022-06-30 2024-01-08 고등기술연구원연구조합 Adsorbent Reuse Cascade Control Method And Device For Hazardous Gas Treatment

Also Published As

Publication number Publication date
KR101748782B1 (en) 2017-07-04

Similar Documents

Publication Publication Date Title
KR101549358B1 (en) Energy efficient air cleaning system
KR20070083449A (en) System and method for removing contaminants
CN105311911A (en) Experimental ventilation cabinet filtering device
CN102350147B (en) Integrative adsorptive dust collection device
KR20120136817A (en) Subway cabin air purifier
KR101748782B1 (en) Device for processing volatile organic gas enabling monitoring a filter
KR101901847B1 (en) Harmful gases purifying device
WO2016133219A1 (en) Photocatalyst device
KR101546227B1 (en) Scrubber
KR101883695B1 (en) Air purification system by oxidation catalyst
US7150778B1 (en) Recirculation jacket filter system
RU2161567C1 (en) Method of air cleaning from harmful impurities and device for its embodiment
CN106225203A (en) A kind of compound air purifier
US20210346834A1 (en) Toxic gas purification apparatus having a local exhaust function
KR20160003897U (en) Local Exhaust air purification system is available
JP6114438B1 (en) Exhaust gas treatment equipment
JP5126192B2 (en) Fluid purification device
KR102210131B1 (en) A system for treatment and ventilation for excess ozone
KR102209052B1 (en) Gas flushing apparatus
KR0155244B1 (en) A filter for removing dust
JP2005144359A (en) Siloxane compound-containing gas refiner
KR20170122924A (en) Apparatus for concentrating volatile organic compound gas having stack type filter
KR101697042B1 (en) Apparatus for purifying air of vehicle
JP2000153119A (en) Filter
KR100769666B1 (en) Filtration type dust collector equipping double filter structure

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
N231 Notification of change of applicant
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right