KR20170017612A - Composition of polymer dielectric and capacitive force sensor by using the same - Google Patents

Abstract

The present invention relates to a polymer dielectric composition, and a power sensor using the same, wherein the polymer dielectric composition includes (ii) a conductive filler in (i) a polymer elastic body, and the conductive filler includes a dispersing agent represented by chemical formula 1: CX_3(CX_2)n-Y. In the chemical formula: X is H or F; and Y is H, NH_2, OH, COOH, or SiR_1R_2R_3. Also, n is an integer of 1 to 30, and R_1, R_2, and R_3 are the same or different from each other, and are H, F, Cl, Br, a C1 to 10 alkyl group, a C1 to 10 alkoxy group, a C1 to 10 alkenyl group, a C1 to 10 alkyne group, a C1 to 30 aryl group, a C1 to 30 cycloalkyl group, or a C1 to 30 cycloalkenyl group.

Description

TECHNICAL FIELD The present invention relates to a polymer dielectric composition and a force sensor using the polymer dielectric composition.

The present invention relates to a polymer dielectric composition having improved dielectric properties, elasticity and adhesion, and a force sensor using the same.

In general, polymers are superior to other materials in terms of fairness, mechanical strength, electrical insulation, optical transparency, and mass productivity. They are also used in advanced materials such as semiconductors, electronics, aerospace, defense, display and alternative energy . The polymer material as a dielectric material can obtain various physical properties by molecular design and has an advantage of excellent molding. However, the dielectric material is not only weak but also has a thermal or mechanical characteristic weaker than an inorganic material. .

Currently, the dielectric properties of polymers are being studied for the application as high-k gate dielectrics for flexible electronic materials, dielectric elastomer actuators (DEA), and touch sensors.

In particular, the touch panel technology can be used in various electronic / communication devices such as a notebook computer, a personal information terminal, a game machine, a smart phone, and a navigation system, and can be used to select or input functions desired by a user. This touch panel technology can be largely implemented by a resistive film type and a capacitive type. The touch sensor using the capacitive sensing method can detect not only the multi-touch but also the contact position and contact force. The dielectric material required for such a touch sensor not only requires a high dielectric constant of 10 or more, but also requires a low elastic modulus and a high adhesive force with the electrode to increase the capacitance. Above all, high reliability of dielectric materials must be ensured for reliable sensor fabrication.

Polymer materials with high dielectric constants are ideal materials for use in various electronic materials because they are free from problems due to the dispersion of poly-phase materials when they are single phase. Recently, the University of Pennsylvania researchers have reported a method of manufacturing a PVDF electroactive copolymer having a dielectric constant of 100 by first irradiating the PVDF copolymer film with an electric field followed by polling, At Shizuoka University, materials with a dielectric constant of 20 or higher were developed using polar cyano-containing polymers. The German Plastic Institute and the University of Wales, UK, used PVDF and related co- The polymer dielectrics have been produced. However, these materials have limitations in application to capacitive touch sensors due to high unit cost, low yield and high elastic modulus.

As a solution to this problem, studies have been made to increase the dielectric constant of an elastomer by complexing a high-k filler with an elastomer. In Japanese Patent Application Laid-Open Nos. 2008-239929 and 2005-177003, a ceramic filler containing lithium is added to a thermoplastic elastomer to increase the dielectric constant at low cost. In WO98 / 04045, elastic elastomer Discloses an electroactive polymer using a composite in which a conductive filler such as carbon black, graphite and metal particles is added. In addition, a conductive filler having a large one-dimensional aspect ratio, such as a carbon nanotube, Several groups have conducted studies to ensure high dielectric constants of the elastomer by dispersion in the elastomer.

However, such insulator / conductor complexes are focused only on improving the dielectric properties, and are not suitable for high dielectric properties required for force sensors, adhesion to electrodes, low modulus of elasticity, and fast reaction rates.

Japanese Patent Application Laid-Open No. 2008-239929 Japanese Patent Laid-Open No. 2005-177003

The present invention provides a polymer dielectric composition having improved dielectric properties, elastic modulus and adhesion.

It is another object of the present invention to provide a force sensor that solves the conventional problems by using the polymer dielectric composition and is excellent in capacitance, responsiveness, and durability.

According to an exemplary aspect of the present invention, there is provided a polymer dielectric composition comprising: (i) a conductive filler in a polymeric elastomer; (ii)

Wherein the conductive filler comprises a dispersant represented by the following general formula (1).

[Chemical Formula 1]

CX ₃ (CX ₂ ) nY

(Wherein X is H or F, Y is H, NH ₂ , OH, COOH or SiR ₁ R ₂ R ₃ , n is an integer from 1 to 30, and R ₁ , R ₂ and R ₃ are An alkyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, an alkenyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, An aryl group having 1 to 30 carbon atoms, a cycloalkyl group having 1 to 30 carbon atoms, or a cycloalkenyl group having 1 to 30 carbon atoms.

According to another exemplary aspect of the present invention, there is provided an actuator or a touch panel including a polymer dielectric composition according to various embodiments of the present invention.

According to another exemplary aspect of the present invention,

A first substrate 100;

A first electrode 200 provided on the upper surface of the first substrate 100 as a pattern;

A second substrate 110 disposed on the first substrate 100 so as to be spaced apart from the first substrate 100;

A second electrode 210 provided on the bottom surface of the second substrate 110 as a pattern and facing the first electrode 200; And

And a dielectric (300) interposed between the first and second substrates,

Wherein the dielectric (300) comprises a polymeric dielectric composition according to any one of claims 1 to 7.

According to another exemplary aspect of the present invention, there is provided a method of manufacturing a plasma display panel, comprising: a) stacking a second electrode 210 on a second substrate 110;

b) molding the polymeric dielectric composition into a mold to produce dielectrics 320 and 330;

c) laminating and b) pressing and curing the b) second electrode on the dielectric top surface to produce the upper body 520 of the force sensor;

d) depositing a first electrode (200) on a first substrate (100), applying a polymeric dielectric composition on the first electrode (200), pressing the lower electrode (210)

e) bonding the c) upper body 520 and d) the lower body 510 to each other.

According to various embodiments of the present invention, it is effective to provide a polymer dielectric composition having improved dielectric constant, elastic modulus and adhesion.

In addition, since the strength sealer including the polymer dielectric composition is excellent in electrostatic capacity, responsiveness and durability, it is easy to manufacture a dielectric material having excellent adhesion to an electrode due to the flexibility of the composition, And it is possible to achieve a remarkable effect in terms of economics such as manufacturing cost.

1 is a cross-sectional view showing a force sensor 500 according to an embodiment of the present invention.
2 is a cross-sectional view illustrating a force sensor according to another embodiment of the present invention.
3 is a cross-sectional view of an integral mold used to manufacture the upper body 330 of the dielectric and the pressure rib 320 according to one embodiment of the present invention.
4 is a cross-sectional view illustrating a portion of a composite mold used to manufacture the dielectric upper body 330 and the pressurizing rib 320 'according to another embodiment of the present invention.
5 is a cross-sectional view showing a part of a composite mold used for manufacturing the dielectric upper body 330 and the pressurizing rib 320 according to another embodiment of the present invention and a process for separating the mold and the molded body from each other It is a schematic diagram.
6 is a cross-sectional view showing a part of a composite mold used for manufacturing the dielectric upper body 330 and the pressurizing rib 320 'according to another embodiment of the present invention, and a process for separating the mold from the molded body, It is a model diagram.
7 is a cross-sectional view illustrating a process of manufacturing the upper body 520 of the force sensor and the upper body 520 according to an embodiment of the present invention.
8 is a cross-sectional view illustrating a lower body 510 of a force sensor according to an embodiment of the present invention.
FIG. 9 is a cross-sectional view illustrating a force sensor in which an upper body 520 and a lower body 510 are coupled according to an embodiment of the present invention.
10 is a cross-sectional view showing a force sensor and a manufacturing process of a force sensor in which an upper body 520 and a lower body 510 are combined according to another embodiment of the present invention.
11 is a cross-sectional view showing a force sensor in which the upper body 520 and the lower body 510 are coupled according to another embodiment of the present invention.
12 is a cross-sectional view schematically illustrating a manufacturing process of a force sensor according to another embodiment of the present invention.
13 is a cross-sectional view showing a force sensor in which the upper body 520 and the lower body 510 are coupled according to another embodiment.
FIG. 14 is a graph showing dielectric constant values according to the frequency of Examples 1 to 6 and Comparative Example 1. FIG.
15 is a graph showing changes in dielectric constant values at 0.1 kHz frequency for Examples 1 to 6 and Comparative Example 1. Fig.
16 is a graph showing dielectric constant values according to the frequencies of Examples 7 to 9 and Comparative Example 2. FIG.
17 is a graph showing dielectric loss values (Dielectric loss, log) according to the frequency of Examples 7 to 9 and Comparative Example 2. Fig.

Hereinafter, various aspects and various embodiments of the present invention will be described in more detail.

According to an aspect of the present invention, there is provided a polymer dielectric composition comprising (i) a polymeric elastomer and (ii) a conductive filler,

The conductive filler includes a dispersant represented by the following general formula (1).

[Chemical Formula 1]

CX ₃ (CX ₂ ) nY

(Wherein X is H or F, Y is H, NH ₂ , OH, COOH or SiR ₁ R ₂ R ₃ , n is an integer from 1 to 30, and R ₁ , R ₂ and R ₃ are An alkyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, an alkenyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, An aryl group having 1 to 30 carbon atoms, a cycloalkyl group having 1 to 30 carbon atoms, or a cycloalkenyl group having 1 to 30 carbon atoms.

According to one embodiment, the polymeric elastomer is at least one selected from a silicone resin, a urethane resin, an isoprene resin, a fluorine resin, a styrene-butadiene rubber, a chloroprene rubber, an acrylonitrile copolymer and an acrylate rubber, More preferably, it is a silicone resin, a polydimethylsiloxane resin, or a polydimethylsiloxane-based gel-type resin. The polymeric elastomer is an elastic polymeric compound that tends to return to its original length, and plays an effective role in improving the modulus of elasticity in the polymer dielectric.

The conductive filler is preferably at least one selected from single wall carbon nanotubes, multiwall carbon nanotubes, graphene, graphite, carbon black, carbon fibers and fullerene, more preferably carbon black or carbon nanotubes. The conductive filler can be widely used as an electronic material such as an actuator, a force sensor, and a touch panel by giving a dielectric constant to a polymer dielectric.

The conductive filler preferably contains 0.001 to 5 parts by weight, more preferably 0.1 to 5 parts by weight, based on 100 parts by weight of the polymeric elastomer. When the weight of the conductive filler is less than 0.001, the dielectric effect is lowered. If the weight of the conductive filler is more than 5 parts by weight, the dielectric constant value is not increased any more, not.

Particularly, it is preferable that the conductive filler includes the dispersant represented by Chemical Formula 1, and the dispersant is chemically or physically bonded to the surface of the conductive filler to improve the dispersibility and dielectric property of the conductive filler.

Specifically, the dispersant may be any material having an alkyl chain. Preferably, the dispersant is selected from the group consisting of octadecyltrimethoxysilane, dodecyl trimethoxysilane, octadecylamine, , Dodecylamine, octadecane, and dodecane. The term " dodecylamine "

As described above, the dispersant having a relatively long alkyl chain having 8 to 12 carbon atoms is chemically or physically bonded to the surface of the conductive filler to improve the dispersibility of the conductive filler, And exhibits a remarkable effect in improving the dielectric property of the polymer dielectric composition by suppressing the deterioration of the characteristics.

According to another embodiment, the conductive filler and the dispersing agent are preferably mixed in a weight ratio of 1: 0.001 to 20. More preferably 1: 0.01 to 10, and when the weight ratio is in the range of 0.01 to 10, the effect of improving the dispersibility is further improved, and the polymer composition is further hardened or adhered to the electrode. On the other hand, when the weight ratio is less than 0.001, the effect of improving the dispersibility is remarkably lowered, and when it is more than 20 parts by weight, the curing of the polymer composition or the adhesive strength with the electrode is remarkably decreased.

According to another embodiment, the conductive filler is preferably, but not exclusively, treated with at least one acid selected from sulfuric acid, nitric acid, hydrochloric acid and phosphoric acid. The acid treatment of the conductive filler is a method for purifying carbon nanotubes. The metallic catalyst can be removed by a simple treatment in an acid solution. As a side effect of the acid treatment process, decomposition, cutting and functional group introduction of carbon nanotubes Can be performed.

According to another aspect of the present invention, an actuator or a touch panel including a polymer dielectric composition according to various embodiments of the present invention is disclosed.

According to another aspect of the present invention, the first substrate 100,

A first electrode 200 formed in a pattern on the upper surface of the first substrate 100,

A second substrate 110 spaced apart from the first substrate 100,

A second electrode 210 provided on the bottom surface of the second substrate 110 as a pattern and opposed to the first electrode 200 and a dielectric 300 interposed between the first and second substrates A force sensor is disclosed.

According to one embodiment, the dielectric 300 includes a lower body 310 that surrounds the first electrode 200, an upper body 330 that surrounds the outer side of the second electrode 210, And the lower body 310 are connected to each other according to the patterns of the first and second electrodes.

1 illustrates a force sensor according to an embodiment of the present invention. As shown in FIG. 1, a first electrode 200 is patterned on a top surface of a first substrate 100 The force applied to the lower body 310 from the pressing ribs 320 and 320 'of the dielectric 300 may be transmitted in a vertical direction But the present invention is not limited thereto. The pressing ribs connect the upper portion 330 and the lower body 310 of the dielectric body 300 and may be formed in a single or plural shapes depending on the pattern of the electrodes and a force applied from the second substrate 110 The first electrode 200 and the second electrode 200, respectively. The pressing rib may be formed to have a larger cross-sectional area than the first electrode. The pressing rib is not limited to a particular size. The pressing rib may be configured to transmit a force to be pressed from the second substrate to the first electrode. As a specific example, the pressing rib 320 may be formed in a cylindrical shape or a square shape having a diameter of 0.01 to 1 mm and a height of 0.01 to 1 mm, but the present invention is not limited thereto. And thus can be formed into various shapes or shapes.

Particularly, it is preferable that the lower body 310 of the dielectric 300 is formed so as to surround the outer side of the first electrode 200. This reduces the initial gap between the two electrodes, which is a problem in the related art. do.

More specifically, the dielectric effect is lowered due to the initial gap between the electrodes (air layer), and the position of the electrode is changed by repeated application of the load. As a result, the distance between the initial state and the electrode changes Accordingly, the response of the sensor is reduced. Therefore, in order to solve the above-described problems, the present invention is characterized in that the dielectric and the dielectric are combined so that the dielectric surrounds the outer side of the electrode and no gap is formed between the electrodes. The technical feature is that the dielectric constant, ≪ / RTI > can be achieved.

Generally, the capacitance value (C) of a sensor can be calculated by the following formula (1), which not only has an improved dielectric constant value, but also has a high elastic modulus, It is possible to remarkably reduce the distance between the electrodes and to improve the capacitance value of the sensor. A detailed description of the polymer dielectric composition is the same as that described above, and therefore, the description thereof will be omitted.

…………………(1)

... ... ... ... ... ... ... (One)

(Where ,? = Dielectric constant value of dielectric ,? = Area of electrode, and d = distance between electrodes)

According to another embodiment, the lower body 310 may include at least one polymer resin selected from the group consisting of silicone, polystyrene, polyamide, polyurethane, polyepoxy, polyacryl, polyester and polyolefin, It can be formed to have lower rigidity than the ribs.

That is, the dielectric body 300 may be formed of the same material as the upper body 330, the lower body 310, and the pressurizing ribs 320 and 320 '. Alternatively, as shown in FIG. 2, The body 310 may be formed of a different material from the upper body 330 and the pressurizing rib 320. The lower body 310 may be any material that can form a lower rigidity than the pressure rib 320 in addition to the polymer resin.

According to another embodiment, the substrate is at least one selected from the group consisting of a polyimide film, a polyethylene terephthalate film, or a silicone, polystyrene, polyamide, polyurethane, polyepoxy, polyacrylic, polyester, A polymeric elastomer, or a mixture thereof, but is not limited thereto, and any polymer having elasticity can be applied.

The electrode is preferably at least one selected from the group consisting of gold, silver, copper, a conductive polymer, a stretchable electrode, and a composite material in which a polymer and a conductive filler are mixed, but the present invention is not limited thereto.

The conductive polymer may be poly (3,4-ethylenedioxythiophene) polystyrene sulfonate, and examples of the flexible electrode include graphene and metal nanowires, and the metal The nanowire can be gold, silver or copper. Also, the composite material in which the polymer and the conductive filler are mixed is a composite material containing a filler exhibiting conductivity in the elastic polymer. The conductive filler may be a metal particle such as gold, silver, copper, carbon black, carbon nanotube, , Carbon material such as graphite, or a mixture thereof, but is not limited thereto.

According to another aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising the steps of: a) stacking a second electrode 210 on a second substrate 110,

b) molding the polymeric dielectric composition into a mold to produce a dielectric upper body 330 and a pressurizing rib 320,

c) laminating, b) pressing and curing the b) second electrode (210) on the dielectric top surface to fabricate the upper body (520) of the force sensor,

d) depositing a first electrode (200) on a first substrate (100), applying a polymer dielectric composition on the first electrode (200), pressing the lower electrode (510)

e) bonding the c) upper body 520 and d) the lower body 510 to each other.

According to one embodiment, the step a) is a step of laminating the second electrode 210 on the second substrate 110. Since the pattern of the electrode may be formed differently according to the purpose and purpose of the sensor, It is not.

Wherein the substrate is at least one polymeric elastomer selected from the group consisting of a polyimide film, a polyethylene terephthalate film, and a silicone, polystyrene, polyamide, polyurethane, polyepoxy, polyacrylic, polyester and polyolefin, But it is not limited thereto, and any polymer having elasticity can be applied. Also, The electrode is preferably at least one selected from the group consisting of gold, silver, copper, a conductive polymer, a stretchable electrode, and a composite material in which a polymer and a conductive filler are mixed, but the present invention is not limited thereto. The specific types of the substrate and the electrode are the same as those described above, and therefore, will not be described.

In the step b), the polymer dielectric composition is molded using the integral mold 600 or a plurality of composite molds 610, 611, and 612. After the polymer dielectric composition is applied to the mold, a vacuum is applied It is desirable to remove the air bubbles inside the subject.

As shown in FIG. 3, the molding step may use an integral mold 600 capable of molding the dielectric upper body 330 and the pressing rib 320 at one time. Alternatively, as shown in FIGS. 4 to 6, Separated composite molds 610, 611 and 612 can be used. 4A and 4B, the upper body 330 of the dielectric body is manufactured using the first molds 610 and 611 as shown in FIGS. 4A and 4B, The second mold 612 may be placed on the upper body 330 and the polymeric dielectric composition may be coated again on the second mold 612 to produce the pressurizing ribs 320 and 320 '. Particularly, when the composite mold is used, the mold and the molded body can be separated from each other by using the wearing jig 620, which is advantageous in that the molded body can be easily attached and detached.

In other words, in the present invention, it is possible to form a dielectric by using a mold, which is different from the prior art, so that it can be made into a dielectric of a desired shape, which can realize a definite shape and increase durability. In addition, it has an advantage of mass production of a dielectric material which is easy to manufacture and has uniform quality.

In the step c), the second electrode 210 on which the second substrate 110 is laminated is laminated on the upper surface of the dielectric formed through step b), and then the second electrode 210 is pressed and cured. 4, a flat plate 700 is laminated on the upper surface of the first substrate 110, a uniform load of 0.1 to 10 kg is firstly applied, and then a load of 80 to 150 ° C For 50 to 120 minutes in a thermal oven to produce the upper body 520 of the force sensor.

In the step d), the first electrode 200 is laminated on the first substrate 100, the polymer dielectric composition is coated on the first electrode 100, and the polymer dielectric composition is applied to the lower electrode 510 to manufacture the lower body 510 of the force sensor. It is preferable to apply pressure of 10 kg.

Particularly, by applying the flexible polymer dielectric composition to the first electrode 200 as described above, no gap is generated between the electrode and the dielectric, and this plays an effective role in improving the responsiveness of the sensor.

The step e) is a step of bonding the upper body 520 and the lower body 510 to each other. Specifically, as shown in FIG. 8, the first substrate 100 and the second substrate 510 110 are bonded to both edges of the first and second substrates 110 and 120 with a thermal adhesive tape or a double-sided tape 800 and 810, and then a load of 0.1 to 10 kg is applied to bond them at room temperature. Alternatively, There is a second method of performing plasma etching on the lower surface of the force sensor upper body 520 and the upper surface of the lower body 510 to couple them. 6, a part of the pressing ribs 320 of the upper body 520 of the force sensor is positioned so as to be submerged in the lower body of the dielectric body, thereby coupling the lower body and the upper body of the force sensor, 10, a force is applied to the force sensor upper body 520 and the lower body 510, as shown in FIG. 10, and a third method in which a load of 10 kg is applied and cured in a thermal oven at a temperature of 80 to 150 DEG C for 50 to 120 minutes. There is a fourth method in which a double-sided tape, a thermo-adhesive tape, or a polymer adhesive is laminated and bonded.

Hereinafter, the present invention will be described in more detail with reference to Examples and the like, but the scope and content of the present invention can not be construed to be limited or limited by the following Examples. It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the present invention as set forth in the following claims. It is natural that it belongs to the claims.

In addition, the experimental results presented below only show representative experimental results of the embodiments and the comparative examples, and the respective effects of various embodiments of the present invention which are not explicitly described below will be specifically described in the corresponding part.

Example 1

(Black pearl 2000, Cabot) filler dispersed in a solution of 0.22 g of octadecyltrimethoxysilane (OTMS) in chloroform was added to 0.044 g of a transparent two-part thermosetting poly The polymeric dielectric composition was prepared by charging 2 g of the subject of dimethylsiloxane (PDMS) resin, stirring, and drying in a vacuum oven at -1 MPa and 25 DEG C to remove the solvent.

However, the dispersing of carbon black (CB) was performed using ultrasonic equipment, and mixing of carbon black and PDMS was performed using a high viscosity mixed defoaming device, and stirring and defoaming proceeded simultaneously.

Examples 2 to 6

0.264 g, 0.308 g, 0.352 g, 0.396 g, and 0.44 g of octadecyltrimethoxysilane were used in place of 0.22 g of octadecyltrimethoxysilane, respectively.

Example 7

0.011 g of a multi-walled carbon nanotube (MWNT) treated with dodecylamine was added to and dispersed in chloroform. Then, 2 g of polydimethylsiloxane (PDMS) resin was added thereto and stirred. Then, the mixture was stirred in a vacuum oven at -1 MPa and 25 ° C. And then the solvent was removed by drying to prepare a polymer dielectric composition.

Ultrasonic equipment was used for dispersing. Mixing of multiwall - carbon nanotubes and PDMS themes was performed using a high viscosity mixing and defoaming device, and stirring and defoaming were performed simultaneously.

Examples 8 to 9

0.016 g and 0.022 g, respectively, were used instead of 0.011 g of the multi-wall-carbon nanotubes treated with dodecylamine.

Comparative Example 1

0.044 g of carbon black filler dispersed in chloroform and 2 g of polydimethylsiloxane (PDMS) resin were added and stirred, and then dried in a vacuum oven at -1 MPa and 25 캜 to remove the solvent to prepare a polymer dielectric.

Comparative Example 2

2 g of polydimethylsiloxane (PDMS) resin was added to chloroform, stirred, and dried in a vacuum oven at -1 MPa and 25 캜 to remove the solvent to prepare a polymer dielectric.

Example 10: Production of a force sensor including a polymer dielectric 1

The polymeric dielectric composition prepared in Example 7 was applied to a mold 600 as shown in FIG. 3 and a vacuum was applied to remove all of the inner bubbles to manufacture the dielectric upper body 330 and the pressurizing ribs 320 4, a polyimide film 110 having an Au electrode 210 formed thereon was attached to the upper surface of the dielectric, and then a uniformly distributed load of 3 kg was applied thereto. The polyimide film 110 was cured in a thermal oven at 110 ° C. for 90 minutes Thereby forming the upper body 520 of the force sensor.

The Au electrode 200 was placed on the polyimide film 100 so as to have a predetermined spaced distance, and then the polymer dielectric composition of Example 1 was applied. Squeeze and leveling were performed for 30 minutes, Thereby forming a body 510.

6, the lower body of the force sensor is coupled to the upper body, and the lower body of the force sensor is coupled to the lower body of the lower body. A flat plate was laminated on the lower surface and applied with a weight of 0.2 kg and cured at a temperature of 110 ° C for 90 minutes to produce a force sensor as shown in FIG.

Example 11: Production example 2 of force sensor including polymer dielectric

The upper body 520 of the force sensor was manufactured in the same manner as in the tenth embodiment.

After the Au electrode 200 was placed on the polyimide film 100 so as to have a predetermined spaced distance, the polymer dielectric composition of Example 1 was applied and then cured at a temperature of 110 ° C for 90 minutes to form a force sensor The lower body 510 of FIG.

7, adhesive tapes 800 and 810 are attached to both edges of the polyimide film 100 and the pressure rib 320 of the upper body 520 and the Au electrode 200 Flat plates 700 and 710 were laminated on the upper and lower surfaces of the force sensor and a uniform distribution load of 20 N was applied at room temperature for 30 seconds to produce a force sensor.

Example 12: Preparation of a force sensor including a polymer dielectric 3

The upper body 520 of the force sensor was manufactured in the same manner as in the tenth embodiment.

The lower body 510 of the force sensor was manufactured in the same manner as in Example 11.

8, after the plasma etching is performed for 30 seconds on the lower surface of the upper body and the upper surface of the lower body, the pressing rib 320 of the upper body 520 and the Au electrode 200 are opposed to each other A flat plate was laminated on the upper and lower surfaces of the force sensor, and 2 kg of a uniform distribution load was applied at room temperature for 5 minutes to produce a force sensor.

Test Example 1

In order to measure the dielectric constant and dielectric loss of the polymer dielectrics of Examples 1 to 6, 7 to 9, and Comparative Examples 1 and 2, the polymer dielectric was used as an electrode, and then an impedance analyzer (Impedance analyzer, Agilent 4263B) Were used to measure dielectric constant and dielectric loss, and the results are shown in Table 1 and Figs. 9-12.

However, the method of manufacturing the electrode is as follows.

First, 0.2 g of a curing agent for PDMS was added to the polymer dielectric composition and mixed. Using a doctor blade method, a film having a thickness of 200 to 300 탆 was formed on a 100 탆 copper substrate. The film was allowed to stand in a vacuum oven at a temperature of -1 MPa at 25 DEG C for about 30 minutes and then cured at a temperature of 120 DEG C for 1 hour to prepare a film. Thereafter, gold was coated on the upper surface of the produced film by a sputtering method to produce an electrode.

division Frequency (kHz) 0.1 One 10 100 Example 1 9.79 8.54 8.21 7.97 Example 2 66.59 49.09 36.31 24.96 Example 3 298.35 146.77 149.32 79.35 Example 4 317.80 271.07 163.52 81.42 Example 5 147.98 134.13 115.84 97.19 Example 6 81.39 74.55 62.74 52.55 Example 7 6.68 6.59 6.34 6.05 Example 8 10.81 9.95 9.35 9.01 Example 9 19.85 16.54 13.56 12.95 Comparative Example 1 6.12 6.02 5.97 5.84 Comparative Example 2 2.81 2.80 2.85 2.82

As shown in Table 1 and FIGS. 9 to 12, in Examples 1 to 9 using the conductive filler containing a dispersant, the dielectric constant value was remarkably increased compared with Comparative Examples 1 and 2, and it was confirmed that the dielectric properties were improved .

100; The first substrate
110; The second substrate
200; The first electrode
210; The second electrode
300; dielectric
310; The lower body of the dielectric
320, 320 ',321; Pressure rib
330; The upper body of the dielectric
400; Adhesive tape
500; Force sensor
510; The upper body of the force sensor
520; Lower body of force sensor
600; Integral mold
610, 611; The first mold
612; The second mold
620; Remove Jig
700, 710; Flat plate
800, 810, 820; Adhesive tape

Claims (20)

(I) a polymeric elastomer, and (ii) a conductive filler in the polymeric elastomer,
Wherein the conductive filler comprises a dispersant represented by the following general formula (1).
[Chemical Formula 1]
CX ₃ (CX ₂ ) nY
(Wherein X is H or F, Y is H, NH ₂ , OH, COOH or SiR ₁ R ₂ R ₃ , n is an integer from 1 to 30, and R ₁ , R ₂ and R ₃ are An alkyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, an alkenyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, An aryl group having 1 to 30 carbon atoms, a cycloalkyl group having 1 to 30 carbon atoms, or a cycloalkenyl group having 1 to 30 carbon atoms.
The method according to claim 1,
The polymeric elastomer (i) is at least one selected from the group consisting of a silicone resin, a urethane resin, an isoprene resin, a fluorine resin, a styrene-butadiene rubber, a chloroprene rubber, an acrylonitrile copolymer and an acrylate rubber. .
The method according to claim 1,
(Ii) the conductive filler is at least one selected from the group consisting of a single-walled carbon nanotube, a multi-walled carbon nanotube, a graphene, a graphite, a carbon black, a carbon fiber, and a fullerene.
The method according to claim 1,
And 0.001 to 5 parts by weight of the conductive filler based on 100 parts by weight of the polymeric elastomer.
The method according to claim 1,
Wherein the conductive filler and the dispersing agent are mixed in a weight ratio of 1: 0.001 to 20.
The method according to claim 1,
Wherein the conductive filler is treated with at least one acid selected from sulfuric acid, nitric acid, hydrochloric acid and phosphoric acid.
An actuator comprising the polymer dielectric composition of any one of claims 1 to 6.
A touch panel comprising the polymer dielectric composition of any one of claims 1 to 6.
A first substrate 100;
A first electrode 200 provided on the upper surface of the first substrate 100 as a pattern;
A second substrate 110 disposed on the first substrate 100 so as to be spaced apart from the first substrate 100;
A second electrode 210 provided on the bottom surface of the second substrate 110 as a pattern and facing the first electrode 200; And
And a dielectric (300) interposed between the first and second substrates,
Characterized in that the dielectric (300) comprises the polymeric dielectric composition according to any one of claims 1 to 6.
10. The method of claim 9,
The dielectric 300 includes a lower body 310 that surrounds the first electrode 200;
An upper body 330 surrounding an outer side of the second electrode 210; And
And a plurality of pressure ribs (320, 320 ') connecting the upper and lower bodies in a plurality of patterns according to the patterns of the first and second electrodes.
10. The method of claim 9,
The first electrode 200 is formed at a position where a force applied to the lower body 310 from the pressing ribs 320 and 320 'of the dielectric 300 is transmitted in the vertical direction. The pressing ribs 320 and 320' Is formed to have a larger cross-sectional area than the first electrode (200).
11. The method of claim 10,
Wherein the lower body (310) comprises at least one polymer resin selected from the group consisting of silicone, polystyrene, polyamide, polyurethane, polyepoxy, polyacrylic, polyester and polyolefin.
10. The method of claim 9,
Wherein the substrate is at least one polymeric elastomer selected from the group consisting of a polyimide film, a polyethylene terephthalate film, and a silicone, polystyrene, polyamide, polyurethane, polyepoxy, polyacrylic, polyester and polyolefin, And the mixture is a mixture.
10. The method of claim 9,
Wherein the electrode is at least one selected from the group consisting of gold, silver, copper, poly (3,4-ethylenedioxythiophene) polystyrene sulfonate, graphene, metal nanowire, and elastic polymer containing conductive filler.
a) laminating a second electrode (210) on a second substrate (110);
b) molding the polymeric dielectric composition into a mold to produce dielectrics 320 and 330;
c) laminating and boding and curing the b) second electrode on the dielectric top surface to produce the upper body 520 of the force sensor 500;
d) depositing a first electrode (200) on a first substrate (100), applying a polymer dielectric composition on the first electrode (200), and compressing the polymer dielectric composition to form a lower body (510) of the force sensor (500);
e) bonding the c) upper body 520 and d) the lower body 510,
Wherein the polymer dielectric composition is the polymer dielectric composition according to any one of claims 1 to 6.
16. The method of claim 15,
Wherein the mold of step b) is an integral mold or a composite mold separated into a plurality of molds.
16. The method of claim 15,
A first method of joining the edges of the first substrate 100 and the second substrate 110 to each other with a thermal adhesive tape or a double-sided tape 800 or 810;
A second method of performing plasma etching on the lower surface of the force sensor upper body 520 and the upper surface of the lower body 510 to couple them;
The lower ends of the force sensing ribs 320 and 320 'of the force sensor upper body 520 are positioned so as to be submerged in the lower body 310 of the dielectric body so that the lower body 510 and the upper body 520 of the force sensor are coupled Then a third method of curing; And
A fourth method of stacking and bonding a double-sided tape, a thermally adhesive tape, or a polymer adhesive between the force sensor upper body 520 and the lower body 510; The method comprising the steps of:
16. The method of claim 15,
The lower body 310 may include at least one polymer resin selected from the group consisting of silicone, polystyrene, polyamide, polyurethane, polyepoxy, polyacryl, polyester and polyolefin, Wherein the force sensor has a rigidity.
16. The method of claim 15,
Wherein the substrate is at least one polymeric elastomer selected from the group consisting of a polyimide film, a polyethylene terephthalate film, and a silicone, polystyrene, polyamide, polyurethane, polyepoxy, polyacrylic, polyester and polyolefin, And the mixture is a mixture.
16. The method of claim 15,
Wherein the electrode is at least one selected from the group consisting of gold, silver, copper, poly (3,4-ethylenedioxythiophene) polystyrene sulfonate, graphene, metal nanowire, and elastic polymer containing conductive filler.

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