KR20170014527A - Catalyst having active catalystic particles and manufacturing process of the same - Google Patents
Catalyst having active catalystic particles and manufacturing process of the same Download PDFInfo
- Publication number
- KR20170014527A KR20170014527A KR1020150108063A KR20150108063A KR20170014527A KR 20170014527 A KR20170014527 A KR 20170014527A KR 1020150108063 A KR1020150108063 A KR 1020150108063A KR 20150108063 A KR20150108063 A KR 20150108063A KR 20170014527 A KR20170014527 A KR 20170014527A
- Authority
- KR
- South Korea
- Prior art keywords
- support
- nano
- catalyst
- protrusions
- plasma etching
- Prior art date
Links
- 239000003054 catalyst Substances 0.000 title claims abstract description 94
- 238000004519 manufacturing process Methods 0.000 title abstract description 34
- 239000002245 particle Substances 0.000 title description 2
- 239000000463 material Substances 0.000 claims abstract description 49
- 238000000034 method Methods 0.000 claims abstract description 36
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 48
- 238000001020 plasma etching Methods 0.000 claims description 26
- 239000011324 bead Substances 0.000 claims description 22
- 239000000377 silicon dioxide Substances 0.000 claims description 22
- 238000003754 machining Methods 0.000 claims description 10
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- 239000002073 nanorod Substances 0.000 claims description 6
- 238000005488 sandblasting Methods 0.000 claims description 5
- 239000002071 nanotube Substances 0.000 abstract description 13
- 230000003197 catalytic effect Effects 0.000 abstract 4
- 239000002184 metal Substances 0.000 description 6
- 238000003486 chemical etching Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B01J35/023—
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
- B01J37/348—Electrochemical processes, e.g. electrochemical deposition or anodisation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
- B01J37/349—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation making use of flames, plasmas or lasers
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Plasma & Fusion (AREA)
- Toxicology (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Optics & Photonics (AREA)
- Catalysts (AREA)
Abstract
Description
The present invention relates to a catalyst in which an active catalyst material is supported on the surface of a support, and more particularly to a catalyst having a plurality of nano-protrusions formed on a surface of a support, Catalyst and a method for producing the same.
Generally, the catalyst is configured such that a large amount of active catalyst material is supported on the surface of a support that serves as a housing. The greater the amount of the supported catalyst material, the better the performance of the catalyst. Therefore, it is preferable to support a larger number of active catalyst materials on the surface of the support. However, when the surface of the support is smoothly formed, there is a limitation in the amount of supporting the active catalyst material.
In order to solve such a problem, a method of coating a wash coat on the surface of the support has been developed so that the area of the supported catalyst material is increased.
Hereinafter, with reference to the accompanying drawings, a method of manufacturing a catalyst for supporting an active catalyst material after coating a support on the surface of a support will be described in detail.
FIG. 1 is a cross-sectional view sequentially showing a conventional catalyst production process.
In the case of preparing a catalyst using a conventional catalyst production method, a
In this case, since the
When the
1, a
Also, a method has been proposed in which an active catalyst material is supported on a surface of a nanotube so that a larger amount of the active catalyst material can be supported on a support having a limited size even if the carrier is not coated, and the nanotube is adhered to the support However, in such a case, a separate bonding step for bonding the nanotubes to the support is indispensably required. In addition, there is a limitation in adhering the nanotubes to the support in a desired form, and the nanotubes may be separated from the support .
SUMMARY OF THE INVENTION The present invention has been proposed in order to solve the above-mentioned problems. It is an object of the present invention to provide a method of manufacturing a semiconductor device, which comprises forming a plurality of nano-protrusions on a surface of a support and then supporting an active catalyst material on the surface of the support, There is a need for a catalyst which can support a larger amount of active catalyst material on a support of a limited size, and a method for producing the same.
According to an aspect of the present invention, there is provided a catalyst comprising: a support having a plurality of nanorods on a surface thereof; And an active catalyst material bonded to the surface of the nano protrusion.
The active catalyst material is deposited on the surface of the nanorods by chemical vapor deposition.
The nano protrusions are formed by mechanical machining by micro sandblasting, electrical discharge machining, and laser machining.
The nano protrusions are formed through a process of drawing a support into a chamber in which an internal pressure is maintained within a set range, and then plasma etching the surface of the support.
The nano protrusions are formed through a process of forming a mask pattern on the surface of the support, performing plasma etching, and then removing the mask pattern.
The nano protrusions are formed through a process of forming a silica bead layer on the surface of the support and then performing plasma etching until the silica bead layer is removed.
A method for producing a catalyst according to the present invention comprises: a first step of providing a support; A second step of forming a plurality of nanorods on the surface of the support; And a third step of binding the active catalyst material to the surface of the plurality of nano-dots.
In the third step, the active catalyst material is deposited on the surface of the nano protrusion by chemical vapor deposition.
The second step is configured to form the plurality of nano protrusions by mechanical processing by micro sandblasting, electric discharge machining, and laser machining.
The second step includes a step of drawing a support into a chamber in which an internal pressure is maintained within a set range, and a step of plasma etching the surface of the support.
The second step may include forming a mask pattern on the surface of the support, performing plasma etching on the surface of the support on which the mask pattern is formed, and removing the mask pattern.
The second step includes a step of forming a silica bead layer on the surface of the support and a step of performing plasma etching on the surface of the support until the silica bead layer is removed.
Since the catalyst according to the present invention supports the active catalyst material on the surface of a plurality of nano-dots formed on the surface of the support, a larger amount of the active catalyst material can be supported on the support having a limited size without a separate carrier or nanotube. This has the advantage that the internal structure is simplified. Further, when the method for producing a catalyst according to the present invention is used, there is no need to attach a support or a nanotube to the surface of the support, so that the catalyst production process is simplified and the manufacturing cost of the catalyst can be reduced.
FIG. 1 is a cross-sectional view sequentially showing a conventional catalyst production process.
2 is a cross-sectional view sequentially showing steps of the method for producing a catalyst according to the present invention.
3 is a cross-sectional view of a support on which nano protrusions are formed according to Example 2 of the catalyst production method according to the present invention.
4 is a cross-sectional view sequentially showing a process of forming nano-protrusions on a support according to Example 3 of the catalyst production method according to the present invention.
5 is a cross-sectional view sequentially showing a process of forming nano protrusions on a support according to Example 4 of the catalyst production method according to the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings.
≪ Example 1 >
2 is a cross-sectional view sequentially showing steps of the method for producing a catalyst according to the present invention.
The method for producing a catalyst according to the present invention is a method for producing a catalyst in which a large amount of an
In the case of preparing a catalyst using the catalyst production method according to the present invention, first, as shown in FIG. 2 (a), a supporting
As described above, when a plurality of
As described above, by using the catalyst production method according to the present invention, even if a carrier or a nanotube is not attached to the surface of the
On the other hand, when the support is coated on the surface of the
However, the number and height of the nano-
≪ Example 2 >
3 is a cross-sectional view of a
In the method of manufacturing a catalyst according to the present invention, the process of forming the
When the surface of the
In the case where CF 4 gas alone is used in the plasma etching while the pressure in the chamber is maintained at 2 Pa,
As described above, the technical idea that a plurality of
≪ Example 3 >
4 is a cross-sectional view sequentially showing the process of forming the nano-
It is preferable to increase the size of the
The method of manufacturing a catalyst according to the present invention includes the steps of forming a
When the
When the surface of the wafer between the
After the
<Example 4>
5 is a sectional view sequentially showing a process of forming nano-
A large number of work processes are added to form the
Accordingly, the method of manufacturing a catalyst according to the present invention may be configured to form a plurality of
When the
On the other hand, since the silica beads are present as particles, even if the silica dispersion solution is dried to form the
Therefore, when plasma etching is performed in the state shown in FIG. 5 (a), the portion exposed between the silica beads in the upper surface of the
5 (d), a plurality of
Since the technique of forming the
As described above, the
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the present invention is not limited to the disclosed exemplary embodiments. It will also be appreciated that many modifications and variations will be apparent to those skilled in the art without departing from the scope of the invention.
100: Support body 110: Nano-
110a:
120: active catalyst material 130: mask pattern
130 ': mask layer 132: metal dot
140: silica bead layer
Claims (12)
An active catalyst material bound to the surface of the nanorods;
≪ / RTI >
Wherein the active catalyst material is deposited on the surface of the nano bumps by chemical vapor deposition.
Wherein the nano protrusions are formed by mechanical working by any one of micro sandblasting, discharge machining and laser machining.
Wherein the nano protrusions are formed through a process of drawing a support into a chamber in which an internal pressure is maintained within a set range and then plasma etching the surface of the support.
Wherein the nano protrusions are formed through a process of forming a mask pattern on the surface of the support, performing plasma etching, and then removing the mask pattern.
Wherein the nano protrusions are formed through a process of forming a silica bead layer on the surface of the support and performing plasma etching until the silica bead layer is removed.
A second step of forming a plurality of nanorods on the surface of the support; And
A third step of binding an active catalyst material to the surface of the plurality of nano-dots;
≪ / RTI >
Wherein the third step is configured to deposit the active catalyst material on the surface of the nano protrusion by chemical vapor deposition.
The second step comprises:
Wherein the plurality of nano protrusions are formed by mechanical processing by either micro-sand blasting, discharge machining or laser machining.
The second step comprises:
Introducing a support into a chamber in which an internal pressure is maintained within a set range; and plasma etching the surface of the support.
The second step comprises:
Forming a mask pattern on the surface of the support, performing plasma etching on the surface of the support having the mask pattern formed thereon, and removing the mask pattern.
The second step comprises:
Forming a silica bead layer on the surface of the support; and performing plasma etching on the surface of the support until the silica bead layer is removed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150108063A KR20170014527A (en) | 2015-07-30 | 2015-07-30 | Catalyst having active catalystic particles and manufacturing process of the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150108063A KR20170014527A (en) | 2015-07-30 | 2015-07-30 | Catalyst having active catalystic particles and manufacturing process of the same |
Publications (1)
Publication Number | Publication Date |
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KR20170014527A true KR20170014527A (en) | 2017-02-08 |
Family
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Family Applications (1)
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KR1020150108063A KR20170014527A (en) | 2015-07-30 | 2015-07-30 | Catalyst having active catalystic particles and manufacturing process of the same |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023136634A1 (en) * | 2022-01-13 | 2023-07-20 | 주식회사 엘지화학 | Method for preparing catalyst for production of carbon nanotubes |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100726237B1 (en) | 2006-03-31 | 2007-06-08 | 한국에너지기술연구원 | Preparation of platinum nano catalyst supported on carbon nanotube by electrochemical deposition |
-
2015
- 2015-07-30 KR KR1020150108063A patent/KR20170014527A/en not_active Application Discontinuation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100726237B1 (en) | 2006-03-31 | 2007-06-08 | 한국에너지기술연구원 | Preparation of platinum nano catalyst supported on carbon nanotube by electrochemical deposition |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023136634A1 (en) * | 2022-01-13 | 2023-07-20 | 주식회사 엘지화학 | Method for preparing catalyst for production of carbon nanotubes |
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