KR20170014527A - Catalyst having active catalystic particles and manufacturing process of the same - Google Patents

Catalyst having active catalystic particles and manufacturing process of the same Download PDF

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Publication number
KR20170014527A
KR20170014527A KR1020150108063A KR20150108063A KR20170014527A KR 20170014527 A KR20170014527 A KR 20170014527A KR 1020150108063 A KR1020150108063 A KR 1020150108063A KR 20150108063 A KR20150108063 A KR 20150108063A KR 20170014527 A KR20170014527 A KR 20170014527A
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South Korea
Prior art keywords
support
nano
catalyst
protrusions
plasma etching
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KR1020150108063A
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Korean (ko)
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엄재현
조용준
장지상
서호철
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세종공업 주식회사
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Priority to KR1020150108063A priority Critical patent/KR20170014527A/en
Publication of KR20170014527A publication Critical patent/KR20170014527A/en

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    • B01J35/023—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
    • B01J37/348—Electrochemical processes, e.g. electrochemical deposition or anodisation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
    • B01J37/349—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation making use of flames, plasmas or lasers

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Optics & Photonics (AREA)
  • Catalysts (AREA)

Abstract

The present invention relates to a catalyst comprising: a support having a plurality of nano-scaled protrusions formed on the surface thereof; and an active catalytic material bound to the surface of the nano-scaled protrusions. The catalyst according to the present invention is obtained by the method comprising the steps of: 1) providing a support; 2) forming a plurality of nano-scaled protrusions on the surface of the support; and 3) binding an active catalytic material to the surface of the nano-scaled protrusions. The catalyst according to the present invention comprises the active catalytic material supported on the surface of the nano-scaled protrusions formed on the surface of the support. Thus, it is possible to allow the active catalytic material to be supported on a defined size of the support in a larger amount without any separate carrier or nanotubes, and thus to simplify the internal structure of the catalyst. In addition, when the method for preparing a catalyst according to the present invention is used, there is no need for attaching a carrier or nanotubes to the surface of the support. Therefore, it is possible to simplify a process for preparing the catalyst and thus to reduce the cost for preparing the catalyst.

Description

[0001] The present invention relates to a catalyst supported on an active catalyst material,

The present invention relates to a catalyst in which an active catalyst material is supported on the surface of a support, and more particularly to a catalyst having a plurality of nano-protrusions formed on a surface of a support, Catalyst and a method for producing the same.

Generally, the catalyst is configured such that a large amount of active catalyst material is supported on the surface of a support that serves as a housing. The greater the amount of the supported catalyst material, the better the performance of the catalyst. Therefore, it is preferable to support a larger number of active catalyst materials on the surface of the support. However, when the surface of the support is smoothly formed, there is a limitation in the amount of supporting the active catalyst material.

In order to solve such a problem, a method of coating a wash coat on the surface of the support has been developed so that the area of the supported catalyst material is increased.

Hereinafter, with reference to the accompanying drawings, a method of manufacturing a catalyst for supporting an active catalyst material after coating a support on the surface of a support will be described in detail.

FIG. 1 is a cross-sectional view sequentially showing a conventional catalyst production process.

In the case of preparing a catalyst using a conventional catalyst production method, a spport 10 serving as a base member of the catalyst is provided as shown in FIG. 1 (a). The support 10 may be variously modified according to various conditions such as the shape and use of the catalyst to be manufactured.

In this case, since the support 10 typically has a smooth surface and can not support a large amount of active catalyst material, a wash coat (not shown) is formed on the surface of the support 10 as shown in FIG. 1 11). The support 11 has a very large surface area as compared with the support 10 as a material having micropores on the surface thereof.

When the active catalyst material 12 is supported on the surface of the support 11 coated on the support 10 as shown in FIG. 1 (c) A larger amount of the active catalyst material 12 can be carried on the support 10 of a limited size.

1, a carrier 11 coated on the surface of the support 10 is indispensably required. However, in order to coat the carrier 11, the cost of purchasing a carrier is increased and the manufacturing process becomes complicated There is a problem that the production cost of the catalyst is increased.

Also, a method has been proposed in which an active catalyst material is supported on a surface of a nanotube so that a larger amount of the active catalyst material can be supported on a support having a limited size even if the carrier is not coated, and the nanotube is adhered to the support However, in such a case, a separate bonding step for bonding the nanotubes to the support is indispensably required. In addition, there is a limitation in adhering the nanotubes to the support in a desired form, and the nanotubes may be separated from the support .

KR 10-0726237 B1

SUMMARY OF THE INVENTION The present invention has been proposed in order to solve the above-mentioned problems. It is an object of the present invention to provide a method of manufacturing a semiconductor device, which comprises forming a plurality of nano-protrusions on a surface of a support and then supporting an active catalyst material on the surface of the support, There is a need for a catalyst which can support a larger amount of active catalyst material on a support of a limited size, and a method for producing the same.

According to an aspect of the present invention, there is provided a catalyst comprising: a support having a plurality of nanorods on a surface thereof; And an active catalyst material bonded to the surface of the nano protrusion.

The active catalyst material is deposited on the surface of the nanorods by chemical vapor deposition.

The nano protrusions are formed by mechanical machining by micro sandblasting, electrical discharge machining, and laser machining.

The nano protrusions are formed through a process of drawing a support into a chamber in which an internal pressure is maintained within a set range, and then plasma etching the surface of the support.

The nano protrusions are formed through a process of forming a mask pattern on the surface of the support, performing plasma etching, and then removing the mask pattern.

The nano protrusions are formed through a process of forming a silica bead layer on the surface of the support and then performing plasma etching until the silica bead layer is removed.

A method for producing a catalyst according to the present invention comprises: a first step of providing a support; A second step of forming a plurality of nanorods on the surface of the support; And a third step of binding the active catalyst material to the surface of the plurality of nano-dots.

In the third step, the active catalyst material is deposited on the surface of the nano protrusion by chemical vapor deposition.

The second step is configured to form the plurality of nano protrusions by mechanical processing by micro sandblasting, electric discharge machining, and laser machining.

The second step includes a step of drawing a support into a chamber in which an internal pressure is maintained within a set range, and a step of plasma etching the surface of the support.

The second step may include forming a mask pattern on the surface of the support, performing plasma etching on the surface of the support on which the mask pattern is formed, and removing the mask pattern.

The second step includes a step of forming a silica bead layer on the surface of the support and a step of performing plasma etching on the surface of the support until the silica bead layer is removed.

Since the catalyst according to the present invention supports the active catalyst material on the surface of a plurality of nano-dots formed on the surface of the support, a larger amount of the active catalyst material can be supported on the support having a limited size without a separate carrier or nanotube. This has the advantage that the internal structure is simplified. Further, when the method for producing a catalyst according to the present invention is used, there is no need to attach a support or a nanotube to the surface of the support, so that the catalyst production process is simplified and the manufacturing cost of the catalyst can be reduced.

FIG. 1 is a cross-sectional view sequentially showing a conventional catalyst production process.
2 is a cross-sectional view sequentially showing steps of the method for producing a catalyst according to the present invention.
3 is a cross-sectional view of a support on which nano protrusions are formed according to Example 2 of the catalyst production method according to the present invention.
4 is a cross-sectional view sequentially showing a process of forming nano-protrusions on a support according to Example 3 of the catalyst production method according to the present invention.
5 is a cross-sectional view sequentially showing a process of forming nano protrusions on a support according to Example 4 of the catalyst production method according to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings.

≪ Example 1 >

2 is a cross-sectional view sequentially showing steps of the method for producing a catalyst according to the present invention.

The method for producing a catalyst according to the present invention is a method for producing a catalyst in which a large amount of an active catalyst material 120 is supported on the surface of the support 100 even if a wash coat is not coated on the support 100 will be.

In the case of preparing a catalyst using the catalyst production method according to the present invention, first, as shown in FIG. 2 (a), a supporting body 100 having an appropriate size suited to the shape of the catalyst is prepared, A plurality of nano protrusions 110 are formed on the surface of the support 100 (the upper surface in this embodiment). The nano protrusion 110 formed on the surface of the support 100 may be formed by a mechanical process such as micro-sand blasting, electric discharge machining, laser machining or the like. At this time, the nano protrusions 110 may be formed through chemical etching, and the process of forming the nano protrusions 110 through chemical etching will be described in detail with reference to FIGS. 3 to 5.

As described above, when a plurality of nano protrusions 110 are formed on the surface of the support 100, the surface area of the support 100 is widened, and accordingly, a larger amount The active catalyst material 120 of the present invention can be supported. The active catalyst material 120 may be deposited on the surface of the nano protrusion 110 by chemical vapor deposition. Since the chemical vapor deposition is a technology commercialized in the related art, A detailed description thereof will be omitted.

As described above, by using the catalyst production method according to the present invention, even if a carrier or a nanotube is not attached to the surface of the support 100, a large number of active catalyst materials 120 can be supported on the support 100 The carrier coating or the process of adhering the nanotubes can be omitted so that the entire manufacturing process of the catalyst is simplified and the manufacturing cost of the catalyst can be reduced. In addition, the catalyst prepared according to the present invention can be obtained by directly supporting the active catalyst material 120 on the surface of the support 100 (more specifically, on the surface of the nano protrusion 110) It is possible to fundamentally prevent the possibility of performance deterioration due to the increase in the power consumption.

On the other hand, when the support is coated on the surface of the support 100, the rate of increase of the surface area of the support is constant according to the physical properties of the support. Therefore, the support 100 can support the active catalyst material 120 The amount is also limited to a certain range. Likewise, when the nanotubes are used, the surface area increase rate at which the active catalyst material 120 is supported is limited to a certain extent, so that the amount of the active catalyst material 120 can be limited within a certain range.

However, the number and height of the nano-protrusions 110 formed on the surface of the support 100 can be changed per unit area according to the method of forming the nano-protrusions 110. The number of the nano-protrusions 110 and the number of the nano- The amount of the active catalyst material 120 to be loaded can be adjusted by adjusting the height.

≪ Example 2 >

3 is a cross-sectional view of a support 100 on which nano protrusions 110 are formed according to Example 2 of the catalyst production method according to the present invention.

In the method of manufacturing a catalyst according to the present invention, the process of forming the nano bumps 110 on the surface of the support 100 may be realized through chemical etching. That is, the method for preparing a catalyst according to the present invention comprises the steps of drawing a support 100 into a chamber in which an internal pressure is maintained within a set range, and applying a plasma to the surface of the support 100, And the nano protrusion 110 may be formed on the surface.

When the surface of the support 100 is treated by plasma etching using a mixed gas of CF 4 and O 2 while maintaining the pressure in the chamber at 2 Pa, the height of the protrusion is increased as shown in FIG. 3 (a) A plurality of very low nano protrusions 110 are formed. At this time, when the pressure in the chamber is increased to 5 Pa, the height and diameter of the nano protrusions 110 are somewhat increased. The manufacturer adjusts the pressure in the chamber to form the nano protrusions 110 having appropriate height and diameter, The amount of the active catalyst material 120 supported on the surface of the substrate 110 can be increased or decreased.

In the case where CF 4 gas alone is used in the plasma etching while the pressure in the chamber is maintained at 2 Pa, nano protrusions 110 having a significantly larger size than the nano protrusions 110 shown in FIG. 3 (a) are obtained (See Fig. 3 (b)). As described above, plasma etching using only CF 4 gas can form larger nano protrusions 110, so that a larger amount of active catalyst material 120 can be supported on the surface of the nano protrusions 110. Of course, even in the case of using only CF 4 gas during plasma etching, the height and diameter of the nano protrusion 110 can be changed by a certain level according to the pressure in the chamber.

As described above, the technical idea that a plurality of nano protrusions 110 are formed on the surface of the support 100 when the surface of the support 100 is subjected to plasma etching is a technology that is well known in the art Since it is a technical idea, a detailed description thereof will be omitted.

≪ Example 3 >

4 is a cross-sectional view sequentially showing the process of forming the nano-protrusion 110 in the support 100 according to the third embodiment of the catalyst production method according to the present invention.

It is preferable to increase the size of the nano protrusion 110 in order to support a larger amount of the active catalyst material 120 on the surface of the supporter 100. The nano protrusion 110 formed by the second embodiment has a size The effect of increasing the surface area on which the active catalyst material 120 is supported may be limited.

The method of manufacturing a catalyst according to the present invention includes the steps of forming a mask pattern 130 on the surface of the support 100 so that the nano protrusions 110 can be formed larger, The nano protrusions 110 may be formed on the surface of the support 100 through a process of performing plasma etching on the surface of the support 100 and a process of removing the mask pattern 130.

When the nano protrusion 110 is formed using the mask pattern 130 as described above, a mask layer 130 'is first formed on the upper surface of the support 100 as shown in FIG. 4 (a). The mask layer 130 'is formed by placing the support 100 on a negative electrode in a vacuum chamber, maintaining the pressure in the chamber at 2 Pa to 5 Pa, The target can be sputtered using a DC magnetron sputtering method while the power is maintained at 150 W to 300 W. [ The mask layer 130 'is then annealed at a temperature of about 550 ° C. for about 15 minutes using a rapid thermal annealing (RTP) (See Fig. 4 (b)).

When the surface of the wafer between the metal dots 132 is etched through the plasma etching, only the portion not covered by the metal dots 132 is etched in the upper surface of the substrate 100 as shown in FIG. 4 (c) A plurality of first projections 110a are formed. At the same time, a plurality of second protrusions 110b having a diameter of 100 nm or less is formed between the etched first protrusions 110a due to the characteristic of the plasma etching using only CF 4 as a gas.

After the nano protrusion 110 composed of the first protrusion 110a and the second protrusion 110b is formed, after all the metal dots 132 attached to the upper surface of the first protrusion 110a are removed, The active catalyst material 120 is deposited on the surface of the nano protrusion 110 formed in Example 2. Since the nano protrusion 110 formed by Example 3 is larger in height and diameter than the nano protrusion 110 formed in Example 2, It becomes possible to deposit a positive active catalyst material 120.

<Example 4>

5 is a sectional view sequentially showing a process of forming nano-protrusions 110 on a support 100 according to Example 4 of the catalyst production method according to the present invention.

A large number of work processes are added to form the mask pattern 130 composed of a plurality of metal dots 132 on the surface of the support 100. The problem of requiring a lot of time and cost for forming the nano protrusions 110 Lt; / RTI &gt;

Accordingly, the method of manufacturing a catalyst according to the present invention may be configured to form a plurality of nano protrusions 110 through plasma etching without using a separate mask pattern 130. That is, the method for producing a catalyst according to the present invention includes the steps of forming a silica bead layer 140 on the surface of a support 100, and performing plasma etching on the surface of the support 100 until the silica bead layer 140 is removed. A plurality of nano protrusions 110 may be formed.

When the nano protrusion 110 is to be formed using the silica bead layer 140 as described above, first, a silica dispersion solution is coated on the surface of the support 100 as shown in FIG. 5 (a) 100, the silica bead layer 140 is formed. The silica dispersion solution includes a plurality of silica beads. The silica dispersion solution may be prepared by mixing silica beads with water, alcohol, organic solvent, etc., and may be coated on the surface of the support 100 by various methods . Can be coated on the support 100 using, for example, spin coating, dip coating and spray coating.

On the other hand, since the silica beads are present as particles, even if the silica dispersion solution is dried to form the silica bead layer 140, an empty space is formed between the silica beads, and a part of the upper surface of the support 100, Lt; / RTI &gt;

Therefore, when plasma etching is performed in the state shown in FIG. 5 (a), the portion exposed between the silica beads in the upper surface of the support 100 is preferentially etched as shown in FIG. 5 (b) When the plasma etching is further continued, not only the support 100 but also the silica bead layer 140 are etched so that a plurality of grooves are formed on the upper surface of the support 100 as shown in FIG. 5 (c).

5 (d), a plurality of nano protrusions 110 are formed on the surface of the support 100, and the support body 100 (FIG. 5 100 to a larger amount of the active catalyst material 120.

Since the technique of forming the nano protrusion 110 by plasma etching after forming the silica bead layer 140 is a technique known in the wafer processing field, the silica bead layer 140 is formed and plasma etching is performed A detailed description of the etching pattern that is generated when etching is performed will be omitted.

As described above, the nano protrusions 110 formed on the support 100 can be formed by various manufacturing methods. Therefore, even if the support 100 is made of any material such as metal, glass, synthetic resin, or ceramic, It is advantageous that a large amount of the active catalyst material 120 can be carried without a separate carrier or nanotube.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the present invention is not limited to the disclosed exemplary embodiments. It will also be appreciated that many modifications and variations will be apparent to those skilled in the art without departing from the scope of the invention.

100: Support body 110: Nano-
110a: first projection 110b: second projection
120: active catalyst material 130: mask pattern
130 ': mask layer 132: metal dot
140: silica bead layer

Claims (12)

A support having a plurality of nanorods formed on its surface; And
An active catalyst material bound to the surface of the nanorods;
&Lt; / RTI &gt; The method according to claim 1,
Wherein the active catalyst material is deposited on the surface of the nano bumps by chemical vapor deposition. The method according to claim 1,
Wherein the nano protrusions are formed by mechanical working by any one of micro sandblasting, discharge machining and laser machining. The method according to claim 1,
Wherein the nano protrusions are formed through a process of drawing a support into a chamber in which an internal pressure is maintained within a set range and then plasma etching the surface of the support. The method according to claim 1,
Wherein the nano protrusions are formed through a process of forming a mask pattern on the surface of the support, performing plasma etching, and then removing the mask pattern. The method according to claim 1,
Wherein the nano protrusions are formed through a process of forming a silica bead layer on the surface of the support and performing plasma etching until the silica bead layer is removed. A first step of providing a support;
A second step of forming a plurality of nanorods on the surface of the support; And
A third step of binding an active catalyst material to the surface of the plurality of nano-dots;
&Lt; / RTI &gt; The method of claim 7,
Wherein the third step is configured to deposit the active catalyst material on the surface of the nano protrusion by chemical vapor deposition. The method of claim 7,
The second step comprises:
Wherein the plurality of nano protrusions are formed by mechanical processing by either micro-sand blasting, discharge machining or laser machining. The method of claim 7,
The second step comprises:
Introducing a support into a chamber in which an internal pressure is maintained within a set range; and plasma etching the surface of the support. The method of claim 7,
The second step comprises:
Forming a mask pattern on the surface of the support, performing plasma etching on the surface of the support having the mask pattern formed thereon, and removing the mask pattern. The method of claim 7,
The second step comprises:
Forming a silica bead layer on the surface of the support; and performing plasma etching on the surface of the support until the silica bead layer is removed.
KR1020150108063A 2015-07-30 2015-07-30 Catalyst having active catalystic particles and manufacturing process of the same KR20170014527A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023136634A1 (en) * 2022-01-13 2023-07-20 주식회사 엘지화학 Method for preparing catalyst for production of carbon nanotubes

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100726237B1 (en) 2006-03-31 2007-06-08 한국에너지기술연구원 Preparation of platinum nano catalyst supported on carbon nanotube by electrochemical deposition

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100726237B1 (en) 2006-03-31 2007-06-08 한국에너지기술연구원 Preparation of platinum nano catalyst supported on carbon nanotube by electrochemical deposition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023136634A1 (en) * 2022-01-13 2023-07-20 주식회사 엘지화학 Method for preparing catalyst for production of carbon nanotubes

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