KR20160147178A - Bio sensor for detecting biomaterial using capacitacne difference and bio sensor system therefor - Google Patents

Bio sensor for detecting biomaterial using capacitacne difference and bio sensor system therefor Download PDF

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KR20160147178A
KR20160147178A KR1020150083519A KR20150083519A KR20160147178A KR 20160147178 A KR20160147178 A KR 20160147178A KR 1020150083519 A KR1020150083519 A KR 1020150083519A KR 20150083519 A KR20150083519 A KR 20150083519A KR 20160147178 A KR20160147178 A KR 20160147178A
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South Korea
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biosensor
pad
sensing
biomaterial
capacitance
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KR1020150083519A
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Korean (ko)
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송윤흡
김규범
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한양대학교 산학협력단
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Publication of KR20160147178A publication Critical patent/KR20160147178A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327—Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3275—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327—Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3275—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
    • G01N27/3277—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction being a redox reaction, e.g. detection by cyclic voltammetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/574—Immunoassay; Biospecific binding assay; Materials therefor for cancer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/68—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing involving proteins, peptides or amino acids

Abstract

Disclosed are a biosensor for detecting a biomaterial using a capacitance change and a biosensor system therefor. The biosensor for detecting a biomaterial according to an embodiment of the present invention includes: an oxide film formed on a substrate; at least one source electrode and at least one drain electrode spaced apart from each other in a part of an upper surface of the oxide film; a first pad connecting the source electrode; a second pad connecting the drain electrode; a reaction material fixed on a sensing region generated based on positions of the source electrode and the drain electrode to sense a biomaterial; and a fluid tube that is formed to pass through the sensing region, wherein the fluid tube has at least one refractive portion to control the inflow speed of the biomaterial introducing into the fluid tube.

Description

TECHNICAL FIELD [0001] The present invention relates to a biosensor detecting biosensor and a biosensor system using a capacitance change amount,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a biosensor, and more particularly, to a biosensor and a biosensor system capable of sensing a biosubstance using a capacitance difference.

Conventional biosensor sensing biosensors count biomaterials according to their size. For example, in Korean Patent No. 10-0573621, a biosensor includes a fine grid pattern that allows only specific cells of a biomaterial to pass through, so that a specific cell having a size smaller than a fine grid pattern can be counted have.

However, existing biosensors have the problem that when cells of similar size are present in the biomaterial, only specific cells among cells of similar size can not be counted. In addition, to count only specific cells among cells of similar size, additional chemical reactions must be performed.

In this specification, a biosensor, a biosensor system, and a method of manufacturing the same, which measure the amount of change in capacitance between the source electrodes and the drain electrodes and the substrate, I suggest.

BRIEF SUMMARY OF THE INVENTION Embodiments of the present invention provide a biosensor, a biosensor system, and a method of fabricating the same that measure a capacitance by measuring a capacitance difference between a source electrode and a drain electrode and a substrate.

In particular, embodiments of the present invention are directed to a method of fabricating a semiconductor device, comprising: providing a first pad connecting a plurality of source electrodes, a second pad connecting a plurality of drain electrodes, a fluid having at least one refracting portion for regulating the flow- A biosensor sensing biosensor including a tube, a biosensor system, and a method of manufacturing the same.

In addition, embodiments of the present invention provide a biosensor sensing biosensor, a biosensor system, and a method of manufacturing the same that can measure the presence or absence of a biosubstance by measuring a capacitance change amount between a first pad and a second pad to provide.

A biosensor sensing biosensor according to an embodiment of the present invention includes: an oxide film formed on a substrate; At least one source electrode and at least one drain electrode spaced apart from each other in a partial region of the oxide film; A first pad connecting the source electrode; A second pad connecting the drain electrode; A reaction material fixed on the sensing region generated based on the positions of the source electrode and the drain electrode to sense the biomaterial; And a fluid tube that is generated to pass through the sensing region, wherein the fluid tube is formed to include at least one refraction portion for regulating an inflow speed of the biomolecule introduced into the fluid tube.

Furthermore. The biosensor sensing biosensor according to an exemplary embodiment of the present invention may further include an insulating layer formed on the oxide layer, the source electrode, and the drain electrode and having at least a portion of the first pad and the second pad exposed can do.

Wherein a reference solution for sensing an electrochemical reaction between the biomolecule and the reactive substance is introduced into the fluid tube to form a reference capacitance and when the biomaterial for sensing the electrochemical reaction is introduced, The capacitance for the biomaterial may be formed in parallel with the reference capacitance.

Furthermore. A biosensor sensing biosensor according to an embodiment of the present invention includes: a supply part for introducing the biomaterial into the fluid tube; And a discharge port through which the biomolecule sensed with the reactive substance is discharged.

The supply part introduces a reference solution for sensing the electrochemical reaction between the biomaterial and the reactant, and the outlet may discharge the reference solution that is sensed with the reactant

A biosensor sensing biosensor system according to an embodiment of the present invention includes a biosensor sensing biosensor; And a control unit for determining whether to detect a biological substance based on a capacitance change amount detected from the biosensor sensing biosensor, wherein the biosensor biosensor comprises: an oxide film formed on a substrate; At least one source electrode and at least one drain electrode spaced apart from each other in a partial region of the oxide film; A first pad connecting the source electrode; A second pad connecting the drain electrode; A reaction material fixed on the sensing region generated based on the positions of the source electrode and the drain electrode to sense the biomaterial; And a fluid tube that is generated to pass through the sensing area, wherein the controller determines whether the biomaterial is sensed based on a capacitance change amount measured between the first pad and the second pad.

The controller may determine whether the biomaterial is sensed based on a predetermined reference capacitance and a capacitance difference between the first pad and the second pad.

The controller may determine a coefficient of the biomaterial based on a predetermined reference capacitance, a capacitance difference between the first pad and the second pad, and a capacitance to the biomaterial.

The fluid tube may be formed to include at least one refractive portion for adjusting the inflow rate of the biomolecule introduced into the fluid tube.

A reference solution for sensing an electrochemical reaction between the biomolecule and the reactive material is introduced into the fluid tube to form a reference capacitance, and when the biomaterial for sensing the electrochemical reaction is introduced A capacitance for the biomaterial may be formed in parallel with the reference capacitance.

A method of fabricating a biosensor sensing biosensor according to an embodiment of the present invention includes: forming an oxide film on a substrate; Forming at least one source electrode, at least one drain electrode, a first pad connected to the at least one source electrode and a second pad connected to the at least one drain electrode, in an upper part of the oxide film; Fixing a reaction material for sensing a biomolecule on a sensing region generated based on a position of the source electrode and the drain electrode; And generating the fluid tube to include at least one refractive portion for passing through the sensing region and for regulating the inflow rate of the incoming biomaterial.

Further, a method of fabricating a biosensor sensing biosensor according to an embodiment of the present invention includes: depositing an insulating film on the oxide film, the source electrode, the drain electrode, the first pad, and the second pad; And etching the insulating layer so that at least a portion of the first pad and at least a portion of the second pad are exposed.

In the step of immobilizing the reaction material, the sensing area may be formed in a part of the upper surface of the insulating layer based on the positions of the source electrode and the drain electrode, and the reaction material may be fixed to the sensing area.

The step of immobilizing the reactive material may include etching the at least a portion of the insulating layer based on the positions of the source electrode and the drain electrode to generate the sensing region on the oxide layer, Can be fixed.

According to embodiments of the present invention, by measuring the capacitance difference between a first pad connecting a plurality of source electrodes and a second pad connecting a plurality of drain electrodes, Can be detected.

According to the embodiments of the present invention, the presence or absence of a biological substance and its coefficient can be sensed by measuring the amount of change in capacitance between the first pad and the second pad. Therefore, The coefficient can be detected.

1 is a cross-sectional view of a biosensor sensing biosensor according to an embodiment of the present invention.
2 is a conceptual diagram of a reference capacitance and a sensing capacitance in a biosensor sensing biosensor according to an embodiment of the present invention.
FIG. 3 is a top view of the biosensor sensing biosensor shown in FIG. 1. FIG.
4 is a conceptual diagram of sensing principle of the biosensor sensing biosensor of the present invention.
5A to 5B are views illustrating a method of manufacturing a biosensor sensing biosensor according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following, although limited embodiments are described, these embodiments are examples of the present invention and those skilled in the art can easily modify these embodiments.

1 is a cross-sectional view of a biosensor sensing biosensor according to an embodiment of the present invention.

Referring to FIG. 1, a biosensor sensing biosensor according to an embodiment of the present invention includes a substrate 110, an oxide film 120 formed on the substrate 110, (Or sensed) by the at least one source electrode 130 and the at least one drain electrode 140, the insulating layer 180, the reactant 150, and the reactant 150 And a fluid tube 160.

Here, the substrate 110 may be a silicon substrate, and may be an n-type or p-type silicon substrate. However, it is not limited thereto and may be formed of various materials such as titanium oxide, acrylic resin, epoxy resin or polyimide.

The oxide film 120 may be formed on the substrate 110 with a dielectric material having a low dielectric constant. For example, the oxide film 120 may be formed of a dielectric material having a dielectric constant between 0 and 6 (0 to 6). Specifically, the oxide film 120

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As shown in FIG.

The source electrode 130 and the drain electrode 140 may be spaced apart from each other by a predetermined distance in a predetermined region above the oxide film 120. For example, the plurality of source electrodes may be electrically connected to any one of the pads (hereinafter, referred to as "first pad ") with a comb structure formed in parallel at predetermined intervals, (Hereinafter, referred to as "second pad") having a comb structure formed in parallel at predetermined intervals, and a plurality of source electrodes and a plurality of drain electrodes They can be formed to be staggered from each other.

The plurality of source electrodes, the plurality of drain electrodes, and the first and second pads may be patterned in a predetermined pattern on the oxide layer 120, though not shown.

The source electrodes 130 and the drain electrodes 140 may be formed of a conductive material of a metal or an alloy so that a voltage can be applied through the first pad and the second pad. For example, the source electrodes 130 and the drain electrodes 140 may be formed of at least one of Al, Ag, Au, Cu, and W. As described above, since the source electrode 130 and the drain electrode 140 are formed of a conductive material, when a voltage is applied, a fringing effect forms a fringing field in the vicinity of the substrate 110 . Accordingly, since the source electrode 130 and the drain electrode 140 to which a voltage is applied are free from contact with a living body, they can be formed of various conductive materials. Although not shown in the drawing, a gate electrode may be formed on the substrate 110 between the source electrode 130 and the drain electrode 140.

The insulating layer 180 is formed on the source electrodes 130 and the drain electrodes 140 and is formed to expose at least a portion of the first and second pads.

In this case, the insulating layer 180 may be formed of the same material as the oxide layer 120. That is,

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As shown in FIG.

The insulating layer 180 is formed between the fluid tube 160 and the source electrode 130 and the drain electrode 140 so that the biomolecule introduced into the fluid pipe 160 flows directly to the source electrode 130 and the drain electrode 140 Thereby preventing contact.

The reaction material 150 is fixed on the sensing region 181 formed in a partial region of the upper surface of the insulating film 180 to sense the biomaterial. At this time, the reaction material 150 may be an antibody that can sense only specific substances in the biomaterial, and bind to specific cells contained in the biomaterial. For example, the reactant 150 may be an antibody that binds to cancer cells contained in the biomaterial. Of course, the reactive material 150 may comprise a material capable of sensing all biomaterials that can be measured by capacitance.

In addition, since the reactive material 150 has a pattern, the sensing region 181 located under the reaction material 140 can be exposed. In this case, since the area of the sensing region 181 excluding the portion where the reactive material 150 is fixed affects the rate of change of the sensing capacitance, the reactant 150 may be patterned in consideration of the change ratio of the sensing capacitance. And may be fixed to the sensing region 181. [

The sensing region 181 may be determined based on the positions of the source electrode 130 and the drain electrode 140 as a region where the reactive material 150 is fixed on the insulating film 180. [ For example, the sensing region 181 may be determined as a region above the insulating film 120 corresponding to a region between the source electrode 130 and the drain electrode 140.

Fluid tube 160 is created to pass through sensing area 181. For example, the fluid tube 160 can be formed by attaching a polydimethylsiloxane (PDMS) layer 170 having a preset pattern engraved to a substrate 110 on which an oxide film 120 is formed. At this time, the predetermined pattern may be changed according to the shape of the fluid tube 160.

In particular, the fluid tube 160 according to an embodiment of the present invention may be formed to include at least one refractive portion to control the flow rate of the incoming biological material, and the source electrode 130 and the drain electrode At least a portion formed in a direction perpendicular to the gate electrodes 140, at least a portion generated in a horizontal direction with respect to the source electrodes 130 and the drain electrodes 140.

In the biosensor sensing biosensor having such a structure, the amount of change in capacitance between the first pad and the second pad, which is generated when the reference solution flows into the fluid tube 160 or the biosubstance is introduced into the fluid tube 160, The coefficient can be detected. A detailed description thereof will be described with reference to Figs. 2 to 4. Fig.

In addition, although not shown in the figure, the biosensor sensing biosensor further includes a supply part for introducing the biosubstance into the fluid tube 160, and a reaction material 150 and an outlet through which the sensed biosubstance is discharged, A sensor system can be formed. At this time, the supply part may introduce a reference solution for sensing the electrochemical reaction between the biomaterial and the reactant 150, and the outlet may discharge the reactant 150 and the sensed reference solution.

Although the sensing region 181 is formed on the insulating layer 180 in FIG. 1, the sensing region 181 may be formed on the oxide layer between the source electrode 130 and the drain electrode 140.

In addition, the biosensor sensing biosensor system controls a pump for supplying the biosubstance and the reference solution from the supply unit to the outlet and a flow of the biosubstance so that the biosubstance and the reference solution can flow from the fluid pipe 160, And a controller for sensing the presence or absence of the biomaterial and its coefficient based on the amount of change in capacitance between the second pads. That is, the controller can detect the presence or absence and presence of the biomaterial contained in the reference solution based on the change amount of the capacitance based on the reference capacitance and the reference capacitance with respect to the reference solution.

Such a biosensor sensing biosystem may be composed of the biosensor, the supply unit, the discharge port, the pump, and the control unit described above with reference to FIG.

2 is a conceptual diagram of a reference capacitance and a sensing capacitance in a biosensor sensing biosensor according to an embodiment of the present invention.

Referring to FIG. 2, when a reference solution flows into the fluid tube 160 and a voltage is applied to the source electrode 130 and the drain electrode 140 through the first pad and the second pad, the biosensor biosensor As shown in FIG. 2A, the current flowing in the sensing region 181 may be measured to form a reference capacitance. At this time, the reference solution may be a buffer solution of a low ionic concentration capable of providing a sufficient debye length to the charge of the reactant depending on the binding of the specific substance to be sensed among the reactant and the biosensor .

On the other hand, when the biosubstance 240 flows into the fluid tube 160 and the voltage is applied to the source electrode 130 and the drain electrode 140 through the first pad and the second pad, the biosensor biosensor As shown in FIG. 2B, a current flowing in the sensing region 181 may be measured through the first pad and the second pad to form a capacitance, for example, a sensing capacitance between the first pad and the second pad.

Therefore, the biosensor sensing biosensor senses the presence or absence of sensing of the biosensor by detecting the amount of capacitance change between the first pad and the second pad, that is, how much capacitance variation is generated from the reference capacitance, Biomaterials can be counted.

For example, if the capacitance between the first pad and the second pad is a reference capacitance, it can be determined that no biomaterial is sensed. If a capacitance change is generated based on the reference capacitance, it is determined that the biomaterial is sensed . Then, the coefficient of the biomaterial according to the amount of change in capacitance can be sensed. This can count the detected biomaterial based on the predetermined capacitance value according to the biomaterial, which will be described in more detail in FIG.

In addition, the biosensor sensing biosensor may capture a specific substance that reacts with the reactant in the biological material 240 using the reactant immobilized in the sensing region 181.

FIG. 3 is a top view of the biosensor sensing biosensor shown in FIG. 1, and FIG. 4 is a conceptual diagram of sensing principles of the biosensor sensing biosensor of the present invention. Here, FIG. 3 is a view including a supply part and an outlet.

Referring to FIGS. 3 and 4, in the biosensor sensing biosensor according to the embodiment of the present invention, the sensing region where the reactive material is fixed may be generated in a region between the source electrodes 130 and the drain electrodes 140 And the sensing region may be formed at a position where the fluid tube 150 is formed.

The fluid pipe 150 receives the biomolecule through the supply part 330 through which the reference solution containing the biomaterial is introduced and the fluid pipe 150 through the discharge port 340 through which the biomaterial sensed with the reaction material is discharged Exhaust the passed solution and material.

At this time, the supply unit 330 may introduce a reference solution for sensing the electrochemical reaction between the biomaterial and the reactant. In addition, the outlet 340 can discharge the reactant and the sensed reference solution. 3, the supply unit 330 and the discharge port 340 are formed one by one for the fluid pipe 150, but the present invention is not limited thereto, and a plurality of the fluid pipe 150 may be formed. For example, the supply part 330 may include two first supply parts for supplying the reference solution to the one fluid pipe 150 and a second supply part for supplying the biomaterial, and the discharge port 340 may be similarly formed Two fluid pipes 150 may be formed.

Although not shown in the drawing, the biosensor sensing biosensor system further includes a pump for supplying the biomaterial and the reference solution from the supply part 330 to the discharge port 340 so that the biomaterial and the reference solution flow in the fluid pipe 150 And controls the inflow and outflow of the biomaterial or the reference solution and detects the presence or absence of the biomaterial and the biomaterial coefficient based on the amount of change in capacitance measured through the first pad 310 and the second pad 320 And may further include a control unit.

The sensing region or the fluid tube 150 may have a shape depending on the shape in which the source electrodes 130 and the drain electrodes 140 are disposed or may be formed in the sensing region or the drain electrode 140 140 may vary. As shown in FIGS. 3 and 4, the fluid tube 150 is formed to include at least one refractive portion in order to adjust the inflow speed of the incoming biological material. In other words, the fluid tube 150 is formed to include at least a portion formed in the vertical direction with respect to the source electrode and the drain electrode, and at least a portion generated in the horizontal direction with respect to the source electrode and the drain electrode, As shown in FIG. For example, the fluid tube may be formed in a structure in which the 'A' shape is repeated so as to include at least a portion generated in the direction perpendicular to the source electrode and the drain electrode, and at least a portion generated in the horizontal direction with respect to the source electrode and the drain electrode . More specifically, the fluid tube 150 may be formed in a zigzag shape so as to surround the source electrode and the drain electrode. However, the fluid tube 150 is not limited to or limited to such a structure, and may be formed in various types of structures including at least one refractive portion.

Accordingly, the entry speed of the biological material flowing into the fluid pipe 150 can be controlled, and the ambient noise can be suppressed, so that the detection accuracy of the biological material can be improved. For example, the inflow rate of the biomolecule introduced into the fluid tube 150 is such that the biomaterial passes through at least a portion generated in the horizontal direction with respect to the source electrode and the drain electrode, In the course of passing at least a portion, the biomaterial can be lowered across at least one refractive portion.

Since the fluid pipe 150 is generated so as to pass through the sensing area, the biomolecule introduced into the fluid pipe 150 can react with the reactive material fixed in the sensing area to generate an electrochemical reaction. The biosensor sensing biosensor according to an embodiment of the present invention can detect the presence or absence of a biosubstance and its coefficient based on a change amount by a capacitance generated by an electrochemical reaction between a biosubstance and a reactant based on a reference capacitance have.

For example, as shown in FIG. 4A, the capacitance Ctot between the first pad 310 and the second pad 310 is larger than the reference capacitance Cref when no biomaterial is included and the biosensor is not sensed. , It is possible to detect that there is no biomaterial because the amount of capacitance change is not displayed.

As another example, as shown in FIG. 4B, when an arbitrary or specified biomaterial passes through the fluid pipe 150 located between the two electrodes, the biomaterial having a specific capacitance is added in parallel with the reference capacitance The capacitance Ctot measured between the first pad 310 and the second pad 310 becomes the reference capacitance Cref and the specific capacitance Ctarget and therefore the amount of capacitance change corresponding to the specific capacitance Ctarget is detected, The biomaterial can be counted.

4C, the capacitance Ctot measured through the first pad 310 and the second pad 310 when the reference solution passing through the fluid pipe 150 includes many biomaterials, The specific capacitance Ctarget of the biomaterial is multiplied by a coefficient to the reference capacitance Cref, and the amount of capacitance change is generated by n x Ctarget. Therefore, it is possible to detect the biomaterial sensed based on the amount of change in capacitance and the biomaterial coefficient.

5A and 5B illustrate a method of manufacturing a biosensor sensing biosensor according to an embodiment of the present invention.

Referring to FIG. 5A, the system for manufacturing a biosensor sensing biosensor according to an embodiment of the present invention forms an oxide film 520 on a substrate 510. Here, the substrate 510 may be a silicon substrate, and may be an n-type or p-type silicon substrate. However, it is not limited thereto and may be formed of various materials such as titanium oxide, acrylic resin, epoxy resin or polyimide.

The oxide film 520 is a low dielectric constant dielectric material having a dielectric constant between 0 and 6 (0 to 6)

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Next, a method of fabricating a biosensor biosensor includes depositing a conductive material so that source electrodes 530 and drain electrodes 540 are formed at predetermined positions on a substrate 510 on which an oxide film 520 is formed Patterning. The source electrodes 530 and the drain electrodes 560 may be formed of a conductive material of a metal or an alloy such as Al, Ag, Au, Cu, or W. Here, the source electrode and the drain electrode may be deposited on the substrate 510 on which the oxide film 520 is formed by using a common deposition method such as a sputtering method or a thermal evaporation method.

Although not shown in FIG. 5, a line connecting source electrodes and a line connecting drain electrodes, a first pad, and a second pad may be formed together when the source electrode and the drain electrode are formed on the oxide film 520 .

At this time, in the biosensor sensing biosensor manufacturing method, the insulating film 580 may be laminated so as to cover the upper portion of the structure in which the source electrode and the drain electrode are formed. Specifically, in the biosensor sensing biosensor manufacturing method, the insulating film 580 is stacked on the entire surface of the oxide film 520 where the source electrode 530 and the drain electrode 540 are disposed, and at least a part of the first and second pads At least a portion of the first pad and the second pad may be exposed by etching the positions where the first pad and the second pad are formed.

5B, the method for manufacturing a biosensor sensing biosensor includes the steps of sensing a biomaterial on a sensing region 5821 formed on the trim layer 580 based on the positions of the source electrode 530 and the drain electrode 540 The reaction material 550 is fixed. At this time, in the biosensor sensing biosensor manufacturing method, the sensing region 581 in which the reaction material is fixed is determined as a region corresponding to the region between the source electrode 530 and the drain electrode 540, and the sensing region 581 The reaction material 550 can be fixed based on the position.

Here, the reactive material is not limited to be formed on the insulating film, and may be formed in a partial region of the oxide film 520. The source electrode and the drain electrode 530 are formed by etching at least a portion of the insulating film 580 stacked on the entire surface of the oxide film 520 based on the positions of the source electrode and the drain electrode 530, The insulating film 540 can be stacked. Therefore, in the biosensor sensing biosensor manufacturing method, a sensing region can be formed on the oxide film 520 by etching the region between the source electrode and the drain electrode in the insulating film 580 stacked on the entire surface of the oxide film 520.

Also, although not shown in the figure, the reactant may be immobilized on the sensing region 581 via a nano template. The nanotemplate can be formed on the substrate 510 on which the oxide film 520 is formed by self-assembly of the block copolymer. Thereafter, the substrate on which the nanotemplate is formed may be placed in a solution containing the reaction material to selectively attach the reaction material to the desired region.

The biosensor sensing biosensor manufacturing method then generates the fluid tube 560 through the sensing region 581 and includes at least one refractive portion for regulating the inflow rate of the incoming biomaterial.

At this time, in the biosensor sensing biosensor manufacturing method, the fluid tube 560 is formed by attaching the polydimethylsiloxane layer 570, which is etched in the angular direction, to the substrate 510 on which the oxide film 520 is formed can do. Although not shown in the drawing, a method of manufacturing a biosensor sensing biosensor includes forming a polymer mold in which a fluid tube 560 is etched in a positive direction, depositing a polydimethylsiloxane material on the polymer mold and curing the polymer mold, Fluid tube 560 can create intaglio etched polydimethylsiloxane layer 570. Accordingly, the biosensor sensing biosensor manufacturing system can generate the fluid tube 560 using the polydimethylsiloxane layer 570 thus produced.

Particularly, the biosensor-sensing biosensor manufacturing method includes the steps of generating at least a portion of the fluid tube 560 in a direction perpendicular to the source electrode 530 and the drain electrode 540 and forming at least a portion of the fluid tube 560 in the source electrode 530 and the drain electrode 540 By forming at least a portion of the fluid tube 560 in a horizontal direction with respect to the fluid tube 560, the fluid tube 560 can be formed to include at least one refractive portion for adjusting the inflow rate of the incoming biomaterial.

Also, the biosensor sensing biosensor manufacturing method can produce a biosensor sensing biosensor system by further producing a supply unit, a discharge port, a pump, and a control unit.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. For example, it is to be understood that the techniques described may be performed in a different order than the described methods, and / or that components of the described systems, structures, devices, circuits, Lt; / RTI > or equivalents, even if it is replaced or replaced.

Therefore, other implementations, other embodiments, and equivalents to the claims are also within the scope of the following claims.

Claims (15)

An oxide film formed on the substrate;
At least one source electrode and at least one drain electrode spaced apart from each other in a partial region of the oxide film;
A first pad connecting the source electrode;
A second pad connecting the drain electrode;
A reaction material fixed on the sensing region generated based on the positions of the source electrode and the drain electrode to sense the biomaterial; And
And a fluid pipe
/ RTI >
The fluid tube
And at least one refraction portion for controlling an inflow rate of the biomolecule introduced into the fluid tube.
The method according to claim 1,
An insulating film formed on the oxide film, the source electrode, and the drain electrode to expose at least a part of the first pad and the second pad;
Further comprising a biosensor.
The method according to claim 1,
The fluid tube
A reference solution for sensing an electrochemical reaction between the biomolecule and the reactant is introduced to form a reference capacitance,
Wherein a capacitance for the biosensor is formed in parallel with the reference capacitance when the biosensor for sensing the electrochemical reaction flows.
The method according to claim 1,
A supply part for introducing the biomaterial into the fluid tube; And
And a discharge port through which the biomolecule sensed with the reactive substance is discharged
Further comprising a biosensor.
5. The method of claim 4,
The supply part
Introducing a reference solution for detecting an electrochemical reaction between the biomaterial and the reactant,
The outlet
And the reference solution sensed with the reaction material is discharged.
Biomaterial sensing biosensor; And
A controller for determining whether or not the biosensor is sensed based on the amount of change in capacitance sensed by the biosensor sensing biosensor,
Lt; / RTI >
The biomaterial biosensor
An oxide film formed on the substrate;
At least one source electrode and at least one drain electrode spaced apart from each other in a partial region of the oxide film;
A first pad connecting the source electrode;
A second pad connecting the drain electrode;
A reaction material fixed on the sensing region generated based on the positions of the source electrode and the drain electrode to sense the biomaterial; And
And a fluid pipe
/ RTI >
The control unit
And determines whether the biomaterial is sensed based on a capacitance change amount measured between the first pad and the second pad.
The method according to claim 6,
The control unit
And determines whether the biomaterial is sensed based on a predetermined reference capacitance and a capacitance difference between the first pad and the second pad.
The method according to claim 6,
The control unit
Wherein the capacitance of the biomaterial is determined based on a predetermined reference capacitance, a capacitance difference between the first pad and the second pad, and a capacitance to the biomaterial.
The method according to claim 6,
The fluid tube
And at least one refraction portion for controlling an inflow speed of the biomolecule introduced into the fluid tube.
The method according to claim 6,
The fluid tube
A reference solution for sensing an electrochemical reaction between the biomolecule and the reactant is introduced to form a reference capacitance,
Wherein a capacitance of the biosensor is formed in parallel with the reference capacitance when the biosensor for sensing the electrochemical reaction is introduced.
The method according to claim 6,
A supply part for introducing the biomaterial into the fluid tube; And
And a discharge port through which the biomolecule sensed with the reactive substance is discharged
Further comprising a biosensor sensing system.
Forming an oxide film on the substrate;
Forming at least one source electrode, at least one drain electrode, a first pad connected to the at least one source electrode and a second pad connected to the at least one drain electrode, in an upper part of the oxide film;
Fixing a reaction material for sensing a biomolecule on a sensing region generated based on a position of the source electrode and the drain electrode; And
Generating a fluid tube to pass through the sensing region and to include at least one refractive portion for regulating the inflow rate of the incoming biomolecule;
Wherein the biosensor is a biosensor.
13. The method of claim 12,
Depositing an insulating film on the oxide film, the source electrode, the drain electrode, the first pad, and the second pad; And
Etching the insulating film so that at least a part of the first pad and at least a part of the second pad are exposed;
Wherein the biosensor is a biosensor.
14. The method of claim 13,
The step of immobilizing the reaction material
Wherein the sensing region is formed in a part of the upper surface of the insulating film based on the positions of the source electrode and the drain electrode, and the reaction material is fixed in the sensing region.
14. The method of claim 13,
The step of immobilizing the reaction material
Sensing a biosensor biosensor in which at least a part of the insulating film is etched based on positions of the source electrode and the drain electrode to generate the sensing region on the oxide film, Way.
KR1020150083519A 2015-06-12 2015-06-12 Bio sensor for detecting biomaterial using capacitacne difference and bio sensor system therefor KR20160147178A (en)

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