KR20160146265A - High-accuracy Filter Radiometer - Google Patents

High-accuracy Filter Radiometer Download PDF

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Publication number
KR20160146265A
KR20160146265A KR1020150083291A KR20150083291A KR20160146265A KR 20160146265 A KR20160146265 A KR 20160146265A KR 1020150083291 A KR1020150083291 A KR 1020150083291A KR 20150083291 A KR20150083291 A KR 20150083291A KR 20160146265 A KR20160146265 A KR 20160146265A
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South Korea
Prior art keywords
filter
neutral density
linear variable
photodetector
density filter
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KR1020150083291A
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Korean (ko)
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KR101701874B1 (en
Inventor
이동훈
박성종
자이니 헬미
유재근
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한국표준과학연구원
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0235—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using means for replacing an element by another, for replacing a filter or a grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1213—Filters in general, e.g. dichroic, band

Abstract

The present invention provides a method of calibrating a filter radiometer and a filter radiometer. The filter radiometer comprises a photodetector; A transmissive linear variable bandpass filter (LVBF) disposed in front of the photodetector; A linear variable neutral density filter disposed in front of the linear variable band-pass filter and providing different transmittances depending on positions; An amplifier for amplifying the output of the photodetector; And a processor for processing the output of the amplifier.

Description

{High-accuracy Filter Radiometer}

The present invention relates to a filter radiometer, and more particularly, to a filter radiometer that combines a linear variable neutral density filter and a linear variable bandpass filter to achieve a desired target spectral sensitivity.

For the measurement of light, a defined quantity is used by applying a specific spectral response function of the measurement system. (Unit, lx), luminous intensity (unit, cd / m2), luminous intensity (unit, cd), and luminous efficiency (spectral luminous efficiency) V (λ) . There are colorimetric quantities of CIE color coordinates that require the application of three color-matching functions X, Y, and Z. In addition, there are CIE UV-A, UV-B and UV-C ultraviolet amounts defined by integrating only the output of a specific band.

The instrument to measure the above quantities can be divided into a spectrophotometer and a filter radiometer.

Among them, the filter radiometer combines the photodetector and the optical filter so that the spectral sensitivity of the device is close to the target function. The filter type radiometer is a practical instrument that can be used directly in the field because of its high signal-to-noise ratio and the ability to read the measured quantity directly.

However, very complicated and precise filter design and fabrication techniques are required to produce a high-accuracy filter radiometer having spectral sensitivity that exactly matches the target spectral response function.

The present invention proposes a new method and apparatus capable of realizing arbitrary spectral sensitivity with high accuracy.

SUMMARY OF THE INVENTION The present invention provides a method for realizing desired target spectral sensitivity with high accuracy and a filter radiometer using the same.

A filter radiometer according to an embodiment of the present invention includes a photodetector; A transmissive linear variable bandpass filter (LVBF) disposed in front of the photodetector; A linear variable neutral density filter disposed in front of the linear variable band-pass filter and providing different transmittances depending on positions; Diffusion means disposed in front of the linear variable neutron density filter for uniformly transmitting incident light spatially; An amplifier for amplifying the output of the photodetector; And a processor for processing the output of the amplifier.

In one embodiment of the present invention, the target spectral sensitivity of the optical system composed of the linear variable neutral density filter, the linear variable bandpass filter, and the photodetector may be constant depending on the wavelength.

In one embodiment of the present invention, the target spectral sensitivity of an optical system comprised of a linearly variable neutral density filter, the linear variable bandpass filter, and a photodetector may correspond to any one of the CIE color matching functions X, Y, or Z have.

In one embodiment of the present invention, the linear variable neutron density filter comprises: a first linear variable neutron density filter; A second linearly variable neutral density filter, and a third linearly variable neutral density filter. The first linearly variable neutral density filter, the second linearly variable neutral density filter, and the third linearly variable neutral density filter may be disposed side by side along the longitudinal direction of the linear variable neutral density filter. The photodetector comprising: a first photodetector aligned with the first linearly variable neutral density filter; A second photodetector aligned with the second linearly variable neutral density filter; And a third photodetector aligned with the third linearly variable neutral density filter.

According to another aspect of the present invention, there is provided a method of calibrating a filter radiometer, comprising: measuring an output of a tunable light source for each wavelength; Installing a linear variable neutral density filter, a linear variable bandpass filter, and a photodetector; Measuring spectral sensitivity of a system comprising a linear variable bandpass filter, a linear variable bandpass filter, and a photodetector using the wavelength tunable light source at a predetermined wavelength; Varying a wavelength of the wavelength tunable light source within a wavelength scan range; And adjusting the transmittance of the linear variable neutral density filter at a position corresponding to a wavelength at which a difference between the target spectral sensitivity and the measured spectral sensitivity is generated when the wavelength scan is completed.

The filter radiometer according to an embodiment of the present invention can easily implement a measurement apparatus having a target spectral sensitivity.

1 shows the transmittance according to the position / wavelength of a linear variable bandpass filter (LVBF).
2 is a diagram showing the spectral sensitivity of a conventional silicon photodiode.
3A is a graph showing the spectral sensitivity of a silicon photodiode and the transmittance according to a position / wavelength of a linear variable bandpass filter (LVBF).
3B is a graph showing the measured spectral sensitivity of the silicon photodiodes and the linear variable band pass filter as a whole.
4 is a conceptual diagram illustrating a filter radiometer according to an embodiment of the present invention.
FIG. 5 is a view for explaining characteristics according to wavelengths of the filter radiometer of FIG. 4; FIG.
6 is a diagram illustrating a linearly variable neutral density filter according to an embodiment of the present invention.
7 is a diagram illustrating a linearly variable neutral density filter according to another embodiment of the present invention.
8 is a view for explaining a filter radiator according to another embodiment of the present invention.
Fig. 9 is a view for explaining characteristics of a linear variable neutral density filter of the filter radiometer of Fig. 8; Fig.
10 is a diagram showing a linear variable neutral density filter in gray scale.
11 is a view for explaining an apparatus for calibrating a filter radiometer according to an embodiment of the present invention.
12 is a flowchart for explaining a calibration method of the calibration apparatus of the filter radiometer of FIG.

Spectral responsivity refers to the value of the photodetector relative to the radiation flux according to the wavelength. For example, in the case of a silicon photodetector, the spectral sensitivity has a maximum value near 900 nm.

On the other hand, a linear variable bandpass filter (LVBF) is a filter that transmits different wavelengths according to its position. The linear variable bandpass filter may be implemented by forming a multilayer thin film having a different structure for each position.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are being provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. In the drawings, the components have been exaggerated for clarity. Like numbers refer to like elements throughout the specification.

1 shows the transmittance according to the position / wavelength of a linear variable bandpass filter (LVBF).

Referring to FIG. 1, as the linear variable bandpass filter 130 moves in the longitudinal direction (x-axis direction), a plurality of bandpass filters that transmit different wavelengths are arranged. The linear variable bandpass filter 30 can be fabricated by a two-dimensional multilayer film deposition technique. Since the thin film laminated structure is selected for the wavelength to transmit each band pass filter, it is difficult to easily change the transmittance T (?) Of each band pass filter.

2 is a diagram showing the spectral sensitivity of a conventional silicon photodiode.

Referring to FIG. 2, in the case of a silicon photodetector, the spectral sensitivity S (?) Has a maximum value near 900 nm. Further, in the range of 400 nm to 900 nm, the spectral sensitivity increases, and the spectral sensitivity at 900 nm or more sharply decreases.

3A is a graph showing the spectral sensitivity of a silicon photodiode and the transmittance according to a position / wavelength of a linear variable bandpass filter (LVBF).

3B is a graph showing the measured spectral sensitivity of the silicon photodiodes and the linear variable band pass filter as a whole.

3A and 3B, since the linear variable bandpass filter (LVBF) 130 does not have a constant transmittance depending on the wavelength, the spectral sensitivity S (λ) of the silicon photodiode having wavelength dependence ) Can be changed. The transmittance T (?) Of the LVBF has a predetermined wavelength dependency.

Specifically, the total spectral response S '(?) Near 400 nm can be given by the product of T (?) And S (?). The transmittance T (?) Of the LVBF is difficult to control depending on the wavelength (or position). Therefore, there is a demand for a technique for realizing a desired target spectral response V (?) Using a new optical component.

On the other hand, the output signal y of the optical multiplexer 140 is expressed by a wavelength integration with respect to the product of the total spectral sensitivity S '(?) And the input spectral radiated output? (?) As follows.

Figure pat00001

4 is a conceptual diagram illustrating a filter radiometer according to an embodiment of the present invention.

FIG. 5 is a view for explaining characteristics according to wavelengths of the filter radiometer of FIG. 4; FIG.

4 and 5, the filter radiometer 100 includes a photodetector 140; A transmissive linear variable bandpass filter (LVBF) 130 disposed in front of the photodetector; A linear variable neutral density filter (120) disposed in front of the linear variable band-pass filter and providing different transmittances depending on positions; Diffusion means (110) disposed in front of the linear variable neutral density filter for transmitting incident light uniformly in a space; An amplifier 150 for amplifying the output of the photodetector; And a processing unit 160 for processing the output of the amplifier.

The measurement light source may emit measurement light or incident light. The measurement light source may be a flat display device such as an LED, an LCD, or a light source as a light source to be measured.

The diffusion means may be a diffusing plate or an integrating sphere. The diffusing means may be (110) means for making the measuring light have a spatially uniform intensity. The diffusion means 110 may be replaced by an integrating sphere. The integrating sphere can treat the inner surface of the closed space with a material having a high reflectance so that incident light can be uniformly diffused from the inside to be transmitted.

The photodetector 140 may be an element that converts light into an electrical signal. The photodetector 140 may be a silicon photodiode, a germanium photodiode, or an InGaAs photodiode according to a band to be measured. The photodetector 140 may cover the entire area of the linear variable bandpass filter. Alternatively, when the photodetector 140 can not cover the entire area of the linear variable bandpass filter, a plurality of photodetectors may cover the entire area of the linear variable bandpass filter in parallel. The plurality of light-emitting devices have the same spectral sensitivity.

The linear variable band-pass filter 130 may change the wavelength band transmitted through the linearly. The linear variable bandpass filter 140 may be configured to have different transmission bands depending on positions. Specifically, the structure of the multilayer thin film can be designed differently depending on the position. Accordingly, when the measurement light source is a wide band light source, the light transmitted through the linear variable band pass filter may have different wavelengths depending on the positions. The linear variable bandpass filter may be a spectroscope.

The linear variable neutron density filter 120 may be configured to have a different transmittance depending on the position. Specifically, the linear variable neutral density filter may not have wavelength dependence. For example, the linear variable neutron density filter 120 may be formed by adjusting the open area of the linear variable neutral density filter 120. Alternatively, the linear variable neutral density filter 120 may be formed by adjusting a gray level for each position. For example, the linear variable neutron density filter 120 may be a film structure that adjusts the transmittance or the aperture ratio for each position according to a two-dimensional pattern.

When the linear variable neutral density filter 120 and the linear variable band pass filter 130 are combined, the linear variable neutral density filter 120 may provide wavelength dependency depending on the position.

The light transmitted through the diffusion unit 110 may have a uniform luminous intensity depending on the position. The light transmitted through the diffusion unit 110 can enter the linear variable band-pass filter 130. The linear variable bandpass filter 130 may transmit different wavelengths according to positions. The light transmitted through the linear variable bandpass filter 130 may be detected through a photodetector 140 having a predetermined spectral sensitivity. In this case, the optical measurement system composed of the diffusion means 110, the linear variable bandpass filter 130, and the photodetector 140 can not provide the desired target spectral sensitivity. Thus, if the target spectral sensitivity is a function of wavelength, the linear variable neutron density filter 120 may be configured to implement the target spectral sensitivity.

In particular, when the spectral sensitivity of the system consisting solely of the linear variable bandpass 130 and the photodetector 140 is low at a predetermined wavelength, it provides a relatively high transmittance to match the target spectral sensitivity. When the spectral sensitivity of a system consisting solely of a linear variable bandpass and a photodetector is high at a given wavelength, it provides a relatively low transmittance to match the target spectral sensitivity. As a result, a certain target spectral sensitivity can be achieved depending on the wavelength. The output signal of the photodetector is proportional to the wavelength integral of the target spectral sensitivity. Thus, the radiometer can provide an effect without wavelength dependence.

The linear variable neutral density filter 130 may be variously designed to provide a desired target spectral sensitivity.

The amplifier 150 may amplify the output signal of the photodetector 140. Specifically, the amplifier 150 can change and amplify the voltage signal.

The processing unit 160 processes the output signal of the amplifier to display the luminous flux (unit, lm), the light intensity (unit, lx), the luminous intensity (unit, cd / m2), or the luminosity . The processor may change the analog signal to a digital signal and display a result depending on the output of the photodetector through a predetermined algorithm.

6 is a diagram illustrating a linearly variable neutral density filter according to an embodiment of the present invention.

Referring to FIG. 6, the linear variable neutral density filter 120 may be fabricated by forming a two-dimensional pattern on a transparent film. The two-dimensional pattern may be patterned to adjust the aperture ratio for each position. The patterning can be printed through a printer.

7 is a diagram illustrating a linearly variable neutral density filter according to another embodiment of the present invention.

Referring to FIG. 7, the linear variable density density filter 120 may be fabricated by forming a two-dimensional pattern on a transparent film. The two-dimensional pattern can be patterned to adjust transmittance in gray scale on a position-by-position basis. The patterning can be printed through a printer.

8 is a view for explaining a filter radiator according to another embodiment of the present invention.

Fig. 9 is a view for explaining characteristics of a linear variable neutral density filter of the filter radiometer of Fig. 8; Fig.

8 and 9, the filter radiometer 200 includes a photodetector 240; A transmissive linear variable bandpass filter (LVBF) 130 disposed in front of the photodetector; A linear variable neutral density filter 220 disposed in front of the linear variable band-pass filter and providing different transmittances depending on positions; An amplifier 250 for amplifying the output of the photodetector; And a processing unit 260 for processing the output of the amplifier.

The target spectral sensitivity of the optical system consisting of the linearly variable neutral density filter 220, the linear variable bandpass filter 130 and the optical detector 250 may correspond to any of the CIE color matching functions X, Y, or Z .

The CIE orange color functions X, Y, and Z are the most important parts of the triplet colorimetric system. To be able to read colors, spectral sensitivity with the same wavelength dependency as the CIE colorimetric function is required. However, conventionally well-formed color filter is used.

However, according to one embodiment of the present invention, a desired CIE color matching function can be designed by combining a linear variable bandpass filter 130 and a linear variable neutral density filter 220 to replace an expensive coloring function filter .

The linear variable neutral density filter 220 comprises a first linearly variable neutral density filter 220a; A second linearly variable neutral density filter 220b; And a third linearly variable neutral density filter 220c. The first linearly variable neutral density filter, the second linearly variable neutral density filter, and the third linearly variable neutral density filter may be disposed side by side along the longitudinal direction of the linear variable neutral density filter.

The photodetector (240) includes a first photodetector (240a) aligned with the first linearly variable neutral density filter; A second photodetector (240b) aligned with the second linearly variable neutral density filter; And a third photodetector 240c aligned with the third linearly variable neutral density filter. The first photodetector 240a, the second photodetector 240b, and the third photodetector 240c may have the same spectral sensitivity.

The first linearly variable neutral density filter 220a and the linear variable bandpass filter 130 may operate as a CIE chromatic filter Y. [ The second linearly variable neutral density filter 220b and the linear variable bandpass filter 130 may operate with the CIE isochromatic filter X. [ The third linear variable neutral density filter 220c and the linear variable bandpass filter 140 may operate as a CIE color filter Z. [

For example, when it is assumed that the spectral sensitivity of the photodetector 240 is constant according to the wavelength and that the transmittance of the linear variable bandpass filter 130 is constant according to the position / wavelength, the first linear variable density neutral density filter The transmittance NTy of the light emitting layer 220a may be designed to be the same as the CIE color matching function Y. [ In addition, the transmittance NTx of the second linearly variable neutral density filter 220b may be designed to be the same as the CIE color-matching function X. [ In addition, the transmittance NTz of the third linearly variable neutral density filter 220c can be designed to be the same as the CIE color-matching function Z. [

10 is a diagram showing a linear variable neutral density filter in gray scale.

Referring to FIG. 10, the transmittance NTy of the first linearly variable neutral density filter 220a may be designed to be the same as the CIE color matching function Y. FIG. In addition, the transmittance NTx of the second linearly variable neutral density filter 220b may be designed to be the same as the CIE color-matching function X. [ In addition, the transmittance NTz of the third linearly variable neutral density filter 220c can be designed to be the same as the CIE color-matching function Z. [

11 is a view for explaining an apparatus for calibrating a filter radiometer according to an embodiment of the present invention.

12 is a flowchart for explaining a calibration method of the calibration apparatus of the filter radiometer of FIG.

Referring to FIGS. 11 and 12, an apparatus 300 for calibrating a filter radiometer includes a wavelength variable light source 170; A photodetector 140; A transmissive linear variable bandpass filter (LVBF) 130 disposed in front of the photodetector; A linear variable neutral density filter (120) disposed in front of the linear variable band-pass filter and providing different transmittances depending on positions; An amplifier 150 for amplifying the output of the photodetector; And a processing unit 160 for processing the output of the amplifier.

The output light of the tunable light source 170 may be expanded through the beam expander 180 and provided to the diffuser plate 170.

The output of the wavelength tunable light source 170 may be measured separately through a calibration photodetector (not shown) depending on the wavelength. The spectral sensitivity of the calibration photodetector may be the same as the spectral sensitivity of the measurement photodetector 140.

The method of calibrating the filter radiometer comprises the steps of: S110 measuring the output of the wavelength variable light source for each wavelength; Installing (S120) a linear variable neutral density filter 120, a linear variable bandpass filter 130, and a photodetector 140; (S 130) measuring spectral sensitivity of a system composed of a linear variable band-pass filter, a linear variable band-pass filter, and a photodetector using the wavelength variable light source at a predetermined wavelength; Varying the wavelength of the wavelength tunable light source within a wavelength scan range (S140, S150); And adjusting the transmittance of the linear variable neutron density filter at a position corresponding to the wavelength at which the difference between the target spectral sensitivity and the measured spectral sensitivity is generated when the wavelength scan is completed (S160, 170).

In order to design the linear variable neutron density filter 120, the output light of the wavelength variable light source 170 may be provided to the photodetector through the diffusion plate, the linear variable neutral density filter, and the linear variable band pass filter. The wavelength of the wavelength tunable light source can be sequentially changed, and the spectral sensitivity can be measured according to the wavelength.

The difference between the target spectral sensitivity and the measured spectral sensitivity can be calculated for each wavelength. The transmittance of the linear variable neutral density filter can be adjusted at the wavelengths where the difference between the target spectral sensitivity and the measured spectral sensitivity is different. For example, if the difference between the target spectral sensitivity and the measured spectral sensitivity has a positive value, the transmittance of the linearly variable neutral density filter may be changed to increase.

If there is no difference between the target spectral sensitivity and the measured spectral sensitivity at all wavelengths, the linear variable neutral density filter may combine with the linear variable band pass filter and the photodetector to provide the desired spectral sensitivity.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, And all of the various forms of embodiments that can be practiced without departing from the technical spirit.

110: diffusion plate
120: linear variable neutral density filter
130: Linear Variable Bandpass Filter
140: Photodetector
150: Amplifier
160:

Claims (5)

A photodetector;
A transmissive linear variable bandpass filter (LVBF) disposed in front of the photodetector;
A linear variable neutral density filter disposed in front of the linear variable band-pass filter and providing different transmittances depending on positions;
Diffusion means disposed in front of the linear variable neutron density filter for uniformly transmitting incident light spatially;
An amplifier for amplifying the output of the photodetector; And
And a processor for processing the output of the amplifier. The method according to claim 1,
Wherein the target spectral sensitivity of the optical system composed of the linear variable band-pass filter, the linear variable band-pass filter, and the photodetector is constant according to the wavelength. The method according to claim 1,
Wherein the target spectral sensitivity of an optical system consisting of a linear variable bandpass filter, a linear variable bandpass filter, and a photodetector corresponds to one of the CIE color coordinate functions X, Y, or Z. The method according to claim 1,
Said linearly variable neutral density filter comprising:
A first linearly variable neutral density filter;
A second linearly variable neutral density filter; and
A third linearly variable neutral density filter,
The first linearly variable neutral density filter, the second linearly variable neutral density filter, and the third linearly variable neutral density filter are arranged side by side along the longitudinal direction of the linear variable neutral density filter,
Wherein the photodetector comprises:
A first photodetector aligned with the first linearly variable neutral density filter;
A second photodetector aligned with the second linearly variable neutral density filter; And
And a third photodetector aligned with the third linearly variable neutral density filter. Measuring an output of the wavelength variable light source for each wavelength;
Installing a linear variable neutral density filter, a linear variable bandpass filter, and a photodetector;
Measuring spectral sensitivity of a system comprising a linear variable bandpass filter, a linear variable bandpass filter, and a photodetector using the wavelength tunable light source at a predetermined wavelength;
Varying a wavelength of the wavelength tunable light source within a wavelength scan range; And
Adjusting the transmittance of the linear variable neutral density filter at a position corresponding to a wavelength at which a difference between the target spectral sensitivity and the measured spectral sensitivity is generated when the wavelength scan is completed.
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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5148288A (en) * 1990-08-29 1992-09-15 Savitar, Inc. Standardized color calibration of electronic imagery

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5148288A (en) * 1990-08-29 1992-09-15 Savitar, Inc. Standardized color calibration of electronic imagery

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