KR20160137230A - Air Sampling Multi Gas Detecting Apparatus - Google Patents

Air Sampling Multi Gas Detecting Apparatus Download PDF

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KR20160137230A
KR20160137230A KR1020150072077A KR20150072077A KR20160137230A KR 20160137230 A KR20160137230 A KR 20160137230A KR 1020150072077 A KR1020150072077 A KR 1020150072077A KR 20150072077 A KR20150072077 A KR 20150072077A KR 20160137230 A KR20160137230 A KR 20160137230A
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unit
sensor
sensing device
alarm
gas sensing
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권경수
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주식회사 가스트론
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/24—Suction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
    • G08B21/02—Alarms for ensuring the safety of persons
    • G08B21/12—Alarms for ensuring the safety of persons responsive to undesired emission of substances, e.g. pollution alarms
    • G08B21/14—Toxic gas alarms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

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  • Emergency Alarm Devices (AREA)

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an air suction type multiple gas sensing device for detecting leakage of toxic gas in a factory or the like.
In the present invention, there is provided an air conditioner comprising: a suction unit for controlling suction of air for measurement and air discharge after measurement; a sensor unit for measuring a gas component in the sucked air; A control unit; And a terminal unit for communicating with outside and inputting and outputting information according to the control of the control unit.
According to the present invention, it is possible to detect a large number of toxic gases with a single gas sensor without installing a plurality of gas detectors, and it is possible to save a high cost due to installation of a bar, and reduce the maintenance cost required for the operation.

Description

TECHNICAL FIELD [0001] The present invention relates to an air-

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an air intake type multiple gas sensing device for use in a semiconductor manufacturing process, and more particularly, to an air intake type multiple gas sensing device for sensing various kinds of gases independently in one device.

In the industrial field, flammable gas, toxic gas, freon gas, organic compound gas, etc. are used variously, and a gas sensor is installed and operated in order to prevent gas leakage accident in the field.

Particularly in semiconductor production facilities, various kinds of gases such as C4F6, CH2F2, CH3F, C5F8, COS, CH4, and CO can be used for semiconductor processing. In this case, conventionally, separate gas detectors are used to detect each kind of gas, and there is a problem of high cost due to the installation of many gas detectors and maintenance difficulties. In addition, ethanol, isopropyl alcohol, FC-3283, etc., which are used as detergents, interfere with the measurement of gas detectors and are a major cause of malfunction of detection.

It is an object of the present invention to solve the above-described problems, and it is an object of the present invention to provide a gas measurement system and a gas measurement method, which can mount various gas measurement techniques in a single apparatus, So that it can detect the gas under the same condition and has quick response.

According to an aspect of the present invention, there is provided an air-intake-type multi-gas sensing apparatus including a suction unit for controlling suction of air for measurement and discharge of air after measurement, A sensor unit, a control unit for processing the measurement signal from the sensor unit and outputting a measurement result, and a terminal unit for communicating with the outside and inputting and outputting information according to the control of the control unit.

The suction unit of the air suction type multi-gas sensing device measures the amount of the air sucked, measures a quantity of air And a flow rate sensor for controlling the pump so that the pump can be introduced.

The sensor unit of the air-intake-type multi-gas sensing device may be equipped with one to four sensor cartridges which can be detached.

The sensor cartridge which can be attached to and detached from the sensor unit includes a sensing unit for mounting one of a photoionization detector sensor, an electrochemical sensor and a contact combustion sensor, and an interface unit for transmitting data measured by the sensing unit to the control unit .

The sensor cartridge may be configured to have the same size and shape regardless of the type of the sensor to be measured.

A communication unit for supporting at least one of an RS485 communication unit for sharing the measurement result with an external system and a current output unit for outputting a current indicating a measurement result, An alarm output unit for outputting an alarm generated by the device under the control of the control unit, a key input unit for inputting a setting value or the like for measurement by the user, and a display unit for displaying a setting screen and a measurement result according to the control of the control unit . ≪ / RTI >

The power unit may support at least one of a DC power system and a POE (Power Over Ethernet) system that is supplied with power through an RJ45 connector.

Further, the communication unit of the terminal unit may additionally support the TCP / IP Ethernet method when the power unit supports the POE (Power Over Ethernet) method in which power is supplied through the RJ45 connector.

The current output section of the terminal section may output a current value in proportion to the measurement result. This current value is expressed by the following equation,

Figure pat00001
, And the set maximum value may be a maximum value of a range set by the controller. In addition, the current output unit may output a current of 0 mA or 2 mA as an alarm signal indicating that there is an abnormality in the sensor, and output a current value of 20 mA to 22 mA to indicate that the measurement result is larger than the set maximum value can do.

The alarm output unit of the terminal unit may be configured to have a system terminal group for outputting an alarm generated in the air intake type complex gas sensing apparatus and a sensor terminal group for outputting a measurement related alarm in the sensor unit Number of channel terminal groups.

The system terminal group and each channel terminal group may include three alarm signals. In addition, a jumper or switch for determining the output mode of the alarm signal is further provided, and the alarm signal can be outputted in the form of NC (Normal Close) signal or NO (Normal Open) signal by connection of the jumper or switch have

The key input unit of the terminal unit includes an M key for requesting entry of a menu mode, S1, S2, S3 and S4 keys set to go directly to a specific menu at the time of key input, an ESC key used for returning to a previous screen during each mode operation, An ENTER key for entering or storing a set value, a direction key used for moving between items configured in each mode, and a RESET key used for returning to the measurement mode in the specific mode entered by using the above keys can do.

The display unit of the terminal unit may include a status LED unit indicating a status of the device, and a screen unit displaying a screen set by control of the controller according to the key input of the key input unit or displaying a measurement result.

The status LED of the display unit shows POWER LED to check whether the power of the device is properly connected, STATUS LED to check the operation status, FAULT LED to operate when the fault occurs, And an ALARM1 LED that operates when an alarm 1 occurs in the system or sensor cartridge during operation. The alarm 1 is generated when the measured gas concentration is larger than the Alarm 1 set value set by the control unit and smaller than the Alarm 2 set value And the Alarm2 may be an alarm that occurs when the measured gas concentration is greater than the Alarm2 set value set by the control unit.

The control unit may be configured to additionally perform a self diagnosis function to check whether the system of the air intake type multiple gas sensing apparatus and each sensor cartridge mounted on the sensor unit operates normally.

The control unit may process the measurement signal from the sensor unit and output an alarm when the concentration of the detected gas is above a predetermined threshold or within a predetermined range.

According to the present invention, it is possible to detect a large number of gases by one device, which can save a high cost incurred in installing a plurality of individual gas detectors. By applying a modular sensor cartridge, By configuring the detector adaptively, high scalability can be provided.

It is also possible to reduce maintenance costs by operating one instrument rather than a number of individual gas detectors.

1 is a block diagram schematically showing the entire configuration of an air-intake-type multiple gas sensing apparatus according to an embodiment of the present invention.
2 is a configuration diagram showing a schematic configuration of a sensor cartridge.
3 is an exemplary diagram showing a terminal structure of an alarm output unit according to an embodiment of the present invention.
4 is an exemplary view illustrating a key input unit and a display unit of the air-intake-type multi-gas sensing apparatus according to an embodiment of the present invention.
5 is an exemplary diagram showing a device control flow of a control unit according to an embodiment of the present invention.
6 is an exemplary diagram showing a self-diagnosis result according to an embodiment of the present invention.
FIG. 7 is an exemplary diagram showing an example of a screen displayed on the display unit by the control unit in the measurement mode according to an embodiment of the present invention.
8 is an exemplary view showing an example of an information screen for a measurement gas measured in a specific sensor cartridge in a measurement mode according to an embodiment of the present invention.
9A to 9C are views showing an example of a screen for displaying an alarm by the control unit in the measurement mode according to an embodiment of the present invention.
10 is a view showing an example of a screen displaying a failure by the control unit according to an embodiment of the present invention.
11 is an exemplary view showing the internal structure of a multiple gas sensing device according to an embodiment of the present invention.

In the following description, well-known functions or constructions are not described in detail to avoid unnecessarily obscuring the subject matter of the present invention.

Although the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, But should be understood to include all modifications, equivalents, and alternatives.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description with reference to the accompanying drawings, the same or corresponding components will be denoted by the same reference numerals, and redundant description thereof will be omitted.

1 is a block diagram schematically showing the entire configuration of an air-intake-type multiple gas sensing apparatus according to an embodiment of the present invention.

1, an air suction type multiple gas sensing apparatus according to an embodiment of the present invention may include a suction unit 110, a sensor unit 120, a control unit 130, and a terminal unit 140 .

The suction unit 110 can perform a function of sucking gas for measurement and discharging gas after measurement. The flow rate of the air supplied to the sensor unit 120 for gas measurement must be constantly supplied in order to minimize malfunction. In order to control the inflow air, the suction unit 110 may include a suction port 111, an exhaust port 113, a pump 115, and a flow rate sensor 117.

The suction port 111 is where the air for measurement is sucked, and the sucked air can be delivered to the sensor unit 120 for measurement. The air outlet 113 can discharge the air discharged from the sensor unit 120 to the outside after the measurement. The pump 115 may be a diaphragm-type pump, and actively suck air from the outside through a pump operation. The flow rate sensor 117 controls the pump 115 so that a constant amount of air can always be introduced.

The sensor unit 120 may be configured to mount a plurality of sensor cartridges (e.g., 121 to 124) to which various gas sensing sensor technologies are applied.

Fig. 2 is a configuration diagram showing a schematic configuration of the sensor cartridges 121 to 124. Fig.

2, each of the sensor cartridges 121 to 124 includes a sensing unit 210 for mounting one of a photoionization detector sensor, an electrochemical sensor, and a contact combustion sensor, and a controller 130 for controlling data sensed by the sensing unit. (Not shown). The sensing unit 210 may be equipped with a sensor of a different measurement method depending on the type of gas to be measured.

A photoionization detector (PID) sensor can be used to detect interfering gases such as alcohol and coolant. The PID sensor is a device that measures photons of the volatile organic compounds by emitting photons in the ultraviolet region and making them electrically charged positively charged ions. The PID sensor may include a miniature UV lamp that emits ultraviolet photons of a particular wavelength as a major constituent. The energy level is determined by the gas injected into the lamp and the type of material used in the lamp window, usually between 9.5 and 11.7 eV (electron volts). Here, 1 eV is defined as the work of one electron as it goes up one volt potential.

Contact combustion sensors can be used to detect CH4, a common combustible gas. The contact combustion sensor is a device in which a catalyst is coated with a carrier in the form of a coil of platinum wire. When the sensor in the energized state comes into contact with the combustible gas, it is burned by the action of the catalyst, and the electric resistance is changed by the heat of combustion, and the gas concentration can be measured by measuring this change.

Electrochemical sensors can be used to detect common toxic gases, COS or CO gases. The electrochemical sensor includes a sensing electrode (not shown) where an oxidation (reduction) reaction takes place, a counter electrode (not shown) where a reduction (oxidation) reaction occurs simultaneously with the sensing electrode, and a potential And a reference electrode (not shown). A key feature of electrochemical sensors is the diffusion barrier which limits the flow of the gas to be detected to the sensing electrode. By this method, all the gases can cause an oxidation or reduction reaction at the detection electrode. Since the current generated when this oxidation-reduction reaction is caused is linearly proportional to the gas concentration on the detection electrode side, the concentration of the gas can be measured through the value of this current. In the case of an electrochemical sensor, various electrochemical sensors exist depending on the measurement gas, and the sensor cartridges 121 to 124 can accommodate these various electrochemical sensors.

In addition, the sensor cartridges 121 to 124 may be configured to have the same size and shape (for example, a rectangular shape) regardless of the measurement method or the type of the sensor to be measured. Accordingly, the sensor cartridge 121 to 124 of the present invention can be designed as a removable / attachable module. Accordingly, the gas sensing apparatus of the present invention can select and mount a sensor cartridge suitable for a gas to be measured, thereby realizing an efficient device capable of sensing various kinds of gas under the same device structure.

The terminal unit 140 displays a measurement result under the control of the controller 130 or transmits measurement results to an external system. The terminal 140 includes a power supply unit 141 for receiving power supply, a current output unit 142 for sharing the measurement result with an external system, an RS485 communication unit 143, A key input unit 145 for allowing a user to input a set value for measurement, and a display unit 146 for displaying a measurement result according to the control of the control unit 130 .

The power supply unit 141 can receive DC power from 18V to 31V. In addition, Power over Ethernet (POE) power supply, which is supplied through the RJ45 connector, can be additionally selected and used. In this case, measurement results can be shared with external systems using TCP / IP Ethernet.

The current output unit 142 may include a plurality of terminals capable of outputting a current of 0 to 22 mA. In the air suction type multiple gas sensing apparatus of the present invention, a plurality of sensor cartridges may be mounted, so that the current output unit 142 may include a terminal for outputting a corresponding 0 to 22 mA current for each sensor cartridge. Each output terminal can output up to 22mA of current. The control unit 130 can set a range of the gas concentration to be measured for each sensor cartridge. Based on this, the current output unit 142 can output a current of 4 mA to indicate that no gas is measured, and a current of 20 mA to indicate that the maximum value of the set range has been measured , The current between 4 and 20 mA can be output proportional to the measured gas concentration for the gas concentration measured in the set range. More specifically, the current value according to the following equation (1) can be outputted in proportion to the measurement result (concentration of the measured gas) coming from the sensor cartridge.

Figure pat00002

In Equation (1), the set maximum value means the maximum value of the gas concentration range set by the controller 130.

An output of 0mA or 2mA can act as an alarm signal to signal that the sensor cartridge is faulty. A current of 20 mA or more can be used to indicate that the measured value is greater than the set maximum.

The control unit 130 can perform digital communication with an external system using TCP / IP Ethernet, which can be additionally configured with the RS485 communication unit 143. [ At this time, measurement results can be shared with external system using MODBUS protocol.

3 is an exemplary diagram showing a terminal structure of an alarm output unit according to an embodiment of the present invention.

3, the alarm output unit 144 includes a system terminal group 310 for outputting an alarm generated in the air-intake-type multi-gas sensing apparatus of the present invention, and a measurement-related alarm in the sensor unit 120 And includes the same number of channel terminal groups 311 and 31x as the number of sensor cartridges (x in the example of FIG. 3).

The alarm generated in the air intake type multiple gas sensing apparatus may be an alarm generated when the apparatus is malfunctioning, for example, when the voltage of the power source is lowered. The measurement related alarm may mean a case where the measured result exceeds the Alarm1 set value set by the controller 130 and the Alarm2 set value set forth below.

Each of the terminal groups 301, 311, and 31x can output a plurality of alarm signals (three in FIG. 3, A1, A2, and TRB). Each alarm signal can be output in the form of NO (Normal Open) and NC (Normal Close). If NO, the A terminal 331 and the B terminal 333 of the respective alarm signals of FIG. 3 are not attached unless an alarm is generated. When an alarm occurs, the A terminal 331 and the B terminal 333 are attached. . In the case of the NC, the A terminal 331 and the B terminal 333 are attached when no alarm is generated, and the A terminal 331 and the B terminal 333 are disconnected when an alarm occurs .

A jumper or switches 320 to 328 may be used for each of the alarm signals A1, A2, and TRB to determine whether the alarm signals A1, A2, and TRB operate as NO or NC . More specifically, when the A and C of the jumper or switches 320 to 328 are connected, an NO-type alarm signal can be output. When C and B are connected, an NC-type alarm signal can be output.

4 is an exemplary diagram showing a key input unit 145 and a display unit 146 of the air intake type multiple gas sensing apparatus according to an embodiment of the present invention.

The key input unit 145 includes keys that allow the user to input a set value relating to the control mode and the like in connection with the operation of the air intake type multiple gas sensing apparatus. Referring to FIG. 4, the key input unit 145 includes an M key KEY2 requesting entry of a menu mode, S1 through S4 keys KEY3, KEY4, KEY5, and KEY6 set to go directly to a specific menu, (ESC) key (KEY11) used to return to the previous screen during each mode operation using the S4 key, ENTER key (KEY12) used to enter the mode or to store the set value, movement between the items configured in each mode (KEY7, KEY8, KEY9, KEY10) used for the buzzer operation of the apparatus, a RESET key (KEY1) used for stopping the buzzer when the buzzer operation of the apparatus is stopped or returning to the measurement mode in the specific mode entered by using the above keys .

4, the display unit 146 includes a status LED unit 410 for indicating the status of the device, a display unit for displaying a screen set by key input of the key input unit 145, And a display unit 420. Of course, the display unit 420 is not limited to the TFT LCD shown in the example of FIG. 4, and may be implemented by other display devices such as an OLED, a PDP, an LED, and an LCD according to an implementation. In addition, the display unit 146 may further include a buzzer (not shown) for generating a specific sound when a key is input, an alarm is generated, or a failure occurs.

Referring to FIG. 4, the status LED unit 410, which indicates the status of the apparatus, includes a POWER LED for confirming whether the power of the apparatus is properly connected, a STATUS LED for confirming a status during operation, a FAULT LED , An ALARM2 LED operating in the system or sensor cartridge at the time of occurrence of Alarm2, and an ALARM1 LED operating at the occurrence of Alarm1 in the system or sensor cartridge during operation. The conditions for generating the Alarm1 and the Alarm2 may be set by the controller 130 as described below.

The control unit 130 may process various controls of the system, measurement signals from the sensor unit 120, communication, and alarms. Also, the controller 130 can store the measured gas and operation events in real time using the internal memory, and can output the result to the terminal 140 in real time.

5 is an exemplary diagram showing a device control flow of the control unit 130 according to an embodiment of the present invention.

When the power is turned on, the control unit 130 outputs an intro screen for introducing the device to the screen unit 420 and performs a self-diagnosis function (Self Test mode) 520. If there is no abnormality, the control unit 130 enters the measurement mode 530 Gas measurement values can be displayed continuously.

6 is an exemplary diagram showing a self-diagnosis result according to an embodiment of the present invention.

Referring to FIG. 6, the controller 130 performs a self-diagnosis function for the system and the sensor cartridges, and displays a portion where there is no abnormality, for example, in green, and a portion in which a defect and a problem occurs, for example, . The control unit 130 may also display the cause (e.g., the sensor cartridge is empty, Fail) when a trouble occurs. During the self-diagnosis function, the warm-up for normal operation of the sensor can be performed.

When the self-diagnosis function is normally completed, the controller 130 enters the measurement mode and can continuously display the gas measurement values. The control unit 130 can display faults, alarms, over and under states for individual channels, and can display additional information such as the current state of being inhaled and interference gas detection simultaneously with the gas measurement values.

The controller 130 may display a fault when the sensor unit 120 is not equipped with a sensor or is defective, when communication with the sensor unit 120 fails, when a parameter of the sensor cartridge malfunctions, have.

The controller 130 may set a value corresponding to the alarm, Over, Under, and so on. For example, if the concentration of the gas to be measured is in the range of 10 ppm (part per million) to 2000 ppm, the controller 130 determines that the measured gas concentration is lower than the lowest value of the gas concentration to be measured, It can be set to display Under status in small cases. In addition, the controller 130 may set two alarm values Alarm1 and Alarm2. For example, the controller 130 can set the alarm 1 to 500 ppm and the alarm 2 to 1000 ppm. If the measured gas concentration exceeds 500 ppm, the controller 130 can display the alarm 1 status. If the measured gas concentration exceeds 1000 ppm, the controller 130 can display the alarm 2 status. If the measured gas concentration is greater than the maximum value of the gas concentration to be measured, the controller 130 may display an over state.

The control unit 130 may store data measured for each sensor cartridge in the measurement mode and events such as failure, alarm, over, under, etc. in the internal memory. An event log may be provided for each type of sensor, can do.

7 is an exemplary diagram showing an example of a screen that the control unit 130 outputs to the display unit 146 in the measurement mode according to an embodiment of the present invention.

7, the controller 130 displays the current time 710 in the measurement mode, the information 720, 730, and 740 about the measured gas measured in each sensor cartridge, whether the SD card is inserted, (750), and whether or not the interference gas is detected (760). Also, the controller 130 may display the flow rate of the flow sensor and the current flow rate in a graph bar 770 and display a Modbus address 780 that allows the external system to recognize the apparatus of the present invention You may.

FIG. 8 is an exemplary view showing an example of information (720, 730, 740) of measurement gas information measured in a specific sensor cartridge in a measurement mode according to an embodiment of the present invention.

Referring to FIG. 8, the controller 130 displays the maximum value, the alarm 2 setting value, the alarm 1 setting value 810, the gas name 820, The gas concentration 830 can be output. The control unit 130 can set the values of the Alarm 1 and the Alarm 2 by key input. In the example of FIG. 5, it is possible to enter "Alarm mode Sub page Item selection" in LEVEL 3 (Item selection: 580) to set the values of Alarm 1 and Alarm 2.

9A to 9C are views showing an example of a screen for displaying an alarm by the control unit 130 in the measurement mode according to an embodiment of the present invention.

The control unit 130 can output an alarm when the concentration of the gas detected in each sensor cartridge of the sensor unit 120 is equal to or higher than a predetermined threshold value or within a predetermined range.

9A, if the concentration of the gas coming from the sensor unit 120 is larger than the set value of Alarm 1 (for example, 500 ppm) and smaller than the set value of Alarm 2 (for example, 1000 ppm), the controller 130 generates Alarm 1 Can be displayed on the screen. In addition, the controller 130 may also output the ALARM 1 LED in the status LED of the display unit 146.

9B, the controller 130 determines that the concentration of the gas coming from the sensor unit 120 is larger than the Alarm 2 set value (for example, 1000 ppm) and 110% of the set maximum value (HS in FIG. 9B, for example, 2000 ppm) If it is small, it can be displayed on the screen that Alarm 2 occurred. Also, the controller 130 may also output the ALARM 2 LED in the status LED of the display unit 146.

9C, when the concentration of the gas coming from the sensor unit 120 is larger than a predetermined maximum value (HS of, for example, 2000 ppm in FIG. 9B) of 110%, the control unit 130 displays a message "RANGE OVER" And informs that the gas concentration has exceeded the threshold value.

10 is a view showing an example of a screen displaying a failure by the controller 130 according to an embodiment of the present invention.

When a failure occurs in the air intake type multiple gas sensing apparatus according to the present invention, the control unit 130 may display information on the failure on the screen unit 420.

Referring to FIG. 10, when a failure occurs in the air-intake type multiple gas sensing apparatus, the controller 130 may display a FAULT on the screen unit 420 and display a fault code. An example of the displayed fault code is shown in Table 1 below.

Fault code meaning Condition E-10 When the sensor is not installed in the body or is defective Sensor channel cable not connected, communication exceeded more than 3 times E-11 When there is no communication between the main unit and the sensor Sensor communication error 3 times or more consecutively E-14 Parameter malfunction in sensor cartridge Above the internal setting value E-15 Sensor voltage output value too low "Check Inc Type only"
* When the EC type is greater than -0.95V
* When CB or PID type is more than -0.45V E-16 Sensor voltage output value too high "Dec Type only check"
* When EC type + 0.95V or more
* When CB, PID type + 0.45V or more E-17 Sensor calibration interval too small For non-IR sensors, if the existing calibration interval is less than 0.01V E-21 When the flow rate of the flow sensor is 1000cc / min or less When the sensor check time exceeds time 0 E-22 When the flow rate of the flow sensor is 1000cc / min or more If more than 1000 sensor check time times out E-30 When the gas concentration value is less than -10% When the gas concentration value is less than -10% E-31 Main input voltage value too low 16V or less / 6 seconds or more

5, if there is a key input for entering another mode in the measurement mode, the controller 130 performs a password check 540 to check whether the user is a legitimate user. If the user is a legitimate user, Can be performed.

If the input key is S1 to S4, the control unit 130 can directly enter the set menu for each key (550). As an example, when the S1 key is input, the user can directly enter the "Calibration Mode Sub page selection" menu, and when the S2 key is input, the user can directly enter the "All Zero mode selection" menu.

If the input key is a menu key, the control unit 130 may display a mode for selecting the LEVEL1 (mode selection, 560) menu. The control unit 130 receives the direction key and the ENTER key ESC key from the key input unit 145 and displays menus of LEVEL1 (mode selection) 560, LEVEL2 (page selection) 570, LEVEL3 . When the setting by the menu selection by the key input unit 145 is completed, the control unit 130 can store the result in the internal memory.

11 is an exemplary view showing the internal structure of a multiple gas sensing device according to an embodiment of the present invention.

11, a terminal unit 140 is mounted on the lower end of the sensor unit 120 and a suction port 111, an exhaust port 113, a pump 115, and a flow sensor 117 of the suction unit 110, Can be mounted. Although not shown in FIG. 11, the control unit 130 is located inside the cover portion of the apparatus proposed by the present invention, and the display unit 146 is located outside. The air introduced by the pump 115 enters the suction port along the path 1010 in Fig. 11 and passes through a plurality of (for example, four) sensor cartridges 121 to 124 that can be mounted on the sensor unit 120, .

Referring to the sensor unit 120 of Fig. 11, each sensor cartridge has the same size and the same outer shape, and can have the same mounting structure (e.g., four screws). In addition, each sensor cartridge may be configured to have the same interface for transmitting data to be measured to the controller 130. [ Therefore, the sensor cartridge 120 can be mounted at any position of the sensor unit 120 regardless of the type of the sensor cartridge, and can be easily detached. Therefore, the air suction type gas sensing apparatus of the present invention can easily change the configuration of the sensor cartridge in accordance with the user's demand (kind of gas to be measured).

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the following claims and their equivalents. Only. The scope of the present invention is defined by the appended claims rather than the detailed description and all changes or modifications derived from the meaning and scope of the claims and their equivalents are to be construed as being included within the scope of the present invention do.

Claims (20)

A suction unit for controlling the suction of air for measurement and the discharge of air after measurement;
A sensor unit for measuring a gas component in the sucked air;
A controller for processing a measurement signal coming from the sensor unit and outputting a measurement result; And
And a terminal unit for communicating with the outside and inputting and outputting information under the control of the control unit,
Air intake type composite gas sensing device. The air conditioner according to claim 1,
A suction port through which air for measurement is sucked;
An exhaust port for exhausting the air after the measurement;
A pump for sucking the air; And
And a flow sensor for measuring the amount of the sucked air and controlling the pump so that a certain amount of air can be introduced.
Air intake type composite gas sensing device. The apparatus according to claim 1,
Which can mount one to four detachable sensor cartridges,
Air intake type composite gas sensing device. 4. The sensor cartridge according to claim 3,
A sensing unit for mounting any one of a photoionization detector sensor, an electrochemical sensor, and a contact combustion sensor; And
And an interface unit for transmitting data measured by the sensing unit to the control unit.
Air intake type composite gas sensing device. 4. The sensor cartridge according to claim 3,
The sensor is configured to have the same size and shape regardless of the type of sensor to be measured.
Air intake type composite gas sensing device. The terminal according to claim 1,
A power supply for receiving a power supply;
A communication unit for supporting at least one of an RS485 communication unit for sharing the measurement result with an external system and a current output unit for outputting a current indicating a measurement result;
An alarm output unit for outputting alarms generated by the device under the control of the control unit;
A key input unit for user input; And
And a display unit for displaying a setting screen and a measurement result under the control of the control unit.
Air intake type composite gas sensing device. The power supply unit according to claim 6,
DC power system and POE (Power Over Ethernet) system which is supplied with power through an RJ45 connector.
Air intake type composite gas sensing device. 8. The communication device according to claim 7,
In the case where the power unit supports a power over Ethernet (POE) scheme, which is supplied with power through an RJ45 connector,
Air intake type composite gas sensing device. 7. The semiconductor memory device according to claim 6,
And outputting a current value proportional to the measurement result,
Air intake type composite gas sensing device. 10. The method according to claim 9,
Figure pat00003
Lt; / RTI >
Wherein the set maximum value is a maximum value of a range set by the controller,
Air intake type composite gas sensing device. 11. The semiconductor memory device according to claim 10,
And outputs a current of 0 mA or 2 mA as an alarm signal indicating that there is an abnormality in the sensor unit,
Air intake type composite gas sensing device. 11. The semiconductor memory device according to claim 10,
And outputting a current value of 20 mA to 22 mA to indicate that the measurement result is larger than the set maximum value,
Air intake type composite gas sensing device. 7. The apparatus of claim 6,
Wherein the number of the channel terminal groups is the same as the number of sensor terminals mounted on the sensor unit for outputting a measurement-related alarm in the sensor unit and a system terminal group for outputting an alarm generated in the air- Including,
Air intake type composite gas sensing device. 14. The system of claim 13, wherein the system terminal group and each channel terminal group comprise:
Including three alarm signals
Air intake type composite gas sensing device. 15. The system of claim 14, wherein the system terminal group and each channel terminal group comprise:
Further comprising a jumper or switch for determining an output mode of the alarm signal,
And outputs the alarm signal in the form of NC (Normal Close) signal or NO (Normal Open) signal by connection of the jumper or switch
Air intake type composite gas sensing device. 7. The apparatus of claim 6,
An M key requesting entry of a menu mode;
S1, S2, S3, S4 keys set to go directly to a specific menu when a key is pressed;
An ESC key used to return to the previous screen during each mode operation;
An ENTER key for entering a mode or storing a set value;
A direction key used to move between items configured in each mode; And
And a RESET key used for returning to the measurement mode in the specific mode state entered using the above keys
Air intake type composite gas sensing device. The display device according to claim 6,
A status LED unit for indicating the status of the device; And
And a display unit for displaying a screen set by the control of the controller according to a key input of the key input unit or displaying a measurement result
Air intake type composite gas sensing device. 18. The apparatus of claim 17,
POWER LED to check whether the power of the device is properly connected, STATUS LED to check operation status, FAULT LED to operate when a fault occurs during operation, ALARM2 LED to operate when an alarm 2 occurs in the system or sensor cartridge, The alarm 1 is generated when the measured gas concentration is larger than the set value of Alarm 1 set by the control unit and smaller than the set value of Alarm 2, Which is an alarm that occurs when the gas concentration is larger than the Alarm2 set value set by the control unit,
Air intake type composite gas sensing device. The apparatus of claim 1,
Wherein the system further comprises a self-diagnosis function for checking whether the system of the air-intake-type multi-gas sensing device and each sensor cartridge mounted on the sensor unit operates normally,
Air intake type composite gas sensing device. The apparatus of claim 1,
And processing the measurement signal from the sensor unit to output an alarm when the concentration of the sensed gas is above a predetermined threshold or within a predetermined range,
Air intake type composite gas sensing device.
KR1020150072077A 2015-05-22 2015-05-22 Air Sampling Multi Gas Detecting Apparatus KR20160137230A (en)

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* Cited by examiner, † Cited by third party
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KR101960522B1 (en) * 2017-09-19 2019-03-20 허니웰 인터내셔널 인코포레이티드 Apparatus for detecting gas
KR102054150B1 (en) * 2018-12-20 2019-12-13 (주) 에이스엔 Outdoor air quality measurement apparatus using odor and dust sensor using vacuum decompression
KR20200071584A (en) * 2018-12-11 2020-06-19 주식회사 정우계전 System and method for detection of abnormalities in switchboard
KR20200091937A (en) * 2018-01-10 2020-07-31 허니웰 인터내셔날 인코포레이티드 Gas detection device
KR102162178B1 (en) * 2020-03-26 2020-10-06 더블유에스테크주식회사 Apparatus for monitoring motor and distribution board
CN111999356A (en) * 2020-08-11 2020-11-27 浙江三青环保科技有限公司 Air collection device and monitoring factor cross interference calculation method
KR102235962B1 (en) * 2020-07-29 2021-04-05 주식회사 지디에스이엔지 System of gas leak detector and method to minimize detection error of gas leak detector
KR20210154646A (en) 2020-06-12 2021-12-21 문영실 Mobile combined gas detector
KR20220138254A (en) * 2021-04-05 2022-10-12 주식회사 제이앤미 Gas leak sensor with inhalation fan

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101960522B1 (en) * 2017-09-19 2019-03-20 허니웰 인터내셔널 인코포레이티드 Apparatus for detecting gas
US11255833B2 (en) 2017-09-19 2022-02-22 Honeywell International Inc. Gas detection device
US11906496B2 (en) 2017-09-19 2024-02-20 Honeywell International Inc. Gas detection device
KR20200091937A (en) * 2018-01-10 2020-07-31 허니웰 인터내셔날 인코포레이티드 Gas detection device
KR20200071584A (en) * 2018-12-11 2020-06-19 주식회사 정우계전 System and method for detection of abnormalities in switchboard
KR102054150B1 (en) * 2018-12-20 2019-12-13 (주) 에이스엔 Outdoor air quality measurement apparatus using odor and dust sensor using vacuum decompression
KR102162178B1 (en) * 2020-03-26 2020-10-06 더블유에스테크주식회사 Apparatus for monitoring motor and distribution board
KR20210154646A (en) 2020-06-12 2021-12-21 문영실 Mobile combined gas detector
KR102235962B1 (en) * 2020-07-29 2021-04-05 주식회사 지디에스이엔지 System of gas leak detector and method to minimize detection error of gas leak detector
CN111999356A (en) * 2020-08-11 2020-11-27 浙江三青环保科技有限公司 Air collection device and monitoring factor cross interference calculation method
KR20220138254A (en) * 2021-04-05 2022-10-12 주식회사 제이앤미 Gas leak sensor with inhalation fan

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