KR20160131600A - Super-resolution lens and microscopic apparatus comprising the same - Google Patents

Super-resolution lens and microscopic apparatus comprising the same Download PDF

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KR20160131600A
KR20160131600A KR1020150064408A KR20150064408A KR20160131600A KR 20160131600 A KR20160131600 A KR 20160131600A KR 1020150064408 A KR1020150064408 A KR 1020150064408A KR 20150064408 A KR20150064408 A KR 20150064408A KR 20160131600 A KR20160131600 A KR 20160131600A
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lens layer
layer
hyper
lens
dielectric
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KR1020150064408A
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Korean (ko)
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KR101814425B1 (en
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김민경
노준석
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포항공과대학교 산학협력단
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0062—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

Disclosed are a super-resolution lens and a microscopic device including the same, capable of more practically and conveniently observing a subject smaller than a diffraction limit. The super-resolution lens includes: a hyper lens layer forming an image of a subject by using an evanescent wave of light, emitted from the subject placed on a side, and magnifying the image of the subject; and a substrate covering the other side of the hyper lens layer and supporting the hyper lens layer. At least when the subject is placed, the side of the hyper lens layer is able to form a plane.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an ultra-high resolution lens and a microscope device including the same.

The present invention relates to an ultra-high resolution lens and a microscope apparatus including the same, and more particularly, to an ultra-high resolution lens and a microscope apparatus including the same, which enable observation of objects smaller than the diffraction limit to be more practically and easily observed. will be.

In order to recognize the shape of an object, it is necessary to make an image of the object by using light (electromagnetic wave) scattered from the object. Generally, the light scattered by an object has an Evanescent wave and a Propagating wave component whose characteristics are opposite to each other. The disappearing wave has information about the fine space change rather than the wavelength, but it can not make an image since it mostly disappears at a distance of several tens of nanometers or less on the surface of the material after the generation. Generally, images are created by traveling waves. The sharp attenuation of this decaying wave results in a diffraction limit that limits the resolving power of the optical system.

In an optical system for observing objects of small size, the resolving power is a measure of how clearly and clearly the image obtained through the optical system is. For example, the resolution d of an optical system means that when two objects are separated by a distance d or more, the object can be distinguished as being separated using the optical system.

According to general optical theory, it is known that, in an optical system that forms an image of an object using traveling waves, the resolution can not be reduced by more than half of the wavelength of light used for observing an object, regardless of the use of any optical instrument. Therefore, when a general optical microscope that forms an image of an object by irradiating an object with visible light is used, the resolution is limited to 200 nm or less, which is about half the wavelength of purple light, which is the shortest wavelength of visible light. For smaller viruses, monolayers, or biomaterials such as DNA or neurons, an electron microscope that uses electrons of much shorter wavelengths than visible light should be used.

However, the electron microscope has a disadvantage in that it is more complicated to use than the optical microscope, and the cost is much higher than that of the optical microscope. Furthermore, when the object to be observed is an organism, the organism can be killed by the electron beam, and since the specimen to be observed must be made into a solid so as to withstand the vacuum condition of the electron microscope, the organism and the biomaterial can be observed It is impossible to do.

On the other hand, as an improvement measure to overcome the limit of resolution, a technique has been developed in which an extinction wave to be rapidly attenuated is amplified or an extinction wave is converted into a traveling wave to form an image of an object. For example, a hyper-lens can enlarge an image while converting evanescent waves into propagating waves by using an anisotropic meta material in the form of a cylinder. Since the traveling wave has a small amount of attenuation, it is possible to make a distant image which is enlarged far from the rear of the hyper lens, so that an image of an object smaller than the resolution of the visible light ray can be seen. In this case, since the disappearing wave from the object must be incident on the hyper lens before disappearing, the entire surface of the object and the hyper lens must be within several tens of nanometers.

In the conventional hyper lens, the front surface is concave so as to enlarge the image of the object. At this time, in order to enlarge the image of the observation object, the observation object must be accurately placed on the concave portion of the hyper lens. However, since the above-mentioned hyper lens is manufactured to have a diameter of several micrometers, it is difficult to precisely bring the object to be observed to the concave portion of the hyper lens. Accordingly, conventionally, there has been a problem that practicality and convenience of the hyper lens are deteriorated.

Patent Document 1: Japanese Patent Application Laid-Open No. 10-2011-0060404 (published on June 8, 2011)

Embodiments of the present invention are an ultra-high resolution lens and a microscope apparatus using a hyper lens, and it is an object of the present invention to provide an ultra-high resolution lens and a microscope apparatus using a hyper lens and an ultra high resolution lens improved in practicality and convenience by improving the difficulty and inconvenience of accurately bringing an object to be observed in a small micrometer- And to provide a microscope device that includes a microscope.

According to an aspect of the present invention, the ultra-high resolution lens includes a hyper lens layer capable of forming an image of the observation object using an annihilation wave of light from an observation object placed on one surface, ; And an ultra-high resolution lens that covers the other surface of the hyper lens layer and supports the hyper lens layer, wherein at least when the object to be observed is placed, the one surface of the hyper lens layer forms a plane .

In this aspect, the hyper lens layer includes: a planar auxiliary lens layer having one outer surface on one side; And a main lens layer formed on the other side of the auxiliary lens layer such that at least a part of the outer surface is concave and the concave portion faces the auxiliary lens layer.

In addition, the concave portion may be hemispherical.

The auxiliary lens layer and the main lens layer may be formed by stacking a plurality of dielectric layers and a plurality of metal layers alternately.

Also, the dielectric layer may be titanium oxide, and the metal layer may be silver (Ag).

Also, the dielectric layer may be silicon (Si), and the metal layer may be silver (Ag).

The dielectric layer of the auxiliary lens layer may be made of a material different from the dielectric layer of the main lens layer.

Also, the metal layer may be silver (Ag), the dielectric layer of the auxiliary lens layer may be titanium oxide, and the dielectric layer of the main lens layer may be a material including silicon (Si).

The dielectric layer of the main lens layer may be an amorphous silicon thin film.

The number of dielectric layers and metal layers of the auxiliary lens layer may be different from the number of dielectric layers and metal layers of the main lens layer.

In addition, the auxiliary lens layer is formed by alternately stacking six dielectric layers and seven metal layers, and the main lens layer may be formed by alternately stacking nine dielectric layers and nine metal layers.

The dielectric layer of the auxiliary lens layer has a thickness of 28 nm, and the dielectric layer and the metal layer of the auxiliary lens layer have a thickness of 15 nm, 33 nm, and 66 nm, respectively. nm. < / RTI >

In addition, the main lens layer may be formed by stacking a plurality of dielectric layers and a plurality of metal layers alternately, and the auxiliary lens layer may be a metal layer of silver (Ag).

The dielectric layer and the metal layer of the main lens layer each have a thickness of 15 nm, and the auxiliary lens layer may have a thickness of 50 nm.

Further, the hyper lens layer comprises a main lens layer which is laminated on the substrate in a flat shape on one side of the one outer surface, the substrate is flexible, and after the observation object is placed on the one surface, The one surface of the hyper lens layer may be bent and bent so as to have a concave curved surface.

In addition, the substrate may be formed of any one of polydimethylsiloxane (PDMS) and polyimide.

Further, the surface of the substrate, which is in contact with the hyper lens layer, may be provided with concavities and convexities.

Also, the main lens layer may be formed by stacking a plurality of dielectric layers and a plurality of metal layers alternately, and the dielectric layer may be a silicon (Si) thin film, and the metal layer may be silver (Ag).

The dielectric layer and the metal layer may each have a thickness of 15 nm.

According to another aspect of the present invention, there is provided a light source device comprising: a light source unit for emitting visible light; An ultra-high resolution lens in which an object to be observed is placed on one surface, and light emitted from the light source is incident on the one surface; And an objective lens for condensing the light emitted from the other surface of the ultra high resolution lens, wherein the ultra high resolution lens forms an image of the observation object using an annihilation wave of light from the observation object, A hyper-lens layer capable of enlarging an image of the object; And a substrate for covering the other surface of the hyper lens layer and supporting the hyper lens layer, wherein at least when the object to be observed is placed, the one surface of the hyper lens layer forms a plane.

In this aspect, the hyper lens layer includes: a planar auxiliary lens layer having one outer surface on one side; And a main lens layer formed on the other side of the auxiliary lens layer such that at least a part of the outer surface is concave and the concave portion faces the auxiliary lens layer.

Further, the hyper lens layer comprises a main lens layer which is laminated on the substrate in a flat shape on one side of the one outer surface, the substrate is flexible, and after the observation object is placed on the one surface, The one surface of the hyper lens layer may be bent and bent so as to have a concave curved surface.

The apparatus may further include a shape-deforming portion for holding the substrate in a bent state.

The effects of the ultra-high resolution lens and the microscope apparatus including the ultra high resolution lens according to the present invention will be described as follows.

According to the embodiments of the present invention, it is possible to observe an observation object having a size smaller than the resolving power of the visible light ray through the hyper lens layer using visible light. At this time, the surface on which the observation object is placed in the hyper lens layer is formed as a plane instead of the curved surface, so that the area on the lens where the observation object can be placed can be enlarged. Therefore, when an ultra-high resolution lens and a microscope including the ultra-high resolution lens are used, it becomes remarkably easy to place the object to be observed on the lens, and thus practicality and convenience can be increased.

1 is a configuration diagram of a microscope apparatus according to an embodiment of the present invention.
Fig. 2 schematically shows a cross-sectional view of an example of the first embodiment of the ultra-high resolution lens of Fig. 1;
3 is a perspective view showing the ultra-high resolution lens of FIG.
Fig. 4 schematically shows a cross-sectional view of another example of the first embodiment of the ultra-high resolution lens of Fig. 1;
Fig. 5 shows a method of manufacturing an ultra-high resolution lens according to the first embodiment.
6A to 6C schematically show cross-sectional views of a second embodiment of the ultra-high resolution lens of FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

In the following description of the present invention, detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

In the following description, the front (front) and rear (rear) can be referred to according to the moving direction of light irradiated from the light source portion. For example, when light moves from the first configuration toward the second configuration, the first configuration may be located in front of the second configuration, and the second configuration may be located behind the first configuration. Further, in one configuration, the side on which light is incident may be referred to as a front side, and the side on which light is emitted may be referred to as a rear side.

1 is a configuration diagram of a microscope apparatus 10 according to an embodiment of the present invention.

1, the microscope apparatus 10 may include a light source unit 110, an ultra-high resolution lens 200, an objective lens 120, and an image acquisition unit 130. Furthermore, the microscope apparatus 10 may further include a shape-deforming unit 140 that can change the shape of the ultra-high resolution lens 200 and fix it.

The light source unit (110) irradiates light toward the ultra high resolution lens (200). The light source unit 110 may be configured to irradiate light of a specific wavelength range. For example, the light source unit 110 can emit visible light, and in particular, can emit visible light having a wavelength of 400 nm or more and 700 nm or less. However, the light irradiated by the light source unit 110 is not limited to those described above. For example, the light source unit 110 may irradiate ultraviolet light of a shorter wavelength band or infrared ray of a longer wavelength band than visible light.

An ultra-high resolution lens 200 may be provided behind the light source 110. The light emitted from the light source 110 may be incident on the ultra-high resolution lens 200. The ultrahigh resolution lens 200 can function as a substrate 220 on which the observation object S of the microscope apparatus 10 is placed and can detect the extinguishant wave generated by the light incident on the observation object S evanescent waves) into propagating waves and magnify the image of the object S to be observed. Accordingly, the ultra-high resolution lens 200 can form a long distance image at a relatively far distance.

Specifically, the ultra-high resolution lens 200 forms a far-field image of the observation target S by using an annihilation wave of light generated from the observation object S, (210), and a substrate (220) supporting the hyper lens layer (210). The observation object S may be placed on one side of the hyper lens layer 210 and the opposite side may be covered by the substrate 220. [ The hyper lens layer 210 may include a main lens layer 211 that amplifies an evanescent wave component to convert it into a traveling wave to form an image of the observation target S and magnify an image of the observation target S. [

The main lens layer 211 is made of an anisotropic meta material so that the extinguishing wave component of light can be changed to a traveling wave while the front surface is concave to enlarge the image. Specifically, the main lens layer 211 is a material in which an anisotropic meta material has different effective dielectric constants ε r in the radial direction and effective dielectric constants ε θ in the tangential direction. In particular, the main lens layer 211 has an effective permittivity in the radial direction ε r) the effective dielectric constant (ε θ) of a tangential direction is made of a material that is the opposite sign to each other, it can be made in the shape of annular cross section around the recess of the front. The extinction wave component of the light incident through the concave portion of the main lens layer 211 is amplified while being radially expanded while passing through the main lens layer 211 and the extinguishing wave component changed to a traveling wave as it passes through the main lens layer 211, It is possible to form an enlarged image of the observation target S at a position far from the observation target S by coming out through the rear surface of the lens layer 211 into the air. Due to the action of the main lens layer 211 as described above, the observation object S having a size smaller than the diffraction limit of light used in the microscope apparatus 10 can be observed. For this purpose, the observation object S may be placed in close contact with the surface of the main lens layer 211 in the concave portion of the front surface of the main lens layer 211.

If necessary, the hyper lens layer 210 may further include an auxiliary lens layer 212 that transmits an extinction wave component to the main lens layer 211. The auxiliary lens layer 212 may be provided on the front surface of the main lens layer 211 and in this case the observation object S may be placed on the surface of the front surface of the auxiliary lens layer 212. The auxiliary lens layer 212 internally transmits the extinguishing wave component incident through the front surface of the auxiliary lens layer 212 to the rear surface of the auxiliary lens layer 212. The extinguishing wave component emitted from the rear surface is incident on the front surface of the main lens layer 211, . At this time, the extinction wave component emitted from the rear surface of the auxiliary lens layer 212 can be incident through the concave portion in the front surface of the main lens layer 211.

In the present embodiment, when the observation target S is placed on at least one side of the hyper lens layer 210, the surface FS on which the observation target lies on the hyper lens layer 210 can form a plane. That is, whether or not the surface FS on which the observation object is placed in the hyper lens layer 210 remains at any shape before or after the observation object S is placed, at least the observation object S is placed on the surface And may be formed in a planar shape at the time of losing. According to an example, the hyper lens layer 210 is formed in the shape of a flat plate at the time when the observation object S is placed, and the front surface of the main lens layer 211 is concave after the observation object S is placed on one surface thereof Shape. According to another example, the hyper lens layer 210 may include a main lens layer 211 having a concave front surface formed therein, but the front surface may be configured to have a planar shape have. When the surface FS on which the observation object is placed in the hyper lens layer 210 is formed in a plane as in the present embodiment, the observation object S need not be directly placed in the concave portion of the front surface of the main lens layer 211. [

Here, the surface FS on which the observation object is placed in the hyper lens layer 210 may be the front surface of the main lens layer 211 or the front surface of the auxiliary lens layer 212. Specific embodiments that enable this configuration of the hyper lens layer 210 will be described later.

An objective lens 120 may be provided behind the ultra high resolution lens 200. The objective lens 120 may irradiate light that has been irradiated from the light source unit 110 and passed through the ultra high resolution lens 200 to the image acquisition unit 130. According to an example, immersion oil may be provided between the objective lens 120 and the ultra high resolution lens 200, and the objective lens 120 may be positioned in contact with the infant oil. The infiltrated oil can match the refractive index between the objective lens 120 and the hyper lens. Further, the objective lens 120 may have a numerical aperture of x100.

The image acquisition unit 130 is provided behind the objective lens 120 and can image the image of the observation target S from the light incident through the objective lens 120. [ That is, the image acquiring unit 130 receives the enlarged distant view of the observation target S formed by the hyper lens through the objective lens 120, and converts the image of the observation target S into an image Can be output. According to an example, the image acquisition unit 130 may be an imaging device such as a camera. Specifically, the image acquisition unit 130 may be a CCD (Charge-Coupled Device) module, and the CCD camera module has an array of condensing devices in a closed space, and the pattern of photon energy of incident light is divided into discrete To an analog signal. Thereby, the CCD camera module can image the image of the observation object S.

Conventionally, in order to observe an object smaller than the diffraction limit of visible light, an electron microscope should be used instead of an optical microscope. In the case of an electron microscope, however, it is expensive and inconvenient to use because it must be accommodated in a vacuum chamber and scanned with an electron beam. According to this embodiment, it is possible to effectively observe an observation object S having a size smaller than the diffraction limit of the visible light ray through the ultra-high resolution lens 200 including the hyper lens layer 210 by using a visible light, not an electron beam The optical microscope can be provided.

Furthermore, in the present embodiment, the surface FS on which the object to be observed lies on the ultra-high resolution lens 200 is formed in a plane. Accordingly, the operation of placing the object to be observed on the ultra-high resolution lens 200 in the microscope apparatus 10 can be remarkably facilitated. This is because it is not necessary to place the observation target S accurately in a specific region (concave portion) of several micrometers in diameter as in the prior art. Accordingly, the practicality and convenience of the ultra high resolution lens 200 and the microscope apparatus 10 including the ultra high resolution lens 200 can be further improved.

According to one embodiment, the microscope apparatus 10 may further include a shape- The shape deforming unit 140 can function to deform the shape of the ultra high resolution lens 200 and to fix the ultra high resolution lens 200 in a deformed state.

Specifically, the shape-deforming portion 140 may be a device for bending or warping the ultra-high resolution lens 200. In this case, the ultra high resolution lens 200 is configured so that its shape can be deformed. For example, the substrate 220 of the ultra-high resolution lens 200 can be formed in a flexible manner. According to one example, the shape deforming portion 140 may be an apparatus configured to push both side ends of the ultra high resolution lens 200 close to each other, as shown in FIG. 6B, which will be described later. In this case, the ultra-high resolution lens 200 can be bent by being pushed inward at both ends thereof, so that a concave portion can be formed in the ultra high resolution lens 200. Alternatively, as shown in FIG. 6C, the shape deforming unit 140 is configured to grasp both end portions of the ultra-high resolution lens 200 and to rotate the super-high resolution lens 200 in opposite directions to deform the ultra high resolution lens 200 into a concave shape Device. In addition, any device capable of deforming and maintaining the shape of the ultra-high resolution lens 200 can function as the shape deforming portion 140.

The shape deforming section 140 deforms the shape of the ultra high resolution lens 200 after the observation target S is placed on one side of the ultra high resolution lens 200. [ That is, before the observation object S is placed, the ultra-high resolution lens 200 is maintained in a flat plate shape, so that the outer surface on which the observation object S is to be placed can be provided in a plane. When the observation object S is placed on the outer surface of the ultra high resolution lens 200, the shape deforming portion 140 operates to bend or warp the ultra high resolution lens 200 to make the portion on which the observation object S lies It can be concave. As the shape deforming section 140 is operated, the ultra-high resolution lens 200 has a concave shape on the front surface and at the same time, the observation object S is positioned inside the naturally concave portion. The image of the observation target S can be enlarged.

The shape deforming unit 140 deforms the shape of the ultra high resolution lens 200 as described above and then changes the shape of the ultra high resolution lens 200 in a deformed shape while the observation target S is observed through the microscope 10 Can be maintained.

Hereinafter, various embodiments 200a to 200c of the ultra-high resolution lens 200 described above with reference to FIGS. 2 to 6C will be described in detail.

2 schematically shows a cross-sectional view of an example of an ultra-high resolution lens 200a of the first embodiment of FIG. 1, and FIG. 3 is a perspective view of the ultra high resolution lens 200a of FIG. Fig. 4 schematically shows a cross-sectional view of another example 200b of the first embodiment of the ultra-high resolution lens of Fig.

2 to 4, the hyper lens layer 210 of the ultra high resolution lenses 200a and 200b according to the first embodiment includes an auxiliary lens layer 212 formed in a flat plate shape, And may include a formed main lens layer 211. In this case, the outer surface, i.e., the front surface, of one side of the auxiliary lens layer 212 can be the surface FS on which the observation target lies, and the auxiliary lens layer 212 is scattered from the observation target S placed on the front surface thereof And transmits the extinction wave of the emitted light to the main lens layer 211. The main lens layer 211 is stacked on the rear surface of the auxiliary lens layer 212 such that the concave portion of the front surface faces the auxiliary lens layer 212. The auxiliary lens layer 212 amplifies the extinguishing wave component transmitted from the auxiliary lens layer 212, And enlarges the image of the observation object S through the concave portion to make a distant view of the observation object S. To this end, the disappearing wave from the rear surface of the auxiliary lens layer 212 may be incident on the concave portion of the main lens layer 211.

Specifically, the main lens layer 211 can form an anisotropic meta-material through a structure in which a plurality of dielectric layers 211d and a plurality of metal layers 211m are alternately stacked. Particularly, the main lens layer 211 has the dielectric constant of the dielectric layer 211d and the dielectric constant of the metal layer 211m that are opposite to each other in the radial direction effective permittivity epsilon r and the tangential direction permittivity epsilon &thetas; Anisotropic meta-material can be formed. If the thicknesses of the sequentially stacked dielectric layers 211d and metal layers 211m are much smaller than the wavelength of light incident thereon, for example only a fraction of a wavelength, 211d and the metal layers 211m as a single material having uniform properties and exhibits one effective permittivity characteristic.

According to one embodiment, the main lens layer 211 may form an anisotropic meta-material with respect to light in a wavelength range of 400 to 700 nm, that is, visible light. Accordingly, when the extinction wave generated due to the visible light is incident on the main lens layer 211, it can be changed to a traveling wave without being attenuated.

For example, the dielectric layer 211d of the main lens layer 211 may be titanium oxide (Ti 3 O 5 ) and the metal layer 211m of the main lens layer 211 may be silver (Ag). At this time, the dielectric layer 211d and the metal layer 211m of the main lens layer 211 may each have a thickness of 15 nm to 30 nm, and the same number of the dielectric layers 211d and the metal layer 211m alternate with each other, . For example, as shown in FIG. 2, nine dielectric layers 211d and nine metal layers 211m may be alternately stacked to form the main lens layer 211. In this case, as shown in FIG. In this case, the wavelength of the visible light emitted from the light source 110 may have a length of preferably 400 to 500 nm. More preferably, visible light having a wavelength of 410 nm can be irradiated from the light source unit 110. [

As another example, the dielectric layer 211d of the main lens layer 211 may be made of a material containing silicon (Si), and the metal layer 211m of the main lens layer 211 may be silver (Ag). For example, the dielectric layer 211d of the main lens layer 211 may be a non-crystalline or amorphous silicon thin film formed through sputtering. Also in this case, the dielectric layer 211d and the metal layer 211m may each have a thickness of 15 nm to 30 nm, and nine or more layers may be alternately stacked to form the main lens layer 211. When the main lens layer 211 is formed according to this example, visible light having a wavelength of 500 to 650 nm may be preferably irradiated from the light source part 110. [

3, the main lens layer 211 is formed by stacking the dielectric layers 211d of the main lens layer 211 and the metal layers 211m of the main lens layer 211 to form concave hemispheres hemispherical < / RTI > In this case, unlike the case where the concave portion of the main lens layer 211 is formed into a semi-cylindrical shape, a two-dimensional long-distance image can be formed when the unpolarized general light is irradiated from the light source portion 110. That is, the main lens layer 211 can simultaneously amplify and expand not only the x-direction component of the extinction wave but also the y-direction component, so that the two-dimensional shape of the observation object S is formed behind the main lens layer 211 The reflected distant view can be created.

Here, the diameter of the hemisphere forming the concave portion is preferably 100 nm, but the size of the concave portion is not limited thereto. When the diameter of the hemisphere is larger than this diameter, the annihilation wave emitted from the rear surface of the auxiliary lens layer 212 may pass through the hollow space formed by the concave portion and be lost before being incident on the main lens layer 211. Therefore, when the diameter of the hemisphere is larger than the diameter of the hemispherical member, a support member 230 is inserted into the concave portion for use as described later, or a factor capable of acting as an intermediary for delivering the extermination wave in the hollow space, As shown in FIG.

Meanwhile, the auxiliary lens layer 212 is a layer that transmits the decaying wave generated due to the visible light to the main lens layer 211 without attenuating the magnitude thereof. The auxiliary lens layer 212 includes a main lens layer 211, the surface thereof may be formed flat. At this time, the auxiliary lens layer 212 may be laminated on the entire surface of the main lens layer 211 so as to cover the concave portion of the main lens layer 211. The auxiliary lens layer 212 may have the same lamination structure as the main lens layer 211, or may have a different lamination structure.

At this time, the observation object S can be placed in close contact with the front surface of the auxiliary lens layer 212, and the light from the observation object S passes through the auxiliary lens layer 212 And may be configured to be incident on the concave portion of the rear main lens layer 211. A plurality of concave portions may be provided on the front surface of the main lens layer 211. At this time, the plurality of concave portions may be arranged in a lattice form to form an array. In this case, even if the observation target S is placed on the front surface of the auxiliary lens layer 212, any one of a plurality of concave portions can be positioned behind the observation target S, and eventually, Can be incident on one.

According to one example, the distance between two concave portions adjacent to each other among the plurality of concave portions may be substantially equal to the diameter of the hemisphere formed by the concave portion. In this case, the plurality of concave portions formed in the main lens layer 211 form a tight embossing structure, and light emitted from the observation target S can be emitted from the light source, regardless of the position of the observation target S placed on the front surface of the auxiliary lens layer 212 The probability of incidence near the center of any one of the concave portions can be increased. Thus, the performance of the ultra high resolution lens can be further improved.

Since the auxiliary lens layer 212 laminated on the front surface of the main lens layer 211 is formed in a flat plate shape, the surface FS on which the object to be observed lies on the hyper lens layer 210 can form a plane. This is not always when the observation object S is placed on the surface but also before and after the observation object S is placed. Accordingly, even when the user wants to observe an object having a size smaller than the diffraction limit of the visible ray by using the ultra-high resolution lens, it is not necessary to accurately place the observation target S in the concave portion of several micrometers in diameter. The hyper lens layer 210 can make an enlarged image of the observation target S simply by placing the observation object S on the surface of the flat auxiliary lens layer 212 by the user. Therefore, the practicality and convenience of the ultra-high resolution lens and the microscope apparatus 10 including the ultra high resolution lens can be improved.

Specifically, according to one embodiment, the auxiliary lens layer 212 may form a meta-material that causes a surface plasmon phenomenon with respect to visible light. 2 and 4, the hyper lens layers 210 including the auxiliary lens layer 212 forming the meta-material as described above are illustrated.

2 and 3, the hyper lens layer 210 may include an auxiliary lens layer 212 formed by alternately laminating a plurality of dielectric layers 212d and a plurality of metal layers 212m. At this time, the dielectric layer 212d of the auxiliary lens layer 212 is titanium oxide, and the metal layer 212m of the auxiliary lens layer 212 may be silver (Ag). At this time, the metal layer 212m of the auxiliary lens layer 212 may have a thickness of 30 nm, 33 nm, or 66 nm, and the dielectric layer 212d may have a thickness of 28 nm. For example, the auxiliary lens layer 212 includes a metal layer 212m of 33 nm, a dielectric layer 212d of 28 nm, a metal layer 212m of 30 nm, a dielectric layer 212d of 28 nm, and a metal layer 212m of 33 nm May be laminated three times repeatedly. In this case, as shown in FIG. 2, a structure in which six dielectric layers 212d and seven metal layers 212m are alternately stacked is formed, wherein the dielectric layer 212d has a thickness t1 of 33 nm, The thickness t2 of the first metal layer 212m or the thickness t3 of 66 nm formed by stacking two 33 nm metal layers 212m.

Alternatively, according to the example shown in FIG. 4, the hyper lens layer 210 may include an auxiliary lens layer 212 made of a single metal layer 212m. In this case, the thickness t4 of the metal layer 212m forming the auxiliary lens layer 212 may be 50 nm.

Although not shown in the figures, according to another embodiment, the auxiliary lens layer 212 may be configured to form an anisotropic meta-material with respect to visible light, similar to the main lens layer 211. [ In this case, the auxiliary lens layer 212 can amplify the extinction wave caused by the visible light and change it to a traveling wave, and the traveling wave can be incident on the main lens layer 211. The main lens layer 211 can enlarge the image of the observation target S by changing the traveling direction of the traveling wave. In this embodiment, according to one example, the dielectric layer of the auxiliary lens layer 212 may be titanium oxide and the metal layer may be silver (Ag). Here, nine dielectric layers and nine metal layers, each having a thickness of 15 nm, are alternately stacked to form the auxiliary lens layer 212. According to another example, the dielectric layer of the auxiliary lens layer 212 may be made of a silicon (Si) thin film instead of titanium oxide. If the auxiliary lens layer 212 is constructed as described above, preferably the dielectric layer of the main lens layer 211 may also be made of the same material as the dielectric layer of the auxiliary lens layer 212.

The hyper lens layer 210 may be supported by the substrate 220. The substrate 220 used in the above-described embodiments may be made of quartz, glass or the like having excellent optical characteristics, and these materials may be used alone or in combination. Among them, the use of the quartz substrate 220 having little impurities can facilitate the formation of the main lens layer 211. The substrate 220 is formed to be transparent so that light passing through the hyper lens layer 210 can be emitted to the outside without attenuation. Here, transparent means that the light transmittance is 70% or more, preferably 80% or more, more preferably 90% or more.

Meanwhile, the hyper lens layer 210 of the ultra-high resolution lenses 200a and 200b of the first embodiment may further include a support member 230 inserted into the concave portion of the main lens layer 211. The support member 230 may be formed in a shape and size corresponding to the concave portion of the main lens layer 211. [ For example, when the concave portion is formed hemispherically, the support member 230 may also be a hemispherical member having a diameter substantially equal to the concave portion. When the supporting member 230 is inserted into the concave portion of the main lens layer 211, the outer surface of the supporting member 230 is flush with the front surface of the main lens layer 211 or the surface of the substrate 220 Can be achieved.

The outer surface of the support member 230 may contact the rear surface of the auxiliary lens layer 212 stacked on the front surface of the main lens layer 211 to support the auxiliary lens layer 212. That is, although the support member 230 is inserted into the concave portion of the main lens layer 211 to support the auxiliary lens layer 212, the concave portion is formed on the entire surface of the main lens layer 211, 212 may be formed in a plane. By providing the supporting member 230, the laminated structure of the auxiliary lens layer 212 and the main lens layer 211 can be more stably formed.

The supporting member 230 can fill the concave portion of the front surface of the main lens layer 211 to transmit the annihilation wave emitted from the rear surface of the auxiliary lens layer 212 to the surface of the concave portion of the main lens layer 211 . In the case where the concave portion without the support member 230 is formed as an empty space, if the size of the hollow space inside the concave portion is larger than several hundred nanometers, the annihilation wave emitted from the rear surface of the auxiliary lens layer 212 is transmitted through the main lens layer 0.0 > 211 < / RTI > The support member 230 fills the empty space to allow the annihilation wave to be incident on the main lens layer 211 without attenuation.

The support member 230 is formed of a transparent material so that light passing through the auxiliary lens layer 212 can pass through the main lens layer 211 without being attenuated. Here, transparent means that the light transmittance is 70% or more, preferably 80% or more, more preferably 90% or more. For example, the support member 230 may be made of polydimethylsiloxane (PDMS) or polyimide having a high light transmittance.

5 shows a method of manufacturing the ultra-high resolution lenses 200a and 200b of the first embodiment.

Referring to FIG. 5, in order to manufacture the ultra-high resolution lenses 200a and 200b of the first embodiment, a main lens layer 211 may be formed on the substrate 220. FIG. A concave portion may be formed on the front surface of the main lens layer 211. For this purpose, the concave portion of the main lens layer 211 may be formed on the entire surface of the substrate 220 prior to the formation of the main lens layer 211 A depression of shape and size can be formed. The depressions may be formed through nanoimprinting, electron beam milling, or etching. The main lens layer 211 may be formed by alternately depositing a plurality of dielectric layers and a plurality of metal layers so as to be in close contact with the surface of the depression. In some cases, the dielectric layer may be formed through a sputtering process instead of the vapor deposition process.

After forming the main lens layer 211 having a concave portion on the front surface, the supporting member 230 can be inserted into the concave portion. As shown in FIG. 5, the support member 230 may be a member having a hemispherical shape. The supporting member 230 may be disposed such that the bottom surface of the hemispherical shape faces the front surface of the main lens layer 211, and the bottom surface forms the outer surface of the main lens layer 211. The outer surface of the support member 230 forms the same plane as the front surface of the main lens layer 211 and this can be the basis for forming the auxiliary lens layer 212 in the shape of a flat plate.

The auxiliary lens layer 212 may be formed on the front surface of the main lens layer 211 while the supporting member 230 is inserted into the concave portion of the front surface of the main lens layer 211. [ At this time, the auxiliary lens layer 212 may be stacked so as to cover the outer surface of the support member 230. For example, the auxiliary lens layer 212 may be formed by depositing a metal layer on the front surface of the main lens layer 211 and the outer surface of the supporting member 230. If desired, a dielectric layer of the auxiliary lens layer 212 may be further deposited. Here, the metal layer and / or the dielectric layer constituting the auxiliary lens layer 212 are deposited in a planar shape, so that a plate-shaped auxiliary lens layer 212 can be formed.

The auxiliary lens layer 212 is directly deposited on the main lens layer 211 and the support member 230 so that the main lens layer 211 and the auxiliary lens layer 212 are firmly coupled to each other without a separate bonding process A hyper lens layer 210 of the structure can be manufactured. In addition, by inserting the supporting member 230 to fill the concave portion of the front surface of the main lens layer 211, it is possible to easily form the auxiliary lens layer 212 having a flat shape on the surface having the concave portion.

On the other hand, the method of manufacturing the ultra-high resolution lenses 200a and 200b of the first embodiment is not limited to the above-described embodiments. For example, it is also possible to form the auxiliary lens layer 212 on the separable flat plate member first, unlike the above-described embodiment. In this case, one or more supporting members 230 may be disposed on the surface of the auxiliary lens layer 212 formed through the deposition process, and then the main lens layer 211 may be stacked thereon. At this time, the support member 230 may be disposed such that the bottom surface of the hemispherical shape of the support member 230 is in contact with the surface of the auxiliary lens layer 212. The main lens layer 211 is laminated on the curved surface of the support member 230 so that the concave portion surrounding the support member 230 can naturally be formed on the entire surface of the main lens layer 211. [ When manufacturing an ultra-high resolution lens according to this embodiment, it is possible to more easily form the concave portion of the main lens layer 211. In addition, when a plurality of support members 230 are disposed on the auxiliary lens layer 212, a plurality of concave portions can be formed at one time on the main lens layer 211, and the ultra-high resolution lenses 200a and 200b, The process efficiency can be improved.

Alternatively, a method may be used in which the above-described main lens layer 211 and auxiliary lens layer 212 are separately prepared and then bonded using an adhesive or the like.

6A to 6C schematically show cross-sectional views of a second embodiment 200c of the ultra-high resolution lens of FIG.

Referring to FIG. 6A, the hyper lens layer 210 of the ultra-high resolution lens 200c according to the second embodiment may include a main lens layer 211. FIG. At this time, the main lens layer 211 is laminated on the substrate 220 in a flat shape. Here, to be laminated in a flat shape may mean that the concave or convex portion is not formed on the outer surface and the outer surface forms a plane. In this case, the outer surface of one side of the main lens layer 211, that is, the front surface may be the surface FS on which the observation target lies, and the main lens layer 211 is scattered from the observation target S placed on the front surface thereof It can be changed to a traveling wave by amplifying the extinguishing wave component in the light. The specific structure and operation of the main lens layer 211 will be described in detail.

Meanwhile, in this embodiment, the substrate 220 is formed to be flexible. The flexible substrate 220 may be maintained in a flat configuration as shown in FIG. 6A when no force is applied and may be configured to bend or flex as shown in FIGS. 6B and 6C when a force is applied have. Also in this case, the substrate 220 is formed to be transparent so that light passing through the hyper lens layer 210 can be emitted to the outside without attenuation. That is, the flexible substrate 220 may have a light transmittance of 70% or more, preferably 80% or more, and more preferably 90% or more.

For example, the substrate 220 may be made of any one of polydimethylsiloxane (PDMS) and polyimide. PDMS or polyimide has a high light transmittance while being well warped like rubber, and thus has excellent light transmittance. In addition, it has a refractive index similar to that of glass or quartz, and can optically be an excellent substitute for glass or quartz.

In this embodiment, irregularities may be formed on the surface of the flexible substrate 220 which is in contact with the hyper lens layer 210. Such irregularities can be obtained by surface-treating the substrate 220 made of PDMS or polyimide. The hyper lens layer 210, i.e., the main lens layer 211, may be formed by alternately depositing a plurality of dielectric layers 211d and a plurality of metal layers 211m on the uneven surface. The flexible substrate 220 and the main lens layer 211 can be firmly coupled to each other through the irregularities, and thus the durability of the ultra-high resolution lens 200c can be improved.

When the flexible substrate 220 is warped or bent, the main lens layer 211 laminated on one side thereof is bent or bent corresponding to the shape of the substrate 220. [ When the main lens layer 211 is bent or bent in a specific shape, a concave curved surface may be formed on the front surface of the main lens layer 211. The concave curved surface formed on the front surface of the main lens layer 211 can enlarge the image of the observation target S by changing the direction of the light transmitted inside the main lens layer 211.

The flexible substrate 220 is kept flat at the time when the observation object S is placed on the surface of the hyper lens layer (the main lens layer 211), and the observation object S is held on the front surface of the main lens layer 211 It can be bent. At this time, the substrate 220 may be bent or bent in such a form that the surface FS on which the object to be observed lies on the hyper lens layer 210, that is, the front surface of the main lens layer 211 becomes a concave curved surface. 6B shows an example in which the substrate 220 is curved such that a force (see arrows) is applied on both sides of the substrate 220 in a direction parallel to the plane so that the surface FS on which the object to be observed lies is a concave curved surface, In Fig. 6C, an example in which the substrate 220 is bent such that a force (indicated by an arrow) which is convexly bent downward on the substrate 220 is applied so that the surface FS on which the object to be observed is concave is shown. When the front surface of the main lens layer 211 is deformed into a concave curved surface, the observation object S placed thereon is naturally located in the concave portion of the main lens layer 211. The substrate 220 may be fixed in a deformed state while the observation object S is observed through the microscope device 10 after the substrate 220 is bent or bent as described above.

The shape deformation and fixing of the flexible substrate 220 can be performed by the shape deforming unit 140 described above. The shape deforming section 140 maintains the substrate 220 in a flat state until the observation object S is placed on the entire surface of the main lens layer 211 and forces the substrate 220 on the substrate 220 And to deform the shape of the substrate 220. [0050] The shape deformations 140 are also controlled so as to continue to apply force to the substrate 220 during observation to keep the substrate 220 in a deformed shape and to stop applying force to the substrate 220 after the observation is completed .

According to the present embodiment, since the substrate 220 is kept flat when the main lens layer 211 is laminated on the substrate 220 in a flat shape and the observation target S is placed on the hyper lens layer 210, The surface FS on which the object to be observed lies on the hyper lens layer 210 can form a plane at the time when the observation object S is placed. Thereafter, as the shape of the substrate 220 is deformed, a concave portion is formed in the main lens layer 211, and the observation target S is inserted into the concave portion. As a result, the image of the observation object S can be enlarged through the main lens layer 211, and the ultra-high resolution lens can act as a hyper lens. Accordingly, it is not necessary for the user to accurately place the observation target S in the concave portion of several micrometers in diameter, and by merely placing the observation target S on the surface of the plane hyper lens layer 210, Can operate. Therefore, the practicality and convenience of the ultra-high resolution lens and the microscope apparatus 10 including the ultra high resolution lens can be improved.

Although the ultrahigh resolution lens and the microscope apparatus including the ultrahigh resolution lens according to the embodiments of the present invention have been described above as specific embodiments, the present invention is not limited thereto, and the present invention is not limited thereto. Range. ≪ / RTI > Skilled artisans may implement a pattern of features that are not described in a combinatorial and / or permutational manner with the disclosed embodiments, but this is not to depart from the scope of the present invention. It will be apparent to those skilled in the art that various changes and modifications may be readily made without departing from the spirit and scope of the invention as defined by the appended claims.

10: microscope device 110: light source
120: objective lens 130:
140: Shape deforming unit 200, 200a, 200b: ultra-high resolution lens
210: Hyper lens layer 220:
211: main lens layer 211d: dielectric layer of the main lens layer
211m: metal layer of the main lens layer 212: auxiliary lens layer
212d: dielectric layer of the auxiliary lens layer 212m: metal layer of the auxiliary lens layer
230: Support member S: Observation object

Claims (23)

A hyper lens layer capable of forming an image of the object to be observed using an annihilation wave of light from an object placed on one surface and enlarging an image of the object to be observed; And
And a substrate for covering the other surface of the hyper lens layer and supporting the hyper lens layer,
Wherein the one surface of the hyper lens layer forms a plane when at least the object to be observed is placed. The method according to claim 1,
Wherein the hyper lens layer comprises:
An auxiliary lens layer having a flat plate shape with one outer surface forming the one surface; And
And a main lens layer formed on the other side of the auxiliary lens layer such that at least a part of the outer surface is concave and the concave portion faces the auxiliary lens layer. 3. The method of claim 2,
Wherein the concave portion is a hemisphere type ultrahigh resolution lens. 3. The method of claim 2,
Wherein the auxiliary lens layer and the main lens layer are formed by stacking a plurality of dielectric layers and a plurality of metal layers alternately with each other. 5. The method of claim 4,
Wherein the dielectric layer is titanium oxide, and the metal layer is silver (Ag). 5. The method of claim 4,
Wherein the dielectric layer is silicon (Si), and the metal layer is silver (Ag). 5. The method of claim 4,
Wherein the dielectric layer of the auxiliary lens layer is made of a material different from the dielectric layer of the main lens layer. 8. The method of claim 7,
Wherein the metal layer is silver (Ag)
Wherein the dielectric layer of the auxiliary lens layer is titanium oxide,
Wherein the dielectric layer of the main lens layer is a material containing silicon (Si). 9. The method of claim 8,
Wherein the dielectric layer of the main lens layer is an amorphous silicon thin film. 10. The method according to any one of claims 5 to 9,
Wherein the number of dielectric layers and metal layers of the auxiliary lens layer is different from the number of dielectric layers and metal layers of the main lens layer. 11. The method of claim 10,
Wherein the auxiliary lens layer is formed by alternately stacking six dielectric layers and seven metal layers,
Wherein the main lens layer is formed by alternately laminating nine dielectric layers and nine metal layers. 12. The method of claim 11,
Wherein the metal layer of the auxiliary lens layer has a thickness of one of 30 nm, 33 nm, and 66 nm, the dielectric layer of the auxiliary lens layer has a thickness of 28 nm,
The dielectric layer and the metal layer of the main lens layer each have a thickness of 15 nm. 3. The method of claim 2,
Wherein the main lens layer is formed by stacking a plurality of dielectric layers and a plurality of metal layers alternately,
Wherein the auxiliary lens layer is a metal layer made of silver (Ag). 14. The method of claim 13,
The dielectric layer and the metal layer of the main lens layer each have a thickness of 15 nm,
Wherein the auxiliary lens layer has a thickness of 50 nm. The method according to claim 1,
Wherein the hyper lens layer is composed of a main lens layer laminated on the substrate in a flat form so that one outer surface forms the one surface,
Wherein the substrate is flexible and is fixed in a bent state such that the one surface of the hyper lens layer becomes a concave surface after the observation object is placed on the one surface. 16. The method of claim 15,
Wherein the substrate is made of any one of polydimethylsiloxane (PDMS) and polyimide. 16. The method of claim 15,
And an uneven surface is formed on the surface of the substrate which is in contact with the hyper lens layer. 16. The method of claim 15,
Wherein the main lens layer is formed by stacking a plurality of dielectric layers and a plurality of metal layers alternately,
Wherein the dielectric layer is a silicon (Si) thin film, and the metal layer is silver (Ag). 19. The method of claim 18,
The dielectric layer and the metal layer each have a thickness of 15 nm. A light source for irradiating visible light;
An ultra-high resolution lens in which an object to be observed is placed on one surface and light emitted from the light source is incident on the one surface; And
And an objective lens for condensing light emitted from the other surface of the ultra high resolution lens,
The ultra-high resolution lens includes:
A hyper lens layer capable of forming an image of the observation object using an annihilation wave of light from the observation object and enlarging an image of the observation object; And
And a substrate for covering the other surface of the hyper lens layer and supporting the hyper lens layer,
Wherein the one surface of the hyper lens layer forms a plane when at least the object to be observed is placed. 21. The method of claim 20,
Wherein the hyper lens layer comprises:
An auxiliary lens layer having a flat plate shape with one outer surface forming the one surface; And
Wherein at least a part of the outer surface is concave and the concave portion is laminated on the other side of the auxiliary lens layer so as to face the auxiliary lens layer. 21. The method of claim 20,
Wherein the hyper lens layer is composed of a main lens layer laminated on the substrate in a flat form so that one outer surface forms the one surface,
Wherein the substrate is flexible and is bent and bent so that the one surface of the hyper lens layer becomes a concave surface after the observation object is placed on the one surface.
23. The method of claim 22,
And a shape deforming unit for holding the substrate in a bent state.
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