KR20160129323A - Bio chemical sensors and manufacturing method thereof - Google Patents

Bio chemical sensors and manufacturing method thereof Download PDF

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Publication number
KR20160129323A
KR20160129323A KR1020150061268A KR20150061268A KR20160129323A KR 20160129323 A KR20160129323 A KR 20160129323A KR 1020150061268 A KR1020150061268 A KR 1020150061268A KR 20150061268 A KR20150061268 A KR 20150061268A KR 20160129323 A KR20160129323 A KR 20160129323A
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South Korea
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electrode
mold
electrode material
substrate
curable
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KR1020150061268A
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Korean (ko)
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이승섭
김진하
이현정
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한국과학기술원
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Priority to KR1020150061268A priority Critical patent/KR20160129323A/en
Publication of KR20160129323A publication Critical patent/KR20160129323A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54306—Solid-phase reaction mechanisms

Abstract

A biochemical sensor according to an embodiment includes: a substrate; And an electrode disposed on the substrate, wherein the electrode includes at least one vertical portion formed in a direction perpendicular to the substrate.

Description

TECHNICAL FIELD [0001] The present invention relates to a biochemical sensor and a method for manufacturing the biochemical sensor,

The present invention relates to a biochemical sensor and a method of manufacturing a biochemical sensor.

A biomolecule detection device (i.e., a biosensor) is an element capable of sensing an optical or electrical signal that changes depending on selective reaction and binding between a biological receptor having a recognition function for a specific biomolecule and an analyte to be analyzed . That is, the biosensor can confirm the presence of biomaterials, or analyze qualitatively or quantitatively. Here, as the biological receptor (i.e., sensing substance), an enzyme, an antibody, and DNA capable of selectively reacting with and binding to a specific substance are used. As a signal detection method, biomaterials are detected and analyzed by using various physicochemical methods such as electrical myth change depending on presence or absence of analyte and optical myth change due to chemical reaction of receptor and analyte.

In order to detect a component in the fluid, a chemical or an anti-body is coated on a flat electrode, and a change in a signal depending on the bonding state is measured to check the presence or absence of the component. At this time, most of the sensors use the micro chamber / channel to minimize the volume of the sample to be measured and to simplify the size of the sensor itself. However, when such a microchamber / channel is used, the fluid flowing inside is very close to the laminar flow with almost no flow, so that exchange between the solutions hardly occurs.

Therefore, after the component is detected on the chemical or anti-body coated on the electrode surface, the amount of the component detected while passing through the channel is sharply reduced because the component is not supplied again from the surrounding solution, Is very small.

The most straightforward way to solve this problem is to increase the surface area of the electrode and to improve the signal by making electrodes on several sides of the channel or by extending the length of the channel. However, when electrodes are formed on various surfaces of the channel, the process becomes very difficult. If the length of the channel becomes longer, the volume of the sensor becomes larger and the driving pressure becomes higher. Although a three-dimensional structure is added inside the channel to enhance the signal by forcibly mixing the flow, there is a limitation that additional structures must be additionally manufactured. If the structure interferes with the electrode, it has a limit that has adverse effect.

Korean Patent Publication No. 10-2014-0077745 (Apr. 26, 2014)

It is an object of the present invention to provide a method of manufacturing a biochemical sensor and a biochemical sensor that can increase the surface area of an electrode and complicate the flow of a fluid.

It is another object of the present invention to provide a method of manufacturing a biochemical sensor and a biochemical sensor which can be implemented at low cost with high sensitivity.

A biochemical sensor according to an embodiment includes: a substrate; And an electrode disposed on the substrate, wherein the electrode includes at least one vertical portion formed in a direction perpendicular to the substrate.

The electrode may further include a curable material that couples the substrate and the electrode between the substrate and the electrode.

Here, the electrode may further include a horizontal portion covering the entire surface of the curable material and having a predetermined thickness, and the vertical portion may be formed on the horizontal portion.

Here, the electrode may include a porous material.

Here, the electrode surface may be coated with an anti-body or a chemical agent.

Here, a microneedle array connected to one end of the substrate may be further included.

According to another aspect of the present invention, there is provided a method of manufacturing a biochemical sensor, including: applying an electrode material to a mold having one or more grooves; An electrode material compression step of compressing the applied electrode material so that the electrode material is filled in the groove of the mold; Removing the electrode material remaining on the mold after the electrode material is filled in the groove of the mold or partially removing the electrode material so that the electrode material remains on the mold with a predetermined thickness, ; In the case where the electrode material remaining on the mold is removed in the electrode material removing step, a curable material is coated on the electrode material and the mold, or the electrode material is coated on the mold so that the electrode material remains on the mold. Coating a curable material on the electrode material when the electrode material is partially removed; A substrate bonding step of bonding the substrate on the curable material; A curing step of curing the curable material and then curing the electrode material through heating; And a mold removing step of removing the mold.

Here, the electrode material may be a porous material.

Here, after the step of removing the mold, an anti-body or a chemical group may be coated on the surface of the electrode.

Here, after the step of removing the mold, a step of connecting a microneedle array to one end of the substrate may be further included.

According to an embodiment of the present invention, there is provided a biochemical sensor comprising: a lower substrate; An electrode disposed on the lower substrate; And an upper substrate covering the electrode and having a part thereof bonded to an upper surface of the lower substrate so as to form a channel between the upper surface and the lower surface of the lower substrate, And at least one vertical portion formed.

The lower substrate may further include a curable material that couples the lower substrate and the electrode between the lower substrate and the electrode.

According to another aspect of the present invention, there is provided a method of manufacturing a biochemical sensor, including: applying an electrode material to a mold having one or more grooves; An electrode material compression step of compressing the applied electrode material so that the electrode material is filled in the groove of the mold; Removing the electrode material remaining on the mold after the electrode material is filled in the groove of the mold or partially removing the electrode material so that the electrode material remains on the mold with a predetermined thickness, ; In the case where the electrode material remaining on the mold is removed in the electrode material removing step, a curable material is coated on the electrode material and the mold, or the electrode material is coated on the mold so that the electrode material remains on the mold. A curable material coating step of coating a curable material on the electrode material when a part of the curable material is removed; A lower substrate bonding step of bonding the lower substrate on the curable material; A curing step of curing the curable material and then curing the electrode material through heating; A mold removing step of removing the mold; And an upper substrate bonding step of covering the electrode and bonding a part of the upper substrate to the upper surface of the lower substrate to form a channel between the lower substrate and the upper substrate.

According to the biochemical sensor according to the embodiment, since the electrode is formed in a direction perpendicular to the substrate, even if the length of the conventional sensor and the channel are the same, the height of the electrode is different and the surface area is wide. The sensitivity can be improved and the surface area of the electrode can be increased.

According to the biochemical sensor according to the embodiment, since the electrode covers the entire surface of the curable material and includes a horizontal portion formed to a predetermined thickness, the surface area of the electrode can be further increased.

According to the biochemical sensor according to the embodiment, since the electrode includes the porous material, the flow of the fluid can be further complicated.

According to the biochemical sensor according to the embodiment, since the surface of the electrode is coated with the anti-body or the chemical agent, the detection of the component of the fluid can be made easier.

According to the biochemical sensor according to the embodiment, since the micro needle array is connected to one end of the substrate, the biochemical sensor is directly applied to the human body and the blood collected through the micro needle is directly introduced into the channel, Can be measured.

According to the manufacturing method of the biochemical sensor according to the embodiment, since the electrode is formed by filling the groove of the mold with the electrode material, it is possible to easily manufacture the three-dimensional electrode structure having complicated and various patterns in one step So that it is possible to easily manufacture the sensor without having to construct a separate structure inside the channel, and it can be manufactured at a lower cost than the conventional one.

According to the method of manufacturing a biochemical sensor according to the embodiment, since the electrode material is partially removed so that the electrode material remains on the mold to a predetermined thickness, an electrode is formed on the bottom surface to further increase the surface area of the electrode capable of sensing .

According to the method of manufacturing a biochemical sensor according to the embodiment, since the electrode includes a porous material, the flow of the fluid can be further complicated.

According to the method for producing a biochemical sensor according to the embodiment, since an anti-body or a chemical group is coated on the surface of the electrode, the detection of the component of the fluid can be made easier.

According to the method of manufacturing a biochemical sensor according to the embodiment, since the micro needle array is connected to one end of the substrate, the biochemical sensor is directly applied to the human body and the blood collected through the micro needle is directly introduced into the channel, The internal components can be measured.

The biochemical sensor according to the embodiment includes the upper substrate which covers the electrode and has a part thereof bonded to the upper surface of the lower substrate so as to form a channel between the upper surface and the lower surface of the lower substrate, And the height of the electrode is different even if the length of the conventional sensor and the length of the channel are the same. Therefore, the flow of the fluid passing through the channel can be complicated.

According to the manufacturing method of the biochemical sensor according to the embodiment, since the electrode is formed by filling the groove of the mold with the electrode material, it is possible to easily manufacture the three-dimensional electrode structure having complicated and various patterns in one step It is possible to easily manufacture a sensor without manufacturing a separate structure inside the channel and to manufacture the sensor at a lower cost than in the prior art, and to cover the electrode and to connect a part of the upper substrate to the upper surface of the lower substrate, Since the electrode is formed by allowing the fluid to pass through the inside of the channel and filling the groove of the mold with the electrode material, it is possible to prevent the fluid passing through the inside of the channel The flow can be complicated.

According to the method of manufacturing a biochemical sensor according to the embodiment, since the electrode material is partially removed so that the electrode material remains on the mold to a predetermined thickness, an electrode is formed on the bottom surface to further increase the surface area of the electrode capable of sensing To cover the electrode and to join a portion of the upper substrate to the upper surface of the lower substrate to form a channel between the lower substrate and the upper substrate so that fluid can pass through the channel, Since the electrode is filled with the electrode material in the groove of the mold, the flow of the fluid passing through the channel can be complicated.

1 is a conceptual diagram of a biochemical sensor according to the first embodiment.
2A to 2C are comparative views of a conventional sensor and a biochemical sensor according to the first embodiment.
Fig. 3 shows another example of the biochemical sensor according to the first embodiment.
4A to 4H show a method of manufacturing a biochemical sensor according to the first embodiment.
Figs. 5A to 5H show a manufacturing method of another biochemical sensor according to the first embodiment.
6 is a photograph of the biochemical sensor according to the first embodiment.
7 is a conceptual diagram of a biochemical sensor according to the second embodiment.
8A to 8C are comparative views of a conventional sensor and a biochemical sensor according to the second embodiment.

The following detailed description refers to the accompanying drawings which illustrate, by way of example, specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It should be understood that the various embodiments of the present invention may be different but need not be mutually exclusive. For example, certain features, structures, and characteristics described herein may be implemented in other embodiments without departing from the spirit and scope of the invention in connection with one embodiment. It is also to be understood that the location or arrangement of the individual components within each disclosed embodiment may be varied without departing from the spirit and scope of the present invention. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the present invention is to be limited only by the appended claims, along with the full scope of equivalents to which such claims are entitled, if properly explained. In the drawings, like reference numerals refer to the same or similar functions throughout the several views.

≪ First Embodiment >

1 is a conceptual diagram of a biochemical sensor according to the first embodiment.

Referring to FIG. 1, a biochemical sensor according to the first embodiment may include a substrate 100, a curable material (400 shown in FIG. 4), and an electrode 200. Specifically, the electrode 200 is disposed on the substrate 100 and may be formed in a direction perpendicular to the substrate 100. The curable material 400 bonds the substrate 100 and the electrode 200 between the substrate 100 and the electrode 200.

The biochemical sensor according to the first embodiment can detect blood components by dropping blood on the substrate 100. Therefore, the surface area of the electrode 200 for detecting blood is increased to improve the sensitivity of the sensor.

2A to 2C are comparative views of a conventional sensor and a biochemical sensor according to the first embodiment.

Referring to FIG. 2A, in the conventional sensor, the area of the electrode 600 is narrow, and only the lower end of the fluid comes in contact with the electrode 600, thereby lowering the sensitivity of the sensor.

2B, since the electrode 200 of the biochemical sensor according to the first embodiment is formed in a direction perpendicular to the substrate 100, the height of the electrode 200 The surface area is wide and the volume of the fluid in contact with the electrode 200 in the channel is much increased, thereby improving the sensitivity.

Referring to FIG. 2C, in another biochemical sensor according to the first embodiment, the electrode 200 may be formed on the bottom surface of the substrate 100. Specifically, the electrode 200 of the other biochemical sensor according to the first embodiment includes a horizontal portion 210 covering a front surface (entire surface) of the curable material 400 and having a predetermined thickness, (Not shown). Therefore, the other biochemical sensor according to the first embodiment has a wider surface area, and the volume of the fluid in contact with the electrode 200 in the channel is further increased, thereby further improving the sensitivity. Here, the predetermined thickness may be less than or equal to 10 um so that the electrode 200 does not fall off from the curable material 400.

Here, the electrode 200 may include a porous material, and the porous material may include a silver ink. Silver inks are porous and have a very wide surface area and many irregularities on the surface, which can further improve the performance of the sensor by helping to further complicate the fluid flow inside the channel.

Here, the surface of the electrode 200 may be coated with an anti-body or a chemical group. Therefore, the detection of the component of the fluid can be made easier.

Fig. 3 shows another example of the biochemical sensor according to the first embodiment.

Referring to FIG. 3, a biochemical sensor according to the first embodiment may have a micro needle array connected to one end of a substrate 100. Accordingly, the biochemical sensor according to the first embodiment can be directly applied to the human body, and the blood collected through the micro needle can be directly introduced into the channel, and the components in the blood can be continuously measured.

4A to 4H show a method of manufacturing a biochemical sensor according to the first embodiment. 4A to 4H illustrate a method of manufacturing the biochemical sensor shown in FIG. 2B.

4A and 4B, a method of manufacturing a biochemical sensor according to a first embodiment of the present invention includes applying an electrode material 200 to a mold 300 having at least one groove 310 Application step). Specifically, the electrode material 200 can be applied to the mold 300 having various shapes.

Referring to FIG. 4C, the coated electrode material 200 is compressed to fill the electrode material 200 in the groove 310 of the mold 300 (electrode material compression step). Specifically, the electrode material 200 can be well filled in the gap between the structures of the mold 300 through the compression process. Here, the line width of the electrodes 200 to be formed is generally in the order of microns, and pattern spheres of several um to several hundreds of um can be freely formed simultaneously on the same mold 300. Also, the depth can be formed while freely changing according to a desired shape.

Referring to FIG. 4D, after the electrode material 200 is filled in the groove 310 of the mold 300, the electrode material 200 remaining on the mold 300 is removed (electrode material removing step).

Referring to FIG. 4E, a curable material 400 is coated on the electrode material 200 and the mold 300 (curable material coating step). Specifically, when the electrode material 200 is filled in the groove 310, the electrode material 200 and the surface of the mold 300 are coated with the curable material in a liquid state.

Referring to FIG. 4F, the substrate 100 is bonded onto the curable material 400 (substrate bonding step).

Referring to FIG. 4G, after the curable material is cured, the electrode material 200 is cured by heating (curing step). Specifically, in this process, the curable material is combined with the surface-cured electrode material 200 and has a strong bonding force. Thereafter, the electrode material 200 is also cured through heating to maintain the same solid state as the shape of the groove 310 of the mold 300.

Referring to FIG. 4H, the mold 300 is removed (mold removal step). Specifically, when the mold 300 is removed, the electrode 200, which is a reverse phase of the mold 300, is transferred directly to the substrate 100.

As described above, by using the manufacturing method of a biochemical sensor according to the first embodiment, it is possible to easily manufacture a three-dimensional electrode structure having a complicated and various patterns in one step, It is possible to easily manufacture the sensor without needing to manufacture it, and it can be manufactured at a lower cost than the conventional one.

The method of manufacturing a biochemical sensor according to the first embodiment can realize an electrode shape more accurately than the method of working the electrode material 200 in a liquid state and can realize the shape of the mold 300 as it is, It is possible to form electrodes having a narrow line width as small as several um and to easily manufacture very high aspect ratio structures.

Figs. 5A to 5H show a manufacturing method of another biochemical sensor according to the first embodiment. Specifically, Figs. 5A to 5H show a method of manufacturing the biochemical sensor shown in Fig. 2C. Hereinafter, the duplicated description explained in FIGS. 4A to 4H will be omitted, and the differences will be mainly described.

5A and 5B, another method of manufacturing the biochemical sensor according to the first embodiment first applies an electrode material 200 to a mold 300 having one or more grooves 310 Material application step).

Referring to FIG. 5C, the coated electrode material 200 is compressed so that the electrode material 200 is filled in the groove 310 of the mold 300 (electrode material compression step).

5D, after the electrode material 200 is filled in the groove 310 of the mold 300, the electrode material 200 is partially removed (removed) so that the electrode material 200 remains on the mold 300 to a predetermined thickness (Electrode material removing step). Specifically, the electrodes 200 to be formed include a horizontal portion 210 having a predetermined thickness and a vertical portion 220.

Referring to FIG. 5E, a curable material 400 is coated on the electrode material 200 (curable material coating step). Specifically, when the groove 310 is filled with the electrode material 200, the liquid curable material is coated on the surface of the electrode material 200.

Referring to FIG. 5F, the substrate 100 is bonded onto the curable material 400 (substrate bonding step).

Referring to FIG. 5G, after the curable material is cured, the electrode material 200 is cured by heating (curing step).

Referring to FIG. 5H, the mold 300 is removed (mold removal step).

As described above, by using the manufacturing method of a biochemical sensor according to the first embodiment, an electrode can be formed on the bottom surface to further increase the surface area of the electrode capable of sensing.

Here, in the method of manufacturing the biochemical sensor shown in FIGS. 4 and 5, the electrode material may be a porous material. Therefore, the flow of the fluid can be further complicated.

Here, in the method of manufacturing a biochemical sensor shown in FIGS. 4 and 5, an anti-body or a chemical group may be coated on the surface of the electrode after the step of removing the mold. Therefore, the detection of the component of the fluid can be made easier.

4 and 5, the microneedle array 500 may be connected to one end of the substrate 100 after the step of removing the mold in the method of manufacturing the biochemical sensor shown in FIGS. Therefore, by applying the biochemical sensor directly to the human body, the blood sampled through the micro needle can be directly introduced into the channel and the components in the blood can be continuously measured.

6 is a photograph of the biochemical sensor according to the first embodiment.

6, the electrode 200 according to the first embodiment includes silver ink, and is uniformly formed with a line width of about 3 [mu] m and a height of 15 [mu] m. As can be seen from the cut surface, the substrate 100 and the electrode 200 are tightly coupled even though they are torn by the cutting force. Particularly, when the bottom of the pattern is viewed, it can be seen that the boundaries between the curable material 400 and the electrode 200 are integrated so as to be difficult to distinguish from each other, .

Thus, the transfer through the strong coupling force provides a reliable bonding force to allow the electrode 200 to escape from the mold 300 even after the electrode 200 is dried, and the rigidity of the manufactured structure is excellent. Thus, the pressure of the fluid flowing in the channel The shape of the electrode structure can be maintained without being damaged.

Therefore, the electrode 200 according to the first embodiment has a very narrow line width, and the electrode 200 having a complicated pattern with a high aspect ratio can be easily fabricated in a single process without defect.

≪ Second Embodiment >

Hereinafter, the biochemical sensor according to the second embodiment will be described. Hereinafter, the biochemical sensor according to the first embodiment will be mainly described, but it is needless to say that the configuration applicable to the first embodiment can also be applied to the second embodiment.

7 is a conceptual diagram of a biochemical sensor according to the second embodiment.

Referring to FIG. 7, the biochemical sensor according to the second embodiment may include a lower substrate 100, a hardening material (400 shown in FIG. 4), an electrode 200, and an upper substrate 150. Specifically, the upper substrate 150 may be partially bonded to the lower substrate 100 so as to cover the electrode 200 to form a channel through which the fluid (blood) passes.

The arrow direction shown in Fig. 7 is the moving direction of the fluid (blood) to be measured. The fluid (blood) passes through the channel. At this time, an electrode 200 having a three-dimensional structure in a direction crossing the channel is disposed inside the channel, which further complicates the flow of the fluid in the channel and increases the surface area, thereby improving the sensitivity of the sensor.

8A to 8C are comparative views of a conventional sensor and a biochemical sensor according to the second embodiment.

Referring to FIG. 8A, in the conventional sensor, not only the area of the electrode 600 is narrow, but only the lower end of the fluid flowing in the laminar flow is brought into contact with the electrode 600, so that the sensitivity of the sensor becomes low.

Referring to FIG. 8B, since the electrode 200 of the biochemical sensor according to the second embodiment is formed in a direction perpendicular to the lower substrate 100, the flow of the fluid can be complicated.

Referring to FIG. 8C, the other biochemical sensor according to the second embodiment has a wider surface area and further increases the volume of fluid in contact with the electrode 200 in the channel, thereby further improving the sensitivity. Although the thickness of the upper substrate 150 is shown to be thinner than the thickness of the lower substrate 100 in FIG. 8, the thickness of the lower substrate 100 and the upper substrate 150 may be changed freely Do.

The method of manufacturing a biochemical sensor shown in FIG. 8B is a method in which after the steps of FIGS. 4A to 4E, the electrode 200 is covered and a part of the upper substrate 150 is bonded onto the lower substrate 100 And forming a channel between the lower substrate 100 and the upper substrate 150.

The method of manufacturing a biochemical sensor shown in FIG. 8C is a method in which after the steps of FIGS. 5A to 5E, the electrode 200 is covered and a part of the upper substrate 150 is bonded onto the lower substrate 100 And forming a channel between the lower substrate 100 and the upper substrate 150. Accordingly, a channel that allows fluid to pass between the substrate 100 and the upper substrate 150 may be formed.

As described above, by using the manufacturing method of a biochemical sensor according to the second embodiment, it is possible to manufacture a biochemical sensor capable of allowing a fluid to pass through a channel and complicating the flow of fluid passing through the channel .

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. It can be understood that The features, structures, effects and the like described in the embodiments are included in at least one embodiment of the present invention and are not necessarily limited to only one embodiment. Furthermore, the features, structures, effects and the like illustrated in the embodiments can be combined and modified by other persons skilled in the art to which the embodiments belong. Therefore, it should be understood that the present invention is not limited to these combinations and modifications.

100: substrate
200: electrode
400: Curable material

Claims (13)

Board; And
And an electrode disposed on the substrate,
Wherein the electrode comprises at least one vertical portion formed in a direction perpendicular to the substrate. The method according to claim 1,
And a curable material that couples the substrate and the electrode between the substrate and the electrode. 3. The method of claim 2,
The electrode may further include a horizontal portion covering the entire surface of the curable material and having a predetermined thickness, and the vertical portion may be formed on the horizontal portion. 4. The method according to any one of claims 1 to 3,
Wherein the electrode comprises a porous material. 4. The method according to any one of claims 1 to 3,
Wherein the electrode surface is coated with an anti-body or a chemical group. 4. The method according to any one of claims 1 to 3,
And a microneedle array connected to one end of the substrate. Applying an electrode material to the at least one grooved mold;
An electrode material compression step of compressing the applied electrode material so that the electrode material is filled in the groove of the mold;
Removing the electrode material remaining on the mold after the electrode material is filled in the groove of the mold or partially removing the electrode material so that the electrode material remains on the mold with a predetermined thickness, ;
In the case where the electrode material remaining on the mold is removed in the electrode material removing step, a curable material is coated on the electrode material and the mold, or the electrode material is coated on the mold so that the electrode material remains on the mold. A curable material coating step of coating a curable material on the electrode material when a part of the curable material is removed;
A substrate bonding step of bonding the substrate on the curable material;
A curing step of curing the curable material and then curing the electrode material through heating; And
And a mold removing step of removing the mold. 8. The method of claim 7,
Wherein the electrode material is a porous material. 8. The method of claim 7,
After the mold removal step,
And coating an anti-body or a chemical group on the surface of the electrode. 8. The method of claim 7,
After the mold removal step,
And connecting a microneedle array to one end of the substrate. A lower substrate;
An electrode disposed on the lower substrate;
And an upper substrate covering the electrode and having a part thereof bonded to an upper surface of the lower substrate so as to form a channel between the upper surface and the lower surface of the lower substrate,
Wherein the electrode comprises at least one vertical portion formed in a direction perpendicular to the lower substrate. 12. The method of claim 11,
And a curable material that couples the lower substrate and the electrode between the lower substrate and the electrode. Applying an electrode material to the at least one grooved mold;
An electrode material compression step of compressing the applied electrode material so that the electrode material is filled in the groove of the mold;
Removing the electrode material remaining on the mold after the electrode material is filled in the groove of the mold or partially removing the electrode material so that the electrode material remains on the mold at a predetermined thickness;
In the case where the electrode material remaining on the mold is removed in the electrode material removing step, a curable material is coated on the electrode material and the mold, or the electrode material is coated on the mold so that the electrode material remains on the mold. A curable material coating step of coating a curable material on the electrode material when a part of the curable material is removed;
A lower substrate bonding step of bonding the lower substrate on the curable material;
A curing step of curing the curable material and then curing the electrode material through heating;
A mold removing step of removing the mold; And
And an upper substrate bonding step of covering the electrode and bonding a part of the upper substrate to the upper surface of the lower substrate to form a channel between the lower substrate and the upper substrate.
KR1020150061268A 2015-04-30 2015-04-30 Bio chemical sensors and manufacturing method thereof KR20160129323A (en)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140077745A (en) 2012-12-14 2014-06-24 한국전자통신연구원 A biosensor including metal structure

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140077745A (en) 2012-12-14 2014-06-24 한국전자통신연구원 A biosensor including metal structure

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