KR20160102219A - Transducer provided with multiple types of arrays, method for manufacturing same, and ultrasonic probe comprising transducer provided with multiple types of array - Google Patents

Abstract

In the present invention, a transducer having a plurality of arrays capable of integrating a plurality of arrays into one transducer, a method of manufacturing the transducer, and a plurality of such arrays are formed to drive a plurality of arrays through one probe, An ultrasonic probe is disclosed that includes an array of transducers.

Description

TECHNICAL FIELD [0001] The present invention relates to a transducer having multiple arrays, a method of manufacturing the same, and an ultrasonic probe including a transducer having a plurality of arrays formed thereon. [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a transducer in which a plurality of arrays can be integrated into one transducer, a method of manufacturing the transducer, and an ultrasonic probe including the transducer having such a plurality of arrays.

As is well known, the ultrasonic diagnostic apparatus transmits an ultrasonic signal to a diagnostic region of a subject by a probe, and then receives an ultrasonic signal reflected from a tissue boundary in the subject having different acoustic impedances by a probe , Thereby acquiring image information of the diagnosis site. Such image information is outputted to the monitor of the ultrasonic diagnostic apparatus, and the diagnosis person can perform the diagnosis on the subject through the image information outputted to the monitor. The probe is provided with a transducer for transmitting an ultrasonic signal to a subject and receiving an ultrasonic signal reflected from the subject.

Generally, a transducer has a structure in which an array in which a piezoelectric layer and a matching layer are stacked on a backing material is assembled. The piezoelectric layer may be formed of a piezoelectric element made only of a piezoelectric material, or formed of a piezoelectric composite material in which a polymer material is combined with a piezoelectric element to improve ultrasonic transmission / reception performance.

However, in the related art, only one type of array is formed in one sound-absorbing layer, so that a single transducer has a limitation to scan only within a designated channel. In addition, in the case of a portable diagnostic device, there has been an inconvenience to bring a plurality of probes according to the organ to be diagnosed.

In order to solve the above-described problems, the present invention provides a transducer having a plurality of arrays formed by integrating a plurality of arrays into one transducer, and a method of manufacturing the transducer.

In addition, it is possible to carry out scanning by rotating multiple arrays through one probe, thereby minimizing the equipment and facilitating portability, eliminating the need to separate and connect the connectors according to the probe replacement, and as a result, The present invention provides an ultrasonic probe including a transducer having a plurality of arrays formed therein.

According to an aspect of the present invention, there is provided a transducer having a plurality of arrays formed therein, including: an array in which an electrode layer, a piezoelectric layer, a ground layer, and a matching layer are sequentially stacked; and a backing material formed on one surface of the electrode layer, The array includes a first array formed on an upper surface of the backing material, and a second array formed on one side of the backing material.

According to another aspect of the present invention, there is provided a method of manufacturing a transducer having a plurality of arrays, the method comprising the steps of: forming a plurality of arrays in which an electrode layer, a piezoelectric layer, a ground layer and a matching layer are sequentially stacked; dicing the array with a sound-absorbing material and curing the array; filling the diced space with a sound-absorbing material and curing the array; filling each array filled with the sound-absorbing material with at least one of the upper or lower surface of the backing material, Forming a lens on one surface of the matching layer formed on the top of each of the arrays;

The ultrasonic probe includes a backing material, a piezoelectric layer, a ground layer, and a matching layer which are stacked in order, and the upper surface or the lower surface of the backing material, And a body in which the transducer is rotatably mounted, the transducer including a plurality of arrays attached to at least two surfaces of both sides thereof, and a receiving groove recessed inwardly at a tip end thereof.

According to the present invention as described above, it is possible to integrate a plurality of arrays into one transducer and drive the plurality of arrays through one probe, so that it is unnecessary to change connectors and user convenience can be achieved .

1 is a perspective view of a transducer having a plurality of arrays formed therein according to an embodiment of the present invention;
FIG. 2 is an exploded perspective view of FIG. 1,
Figs. 3 to 4 are perspective views showing a modification of the shape of the array in Fig. 1,
5 is a flowchart illustrating a method of manufacturing a transducer having a plurality of arrays according to an embodiment of the present invention,
FIG. 6 is a schematic view illustrating a manufacturing process according to a method of manufacturing a transducer having a plurality of arrays according to an exemplary embodiment of the present invention. FIG.
FIG. 7 is a perspective view of an ultrasonic probe including a transducer having a plurality of arrays formed therein according to an embodiment of the present invention;
8 is a sectional view taken on line A-A 'in Fig. 7,
9 to 10 are sectional views taken along the line B-B 'in Fig.

A transducer having a plurality of arrays according to the present invention is obtained by laminating a plurality of arrays to one backing member, one embodiment of which is shown in Figs.

FIG. 1 is a perspective view of a transducer having a plurality of arrays formed therein according to an embodiment of the present invention, and FIG. 2 is an exploded perspective view of FIG. 1. FIG.

A transducer 10 having a plurality of arrays according to an embodiment of the present invention includes a backing material 100 and a first array 210 attached to the top surface of the backing material 100, And a second array 220 attached to one side of the first array 220.

Alternatively, the transducer 10 may further include a third array 230 attached to the other side of the backing material 100 or a fourth array (not shown) attached to the lower surface of the backing material 100 And the arrays 210, 220, and 230 may be formed on the top and bottom surfaces of the backing material 100 as well as on both sides.

In some cases, the arrays 220 and 230 may be formed only on one side and the other side of the backing material 100, and the array 210 may be formed only on the top and bottom surfaces of the backing material 100. Each of the arrays 210, 220 and 230 may have a structure in which an electrode layer 201, a piezoelectric layer 202, a ground layer 203, and a matching layer 204 are sequentially stacked.

For reference, the arrays 210, 220, and 230, which are the objects of the present invention, refer to an ultrasonic sensor part in which an active element and a passive element are combined and a channel is separated, and the transducer 10 has acoustic Lens, and housing (case).

First, the piezoelectric layer 202 resonates when a voltage is applied to generate an ultrasonic signal, and when receiving the ultrasonic signal, the piezoelectric layer 202 vibrates to generate an electric signal. The piezoelectric layer 202 may be composed of a piezoelectric ceramics such as lead zirconate titanate (PZT), a piezoelectric single crystal or the like. On one surface of the piezoelectric layer 202, an electrode layer 201 is formed by a method such as vapor deposition.

The electrode layer 201 may be formed of a flexible printed circuit board (FPCB) having first electrodes formed thereon. Such a flexible printed circuit board (FPCB) can be bonded to the piezoelectric layer 202 using an adhesive or the like. The first electrodes may be respectively formed of a conductive metal material such as copper, gold, silver, or the like.

The backing material 100 may be configured to have a sound-absorbing property. This backing material 100 suppresses the free vibration of the piezoelectric layer 202 stacked on the upper side to reduce the pulse width of the ultrasonic waves and prevents unnecessary propagation of the ultrasonic waves to the lower side of the piezoelectric layer 202, . For example, when the transducer is configured as a linear array type, the backing material 100 may have a flat top surface. The backing material 100 may be made of a material filled with a powder material having a high density such as tungsten (W), lead (Pb), zinc oxide (ZnO), or the like in the epoxy resin.

The ground layer 203 is disposed to form a voltage difference with the electrode layer 201.

The ground layer 203 may be a flexible printed circuit board (FPCB) having second electrodes formed on one surface thereof. The second electrodes may be respectively formed of a conductive metal material such as copper, gold, silver, or the like, and may be formed in the same pattern as the first electrodes. For example, when the first electrodes function as signal electrodes for transmitting and receiving an electrical signal, the second electrodes may function as ground electrodes. Of course, the second electrodes may function as signal electrodes, in which case the first electrodes may function as ground electrodes.

The matching layer 204 makes it possible to reduce the acoustic impedance difference between the piezoelectric layer 202 and the object to be inspected. For example, the matching layer 204 may be formed of an epoxy resin or the like, and may be composed of a plurality of layers.

Meanwhile, the arrays 210, 220, and 230 may be diced to separate channels, and the separated space may be filled with a sound-absorbing material, and a lens may be formed on one surface of the matching layer 204. Alternately, each of the arrays 210, 220, and 230 may be of different types and may operate in different channels.

In this case, there is an advantage that scanning can be performed while driving the plurality of arrays 210, 220 and 230 while changing the direction of one probe without replacing the probe.

Figs. 3 to 4 are perspective views showing a modified form of the array in Fig.

According to an embodiment of the present invention, the first array 210 or the second array 220 or the third array 230 or the fourth array (not shown) may be a convex type or a phased array type a phased array type, or a linear type. Accordingly, it is possible to select a desired type of array 210, 220, 230 and proceed with the scan.

3, the first array 210 is formed in a convex type, the second array 220 and the third array 230 are formed in a phased array type, The first array 210, the second array 220 and the third array 230 in FIG. 4 are formed in a linear type.

FIG. 5 is a flowchart illustrating a method of manufacturing a transducer in which a plurality of arrays are formed according to an embodiment of the present invention. FIG. 6 is a flowchart illustrating a method of manufacturing a transducer including a plurality of arrays according to an exemplary embodiment of the present invention. Fig. 2 is a schematic view showing a manufacturing process.

A method of manufacturing a transducer having multiple arrays according to the present invention includes the steps of forming a plurality of arrays 210, 220, and 230 in which an electrode layer 201, a piezoelectric layer 202, a ground layer 203, and a matching layer 204 are sequentially stacked A step S102 of dicing each of the arrays 210, 220 and 230 and a step S103 of filling and curing the sound absorbing material 205 in the diced space of the arrays 210, 220 and 230, Attaching each of the arrays 210, 220 and 230 filled with the sound-absorbing material 205 to at least two or more surfaces of the upper or lower surface or both sides of the backing material 100 so that the matching layer 204 is positioned at the uppermost position And forming a lens 206 on one surface of the matching layer 204 formed at the top of each of the arrays 210, 220, and 230 (S105).

In step S101, a plurality of arrays 210, 220, and 230 in which the electrode layer 201, the piezoelectric layer 202, the ground layer 203, and the matching layer 204 are sequentially stacked is formed.

When the voltage is applied, the piezoelectric layer 202 resonates to generate an ultrasonic signal, and when receiving the ultrasonic signal, the piezoelectric layer 202 vibrates to generate an electric signal. On one surface of the piezoelectric layer 202, an electrode layer 201 is formed by a method such as vapor deposition. The electrode layer 201 may be formed of a flexible printed circuit board (FPCB) having first electrodes formed thereon. The backing material 100 may be configured to have a sound-absorbing property. This backing material 100 suppresses the free vibration of the piezoelectric layer 202 stacked on the upper side to reduce the pulse width of the ultrasonic waves and prevents unnecessary propagation of the ultrasonic waves to the lower side of the piezoelectric layer 202, . The ground layer 203 is disposed to form a voltage difference with the electrode layer 201. The ground layer 203 may be a flexible printed circuit board (FPCB) having second electrodes formed on one surface thereof. The matching layer 204 makes it possible to reduce the acoustic impedance difference between the piezoelectric layer 202 and the object to be inspected.

In step S102, the plurality of slits 207 are formed by dicing the arrays 210, 220, and 230, respectively. The channel separation of the arrays 210, 220, and 230 may be performed through the dicing process.

In step S103, the slits 207 of the respective dies 210, 220 and 230 are filled with a sound-absorbing material 205 and cured.

The sound-absorbing material may be formed of any one selected from the group consisting of epoxy, a mixture of epoxy and powder, and polyurethane. The array 10 separated into a plurality of regions through the dicing process can be supported by the sound-absorbing material 205 to maintain a separated gap.

In step S104, each of the arrays 210, 220, and 230 filled with the sound-absorbing material 205 is adhered to at least two surfaces of the upper surface, the lower surface, or the both surfaces of the backing material 100 so that the matching layer 204 is positioned at the uppermost position do. In the figure, the arrays 210, 220, and 230 are formed on the upper surface and both side surfaces of the backing material 100, but the scope of the present invention is not limited thereto.

In step S105, a lens 206 is formed on one surface of the matching layer 204 formed on the uppermost end of each of the arrays 210, 220, and 230. The lens 206 may be formed of the same material as that of the sound-absorbing material 205. The lens 206 may be formed on the surface of the matching layer 204 to protect the matching layer 204 from abrasion while contacting the subject. do. The lens 206 may also serve to focus the ultrasonic waves generated from the piezoelectric layer 202.

FIG. 7 is a perspective view of an ultrasonic probe including a transducer having a plurality of arrays formed therein according to an embodiment of the present invention, FIG. 8 is a sectional view taken along the line A-A 'in FIG. 7, B-B 'of Fig.

An ultrasonic probe including a transducer having a multi-type array according to an embodiment of the present invention includes a body 20 having a receiving groove 21 formed at a tip end thereof, And a transducer 10 mounted thereon.

For reference, the probe as an object of the present invention refers to an end product to which the above-described transducer 10 and a cable are connected.

The distal end refers to the direction in which the transducer is exposed to the outside of the body 20 when the diagnosis is made, and the rear end refers to the direction in which the probe and the cable are connected to the opposite end of the distal end. Accordingly, the front end and the rear end described above or below will have to be understood in accordance with the above definition.

The transducer 10 has a structure in which a backing material 100 and an electrode layer 201, a piezoelectric layer 202, a ground layer 203 and a matching layer 204 are stacked in order, And a plurality of arrays 210, 220, and 230 that are bonded to at least two of the top, bottom, or both sides of the substrate 210.

For example, the arrays 210, 220, and 230 may include a first array 210 formed on the top surface of the backing material 100, a second array 220 formed on one side of the backing material 100, And a third array 230 formed on the other side of the substrate 100. Hereinafter, the arrays 210, 220, and 230 will be described, but the scope of the present invention is not limited thereto.

When the voltage is applied, the piezoelectric layer 202 resonates to generate an ultrasonic signal, and when receiving the ultrasonic signal, the piezoelectric layer 202 vibrates to generate an electric signal. On one surface of the piezoelectric layer 202, an electrode layer 201 is formed by a method such as vapor deposition.

The electrode layer 201 may be formed of a flexible printed circuit board (FPCB) having first electrodes formed thereon. The backing material 100 may be configured to have a sound-absorbing property. This backing material 100 suppresses the free vibration of the piezoelectric layer 202 stacked on the upper side to reduce the pulse width of the ultrasonic waves and prevents unnecessary propagation of the ultrasonic waves to the lower side of the piezoelectric layer 202, . The ground layer 203 is disposed to form a voltage difference with the electrode layer 201. The ground layer 203 may be a flexible printed circuit board (FPCB) having second electrodes formed on one surface thereof.

The matching layer 204 makes it possible to reduce the acoustic impedance difference between the piezoelectric layer 202 and the object to be inspected. For example, the matching layer 204 may be formed of an epoxy resin or the like, and may be composed of a plurality of layers.

Meanwhile, the arrays 210, 220, and 230 may be diced to separate channels, and the separated space may be filled with a sound-absorbing material, and a lens may be formed on one surface of the matching layer 204. Alternately, each of the arrays 210, 220, and 230 may be of different types and may operate in different channels.

The body 20 is formed with a receiving groove 21 recessed rearward at its tip and a connector connected to a transducer 10 rotatably received in the receiving groove 21 at a rear end thereof.

As described above, since the transducers 10 form the arrays 210, 220, and 230 on the three sides of the backing material 100, the transducers 10 can be rotated The transducer 10 can be operated in a channel and the transducer 10 can be moved in the direction in which the body 20 is received so that the array of desired channels can rotate the transducer 10 to be exposed to the outside through the opening of the receiving groove 21. [ It may be mounted on the groove 21 so as to be rotatable by 360 or rotated 90 degrees in both directions.

According to an embodiment of the present invention, the transducer 10 is formed with a rotary shaft 300 passing through the center of the front and rear surfaces, and both ends of the rotary shaft 300 are inserted into the receiving groove (21) and the transducer (10) is pivoted to the left and right.

When the backing material 100 is positioned at the center of the transducer 10, a through hole through which the rotating shaft 300 passes is formed in the backing material 100, a rotating shaft 300 is inserted into the through hole, The rotary shaft 300 and the transducer 10 can be rotatably connected to each other through a bearing between the through hole and the rotary shaft 300.

A fixing groove 23 may be formed on the inner side surface of the receiving groove 210 of the body 20 so that both ends of the rotating shaft 300 are inserted into the receiving groove 210. Both ends of the rotating shaft 300, 23, the bearings can be inserted to reduce the frictional force while supporting the rotary shaft 300.

According to an embodiment of the present invention, the receiving groove 21 formed in the body 20 is provided with a concave groove 22 and the concave groove 22 is formed on the outer side of the transducer 10, A ball plunger 400 is formed on the inner surface 21 of the receiving groove 20 to be compressed. The ball plunger 400 is compressed by the inner side surface 21 of the receiving groove 20 while being protruded and supported while being supported by the spring 420. The ball plunger 400 is extended in the concave groove 22, A fixing force can be exerted.

For example, the receiving grooves 21 may have recesses 22 in the upper, lower, right, and left sides, respectively, and ball plungers 400 may be formed on the outer surface of the transducer 10, . A ball plunger 400 is formed on both the front and rear surfaces of the transducer 10 and the inner surface of the receiving groove 21 is formed on both sides of the transducer 10, An inlet groove 22 may be formed.

According to one embodiment of the present invention, the transducer 10 forms rotation contacts 611, 612, and 613 on the opposite sides of the first, second, and third arrays 210, 220, and 230, 21 are provided with connectors having fixed contacts 620 connected to the respective rotary contacts 611, 612, and 613.

Accordingly, when the transducer 10 rotates and one of the rotary contacts 611, 612, and 613 is physically contacted with the fixed contact 620 and connected to each other, the arrays 210, 220, and 230 corresponding to the rotary contacts 611, Diagnosis can be performed.

At this time, a handle may be formed at the rear end of the body 20. [ A board having a multiflex or switching function is built in the handle so that a cable for system interconnection is not excessively thickened.

According to an embodiment of the present invention, the transducer 10 includes a transmitter (not shown) for transmitting signals containing unique information of the arrays 210, 220 and 230 respectively corresponding to the first, second and third arrays 210, 220 and 230 And a receiver 520 for recognizing the information of the arrays 210, 220 and 230 by receiving signals transmitted from the respective transmitters 511, 512 and 513 are formed inside the receiving groove 21 formed in the body 20, Lt; / RTI > interface is formed.

The transmitting units 511, 512 and 513 and the receiving unit 520 are wirelessly connected to each other and the receiving unit 520 senses adjacent transmitting units 511, 512 and 513 and can perform ultrasound diagnosis using the arrays 210, 220 and 230 corresponding to the transmitting units 511, have.

According to an embodiment of the present invention, the transmitters 511, 512 and 513 and the receiver 520 may include an optical sensor or a photosensor. For example, the transmitters 511, 512, and 513 may include a light emitting device (LD) that outputs an optical signal, and the receiver 520 may include a light receiving device (PD) that receives an optical signal. In addition, various known non-contact type sensing means may be applied to the transmitting units 511, 512, and 513 and the receiving unit 520.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the scope of the invention.

Accordingly, the true scope of protection of the present invention should be determined only by the appended claims.

Claims (11)

A transducer comprising an array in which an electrode layer, a piezoelectric layer, a ground layer and a matching layer are stacked in order, and a backing material formed on one surface of the electrode layer,
The array comprising:
A first array formed on an upper surface of the backing material;
And a second array formed on one side of the backing material. The method according to claim 1,
Wherein the array further comprises a third array formed on the other side of the backing material. ≪ RTI ID = 0.0 > 8. < / RTI > The method according to claim 1,
Wherein the array further comprises a fourth array formed on a bottom surface of the backing material. ≪ RTI ID = 0.0 > 8. ≪ / RTI > 4. The method according to any one of claims 1 to 3,
Each array comprising:
Wherein the at least one transducer is one selected from the group consisting of a convex type, a phased array type, and a linear type. Forming a plurality of arrays in which an electrode layer, a piezoelectric layer, a ground layer, and a matching layer are sequentially stacked;
Dicing each of the arrays;
Filling and curing the diced space of the array with a sound-absorbing material;
Attaching each array filled with the sound-absorbing material to at least two or more surfaces of the backing, the bottom, or both sides of the backing so that the matching layer is located at the uppermost end;
And forming a lens on one surface of the matching layer formed on the uppermost end of each of the arrays. A transducer including a backing material, a plurality of arrays each of which has a structure in which an electrode layer, a piezoelectric layer, a ground layer, and a matching layer are laminated in order, and is attached to at least two surfaces of an upper surface or a lower surface or both surfaces of the backing material;
And a transducer rotatably mounted on the distal end of the transducer, the transducer having a receiving groove recessed inward at an end thereof. The method according to claim 6,
Wherein the transducer is formed with a rotating shaft passing through the center of the front and rear surfaces and both side ends of the rotating shaft are fitted in front of and behind the receiving groove formed in the body so that the transducer rotates in the right and left direction. And a transducer formed on the substrate. The method according to claim 6,
Wherein an accommodating groove is formed in an inner surface of the receiving groove formed in the body and a ball plunger is formed on the outer surface of the transducer so that the ball plunger is elongated in the concave groove and compressed in the inner surface of the receiving groove. And a transducer formed on the substrate. The method according to claim 6,
Wherein the transducer includes a transmitter for transmitting a signal containing unique information of an array corresponding to each of the arrays opposite to the array and a receiver for receiving signals transmitted from the transmitter, And a transducer having a plurality of arrays formed therein. The method according to claim 6,
Wherein the transmitter and the receiver include an optical sensor or a photosensor. The method according to claim 6,
Wherein the transducer forms a rotary contact on the opposite side of the array and a connector having a stationary contact connected to each of the rotary contacts is formed inside the receiving groove formed in the body. An ultrasonic probe comprising a transducer formed therein.

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