KR20160101757A - Method for fabricating sensor using polymer conducting wire - Google Patents

Method for fabricating sensor using polymer conducting wire Download PDF

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Publication number
KR20160101757A
KR20160101757A KR1020150023956A KR20150023956A KR20160101757A KR 20160101757 A KR20160101757 A KR 20160101757A KR 1020150023956 A KR1020150023956 A KR 1020150023956A KR 20150023956 A KR20150023956 A KR 20150023956A KR 20160101757 A KR20160101757 A KR 20160101757A
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KR
South Korea
Prior art keywords
conductive polymer
polymer wire
forming
conductive
substrate
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Application number
KR1020150023956A
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Korean (ko)
Inventor
최혁렬
박준우
이충한
Original Assignee
성균관대학교산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to KR1020150023956A priority Critical patent/KR20160101757A/en
Publication of KR20160101757A publication Critical patent/KR20160101757A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/14—Conductive material dispersed in non-conductive inorganic material
    • H01B1/18—Conductive material dispersed in non-conductive inorganic material the conductive material comprising carbon-silicon compounds, carbon or silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0026—Apparatus for manufacturing conducting or semi-conducting layers, e.g. deposition of metal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/06—Insulating conductors or cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
    • H01B3/28—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances natural or synthetic rubbers

Abstract

An embodiment of the present invention provides a method for manufacturing a conducting polymer wire sensor, capable of manufacturing the conducting polymer wire sensor which has a thinner thickness and has a lower manufacturing cost more than the conventional conducting polymer wire sensor. The method for manufacturing a conducting polymer wire sensor comprises the steps of: forming a first conducting polymer wire layer in one direction on a substrate; forming a second conducting polymer wire layer in a direction intersecting with the one direction on the substrate on which the first conducting polymer wire layer is formed; and coating an upper portion of the substrate on which the second conducting polymer wire layer is formed, with an insulating layer. The first and second conducting polymer wire layers can be formed by using a conducting polymer wire which includes an inner core filled with a conducting polymer and an outer core surrounding the inner core and composed of an elastic polymer insulator.

Description

TECHNICAL FIELD [0001] The present invention relates to a method of manufacturing a conductive polymer wire,

The present invention relates to a method of manufacturing a conductive polymer wire sensor, and more particularly, to a method of manufacturing a conductive polymer wire sensor that does not require a step of forming an insulating layer positioned between conductive polymer wire layers in a manufacturing process.

Conductivity polymer (π-conjugated polymer) has a low specific density, which is higher than Specific Conductivity, which is a value obtained by dividing electrical conductivity by mass, and it has the advantage of changing the electrical conductivity according to doping. It has strength as a conductive material.

In addition, the conductive polymer is advantageous in terms of machinability, mechanical strength, chemical strength, light weight, and chemical inertness in terms of mechanical and chemical properties. Conductive polymers with such excellent properties can be used in a variety of applications such as microelectronics, optics, communication, sensors, displays, life sciences, drug delivery systems, and the like. And can be utilized in various applications.

Currently used conductive polymer micro- or nanowires are largely fabricated using lithography, template synthesis, and electrospinning techniques.

Meanwhile, in the process of manufacturing a sensor using the conductive polymer wire manufactured by the above techniques, a process of forming an insulating layer between the conductive polymer wire layers is included. A manufacturing process of a conventional conductive polymer wire sensor will now be described with reference to the accompanying drawings.

1 is an illustration of a conventional conductive polymer wire sensor.

Referring to FIG. 1, a conventional conductive polymer wire sensor 10 includes a first conductive polymer wire layer 12 formed on a substrate 11 in one direction;

Forming a first electrode part (13) composed of a plurality of electrodes connected to the respective conductive polymer wires constituting the conductive polymer wire layer (12) on a one-to-one basis;

Forming a first insulating layer (14) on a substrate (11) on which a first conductive polymer wire layer (12) and a first electrode part (13) are formed;

Forming a second conductive polymer wire layer (15) on the first insulating layer (14) in a direction intersecting with one direction;

Forming a second electrode part (16) composed of a plurality of electrodes connected in a one-to-one manner with respective conductive polymer wires constituting the second conductive polymer wire layer (15); And

And forming a second insulating layer 17 on the first insulating layer 14 on which the second conductive polymer wire layer 15 and the second electrode portion 16 are formed.

The conventional conductive polymer wire sensor 10 described with reference to FIG. 1 has a first insulating layer 14 formed between two conductive polymer wire layers 12 and 15, (14). In addition, the manufacturing cost of the conductive polymer wire sensor 10 is increased due to the manufacturing process in which the first insulating layer 14 is formed.

Accordingly, it is required to develop a manufacturing technique of a conductive polymer wire sensor that is thinner than a conventional conductive polymer wire sensor and can produce a conductive polymer wire sensor having a low manufacturing cost.

KR 10-2013-0051357 A1

Embodiments of the present invention provide a method of manufacturing a conductive polymer wire sensor which is thinner than a conventional conductive polymer wire sensor and can produce a conductive polymer wire sensor having a low manufacturing cost.

A method of manufacturing a conductive polymer wire sensor according to an embodiment of the present invention includes: forming a first conductive polymer wire layer on a substrate in one direction; Forming a second conductive polymer wire layer in a direction crossing the one direction on the substrate on which the first conductive polymer wire layer is formed; Coating an upper portion of the substrate on which the second conductive polymer wire layer is formed with an insulating layer; Wherein the first and second conductive polymer wire layers are filled with a conductive polymer and the outer core surrounding the inner core may be formed using a conductive polymer wire composed of an elastic polymer insulator.

The conductive polymer may be a mixture of a conductive material and a polymer material, and the conductive material may include at least one of a metal powder, a carbon powder, and a carbon microcoil.

The polymer material may include at least one of silicone rubber, acrylonitrile butadiene rubber (NBR), and poly-dimethylsiloxane (PDMS).

The insulating layer may be made of an elastic polymer insulator.

The elastic polymer insulator may include at least one of silicone rubber, acrylonitrile butadiene rubber (NBR), and poly-dimethylsiloxane (PDMS).

Wherein the conductive polymer wire is manufactured through a syringe composed of an inner core space separated by a partition wall formed therein and an outer core space and a double needle connected to one end of the inner core space and one end of the outer core space, Wherein when the conductive material is filled in the core space and pressure is applied to the syringe filled with the polymer material in the outer core space, the conductive material and the polymer material are ejected through the double needle, And may be manufactured by enclosing the conductive material from which the material is ejected.

The forming of the first conductive polymer wire layer may include forming a plurality of conductive polymer wires on the substrate in the one direction so as to form a predetermined gap between the conductive polymer wires constituting the plurality of conductive polymer wires ; And forming a first electrode part having a plurality of electrodes connected to one side of the substrate with the respective conductive polymer wires in one-to-one relation; Wherein forming the second conductive polymer wire layer comprises forming a plurality of conductive polymer wires on the first conductive polymer wire layer in a direction crossing the one direction, Forming a predetermined gap between each of the conductive polymer wires; And forming a second electrode portion including a plurality of electrodes connected to each conductive polymer wire constituting the second conductive polymer wire layer in a one-to-one manner on the other side of the substrate excluding the one side.

The step of forming the first conductive polymer wire layer and the step of forming the second conductive polymer wire layer may include the steps of moving a plurality of syringes arranged in a line on one side of the substrate to the other side, Can be formed at the same time.

According to the embodiment of the present invention, it is possible to manufacture a conductive polymer wire sensor without a process in which a conductive polymer wire layer is formed during a manufacturing process of a conductive polymer wire sensor, which is thinner than a conventional conductive polymer wire sensor. It is possible to provide a method of manufacturing a conductive polymer wire sensor with a low unit price.

1 is an exemplary view of a conventional conductive polymer wire sensor.
2 is an illustration of an example of a syringe according to an embodiment of the present invention.
3 is a cross-sectional view of a conductive polymer wire according to an embodiment of the present invention.
FIGS. 4 to 8 are views illustrating a manufacturing process of a conductive polymer wire sensor of a conductive polymer wire sensor according to an embodiment of the present invention. FIG.
9 is an exemplary view of a conductive polymer wire sensor according to an embodiment of the present invention.
10A is a cross-sectional view of a conductive polymer wire sensor according to an embodiment of the present invention.
FIG. 10B is a diagram illustrating an operation example of a conductive polymer wire sensor according to an embodiment of the present invention. FIG.
11 is a flowchart of a process of manufacturing a conductive polymer wire sensor according to an embodiment of the present invention.
12 is a flowchart of a manufacturing process for forming a first conductive polymer wire layer according to an embodiment of the present invention.
13 is a flowchart of a manufacturing process for forming a second conductive polymer wire layer according to an embodiment of the present invention.

Hereinafter, exemplary embodiments according to the present invention will be described in detail with reference to the contents described in the accompanying drawings. However, the present invention is not limited to or limited by the exemplary embodiments. Like reference numerals in the drawings denote members performing substantially the same function.

Terms including ordinals, such as first, second, etc., may be used to describe various elements, but the elements are not limited to these terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component. The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise.

While the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not limited to the disclosed embodiments. Also, in certain cases, there may be a term selected arbitrarily by the applicant, in which case the meaning thereof will be described in detail in the description of the corresponding invention. Therefore, the term used in the present invention should be defined based on the meaning of the term, not on the name of a simple term, but on the entire contents of the present invention.

When an element is referred to as "including" an element throughout the specification, it is to be understood that the element may include other elements as well, without departing from the spirit or scope of the present invention.

Hereinafter, to facilitate understanding of a method of manufacturing a conductive polymer wire sensor according to an embodiment of the present invention, a syringe used in the production of a conductive polymer wire according to an embodiment of the present invention will be described with reference to FIG.

2 is an illustration of a syringe according to an embodiment of the present invention.

Referring to FIG. 2, a syringe 200 according to an embodiment of the present invention may include a partition 210, an inner core space 220, an outer core space 230, and a double needle 240.

The partition 210 is formed in the inner space of the syringe 200 and can divide the inner space into the inner core space 220 and the outer core space 230.

The double needle 240 is formed at one end of the syringe 200 and can be connected to one end of the inner core space 220 and one end of the outer core space 230.

The double needle 240 may include a double needle inner core space 241 and a double needle outer core space 243 due to the double needle partition wall 242 formed in the inner space of the double needle 240.

When a pressure is applied to the syringe 200 in a state where the inner core space 220 of the syringe 200 described with reference to FIG. 2 is filled with a conductive material and the outer core space 230 is filled with a polymer material The conductive material and the polymer material may be ejected through the double needle 240.

In addition, the polymer material ejected from the double needle 240 may be ejected by surrounding the conductive material.

In addition, the polymer material according to the embodiment of the present invention may be an elastic polymer insulator material having elasticity and being insulated. The polymer insulating material may include at least one of silicone rubber, acrylonitrile butadiene rubber (NBR), and poly-dimethylsiloxane (PDMS).

3 is a cross-sectional view of a conductive polymer wire according to an embodiment of the present invention.

Referring to FIG. 3, the conductive polymer wire according to the embodiment of the present invention includes inner cores 421 and 441 filled with a conductive polymer, and outer cores 422 and 442 surrounding the inner core may be formed of an elastic polymer insulator.

The conductive polymer according to an embodiment of the present invention is a mixture of a conductive material and a polymer material, and may include at least one of metal powder, carbon powder, and carbon micro-coil as a conductive material. The polymer material may include at least one of silicone rubber, acrylonitrile butadiene rubber (NBR), and polydimethylsiloxane (PDMS).

Hereinafter, a method of manufacturing a conductive polymer wire sensor according to an embodiment of the present invention will be described.

4 to 8 are views illustrating a method of manufacturing a conductive polymer wire sensor according to an embodiment of the present invention.

Referring to FIG. 4, in the method of manufacturing a conductive polymer wire sensor according to an embodiment of the present invention, a first conductive polymer wire layer 420 may be formed on a substrate 410 in one direction.

More specifically, a plurality of syringes 200-1, 200-2, ..., 200-n arranged in a line on one side of a substrate 410 are simultaneously moved to the other side of the substrate 410 while a plurality of conductive polymer wires 420-1, 420-2, ..., 420-n may be formed at the same time to form the first conductive polymer wire layer 420.

5, a plurality of electrodes 430-1, 430-2,..., 430-n connected in one-to-one relationship with the respective conductive polymer wires 420-1, 420-2, ..., and 430-n may be formed.

More specifically, the first electrode unit 430 includes a plurality of electrodes 430-1 and 430-2, one end of which is connected to one end of each conductive polymer wire 420-1, 420-2, ..., 420-n, ..., and 430-n, and one end of each electrode is electrically connected to the conductive polymer material of the inner core of each conductive polymer wire through one end of each conductive polymer wire.

In addition, the first electrode unit 430 may be formed on one side of the substrate 410.

6, a plurality of syringes 200-1, 200-2, and 200-3 arranged in a line on one side of the substrate 410 on which the first conductive polymer wire layer 420 and the first electrode unit 430 are formed, The second conductive polymer wire layer 440 is formed by simultaneously forming a plurality of conductive polymer wires 440-1, 440-2, ..., 440-n while simultaneously moving the first conductive polymer wire layers 400, ..., 200-n to the other side of the substrate 410 can do. Here, the second conductive polymer wire layer 440 may be formed in a direction intersecting with one direction in which the first conductive polymer wire layer 420 is formed.

Referring to FIG. 7, a plurality of electrodes 450-1, 450-2, and 450-4, which are connected in one-to-one relationship with the respective conductive polymer wires 440-1, 440-2, ..., 440- ..., and 450-n may be formed.

More specifically, the second electrode unit 450 includes a plurality of electrodes 450-1, 450-2,..., 450-2, one end of which is connected to one end of each conductive polymer wire 440-1, 440-2, ..., 440- ..., and 450-n, and one end of each electrode is electrically connected to the conductive polymer material of the inner core of each conductive polymer wire via one end of each conductive polymer wire.

The second electrode unit 450 may be formed on one side of the substrate 410 on which the first electrode unit 430 is formed and on the other side of the substrate 410.

8, an upper portion of the substrate 410 on which the second conductive polymer wire layer 440 and the second electrode portion 450 are formed may be coated with an insulating layer 460. [

Here, the insulating layer may be made of an elastic polymer insulator and may include at least one of silicone rubber, acrylonitrile butadiene rubber (NBR), and poly-dimethylsiloxane (PDMS) can do.

FIG. 9 is an exemplary view of a conductive polymer wire sensor according to an embodiment of the present invention, and FIG. 10 is a sectional view of a conductive polymer wire sensor according to an exemplary embodiment of the present invention.

9, a conductive polymer wire sensor 400 according to an embodiment of the present invention includes a conductive polymer wire sensor 10 (see FIG. 9) between a first conductive polymer wire layer 420 and a second conductive polymer wire layer 440, Even if there is no insulating layer 14 of the first embodiment.

10A is a cross-sectional view of a conductive polymer wire sensor according to an embodiment of the present invention, and FIG. 10B is a view illustrating an operation of a conductive polymer wire sensor according to an embodiment of the present invention.

10A, a conductive polymer wire sensor 400 according to an embodiment of the present invention includes an insulating layer between a first conductive polymer wire layer 420 formed on a substrate 410 and a second conductive polymer wire layer 440 Not required. The reason for this is as follows.

 Each of the conductive polymer wires constituting the first conductive polymer wire layer 420 and the second conductive polymer wire layer 440 is filled with the conductive polymer and the outer core surrounding the inner core is composed of an elastic polymer insulator Because.

Referring to FIG. 10B, when a pressure is externally applied to the conductive polymer wire sensor 400 according to the embodiment, the shape of the conductive polymer wire sensor 400 changes and the first conductive polymer wire layer So that the length of the body 420 may vary.

By measuring the magnitude of the varying resistance of the first conductive polymer wire layer 420 where deformation is caused to vary in length due to external pressure, the strength of the force with respect to the external applied pressure can be measured.

The position of the wire deformed by the external pressure among the first conductive polymer wire layer 420 including the conductive polymer wire sensor 400 is identified so that the force of the entire area of the conductive polymer wire sensor 400 The coordinates of the working point can be identified. This is because the point at which the first conductive polymer wire layer 420 and the second conductive polymer wire layer 440 are in contact with each other can be identified as one coordinate.

In identifying the coordinates of the point where the force is applied, the values are different according to the physical properties of the conductive polymer, and there is a nonlinear aspect, but it can be discriminated by linear processing using the material properties and the signal processing method.

11 is a flowchart of a method of manufacturing a conductive polymer wire sensor according to an embodiment of the present invention.

11, a method of manufacturing a conductive polymer wire sensor according to an exemplary embodiment of the present invention includes forming a first conductive polymer wire layer 420 in one direction on a substrate 410, A step of forming a second conductive polymer wire layer 440 in a direction intersecting with one direction on the substrate 410 on which the wire layer 420 is formed and a step of forming an upper portion of the substrate 410 on which the second conductive polymer wire layer 440 is formed With an insulating layer 460.

12 is a flowchart of a manufacturing method of forming a first conductive polymer wire layer according to an embodiment of the present invention.

Referring to FIG. 12, step 1110 of forming a first conductive polymer wire layer 420 in a method of manufacturing a conductive polymer wire sensor according to an embodiment of the present invention may include the following steps.

A plurality of conductive polymer wires 420-1, 420-2, ..., 420-n are formed on the substrate 410 in one direction, and a plurality of conductive polymer wires 420-1, 420-2, A plurality of electrodes 430-1, 430-2, 430-4, 430-2, 430-4, 430-2, 430-3, 430-3, 430-3, 430-3, 430-4, 4-54, n may be formed on the first electrode part 430.

13 is a flowchart of a manufacturing method of forming a second conductive polymer wire layer according to an embodiment of the present invention.

Referring to FIG. 13, step 1120 of forming a second conductive polymer wire layer 440 in a method of manufacturing a conductive polymer wire sensor according to an embodiment of the present invention may include the following steps.

A plurality of conductive polymer wires 440-1, 440-2, ..., 440-n are formed on the first conductive polymer wire layer 420 in a direction intersecting with one direction in which the first conductive polymer wire layer 420 is formed A step 1121 of forming a predetermined gap between the conductive polymer wires constituting the plurality of conductive polymer wires 440-1, 440-2, ..., and 440-n, 450-2, ..., 450-n connected in one-to-one relation to the respective conductive polymer wires constituting the second conductive polymer wire layer 440 on the other side except one side of the first conductive polymer wire layer 410 And a step 1222 of forming the two-electrode portion 450.

Generally, the terms used herein are intended to be generically "open" in the claims, particularly in the claims (e.g., the claims text) (e.g., And "to" should be interpreted as "including at least", and "including" should be interpreted as "including but not limited to"). Where a specific number is intended for the recited claims, such intent is expressly set forth in the claims, and it is understood that such intent is not intended to be in the absence of such description.

Only certain features of the invention have been illustrated and described herein, and various modifications and changes can occur to those skilled in the art. It is, therefore, to be understood that the claims are intended to cover such modifications and changes as fall within the true spirit of the invention.

10: Conventional conductive polymer wire sensor
11: substrate
12: first conductive polymer wire layer
13:
14: first insulating layer
15: second conductive polymer wire layer
16: second electrode portion
17: second insulating layer
200: Syringe
210:
220: inner core space
230: outer core space
240: double needle
241: Double needle inner core space
242: double needle barriers
243: Double needle outer core space
400: Conducting polymer wire sensor
410: substrate
420: first conductive polymer wire layer
430: first electrode portion
440: second conductive polymer wire layer
450: second electrode portion
460: Insulating layer

Claims (8)

Forming a first conductive polymer wire layer on the substrate in one direction;
Forming a second conductive polymer wire layer in a direction crossing the one direction on the substrate on which the first conductive polymer wire layer is formed; And
Coating an upper portion of the substrate on which the second conductive polymer wire layer is formed with an insulating layer;
Wherein the first and second conductive polymer wire layers are filled with a conductive polymer, and the outer core surrounding the inner core is formed of a conductive polymer wire composed of an elastic polymer insulator Way.
The conductive polymer according to claim 1,
Wherein the conductive material comprises at least one of a metal powder, a carbon powder, and a carbon microcoil, wherein the conductive material is a mixture of a conductive material and a polymer material.
[3] The method of claim 2,
1. A method for manufacturing a conductive polymer wire sensor, the method comprising: at least one of a silicone rubber, an acrylonitrile butadiene rubber (NBR), and a poly-dimethylsiloxane (PDMS).
The method according to claim 1,
Wherein the insulating layer is made of an elastic polymer insulator.
5. The nonaqueous electrolyte secondary battery according to claim 4,
1. A method for manufacturing a conductive polymer wire sensor, the method comprising: at least one of a silicone rubber, an acrylonitrile butadiene rubber (NBR), and a poly-dimethylsiloxane (PDMS).
The conductive polymer wire according to any one of claims 1 to 5,
An inner core space separated by a partition wall formed therein and an outer core space, and a double needle connected to one end of the inner core and one end of the outer core,
The conductive material is filled in the inner core space and the pressure is applied to the syringe filled with the polymer material in the outer core space, the conductive material and the polymer material are ejected through the double needle, Wherein the conductive polymer material is encapsulated with the polymer material.
7. The method of claim 6, wherein forming the first conductive polymer wire layer comprises:
Forming a plurality of conductive polymer wires on the substrate in the one direction so as to have a predetermined distance between each of the conductive polymer wires constituting the plurality of conductive polymer wires; And
Forming a first electrode portion on one side of the substrate, the first electrode portion comprising a plurality of electrodes connected in one-to-one relation with the respective conductive polymer wires; Lt; / RTI >
The forming of the second conductive polymer wire layer may include:
Forming a plurality of conductive polymer wires on the first conductive polymer wire layer in a direction crossing the one direction so as to have a predetermined gap between the conductive polymer wires constituting the plurality of conductive polymer wires; And
And forming a second electrode portion on the other side of the substrate except the one side, the second electrode portion including a plurality of electrodes connected to the respective conductive polymer wires in a one-to-one manner.
8. The method of claim 7,
The step of forming the first conductive polymer wire layer and the step of forming the second conductive polymer wire layer may include:
And simultaneously forming a plurality of conductive polymer wires while simultaneously moving a plurality of the syringes arranged in a line on one side of the substrate to the other side.
KR1020150023956A 2015-02-17 2015-02-17 Method for fabricating sensor using polymer conducting wire KR20160101757A (en)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130051357A (en) 2011-11-09 2013-05-20 한국과학기술원 Apparatus of driving for robot joint

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130051357A (en) 2011-11-09 2013-05-20 한국과학기술원 Apparatus of driving for robot joint

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