KR20160084523A - Improved Coating Nozzle and Coating Apparatus Having the Same - Google Patents

Abstract

The present invention relates to an improved coating nozzle and a coating device with the same. According to the present invention, the coating nozzle comprises: a first rib and a second rib facing each other; a first manifold provided into any one or both ones of the first rib and the second rib wherein an upper portion of a section of the first manifold has a hanger shape having a declining slope from a central portion to both ends; a second manifold directly connected to a lower portion of the first manifold and provided together with the first manifold; and a discharging hole provided to lower portions of the first rib and the second rib. A coating liquid is supplied and stored into the first manifold and the second manifold.

Description

TECHNICAL FIELD [0001] The present invention relates to an improved coating nozzle and a coating device having the coating nozzle.

The present invention relates to an improved coating nozzle and a coating apparatus having the same.

More specifically, the present invention provides a two-stage manifold at the bottom of a single manifold in a conventional coating nozzle having a single manifold, whereby the difference in internal pressure between the central portion and both ends is greatly reduced And a coating unit having the coating nozzle. The present invention relates to an improved coating nozzle capable of high-speed coating and a coating uniformity of a coating liquid is remarkably improved by discharging the coating liquid at a high pressure.

In general, in order to manufacture a flat panel display (FPD) including a PDP, an LCD, and an OLED, a coating apparatus for applying a coating on a substrate such as glass using a coating nozzle such as a slit die nozzle is used.

More particularly, Figure 1 is a schematic representation of a coating apparatus used to manufacture a flat panel display (FPD).

1, in a coating apparatus 100 used to manufacture a flat panel display (FPD), a substrate G is placed on a suction table 112 and then a coating attached to the gantry 125 The coating liquid is applied on the substrate G while moving the nozzle 120 in the horizontal direction, for example.

More specifically, in order to apply the coating on the substrate G, the substrate G must be transferred onto the suction table 112 first. Thereafter, the substrate G is held on the suction table 112 by a suction unit (not shown) formed on the suction table 112 and a vacuum device (not shown) connected to the suction unit. Thereafter, the coating liquid is applied onto the substrate G through a discharge port (not shown) formed at the lower portion of the coating nozzle 120.

Since the coating of the coating solution on the substrate G can be performed only in one direction, the coating time of the coating solution on the substrate G is increased and the production speed of the substrate G is slowed down there was.

As a solution to the problem of the conventional coating apparatus 100, the prior art has proposed and used the coating apparatus capable of bidirectional coating.

More particularly, Figs. 2A to 2D are views showing a bidirectional coating apparatus and a bidirectional coating method according to a first prior art. The bidirectional coating apparatus and the bidirectional coating method according to the first prior art are disclosed in Korean Patent Application filed on Apr. 24, 2006, entitled " Slit coating apparatus and slit coating method using the same & 10-2006-0036631, and is described in detail in Korean Patent Laid-Open No. 10-2007-0104967, filed on October 30, 2007.

Referring to FIGS. 2A to 2D, the coating nozzle 220 of the coating apparatus according to the first conventional technique pre-ejects the coating while waiting on the first coating preliminary discharging unit 240 (FIG. 2A). Thereafter, the coating nozzle 220 is placed on the first substrate G1 placed on the suction table 212 and then moved in a predetermined direction at a predetermined distance from the first substrate G1 , And the coating liquid 270 is applied while moving in the direction in which the second coating liquid preliminary discharge portion 250 is installed (Fig. 2B). When the coating process of the first substrate G1 is completed, the coating nozzle 220 pre-ejects the coating while waiting at the second coating pre-discharge unit 250. At this time, on the suction table 212, The second substrate G2 on which the coating process is to be performed is seated (Fig. 2C). Thereafter, the coating nozzle 220 is positioned on the second substrate G2 placed on the suction table 212, and is spaced apart from the second substrate G2 by a predetermined distance, , And the coating liquid 270 is applied while moving in the direction in which the first coating liquid preliminary discharge portion 240 is installed (FIG.

While repeating the above-described process, a continuous substrate coating process proceeds.

Reference numerals 231a and 231b, which are not shown in Figs. 2A to 2D, are respectively a cleaning tank, 233a and 233b are cleaning liquids respectively, 235a and 235b are rollers, and 237a and 237b respectively denote doctor blades.

2E is a view showing a bidirectional coating apparatus according to a second prior art. Such a bidirectional coating apparatus according to the second prior art is disclosed in, for example, Korean Patent Application No. 10-2011-0100443 entitled " Substrate Coater Apparatus and Coating Method Using It " And is described in detail in Korean Patent No. 10-1261290, filed on April 30, 2013.

Referring to FIG. 2E, the coating apparatus 200 for a substrate according to the second conventional technique includes a suction table 212 on which a substrate G to be coated with a liquid is mounted; A coating nozzle 220 for discharging the coating liquid onto the surface of the suction table 212; A nozzle cleaner 230 for cleaning the side surface 220s around the discharge port (not shown) of the coating nozzle 220; A first preliminary discharge portion 240 located in a first standby position 240P in front of the suction table 212; A second preliminary ejection unit 250 located at a second standby position 250P behind the suction table 212; And a gantry 225 for reciprocating the coating nozzle 220 between the first preliminary ejection unit 240 and the second waiting position 250P.

The gantry 225 is fixed to the position of the coating nozzle 220 so that the nozzle cleaner 230 does not interfere with the coating nozzle 220 while the coating nozzle 220 applies the coating liquid to the surface of the substrate G And is formed to have a sufficiently long width so that the standby space 230P is provided on one side thereof. The nozzle cleaner 230 is positioned in the atmospheric space 230P of the gantry 225 while the coating nozzle 220 applies the coating solution to the surface of the substrate G, The nozzle cleaner 230 can clean the nozzle side 220s while moving along the discharge port (not shown) on the transfer rail 239 only when the nozzle side 220s is cleaned.

The coating apparatus 200 of the substrate according to the second conventional technique described above is used to reciprocate the coating nozzle 220 between the first preliminary discharge portion 240 and the second standby position 250P by using the gantry 225 The coating solution can be applied on the substrate G. [

However, in the above-described first and second prior arts, the advantage that bi-directional coating of the substrate G is possible and the coating can be applied to the surface of the substrate G in a shorter time is achieved, Occurs.

FIG. 2F is a schematic view showing an inner sectional view of the first and second ribs constituting the coating nozzle according to the prior art. FIG. 2G is a schematic view showing a cross- FIG. 2H is a view showing an operation of coating the coating in both directions using the coating nozzle according to the first conventional technique. FIG.

Referring to FIGS. 2F and 2G, a conventional coating nozzle 220 includes a first lip 220a and a second lip 220b. The first lip 220a and the second lip 220b Are provided with a hanger-like manifold 222 for storing the coating liquid 270 therein. Accordingly, the coating liquid 270 stored in the manifold 222 is discharged from the upper portion through the land portion L to the discharge port 224 by applying pressure. In this case, the pressure applied at the upper portion of the coating liquid 270 is such that the upper portion of the cross section of the manifold 222 has a pressure Pc in the middle portion having a hanger shape having a downward inclination from the central portion toward both ends, And the coating liquids Pe are ejected through the land portion L to the ejection opening 224 at a central portion at a rapid rate and are discharged slowly toward both ends. Therefore, the coating liquid 270 applied on the substrate G has a thick central portion and a thin coating on both ends, resulting in a problem that the coating thickness uniformity of the coating 270 is low.

In the coating nozzle 220 according to the related art, the vertical distance of the land portion L under the manifold 222 is relatively large. Accordingly, since the coating liquid 270 is applied to the substrate G through the land portion L having a relatively long vertical distance, the discharge pressure at the discharge port 224 of the coating liquid 270 becomes relatively low , The coating speed of the coating nozzle 220 moving on the substrate G is relatively slow in order to coat the coating thickness of the coating solution with a predetermined coating solution.

Referring to FIG. 2H, the coating nozzle 220 of the first prior art has a width W1 at the lower end of the first lip 220a and a width w2 at the lower end of the second lip 220b, Respectively. In this case, when coating in the first direction D1 and coating in the second direction D2 in the bidirectional coating, the substrate G and the first and second ribs 220a and 220b, There is a problem that the contact area with the lower end portion of the coating layer 224 is different, and in particular, the coating thickness at each coating end portion in each of the two directions is differently applied.

Therefore, a new method for solving the above-mentioned problems is required.

1. Korean Patent Publication No. 10-2007-0104967 2. Korean Patent No. 10-1261290

SUMMARY OF THE INVENTION The present invention has been accomplished in order to solve the above problems of the prior art, and it is an object of the present invention to provide a two-stage manifold for a coating nozzle having a single- The difference in internal pressure between both ends is greatly reduced and the land portion is shortened so that the coating liquid is discharged at a high pressure and thus coating uniformity of the coating is greatly improved and an improved coating nozzle capable of high speed coating and a coating device .

According to a first aspect of the present invention, there is provided a coating nozzle comprising: first and second ribs opposed to each other; A first manifold provided on an inner side of either or both of the first lip and the second lip and having a hanger shape whose upper end portion has a downward inclination from the central portion toward both ends; A second manifold provided directly connected to a lower portion of the first manifold; And a discharge port provided at a lower end of the first lip and the second lip, wherein the coating liquid is supplied and stored in the first manifold and the second manifold.

A coating nozzle according to a second aspect of the present invention comprises: first and second ribs opposed to each other; A first manifold provided on an inner side of either or both of the first lip and the second lip and having a hanger shape whose upper end portion has a downward inclination from the central portion toward both ends; A second manifold provided below the first manifold and spaced apart from the first manifold by a stepped portion; And a discharge port provided at a lower end of the first lip and the second lip, wherein the coating liquid is supplied and stored in the first manifold and the second manifold.

A coating nozzle according to a third aspect of the present invention includes first and second ribs opposed to each other; A first manifold provided on an inner side of either or both of the first lip and the second lip and having a hanger shape whose upper end portion has a downward inclination from the central portion toward both ends; A second manifold provided directly in communication with a lower portion of the first manifold, the lower portion of the second manifold having a downwardly concave round portion; And a discharge port provided at a lower end of the first lip and the second lip, wherein the coating liquid is supplied and stored in the first manifold and the second manifold.

A coating apparatus according to a fourth aspect of the present invention comprises: a suction table on which a substrate is mounted; A coating nozzle positioned on the suction table for coating the coating on the substrate; And a gantry for mounting the coating nozzle and reciprocating the coating nozzle on the substrate, wherein the coating nozzle comprises: first and second lips facing each other; A first manifold provided on an inner side of either or both of the first lip and the second lip and having a hanger shape whose upper end portion has a downward inclination from the central portion toward both ends; A second manifold provided directly connected to a lower portion of the first manifold; And a discharge port provided at a lower end of the first lip and the second lip, and the fluid is supplied and stored in the first manifold and the second manifold.

The following advantages are achieved by using the improved coating nozzle according to the present invention and the coating apparatus having the same.

1. The difference in internal pressure between the central part and both ends is greatly reduced by the two-stage manifold.

2. Since the land area is shortened, the coating liquid is discharged at a high pressure.

3. Coating uniformity of the coating is greatly improved.

4. High-speed coating becomes possible.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic illustration of a coating apparatus used to manufacture a flat panel display (FPD).
2A to 2D are diagrams showing a bidirectional coating apparatus and a bidirectional coating method according to a first prior art.
2E is a view showing a bidirectional coating apparatus according to a second prior art.
FIG. 2F is a schematic view showing an inner sectional view of the first and second ribs constituting the coating nozzle according to the prior art. FIG.
FIG. 2G is a view showing a state where a coating liquid is applied onto a substrate using a coating nozzle according to a conventional technique. FIG.
2H is a view showing an operation of coating the coating in both directions using the coating nozzle according to the first conventional technique.
FIG. 3A is a schematic cross-sectional view of a coating nozzle according to a first embodiment of the present invention. FIG.
FIG. 3B is a schematic cross-sectional side view of the coating nozzle according to the first embodiment of the present invention shown in FIG. 3A, taken along the direction A. FIG.
FIG. 3C is a schematic cross-sectional view of a coating nozzle according to a second embodiment of the present invention. FIG.
FIG. 3D is a schematic cross-sectional side view of the coating nozzle according to the second embodiment of the present invention shown in FIG.
FIG. 3E is a schematic cross-sectional view of a coating nozzle according to a third embodiment of the present invention. FIG.
FIG. 3F is a schematic cross-sectional side view of the coating nozzle according to the third embodiment of the present invention shown in FIG. 3E taken along the A direction.
FIG. 3G is a view illustrating an operation of coating the coating liquid in both directions using the coating nozzle according to the embodiment of the present invention.
3H is a schematic view of a coating apparatus according to an embodiment of the present invention.

Hereinafter, the present invention will be described in detail with reference to embodiments and drawings of the present invention.

FIG. 3A schematically illustrates an internal cross-sectional view of a coating nozzle according to a first embodiment of the present invention, and FIG. 3B is a cross-sectional view taken along a direction A of the coating nozzle according to the first embodiment of the present invention shown in FIG. 1 is a schematic cross-sectional view of one side.

Referring to FIGS. 3A and 3B, the coating nozzle 320 according to the first embodiment of the present invention includes first and second ribs 320a and 320b facing each other; A first manifold 322a provided on the inner side of one or both of the first and second ribs 320a and 320b and having a hanger shape whose upper end portion has a downward inclination in the both end direction from the central portion, ); A second manifold 322b directly connected to a lower portion of the first manifold 322a; And a discharge port 324 provided at a lower end of the first and second ribs 320a and 320b and a coating 370 is disposed in the first manifold 322a and the second manifold 322b. And stored.

The second manifold 322b described above may be formed to have recessed portions D as viewed from the side. The recessed portion D shown in Fig. 3B may have, for example, a cross-section of a right-angled trapezoid, but is not limited thereto. More specifically, it should be noted that the recessed portion D shown in FIG. 3B may have a round shape in cross section, as shown in FIG. 3D, which will be described later.

In the coating nozzle 320 according to the first embodiment of the present invention shown in FIGS. 3A and 3B, the first manifold 322a and the second manifold 322b form a first lip 320a, Those skilled in the art will appreciate that the first manifold 322a and the second manifold 322b may be provided inside the second lip 320b or may be provided within the first lip 320b, 320a and the second lip 320b, respectively.

In the coating nozzle 320 according to the first embodiment of the present invention, when the coating 370 is stored in the first and second manifolds 322a and 322b, pressure is applied to the upper portion of the first manifold 322a The coating liquid 370 flows along the land portion L after passing through the second manifold 322b and is discharged from the discharge port 324. [ In this case, the pressure rises as the liquid 370 passes through the second manifold 322b, so that the discharge speed of the coating liquid 370 at the discharge port 324 is lower than when the first manifold 322a alone is used .

Further, the vertical length of the land portion L in which the coating liquid moves is shortened by the second manifold 322b, and the discharge speed of the coating 370 in the discharge port 324 further increases.

Thus, in the coating nozzle 320 according to the first embodiment of the present invention, compared to the prior art coating nozzle 220 using a single manifold 222 (see Figures 2F and 2G) As the discharge speed of the coating 370 increases, high-speed coating, which requires coating of the same coating thickness on the substrate G, becomes possible.

In the coating nozzle 320 according to the first embodiment of the present invention, since the two-stage manifold is used like the first and second manifolds 322a and 322b, the second manifold 322b is a kind of pressure buffer layer So that the difference in internal pressure between the central portion and both ends of the entire first and second manifolds 322a and 322b is greatly reduced. Accordingly, since the discharged amount of the coating liquid 370 discharged from the center portion of the discharge port 324 and both ends of the discharge port 324 is maintained to be the same, the coating uniformity of the coating liquid 370 is greatly improved.

FIG. 3C is a schematic view showing an inner cross-sectional view of a coating nozzle according to a second embodiment of the present invention. FIG. 3D is a sectional view taken along the direction A of the coating nozzle according to the second embodiment of the present invention shown in FIG. 1 is a schematic cross-sectional view of one side.

Referring to FIGS. 3c and 3d, the coating nozzle 320 according to the second embodiment of the present invention includes first and second ribs 320a and 320b facing each other; A first manifold 322a provided on the inner side of one or both of the first and second ribs 320a and 320b and having a hanger shape whose upper end portion has a downward inclination in the both end direction from the central portion, ); A second manifold 322b provided below the first manifold 322a and separated from the first manifold 322a by a stepped portion 323; And a discharge port 324 provided at a lower end of the first and second ribs 320a and 320b and a coating 370 is disposed in the first manifold 322a and the second manifold 322b. And stored.

The second manifold 322b described above may be formed to have recessed portions D as viewed from the side. The recessed portion D shown in Fig. 3D has a round shape, but is not limited thereto. More specifically, it should be noted that the recessed portion D shown in Fig. 3D may have a right-angled trapezoidal shape in cross-section as shown in Fig. 3B.

In the coating nozzle 320 according to the second embodiment of the present invention shown in FIGS. 3C and 3D, when the first manifold 322a and the second manifold 322b are in contact with the first rib 320a, Those skilled in the art will appreciate that the first manifold 322a and the second manifold 322b may be provided inside the second lip 320b or may be provided within the first lip 320b, 320a and the second lip 320b, respectively.

In the coating nozzle 320 according to the second embodiment of the present invention, when the coating 370 is stored in the first and second manifolds 322a and 322b, pressure is applied to the upper portion of the first manifold 322a The coating liquid 370 flows along the land portion L after passing through the stepped portion 323 and the second manifold 322b and is discharged from the discharge port 324. In this case, the pressure is further increased while the coating 370 passes through the stepped portion 323 and the second manifold 322b, so that the discharge speed of the molten liquid 370 at the discharge port 324 becomes higher than the discharge speed of the first manifold 322a). ≪ / RTI >

The vertical length of the land portion L on which the coating liquid moves is further shortened by the stepped portion 323 and the second manifold 322b to further increase the discharge speed of the coating 370 at the discharge port 324 .

Therefore, the coating nozzle 320 according to the second embodiment of the present invention has the advantage that the coating nozzle 220 in the discharge port 324 is smaller in size than the coating nozzle 220 in the prior art using a single manifold 222 (see FIGS. 2F and 2G) As the discharge speed of the coating 370 increases, high-speed coating, which requires coating of the same coating thickness on the substrate G, becomes possible.

In the coating nozzle 320 according to the second embodiment of the present invention, a two-stage manifold is used like the first and second manifolds 322a and 322b and the first and second manifolds 322a and 322b The stepped portion 323 and the second manifold 322b function as a pressure buffer layer so that the central portion of the entire first and second manifolds 322a and 322b The difference in internal pressure between both ends is greatly reduced. Accordingly, since the discharged amount of the coating liquid 370 discharged from the center portion of the discharge port 324 and both ends of the discharge port 324 is maintained to be the same, the coating uniformity of the coating liquid 370 is greatly improved.

FIG. 3E is a schematic view showing an inner cross-sectional view of the coating nozzle according to the third embodiment of the present invention. FIG. 3F is a sectional view taken along the A direction of the coating nozzle according to the third embodiment of the present invention shown in FIG. 1 is a schematic cross-sectional view of one side.

Referring to FIGS. 3E and 3F, the coating nozzle 320 according to the third embodiment of the present invention includes first and second ribs 320a and 320b facing each other; A first manifold 322a provided on the inner side of one or both of the first and second ribs 320a and 320b and having a hanger shape whose upper end portion has a downward inclination in the both end direction from the central portion, ); A second manifold 322b directly connected to the lower portion of the first manifold 322a and having a downwardly concave rounded portion R provided at a lower portion thereof; And a discharge port 324 provided at a lower end of the first and second ribs 320a and 320b and a coating 370 is disposed in the first manifold 322a and the second manifold 322b. And stored.

In the coating nozzle 320 according to the third embodiment of the present invention, the first manifold 322a and the second manifold 322b are provided inside the first lip 320a. Those skilled in the art will appreciate that the first manifold 322a and the second manifold 322b may be provided inside the second lip 320b or may be provided within the first lip 320a and the second lip 320b As will be described below.

In the coating nozzle 320 according to the third embodiment of the present invention described above, in the state where the coating liquid 370 is stored in the first and second manifolds 322a and 322b, When the pressure is applied, the coating liquid 370 passes through the second manifold 322b, moves along the land portion L, and is discharged from the discharge port 324. In this case, the pressure rises as the liquid 370 passes through the second manifold 322b, so that the discharge speed of the coating liquid 370 at the discharge port 324 is lower than when the first manifold 322a alone is used .

Further, the vertical length of the land portion L on which the coating liquid is moved by the second manifold 322b is averagely shortened to further increase the discharge speed of the coating 370 at the discharge port 324.

Thus, in the coating nozzle 320 according to the third embodiment of the present invention, compared to the prior art coating nozzle 220 using a single manifold 222 (see FIGS. 2F and 2G) As the discharge speed of the coating 370 increases, high-speed coating, which requires coating of the same coating thickness on the substrate G, becomes possible.

In the coating nozzle 320 according to the third embodiment of the present invention, a two-stage manifold is used like the first and second manifolds 322a and 322b, and a lower portion of the second manifold 322b is used The second manifold 322b functions as a pressure buffer layer as well as offset the internal pressure difference between the central portion and the both ends of the first manifold 322a and ultimately The difference in internal pressure between the central portion and both ends of the entire first and second manifolds 322a and 322b is greatly reduced. Accordingly, since the discharged amount of the coating liquid 370 discharged from the center portion of the discharge port 324 and both ends of the discharge port 324 is maintained to be the same, the coating uniformity of the coating liquid 370 is greatly improved.

FIG. 3G is a view illustrating an operation of coating the coating liquid in both directions using the coating nozzle according to the embodiment of the present invention.

3g, the width w1 of the lower end of the first lip 320a and the width w1 of the lower end of the second lip 320b in the coating nozzle 320 according to the first to third embodiments of the present invention, And the width w2 have the same value. In this case, when coating in the first direction D1 and coating in the second direction D2 in the two-directional coating, the substrate G and the first and second ribs 320a and 320b, The contact area with the lower end of the coating 324 is made equal, and in particular the coating thickness at each coating end in both directions is equally applied.

Hereinafter, a coating apparatus according to an embodiment of the present invention will be described.

3H is a schematic view of a coating apparatus according to an embodiment of the present invention.

Referring to FIG. 3H, it is noted that the coating apparatus 300 according to an embodiment of the present invention is substantially the same as the prior art coating apparatus 100 shown in FIG. 1 except for the coating nozzle 320 shall.

Referring to FIG. 3H, with reference to FIGS. 3A through 3G, a coating apparatus 300 according to an embodiment of the present invention includes a suction table 312 on which a substrate G is mounted; A coating nozzle 320 disposed on the suction table 312 for coating the coating 370 onto the substrate G; And a gantry (325) for mounting the coating nozzle (320) and reciprocating the coating nozzle (320) on the substrate (G), wherein the coating nozzle (320) comprises a first lip Second ribs 320a and 320b; A first manifold 322a provided on the inner side of one or both of the first and second ribs 320a and 320b and having a hanger shape whose upper end portion has a downward inclination in the both end direction from the central portion, ); A second manifold 322b directly connected to a lower portion of the first manifold 322a; And a discharge port 324 provided at a lower end of the first and second ribs 320a and 320b and the rinsing liquid 370 is supplied to the first manifold 322a and the second manifold 322b, And then stored.

The coating nozzle 320 of the coating apparatus 300 according to an embodiment of the present invention may be embodied as a coating nozzle 320 according to the first embodiment of the present invention shown in FIGS. 3A and 3B. Accordingly, the second manifold 322b can be formed to have recessed grooves D as viewed from the side. In this case, the recessed portion D may have, for example, a cross-section of a right-angled trapezoid (see Fig. 3B), but is not limited thereto. More specifically, it should be noted that the recessed portion D may have a round shape in cross section as shown in Fig. 3D.

In the coating nozzle 320 of the coating apparatus 300 according to an embodiment of the present invention, the first manifold 322a and the second manifold 322b are disposed inside the first lip 320a Those skilled in the art will appreciate that the first manifold 322a and the second manifold 322b may be provided inside the second lip 320b, Or may be provided inside the first lip 320a and the second lip 320b, respectively.

In the coating apparatus 300 according to an embodiment of the present invention, when the coating 370 is stored in the first and second manifolds 322a and 322b, pressure is applied to the upper portion of the first manifold 322a The coating liquid 370 passes through the second manifold 322b, moves along the land portion L, and is discharged from the discharge port 324. In this case, the pressure rises as the liquid 370 passes through the second manifold 322b, so that the discharge speed of the coating liquid 370 at the discharge port 324 is lower than when the first manifold 322a alone is used . Further, the vertical length of the land portion L in which the coating liquid moves is shortened by the second manifold 322b, and the discharge speed of the coating 370 in the discharge port 324 further increases.

Accordingly, in the coating apparatus 300 according to the embodiment of the present invention, the coating apparatus 100 (see FIG. 1) using the single manifold 222 (see FIGS. 2F and 2G) 324, the coating speed of the coating 370 is increased, so that a high-speed coating which requires coating of the same coating thickness on the substrate G becomes possible.

In the coating apparatus 300 according to the embodiment of the present invention, since the two-stage manifold is used like the first and second manifolds 322a and 322b, the second manifold 322b functions as a pressure buffer layer The difference in the internal pressures between the central portion and both ends of the entire first and second manifolds 322a and 322b is greatly reduced. The uniformity of the coating 370 applied on the substrate G is greatly improved since the discharged amount of the coating 370 discharged from the center portion of the discharge port 324 and both ends is kept the same.

In addition, the coating nozzle 320 of the coating apparatus 300 according to an embodiment of the present invention can be implemented with the coating nozzle 320 according to the second embodiment of the present invention shown in Figs. 3C and 3D. Accordingly, the coating nozzle 320 includes first and second ribs 320a and 320b facing each other; A first manifold 322a provided on the inner side of one or both of the first and second ribs 320a and 320b and having a hanger shape whose upper end portion has a downward inclination in the both end direction from the central portion, ); A second manifold 322b provided below the first manifold 322a and separated from the first manifold 322a by a stepped portion 323; And a discharge port 324 provided at a lower end of the first and second ribs 320a and 320b. Accordingly, the second manifold 322b described above can be formed to have recessed portions D as viewed from the side. In this case, the recessed portion D has a round shape (see FIG. 3D), but is not limited thereto. More specifically, it should be noted that the recessed portion D may have a right-angled trapezoidal shape in cross-section as shown in FIG. 3B.

In the coating apparatus 300 according to an embodiment of the present invention, the first manifold 322a and the second manifold 322b are provided inside the first rib 320a. Those skilled in the art will appreciate that the first manifold 322a and the second manifold 322b may be provided inside the second lip 320b or may be provided within the first lip 320a And the second lip 320b, respectively, as will be described later.

In the coating apparatus 300 according to an embodiment of the present invention, pressure is applied to the upper portion of the first manifold 322a while the coating 370 is stored in the first and second manifolds 322a and 322b The coating liquid 370 passes along the land portion L after passing through the stepped portion 323 and the second manifold 322b and is discharged from the discharge port 324. In this case, the pressure is further increased while the coating 370 passes through the stepped portion 323 and the second manifold 322b, so that the discharge speed of the molten liquid 370 at the discharge port 324 becomes higher than the discharge speed of the first manifold 322a). ≪ / RTI >

The vertical length of the land portion L on which the coating liquid moves is further shortened by the stepped portion 323 and the second manifold 322b to further increase the discharge speed of the coating 370 at the discharge port 324 .

Therefore, in the coating apparatus 300 according to the embodiment of the present invention, compared to the coating nozzle 220 of the prior art using a single manifold 222 (see FIGS. 2F and 2G), the coating The ejection speed of the substrate 370 increases, so that a high-speed coating which requires coating of the same coating thickness on the substrate G becomes possible.

In the coating apparatus 300 according to an embodiment of the present invention, a two-stage manifold is used as the first and second manifolds 322a and 322b and the first and second manifolds 322a and 322b are used. The stepped portion 323 and the second manifold 322b function as a pressure buffer layer so that the central portion of the entire first and second manifolds 322a and 322b and the both ends The difference in the internal pressure between the two is greatly reduced. The uniformity of the coating 370 applied on the substrate G is greatly improved since the discharged amount of the coating 370 discharged from the center portion of the discharge port 324 and both ends is kept the same.

In addition, the coating nozzle 320 of the coating apparatus 300 according to an embodiment of the present invention can be implemented with the coating nozzle 320 according to the third embodiment of the present invention shown in FIGS. 3E and 3F. Accordingly, the coating nozzle 320 includes first and second ribs 320a and 320b facing each other; A first manifold 322a provided on the inner side of one or both of the first and second ribs 320a and 320b and having a hanger shape whose upper end portion has a downward inclination in the both end direction from the central portion, ); A second manifold 322b directly connected to the lower portion of the first manifold 322a and having a downwardly concave rounded portion R provided at a lower portion thereof; And a discharge port 324 provided at a lower end of the first and second ribs 320a and 320b.

In the coating apparatus 300 according to an embodiment of the present invention, the first manifold 322a and the second manifold 322b are provided inside the first rib 320a. Those skilled in the art will appreciate that the first manifold 322a and the second manifold 322b may be provided inside the second lip 320b or may be provided within the first lip 320a And the second lip 320b, respectively, as will be described later.

In the coating apparatus 300 according to the embodiment described above, pressure is applied to the upper portion of the first manifold 322a in a state where the coating liquid 370 is stored in the first and second manifolds 322a and 322b The coating liquid 370 passes through the second manifold 322b, moves along the land portion L, and is discharged from the discharge port 324. In this case, the pressure rises as the liquid 370 passes through the second manifold 322b, so that the discharge speed of the coating liquid 370 at the discharge port 324 is lower than when the first manifold 322a alone is used .

Further, the vertical length of the land portion L on which the coating liquid is moved by the second manifold 322b is averagely shortened to further increase the discharge speed of the coating 370 at the discharge port 324.

Therefore, in the coating apparatus 300 according to the embodiment of the present invention, compared to the coating nozzle 220 of the prior art using a single manifold 222 (see FIGS. 2F and 2G), the coating The ejection speed of the substrate 370 increases, so that a high-speed coating which requires coating of the same coating thickness on the substrate G becomes possible.

In the coating apparatus 300 according to an embodiment of the present invention, a two-stage manifold is used like the first and second manifolds 322a and 322b, and the lower portion of the second manifold 322b is used as a lower manifold (See FIGS. 3E and 3F), the second manifold 322b serves as a kind of pressure buffer layer as well as the inner portion between the central portion of the first manifold 322a and the inner portion between the both ends The difference in pressure between the central portion and both ends of the entire first and second manifolds 322a and 322b is greatly reduced. Accordingly, since the discharged amount of the coating liquid 370 discharged from the center portion of the discharge port 324 and both ends of the discharge port 324 is maintained to be the same, the coating uniformity of the coating liquid 370 is greatly improved.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to be illustrative, of illustration, and not limitative of the invention, as various changes may be made therein without departing from the scope of the invention. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

100, 200, 300: coating device 112, 212, 312: suction table
120, 220, 320: coating nozzles 125, 225, 325: gantry
224, 324: a discharge port 220a, 320a: a first lip 220b, 320b:
220s: Side 222: Manifold 230: Nozzle scrubber 230P: Waiting space
231a, 231b: washing tank 233a, 233b: cleaning liquid 235a, 235b: roller
237a, 237b: doctor blade 239: feed rail
240: First casting preliminary discharging portion 240P: First waiting position
250: second coating liquid preliminary discharge portion 250P: second waiting position
270,370: Plaster 322a: First manifold 322b: Second manifold
323: stepped portion D: recessed portion G, G1, G2: substrate
L: Land portion R: Round portion

Claims (16)

In the coating nozzle,
A first lip and a second lip facing each other;
A first manifold provided on an inner side of either or both of the first lip and the second lip and having a hanger shape whose upper end portion has a downward inclination from the central portion toward both ends;
A second manifold provided directly connected to a lower portion of the first manifold; And
And a discharge port provided at a lower end of the first lip and the second lip,
Lt; / RTI >
The first manifold and the second manifold are supplied with the coating solution and stored
Coating nozzle. The method according to claim 1,
Wherein the second manifold is formed to have a concave portion as viewed from the side and has a cross section of a right-angled trapezoid or a round shape. 3. The method according to claim 1 or 2,
Wherein a width of the lower end of the first lip and a width of the lower end of the second lip have the same value. In the coating nozzle,
A first lip and a second lip facing each other;
A first manifold provided on an inner side of either or both of the first lip and the second lip and having a hanger shape whose upper end portion has a downward inclination from the central portion toward both ends;
A second manifold provided below the first manifold and spaced apart from the first manifold by a stepped portion; And
And a discharge port provided at a lower end of the first lip and the second lip,
Lt; / RTI >
The first manifold and the second manifold are supplied with the coating solution and stored
Coating nozzle. 5. The method of claim 4,
Wherein the second manifold is formed to have a concave portion as viewed from the side and has a cross section of a right-angled trapezoid or a round shape. The method according to claim 4 or 5,
Wherein a width of the lower end of the first lip and a width of the lower end of the second lip have the same value. In the coating nozzle,
A first lip and a second lip facing each other;
A first manifold provided on an inner side of either or both of the first lip and the second lip and having a hanger shape whose upper end portion has a downward inclination from the central portion toward both ends;
A second manifold provided directly in communication with a lower portion of the first manifold, the lower portion of the second manifold having a downwardly concave round portion; And
And a discharge port provided at a lower end of the first lip and the second lip,
Lt; / RTI >
The first manifold and the second manifold are supplied with the coating solution and stored
Coating nozzle. 8. The method of claim 7,
Wherein a width of the lower end of the first lip and a width of the lower end of the second lip have the same value. In the coating apparatus,
A suction table on which a substrate is mounted;
A coating nozzle positioned on the suction table for coating the coating on the substrate; And
Wherein the coating nozzle is mounted, and the gantry for reciprocating the coating nozzle on the substrate
, ≪ / RTI &
The coating nozzle comprising: first and second lips facing each other;
A first manifold provided on an inner side of either or both of the first lip and the second lip and having a hanger shape whose upper end portion has a downward inclination from the central portion toward both ends;
A second manifold provided directly connected to a lower portion of the first manifold; And
And a discharge port provided at a lower end of the first lip and the second lip,
Lt; / RTI >
The coating liquid is supplied and stored in the first manifold and the second manifold
Coating apparatus. 10. The method of claim 9,
Wherein the second manifold is formed to have a concave portion as viewed from the side, and the cross section of the second manifold has a rectangular trapezoidal shape or a round shape. 11. The method according to claim 9 or 10,
Wherein the width of the lower end of the first lip and the width of the lower end of the second lip have the same value. 10. The method of claim 9,
The coating nozzle
A first lip and a second lip facing each other;
A first manifold provided on an inner side of either or both of the first lip and the second lip and having a hanger shape whose upper end portion has a downward inclination from the central portion toward both ends;
A second manifold provided below the first manifold and spaced apart from the first manifold by a stepped portion; And
And a discharge port provided at a lower end of the first lip and the second lip,
≪ / RTI > 13. The method of claim 12,
Wherein the second manifold is formed to have a concave portion as viewed from the side, and the cross section of the second manifold has a rectangular trapezoidal shape or a round shape. The method according to claim 12 or 13,
Wherein the width of the lower end of the first lip and the width of the lower end of the second lip have the same value. 10. The method of claim 9,
The coating nozzle
A first lip and a second lip facing each other;
A first manifold provided on an inner side of either or both of the first lip and the second lip and having a hanger shape whose upper end portion has a downward inclination from the central portion toward both ends;
A second manifold provided directly in communication with a lower portion of the first manifold, the lower portion of the second manifold having a downwardly concave round portion; And
And a discharge port provided at a lower end of the first lip and the second lip,
≪ / RTI > 16. The method of claim 15,
Wherein the width of the lower end of the first lip and the width of the lower end of the second lip have the same value.

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