KR20160084255A - Ultrasound Probe and Manufacturing Method thereof - Google Patents

Abstract

Provided are an ultrasound probe manufactured by using bornitrid or graphan, and a manufacturing method thereof. The ultrasound probe includes a matching layer, a transducer layer prepared on the back side of the matching layer, and a sound absorption layer prepared on the back side of the transducer. The ultrasound probe is made of bornitrid or graphan. The ultrasound probe further includes at least one sheet prepared at least on the front side of the matching layer, between the matching layer and the transducer layer, between the transducer layer and the sound absorption layer, or the back side of the sound absorption layer.

Description

[0001] Ultrasonic probe and manufacturing method thereof [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an ultrasonic probe for generating an image inside a target object by using ultrasonic waves.

The ultrasound diagnostic apparatus irradiates an ultrasound signal from a body surface of a target object toward a target portion in the body and obtains an image related to a tomography or blood flow of the soft tissue using information of the reflected ultrasound signal (ultrasound echo signal) .

The ultrasonic diagnostic apparatuses are small, inexpensive, real-time displayable, and inexpensive, as compared with other imaging apparatuses such as X-ray diagnostic apparatuses, X-ray CT scanners, MRI (Magnetic Resonance Images) , Radiation and radiation exposure because it has a high safety advantage, is widely used for diagnosis of heart, abdomen, urinary and obstetrics.

An ultrasound imaging apparatus transmits an ultrasound signal to a target object to obtain an ultrasound image of the target object, an ultrasound probe for receiving the ultrasound echo signal reflected from the target object, and an ultrasound echo signal received from the ultrasound probe, And the like.

One aspect of the present invention provides an ultrasonic probe manufactured using Bornitrid or Graphan and a method of manufacturing the same.

The ultrasonic probe according to an embodiment includes a matching layer; A transducer layer provided on a rear surface of the matching layer; And a sound absorbing layer provided on a rear surface of the transducer layer, the transducer layer being formed of any one of a Bonnitride or a GRP plate, wherein the front surface of the matching layer, between the matching layer and the transducer layer, And at least one sheet provided on at least one of the rear surface of the sound-absorbing layer and the side surface of the matching layer, the transducer layer, and the sound-absorbing layer.

The signal line may transmit the heat sensed by the sheet to a backend of the ultrasonic probe so that the signal line may be connected to the at least one sheet so as to confirm the degree of heat generation of the ultrasonic probe .

In addition, at least one of the sound-absorbing layer and the matching layer may include any one of a Bonnitride or a GRAPHAN.

In addition, the sound-absorbing layer may include at least one sheet formed of either a nitride or a graphite sheet so as to be electrically connected to the transducer layer.

The heat sink may further include a heat sink provided on a rear surface of the sound-absorbing layer and discharging heat generated from the ultrasonic probe to the outside.

The at least one sheet may extend to the heat sink so as to be in thermal contact with the heat sink, and may transfer the absorbed heat to the heat sink.

The heat sink may further include at least one heat sink for thermally connecting the at least one sheet and the heat sink to transfer the heat absorbed by the at least one sheet to the heat sink.

Also, the heat sink may include any one of a Bonnitride or a GRAPHAN.

In addition, it may further include a protective layer provided on the front surface of the matching layer.

In addition, the protective layer may include an RF shield or a chemiluminescent shield, and the protective layer may be formed of either a nitride or a graphite.

Further, it may further comprise an acoustic lens provided on the front surface of the matching layer.

The sheet may be provided on at least one of a front surface of the acoustic lens and a space between the acoustic lens and the matching layer.

In addition, the acoustic lens may include any one of the Bonitrid or the GRAPHAN.

A method of manufacturing an ultrasonic probe according to an embodiment includes: providing a sound-absorbing layer; A transducer layer is provided on the entire surface of the sound-absorbing layer; And a matching layer provided on the entire surface of the transducer layer, wherein the surface of the matching layer, between the matching layer and the transducer layer, between the transducer layer and the sound-absorbing layer, Further comprising providing at least one sheet formed of at least one of a Bonnertrade or a graphene on at least one of side surfaces of the matching layer, the transducer layer, and the sound-absorbing layer.

And forming a signal line connected to the at least one sheet, wherein the signal line transmits heat sensed by the sheet to the rear end of the ultrasonic probe so as to confirm the degree of heat generation of the ultrasonic probe .

In addition, at least one of the sound-absorbing layer and the matching layer may include any one of a Bonnitride or a GRAPHAN.

The ultrasonic probe may further include a heat sink provided on a rear surface of the sound-absorbing layer to discharge heat generated in the ultrasonic probe to the outside.

The at least one sheet may extend to the heat sink for thermal contact with the heat sink, and the at least one sheet may transmit the absorbed heat to the heat sink.

The method may further include providing at least one heat sink for thermally connecting the at least one sheet and the heat sink to transfer the heat absorbed by the at least one sheet to the heat sink.

Also, the heat sink may include any one of a Bonnitride or a GRAPHAN.

The method may further include providing a protective layer on the entire surface of the matching layer.

In addition, the protective layer may include an RF shield or a chemiluminescent shield, and the protective layer may be formed of either a nitride or a graphite.

The method may further include providing an acoustic lens on the entire surface of the matching layer.

The providing of the sheet may include providing the sheet on at least one of the front surface of the acoustical lens and the acoustic lens and the matching layer.

In addition, the acoustic lens may include any one of the Bonitrid or the GRAPHAN.

The method may further include providing a sheet formed on one of the inner surface of the housing and the outer surface of the inner surface of the housing to discharge heat generated from the ultrasonic probe to the outside or to transmit an electrical signal to the transducer layer. have.

The ultrasonic diagnostic apparatus according to an embodiment of the present invention includes a matching layer, a transducer layer provided on a rear surface of the matching layer, a sound-absorbing layer provided on a rear surface of the transducer layer, At least one of a front surface of the matching layer, a space between the matching layer and the transducer layer, a space between the transducer layer and the sound-absorbing layer, a rear surface of the sound-absorbing layer, and a side surface of the matching layer, the transducer layer, And a signal line connected to the sheet and transmitting information related to the heat absorbed by the sheet, the ultrasonic probe comprising: A signal output unit for outputting a signal for generating an ultrasonic wave to the ultrasonic probe; And a control unit for checking the degree of heat generation of the ultrasonic probe based on the information transmitted from the signal line and controlling the signal output unit to adjust the power of the ultrasonic wave output from the ultrasonic probe.

According to an aspect of the present invention, the heating state of the probe can be monitored in real time.

In addition, the heat generated by the ultrasonic probe can be discharged to the outside by using the Bonitrid or the Grapan, thereby solving the heat generation problem.

Further, by solving the heat generation problem, the acoustic power of the ultrasonic probe can be increased.

1 is a view showing the structure of an ultrasonic probe according to an embodiment of the present invention.
2 is a view illustrating a structure of a protective layer of an ultrasonic probe according to an embodiment of the present invention.
3 to 5 are views showing the structure of an ultrasonic probe according to another embodiment of the present invention.
6 is a view illustrating a method of manufacturing an ultrasonic probe according to an embodiment of the present invention.

Hereinafter, an ultrasonic probe according to an embodiment of the present invention and a method of manufacturing the same will be described in detail with reference to the accompanying drawings.

FIG. 1 is a view illustrating a structure of an ultrasonic probe according to an embodiment of the present invention, and FIG. 2 is a view illustrating a structure of a protective layer of an ultrasonic probe according to an embodiment of the present invention.

1, an ultrasonic probe according to an embodiment of the present invention includes a transducer layer 20, a matching layer 10 provided on the front surface of the transducer layer 20, A sound absorbing layer 40 provided on the rear surface of the transducer layer 20 and a sound absorbing layer 40 disposed on the front surface of the protective layer 30, And a heat sink 50 provided on the rear surface of the heat sink 50.

One embodiment of the transducer includes a magnetostrictive ultrasound transducer that utilizes the magnetostrictive effect of a magnetic material or a capacitive microfabricated ultrasonic transducer that transmits and receives ultrasonic waves using vibration of several hundreds or thousands of microfabricated thin films (Capacitive micromachined ultrasonic transducer), or a piezoelectric ultrasonic transducer using the piezoelectric effect of a piezoelectric material. Hereinafter, a piezoelectric ultrasonic transducer will be described as an embodiment of a transducer.

When mechanical pressure is applied to a given material, a voltage is generated. When a voltage is applied, the effect of mechanical deformation is called a piezoelectric effect and a reverse piezoelectric effect. A substance having such an effect is called a piezoelectric material.

That is, a piezoelectric material is a material that converts electrical energy into mechanical vibration energy, and mechanical vibration energy into electrical energy.

The ultrasonic probe according to an embodiment of the present invention includes a transducer layer 20 made of a piezoelectric material that converts ultrasonic waves into mechanical vibrations when an electrical signal is applied thereto.

The piezoelectric material constituting the transducer layer 20 includes a PZMT single crystal made of a solid solution of ceramics, magnesium niobate, and titanic acid lead zirconate titanate (PZT), or a PZNT single crystal made of a zinc niobate and a lead oxide solid solution can do.

Further, the transducer layer 20 may be arranged in a single-layer structure or in a multilayered laminated structure.

Generally, the layered transducer layer 20 is easier to control impedance and voltage, and has the advantage of obtaining good sensitivity, energy conversion efficiency, and smooth spectrum.

In addition, an electrode to which an electrical signal can be applied may be formed on the front and rear surfaces of the transducer layer 20. When an electrode is formed on the front and back surfaces, one of the electrodes formed on the front and back surfaces may be a ground electrode and the other may be a signal electrode. The sheets S1, S2, S11, S21, S41, and S51 formed of Bonitrid or graphene to be described later may perform the functions of the electrodes. Details will be described later.

The matching layer 10 is provided on the front surface of the transducer layer 20. The matching layer 10 reduces the acoustic impedance difference between the transducer layer 20 and the object to match the acoustic impedance of the object with the transducer layer 20 so that the ultrasonic waves generated in the transducer layer 20 are efficiently .

To this end, the matching layer 10 may be provided to have an intermediate value between the acoustic impedance of the transducer layer 20 and the acoustic impedance of the object.

The matching layer 10 may be formed of glass or a resin material, and may be formed of a nitride or a graphene. Or the matching layer 10 may be formed of a material in which a material forming the existing matching layer 10 such as glass or resin and a powder of a Bonnitide or graphene are mixed. When the matching layer 10 comprises a Bonitride or a graphene, the matching layer 10 may be used for the connection of electrical signals.

It is also possible to constitute the plurality of matching layers 10 so that the acoustic impedance can change stepwise from the transducer layer 20 toward the object and the materials of the plurality of matching layers 10 can be configured to be different from each other have.

The transducer layer 20 and the matching layer 10 may be processed into a two-dimensional array of a matrix by a dicing process, or may be processed into a one-dimensional array.

The protective layer 30 may be provided on the front surface of the matching layer 10. The protection layer 30 may include an RF shield 31 that prevents external leakage of high frequency components that may occur in the transducer layer 20 and can block the inflow of an external high frequency signal.

In addition, the protective layer 30 includes a chemical shield 31 that can protect internal components from chemicals used for disinfection with water by coating or vapor-depositing a conductive material on the surface of a film having moisture resistance and chemical resistance .

The protective layer 30 may be formed in the form of a combination of the above-described RF Shield or Chemical Shield 31 with a Bonitride or Grassboard S32 made in the form of a sheet or a film. That is, as shown in FIG. 2, a film or a film (S32) made in the form of a sheet or a film is formed on the base film 33, and a RF shield or a chemical shield 31 ) May be formed to form the protective layer 30. A protective layer comprising a bonitide or grapane made in sheet or film form may be utilized as a means of connecting electrical signals.

The acoustic lens 9 may be provided on the front surface of the protective layer 30. [ The lens may have a convex shape in the radial direction of the ultrasonic wave to focus the ultrasonic wave, or may be formed in a concave shape when the sonic velocity is slower than the human body. The acoustic lens 9 may be formed of a material obtained by mixing a lens material and a powder of a Bonnitide or a graphene.

The sound-absorbing layer 40 is disposed on the rear surface of the transducer layer 20 and absorbs the ultrasonic waves generated in the transducer layer 20 and propagating backward, thereby preventing the ultrasonic waves from being reflected forward. Therefore, distortion of the image can be prevented from occurring.

The sound-absorbing layer 40 may be made of a plurality of layers to improve the damping or blocking effect of the ultrasonic waves. The sound-absorbing layer 40 may also be formed of a nitride or a graphite. The sound-absorbing layer 40 may be formed of a triode or a grating plate so that the heat generated in the transducer layer 20 can be efficiently absorbed and transmitted to the heat sink 50.

An electrode for applying an electrical signal to the piezoelectric body 20 may be formed on the entire surface of the sound-absorbing layer 40 contacting the transducer layer 20. [ The sheet S formed of the Bonn-trie or graphene described below may perform the function of the electrode. Details will be described later.

The heat sink 50 provided on the rear surface of the sound-absorbing layer 40 includes a plurality of plate-like fins formed of a metal such as aluminum to disperse heat. Although not shown in the drawings, a heat dissipating fan may be provided adjacent to the heat dissipating unit for discharging the heat dissipated by the pins of the heat sink 50 to the outside in order to further improve the heat dissipating performance. The heat sink 50 may also be manufactured using a Bonnitride or graphene. For example, the heat sink 50 may be formed of a material that is a mixture of a material such as aluminum or copper and a powder of Bonnitide or graphene. In addition, a sheet formed of a Bonnitride or a graphene may be inserted into the sound-absorbing layer, and the inserted sheet may be provided so as to be electrically connected to each element constituting the transducer array. That is, an electrical signal may be transmitted to the transducer array through the sheet inserted in the sound-absorbing layer.

The ultrasonic probe includes a sheet S provided between the acoustic lens 9, the matching layer 10, the transducer layer 20 and the sound-absorbing layer 40 constituting the above-described ultrasonic probe. The sheet S is formed of a Bonitrid or a graphene. More specifically, the sheet S formed from Bonitrid or graphene is formed on the front and back surfaces of the acoustic lens 9, on the front surface of the matching layer 10, between the matching layer 10 and the transducer layer 20, Between the layer 20 and the sound-absorbing layer 40, or on the back surface of the sound-absorbing layer 40. Alternatively, the sheet S may be provided on the sides of the sound-absorbing layer, the transducer layer, and the matching layer. 1 shows the front and rear surfaces of the acoustic lens 9, the front surface of the matching layer 10, between the matching layer 10 and the transducer layer 20, between the transducer layer 20 and the sound-absorbing layer 40, A structure is shown in which a sheet S formed of a grain or graphene is provided on the rear surface of the layer 40. However, the present invention is not limited to this, and it may be installed in at least one of the mounting positions. As described above, the protective layer 30 may include a sheet S32 formed of a Bonnitride or a grater sheet, and the acoustic lens 9, the matching layer 10, and the sound- Or a material including a graphene.

Bornitrid and Grafan are ultra-thin two-dimensional materials with similar characteristics to Graphene but much thinner. Bonitrid has a low density of approximately 2.2 g / cm < 3 > and high thermal conductivity and electrical conductivity. Also, it has excellent oxidation stability and chemical resistance, and has a low coefficient of friction, so that the processability is excellent. It is known that graphene has more than twice the thermal conductivity of diamond and 100 times better electrical conductivity than copper and can move more than 100 electrons faster than single crystal silicon. It is also known that it is transparent enough to transmit light at 98% or more.

The ultrasonic probe according to an embodiment of the present invention includes a sheet S formed of the above-described Bonnitrid or graphene to improve the heat dissipation performance of the ultrasonic probe and to prevent interconnection of the ultrasonic probe, noise shielding Can be solved.

The sheet S formed of a Bonnitride or a graphene can perform the function of an electrode. That is, the sheet S provided on the front and rear surfaces of the transducer layer 20 can function as a ground electrode or a signal electrode for applying an electrical signal to the transducer layer 20.

3 to 5 are views showing the structure of an ultrasonic probe according to another embodiment of the present invention.

As shown in Fig. 3, a heat sink 60 contacting the at least one sheet S and contacting the heat sink 50 may be provided on the side of the ultrasonic probe.

The heat sink 60 conveys the heat absorbed by the sheet S formed of the Bonnitrid or graphite sheet to the heat sink 50 so that the heat is discharged to the outside through the heat sink 50.

The heat sink 60 may also be formed of a bonitride or a graphene. Alternatively, the heat absorbed in the sheet S may be transferred to the heat sink 50 using a heat pipe instead of the heat sink 60.

It may be provided on both sides of the ultrasonic probe of the heat sink 60 as shown in Fig. 3, or may be provided on either side.

3 shows a separate heat sink 60 for transferring the heat absorbed by the sheet S to the heat sink 50. Unlike FIG. 3, FIG. 4 shows that the sheet S is located on the side of the ultrasonic probe And is in direct thermal contact with the heat sink 50 by extension (S41a).

In the figure, it is shown that one sheet S is extended to the side of the ultrasonic probe S41a and is in direct thermal contact with the heat sink 50, And can contact the sink 50. The sheet S formed of the Bonnitide or Grasspan having excellent thermal conductivity is extended and directly contacts the heat sink 50, so that the heat generated in the ultrasonic probe can be efficiently discharged to the outside.

5 shows that the signal line 70 is connected to the sheet S.

Information relating to the heat generated in the ultrasonic probe and absorbed by the sheet S is transmitted to the control unit 80 of the ultrasonic diagnostic apparatus through the signal line 70 connected to the sheet S. [ The control unit 80 can check the heating state of the ultrasonic probe in real time based on the information transmitted through the signal line 70 and adjust the operation of the ultrasonic probe based on the sensed state.

For example, the controller 80 checks the heating state of the ultrasonic probe on the basis of information transmitted through the signal line 70 connected to the seat S, and when the degree of heat generation of the ultrasonic probe exceeds a predetermined reference value, And a signal output unit 90 for outputting a signal for generating ultrasonic waves to the ultrasonic probe so that the heat of the ultrasonic probe is reduced. Or if the degree of heat generation of the ultrasonic probe is less than a predetermined reference value, the signal output unit 90 can be controlled so that the intensity of the ultrasonic wave output from the ultrasonic probe becomes higher regardless of the degree of heat generation of the ultrasonic probe. That is, the acoustic power of the ultrasonic probe and the heating state of the ultrasonic probe form a trade-off relationship. The control unit and the signal output unit may be included in an ultrasonic probe or may be included in a rear end device of an ultrasonic diagnostic apparatus such as a workstation of the ultrasonic diagnostic apparatus.

6 is a flowchart illustrating a method of manufacturing an ultrasonic probe according to an embodiment of the present invention.

The heat sink 50, the sound-absorbing layer 40, the transducer layer 20, the matching layer 10, the protective layer 30, and the acoustic lens 9 constituting the ultrasonic probe are laminated (100).

A heat sink 50 is disposed on the rear surface of the sound-absorbing layer 40. A transducer layer 20 is disposed on the front surface of the sound-absorbing layer 40. A matching layer 10 is formed on the front surface of the transducer layer 20 And a protective layer 30 may be provided on the entire surface of the matching layer 10. [ And an acoustic lens 9 may be provided on the front surface of the protective layer 30. [

As described above, the acoustic lens 9, the matching layer 10, and the sound-absorbing layer 40 may be formed of a Bonnitride or a GRP plate, and the protective layer 30 may be formed of a sheet- or film- The RF shield or the chemical shield 31 described above may be combined with the graph plate S32. That is, as shown in FIG. 2, a film or a film (S32) made in the form of a sheet or a film is formed on the base film 33, and a RF shield or a chemical shield 31 ) May be formed to form the protective layer 30.

Between the transducer layer 20 and the transducer layer 20 and between the transducer layer 20 and the sound-absorbing layer 40, the front surface or back surface of the acoustic lens 9 forming the ultrasonic probe, the front surface of the matching layer 10, Or at least one of the rear surface of the sound-absorbing layer 40 is provided with a sheet S formed of a Bonnitride or a graphene (110).

The sheet S formed of a Bonnitride or a Grapan may be formed to contact the heat sink 50 by extending to the side of the ultrasonic probe S41a.

Or a heat sink 60 contacting at least one of the sheet S and the heat sink 50 may be provided on the side of the ultrasonic probe. The heat sink 60 may be formed of a bonitride or a graphene. Alternatively, the heat absorbed in the sheet S may be transferred to the heat sink 50 using a heat pipe instead of the heat sink 60.

When the sheet S is installed, the signal line 70 is connected to the sheet S (120). Information relating to the heat generated in the ultrasonic probe and absorbed by the sheet S is transmitted to the control unit 80 of the ultrasonic diagnostic apparatus through the signal line 70 connected to the sheet S. [ The control unit 80 can check the heating state of the ultrasonic probe in real time based on the information transmitted through the signal line 70 and adjust the operation of the ultrasonic probe based on the sensed state.

For example, the controller 80 checks the heating state of the ultrasonic probe on the basis of information transmitted through the signal line 70 connected to the seat S, and when the degree of heat generation of the ultrasonic probe exceeds a predetermined reference value, And a signal output unit 90 for outputting a signal for generating ultrasonic waves to the ultrasonic probe so that the heat of the ultrasonic probe is reduced. Or if the degree of heat generation of the ultrasonic probe is less than a predetermined reference value, the signal output unit 90 can be controlled so that the intensity of the ultrasonic wave output from the ultrasonic probe becomes higher regardless of the degree of heat generation of the ultrasonic probe. That is, the acoustic power of the ultrasonic probe and the heating state of the ultrasonic probe form a trade-off relationship. The inside of the housing of the ultrasonic probe may be equipped with a heat sink or sheet formed of Bonnitre or graphene for additional heat dissipation. The inner side of the housing may also be provided with a sheet formed of a Bonnytride or graphene to transmit an electrical signal to the transducer layer.

9: Acoustic lens
10: matching layer
20: transducer layer
30: Protective layer
40: sound-absorbing layer

Claims (27)

A matching layer;
A transducer layer provided on a rear surface of the matching layer; And
And a sound absorbing layer provided on a rear surface of the transducer layer,
And wherein the surface of the matching layer, the space between the matching layer and the transducer layer, the space between the transducer layer and the sound-absorbing layer, the rear surface of the sound-absorbing layer, and the matching layer, And at least one sheet provided on at least one of side surfaces of the transducer layer and the sound-absorbing layer. The method according to claim 1,
Further comprising a signal line coupled to the at least one sheet,
Wherein the signal line transmits heat sensed by the sheet to a backend of the ultrasonic probe so as to confirm the degree of heat generation of the ultrasonic probe. The method according to claim 1,
Wherein at least one of the sound-absorbing layer and the matching layer includes one of a Bonitrid or a GRADAN. The method according to claim 1,
Wherein the sound-absorbing layer includes at least one sheet formed of any one of a Bonn-triode or a GRAB plate so as to be electrically connected to the transducer layer inside the sound-absorbing layer. The method according to claim 1,
And a heat sink provided on a rear surface of the sound-absorbing layer and discharging heat generated from the ultrasonic probe to the outside. 6. The method of claim 5,
Wherein the at least one sheet extends to the heat sink so as to be in thermal contact with the heat sink, and transfers the absorbed heat to the heat sink. 6. The method of claim 5,
Further comprising at least one heat sink for thermally connecting said at least one sheet and said heat sink to transfer heat absorbed in said at least one sheet to said heat sink. 8. The method of claim 7,
Wherein the heat sink comprises one of a Bonnitride or a GRAPHAN. The method according to claim 1,
And a protective layer provided on the front surface of the matching layer. 10. The method of claim 9,
Wherein the protective layer comprises an RF shield or a Chemic shield,
Wherein the protective layer is formed of any one of a Bonitrid or a Grasspan. The method according to claim 1,
And an acoustic lens provided on a front surface of the matching layer. 12. The method of claim 11,
Wherein the sheet is provided on at least one of a front surface of the acoustic lens and a space between the acoustic lens and the matching layer. 12. The method of claim 11,
Wherein the acoustic lens comprises any one of the Bonn-trie or the GRAPHAN. Providing a sound-absorbing layer;
A transducer layer is provided on the entire surface of the sound-absorbing layer;
And providing a matching layer over the entire surface of the transducer layer,
And a surface of at least one of the front surface of the matching layer, the matching layer and the transducer layer, between the transducer layer and the sound-absorbing layer, the rear surface of the sound-absorbing layer, and the side of the matching layer, the transducer layer, Further comprising providing at least one sheet formed from any one of a Bonnytride or a graphene. 15. The method of claim 14,
Further comprising forming a signal line coupled to the at least one sheet,
Wherein the signal line transmits the heat sensed by the sheet to the rear end of the ultrasonic probe so as to confirm the degree of heat generation of the ultrasonic probe. 15. The method of claim 14,
Wherein at least one of the sound-absorbing layer and the matching layer includes at least one of a Bonitride or a GRP plate. 15. The method of claim 14,
And a heat sink for discharging heat generated in the ultrasonic probe to the outside is provided on a rear surface of the sound absorbing layer. 18. The method of claim 17,
Wherein the at least one sheet is formed to extend to the heat sink for thermal contact with the heat sink,
Wherein the at least one sheet transfers the absorbed heat to the heat sink. 18. The method of claim 17,
Further comprising: at least one heat sink for thermally connecting the at least one sheet and the heat sink to transfer heat absorbed by the at least one sheet to the heat sink. 20. The method of claim 19,
Wherein the heat dissipation plate includes one of a Bonitrid or a GRAPHAN. 15. The method of claim 14,
And providing a protective layer on the entire surface of the matching layer. 19. The method of claim 18,
Wherein the protective layer comprises an RF shield or a Chemic shield,
Wherein the protective layer is formed of any one of a Bonitride or a Grass plate. 15. The method of claim 14,
And providing an acoustic lens on a front surface of the matching layer. 24. The method of claim 23,
To provide the sheet,
And providing the sheet on at least one of the front surface of the acoustic lens and the acoustic lens and the matching layer. 24. The method of claim 23,
Wherein the acoustic lens includes any one of the Bonitrid or the GRP plate. 15. The method of claim 14,
Providing an inner surface of the housing with a sheet formed of any one of a Bonitrid or a GRAPHAN that emits heat generated from the ultrasonic probe to the outside or transmits an electric signal to the transducer layer; Gt; A matching layer, a transducer layer disposed on a rear surface of the matching layer, a sound-absorbing layer provided on a rear surface of the transducer layer, and a front surface of the matching layer, At least one sheet provided on at least one of the transducer layer, between the transducer layer and the sound-absorbing layer, between the rear surface of the sound-absorbing layer and the side of the matching layer, the transducer layer, And a signal line connected to the sheet and transmitting information related to the heat absorbed in the sheet;
A signal output unit for outputting a signal for generating an ultrasonic wave to the ultrasonic probe; And
And a controller for checking the degree of heat generation of the ultrasonic probe based on the information transmitted from the signal line and controlling the signal output unit to adjust the power of the ultrasonic wave output from the ultrasonic probe.

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