KR20160072421A - adhesive roller and adhesive mat with using Foreign matter collecting silicone - Google Patents

Abstract

Disclosed are an adhesive roller for collecting foreign matters using silicone and an adhesive mat for collecting foreign matters wherein oil and an adhesive are not detected and the oil and the adhesive are not transferred to an economical product and economical silicone is used. The adhesive roller for collecting the foreign matters comprises: a rotary axis selected from a group formed of metal, plastic, and a mixture of the metal and the plastic; and silicone including 30-96.5 wt% of silicone rubber resin, 0.5-10 wt% of chlorosulphonated polyethylene, 3-60 wt% of oil outflow prevention materials and a mixture of the same to manufacture a roller to surround the surface of the rotary axis and to collect the foreign matters. The adhesive mat for collecting the foreign matters comprises: a support layer selected from a group formed of metal, rubber, and a mixture of the metal and the rubber; and a foreign matter collecting layer which is coated on the upper and/or lower side of the support layer and includes 30-96.5 wt% of the silicone rubber resin, 0.5-10 wt% of the chlorosulphonated polyethylene, 3-60 wt% of the oil outflow prevention materials, and the mixture of the same.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an adhesive roller for collecting foreign materials and a foreign matter collecting silicone using adhesive,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure-sensitive adhesive roller for collecting foreign matter and an adhesive mat for collecting foreign matters using silicone. More particularly, the present invention relates to a pressure- will be.

In order to manufacture a flat panel display (FPD) such as a plasma display panel (PDP), a liquid crystal display (LCD), or an organic light emitting diode (OLED) A plurality of identical or different patterns such as electrodes or dots on a large glass substrate or a printed circuit board (hereinafter referred to as PCB) (For example, an electrode circuit pattern, a color filter, a black matrix or an electromagnetic interference (EMI) filter) should be formed. The patterns are formed by, for example, a photoresist (PR) solution or a metal paste (hereinafter collectively referred to as "ink") such as copper (Cu), silver (Ag) . Further, in order to form the above-described patterns on the substrate, a printing apparatus for pattern formation is used. The cleaning process is performed before and after the step of forming the above-described pattern. A cleaning roller is used to remove water from the substrate after the cleaning process, and a cleaning roller to remove foreign substances from the substrate. If the amount of the foreign matter collected by the cleaning roller increases, the adhesive force may be reduced due to foreign substances on the surface of the cleaning roller. Therefore, an acrylic-based tape type Roller is being used. Conventional tape type rollers have a problem in that a large number of adhesive layers are laminated, and when the adhesive strength is lowered, consumable products are peeled off one by one and expensive, and acrylic and oil are reversed.

Conventionally, in order to measure whether or not an exposure machine and a roller having been subjected to a cleaning process have been cleaned to the extent that a product can be manufactured, an adhesive force of a tape type, for example, a Scotch tape or the like is applied to the surface of a hard material such as metal or aluminum After the application of the product, the plate coated with the tape is confirmed in the manufacturing process. However, there is a problem that the plate coated with the tape captures foreign substances which are not cleaned by the exposure device and the roller, but conversely, the adhesive such as acryl can be reversed.

Therefore, a new method for solving the above-mentioned problems is required.

Therefore, an object of the present invention is to provide an economical and economical product which can be semi-permanent, which does not leak oil, and which uses an adhesive roller and an adhesive mat which do not cause reversal of the adhesive, An adhesive roller and an adhesive mat for collecting foreign matters.

In order to accomplish the above object, the present invention provides a method of manufacturing a semiconductor device, comprising: rotating a shaft selected from the group consisting of metal, plastic and mixtures thereof; And a roller surrounding the surface of the rotating shaft and collecting foreign matter, comprising 30 to 96.5% by weight of a silicone rubber resin, 0.5 to 10% by weight of chlorosulfonated polyethylene, 3 to 60% by weight of an oil leakage inhibitor, The present invention provides a foreign matter collecting roller for collecting foreign matter.

The present invention also relates to a support layer selected from the group consisting of metals, rubbers and mixtures thereof; And a top layer and / or a bottom portion of the backing layer, wherein the composition comprises 30 to 96.5 weight percent silicone rubber resin, 0.5 to 10 weight percent chlorosulfonated polyethylene, 3 to 60 weight percent oil spill prevention agent, There is provided a foreign matter collecting adhesive mat comprising a foreign matter collecting layer.

The silicone-based pressure-sensitive adhesive roller for collecting foreign matter and the pressure-sensitive adhesive mat for collecting foreign matter can be semi-permanently used by washing, the oil is not spilled out, the pressure-sensitive adhesive is not reversed, have.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a side perspective view (a) and a sectional view (b) of a sticking roller for foreign matter collection using silicone according to the present invention. FIG.
2 is a sectional view of an adhesive mat for collecting foreign substances using silicon according to the present invention.
3 is a view showing a method for evaluating the oil content of a foreign matter-collecting adhesive mat according to the present invention.
4 is a cross-sectional view of the embossed foreign matter-collecting adhesive mat according to the present invention.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

Generally, the silicone resin is cured by three mechanisms, for example, a mechanism in which radicals are generated in the silicone resin due to the radical generation of benzoyl peroxide to cause a curing reaction, a curing reaction through a general sol- Curing by a hydrosilylation reaction, which is an addition reaction of a silicone resin having a hydride group and a vinyl group, in the presence of a mechanism of curing by reaction and in the presence of a platinum catalyst, a karstedt catalyst. The hydrosilylation reaction shows a rapid reaction rate even at a relatively low temperature, which is advantageous in the process.

The silicone for forming the foreign matter-collecting adhesive roller and the foreign matter-collecting adhesive mat according to the present invention uses a hydrosilylation reaction among the three methods. The silicone is a silicone resin, a chlorosulfonated polyethylene, an oil- , And the adhesion of the silicone can be controlled according to the content of the silicone resin and the chlorosulfonated polyethylene.

The silicone comprises from 25 to 96.5% by weight of silicone resin, from 0.5 to 10% by weight of chlorosulfonated polyethylene (CSM), from 3 to 60% by weight of an oil spill preventing agent and mixtures thereof.

The silicone resin is a polymer containing a repeating siloxane (Si-O-Si) group, and usually has functional groups such as a hydroxyl group and a vinyl group at both terminals and a vinyl group or a methyl group in the side chain. The silicone resin can be used in high temperature vulcanization (HTV), room temperature vulcanization (RTV), liquid silicone rubber (LSR), and the like. (HTV) for high-temperature curing, and the like. Here, the room-temperature curing silicone rubber is obtained by bonding a hydroxyl group to both ends of a repeated siloxane group, and the silicone for high-temperature curing and the liquid silicone are vinyl groups bonded to both ends of the repeated siloxane group. The high-temperature curing silicone is manufactured in a gum type, and the liquid silicone is manufactured in an oil type.

The chlorosulfonated polyethylene (CSM) is a polyethylene modified with chlorine and sulfur dioxide, and the chlorosulfonation reaction of the rigid polyethylene converts the polyethylene into a rubber having reactive crosslinking points so that it can be processed and crosslinked. The chlorosulfonated polyethylene (CSM) comprises 27 to 45 wt% chlorine and 0.8 to 2.2 wt% sulfur dioxide relative to 100 wt%. It is resistant to aliphatic hydrocarbon groups and alcohols, is slightly soluble in ketone and ester groups, and is well soluble in aliphatic hydrocarbon groups such as toluene, xylenes and chlorinated hydrocarbons. The sulfur dioxide and chlorine participate in the vulcanization reaction of the chlorosulfonated polyethylene. Pure chlorosulfonated polyethylene has a tensile strength of 350 to 600% and can be used at temperatures of -60 to 180 占 폚.

In addition, the chlorosulfonated polyethylene is a metal coating material which, unlike conventional coating materials, keeps the metal surface at a high temperature, safely coating the metal against corrosion from sulfur vapor or hydrochloric acid, Protect it. In addition, it is resistant to acidic steam (100 ° C) generated by corrosion due to corrosion even in an environment where corrosion can occur. The chlorosulfonated polyethylene is a multifunctional material that can be used in building materials and household appliances as well as buildings that must be protected from high heat, fire, hydrochloric acid and various internal influences.

In addition, by adding a ceramic or the like having a nanoparticle size to the oil leakage preventing agent, the silicone can prevent oil leakage from the adhesive roller and the adhesive mat. Since the ceramic material having the nanoparticle size generally has a particle size of 100 nm or less and has a physical property to withstand temperatures of 200 ° C or higher, the ceramic material having the nanoparticle size has a characteristic that the oil does not flow out even at a high temperature . In addition, although the nanoparticle-sized ceramic material in the embodiment of the present invention is made by ESK of Germany and BOROND S6 (model name), the present invention is not limited thereto.

There are two main methods for cleaning the automatic exposure machine, the pretreatment and the transfer roller (for example, the disk, the hot and the squeeze roller), and there are the wet cleaning and the dry cleaning. The wet cleaning includes a method of washing with a high pressure washer using a chemical agent, a method of cleaning alcohol with a cloth, and a method of cleaning the dry cleaning using a pressure-sensitive adhesive such as a pressure roller and a cleaning roller.

1 is a side perspective view (a) and a sectional view (b) of a sticking roller for foreign matter collection using silicone according to the present invention. As shown in FIG. 1, the foreign matter collecting roller 100 according to the present invention includes a rotating shaft 110 and a silicon 130 surrounding the surface of the rotating shaft 110.

The rotating shaft 110 of the foreign matter collecting roller 100 may be selected from the group consisting of metal, plastic, and mixtures thereof, and the rotating shaft must be capable of supporting the roller.

The silicon 130 is formed so as to surround the surface of the rotating shaft 110. The silicon 130 has adhesiveness under a condition of room temperature and high temperature (25 to 200 DEG C) And has a function of contacting foreign matter of the cleaning roller with the cleaning roller so as to be transferred to the foreign matter collecting roller 100, that is, an adhesive function. In addition, the silicon 130 should be transferred to the cleaning roller during use, so that oil, which can lower the yield of the product, should not be deposited. Oil is a component obtained when fractional distillation is carried out according to the difference in boiling point when the liquid mixture is distilled.

The adhesion roller 100 for collecting foreign matters according to the present invention collects the foreign object of the cleaning roller for collecting the foreign matter on the substrate in the manufacturing process of the product, (Si), calcium (Ca), iron (Fe), titanium (Ti), sulfur (Sb), and the like. (S), sodium (Na), and the like. In addition, it is excellent in releasability and easy to be washed, and excellent in heat resistance, cold resistance and chemical resistance due to the characteristics of chlorosulfonated polyethylene, and hardly changes in physical properties. In addition, the adhesive roller 100 for collecting foreign materials can adjust the adhesive force according to the content of the silicone resin and the chlorosulfonated polyethylene of the silicone 130, thereby realizing the adhesive force desired by the user.

The adhesion roller 100 for collecting foreign matter according to the present invention is brought into contact with a cleaning roller for collecting foreign matters on the substrate so that the cleaning roller collects foreign matter collected from the substrate again so as not to lower the adhesive force of the cleaning roller, To collect foreign substances on the substrate.

In addition, the foreign substance-collecting adhesive roller 100 according to the present invention may further include an embossing treatment. The embossing process may be formed in various patterns desired by the user such as a circle, a triangle, and a square, and the embossing may be formed to a size of 0.01 to 10 mm, preferably 0.1 to 5 mm. When the embossing is less than 0.01 mm, there is almost no difference from the flat surface. When the embossing is more than 10 mm, the adhesive strength may be lowered. If the embossing process of the foreign matter collecting pressure roller 100 is flat, the foreign matter can be adhered to the cleaning roller for collecting the foreign matter of the substrate. If the embossing process is large, the adhesion force is lowered, I can not.

2 is a cross-sectional view of an adhesive mat for collecting foreign substances using silicon according to the present invention. As shown in FIG. 2, the foreign matter-collecting adhesive mat 200 includes a support layer 210 and a foreign matter collecting layer 220.

The supporting layer 210 may be selected from the group consisting of metals, plastics, and mixtures thereof. For example, aluminum (Al), polyethylene terephthalate (PET) Can be used.

The foreign matter collecting layer 220 is a layer coated on the upper and / or lower surface of the supporting layer 210 and is used for checking the cleaning state of the exposure machine or removing residual foreign matter. And the adhesive force can be controlled according to the content of the silicone resin and the chlorosulfonated polyethylene of the foreign matter collecting layer 220, so that the adhesive force desired by the user can be realized.

The supporting layer 210 of the foreign matter-collecting adhesive mat 200 has a thickness of 0.5 to 0.8 mm, preferably 0.6 mm, a physical property of a specific gravity of 2.5 to 3.0 g / cm ³ , preferably 2.8 g / cm ³ And the foreign matter collecting layer 220 has a thickness of 0.2 to 0.5 mm, preferably 0.3 mm, a specific gravity of 1.0 to 1.5 g / cm ³ , preferably 1.2 g / cm ³ , a temperature of 100 to 200 ° C, Heat resistance at 150 to 200 占 폚, and surface roughness of 0.1 to 0.4 Ra, preferably 0.2 Ra. (Here, surface roughness means surface roughness, and Ra, which is a unit of surface roughness, means an average value over the whole section.)

The adhesive force of the foreign matter-collecting adhesive mat 200 was measured at a compression and tensile speed of 1 mm / min, in the form of a sheet and a roll, in 1 mm compression, in contact with glass and metal for 30 seconds, It is measured using a universal testing machine for measuring the elongation of the yarn. Fig. 3 is a method for evaluating the detection and detection of oil in a foreign matter-collecting adhesive mat according to the present invention. 3, the foreign matter detection and evaluation of the foreign matter-collecting adhesive mat 200 is performed by fixing a copper clad laminate (CCL) on the surface of the adhesive mat 200, (B) and (b), when the water film on the surface is broken as shown in (a) after being preheated to 130 to 170 ° C in a dryer and maintained at 130 to 170 ° C for 25 to 35 minutes If it is lined together, it is good. The above evaluation uses a copper clad laminate in which water marks are not generated when a copper clad laminate having a clean surface is put in pure water (distilled water) and removed.

Also, even if the pressure-sensitive adhesive mat 200 for collecting foreign matter is used at a temperature of 25 to 200 캜, the oil-leakage preventing agent is added while maintaining the stickiness, and oil is not generated.

The adhesive mat 200 for collecting foreign materials according to the present invention is applicable to various types of rollers (for example, squeeze rolls, disc wheel rollers (triad rolls), squeeze rolls (ST rolls) If foreign matter remains in the rollers (multi-point rollers) and Plug Flow Reactor (PFR) laminate hot rollers, etc., the product may be defective and check that foreign matter has been removed enough to start the manufacturing process. It is used to remove if it remains.

4 is a cross-sectional view of an embossed foreign matter-attracting adhesive mat according to the present invention. 4, an embossing-treated adhesive mat 400 for collecting foreign objects includes a support layer 210, a foreign matter collecting layer 220, and an embossing layer 410. The embossed foreign matter-collecting adhesive mat 400 has the same configuration as the foreign matter-collecting adhesive mat 200 of FIG. 2 except that the embossing process is performed.

The embossing layer 410 may be made by any contact technique, such as casting, coating or squeezing techniques. Specifically, the micro-repetition can be achieved by (1) casting using a tool having a micro-embossed pattern, (2) a method of coating a fluid on a substrate having the micro-embossed pattern, or (3) And a method in which a thermoplastic film is pressed onto a base material having a micro-embossed pattern through a nip roll. (The nip refers to the line contact surface between the roll and the roll.) The predetermined embossed surface form can be formed in the adhesive mat using any one of the prior art techniques and can be selected according to the properties of the adhesive mat and the characteristics of the surface form have. For example, other means of removal such as etching, chemical etching, mechanical etching, laser ablation, or reactive ion etching), photolithography, stereo lithography, micro- machining, knurling, scoring or cutting, and the like. The embossing tool can be manufactured by casting a curable silicone material on top of a master mold having a desired pattern. The silicon mold has a mirror image (protruding cavity forming geometry). The mold can be used in hot presses, actual extrusion or casting operations. Extrusion embossing can be accomplished by passing the mold through the nip to form embossed portions on the adhesive mat. Most preferred for extrusion embossing is a metal casting roll which is self-embossed with an image of the pattern to be embossed on the adhesive mat.

Also, the embossing process of the embossed foreign matter collecting mat according to the present invention may be formed in various patterns desired by the user such as a circle, a triangle and a square, and the size of the embossing may be 0.01 to 10 mm, preferably 0.1 To 5 mm. When the embossing is less than 0.01 mm, there is almost no difference from the flat surface. When the embossing is more than 10 mm, the adhesive strength may be lowered.

When the foreign matter-collecting sticky mat 200 is used in an exposure machine, the foreign matter-collecting sticky mat 200 having an adhesive force on a flat surface may be adhered to an exposure device for applying a pressure from above, There is a problem that the adhesive is adhered to the rollers. If the adhesive is adhered, the user has to manually remove the adhesive, so that the embossing mat 200 for embedding can be embossed so that the adhesive does not adhere to the exposing machine and the conveying roller, It is easy to remove foreign matter.

Claims (7)

A rotating shaft selected from the group consisting of metals, plastics, and mixtures thereof; And
A roller which surrounds the surface of the rotating shaft and collects foreign matter, comprising 30 to 96.5% by weight of a silicone rubber resin, 0.5 to 10% by weight of chlorosulfonated polyethylene, 3 to 60% by weight of an oil leakage inhibitor, Adhesive roller for collecting foreign matters containing silicon. The adhering roller for foreign matter collecting according to claim 1, wherein the foreign matter collecting adhesive roller collects foreign matter having particles of 100 to 400 mu m. The adhering roller for foreign matters collecting according to claim 1, wherein the foreign matter collecting adhesive roller is in contact with a cleaning roller for collecting foreign matters on the substrate to collect the foreign matter of the cleaning roller. A support layer selected from the group consisting of metals, rubbers, and mixtures thereof; And
Coated on the top and / or bottom of the support layer, wherein the composition comprises from 30 to 96.5% by weight of a silicone rubber resin, from 0.5 to 10% by weight of chlorosulfonated polyethylene, from 3 to 60% by weight of an oil spill preventing agent, A foreign matter collecting adhesive mat including a collecting layer. The method of claim 4, wherein the supporting layer is 0.5 to 0.8 mm has a specific gravity of the weight, 2.5 to 3.0 g / cm ³ of the foreign object collecting layer is 0.2 to 0.5 mm thick, 1.0 to 1.5 g / cm ³ specific gravity of, A heat resistance of 100 to 200 占 폚 and a surface roughness of 0.1 to 0.4 Ra. The adhesive roller according to any one of claims 1 to 4, wherein the oil spill preventing agent is a ceramic of nanoparticle size. The adhering roller for foreign matter collecting and the foreign matter collecting mat according to any one of claims 1 and 4, further comprising an embossing treatment for the foreign matter collecting adhesive roller and the foreign matter collecting adhesive mat.

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