KR20160004068A - Semiconductor memory device and operating method thereof - Google Patents
Semiconductor memory device and operating method thereof Download PDFInfo
- Publication number
- KR20160004068A KR20160004068A KR1020140082454A KR20140082454A KR20160004068A KR 20160004068 A KR20160004068 A KR 20160004068A KR 1020140082454 A KR1020140082454 A KR 1020140082454A KR 20140082454 A KR20140082454 A KR 20140082454A KR 20160004068 A KR20160004068 A KR 20160004068A
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- Prior art keywords
- memory cell
- memory cells
- charge
- program voltage
- selected memory
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/10—Programming or data input circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/30—Power supply circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/14—Power supply arrangements, e.g. power down, chip selection or deselection, layout of wirings or power grids, or multiple supply levels
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C7/00—Arrangements for writing information into, or reading information out from, a digital store
- G11C7/10—Input/output [I/O] data interface arrangements, e.g. I/O data control circuits, I/O data buffers
- G11C7/1078—Data input circuits, e.g. write amplifiers, data input buffers, data input registers, data input level conversion circuits
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- Engineering & Computer Science (AREA)
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Abstract
The present invention relates to a semiconductor memory device and a method of operating the same, including a memory cell array including a plurality of memory cells, a peripheral circuit section for performing a program operation for the plurality of memory cells, And control logic for controlling the peripheral circuitry to perform a charge distribution operation to distribute the trapped charge to a selected one of the plurality of memory cells during program operation.
Description
BACKGROUND OF THE
A semiconductor memory device is a memory device implemented using semiconductors such as silicon (Si), germanium (Ge), gallium arsenide (GaAs), indium phosphide (InP) to be. Semiconductor memory devices are classified into a volatile memory device and a nonvolatile memory device.
The volatile memory device is a memory device in which data stored in the volatile memory device is lost when power supply is interrupted. Volatile memory devices include static RAM (SRAM), dynamic RAM (DRAM), and synchronous DRAM (SDRAM). A nonvolatile memory device is a memory device that retains data that has been stored even when power is turned off. A nonvolatile memory device includes a ROM (Read Only Memory), a PROM (Programmable ROM), an EPROM (Electrically Programmable ROM), an EEPROM (Electrically Erasable and Programmable ROM), a flash memory, a PRAM , RRAM (Resistive RAM), and FRAM (Ferroelectric RAM). Flash memory is divided into NOR type and NOR type.
The flash memory device can be divided into a two-dimensional semiconductor device in which a string is formed horizontally on a semiconductor substrate and a three-dimensional semiconductor device in which the string is formed perpendicularly to the semiconductor substrate.
A three-dimensional semiconductor device is a memory device designed to overcome the limit of integration of a two-dimensional semiconductor device, and includes a plurality of strings formed vertically on a semiconductor substrate. The strings include a drain select transistor, memory cells, and a source select transistor connected in series between the bit line and the source line.
The present invention provides a semiconductor memory device and a method of operating the semiconductor memory device, which can solve the problem that charge trapped in memory cells spread during program operation of a semiconductor memory device, thereby lowering the threshold voltage and deteriorating the retention characteristics of the memory cell. to provide.
A semiconductor memory device according to an embodiment of the present invention includes a memory cell array including a plurality of memory cells, a peripheral circuit unit for performing a program operation for the plurality of memory cells, And control logic for controlling the peripheral circuitry to perform a charge distribution operation for distributing the trapped charge to a neighboring region in a selected one of the plurality of memory cells.
A semiconductor memory device according to an embodiment of the present invention includes a memory cell array including a plurality of memory cells, a peripheral circuit unit for performing a program voltage application operation and a charge distribution operation for the plurality of memory cells, The program voltage application operation and the charge distribution operation are performed, and the number of times of performing the program voltage application operation is counted so that the charge distribution operation is performed when the number of counting times reaches a set number of times.
A method of operating a semiconductor memory device according to an embodiment of the present invention includes the steps of: applying a program voltage to selected memory cells of a plurality of memory cells to perform a program voltage application operation; Performing a charge distribution operation to distribute the trapped charge in the selected memory cells when the voltage of the selected memory cell is the same, and re-executing the program voltage application operation by raising the program voltage according to the verification result after performing the verify operation do.
According to an embodiment of the present invention, a high voltage is applied to an adjacent memory cell of a selected memory cell during program operation of the semiconductor memory device to diffuse the trapped charge of the selected memory cell toward the adjacent memory cell, It is possible to improve the phenomenon that the charge trapped in the memory cell after the completion of the program operation diffuses to other regions and the threshold voltage is lowered.
1 is a block diagram for explaining a semiconductor memory device according to the present invention.
2 is a perspective view for explaining a memory string included in a memory block according to the present invention.
Fig. 3 is a circuit diagram for explaining the memory string shown in Fig. 2. Fig.
4 is a flowchart illustrating an operation of the semiconductor memory device according to the present invention.
5A to 5C are diagrams for explaining the movement of charges trapped in a charge storage layer of a memory cell during a program operation of the semiconductor memory device according to the present invention.
6 is a block diagram showing a memory system including the semiconductor memory device of FIG.
7 is a block diagram illustrating an application example of the memory system of FIG.
8 is a block diagram illustrating a computing system including the memory system described with reference to FIG.
BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and how to accomplish it, will be described with reference to the embodiments described in detail below with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. The embodiments are provided so that those skilled in the art can easily carry out the technical idea of the present invention to those skilled in the art.
Throughout the specification, when a part is referred to as being "connected" to another part, it includes not only "directly connected" but also "indirectly connected" . Throughout the specification, when an element is referred to as "comprising ", it means that it can include other elements as well, without excluding other elements unless specifically stated otherwise.
1 is a block diagram for explaining a semiconductor memory device according to the present invention.
1, a
The
The
The
The
The
The program operation of the
The
The read and write
The read and
As an example embodiment, the read and write
The
The
2 is a perspective view for explaining a memory string included in a memory block according to the present invention. 3 is a circuit diagram for explaining a memory string.
Referring to FIGS. 2 and 3, a common source line SL is formed on a semiconductor substrate. A vertical channel layer SP is formed on the common source line SL. The upper part of the vertical channel layer SP is connected to the bit line BL. The vertical channel layer SP may be formed of polysilicon. A plurality of conductive films SGS, WL0 to WLn, and SGD are formed to surround the vertical channel layer SP at different heights of the vertical channel layer SP. A multilayer film (not shown) including a charge storage film is formed on the surface of the vertical channel layer SP and the multilayer film is also located between the vertical channel layer SP and the conductive films SGSL, WL0 to WLn and SGD. The multilayer film may be formed of an ONO structure in which an oxide film, a nitride film, and an oxide film are sequentially laminated.
The lowermost conductive film becomes a source selection line (or first selection line) SGS, and the uppermost conductive film becomes a drain selection line (or second selection line) SGD. The conductive films between the selection lines SGS and SGD become the word lines WL0 to WLn. In other words, the conductive films SGS, WL0 to WLn and SGD are formed in multiple layers on the semiconductor substrate and the vertical channel layer SP penetrating the conductive films SGS, WL0 to WLn and SGD is connected to the bit lines BL ) And the source line SL formed on the semiconductor substrate.
A drain select transistor SDT is formed at a portion where the top conductive film SGD surrounds the vertical channel layer SP and a portion at which the lowermost conductive film SGS surrounds the vertical channel layer SP A source selection transistor (or first selection transistor) SST is formed. The memory cells C0 to Cn are formed in portions where the intermediate conductive layers WL0 to WLn surround the vertical channel layer SP.
With this structure, the memory string includes a source select transistor SST, memory cells C0 to Cn, and a drain select transistor SDT, which are vertically connected to the substrate between the common source line SL and the bit line BL. . The source select transistor SST electrically connects the memory cells C0 to Cn to the common source line SL in accordance with the first select signal applied to the first select line SGS. The drain select transistor SDT electrically connects the memory cells C0 to Cn to the bit line BL in accordance with a second select signal applied to the second select line SGD.
As the program / erase cycle is repeatedly performed, trap layers are formed in the oxide films of the multilayered film used as the tunnel insulating films, and electrons are trapped in the memory cells C0 to Cn. As a result, after the program operation is completed, electrons trapped in the tunnel insulating film may move to lower the threshold voltage, thereby deteriorating the retention characteristics of the memory cell.
4 is a flowchart illustrating an operation of the semiconductor memory device according to the present invention.
5A to 5C are diagrams for explaining the movement of charges trapped in a charge storage layer of a memory cell during a program operation of the semiconductor memory device according to the present invention.
The operation of the semiconductor memory device according to the present invention will now be described with reference to FIGS. 1 to 5C.
1) Program voltage application (S410)
When the command CMD for the program operation of the semiconductor memory device is received by the
The
2) Comparison of program voltage application times (S420)
The
3) Setting voltage is applied to the adjacent cell (S430)
As a result of the comparison of the program voltage application times (S420), if the set number of program voltage application times N is the same, the set voltage Vspread is applied to the memory cells adjacent to the selected memory cell in the word line direction, And performs a distributed operation. At this time, the adjacent memory cell may be a memory cell in which the programming operation is performed before the selected memory cell. That is, the set voltage Vspread is applied to the memory cell connected to the word line WL adjacent to the selected word line WL1 in the direction of the source line SL among the adjacent word lines WL0 and WL2. At this time, an operating voltage of 0 V can be applied to the selected word line WL1. As a result, some of the charges (e) trapped in the memory film (ML) of the selected memory cell are moved and trapped in the memory film region (A) extending in the direction of the adjacent memory cell as shown in FIG. 5B. That is, the charges trapped in the memory film ML of the selected memory cell are dispersed and moved in the direction of the source line.
4) Verification operation (S440)
If the number of program voltage application times is smaller than or greater than the set number of times N as a result of the comparison of the program voltage application times (S420), or if the setup voltage application step S430 is performed in the adjacent cell, .
First, the read and write
5) Program voltage rise (S450)
If the threshold voltage of some or all of the plurality of memory cells connected to the selected word line WL1 as a result of the verifying operation S440 described above is determined to be lower than the verify voltage and is judged as fail, the
When the program voltage is applied again (S410), the charges (e) are injected from the vertical channel layer (SP) into the memory film (ML) of the memory cell to which the new program voltage Vpgm is applied Trapped.
As described above, according to the present invention, when the number of times of application of the program voltage during the programming operation is a predetermined number, the charge trapped in the memory film of the selected memory cell is dispersed around and then a new program voltage application operation is performed. Therefore, even if a certain period of time has elapsed after the program operation is completed, the charges (e) are already trapped in the memory film region A located between the selected memory cell and the adjacent memory cells, so that the charges (e) trapped in the selected memory cell Do not move to the A area. As a result, the retention characteristics of the memory cell are improved.
6 is a block diagram showing a memory system including the semiconductor memory device of FIG.
Referring to FIG. 6, a
The
The
The
The
The
The
The
The
As another example, the
As an exemplary embodiment,
7 is a block diagram illustrating an application example of the memory system of FIG.
7, the
In Fig. 7, a plurality of groups are shown communicating with
Each group is configured to communicate with the
8 is a block diagram illustrating a computing system including the memory system described with reference to FIG.
8, a
The
In FIG. 8, the
In Fig. 8, it is shown that the
While the invention has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Therefore, the scope of the present invention should not be limited to the above-described embodiments, but should be determined by the equivalents of the claims of the present invention as well as the claims of the following.
100: semiconductor memory device 110: memory cell array
120: address decoder 130: read and write circuit
140: control logic 150: voltage generator
Claims (20)
A peripheral circuit unit for performing a program operation on the plurality of memory cells; And
And a control logic for controlling the peripheral circuitry to control the peripheral circuitry to perform a charge distribution operation for distributing the trapped charge to selected ones of the plurality of memory cells during the program operation to an adjacent region, Device.
Wherein the control logic controls the peripheral circuitry portion to perform a verify operation after the charge distribution operation and to re-execute the program voltage application operation by raising the program voltage according to the result of the verify operation.
Wherein the plurality of memory cells are non-volatile memory cells based on a charge trap device.
Wherein the charge distribution operation applies a set voltage to a memory cell adjacent to the selected memory cell.
Wherein the charge distributing operation applies a set voltage to memory cells adjacent to the selected memory cell in the direction of the source line of the memory cells adjacent to the selected memory cell.
Wherein said charge distributing operation applies an operating voltage of 0V to said selected memory cell.
Wherein the charge distribution operation moves charge trapped in the memory film of the selected memory cell to the memory film region extending in the direction of the source line during the program voltage application operation.
Wherein the control logic compares the program voltage application times with a preset number of times and controls the peripheral circuitry section to perform the charge distribution operation when the program voltage application times and the set number of times are equal.
The peripheral circuit unit includes a voltage generator for generating a program voltage for application to the selected memory cell during the program voltage application operation and generating a setup voltage for application to the memory cell adjacent to the selected memory cell during the charge dispersion operation Lt; / RTI >
A peripheral circuit unit for performing a program voltage application operation and a charge distribution operation for the plurality of memory cells; And
And a control circuit for controlling the peripheral circuitry to perform the program voltage application operation and the charge distribution operation, counting the number of times of the program voltage application operation and counting the number of counting times, Memory device.
Wherein the control logic controls the peripheral circuitry portion to perform a verify operation after the charge distribution operation and to re-execute the program voltage application operation by raising the program voltage according to the result of the verify operation.
Wherein the plurality of memory cells are non-volatile memory cells based on a charge trap device.
Wherein the charge distribution operation applies a set voltage to a memory cell adjacent to the selected memory cell.
Wherein the charge distributing operation applies a set voltage to memory cells adjacent to the selected memory cell in the direction of the source line of the memory cells adjacent to the selected memory cell.
Wherein said charge distributing operation applies an operating voltage of 0V to said selected memory cell.
Wherein the charge distribution operation moves charge trapped in the memory film of the selected memory cell to the memory film region extending in the direction of the source line during the program voltage application operation.
The peripheral circuit unit includes a voltage generator for generating a program voltage for application to the selected memory cell during the program voltage application operation and generating a setup voltage for application to the memory cell adjacent to the selected memory cell during the charge dispersion operation Lt; / RTI >
Performing a charge distribution operation for distributing trapped charge in the selected memory cells when the number of times of performing the program voltage application is equal to a set number of times; And
Performing a verify operation and then re-executing the program voltage application operation by raising the program voltage according to a verification result.
Wherein the charge distribution operation applies a set voltage to memory cells adjacent to the selected memory cells.
Wherein the charge distributing operation applies an operating voltage of 0V to the selected memory cell while applying a set voltage to memory cells adjacent to the selected memory cell in the source line direction among the memory cells adjacent to the selected memory cell.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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KR1020140082454A KR20160004068A (en) | 2014-07-02 | 2014-07-02 | Semiconductor memory device and operating method thereof |
US14/455,438 US9543021B2 (en) | 2014-03-12 | 2014-08-08 | Semiconductor device and programming method thereof |
CN201410429712.5A CN104916324B (en) | 2014-03-12 | 2014-08-27 | Semiconductor device and programming method thereof |
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KR1020140082454A KR20160004068A (en) | 2014-07-02 | 2014-07-02 | Semiconductor memory device and operating method thereof |
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KR1020140082454A KR20160004068A (en) | 2014-03-12 | 2014-07-02 | Semiconductor memory device and operating method thereof |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US11295816B2 (en) | 2020-04-10 | 2022-04-05 | SK Hynix Inc. | Semiconductor memory device and method of operating the semiconductor memory device |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US11295816B2 (en) | 2020-04-10 | 2022-04-05 | SK Hynix Inc. | Semiconductor memory device and method of operating the semiconductor memory device |
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