KR20150137810A - A jig for board holder - Google Patents

A jig for board holder Download PDF

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Publication number
KR20150137810A
KR20150137810A KR1020140066329A KR20140066329A KR20150137810A KR 20150137810 A KR20150137810 A KR 20150137810A KR 1020140066329 A KR1020140066329 A KR 1020140066329A KR 20140066329 A KR20140066329 A KR 20140066329A KR 20150137810 A KR20150137810 A KR 20150137810A
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KR
South Korea
Prior art keywords
block
fixed
substrate
jig
support plate
Prior art date
Application number
KR1020140066329A
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Korean (ko)
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KR101744573B1 (en
Inventor
황동석
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황동석
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Publication date
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Priority to KR1020140066329A priority Critical patent/KR101744573B1/en
Publication of KR20150137810A publication Critical patent/KR20150137810A/en
Application granted granted Critical
Publication of KR101744573B1 publication Critical patent/KR101744573B1/en

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B27/00Tempering or quenching glass products
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/20Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/20Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
    • C03B35/202Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames by supporting frames
    • C03B35/207Construction or design of supporting frames
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Abstract

The present invention relates to a jig for a substrate holder improving productivity by reducing stress of a worker while inserting multiple thin plate glass-shaped substrates (5) into a holder (1) in which multiple grooves are continuously formed.

Description

A jig for board holder}

The present invention relates to a jig for a substrate holder, and more particularly, to a jig for a substrate holder, and more particularly, to a jig for a substrate holder in which a plurality of substrates in the form of a thin plate glass are reduced in fatigue of an operator during insertion into a holder in which a plurality of bones are continuously formed, To a jig for a substrate holder.

Flat panel display devices such as a liquid crystal display (LCD), an electroluminescent display (ELD), and a plasma display panel (PDP) have recently been widely used in various fields because of their high response speed, low power consumption, It is widely used in electronic products.

The above flat panel display devices are used in various electronic products such as a TV, a computer monitor, a notebook computer, a mobile phone, a display unit of a refrigerator, a personal portable information terminal, and an automatic teller machine.

In addition, the electronic devices using the above flat panel display devices have an interface using an input device such as a keyboard or a mouse, but recently, a method using a touch panel has been widely used.

Meanwhile, the flat panel display device or the touch panel as described above is formed by stacking transparent electrodes (ITO) and metal electrodes in various forms on a substrate made of glass or a transparent synthetic resin (plastic, FET) have.

Before a transparent electrode (ITO), a metal electrode, or the like is formed on the substrate, a pretreatment process is required to produce tempered glass having excellent hardness and strength suitable for use as a screen of a display device.

Generally, a chemical strengthening method is used for strengthening a substrate (thin plate glass) of 2 mm or less because the thin plate glass is immersed in a reinforcing furnace containing a potassium nitrate solution at 450 ° C. for 3 hours or longer, Potassium ions in the potassium nitrate solution are replaced with each other to strengthen the glass, which is completed through a heat treatment and a cleaning process.

In the pretreatment process for strengthening, a plurality of substrates are loaded on the holder, and the chemical treatment tank, the heat treatment tank, and the washing tank are moved by the loading robot according to the process order.

An example of a holder for loading substrates as described above is disclosed in Japanese Patent Laid-Open Publication No. 2003-48733 and shown in Fig.

The holder 1 is provided with a pair of wave-like first support members 3 on the upper side between a pair of holder main bodies 2, in which valleys for inserting side edges of the substrate 5 are formed at regular intervals, And a wave-like second support member 4 is provided on the lower side of the holder main body 2 on which the bottom end of the substrate 5 is seated and supported.

In such a holder 1, the operator inserts both side edges of the substrate 5 into a pair of opposing corrugations of the pair of first support members 3. The substrate 5 is thinner than 2 mm, In the case of the holder 1 to which the present invention is applied, since the interval between the valleys and the valleys is very narrow, it is difficult for the operator to precisely join the substrates 5 one by one, and the productivity is deteriorated accordingly.

Particularly, as shown in FIG. 2, there is a problem that the number of work rooms in which the lower end portion of the substrate 5 is seated in the adjacent corners without being seated on the corresponding corners of the second support members 4 is repeatedly required.

Further, since the work of inserting the plurality of substrates one by one from the lower end of the substrate 5 into the first supporting member 3 must be continuously performed by the workers, the fatigue of the worker is increased and the work efficiency is lowered .

Japanese Patent Application Laid-Open No. 2003-48733

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and it is an object of the present invention to provide an apparatus and a method for manufacturing a thin plate glass substrate by which a work of inserting a thin plate glass substrate into a holder in which a plurality of bones are continuously formed can be simplified, And to provide a jig for a substrate holder.

According to an aspect of the present invention, there is provided a holder comprising: a pair of holder main bodies opposed to each other; and a pair of wave-shaped members each having an upper end coupled to the upper side of the holder main body, The present invention relates to a method for simultaneously joining a plurality of substrates to a holder having a support member and a wave-like second support member, wherein both ends of the support member are coupled to the lower end of the holder body, In a jig for a substrate holder,

A fixing block having a through-hole penetrating the bottom surface and the top surface, a fixed block having a plurality of fixed support plates fixed to both ends of the top surface across the through-holes and perpendicular to the top surface and spaced apart from each other;

A moving block movably coupled to the bottom surface of the fixed block and spaced apart from each other by a plurality of moving support plates protruding through the through holes so as to face the fixed support plates;

Coupling means movably coupling the mobile block to the fixed block;

Clamping means for clamping or unclamping the lower end of the substrate between the stationary support plate and the movable support plate which face each other; And is characterized by comprising:

Wherein the engaging means is formed in a bottom surface portion of the fixed block so as to be in communication with the through hole and longer than a length of the moving block in a moving direction and is formed with a receiving groove for receiving the moving block, And a finishing plate fixed to the bottom surface of the fixing block to close the receiving groove.

Wherein the clamping means comprises a spring member which is provided between one end of the moving block and the fixed block and a spring member which is screwed to the fixed block and whose end contacts the other end of the moving block, And a clamping screw for moving the block,

When the clamping screw is tightened, the movable block is moved in a direction compressing the spring member so that the lower end of the substrate is compressed and clamped between the fixed support plate and the movable support plate. When the clamping screw is loosened, And the clamping of the substrate is released as the movable supporting plate moves away from the fixed supporting plate.

In addition, the jig according to the present invention is characterized in that the supporting block is provided at one side of the bottom surface of the finishing plate or the fixing block, and the fixing block is inclined to one side.

In addition, the jig of the present invention includes a stopper block on one side of the upper surface of the fixed block, to which the one side of the substrate coupled between the fixed support plate and the movable support plate is closely attached.

First, the jig according to the present invention simplifies the work of inserting the thin plate glass type substrate into the holder 1 in which a plurality of bones are continuously formed, thereby reducing the fatigue of the worker, thereby improving the production efficiency.

Secondly, since the fixed block 10 itself is tilted to one side by the support block 60, the substrates 5 coupled to the jig are tilted to one side, and the substrate 5 is fixed between the fixed support plate 12 and the movable support plate 22 5).

1 is a perspective view showing a conventional substrate holder,
FIG. 2 is a schematic view showing a state where a substrate coupled to the holder of FIG. 1 is misjoined;
3 is a perspective view showing the jig of the present invention,
Fig. 4 is an exploded perspective view of Fig. 3,
5A and 5B are schematic cross-sectional views illustrating a bonding operation of the substrate to the jig of the present invention,
Fig. 5c is a schematic view showing the jig of the present invention when the supporting block 60 is omitted, Fig.
Figure 6 is a cross-sectional view of Figure 3,
7 is a schematic view for explaining a state in which a substrate is bonded to a holder to be put into a substrate surface treatment process from the present invention jig.

The jig of the embodiment of the present invention is for solving the problem of single-unit joining of the substrate 5 to the holder 1 described in Fig. 1, and the jig of the embodiment of the present invention firstly joins the substrates 5 And then the jig is turned upside down as shown in Fig. 7 so that the substrates 5 can be simultaneously coupled to the holder 1 as shown in Fig.

3 to 6 showing a jig according to an embodiment of the present invention, a through hole 11 is formed through a bottom surface and an upper surface of the jig. Both ends of the through hole 11 are fixed across the through hole 11, (10) having a plurality of stationary support plates (12) vertically erected with respect to one another and spaced apart from each other; A plurality of moving support plates 22 which are movably coupled to the bottom surface of the fixed block 10 and are protruded through the through holes 11 so as to face the fixed support plates 12 are spaced apart from each other, A fixed moving block 20; Coupling means for movably coupling the mobile block (20) to the fixed block (10); Clamping means for clamping or unclamping the lower end of the substrate (5) between the stationary support plate (12) and the movable support plate (22) facing each other; Respectively.

5A and 6, the coupling means is formed in a bottom surface portion of the fixed block 10 so as to communicate with the through hole 11 and to be longer than the moving direction of the moving block 20, (10) fixed to the bottom of the stationary block (10) so that the movable block (20) is movably supported and closes the receiving groove (13) (30).

The movable block 20 is prevented from being separated by the finishing plate 30 and can be moved laterally in the receiving groove 13 so that the stationary support plate 12 and the movable support plate 22 are in close contact with or separated from each other .

The clamping means includes a spring member 40 provided between one end of the movable block 20 and the fixed block 10 and a spring member 40 screwed to the fixed block 10 and having an end fixed to the movable block 20 And a clamping bolt (50) for moving the moving block (20) in a direction of contacting the other end to compress the spring member (40).

When the clamping bolt 50 is tightened, the movable block 20 is moved in the direction of compressing the spring member 40 so that the lower end of the substrate 5 is moved between the fixed support plate 12 and the movable support plate 22 And the moving block 20 is moved by the restoring force of the spring member 40 when the clamping bolt 50 is loosened so that the moving support plate 22 moves away from the fixed support plate 12, (5) is released.

5a, the jig of the embodiment of the present invention is provided with a supporting block 60 at one side of the bottom surface of the finishing plate 30 or the fixing block 10 so that the fixing block 10 is inclined to one side . The substrate 5 loosely coupled between the fixed support plate 12 and the movable support plate 22 is tilted in one direction as shown in Figure 5a so that the substrate 5 is held between the fixed support plate 12 and the movable support plate 22, (5).

5C, when the supporting block 60 is not provided, the substrates 5 are positioned in the right and left arbitrary directions, so that the substrates 5 are held between the fixed supporting plate 12 and the moving supporting plate 22 The joining operation becomes troublesome by the substrate 5 which is inclined at the time of joining sequentially.

A stopper block 40 is fixed to one side of the upper surface of the fixed block 10 so that one side of the substrates 5 coupled between the fixed support plate 12 and the movable support plate 22 can be closely contacted and aligned. .

Use of the jig having the above-described configuration is as follows.

5A, the clamping bolt 50 is loosened to widen the gap between the fixed support plate 12 and the movable support plate 22 and the substrate 5 (see FIG. 5A) is interposed between the fixed support plate 12 and the movable support plate 22, ).

At this time, when the lower end of the substrate 5 is slid on the upper surface of the fixed block 10 and the substrate 5 is coupled between the fixed support plate 12 and the movable support plate 22, .

In addition, since the fixed block 10 itself is tilted to the left by the support block 60, the joined substrates 5 are inclined to the left. Thus, sequentially joining the substrate 5 from left to right facilitates the bonding operation of the substrate 5.

When the connection of the substrate 5 is completed between the stationary support plate 12 and the movable support plate 22, one end of the substrates 5 is pushed by a tool such as a rod, ).

Subsequently, as shown in FIG. 5B, the clamping bolts 50 are clamped so that the plurality of substrates 5 are simultaneously clamped between the fixed support plate 12 and the movable support plate 22.

7, the free ends of the clamped substrates 5 are held in a holder (not shown), with the substrates 5 being placed on the upper side of the holder 1 to be put into the surface treatment process of the substrate, The first and second supporting members 3 and 4 of the first and second supporting members 3 and 4 are coupled to the plurality of substrates 5 at the same time and finally the clamping bolt 50 is released to release the clamping.

The jig of the embodiment of the present invention having the above-described structure can simplify the work of inserting the thin plate glass-like substrate 5 into the holder 1 in which a plurality of valleys are continuously formed, reduce the fatigue of the worker, .

The fixed block 10 itself is tilted to one side by the support block 60 so that the substrates 5 coupled to the jig are inclined to one side and the substrate 5 is sandwiched between the fixed support plate 12 and the movable support plate 22. [ 5).

10 ... fixed block 11 ... through hole
12 ... fixed support plate 20 ... movable block
22 ... movable supporting plate 30 ... finished plate
40 ... Stopper block 50 ... Clamping bolt
60 ... bearing block

Claims (5)

A pair of first support members in the form of a wave, each pair of the holder main bodies being opposed to each other, a wave-like first support member having upper and lower ends thereof coupled between the holder main bodies, And a second supporting member having a wave form in which a bottom end of the substrate is mounted and supported so as to continuously support the plurality of substrates. The jig for a substrate holder for simultaneously joining a plurality of substrates to a jig,
And a plurality of fixed support plates 12, which are fixed on both ends of the through holes 11 and which are perpendicular to the upper surface and spaced apart from each other, are formed on the upper surface of the through- (10);
A plurality of moving support plates 22 that are movably coupled to the bottom surface of the fixed block 10 and are protruded through the through holes 11 so as to face the fixed support plates 12 are spaced apart from each other, A fixed moving block 20;
Coupling means for movably coupling the mobile block (20) to the fixed block (10);
Clamping means for clamping or unclamping the lower end of the substrate (5) between the fixed support plate (12) and the movable support plate (22) facing each other; And a jig for holding the substrate holder.
The mobile unit according to claim 1, wherein the engaging means is formed in a bottom portion of the fixed block so as to be in communication with the through hole and longer than the moving direction of the moving block, Receiving grooves 13 are formed,
And a finishing plate (30) movably supported by the moving block (20) and fixed to the bottom surface of the fixing block (10) so as to close the receiving groove (13) .
3. The apparatus according to claim 1 or 2, wherein the clamping means comprises a spring member (40) provided between one end of the movable block (20) and the fixed block (10) And a clamping bolt (50) for moving the movable block (20) in a direction of its end contacting the other end of the movable block (20) and compressing the spring member (40)
When the clamping bolt 50 is tightened, the movable block 20 is moved in the direction of compressing the spring member 40 so that the lower end of the substrate 5 is moved between the fixed support plate 12 and the movable support plate 22 Lt; / RTI >
When the clamping bolt 50 is released, the movable block 20 is moved by the restoring force of the spring member 40 so that the movable supporting plate 22 is moved away from the fixed supporting plate 12, Wherein the jig for the substrate holder is released.
4. The apparatus according to claim 3, wherein a support block (60) is provided on one side of the bottom surface of the finishing plate (30) or the fixing block (10)
Wherein the fixed block (10) is inclined to one side.
3. The apparatus according to claim 1 or 2, wherein a stopper block (40) to which one side of the substrate (5) coupled between the stationary support plate (12) and the movable support plate (22) Wherein the jig is provided on one side of the jig.
KR1020140066329A 2014-05-30 2014-05-30 A jig for board holder KR101744573B1 (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
KR1020140066329A KR101744573B1 (en) 2014-05-30 2014-05-30 A jig for board holder

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KR20150137810A true KR20150137810A (en) 2015-12-09
KR101744573B1 KR101744573B1 (en) 2017-06-20

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9748434B1 (en) 2016-05-24 2017-08-29 Tesla, Inc. Systems, method and apparatus for curing conductive paste
US9954136B2 (en) 2016-08-03 2018-04-24 Tesla, Inc. Cassette optimized for an inline annealing system
US9972740B2 (en) 2015-06-07 2018-05-15 Tesla, Inc. Chemical vapor deposition tool and process for fabrication of photovoltaic structures
US10115856B2 (en) 2016-10-31 2018-10-30 Tesla, Inc. System and method for curing conductive paste using induction heating
CN109003928A (en) * 2018-07-21 2018-12-14 江苏德尔科测控技术有限公司 A kind of silicon wafer carrying device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050003759A (en) * 2003-07-04 2005-01-12 비오이 하이디스 테크놀로지 주식회사 Cassette for glass substrate loading
JP2006093274A (en) * 2004-09-22 2006-04-06 Hitachi Cable Ltd Wafer container

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9972740B2 (en) 2015-06-07 2018-05-15 Tesla, Inc. Chemical vapor deposition tool and process for fabrication of photovoltaic structures
US9748434B1 (en) 2016-05-24 2017-08-29 Tesla, Inc. Systems, method and apparatus for curing conductive paste
US10074765B2 (en) 2016-05-24 2018-09-11 Tesla, Inc. Systems, method and apparatus for curing conductive paste
US9954136B2 (en) 2016-08-03 2018-04-24 Tesla, Inc. Cassette optimized for an inline annealing system
US10115856B2 (en) 2016-10-31 2018-10-30 Tesla, Inc. System and method for curing conductive paste using induction heating
CN109003928A (en) * 2018-07-21 2018-12-14 江苏德尔科测控技术有限公司 A kind of silicon wafer carrying device
CN109003928B (en) * 2018-07-21 2021-03-09 江苏德尔科测控技术有限公司 Silicon wafer bearing device

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