KR20150133875A - Graphene touch sensor, method of operating the same, and method of fabricating the same - Google Patents

Graphene touch sensor, method of operating the same, and method of fabricating the same Download PDF

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Publication number
KR20150133875A
KR20150133875A KR1020140060134A KR20140060134A KR20150133875A KR 20150133875 A KR20150133875 A KR 20150133875A KR 1020140060134 A KR1020140060134 A KR 1020140060134A KR 20140060134 A KR20140060134 A KR 20140060134A KR 20150133875 A KR20150133875 A KR 20150133875A
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South Korea
Prior art keywords
pattern
substrate
graphene
touch sensor
film
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KR1020140060134A
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Korean (ko)
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박완준
천성우
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한양대학교 산학협력단
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Priority to KR1020140060134A priority Critical patent/KR20150133875A/en
Priority to US15/312,354 priority patent/US10289230B2/en
Priority to CN201580026663.3A priority patent/CN106462281B/en
Priority to PCT/KR2015/004666 priority patent/WO2015178607A1/en
Publication of KR20150133875A publication Critical patent/KR20150133875A/en

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means

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  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

A graphene touch sensor is provided. The graphene touch sensor includes a first substrate, a first pattern disposed on the first substrate and having a first protruding region and a first concave region, a second pattern on the second substrate, A second pattern disposed on the second substrate to face the first pattern, the second pattern having the second projected area and the second recessed area, and a graphene film between the first pattern and the second pattern .

Description

TECHNICAL FIELD The present invention relates to a graphene touch sensor, a method of operating the same, and a manufacturing method thereof,

The present invention relates to a graphene touch sensor, a method of operating the same, and a method of manufacturing the same. More particularly, the present invention relates to a graphene touch sensor including a graphene film disposed between a first pattern having a protruding region and a concave region, And a touch sensor.

Due to the rapid development of mobile devices and efforts to mimic human touch senses, the development of touch-based devices has become a major issue. The touch sensor and the wearing electronic device which have been invented so far have been developed for sensing the presence or absence of a touch. In particular, the materials used in touch sensors are based on ITOs placed on silicon or glass substrates. The touch sensor using such an ITO material is not flexible and has a limitation in being used for a wearable device, a curved display, and the like.

Accordingly, the development of touch sensors utilizing new materials such as nanowires, carbon nanotubes, and graphenes is underway. For example, in Korean Patent Laid-Open Publication No. 10-2013-0091493 (Application No. 10-2012-0012817), it has been proposed to use an organic insulator and a graphene pattern layer patterned using a polymer stamp and an organic solvent, A graphene touch panel that can be reduced in cost and large in area, and a manufacturing method thereof.

However, these graphene touch sensors have a low sensitivity and sense the presence or absence of a touch of an object, and fail to sense the material of a touch object. Accordingly, there is a need for research and development of a touch sensor for sensing the surface characteristics (material) of an object with excellent sensitivity and flexibility.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a highly reliable graphene touch sensor, an operation method thereof, and a manufacturing method thereof.

It is another object of the present invention to provide a flexible graphene touch sensor, an operation method thereof, and a manufacturing method thereof.

Another aspect of the present invention is to provide a graphene touch sensor with a sensitive sensitivity, an operation method thereof, and a manufacturing method thereof.

Another object of the present invention is to provide a graphene touch sensor capable of sensing a material of a touch object, an operation method thereof, and a manufacturing method thereof.

According to an aspect of the present invention, there is provided a graphene touch sensor.

According to one embodiment, the graphene touch sensor includes a first substrate, a first pattern disposed on the first substrate, the first pattern having a first protruding region and a first concave region, A second substrate on the first substrate, a second pattern disposed on the second substrate to face the first pattern, the second pattern having the second protruding region and the second concave region, and a second pattern on the second substrate, And the like.

According to one embodiment, the first projected region and the second recessed region may be disposed to face each other, and the first recessed region and the second projected region may be disposed to face each other.

According to one embodiment, the second substrate includes one surface on which the second pattern is disposed and another surface opposed to the one surface, and the graphene touch sensor is disposed on the other surface of the second substrate, And an upper substrate having a sensing pattern.

According to one embodiment, the sensing patterns may include a plurality of line patterns spaced apart from each other by a predetermined width and extending in one direction.

According to one embodiment, the first pattern and the second pattern may include a plurality of lines extending in one direction.

According to one embodiment, any one of the first pattern and the second pattern may be in the form of a plurality of dots arranged two-dimensionally apart from each other, and the first pattern and the second pattern And the other one may include a mesh type capable of accommodating the plurality of dots.

According to an embodiment, the width of the first pattern may be the same as the interval between adjacent second patterns, and the width of the second pattern may be the same as the interval between adjacent first patterns.

According to one embodiment, the first pattern and the second pattern may be formed of an insulating material.

According to an embodiment, the first pattern and the second pattern may be formed of the same material.

According to one embodiment, the graphene touch sensor may further include electrode films disposed on the second pattern and electrically connected to both sides of the graphene film.

According to one embodiment, the first substrate and the second substrate may comprise flexible.

According to an aspect of the present invention, there is provided a method of operating a graphene touch sensor.

According to an embodiment of the present invention, an operation method of the graphene touch sensor includes: a step in which an object is touched by the graphene touch sensor, a bending of the graphene touch sensor, and a change in resistance of the graphene film, And sensing the texture.

According to an aspect of the present invention, there is provided a method of manufacturing a graphene touch sensor.

According to one embodiment, a method of manufacturing a graphene touch sensor includes the steps of: forming a first pattern having a first protruding region and a first recessed region on a first substrate; forming a second protruding region and a second protruding region on the second substrate; Transferring a graphene film onto the second pattern, and transferring the graphen film onto the first substrate so that the first pattern and the second pattern face each other, And disposing a second substrate.

According to an embodiment of the present invention, the step of transferring the graphene film onto the second pattern may include preparing a metal thin film having the graphene film, coating a sacrificial film on the graphene film, , Disposing the sacrificial film and the graphene film on the second pattern, and removing the sacrificial film.

According to one embodiment, the first protruding region and the second recessed region may be disposed to face each other, and the second protruding region may be disposed to face the first recessed region.

A graphene touch sensor according to an embodiment of the present invention includes a first pattern disposed on a first substrate and having a first projected region and a first recessed region and a second pattern disposed on the second substrate, And a second pattern having two concave regions. Wherein the first pattern and the second pattern having a protruding area and a concave area are disposed to face each other so that when an object is touched by the graphene touch sensor, a deformation of the graphene film disposed between the first and second patterns Can be increased. As a result, a graphene touch sensor with improved sensitivity can be provided.

FIG. 1 illustrates a first substrate structure of a graphene touch sensor and a method of manufacturing the same according to an embodiment of the present invention. Referring to FIG.
2A and 2B illustrate a second substrate structure of a graphene touch sensor and a method of manufacturing the same according to an embodiment of the present invention.
3 is a view for explaining an upper substrate of a graphene touch sensor and a method of manufacturing the same according to an embodiment of the present invention.
4A illustrates a graphene touch sensor according to an embodiment of the present invention and a method of manufacturing the same.
4B illustrates an operation method of the graphene touch sensor according to an embodiment of the present invention.
5A and 5B illustrate a first pattern and a second pattern included in the graphene touch sensor according to an embodiment of the present invention.
FIG. 6 is a graph illustrating response characteristics when a constant pressure is periodically applied to a graphene touch sensor according to an embodiment of the present invention. Referring to FIG.
FIG. 7 is a graph illustrating a response characteristic according to pressure applied to a graphene touch sensor according to an embodiment of the present invention. Referring to FIG.
8 is a graph illustrating a continuous response characteristic of the graphene touch sensor according to the embodiment of the present invention.
9 is a graph for explaining a response characteristic according to a touch speed of an object to be touched by a graphene touch sensor according to an embodiment of the present invention.
10 is a graph illustrating characteristics of a graphene touch sensor according to the intensity of a pressure applied to the graphene touch sensor according to an embodiment of the present invention.
11 is a graph illustrating characteristics of a graphene touch sensor according to a texture of an object to be touched by the graphene touch sensor according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the technical spirit of the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are provided so that the disclosure can be thorough and complete, and will fully convey the concept of the invention to those skilled in the art.

In this specification, when an element is referred to as being on another element, it may be directly formed on another element, or a third element may be interposed therebetween. Further, in the drawings, the thicknesses of the films and regions are exaggerated for an effective explanation of the technical content.

Also, while the terms first, second, third, etc. in the various embodiments of the present disclosure are used to describe various components, these components should not be limited by these terms. These terms have only been used to distinguish one component from another. Thus, what is referred to as a first component in any one embodiment may be referred to as a second component in another embodiment. Each embodiment described and exemplified herein also includes its complementary embodiment. Also, in this specification, 'and / or' are used to include at least one of the front and rear components.

The singular forms "a", "an", and "the" include plural referents unless the context clearly dictates otherwise. It is also to be understood that the terms such as " comprises "or" having "are intended to specify the presence of stated features, integers, Should not be understood to exclude the presence or addition of one or more other elements, elements, or combinations thereof. Also, in this specification, the term "connection " is used to include both indirectly connecting and directly connecting a plurality of components.

In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

In the present specification, the term "touch sensor" is used to mean sensing the presence or absence of touch of an object to be touched, the touch strength, the touch speed, etc. and sensing the surface characteristics (material) Quot; is used to mean that the object is directly touched or indirectly touched.

FIG. 1 illustrates a first substrate structure of a graphene touch sensor and a method of manufacturing the same according to an embodiment of the present invention. Referring to FIG.

Referring to FIG. 1, a first substrate structure 100 including a first substrate 100 and a first pattern 110 on the first substrate 100 is provided. The first substrate 100 may be a flexible substrate. For example, the first substrate 100 may be any one of PET, PES, PI, PEN, and PDMS.

The first pattern 110 may be formed on the first substrate 100. The forming of the first pattern 110 may include forming a material layer on the first substrate 100, forming a photoresist pattern on the material layer, And patterning the material film using a pattern. The material film may be formed of an insulating material. For example, the material film may be formed of silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, or the like.

The first pattern 110 may be in the form of a plurality of lines extending in one direction. The plurality of lines may be spaced apart from each other at regular intervals. The widths of the plurality of lines may be substantially equal to each other. The height of each of the plurality of lines may be substantially equal to each other. According to an embodiment, the width of the first pattern 110 and the interval between the first patterns 110 adjacent to each other may be substantially equal to each other.

The first pattern 110 may include a first protruding region 110a and a first concave region 110b. The first protruding region 110a may be defined on the upper surface of the first pattern 110. The first recess 110b may be defined between the first patterns 110 adjacent to each other. In other words, the first concave region 110b may be defined on the upper surface of the first substrate 100 exposed between the first patterns 110. The first protrusions 110a and the first recesses 110b may be provided on the first substrate 100 by the first pattern 110, respectively.

2A and 2B illustrate a second substrate structure of a graphene touch sensor and a method of manufacturing the same according to an embodiment of the present invention.

Referring to FIG. 2A, a second substrate 200 is provided. The second substrate 200 may be a flexible substrate. For example, the first substrate 200 may be any one of PET, PES, PI, PEN, and PDMS.

A second pattern 210 may be formed on one surface of the second substrate 200. The second pattern 210 may be formed in the same manner as the first pattern 110 described with reference to FIG. The second pattern 210 may be formed of the same material as the first pattern 110.

The second pattern 210 may be in the form of a plurality of lines extending in one direction. The plurality of lines may be spaced apart from each other at regular intervals. The widths of the plurality of lines may be substantially equal to each other. The height of each of the plurality of lines may be substantially equal to each other. According to an embodiment, the width of the second pattern 210 and the interval between the adjacent second patterns 210 may be substantially equal to each other.

The second pattern 210 may include a second protruding region 210a and a second concave region 210b. The second protruding region 210a may be defined on the upper surface of the second pattern 210. The second recess 210b may be defined between the second patterns 210 adjacent to each other. In other words, the second concave region 210b may be defined on the upper surface of the second substrate 200 exposed between the second patterns 210. The second protrusion 210a and the second recess 210b may be provided on the second substrate 200 by the second pattern 210, respectively.

Referring to FIG. 2B, a graphene layer 220 may be transferred onto the second pattern 210. The step of transferring the graphene film 220 onto the second pattern 210 may include preparing a thin metal film having the graphene film 220, coating a sacrificial film on the graphene film 220, Removing the sacrificial layer and the graphene layer 220 from the second pattern 210 so that the graphene layer 220 contacts the second pattern 210; , And removing the sacrificial film. For example, the metal thin film may be a copper (Cu) thin film, the sacrificial film may be PMMA, the metal thin film may be removed using FeCl 3 solution and HCl, and the sacrificial film may be removed with acetone have.

The electrode patterns 230 may be formed on the second pattern 210 after the graphene film 220 is transferred onto the second pattern 210. The electrode films 230 may be electrically connected to both sides of the graphene film 220. For example, the electrode films 230 may include chromium (Cr) and / or gold (Au) formed by vapor deposition.

The second pattern 210 on the second substrate 200, the graphene film 220 on the second pattern 210, and both sides of the graphene film 220 are formed on the second substrate 200, A second substrate structure including the electrode films 230 may be provided.

3 is a view for explaining an upper substrate of a graphene touch sensor and a method of manufacturing the same according to an embodiment of the present invention.

Referring to FIG. 3, an upper substrate 300 having a sensing pattern 310 is prepared. According to one embodiment, the step of preparing the upper substrate 300 having the sensing pattern 310 may include preparing a substrate having a flat upper surface, forming a photoresist pattern , And patterning the substrate using the photoresist pattern. In this case, the sensing pattern 310 and the upper substrate 300 may form one body. In this case, the boundary between the sensing pattern 310 and the upper substrate 300 may be exposed, unlike the case shown in FIG.

According to another embodiment, the step of preparing the upper substrate 300 having the sensing pattern 310 may include forming a material film on the substrate, forming a photoresist pattern on the material film, And patterning the material film using the photoresist pattern.

The sensing pattern 310 may be in the form of a plurality of lines extending in one direction. The plurality of lines may be spaced apart from each other at regular intervals. The widths of the plurality of lines may be substantially equal to each other. The height of each of the plurality of lines may be substantially equal to each other. According to an embodiment, the width of the sensing pattern 310 and the spacing between adjacent sensing patterns 310 may be substantially equal to each other.

FIG. 4A is a view for explaining a graphene touch sensor according to an embodiment of the present invention, and FIG. 4B is a view for explaining a method of operating the graphene touch sensor according to an embodiment of the present invention.

4A and 4B, a graphene touch sensor according to an embodiment of the present invention includes the first substrate structure described with reference to FIG. 1, the second substrate structure described with reference to FIGS. 2A and 2B, And the upper substrate 300 having the sensing pattern 310 described with reference to FIG.

The second substrate 200 may be disposed on the first substrate 100 so that the first pattern 110 and the second pattern 210 face each other. The first protruding region 110a may be disposed to face the second recess 210b and the second recess 110b may be disposed to face the first protruding region 210a. In other words, the second substrate 200 is formed on the first substrate 100 such that the first pattern 110 and the second pattern 210 including the concave region and the protrusion region are interlocked with each other .

The width of the first pattern 110 may be substantially the same as the distance between the adjacent second patterns 210 (the width of the second recess 210b). The width of the second pattern 210 may be substantially the same as the distance between the adjacent first patterns 110 (the width of the first recess 110b). Accordingly, the first pattern 110 and the second pattern 210 can be engaged with each other in the form of a gear.

The upper substrate 300 may be disposed on the other surface of the second substrate 200 facing the one surface (the second pattern 210 is formed). The sensing pattern 310 may be exposed to the outside.

When the object contacts the sensing pattern 310 of the graphene touch sensor according to the embodiment of the present invention, the graphene film 220 disposed between the first pattern 110 and the second pattern 210, Can be physically transformed. By the physical deformation of the graphene film 220, the resistance of the graphene film 220 can be changed. By sensing the change in resistance of the graphene film 220, the presence or absence of the object, the touch strength, or the touch speed can be sensed.

Further, when there is a specific pattern on the surface of the object, the resistance of the graphene film 220 can be changed according to a specific pattern of the surface of the object by the contact between the object surface and the sensing pattern 310 . Accordingly, it is possible to provide a graphene touch sensor capable of sensing the texture of the object through resistance change of the graphene film 220 according to the surface characteristics of the object, and a manufacturing method thereof.

The first and second patterns 110 and 210 having a concave region and a protruding region are arranged to mesh with each other so that the graphene film between the first pattern 110 and the second pattern 210 220 may be increased. As a result, a graphene touch sensor with improved sensitivity and a manufacturing method thereof can be provided.

In contrast to the above-described embodiment, one of the first pattern and the second pattern may be in the form of a plurality of dots, and the other may be in the form of a mesh capable of accommodating the plurality of dots . This will be described with reference to Figs. 5A and 5B.

5A and 5B illustrate a first pattern and a second pattern included in the graphene touch sensor according to an embodiment of the present invention.

Referring to FIG. 5A, a first pattern 410 may be disposed on a first substrate 400. The first substrate 400 may be the same substrate as the first substrate 100 described with reference to FIG. The first pattern 410 may be formed in the same manner as the first pattern 110 described with reference to FIG.

The first pattern 410 may be in the form of a plurality of dots. The plurality of dots may be two-dimensionally arranged on the first substrate 400 so as to be spaced apart from each other. Specifically, the plurality of dots may be arranged to form rows arranged in one direction and rows arranged in another direction intersecting the one direction.

The first pattern 410 may include a first protruding region 410a and a first recess 410a. The first protruding region 410a may be defined on the upper surface of the first pattern 410. [ The first concave region 410b may be defined between the first patterns 410 adjacent to each other. In other words, the first concave region 410b may be defined on the upper surface of the first substrate 400 exposed between the first patterns 410. The first protrusion 410a and the first recess 410b may be provided on the first substrate 400 by the first pattern 410, respectively.

Referring to FIG. 5B, a second pattern 510 may be disposed on the second substrate 500. The second substrate 500 may be the same substrate as the first substrate 100 described with reference to FIG. The second pattern 510 may be formed in the same manner as the first pattern 110 described with reference to FIG.

The second pattern 510 may be in the form of a mesh capable of receiving the first pattern 410 of the plurality of dot shapes. The second pattern 510 may include a second protruding region 510a and a second concave region 510a. The second protruding region 510a may be defined on the upper surface of the second pattern 510. The second recess 510b may be defined on the upper surface of the second substrate 500 exposed by the second pattern 510. [

The graphene film may be transferred to either the first pattern 410 or the second pattern 510, as described with reference to FIG. 2B. The first protruding region 410a of the first pattern 410 and the second concave region 510b of the second pattern 510 are opposed to each other to face the first pattern 410 of the first pattern 410, The first substrate 400 and the second substrate 500 may be disposed such that the concave region 410b and the second protruding region 510a of the second pattern 510 face each other.

Although the first pattern 410 is shown in FIG. 5A as being a square in plan view, the first pattern 410 may be formed of a circle, a triangle, or another polygon. In this case, the second pattern 510 may be formed in a mesh shape having a receiving portion of a circle, triangle, or other polygon capable of receiving the first pattern 410.

FIG. 6 is a graph illustrating response characteristics when a constant pressure is periodically applied to a graphene touch sensor according to an embodiment of the present invention. Referring to FIG.

6, a silicon oxide (SiO 2) a first pattern, a silicon oxide placed into engagement with the first pattern (SiO 2) a second pattern having the first pattern and the film graphene between the second pattern A graphene touch sensor was fabricated. A constant pressure was applied to the graphene touch sensor at a constant cycle to measure the resistance change of the graphene film. In the graph of Fig. 6, R o is the resistance of the graphene film in the absence of physical deformation. In the graph of FIG. 6,? R is the amount of resistance change of the graphene film in a state where the object is physically deformed by the pressure applied by touching the graphene touch sensor.

When a constant pressure is periodically applied, it is confirmed that the response (R / R 0 ) characteristic of the graphene touch sensor according to the embodiment of the present invention is substantially constant. That is, the reliability of the response characteristic of the graphene touch sensor using the graphene film can be confirmed.

FIG. 7 is a graph illustrating a response characteristic according to pressure applied to a graphene touch sensor according to an embodiment of the present invention. Referring to FIG.

Referring to FIG. 7, a graphene touch sensor manufactured according to an embodiment of the present invention is applied while varying pressure, and a response (? R / R 0 ) characteristic of the graphene touch sensor is measured according to the changed pressure . 7, as the applied pressure increases, the response (? R / R 0 ) of the graphene touch sensor increases and as the applied pressure decreases, the response (? R / R 0 ) Is decreased. That is, the response (? R / R 0 ) of the graphene touch sensor is changed corresponding to the applied pressure intensity, and the intensity of the touch of the object to the graphene touch sensor can be measured have.

8 is a graph illustrating a continuous response characteristic of the graphene touch sensor according to the embodiment of the present invention.

Referring to FIG. 8, a response (? R / R 0 ) characteristic of the graphene touch sensor was measured by applying 1,000 periodic pressures to the graphene touch sensor according to an embodiment of the present invention. As can be seen from FIG. 8, the response characteristic of the graphene touch sensor is not degraded with respect to 1,000 periodic pressures, and it is confirmed that a reliable response (? R / R 0 ) characteristic is exhibited.

9 is a graph for explaining a response characteristic according to a touch speed of an object to be touched by a graphene touch sensor according to an embodiment of the present invention.

9, the width of 100μm, the spacing of 100μm, and the graphene touch sensor according to the embodiment of the present invention with the sensing patterns having a thickness of 100μm PET single tip to 0.6X10 -4 m / s, 0.9X10 - 4 m / s, 1.2 x 10 -4 m / s, and 2.4 x 10 -4 m / s. It is confirmed that the response (? R / R 0 ) characteristic of the graphene touch pattern is changed according to the speed at which the PET tip is touched to the sensing pattern of the graphene touch pattern. That is, by using the graphene touch sensor according to the embodiment of the present invention, the touch speed of the object can be sensed.

10 is a graph illustrating characteristics of a graphene touch sensor according to the intensity of a pressure applied to the graphene touch sensor according to an embodiment of the present invention.

Referring to FIG. 10, a result obtained by touching a graphene touch sensor having a sensing pattern of a width of 100 μm, a gap of 100 μm, and a thickness of 100 μm with a single PET tip of 125 μm thickness, Frequency conversion. The PET tip was touched to the graphene touch sensor with high pressure in the order of (1), (2), (3), and (4) shown in FIG. As shown in Fig. 10, when the touches were touched at different pressures, the amplitude of the output was measured to correspond to the touched pressure. That is, it can be confirmed that the touch pressure of the object can be sensed by using the graphene touch sensor according to the embodiment of the present invention.

11 is a graph illustrating characteristics of a graphene touch sensor according to a texture of an object to be touched by the graphene touch sensor according to an embodiment of the present invention.

11, a graphene touch sensor according to an embodiment of the present invention having a sensing pattern of a width of 100 m, a spacing of 100 m, and a thickness of 100 m has a paper, a hand, a first sample object having a period of 100 m, The result of touching with the second sample object having a period was frequency-converted. 11 (a) to (d) are results of touching with paper, hand, first sample object, and second sample object, respectively. As can be seen from FIG. 11 (a), when the graphene touch sensor is touched with a substantially flat paper without a specific pattern on the surface, it can be confirmed that the main peak does not occur. On the other hand, when the graphene touch sensor is touched with an object having a specific pattern on the surface as shown in FIGS. 11 (b) to 11 (d), the main peak is measured to be generated according to the surface characteristics of the object. That is, it can be confirmed that the texture (surface characteristics) of the object can be sensed by analyzing the main peak according to the surface characteristics of the object.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the present invention is not limited to the disclosed exemplary embodiments. It will also be appreciated that many modifications and variations will be apparent to those skilled in the art without departing from the scope of the present invention.

100: first substrate
110: first pattern
110a: first protruding region
110b: first concave region
200: second substrate
210: the second pattern
210a: second protruding area
210b: second concave region
220: Graphene film
230: electrode film
300: upper substrate
310: sensing pattern

Claims (15)

A first substrate;
A first pattern disposed on the first substrate, the first pattern having a first protruding region and a first concave region;
A second substrate on the first substrate;
A second pattern disposed on the second substrate to face the first pattern, the second pattern having the second protruding region and the second recessed region; And
And a graphene film between the first pattern and the second pattern.
The method according to claim 1,
Wherein the first projected area and the second recessed area are arranged to face each other,
Wherein the first recessed area and the second protruded area are disposed to face each other.
The method according to claim 1,
The second substrate includes a first surface on which the second pattern is disposed and a second surface opposite to the first surface,
And a top substrate disposed on the other surface of the second substrate and having a sensing pattern.
The method of claim 3,
Wherein the sensing pattern includes a plurality of line patterns spaced apart from each other by a predetermined width and extending in one direction.
The method according to claim 1,
Wherein the first pattern and the second pattern include a plurality of lines extending in one direction.
The method according to claim 1,
Wherein one of the first pattern and the second pattern includes a plurality of dots arranged two-dimensionally apart from each other,
Wherein the other of the first pattern and the second pattern includes a mesh shape capable of accommodating the plurality of dots.
The method according to claim 1,
The width of the first pattern is equal to the interval between adjacent second patterns,
Wherein the width of the second pattern includes a width equal to an interval between adjacent first patterns.
The method according to claim 1,
Wherein the first pattern and the second pattern are formed of an insulating material.
The method according to claim 1,
Wherein the first pattern and the second pattern are formed of the same material.
The method according to claim 1,
Further comprising electrode films disposed on the second pattern and electrically connected to both sides of the graphene film.
The method according to claim 1,
Wherein the first substrate and the second substrate are flexible.
11. A method of manufacturing a graphene touch sensor, the method comprising: a step of bending an object to be inspected by the graphene touch sensor according to any one of claims 1 to 11 so that the graphene touch sensor is bent; And
Sensing a change in resistance of the graphene film, and sensing a texture of the object.
Forming a first pattern having a first protruding region and a first concave region on a first substrate;
Forming a second pattern having a second protruding region and a second concave region on a second substrate;
Transferring the graphene film onto the second pattern; And
And disposing a second substrate on the first substrate such that the first pattern and the second pattern face each other.
14. The method of claim 13,
Wherein the step of transferring the graphene film onto the second pattern comprises:
Preparing a thin metal film having the graphene film;
Coating a sacrificial film on the graphene film;
Removing the metal thin film from the graphene film;
Disposing the sacrificial film and the graphene film on the second pattern; And
And removing the sacrificial layer.
14. The method of claim 13,
The first protruding region and the second concave region facing each other,
And the second protruding region and the first recessed region are opposed to each other.
KR1020140060134A 2014-05-20 2014-05-20 Graphene touch sensor, method of operating the same, and method of fabricating the same KR20150133875A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020140060134A KR20150133875A (en) 2014-05-20 2014-05-20 Graphene touch sensor, method of operating the same, and method of fabricating the same
US15/312,354 US10289230B2 (en) 2014-05-20 2015-05-11 Graphene touch sensor, method for operating same, and method for manufacturing same
CN201580026663.3A CN106462281B (en) 2014-05-20 2015-05-11 Graphene touch sensor, its operation method and its manufacturing method
PCT/KR2015/004666 WO2015178607A1 (en) 2014-05-20 2015-05-11 Graphene touch sensor, method for operating same, and method for manufacturing same

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WO2017213446A1 (en) * 2016-06-10 2017-12-14 한양대학교 산학협력단 Conductive structure and manufacturing method therefor, touch sensor comprising conductive structure, manufacturing method for touch sensor, and touch sensing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017213446A1 (en) * 2016-06-10 2017-12-14 한양대학교 산학협력단 Conductive structure and manufacturing method therefor, touch sensor comprising conductive structure, manufacturing method for touch sensor, and touch sensing method
US11099669B2 (en) 2016-06-10 2021-08-24 Iucf-Hyu (Industry-University Cooperation Foundation Hanyang University) Conductive structure, method of manufacturing the same, touch sensor including the conductive structure, method of manufacturing the touch sensor, and touch sensing method

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