KR20150124461A - Heat source of heater for thermal vacuum deposition apparatus - Google Patents

Abstract

The present invention relates to a heater for the heat source of a thermal vacuum deposition device and, more specifically, to a heater for the heat source of a thermal deposition device, wherein a heater is arranged to envelop an evaporation container so as to deposition-coat an object for evaporation coating placed in front of an outlet by heating a material to be deposited which is used in the thermal vacuum deposition device and accommodated inside the evaporation container of the thermal deposition device, the heater is arranged at the outer circumference side of the evaporation container to melt the material to be deposited by supplying an electric current to the heater and generating high-temperature heat by electric energy, and an evaporation heater has heating members, which is long in an axial direction, arranged at regular intervals in a circumferential direction. The heater cuts and processes a carbon body to have a continuously extending structure in a structure of circulating in the circumferential direction of the evaporation container with a certain interval in the axial direction while enveloping the outer side surface of the evaporation container. The heater comprises: an electrode input terminal integrally formed of carbon at the lower side of the heater; and a socket inserted and combined with the heater, which continuously extends with a certain interval therebetween, to fix and support the heater on the thermal deposition device.

Description

[0001] The present invention relates to a heater for a heat source of a vacuum thermal evaporation apparatus,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heater for a heat source of a vacuum thermal deposition apparatus, and more particularly, to a heater body capable of providing superiority of a heater for a heat source used in a vacuum thermal evaporation apparatus.

A crucible containing an evaporation material is disposed in a lower part of a container mainly used for manufacturing a semiconductor device or a flat panel display device and a crucible is heated to evaporate the evaporation material therein to deposit the evaporation material on an upper substrate, to be.

Generally, a thin film is produced by a vacuum heating deposition method. In vacuum heating deposition, a crucible containing an evaporation material is placed under a substrate in a vacuum container, and the crucible is heated to evaporate the evaporation material to coat the substrate.

Methods for heating the evaporation material in the evaporation vessel in the vacuum heating deposition include indirect heating using a hot wire, direct heating to direct electricity to the evaporation vessel, or electron beam (E-beam) heating using an electron beam. Among them, the indirect heating method using hot wire is widely used because the deposition control is stable.

Such an indirect heating type vapor deposition apparatus requires an evaporation vessel and an evaporation heater capable of heating the evaporation vessel. Generally, a cylindrical evaporation vessel and a filament type evaporation heater that surrounds the evaporation vessel are used in many cases. There is no great difficulty in heating the evaporation vessel to a temperature of about 800 DEG C by the indirect heating using the filament as described above, but the evaporation source in the case where the evaporation vessel is heated further may be referred to as a high temperature evaporation source. These evaporation sources are mainly used for depositing metal or inorganic materials such as aluminum.

Conventional evaporation heaters used for vacuum evaporation heating fix the shape and position by arranging heat rays in the circumferential direction and passing the heat rays through a circular strip-shaped insulator having a plurality of holes formed therein.

However, according to the use of such an evaporation heater, the heat ray is deformed by heat, expanded mainly in the longitudinal direction, and contacted with the evaporation vessel or the heat sink, resulting in a short circuit. Also, in order to enlarge the evaporation apparatus, it is necessary to increase the size of the evaporation heater. In the conventional evaporation heater and the fixing structure, deformation due to its own weight may occur, resulting in malfunction or breakage of the evaporation heater.

In addition, since the material of the heating wire is made of a fine heater coil, there is a high possibility that the material easily breaks due to thermal deformation, and the thermal uniformity of the wire-shaped heating wire, which is processed into a fine line, is greatly reduced due to thermal deformation.

In addition, since the existing hot-wire heater body is assembled into a fine line, the assembly (wiring) itself is very difficult, and when the vapor deposition material is deposited on the wire heater body when exposed to the melting substrate in the thermal evaporation apparatus, This variation can easily cause disconnection due to electrical imbalance or short circuit due to deformation.

KR 10-1995-0002839 KR 10-2013-0073409 KR 10-2012-0111980

To solve the above problems, the present invention provides a heater for a heat source, which is excellent in durability without causing thermal deformation and fracture, and capable of providing a high installation easiness, .

It is another object of the present invention to provide a heater body which is very easy to assemble by applying a car body heater integrally formed thereon and can secure a very excellent device in terms of assembling and maintenance of a thermal evaporation apparatus .

According to an aspect of the present invention, there is provided a vapor deposition apparatus for use in a vacuum thermal evaporation apparatus for heating evaporation material contained in an evaporation vessel of a thermal evaporation apparatus to cover the evaporation vessel for evaporation coating on an object to be evaporated, A heater is provided and disposed on the outer circumferential side of the evaporation vessel for generating a high temperature by electric energy by supplying electric current to the heater to evaporate deposits and the evaporation heater is arranged in the circumferential direction Wherein the heater has a structure in which a carbon body is wrapped around the outer surface of the evaporation vessel and circulates along the circumferential direction of the evaporation vessel at a predetermined interval in the axial direction, And an electrode input terminal integrally formed on the lower side of the heater And also, at a predetermined interval is combined with the fitting heater is continuously extended it characterized in that it comprises a socket for supporting fixing the heater to heat the deposition device.

In addition, the socket is wrapped along the circumferential direction so as to be closely contacted to the lower side of the heater cut with the carbon (C) body, and a supporting groove corresponding to the distance between the heater and the heater, And the lower portion of the heater is engaged with the upper portion of the heater.

In addition, the electrode input terminal may further include a connection portion that is fitted into a joint hole processed to supply external power, and the connection portion is connected to a busbar for applying an external power source to supply power to the electrode input terminal And the connecting portion and the bus bar are fixedly coupled to the inner structure of the housing of the thermal evaporation apparatus.

The thermal evaporation apparatus may further include a tantalum sheet surrounding the outer surface of the carbon heater surrounding the evaporation vessel.

The thermal evaporation apparatus further includes a cover 120 for selectively opening and closing an opening formed in the evaporation vessel. When the evaporation vessel is vaporized by the temperature control for vaporizing the coating contained in the evaporation vessel by the heater, And the cover is opened to coat the evaporation body.

Further, the heater is characterized in that it is post-treated with the surface of a carbon body integrally formed.

Further, the heater is manufactured by machining the center of the original car body to a diameter allowing the evaporation vessel to be accommodated, machining the same in the curvature value of the inner circumferential surface, And the cross sectional area of the car body constituting the continuous heater body has a rectangular structure, and the cross sectional area of the rectangular structure is uniformly processed.

The heater body of the carbon-processed material applied to the thermal evaporation apparatus of the present invention constructed and operated as described above has an advantage that the vapor deposition property can be improved and the reliability of the equipment can be satisfied.

In addition, since the car body is cut to form an integral structure so as to cover the inside of the vacuum container, the carcass structure is very easy to assemble, and even when the deposition material is deposited on the surface of the heater due to the nature of the carbon material, So that there is an advantage that the reliability of the apparatus and stable operation performance can be ensured.

1 is a schematic perspective view of a general vacuum thermal evaporator,
2 is a side view of a general vacuum thermal deposition apparatus,
3 is a plan view of a heater for a heat source of a vacuum thermal deposition apparatus according to the present invention,
4 is a side view of a heater for a heat source of a vacuum thermal deposition apparatus according to the present invention,
5 is a perspective view of a heater for a heat source of a vacuum thermal deposition apparatus according to the present invention,
6 is a detailed view showing an electrode input terminal of a heater for a heat source according to the present invention,
FIG. 7 is a sectional view of a heater for a heat source of a vacuum thermal deposition apparatus according to the present invention,
8 is a cross-sectional enlarged view of a heater for a heat source of the vacuum thermal deposition apparatus according to the present invention.

Hereinafter, a preferred embodiment of a heater for a heat source of a vacuum thermal deposition apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

The heater for the heat source of the vacuum thermal deposition apparatus according to the present invention is used in the vacuum thermal evaporation apparatus 100 to heat the evaporation material contained in the evaporation container 110 of the thermal evaporation apparatus, A heater is provided to surround the evaporation vessel to coat the evaporation vessel and a heater is provided to supply current to the heater to generate high heat by electric energy to melt the evaporation material, Wherein the heater surrounds the outer surface of the evaporation vessel and surrounds the evaporation vessel in a circumferential direction of the evaporation vessel at a predetermined interval in the axial direction while surrounding the outer surface of the evaporation vessel, So as to have a continuous elongated structure, and the lower portion of the heater is integrally formed of carbon An electrode input terminal 220, and is fitted to the heater at a predetermined interval is formed continuously extending in characterized in that it comprises a socket (230) for fixing the support of the heater to heat the deposition device.

Since the heater for the heat source of the vacuum thermal deposition apparatus according to the present invention is formed of a single heater to form the carbon, the durability is very excellent and the problem of the thermal unevenness is not caused, and the heater is made of a hard material It is very easy to assemble and it is easy to maintain because the diffusion bonding of the heater body due to the vapor phase does not occur and the deposition material is easily dropped during thermal vapor deposition, thereby overcoming the problem of thermal uniformity due to contamination and being able to be used for a long time, The present invention provides a heater body for a thermal evaporation heat source having characteristics that can be improved.

FIG. 3 is a plan view of a heater for a heat source of a vacuum thermal deposition apparatus according to the present invention, and FIG. 4 is a side view of a heater for a heat source of the vacuum thermal deposition apparatus according to the present invention. The heater for a heat source according to the present invention has a structure in which a carbon body is cut and a circumferential direction is continuously extended with respect to a vertical axis so that the outer surface of the vacuum vessel of the thermal evaporation apparatus can be covered.

 In order to process the heater body, it is required to have a heater body having a hollow structure so that the evaporation vessel can be accommodated in the center, and a current flows through the electrode input terminal 220 to be formed on the lower side, And has a structure in which processing is continuously extended along the circumferential direction of the hollow. That is, the heater is formed so as to extend from the bottom to the top side and from the top to the bottom side with a predetermined gap.

Therefore, in order to form a structure spaced apart from each other by a predetermined distance after forming the cylindrical carbon, the cutting line 210 is cut in the upward / downward direction to thereby continuously extend upward / downward along the circumferential direction The carbon heater can be formed. Car body heaters have characteristics that are very suitable for use at high temperatures, and they do not melt up to 3642 ° C and only sublimate. Therefore, they have an advantage of being used as a heater body.

On the other hand, silicon carbide (SiC) may be further coated on the surface of the car body heater according to the present invention. Since carbon can cause oxidization problems by oxygen, it can be used up to 1500 ℃ even in an oxidizing environment. In addition, SiO2 can be formed on the SiC surface through a post-treatment process as follows.

C (carbon)

SiH4 + C = > SiC + H2

SiC + O2 = > SiO2 + C

That is, it consists of a base in which SiC is formed on the carbon surface through continuous post-treatment, and SiO 2 is formed on the SiC surface again. When the SiO 2 film is formed on the SiC surface, it can be used up to 980 ° C even in the atmospheric state.

4 is a side view of a heater according to the present invention. A power input terminal 220 is formed integrally with the heater portion and a heater connected to the power input terminal 220. The power input terminal 220 is connected to a heater connected to another power input terminal. That is, the heater, which is extended from one power input terminal to the other, is connected to the other electrode input terminal to generate high-temperature heat while being supplied with power.

At this time, the electrode input terminal has a structure in which it is processed integrally with the heater body, and the carbon heater thus processed is inserted into the thermal evaporation apparatus, and the evaporation vessel is coupled to the center of the heater again.

5 is a perspective view of a heater for a heat source of a vacuum thermal deposition apparatus according to the present invention. As shown in the figure, the heater 200 has a cylindrical structure, and the evaporation vessel 110 is positioned inside the penetration structure provided at the center.

On the other hand, when a heater body integrally formed with a carbon body is installed in a thermal evaporation apparatus, a socket 230 is configured to stably fix the heater body. The socket has a ring structure, and a supporting step 231 and a supporting groove 232 are provided on the inner circumferential surface. The supporting jaw is provided so as to be fitted to correspond to the cut portion of the heater and is fixed in contact with the housing structure of the thermal vapor deposition apparatus. The socket 230 has an advantage that the socket 230 can be firmly fixed by fitting the support jaw into the cutter so that the support jaw can be inserted along the incision, The socket may be configured to correspond to the outer diameter of the heater and the position of the cutout.

6 is a detailed view showing an electrode input terminal of a heater for a heat source according to the present invention. As described above, the power input terminal 220 for receiving power is coupled to the conduction connecting part 221 and the bus bar 222 is coupled to the lower part of the heater. The connection part 221 may be configured to be fastened to the power input terminal 220 through which the connection hole is formed, so that the connection part is fixed at the lower side of the power input terminal. The power source supplied from the outside supplies power to the heater by the bus bar made of metal, wherein the bus bar and the connecting part are fixed to each other and fixed to the housing structure.

In addition, it is very important to heat the heater according to the present invention by machining the interval of the incised portion, the curvature value of the inner circumferential surface, and the curvature value of the curvature sectional area of the outer circumferential surface constantly through precision machining. First, in order of machining, the center of the arc car body should be machined to a diameter that can accommodate the evaporation vessel, and the curvature value of the inner circumferential surface should be machined uniformly. This is because the uniformity of the temperature delivered to the surface of the evaporation vessel is very important.

In the above process, machining is performed so that the intervals between cuts machined through machining are equal to each other in order to form electrodes in the center of the car body. The sectional area of the car body constituting the continuous heater body has a rectangular structure, Sectional area is made constant.

FIG. 7 is a cross-sectional view illustrating a heater for a heat source of a vacuum thermal deposition apparatus according to the present invention, and FIG. 8 is an enlarged cross-sectional view of a heater for a heat source of the vacuum thermal evaporation apparatus according to the present invention.

As shown in FIGS. 1 and 2, the thermal vapor deposition apparatus 100 includes an evaporation vessel 110, which houses a deposition material, and is disposed inside a hollow heater according to the present invention. A housing 130 corresponding to the body of the thermal evaporation apparatus is constructed.

In order to selectively close the opening face of the evaporation container, a cover 120 is hinge-coupled to rotate. When the evaporation material is melted in the evaporation container, the cover is opened to vaporize the evaporation material on the evaporation object Is opened. The thermal evaporation apparatus according to the present invention may further include a cover 120 selectively opening and closing an opening formed on the evaporation vessel. When the evaporation vessel is vaporized by temperature control for vaporizing the coating material contained in the evaporation vessel by the heater The cover is opened to coat the deposited body.

The entire outer surface of the thermal vapor deposition apparatus 100 is enclosed in the housing 130, and a carbon heater 200 is installed in the housing 130, and a vacuum container is inserted into the hollow of the heater.

At this time, the heater is tightly fixed by the socket 230 as described above.

According to the present invention thus configured, a heater prepared by integrally molding a car body such as durability improvement, assembling property improvement, thermal uniformity improvement and life span replacement is used by replacing a heater body used as a heat source of a thermal vapor deposition apparatus with a conventional wire heating wire So that it is possible to provide a heater body that is very satisfactory.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. On the contrary, those skilled in the art will appreciate that many modifications and variations of the present invention are possible without departing from the spirit and scope of the appended claims. And all such modifications and changes as fall within the scope of the present invention are therefore to be regarded as being within the scope of the present invention.

100: thermal evaporation apparatus 110: evaporation vessel
120: cover 130: housing
200: heater 210:
220: Power input terminal 221: Connection
222: busbar 230: socket
231: Support chin 232: Support groove

Claims (7)

A heater is provided in the evaporation container of the thermal evaporation apparatus for heating the evaporation material to be vapor-coated on the object to be evaporated, which is positioned in front of the discharge port, so as to surround the evaporation container, There is provided a heater for a heat source of a thermal evaporation apparatus, which is disposed on an outer circumferential side of an evaporation vessel for generating high heat by electric energy to melt evaporation materials, and in which evaporation heaters are arranged in a circumferential direction at regular intervals in axially long heating members ,
The heater is formed by cutting a carbon body so as to have a continuous extension structure in a structure that circulates along the circumferential direction of the evaporation vessel at a predetermined interval in the axial direction while surrounding the outer surface of the evaporation vessel,
And an electrode input terminal formed integrally with the lower side of the heater by the carbon,
And a socket which is fitted to the heater continuously extended at a predetermined interval and fixes and supports the heater to the thermal evaporation apparatus. The socket according to claim 1,
A support groove corresponding to a spacing distance of the heater and a support groove corresponding to the heater are formed along the circumferential direction of the socket so as to be wrapped along the circumferential direction so as to be closely contacted to the lower side of the heater cut with the carbon body, And the lower heat source is connected to the lower heat source. The plasma display apparatus according to claim 1,
And a connecting portion that is fitted into the joint hole formed to supply an external power source. The connection portion is connected to a busbar for applying an external power source to supply power to the electrode input terminal,
Wherein the connecting portion and the bus bar are installed to be fixedly coupled to the inner structure of the housing of the thermal evaporation apparatus. 2. The thermal evaporation apparatus according to claim 1,
And a tantalum sheet surrounding the outer surface of the heater surrounding the evaporation vessel. 5. The thermal evaporation apparatus according to any one of claims 1 to 4,
And a cover (120) for selectively opening and closing an opening formed on the evaporation vessel. When the evaporation vessel is vaporized by the temperature control for vaporizing the coatings accommodated in the evaporation vessel, the cover is opened, A heater for a heat source of a vacuum thermal evaporator in which a coating is formed. The heater according to any one of claims 1 to 4,
And a post-treatment is performed on a surface of a carbon body integrally formed. 7. The heater according to any one of claims 1 to 6,
The center of the circle car body is machined to a diameter capable of accommodating the evaporation container, the curvature value of the inner circumferential surface is machined to be the same,
In the above process, machining is performed so that the intervals between cuts machined through machining are equal to each other in order to form electrodes in the center of the car body. The sectional area of the car body constituting the continuous heater body has a rectangular structure, Wherein a width of the cross-sectional area of the heat source is constant.

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