KR20150071256A - Sputter apparatus and film using the apparatus - Google Patents

Abstract

The present invention relates to a sputtering apparatus for manufacturing a film to produce a gradation film through a gradation effect wherein a color or a density gradually changes on the outer surface of a film, the subject to be sputtered thereby easily producing a gradation film. The sputtering apparatus comprises: a target and a sputter gun which are disposed between an unwinding roller and a winding roller in a chamber to execute sputtering on a PET sheet to be sputtered which passes in a horizontal state; and a mask member which is arranged between the PET sheet to be sputtered and the target to adjust a sputtering area of the PET sheet to be sputtered, Wherein the mask member is composed of a masking area which blocks the movement of thin film substances discharged from the target and a sputtering area which permits the movement of thin film substances discharged from the target, thereby consequently forming a sputtering section along the PET sheet wherein a sputtering is performed due to thin film substances which penetrated the sputtering area on the PET sheet to be sputtered.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a sputtering apparatus for producing a film,

The present invention relates to a sputtering apparatus for producing a film and a film produced thereby. More specifically, the present invention relates to a sputtering apparatus in which various kinds of deposition masking are performed on a target so that color or tint is progressively The present invention relates to a sputtering apparatus for producing a film, and a film produced by the same, which can easily produce a gradient film.

The sunlight is largely divided into ultraviolet rays (100 to 380 nm), visible rays (380 to 780 nm) and infrared rays (780 to 60000 nm). Infrared rays are divided into near-infrared rays and far-infrared rays. Among them, the ultraviolet light is about 6%, the visible light is about 46% and the infrared light is about 48%. When the skin is exposed for a long time, the ultraviolet light causes skin aging and cancer. Thereby causing an increase in cooling costs in the summer.

In order to prevent the sunlight including ultraviolet rays and infrared rays from being directly irradiated into the room, products for preventing exposure to ultraviolet rays and infrared rays by attaching various blocking films to window glasses of automobiles and buildings have been developed and put into practical use. Such a barrier film itself not only shields ultraviolet rays and infrared rays but also functions to complement the mechanical strength of the window glass, to prevent glass fragments from splashing when the window glass is broken, and to protect privacy when applying a colored film And the like.

In recent years, there has been a continuous increase in the demand for films that can prevent direct sunlight from entering the eyes of the users while basically having transparency and visibility securing the basic properties of the window glass. Such a film has transparency as a whole, and a coating layer for blocking the sunlight entering the room is formed at a part of the upper part, thereby preventing the sunlight directly entering the field of view of the user when the sun comes up and causing glare It will be possible to do. Particularly, when such a film is attached to a window glass of a vehicle, there is a surge of demand for the product because it has a function of preventing the driver from driving through the transparent part and also preventing the glare through the upper translucent part.

However, it is very difficult to apply coatings of different colors or shades to the films attached to the windowpane. Therefore, it is difficult to cope with the demand of the products in the market because the limited production is small and mass production is almost impossible.

SUMMARY OF THE INVENTION An object of the present invention is to provide a method and apparatus capable of easily producing a gradation film by applying various kinds of deposition masking to a target in a sputtering apparatus to give a gradation effect in which color or shade gradually changes on an outer surface of a film, A sputtering apparatus for producing a film and a film produced thereby.

A target and a sputter gun provided between the take-up roller and the take-up roller in the chamber for performing sputtering on the PET sheet to be deposited, which goes horizontally; A mask member disposed between the target PET sheet and the target and adjusting a deposition area of the PET sheet to be deposited; Wherein the mask member comprises a masking region for blocking movement of the thin film material emitted from the target and a deposition region for allowing movement of the thin film material emitted from the target, Characterized in that the deposition section in which the deposition is carried out by the material is continuously formed along the PET sheet.

Preferably, the deposition region of the mask member includes at least one gradient incision line formed parallel to the PET sheet movement direction or with a predetermined inclination, and at least one transverse incision formed in a direction perpendicular to the movement direction of the PET sheet Line. ≪ / RTI >

Preferably, the mask member is formed with a right-angled triangular-shaped deposition region on one side thereof, and the right-angled triangular side of the deposition region is formed in a direction perpendicular to the moving direction of the PET sheet to determine the width of the deposition region. Transverse incision line; A second gradient incision line formed in a direction parallel to the moving direction of the PET sheet; A first draft incision line formed to have a predetermined inclination with respect to the moving direction of the PET sheet and to determine a gradation density in the deposition section according to the inclination; And a control unit.

Preferably, the mask member is formed with a triangular shaped deposition region, the triangular sides of the deposition region being formed in a direction perpendicular to the direction of movement of the PET sheet to determine the width of the deposition region; A first gradient incision line and a second gradient incision line respectively formed to have a predetermined inclination with respect to the moving direction of the PET sheet and determining the gradient gradation on both sides in the deposition section according to the inclination; And a control unit.

Preferably, the inclined portions of the first gradient incision line and the second gradient incision line are equal to each other to form an equilateral triangular-shaped vapor deposition region.

Preferably, the inclined portions of the first gradient incision line and the second gradient incision line are different from each other to constitute a deposition region of a triangular shape.

Preferably, the mask member is formed with a trapezoidal rectangular deposition region, and the rectangular sides of the deposition region are formed in a direction perpendicular to the moving direction of the PET sheet to form a first transverse incision line ; A second transverse incision line formed parallel to the first transverse incision line and determining the width of the high deposition interval in the deposition interval; A first gradient incision line and a second gradient incision line respectively formed to have a predetermined inclination with respect to the moving direction of the PET sheet and determining the gradient gradation on both sides in the deposition section according to the inclination; And a control unit.

Preferably, the inclined portions of the first gradient incision line and the second gradient incision line are equal to each other, thereby forming a trapezoidal rectangular deposition region.

Preferably, the inclined portions of the first gradient incision line and the second gradient incision line are different from each other to form a trapezoidal-shaped vapor deposition region.

According to another aspect of the present invention, there is provided a film made of a vapor-deposited PET sheet formed by a sputtering apparatus of any one of the above-mentioned characteristics and having a deposition section in the form of a gradient.

According to the present invention, various types of deposition masking are performed on a target in a sputtering apparatus to give a gradation effect that gradually changes color or shade on the outer surface of a film, which is an object to be deposited, so that a gradation film can be easily produced It is effective.

These advantages not only shorten the unit time required for producing the film, but also reduce the power consumption of the sputtering apparatus required for sputtering due to the partial sputtering, reduce the consumption of the target, and reduce the production cost.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a structure of a sputtering apparatus according to the present invention. Fig.
2 is a view for explaining a masking structure according to an embodiment of the present invention;
3 is a view for explaining a masking structure according to another embodiment of the present invention.
4 is a view for explaining a masking structure according to another embodiment of the present invention.
5 is a perspective view for explaining a mask member according to the present invention.
6 is a sectional view showing a glass film using a film produced by a sputtering apparatus according to the present invention.
7 is a process diagram for explaining a method of manufacturing a glass film using a film produced by the sputtering apparatus according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

In the following description of the present invention, the overall structure of a sputtering apparatus capable of progressing gradation deposition on a PET sheet will be described. A deposited PET sheet produced by the sputtering apparatus is used to attach to a window glass of an automobile or a building, And a method of manufacturing the glass film will be described with reference to the drawings. The structure of the sputtering apparatus of the present invention can be applied to any sputter apparatus adopting a target regardless of various forms and structures of the sputtering apparatus.

1 is a view showing a structure of a sputtering apparatus according to the present invention.

Referring to FIG. 1, a sputtering apparatus according to the present invention includes a chamber 100 maintained in a vacuum state, a take-up roller 120 fixed in the chamber 100 and releasing the supplied PET sheet 140, A winding roller 130 for winding up and accumulating the PET sheet 140 unwound from the unwinding roller 120 and a winding roller 130 provided between the winding roller 120 and the winding roller 130 to be placed in a horizontal state, A target 160 and a sputter gun 170 for performing sputtering on the PET sheet 140 and a sputtering target 170 provided between the target PET sheet 140 and the target 160 to deposit the PET sheet 140 to be deposited And a mask member 150 for adjusting a deposition area. A gas supply unit 110 for supplying gas to the chamber 100 may be installed.

The sputtering in the sputtering apparatus according to the present invention accelerates a gas such as argon ionized with argon or the like at a relatively low degree of vacuum to collide with the target 160 to eject atoms to form a vapor deposition film on the PET sheet 140 to be deposited. Here, in the sputtering apparatus, the target side is a cathode and the PET sheet 140 is an anode. First, after the chamber 100 is brought close to a vacuum, a gas such as argon is flowed into the chamber 100 through a low-pressure gas supplier 110. When a voltage is applied to the electrode through the sputter gun 170, Ar + ions are ionized and a plasma is generated. Since the target 160 covered with the source material is kept at a negative potential relative to the PET sheet 140, the argon gas collides with the target 160 covered with the source material after acceleration, and the source atoms and molecules (hereinafter referred to as thin film materials) Is discharged from the target 160 and is blown onto the PET sheet 140 to be deposited.

According to the present invention, a mask member 150 is provided between the target 160 and the PET sheet 140, more precisely on the target 160, and sputtering proceeds.

In the present invention, the mask member 150 is made of a thin film material, such as stainless steel, to completely block the movement of the thin film material emitted from the target 160.

Accordingly, in the present invention, the mask member 150 may include a masking region 151 for completely blocking the movement of the thin film material emitted from the target 160, and a deposition region 152 for allowing movement of the thin film material emitted from the target 160 As a result, the deposition section 142 is formed on the PET sheet 140 to be deposited due to the thin film material passing through the deposition area 152. The deposition section 142 is continuously formed on the PET sheet 140 while the PET sheet 140 is being moved from the take-up roller 120 to the take-up roller 130, Lt; / RTI >

The cut surface for the mask member 150 for forming the deposition region 152 in the mask member 150 includes at least one or more gradient incision lines 152a and 152b and at least one or more transverse incision lines 152c and 152d You must have it.

The transverse cutting lines 152c and 152d are formed in a direction perpendicular to the moving direction of the PET sheet 140 moving between the rolls and the length of the transverse cutting lines 152c and 152d, The width of the deposition section 142 will be determined.

The gradient incision lines 152a and 152b are formed to have parallel slopes or a constant slope with respect to the moving direction of the PET sheet 140 moving between the rolls and the slopes of the gradient incisions 152a and 152b The gradation effect in which the color or gradation gradually changes on the outer surface of the PET sheet 140 as an object of deposition may be variously provided.

FIG. 2 is a perspective view showing a masking structure according to an embodiment of the present invention, wherein (a) is a perspective view showing an arrangement of a target and a mask member, and (b) And Fig.

2, the mask member 150 is basically spaced apart from the target 160 so that the mask member 150 partially blocks the movement of the thin film material emitted from the target 160 .

In such a structure, the mask member 150 is formed with a portion of the deposition region 152 to permit movement of the thin film material that is emitted from the target 160, and the remaining region, from the target 160 as a masking region 151 Which will block the movement of the thin film material being emitted.

Wherein the deposition region 152 has at least one gradient incision line 152a, 152b and at least one transverse incision line 152c.

In the description of the present invention, the term "incision" used in forming the deposition region 152 basically refers to a cutting using a cutting tool to form the deposition region 152, but is not limited thereto The deposition region 152 may be formed by various methods such as injection molding, punching, and the like.

In one embodiment, the mask member 150 of FIG. 2 is formed with a deposition region 142 in the form of a right-angled triangle on one side. The deposition region 142 is formed by a transverse cutting line 152c for determining the width of the deposition section 142 in the PET sheet 140 as an object to be vapor deposited and two gradation effects for determining the gradation effect on the outer surface of the PET sheet 140, And is divided through gradient incision lines 152a and 152b. In other words, one transverse incision line 152c and two gradient incision lines 152a and 152b form a side of a right triangle. A thin film material is deposited in the deposition section 142 of the PET sheet 140 while a region in which the thin film material of the target 160 can not be deposited is made of only the masking area 151 of the mask member 150, 141).

More specifically, the deposition region 142 includes a first transverse cutting line 152c (see FIG. 2B) formed in a direction perpendicular to the moving direction of the PET sheet 140 moving between the rolls ). Since the first transverse cutting line 152c in the form of such a right triangular shaped deposition region is a transverse cutting line formed solely to form the deposition region 142, the length of the first transverse cutting line 152c The width of the deposition section 142 will be determined in the PET sheet 140 which is an object of deposition.

The deposition region 142 has a second gradient line 152b formed in a direction parallel to the direction of movement of the PET sheet 140 moving between the rolls and a predetermined gradient with respect to the direction of movement of the PET sheet 140 And has a first draft incision line 152a formed therein.

The angle? 1 between the first gradient line 152a and the second gradient line 152b, that is, the slope of the first gradient line 152a is set to be the same as the deposition interval 142 of the PET sheet 140, Will determine the gradation effect of the graduated gradient effect.

For example, if the slope? 1 of the first gradient slit 152a is narrowed, the overall deposition area 152 of the mask member 150 will be reduced, and further, the width of the deposition area 142 in the PET sheet 140 An abrupt gradation effect (change in the tint) will appear within the reduced and narrowed deposition section 142.

In contrast, if the slope? 1 of the first gradient slice 152a is widened, the entire deposition area 152 of the mask member 150 will be extended, and further, the width of the deposition area 142 in the PET sheet 140 A gentle gradation effect will appear within the deposited and stretched deposition section 142.

2, in the form of a right-angled triangular shaped deposition region, the first gradient line 152a slopes from the PET sheet 140 to the deposition region 142 by the slope of the second gradient line 152b, (Gradation change) will be determined.

FIG. 3 is a view for explaining a masking structure according to another embodiment of the present invention, wherein (a) is a perspective view showing the arrangement of a target and a mask member, and (b) And Fig.

Referring to FIG. 3, in another embodiment, the mask member 150 of FIG. 3 is formed with a deposition region 142 in the form of a triangular shape at an intermediate portion. The deposition region 142 is formed by a transverse cutting line 152c for determining the width of the deposition section 142 in the PET sheet 140 as an object to be vapor deposited and two gradation effects for determining the gradation effect on the outer surface of the PET sheet 140, And is divided through gradient incision lines 152a and 152b. In other words, one transverse incision line 152c and two gradient incision lines 152a and 152b form the sides of a triangle. A thin film material is deposited in the deposition section 142 of the PET sheet 140 while a region in which the thin film material of the target 160 can not be deposited is made of only the masking area 151 of the mask member 150, 141).

3 (b), when the deposition region 152 of the mask member 150 has a regular triangle or a triangle shape, the PET sheet 140 is formed with a thin film There will be a gradation effect in which the deposition amount of the material is reduced. In particular, a PET sheet 140 of this type will allow the PET sheet 140 to be cut along the cutting line C to produce two PET sheets. In this case, the individual sizes of the two PET sheets will be determined according to the position of the deposition region 152 of the mask member 150.

More specifically, the deposition region 142 includes a first transverse cutting line 152c (see FIG. 3B) formed in a direction perpendicular to the moving direction of the PET sheet 140 moving between the rolls ). In particular, in the form of a deposition region having such an equilateral triangle or triangle shape, the first transverse incision line 152c is a transverse incision line formed solely to form the deposition region 142, so that the first transverse incision line 152c, The width of the deposition section 142 in the PET sheet 140 will be determined.

The deposition region 142 has a first gradient line 152a and a second gradient line 152b which are formed to have a constant slope with respect to the moving direction of the PET sheet 140 moving between the rolls.

The angle? 2 between the first gradient line 152a and the second gradient line 152b, that is, the slope of the first gradient line 152a and the second gradient line 152b, The gradation effect of the gradation effect which gradually changes in the deposition section 142 of the sheet 140 will be determined.

For example, if the tilt? 2 is narrowed, the entire deposition region 152 of the mask member 150 will be reduced, and further, the width of the deposition region 142 in the PET sheet 140 will be reduced, A sudden gradient effect (a change in jokes) will appear on both sides.

The width of the deposition section 142 in the PET sheet 140 may be greater than the width of the deposition section 142 in the PET sheet 140. In other words, A gentle gradation effect will appear on both sides within the deposited and stretched deposition section 142.

3, the slope of the first gradient line 152a and the second gradient line 152b in the shape of the equilateral triangle-shaped deposition region makes it possible to prevent the growth of the deposition region 142 in the PET sheet 140 The width and gradation effect (change in the jade) will be determined.

The inclination of the first gradient line 152a and the second gradient line 152b constituting the deposition area 152 of the mask member 150 are different from each other (more precisely, the first gradient line 152a ) And the second gradient cutting line 152b are different from the first traverse cutting line 152c), when the deposition region 152 having the shape of a triangle instead of the equilateral triangle is formed, different gradation effects are exhibited on both sides PET sheet will be able to be produced. This will enable PET sheet with two different gradation shapes and areas to be produced in a single sputtering process, which will greatly contribute to improving film production efficiency and production diversity.

FIG. 4 is a view for explaining a masking structure according to another embodiment of the present invention, wherein (a) is a perspective view showing the arrangement of a target and a mask member, and (b) Fig.

Referring to FIG. 4, in another embodiment, the mask member 150 of FIG. 4 is formed with a deposition region 142 in the shape of a trapezoid in the middle. The deposition region 142 is formed by a single transverse cutting line 152c for determining the width of the deposition region 142 and a deposition region 142 of the PET sheet 140 which are constantly in the deposition region 142 in the PET sheet 140, Is divided through two slitting lines 152a and 152b to determine the gradient effect on the outer surface of the PET sheet 140 as the deposition object and one transverse cutting line 152d to determine the width of the section where the deposition is performed. In other words, the two transverse cutting lines 152c and 152d and the two graduation cutting lines 152a and 152b form a trapezoidal rectangle. A thin film material is deposited in the deposition section 142 of the PET sheet 140 while a region in which the thin film material of the target 160 can not be deposited is made of only the masking area 151 of the mask member 150, 141).

When the vapor deposition region 152 of the mask member 150 has a trapezoidal quadrangular shape, the PET sheet 140 is formed with a thin film of a thin film material as shown in FIG. 4 (b) A gradation effect with a smaller deposition amount will appear. In particular, a PET sheet 140 of this type will allow the PET sheet 140 to be cut along the cutting line C to produce two PET sheets. In this case, the individual sizes of the two PET sheets will be determined according to the position of the deposition region 152 of the mask member 150.

More specifically, the deposition region 142 includes a first transverse cutting line 152c (see FIG. 3B) formed in a direction perpendicular to the moving direction of the PET sheet 140 moving between the rolls ). In particular, the length of the first transverse cutting line 152c in the form of a deposition region having such a trapezoidal rectangular shape will soon determine the width of the deposition region 142 in the PET sheet 140, which is an object to be deposited.

And the second transverse cutting line 152d formed in parallel with the first transverse cutting line 152c will make the most deposition constant in the corresponding section.

The deposition region 142 has a first gradient line 152a and a second gradient line 152b which are formed to have a constant slope with respect to the moving direction of the PET sheet 140 moving between the rolls. The first and second draft cutout lines 152a and 152b may be formed in the shape of a first traverse cutout line 152c and a second traverse cutout line 152d, It will be connected at both ends.

The angle? 3 formed by the first gradient line 152a with the first traverse line 152c and the angle? 4 formed by the second gradient line 152b with the first traverse line 152c, In other words, the slopes of the first gradient cut line 152a and the second gradient cut line 152b will determine the gradation effect of the gradation effect that gradually changes in the deposition interval 142 of the PET sheet 140. [

For example, if the slopes? 3 and? 4 are narrowed, the overall deposition area 152 of the mask member 150 will be reduced, and further, the width of the deposition area 142 in the PET sheet 140 will be reduced, ), A sudden gradation effect (change in jokes) will appear on both sides.

The width of the deposition section 142 in the PET sheet 140 is increased and the width of the extended deposition section 142 is increased as the inclination? 3,? 4 is widened. ) Will have a gentle gradient effect on both sides.

4, the width of the deposition section 142 in the PET sheet 140 is increased by the inclination formed by the first gradient line 152a and the second gradient line 152b in the trapezoidal rectangular deposition area, And the gradation effect (change in the jokes) will be determined.

The slope of the first gradient line 152a and the second gradient line 152b constituting the deposition area 152 of the mask member 150 are different from each other so that the two sides of the trapezoidal square are not the same (Trapezoidal quadrilateral) will be able to produce PET sheets with different gradation effects on both sides. This will enable PET sheet with two different gradation shapes and areas to be produced in a single sputtering process, which will greatly contribute to improving film production efficiency and production diversity.

Although the deposition regions 152 and the deposition regions 142 formed by the rectangular triangular shape, the equilateral triangle shape, the isosceles triangle shape, the regular trapezoidal shape, the trapezoidal trapezoidal shape and the trapezoidal trapezoidal shape are described in detail in the above description and FIGS. 2 to 4, At least one or more gradient incision lines formed in a direction perpendicular to the direction of movement of the PET sheet 140 and at least one or more gradient incision lines formed in a direction parallel or constant with respect to the direction of movement of the PET sheet 140 Any form of deposition region 152 having a cross cut line will be included in the technical scope of the present invention.

5 shows an example of a mask member 150 having a trapezoidal rectangular vapor deposition region 152 of the various types of vapor deposition regions 152 described above as a perspective view.

Here, in the sputtering method in the chamber 100, a plasma is generated to cause a gas (argon) ion existing in the plasma to collide with a target, and a thin film material to be deposited is sputtered. Thus, And the particles that are sputtered also have high energy. Accordingly, the particles having a high energy collide with the masking region 151 of the mask member 150 to transfer energy, thereby raising the temperature of the mask member 150 to several hundred degrees. As a result, There is a problem that damage is caused.

Therefore, in the present invention, the cooling line 153 is installed in the mask member 150, the cooling water is injected through the cooling water injection port 154, passed through the cooling line 153, and the cooling water is exchanged through the cooling water drain port 155 The mask member 150 is cooled in the sputtering process.

Accordingly, it is possible to prevent the mask member 150 from being damaged by preventing the mask member 150 from being overheated, and further to prevent the deposition surface or the deposition error during the sputtering process, which may occur due to the damage of the mask member 150, do.

By using the evaporated PET sheet 240 thus produced, a glass film can be produced which is attached to a window glass of an automobile or a building to prevent exposure to ultraviolet rays and infrared rays.

6 is a cross-sectional view showing a glass film using a film produced by the sputtering apparatus according to the present invention.

The glass film 200 according to the present invention includes a step of coating a heat block adhesive layer 230 capable of blocking infrared rays on the back surface of the first PET sheet 220 corresponding to a base film and drying the heat block adhesive layer 230 And performing a sputtering process on the front surface of the second PET sheet 240 through the above-described sputtering apparatus to form a gradation deposition layer S. The rear surface of the first PET sheet 220 And the second PET sheet 240, and then forming a hard coating layer 210 on the entire surface of the first PET sheet 220.

After the first PET sheet 220 corresponding to the base film is prepared, a thermal barrier adhesive layer 230 for blocking infrared (IR) is formed on the surface of the film. The thermal barrier adhesive layer 230 is formed by a wavelength And it is preferable to dry the heat shielding layer 230 through hot air and ultraviolet rays after coating the heat seal adhesive layer 230. [

The first PET sheet 220 and the second PET sheet 240 may be colored PET.

The adhesive layer may be applied to the rear surface of the second PET sheet 240 to adhere to a product such as glass or a window, and the release film 250 may be attached to the adhesive layer.

The hard coating layer 210 is for enhancing durability. The hard coating layer 210 is a mixture of ceramic nanoparticles dispersed in a surface scratch-preventive coating material to prevent the wavelength of a specific region from being directly introduced into the room.

Therefore, the glass film having the gradation effect as described above can basically prevent the sunlight from directly entering the eyes of the indoor user while having the basic properties of the window glass, namely, transparency and securing the view. In particular, such a glass film has transparency as a whole, and a deposition layer is formed at a part of the upper part to block the sunlight flowing into the room, thereby causing the sunlight to directly enter the field of view of the user when the sun is shining, Thereby preventing the phenomenon. When attached to the windowpane of the vehicle, the driver can ensure the driver's vision through the transparent portion and also has the anti-glare function through the upper translucent portion. Furthermore, since the deposition layer is graded, the appearance of the installed glass is high and the user can extend the viewable range limited by the sunlight according to the attitude change of the user.

FIG. 7 is a process diagram for explaining a method of manufacturing a heat shielding film using a film produced by the sputtering apparatus according to the present invention.

First, in step S10, a take-up roller 120 and a take-up roller 130 are prepared in a roll-to-roll manner in a chamber 100 of a sputtering apparatus, and a gap between the target 160 and the PET sheet 140 The mask member 150 is disposed.

Next, in step S20, the PET sheet 140 is supplied to the winding roller 130 via the unwinding roller 120, and the thin film material discharged from the target 160 is blown onto the PET sheet 140 to be deposited. At this time, depending on the position and shape of the deposition area 152 of the mask member 150, various gradations of the position and the density of the PET sheet 140 (a change in the density) will appear.

Next, in step S30, the PET sheet 140 on which the deposition layer S is formed is cut along the cutting line C to produce two PET sheets. Of course, as shown in FIG. 2, if the deposition region 142 having a right-angled triangle shape is formed on one side of the mask member 150, such a cutting process may be omitted.

In step S40, a glass sheet is produced using the PET sheet 140 on which the vapor-deposited layer S is formed.

This glass film can be manufactured as a short heat film having the structure described with reference to FIG. 6, but the present invention is not limited thereto, and it goes without saying that the present invention can be applied to a heat short film and a glass film of various structures.

As described above, an optimal embodiment has been disclosed in the drawings and specification. Although specific terms have been employed herein, they are used for purposes of illustration only and are not intended to limit the scope of the invention as defined in the claims or the claims. Therefore, those skilled in the art will appreciate that various modifications and equivalent embodiments are possible without departing from the scope of the present invention. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

100: chamber 110: gas supply
120: take-up roller 130: inserting roller
140: PET sheet 141: Non-deposition section
142: deposition section 150: mask member
151: masking region 152: deposition region
152a: first gradient incision line 152b: second gradient incision line
152c: first transverse incision line 152d: second transection line
153: Cooling line 154: Cooling water inlet
155: Cooling water drainage hole 200: Glass film

Claims (10)

A target and a sputter gun provided between the take-up roller and the take-up roller in the chamber to perform sputtering on the PET sheet to be deposited, which goes horizontally; And
A mask member provided between the target PET sheet and the target to adjust a deposition area of the PET sheet to be deposited; / RTI >
The mask member includes a masking region for blocking the movement of the thin film material emitted from the target and a deposition region for allowing movement of the thin film material emitted from the target. The thin film material passes through the deposition region, Is continuously formed along the PET sheet.
The method according to claim 1,
Wherein the deposition region of the mask member includes at least one gradient incision line formed parallel to the PET sheet movement direction or having a predetermined inclination and at least one transverse incision line formed in a direction perpendicular to the movement direction of the PET sheet Is formed.
3. The method of claim 2,
Wherein the mask member has a deposition region of a right-angled triangle shape formed on one side thereof,
The right-angled triangular side of this deposition area,
A first transverse cutting line formed in a direction perpendicular to the moving direction of the PET sheet to determine the width of the deposition section;
A second gradient incision line formed in a direction parallel to the moving direction of the PET sheet; And
A first draft incision line formed to have a predetermined inclination with respect to a moving direction of the PET sheet and to determine a gradation density in the deposition section according to the inclination; Wherein the sputtering apparatus comprises:
3. The method of claim 2,
The mask member is formed with a triangular vapor deposition region,
The triangular sides of the deposition area are,
A first transverse cutting line formed in a direction perpendicular to the moving direction of the PET sheet to determine the width of the deposition section; And
A first gradient incision line and a second gradient incision line respectively formed to have a predetermined inclination with respect to the moving direction of the PET sheet and determining the gradient gradation on both sides in the deposition section according to the inclination; Wherein the sputtering apparatus comprises:
5. The method of claim 4,
Wherein the first gradient incision line and the second gradient incision line have the same inclination, thereby forming an equilateral triangular-shaped vapor deposition region.
5. The method of claim 4,
Wherein a slope of the first gradient incision line and a second gradient incision line are different from each other to constitute a deposition area of a triangular shape of a triangle.
3. The method of claim 2,
Wherein the mask member has a trapezoidal rectangular deposition region,
The rectangular sides of the deposition area are,
A first transverse cutting line formed in a direction perpendicular to the moving direction of the PET sheet to determine the width of the deposition section;
A second transverse incision line formed parallel to the first transverse incision line and determining the width of the high deposition interval in the deposition interval; And
A first gradient incision line and a second gradient incision line respectively formed to have a predetermined inclination with respect to the moving direction of the PET sheet and determining the gradient gradation on both sides in the deposition section according to the inclination; Wherein the sputtering apparatus comprises:
8. The method of claim 7,
Wherein the first gradient incision line and the second gradient incision line have the same slope to form a trapezoidal rectangular vapor deposition area.
8. The method of claim 7,
Wherein a slope of the first gradient incision line and a second gradient incision line are different from each other to form a trapezoidal rectangular deposition region.
A film produced by the sputtering apparatus of any one of claims 1 to 9 and made of a deposited PET sheet in which a deposition section in the form of a gradient is formed.

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