KR20150056148A - Apparatus Having I Improved Efficiency in X-Ray Inspection and Method For the Same - Google Patents

Abstract

The present invention relates to an x-ray inspection device having improved efficiency and an x-ray inspection method, and more specifically, to an x-ray inspection device having improved efficiency and an x-ray inspection method, capable of improving inspection efficiency by relating movement and the inspection of a part with time while many parts can be inspected at the same time. The X-ray inspection method includes a step to determine the location of at least one object to be inspected in the inspection area and accordingly determine the way to display the inspected image; a step to determine the method to handle the inspected X-ray image of the object to be inspected; and a step to determine the relative relation between the inspection time of the inspected image and the movement of the object to be inspected.

Description

FIELD OF THE INVENTION [0001] The present invention relates to an X-ray inspection apparatus and an X-

The present invention relates to an X-ray inspection apparatus with improved inspection efficiency and a method for the same, and more particularly, to an X-ray inspection apparatus and a method therefor, in which a plurality of parts can be inspected at the same time, To an X-ray inspection apparatus and a method therefor.

X-ray inspection, which is one of the nondestructive tests, is applied to defect management or quality control of products in the fields of architecture, civil engineering, automobile parts, electronic parts, agricultural products, electronic or medical. For example, nondestructive testing can be applied to the production line of printed circuit boards during component assembly production and used to check the solder condition of components in real time.

When a plurality of parts are to be inspected, it is advantageous that the inspection should be performed accurately and the inspection proceeding quickly and proceeding automatically. It is also advantageous that images for inspection are processed in various ways as needed.

Prior art related to x-ray inspection is disclosed in Korean Patent Publication No. 2011-0120686 'Internal defect inspection method and reference system using reference information'. The prior art includes a step of photographing a non-defective part from an object to be inspected to obtain a two-dimensional x-ray image or a three-dimensional CT image, setting the image of the non-defective part as a reference image, modeling the part set as the reference image, Forming a jig for mounting the parts to be inspected under the same position and angle condition; Acquiring a two-dimensional x-ray image or a three-dimensional CT image by radiating an X-ray in a state where the same inspection target part is mounted on the jig at the same position and angle as the non-defective part of the reference image and fixed to the mount part; And a step of discriminating a defective part by comparing the two-dimensional x-ray image or the three-dimensional CT image of the inspection target part with the difference between the reference image and the density value or the brightness value in the image determination part .

Another prior art related to x-ray inspection is Patent Publication No. 2011-0128478 entitled " X-ray inspection apparatus capable of continuous processing. &Quot; The prior art comprises a conveyor for conveying an object to be measured from an inlet portion to a discharge portion in a case, an X-ray tube for irradiating an X-ray at a lower portion of the conveyor, and a detector formed on an upper portion of the conveyor, The X-ray tube apparatus according to claim 1 or 2, wherein the X-ray tube is arranged to face the obliquely upward direction at a lower end portion of the X-ray tube, and the detector The first detector and the second detector are continuously formed in the moving direction on the conveyor of the conveyor so that the first detector and the second detector share each other and the inspection can be performed, For possible x-ray inspection devices The deadline.

The prior art does not disclose how a test can proceed rapidly. For example, in the case where a large number of components such as semiconductor devices are required to be input into a production process, the speed of inspection is a major factor in improving the productivity of the entire working process. However, the prior art or publicly known technology does not disclose this.

The present invention has been made to solve the problems of the prior art and has the following purpose.

It is an object of the present invention to provide an x-ray inspection apparatus capable of improving inspection efficiency through improvement of arrangement of parts or detection image processing in an inspection area.

It is another object of the present invention to provide an X-ray inspection method capable of improving the inspection efficiency by a series of steps related to the arrangement of components or the detection image processing in the inspection area.

According to a preferred embodiment of the present invention, an X-ray examination method comprises the steps of: determining a position of at least one subject to be inspected in an examination area and determining a display method of the detection image accordingly; Determining a processing method of an X-ray detection image for the subject to be inspected; And determining a relative relationship between an inspection time of the detection image and a movement time or a stop time of the object to be inspected.

According to another preferred embodiment of the present invention, the positions of the at least one subject to be inspected are arranged such that the inspection points or the inspection regions of the subject to be inspected are shifted from each other in the vertical direction in one detection process.

According to another preferred embodiment of the present invention, the method of processing the detected image includes detecting and displaying or storing the detected image in a memory.

According to another preferred embodiment of the present invention, the relative relationship includes the movement of the subject to be inspected in the image reading process for the subject to be inspected.

According to another preferred embodiment of the present invention, the position of the subject to be inspected is fixed by a predetermined positioning jig in which the position of the at least one subject to be inspected is set.

According to another preferred embodiment of the present invention, the moving time or the stopping time of the inspection object is determined based on the inspection time of the detection image.

According to another preferred embodiment of the present invention, there is provided a storage medium readable by a machine and causing a series of steps to be executed when read by the machine, the series of steps comprising: Determining a relative vertical position of the object, processing the detected image in a predetermined manner, and determining a relative relationship between the inspection of the detected image and the movement or stopping time of the object to be inspected.

According to another preferred embodiment of the present invention, the x-ray examination apparatus includes a setting unit for setting a relative arrangement relationship of at least one predetermined subject to be inspected and setting of a relationship between the processing of the detection image and the subject to be inspected; A control module for controlling movement of the subject to be inspected and processing of the detection image based on conditions of the setting unit; And a memory for storing the detected image according to a predetermined method and transmitting the detected image to an apparatus for inspection according to a control of the control module.

According to another preferred embodiment of the present invention, there is further provided a positioning jig for fixing at least one to-be-inspected object at a predetermined position, the positioning jig including a position fixing unit movable along the XY plane, And a tray adjusting unit for adjusting the position of the inspection object.

The inspection method according to the present invention has an advantage that it is possible to perform rapid inspection of a plurality of parts or parts for a mass production process. For example, the inspection method according to the present invention has an advantage that a full inspection of the soldering condition of the elements of the printed circuit board is enabled. In addition, the inspection method according to the present invention has an advantage that the productivity of the product can be improved by allowing inspection in real time in the production process due to improved inspection efficiency.

1 schematically shows an embodiment of a structure to which an inspection method according to the present invention is applied.
FIGS. 2A to 2D illustrate an embodiment of parts placement in which a plurality of parts are simultaneously inspected in the inspection method according to the present invention.
2E and 2F illustrate an embodiment of a positioning jig applicable to an inspection method or apparatus according to the present invention.
FIG. 3A illustrates an example of a process of detecting a detection image applied to an inspection method according to the present invention.
FIG. 3B shows an embodiment of a method of performing positional correction for an object to be inspected in an inspection method according to the present invention.
FIG. 4 illustrates an example of a process of performing an inspection method according to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the embodiments shown in the accompanying drawings, but the present invention is not limited thereto. In the following description, components having the same reference numerals in different drawings have similar functions, so that they will not be described repeatedly unless necessary for an understanding of the invention, and the known components will be briefly described or omitted. However, It should not be understood as being excluded from the embodiment of Fig.

1 schematically shows an embodiment of a structure to which an inspection method according to the present invention is applied.

Referring to FIG. 1, an X-ray inspection method according to the present invention includes the steps of: determining a position of at least one subject to be inspected in an examination region and determining a display method of the detected image; Determining a processing method of an X-ray detection image for the subject to be inspected; And determining a relative relationship between the inspection time of the detection image and the movement of the object to be inspected.

The X-ray inspection method according to the present invention can be applied to products manufactured or manufactured, or to products manufactured. Further, the X-ray inspection method according to the present invention is not limited by the structure of the apparatus or the structure of the system, and is not limited by the structure of the anode tube, the detection method, or the relative positional relationship therebetween. The inspecting method according to the present invention can be used for inspecting foreign matters of foods, inspection of foreign substances in cans or bottles, inspection of electronic products such as surface mounting elements or LEDs, inspection of automobile or machine precision parts, inspection of batteries, Can be applied to the close inspection of flexible printed circuit boards but is preferably applicable to the inspection of specific parts of each part accommodated in an inspection tray that can be applied to inline inspection of circuit boards and most preferably a plurality of parts can be accommodated .

The method according to the present invention can be executed in any x-ray inspection apparatus. The x-ray inspection apparatus includes a control module 12 for controlling the operation of the entire apparatus, a setting unit 11 for setting inspection conditions, A detection module 14 for inspecting a predetermined region of the subject to be inspected inputted through the input module 13, a memory 151 for storing a detection result transmitted from the detection module 14, And an imaging module 152 for displaying the detection results.

The control module 12 may be, for example, but not limited to, a microprocessor or a central processing unit (CPU). The control module 12 can control the input of the inspection target to be inspected, the inspection of the X-ray to the object to be inspected, the transmission of the image obtained by the detection module 14, or the processing of the image.

The inspection condition can be set by the setting unit 11 and the control module 12 can control the inspection process based on the inspection condition. According to the present invention, the inspection conditions include the number of objects to be inspected included in one inspection process, the position of the object to be inspected at the inspection stage, the processing method or display time of the detection image obtained by the detection unit 14, And the relative movement time of the moving object.

One inspection procedure means that the x-ray is irradiated on the x-ray tube and one image is obtained accordingly. In one inspection process, one detection image can be obtained for a region to be inspected. According to the present invention, the number of objects to be inspected or the number of inspection sites to be inspected that can be included in one inspection process can be at least one, preferably at least two, and most preferably three. And, the inspection sites which can be included in one inspection process can be arranged horizontally to each other, but can be arranged vertically preferably. The horizontal or vertical of the region to be inspected refers to the relative positional relationship between a plurality of inspected components based on the x-ray tube. If the test site is placed vertically, all test sites placed vertically in one test or in a single detection image must be visible in an identifiable or readable state. A plurality of objects to be inspected can be placed in one inspection tray and a plurality of inspection trays can be put into one inspection stage. And a detection image of all the objects to be inspected contained in each inspection tray needs to be obtained. The plurality of inspection trays can be arranged vertically or horizontally. If the inspection trays are arranged vertically, it is necessary to obtain a detection image of a plurality of vertically arranged inspection objects in each inspection process. When the objects to be inspected are vertically arranged as described above, the objects to be inspected arranged vertically can be arranged to be shifted from each other. Then, the detection image obtained for the subject to be inspected can be displayed in the image module 152 by a predetermined method. The relative position of at least one subject to be inspected and the display method of the detected image may be set by the setting unit 11. [

The moving time of the subject to be inspected can also be set by the setting unit 11. [ For example, the moving time of the subject to be inspected or the inspection tray may be set based on the time displayed on the imaging module 152 or the inspection time.

Generally, if a detection image for an object to be inspected is obtained, it is transmitted to the image module 152 and can be inspected by the naked eye, for example. When the inspection is completed, the object to be inspected is again transferred from the inspection stage, and the detection image of the object to be inspected next is obtained and can be inspected again. Such (i) acquisition of the detection image, (ii) inspection and (iii) movement of the subject to be inspected can be performed stepwise with a time interval. And the time required to move to each step may decrease the efficiency of the test while increasing the overall test time

According to the present invention, the movement of the subject to be inspected can be determined relatively based on the time of image transmission or inspection. For example, when a detection image is obtained, the subject to be inspected can move from the moving stage to the next detection position at a constant speed considering the time required for image transmission and inspection. Specifically, the subject to be inspected can be moved to the next detection position at a predetermined speed during the inspection time. A detection image can be obtained regardless of whether the inspection completion signal is detected or the inspection process is performed.

If the time required for the inspection is sufficiently larger than the movement of the inspection tray and the acquisition time of the detection image, the inspection tray is continuously moved as needed and a detection image can be obtained at each movement position. In such a case, there may be a plurality of detection images in a waiting state. According to the present invention, a plurality of detected images in the inspection standby state can be stored in the memory 151. [ The detection image stored in the memory 151 may have a series of identification codes and may be transmitted to the image module 152 under the control of the control module 12.

Whether the detected image is transmitted to the image module 152 or to the memory 151 can be predetermined or can be controlled by the control module 12 according to the detection of the inspection signal. Specifically, if a detection image of an object to be inspected is obtained, the image can be transmitted to the image module 152. If a transmission completion signal is detected, the inspection tray accommodating the object to be inspected can be moved to the next inspection position. Whether the detection image for the next inspection part is obtained irrespective of whether or not the detection image of the transmitted detection image is completed or whether or not the detection image to be obtained after the detection completion signal is detected can be predetermined. If the next detection image is obtained regardless of the completion of the inspection, the detection image can be transmitted to the image module 152 or to the memory 151. [ On the other hand, if a detection image is obtained after the inspection completion signal is detected, the detection image is transmitted to the image module 152 and the inspection tray can be moved to the next detection position again. If the test takes a long time, the obtained detection image can be transferred to the memory regardless of the completion signal. When it is confirmed that the image is stored in the memory 152, the inspection tray is moved, and the next detection image can be obtained and stored in the memory 152. This process can be preset.

The plurality of detected images stored in the memory 151 may be transferred to the image module 152 by the control module 12. [ Alternatively, the video module 152 can sequentially invoke the detected images stored in the memory 152 according to the unique identification codes of the detected images. It is possible to set all detection images to be transmitted to the memory 151 according to the structure of the inspection apparatus. The detected images stored in the memory 151 may be transmitted to the video module 152 under control of the control module 12 or transmitted to the video module 152 in turn by the calling of the video module 152 have.

The setting unit 11 can set the method of moving the inspection tray, the inspection time, the transmission to the memory 151 or the transmission method from the memory 151 to the imaging module 152 in various ways, It does not. The setting unit 11 can also set various inspection conditions related to the movement of the inspection tray, the inspection time, the operation of the detection unit 14, and the storage or retrieval of the detection image stored in the memory 151, It is not limited to the embodiment shown.

The input module 13 may have any structure known in the art and may have a suitable structure according to the subject to be inspected and the present invention is not limited by the structure of the input module 13. The detection module 14 may comprise, for example, an x-ray tube, a test stage or a detector. The inspection stage may have a structure movable or rotatable along the X-Y axis and may have a structure suitable for receiving the inspection tray. The detection module 14 having various structures can be applied to the inspection apparatus according to the present invention and the present invention is not limited to the embodiments shown.

The memory 151 may be any memory known in the art including flash memory and the imaging module 152 may include any display capable of displaying a detected image in an inspectable state. In addition, the video module 152 may include a calling unit that can call the detected video stored in the memory 151 as needed, and may have a function of transmitting a signal according to the completion of the inspection to the control module 12 .

Various additional devices for inspection can be added to the inspection apparatus according to the present invention, and the present invention is not limited thereto.

An embodiment of the inspection condition set by the setting unit 11 will be described below.

FIGS. 2A to 2D illustrate an embodiment of parts placement in which a plurality of parts are simultaneously inspected in the inspection method according to the present invention.

2A shows an embodiment of an inspection tray 21 in which a plurality of parts E arranged in an inspection stage are accommodated and the inspection tray 21 is arranged in a matrix structure on a base plate 211 and a base plate 211 The receiving groove 212 may be formed of a metal. And the component E in which the X-ray inspection is required can be placed in each receiving groove 212 and a specific part of the component E can be inspected by irradiation of the X-ray in the X-ray tube. The inspection tray 21 may have various shapes and the present invention is not limited to the embodiments shown.

FIG. 2B shows an example of a detection image ED of a test site for one part E accommodated in the inspection tray 21 of FIG. 2A. The detection image can be detected by the detection module and displayed on the display unit 22 of the image module. The detection image ED displayed on the display unit 22 corresponds to the inspection region of the component E and can be determined in advance. Thereafter, the inspection stage can be moved for inspection of other parts, and the inspection part of the other parts can be displayed on the display unit 22 as the detection image ED.

FIG. 2C shows an embodiment in which three inspection trays 21a, 21b and 21c are vertically arranged in the inspection stage S. FIG. The X-rays can be irradiated in the direction perpendicular to the inspection stage S from below or above the inspection trays 21a, 21b, and 21c. And the detection module can be disposed on the upper or lower side and the detection image for the three parts E disposed in the receiving grooves 212 of each of the vertically disposed three trays 21a, 21b, Lt; / RTI >

The arrangement faces C1, C2 and C3 of the inspection trays 21a, 21b and 21c can be arranged to be offset from each other, for example the second arrangement face C2 is arranged with respect to the first arrangement face C1, The arrangement plane C3 can be moved in a predetermined direction by a certain distance with respect to the second arrangement plane C2. The degree of movement is such that the receiving groove 212 of the inspection tray 21c located at the uppermost position does not overlap with the next receiving groove 212 to be inspected of the inspection tray 21a located at the lowest position.

When the inspection trays 21a, 21b, and 21b are stacked in the vertical direction, the inspection trays 21a, 21b, and 21c may be arranged to be offset from each other. The degree of deviation is such that one of the inspection trays 21a, 21b, and 21c disposed vertically does not interfere with the receiving recess 212 of the other inspection trays 21a, 21b, and 21c.

The setting unit described above can determine the relative placement of at least one or more inspection trays 21a, 21b and 21c based on the structure of the inspection trays 21a, 21b and 21c, 21b, 21c can be determined.

The plurality of inspection trays 21a, 21b and 21c can be arranged in various ways and the direction or level can be appropriately deviated according to the structure of the inspection trays 21a, 21b and 21c.

On the other hand, a positioning jig for fixing the inspection trays 21a, 21b, 21c to predetermined positions is provided on the inspection stage S, the inspection trays 21a, 21b, 21c, As shown in FIG. The positioning jig can be appropriately made according to the arrangement structure of the inspection trays 21a, 21b, and 21c. For example, if the inspection trays 21a, 21b, and 21c are vertically arranged so that the arrangement surfaces C1, C2, and C2 are shifted as in the embodiment shown in FIG. 2C, And 21c, respectively, as shown in Fig. The positioning jig thus formed is coupled to the inspection stage S in a detachable manner so that the inspection trays 21a, 21b, and 21c can be fixed at predetermined positions of the inspection stage S.

As described above, the inspection trays 21a, 21b, and 21c can be arranged to be offset from each other in various ways. Accordingly, each specific component E disposed in each of the inspection trays 21a, 21b, and 21c in the image module should be appropriately displayed in the image module accordingly. The display method of the image module according to the arrangement position of the inspection trays 21a, 21b, and 21c by the setting unit can be set in advance.

For example, if the inspection trays 21a, 21b and 21c are arranged as shown in FIG. 2C, the detection images ED1, ED2 and ED3 of the inspection parts of the respective parts E are displayed on the display unit 22 of the image module Can be displayed as shown in FIG. 2D. The detected images ED1, ED2, and ED3 can be arranged at appropriate intervals by the display unit 22. [ The arrangement structure of the detection images ED1, ED2, ED3 can be predetermined and can be arranged, for example, horizontally or vertically. In addition, the number of the detection images (ED1, ED2, ED3) and the number of the inspection trays (21a, 21b, 21c) displayed on the display unit (22) For example, if the detected images ED1, ED2, and ED3 are stored in advance in the memory, the detected images ED1, ED2, and ED3 can be displayed on the display unit 22 in an appropriate number for efficient inspection.

The inspection trays 21a, 21b and 21c can be arranged in the inspection stage S in various forms and the detection images ED1, ED2 and ED3 are placed in the display unit 22 in an appropriate way for increasing the efficiency of the inspection .

2E and 2F illustrate an embodiment of a positioning jig 25 that can be applied to an inspection method or apparatus according to the present invention.

2E, the positioning jig 25 includes a fixing member FE fixed to an inspection stage or inspection apparatus extending in the longitudinal direction, a guide member (not shown) coupled to the fixing member FE and having a moving groove GR 252b, 252c, 252d, which are movably coupled to the guide members 251a, 251b and the guide members 251a, 251b by means of the adjustment means 255. In addition,

The fixing members FE may be a pair extending parallel to each other and fixed to the inspection stage or inspection apparatus by appropriate fixing means. The guide members 251a and 251b are coupled by a fixing member FE to move the position fixing units 252a, 252b, 252c and 252d. Specifically, the guide members 251a and 252b include a first guide member 251a and a pair of fixing members FE, which are fixed to the fixing member FE while extending in the same or similar direction as one fixing member FE, And a pair of second guide members 251b fixed to the opposite end portions. A moving groove GR for moving the adjusting means 255 may be formed on the first guide member 251a and the second guide member 251b along the extension direction.

The position fixing units 252a 252a 252c and 252d may have a structure for fixing the corner portions of the inspection trays 21a 21b and 21c and may be coupled to the guide members 251a and 251b by the adjusting means 255 . The position fixing means 252a, 252b, 252c and 252d can be bent at right angles to correspond to the corners of the inspection trays 21a, 21b and 21c and can be in contact with the side surfaces of the inspection trays 21a, 21b and 21c And may have a reference wall RW. Each of the position fixing means 252a, 252b, 252c and 252d can be moved in the X-axis direction or the Y-axis direction by the adjusting means 255. [ On the other hand, the pair of second guide members 251b can be moved in the Y-axis or X-axis direction along the fixing member FE by the adjusting means 255 and the bracket. Each of the second guide members 251b may be movable independently or only one of them may be movable. The movement (MD direction) of the second guide member 251b along the fixing member FE or the movement (MD direction) of the position fixing means 252a, 252b, 252c, and 252d along the second guide member 251b, The position fixing means 252a, 252b, 252c and 252d can be precisely positioned at the four corners of the inspection trays 21a, 21b and 21c.

Further, a tray adjusting unit 254 may be disposed on the inner surface of the position fixing means 252a, 252a, 252c, and 252d. The level of deviation of each inspection tray 21a, 21b, 21c can be precisely adjusted by the tray adjusting unit 254 and simultaneously the inspection trays 21a, 21b, 21c can be fixed at the adjusted positions .

FIG. 2F shows the portion labeled LA in FIG. 2E.

Referring to FIG. 2F, the position fixing means 252a is bent toward the edges of the body BD, the inspection trays 21a, 21b and 21c, and faces the front surfaces of the inspection trays 21a, 21b and 21c And an alignment wall RW contacting the side of the reference surface RS and the inspection trays 21a, 21b, and 21c. The adjustment means 255 may be coupled to the body BD in a threaded manner and a step block AS may be formed in front of the reference surface RS. The step block AS may be formed to correspond to the degree of deviation of the inspection trays 21a, 21b, and 21c stacked vertically, and may have a plurality of steps. Trace adjustment units 254b and 254c for adjusting the positions of the inspection trays 21b and 21c may be installed in the step block AS. The tray adjusting units 254b and 254c may be arranged to be movable in the horizontal direction by appropriate adjusting means and may have a contact surface that is in contact with the front surface of each of the trays 21b and 21b. Specifically, the tray adjusting units 254b and 254c can be moved in the horizontal direction MD1 by the adjusting screws movable along the moving grooves, and can be fixed by adjusting screws at predetermined positions.

The positioning jig 25 shown in Figs. 2E and 2F is merely an example, and the positioning jig 25 is not limited to the structure of the inspection trays 21a, 21b, and 21b, the number of layers stacked, And thus can be made into various structures. For example, the positioning jig 25 may have a structure for fixing two to five inspection trays. On the other hand, the position fixing means 252a, 252b, 252c, and 252d can fix the inspection trays 21a, 21b, and 21c in the predetermined positions in various structures, and the position or the number of the inspection trays is not limited. Similarly, the tray adjusting units 254b and 254c for fixing the respective inspection trays 21a, 21b, and 21c at predetermined positions may have various structures. Therefore, the present invention is not limited to the embodiment shown in FIG. 2E or FIG. 2F.

The process of moving the inspection stage will be described below.

FIG. 3A illustrates an example of a process of detecting a detection image applied to an inspection method according to the present invention.

The inspection tray 21 can be disposed in the inspection stage S and the x-ray tube 32 can be disposed under the inspection stage S. The X-ray X irradiated from the X-ray tube 32 is transmitted through the object or part to be inspected disposed on the inspection tray 21 and is detected by the detector 34 to produce a detection image.

The position of the x-ray tube 32 or detector 34 is exemplary and the invention is not limited to the embodiments shown.

The detection image formed by the detector 34 can be transmitted to the display unit 22 and the control module 31 can detect it. As described above, the detected image can be transferred to memory and stored in a certain way. The object to be inspected or the part can be inspected in the display unit 22. [ When the control module 31 confirms that the detection image is transmitted to the display unit 22, the control module 31 controls the driving module 37 to move the inspection stage S to move the next part to the inspection position. The movement of the inspection stage S is progressed in the process of inspection and when the inspection is completed, the detection image can be transmitted to the display unit 22 again. Then, the control module 31 activates the driving device 37 to move the inspection stage S to the next detection position.

On the other hand, the next detection image may be obtained during the completion of the inspection. Specifically, in the course of the inspection, movement of the inspection stage S and acquisition of the detection image can be performed. The control module 31 can control the progress of each process based on the time required for the inspection, the movement time of the inspection stage S, and the detection time. Also, the moving speed of the inspection stage S can be controlled based on the time required for the inspection.

As described above, the number of the inspection trays 21 can be plural, and the detection image can be transferred to the memory. And the operation control for each inspection condition can be set by the setting unit and the control module 31 can control each process based on it.

The embodiment shown in FIG. 3A is illustrative and the present invention is not limited to the embodiments shown.

In a continuous inspection process for a plurality of objects to be inspected, the objects to be inspected are changed by the movement of the inspection stage. In this process, the position correction can be performed.

FIG. 3B shows an embodiment of a method of performing positional correction for an object to be inspected in an inspection method according to the present invention.

Referring to (A) of FIG. 3B, the moving distance D1 set in comparison with the distance D0 between the actually inspected objects E1 and E2 may be large. In such a case, the moving distance must be set again and the distance D0 must be set again for the distance between the next inspected objects E2 and E3. Since the receiving grooves 212 are arranged at regular intervals in the inspection tray 21, it can be assumed that the moving distances to the next inspected objects E2 and E3 are the same. When one inspection is performed on the plurality of inspection trays 21, such resetting is performed on each of the inspection trays 21.

According to the present invention, in such a case, it can be set in a software form so that re-setting of the remaining travel distance is automatically performed by re-setting of one travel distance D1. Although the X-axis direction is shown in the illustrated embodiment, the correction for the Y-axis direction can be similarly applied.

The positional correction can be made with respect to the object E to be inspected in the receiving groove 222. [ The object to be inspected E may be smaller than the size of the receiving groove 212 and the object to be inspected E may be positioned away from the center. In this case, the position correction can be performed in two ways. The position can be corrected by the movement of the inspection stage first. The method of moving the inspection stage can be based on the position at which the display is made. Alternatively, the position displayed on the display unit 22 can be corrected. For example, at the first position ED1 in the display unit 22, but may again be corrected to be displayed at the predetermined position ED2 of the display unit 22. [ When a plurality of detected images are displayed on the display unit 22, each of them can be corrected to be displayed at a predetermined position, and such setting can be made in a software form.

In the inspection process, by correcting one moving distance, it is possible to improve the efficiency of inspection by automatically correcting the moving distance to the next moving distance or the moving distance to the inspection site from one inspection target (E). On the other hand, the positional correction to the subject E to be inspected based on the position displayed on the display unit 22 can improve the precision of the inspection.

The position correction can be automatically set to various automatically in software form, and the present invention is not limited to the embodiments shown.

FIG. 4 illustrates an example of a process of performing an inspection method according to the present invention.

Referring to FIG. 4, a parameter may be determined first for inspection (S41). The parameters may be such as the number of parts to be detected in a single inspection, the relative position between the inspection trays between a plurality of inspection trays, the time required for the inspection, or the movement speed of the inspection stage. When the parameter is determined (S41), the inspection condition can be set by the setting unit (S42). The setting of the inspection condition means to determine the value of the determined parameter and may be set by appropriate input means such as, for example, a keypad or a mouse.

When the control is set (S42), the inspected object to be inspected or a predetermined inspection site of the part can be detected by the X-ray (S43). Then, it is judged whether or not the set condition and the detection result coincide (S44). If they do not match (NO), the control setting can be resumed (S42). On the other hand, if the set condition matches the detection result (YES), it is determined whether the detection image should be transmitted to the memory according to the setting condition (S45).

If it is not transferred to the memory (NO), it is transmitted to the display unit so that the inspection can proceed (S48). If YES, the unique number of each image can be assigned (S46), and stored in the memory according to a predetermined method (S47). Then, the detection image stored in the memory can be displayed on the display unit according to the control of the control module or the call of the display unit (S48). On the other hand, the inspection stage may be moved during the inspection (S49). A detection image may be created in advance based on the time required for the inspection at the moved position, or a detection image may be generated together with the reception of the inspection completion signal.

Further, according to the present invention, whether or not the image read in the inspection process (S19) is OK (OK / NG) can be displayed. An indication of whether or not the image is bad (OK / NG) can be input by an input device provided in the display unit and displayed in a suitable manner at a predetermined position of the image to be inspected. The image with bad (OK / NG) can be output to the screen and stored as needed. Storage can be by the displayed image itself or in any other suitable manner. Since the inspection results for each part are stored in data form together with the number assigned to the part, this indication corresponds to an additional indication method for improving the reliability of the inspection.

The inspection can be performed by the method according to the present invention in various ways and the present invention is not limited to the embodiments shown.

The method according to the invention can be made in the form of a program and the program can be embedded in the device or stored in the medium. Or may be installed in the device after it has been stored on the media. And the method according to the present invention can be implemented when the medium is read by the machine. The present invention can be embodied in the form of a program in the form of a program embodied in the apparatus or stored by the medium and read by the machine. And the like.

For example, the program or storage medium may include at least one of determining a relative vertical position of at least one subject to be inspected, processing the detected image in a predetermined manner, and determining a relative relationship between the detected image and the movement of the subject Step < / RTI > And a step of performing a similar function. Each step may be stored separately on a device or medium, or the entire process may be embedded or stored in the device or media.

The method according to the present invention may be stored or embodied in various forms and may be executed by an inspection apparatus and is not limited by the type of apparatus, the type of storage medium or the storage form of the present invention.

The inspection method according to the present invention has an advantage that it is possible to perform rapid inspection of a plurality of parts or parts for a mass production process. For example, the inspection method according to the present invention has an advantage that a full inspection of the soldering condition of the elements of the printed circuit board is enabled. In addition, the inspection method according to the present invention has an advantage that the productivity of the product can be improved by allowing inspection in real time in the production process due to improved inspection efficiency.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention . The invention is not limited by these variations and modifications, but is limited only by the claims appended hereto.

11: Setting unit 12: Control module
13: input module 14: detection module
21: inspection trays 21a, 21b, 21c: inspection trays
22: display unit 25: positioning jig
31: control module 32: x-ray tube
34: Detector 37: Drive module
151: memory 152: image module
211: base plate 212: receiving groove
251a, 251b: guide members 252a, 252b, 252c, 252d:
254: tray adjusting unit 254b, 254c: tray adjusting unit
255: adjusting means

Claims (10)

In the X-ray examination method,
Determining a position of at least one subject to be inspected in the examination area and determining a display method of the detection image according to the position;
Determining a processing method of an X-ray detection image for the subject to be inspected; And
And determining a relative relationship between the inspection time of the detection image and the movement or stop time of the object to be inspected. The inspection method according to claim 1, wherein the at least one subject to be inspected is arranged such that the inspection points or inspection areas of the subject to be inspected are shifted from each other in the vertical direction in one detection process. The method of claim 1, wherein the method of processing the detected image comprises detecting and transmitting to a display unit or storing a detected image in a memory. The method according to claim 1, wherein the relative relationship includes that an object to be inspected is moved in an image reading process of the object to be inspected. The inspection method according to claim 1, wherein the position of the subject to be inspected is fixed by a predetermined positioning jig having a predetermined position of the at least one subject to be inspected. The method according to claim 1, further comprising the step of confirming a position with respect to the object to be inspected, wherein the correction according to the positional confirmation is set so that correction for one object is performed for the entire inspection- method of inspection. The S-ray inspection method according to claim 1, wherein the moving speed or the stopping time of the inspection object is determined based on inspection time of the detection image. 1. A storage medium readable by a machine and causing a series of steps to be performed when read by the machine,
Wherein the series of steps comprises the steps of: determining a relative numerical position of at least one subject to be inspected; processing the detected image in a predetermined manner; and determining a relative relationship between the examination of the detected image and the moving or stopping time of the subject And determining whether the storage medium is a storage medium. In the x-ray inspection apparatus,
A setting unit (11) for setting a relative arrangement relationship of at least one subject to be inspected predetermined and a relationship between a process of the detection image and a moving or stopping time of the subject to be inspected;
A control module (12) for controlling the movement or stop of the subject to be inspected and the processing of the detection image based on the condition of the setting unit (11); And
And a memory for storing the detected image according to a predetermined method and transmitting the detected image to an apparatus for inspection by the control of the control module (12). The positioning jig (25) according to claim 9, further comprising a positioning jig (25) for fixing at least one subject to be inspected at a predetermined position, wherein the positioning jig (25) comprises a position fixing unit (252a, 252b , 252c, and 252d, and a tray adjustment unit 254 for adjusting the position of each subject to be inspected.

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