KR20150049791A - Modular optical apparatus - Google Patents

Abstract

The present invention relates to a module type optical apparatus and, more specifically, to a module type optical apparatus which is optimized to transfer some of high-performance devices on a substrate to a flexible substrate by using a selective transfer process. Each composition is formed into a shape of a module so the optical apparatus can be constructed in a variety of shapes.

Description

[0001] MODULAR OPTICAL APPARATUS [0002]

The present invention relates to a modular optical apparatus, and more particularly, to a modular optical apparatus which is optimized for transferring a part of a high-performance device existing on a substrate to a flexible substrate using a selective transfer process, To a modular optical device whose configuration is formed in a modular form.

In general, high-performance devices using a semiconductor process are implemented on a wafer by various methods such as a wafer-based coating process, an exposure process, a development process, an etching process, a thin film process, an ion implantation process, an oxidation process and a diffusion process.

It has the form of parts through the packaging process such as dicing, die bonding, wire bonding, molding and so on. Semiconductor, memory chip (Chip) that we commonly see is produced through this process.

Most of the semiconductor processes are processed under harsh conditions such as high temperature, high pressure and various chemical environments. Therefore, all the materials used in the process including the substrate should be suitable for the process.

On the other hand, attempts have been made to fabricate flexible device parts based on printing electronic technology, and examples are being applied mainly to some product groups such as display, RFID, and solar power generation.

Printing electronic technology is generally performed at a relatively low temperature or at room temperature as compared with a semiconductor process. The device is manufactured by a coating process, a printing process, a patterning process, etc., and is subjected to a post-process for bonding and cutting Flexible parts can be obtained.

Conventional processes for manufacturing a device are characterized by respective methods.

The wafer-based semiconductor process can produce a high-performance device based on a high density because the minimum pattern size that can be fabricated is several nanometers. However, since the wafer is a hard wafer, the device has a hard form.

On the other hand, printing electronic technology based on a flexible substrate has a minimum pattern size of several um, which is difficult to implement in high performance such as a semiconductor process, but has a form that can be folded or bent because it is based on a flexible film.

In this environment, in order to produce high-performance flexible devices, the best use of these advantages is the separation and transfer of high-performance devices.

As shown in FIG. 1, in the peeling and transferring process of a high-performance device, a high-performance device obtained through a wafer-based semiconductor process is peeled from a wafer and transferred to a flexible substrate, and then a flexible high- .

That is, the high performance device 40 attached to the wafer 10 is peeled off using a stamp 20, and then transferred to the flexible substrate 30.

With the related art, a method of forming an integrated circuit pattern on a dummy substrate is disclosed in Korean Patent Laid-Open Publication No. 2012-0053294 (published May 25, 2012, titled: a method of forming a graphene pattern and a method of manufacturing an electronic element having a graphene pattern) And peeling it off and transferring it to a target substrate has been disclosed.

On the other hand, wafers manufactured using a semiconductor process generally require high efficiency, such as process cost, so that the density of devices is very high.

However, when the pattern is transferred to the flexible substrate by using the above-described separation and transfer process of a high-performance device, since the distance between the devices is too narrow when the pattern is directly transferred, the spacing between the devices must be adjusted by rearrangement. A selective transfer process is required.

Optical adhesive control is one of the means for the selective transfer process and is performed using the adhesion difference between the stamp 20 and the flexible substrate 30 for the high performance device 40 as shown in FIG. The ultraviolet rays are selectively irradiated in a state in which the ultraviolet ray-curable material is applied.

At this time, an optical beam for selective curing is required. The optical beam must be smaller than the minimum size of the high-performance device, and a direction parallel to the high-performance device (X, y-axis direction of the scanning direction) (local scanning).

Therefore, assuming that the range of the size of the high-performance device is several tens of μm to several millimeters, the size of the optical beam should be several um to several hundreds of um, and the convergence by the objective lens is generally advantageous.

In addition to the above-mentioned functions, selective optical beam irradiation also requires a focusing position management or control function to maintain focusing along the surface of the stamp or flexible substrate.

Since it is important to select the initial position of the optical device (or optical beam) for the stamp and the flexible substrate, a means for measuring the positional relationship between the high-performance device and the optical beam is needed.

However, at present, there is no optical means capable of satisfying the above-mentioned functions, and development thereof is necessary.

Japanese Laid-Open Patent Application No. 2012-0053294 (published May 25, 2012, titled: Method of forming graphene pattern and method of manufacturing electronic device having graphene pattern)

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems, and it is an object of the present invention to provide an optical device having a high performance It is an object of the present invention to provide a modular optical apparatus optimized for reflecting a variety of conditions such as a material of a flexible substrate, a thickness, and a reflectance, as well as a form of a high performance device when a part of the device is to be transferred to a flexible substrate.

A modular optical apparatus according to an embodiment of the present invention includes a first light source and a first beam splitter disposed at a predetermined distance in the horizontal direction from the first light source and dividing light irradiated from the first light source A light source module in which a first upper assembling surface and a first lower assembling surface are formed on an upper side and a lower side of a first accommodating portion in which the first beam splitter is housed; An objective lens disposed on the lower side of the first lower assembling surface and adapted to focus a parallel beam incident on the specimen, the parallel beam being split by the first beam splitter of the light source module and focused on the specimen; An objective lens module including a focus driving stage moved in a vertical direction so as to converge; A sensor module for detecting an error signal with respect to a degree of focus deviation on the specimen through the light reflected from the specimen; An image module for acquiring image information of the specimen through the light reflected from the specimen; Wherein at least one of the image module and the sensor module is assembled on the base assembly including the light source module and the objective lens module.

In addition, the sensor module is housed in the second accommodating portion having the second upper assembling surface and the second lower assembling surface formed on the upper and lower sides, and the light incident in the vertical direction in the specimen is reflected again in the horizontal direction A second beam splitter for providing a second beam splitter; At least one sensor lens through which light reflected by the second beam splitter passes; A sensor element for detecting a degree of deviation of a focus of light passing through the sensor lens from a reference point on which the specimen is formed; May be formed.

The image module is accommodated in a third accommodating portion formed with a third upper assembling surface and a third lower assembling surface on the upper and lower sides, and the light incident in the vertical direction in the specimen is again reflected horizontally A third beam splitter for providing a second beam splitter; At least one imaging lens through which light reflected from the third beam splitter passes; And an image element in which a shape of light passing through the imaging lens is imaged; As shown in FIG.

The modular optical device may further include an illumination light source and a fourth beam splitter disposed at a distance from the illumination light source in a horizontal direction and dividing the light emitted from the illumination light source, A fourth upper assembling surface and a fourth lower assembling surface are formed on the upper and lower sides of the fourth accommodating portion accommodated in the first accommodating portion; As shown in FIG.

In the modular optical device, at least one of the sensor module, the illumination module, and the image module is stacked and assembled on the upper side of the base assembly, and the first to fourth upper assembling surfaces, The lower assembling surfaces are all parallel and a parallel beam can be emitted or incident in a direction perpendicular to the first to fourth lower assembling surfaces.

In the modular optical device, at least one of the sensor module, the illumination module, and the image module is stacked on the upper side of the base assembly, and the offset type connection block is mounted in the space between the stacked modules, have.

The light source module may further include a first collimation lens for generating a parallel beam between the first light source and the first beam splitter when the first light source is a laser diode.

The light source module may further include: a wavelength-type beam splitter provided between the first light source and the first beam splitter; A second light source disposed at a predetermined distance from the first light source in a direction perpendicular to the first light source, the second light source having a wavelength different from that of the first light source; A reflective mirror disposed at a predetermined distance in the horizontal direction from the second light source and reflecting the light emitted from the second light source to transmit the reflected light to the wavelength type beam splitter; And a second parallel beam formed by the first light source that has transmitted the wavelength beam splitter and a second parallel beam that is reflected by the wavelength beam splitter and is reflected by the first beam splitter, As shown in Fig.

When the first light source and the second light source are laser diodes, the light source module includes a first collimation lens between the first light source and the wavelength-type beam splitter, and a second collimation lens between the second light source and the reflection mirror. A collimation lens may be provided.

The modular optical apparatus according to the present invention is formed in a modular form so that the optical apparatus can be configured in various forms, so that when a part of the high performance devices existing in the substrate is transferred to the flexible substrate by the selective transfer process, It is possible to reflect not only the shape of the device but also various conditions such as the material, thickness and reflectivity of the flexible substrate.

That is, the modular optical apparatus of the present invention includes a light source module for generating a light source, an objective lens module for collecting a parallel beam on a specimen, a sensor module for detecting an error signal with respect to a degree of deviation of focus on the specimen, It is possible to provide an optical device optimized for reflecting various conditions of the process by selectively and easily stacking the image module and the illumination module to obtain the optical module and the illumination module.

Accordingly, the modular optical device of the present invention can improve the yield of the flexible device by the selective transfer process, and can make the process proceed more easily.

1 is a conceptual view illustrating a manufacturing process of a high-performance flexible device component using a conventional device separation and transfer process.
2 is a conceptual view of an optical selective transfer process;
3 is an optical module of a modular optical device according to the present invention.
4 shows an offset connecting block and a coaxial connecting block used in a modular optical device according to the invention.
Figures 5-11 illustrate various embodiments of a modular optical device according to the present invention.
Fig. 12 is a view showing a calculated amount of light in the modular optical device of Fig. 9; Fig.
13 is a view showing a light amount calculation value in the modular optical device of Fig. 10; Fig.

Hereinafter, the modular optical apparatus of the present invention as described above will be described in detail with reference to the accompanying drawings.

Example 1

In the first embodiment, the respective optical modules constituting the modular optical device 1 will be described.

3, the modular optical apparatus 1 of the present invention includes a light source module 100, an objective lens module 200, a sensor module 300, an image module 400, and a lighting module 500 As shown in FIG.

First, the light source module 100 includes a first light source 110, which is a light source used in a transfer process, and a first beam splitter 120, which is spaced apart from the first light source 110 by a predetermined distance in the horizontal direction .

The first beam splitter 120 divides the light emitted from the first light source 110 and is accommodated in the first receiving part 130 in a state of being inclined horizontally or vertically by 45 degrees.

The first receiving part 130 has a first upper assembling surface 131 on an upper side and a first lower assembling surface 132 on a lower side.

The light source module 100 generates a parallel beam between the first light source 110 and the first beam splitter 120 when the first light source 110 is a point light source such as a laser diode The first collimation lens 140 is not necessary when the first light source 110 is a laser light source capable of directly generating a parallel beam.

At this time, since the polarization of the laser beam is determined, the first beam splitter 120 reflects the polarized beam (p-polarized light or s-polarized light), and transmits the polarized beam A polarized beam splitter (PBS) is used.

The light source module 100 may include a first beam splitter 120 and a second beam splitter 120 such that a chief ray is perpendicular to the first upper assembling surface 131 and the first lower assembling surface 132 of the light source module 100, It is preferable that the angle of the light source is adjusted and fixed.

When the first collimation lens 140 is provided, the light source module 100 may adjust the size of a parallel beam between the first collimation lens 140 and the first beam splitter 120, A diaphragm 190 may be further provided and a diaphragm 190 may be provided between the first light source 110 and the first beam splitter 120 when the first collimation lens 140 is not provided .

The objective lens module 200 is disposed on the lower side of the first lower mounting surface 132. The parallel beam incident on the objective lens module 200 is split by the first beam splitter 120 of the light source module 100, And an objective lens 210 for converging the light beam.

The objective lens module 200 includes a focus driving stage 220 connected to the objective lens 210 to vertically adjust the position of the objective lens 210 so as to focus on the specimen .

The specimen referred to herein may refer to a high performance device formed on a stamp in a selective transfer process.

That is, the objective lens module 200 allows a beam incident on the parallel beam to be condensed between the stamp and the flexible substrate through which the high-performance element is patterned through the objective lens 210, and the stamp And driving in a direction perpendicular to the flexible substrate (z-axis direction) so that the focus is formed between the high-performance device and the flexible substrate.

The objective lens module 200 includes a correction lens 240 for minimizing an error of a parallel beam generated due to a change in optical characteristics (material, bending, curvature of a surface, etc.) of the flexible substrate, May be further mounted on the objective lens 210.

The objective lens module 200 is mounted on the correction lens 240 with a quarter-wave plate 250, irradiated through the objective lens 210, The beam reflected from the surface of the stamp may be incident on the image module 400 and the sensor module 300 to be described later through the first beam splitter 120 without returning to the first light source 110 have.

The objective lens module 200 and the light source module 100 are indispensable for the optical device 1. The objective lens module 200 and the light source module 100 are referred to as a base assembly .

The sensor module 300 detects an error signal with respect to the degree of focus deviation on the specimen through the light reflected from the specimen and includes a second beam splitter 310, a sensor lens 320, a focus position sensor 340, .

The second beam splitter 310 is accommodated in a second receiving portion 330 having a first upper assembling surface 331 and a second lower assembling surface 332 formed on the upper and lower sides thereof, A part of the reflected light is reflected in the horizontal direction, and the rest is transmitted in the vertical direction. At this time, it is preferable that the transmission and reflection ratios of the second beam splitter 310 are respectively 50%.

The sensor lens 320 includes at least one or more of the light reflected by the second beam splitter 310. The focus position sensor 340 focuses the light passing through the sensor lens 320 The degree of deviation from the reference point formed on the specimen is detected.

Here, the reference point refers to a position where contact is made between the flexible substrate and the stamp in the selective transfer process.

The image module 400 acquires image information of the specimen through the light reflected from the specimen. The image module 400 includes a third beam splitter 410, an image-forming lens 420, and an image device 440.

The third beam splitter 410 is accommodated in the third receiving part 430 where the third upper assembling surface 431 and the third lower assembling surface 432 are formed on the upper and lower sides, So that the light incident in the vertical direction is again reflected in the horizontal direction.

The imaging device 440 includes at least one or more of the light passing through the image forming lens 420 and the light passing through the image forming lens 420, .

The image module 400 and the sensor module 300 are arranged such that a beam incident perpendicularly to the second lower assembling surface 332 and the third lower assembling surface 432 is incident on the second beam splitter 310 Through the third beam splitter 410 and then through the combination of one or more imaging lenses 420 and the sensor lens 320 to reach the imaging device 440 and the sensor device 340 do.

At this time, the image module 400 is required to image the surface of the high-performance device and the shape of the optical beam existing at the contact position between the stamp and the flexible substrate, that is, the reference point, on the image sensor 440.

When the focus is shifted in the vertical direction (z-axis direction), the sensor module 300 detects the position of the focus of the beam at the reference point, which is a position where the contact between the stamp and the flexible substrate, A focus position error signal proportional thereto is generated in the element 340, and accordingly, the sensor lens 320 is also designed.

As a method of generating the focus position error signal, there is an astigmatic method using a cylindrical lens and a quadrant photodiode.

In addition, there are various methods for generating a focus position error signal, such as a method using a knife-edge or the like, and various changes can be made.

The illumination module 500 includes an illumination light source 510 and a fourth beam splitter 520 spaced apart from the illumination light source 510 by a predetermined distance in the horizontal direction and dividing the light emitted from the illumination light source 510, .

The fourth beam splitter 520 is accommodated in the fourth accommodating portion 530 and the upper and lower surfaces of the fourth accommodating portion 530 are provided with a fourth upper assembling surface 531, An assembly surface 532 is formed.

When the illumination light source 510 is an LED or a lamp, the illumination module 500 further includes a plurality of illumination lenses, which are formed as parallel beams and are reflected through the fourth beam splitter 520, Since the illumination light source 510 is non-polarized, it is preferable that the ratio of the transmitted light to the reflected light is 50%, respectively, in the fourth beam splitter 520 used at this time.

The modular optical apparatus 1 of the present invention includes the image module 400, the sensor module 300, and the illumination module 500 on the upper side of the base assembly including the light source module 100 and the objective lens module 200 And at least one of the optical modules may be stacked and assembled so that the optical axis for each optical module can be kept constant.

Each of the optical module assemblies will be described in more detail in the following embodiments.

Example 2

In the second embodiment, various embodiments of the modular optical device 1 constituted by various combinations of optical modules are described.

The modular optical apparatus 1 according to the present invention may include at least one of the sensor module 300, the illumination module 500, and the image module 400 on the upper side of the base assembly Can be stacked and configured in various forms.

In the modular optical device 1 of the present invention, the first to fourth upper assembling surfaces 531 and the first to fourth lower assembling surfaces 532 are assembled in parallel, 4 parallel beams are emitted or incident on the lower assembly surface 532 in the vertical direction.

Referring to FIG. 5, the modular optical device 1 of the present invention may have a configuration in which the image module 400 is assembled on the base assembly.

The modular optical device 1 according to the present invention includes an offset adjusting unit that adjusts the optical axis of the image module 400 to be offset in the horizontal direction by an offset amount generated by refraction of the beam transmitted through the first beam splitter 120, Type connecting block 600 as shown in FIG.

The modular optical device 1 according to the present invention includes the offset connection portion 432 between the first upper assembly surface 131 of the light source module 100 and the third lower assembly surface 432 of the image module 400, Blocks 600 may be mounted and connected to one another.

The modular optical apparatus 1 of FIG. 5 can obtain the horizontal position information of the specimen together with the focus position by processing image information through the image module 400.

The offset connection block 600 includes a first through a fourth beam splitter 520 mounted in a plate form and rotated by 45 degrees from a vertical or horizontal plane, ) To compensate for the amount of offset caused by the refraction of the transmitted beam.

If the first to fourth beam splitters 520 are made of prisms, the offset type connection block 600 is unnecessary for connecting the respective optical modules, and the coaxial type connection block 600 shown in FIG. 4 (b) 610) is required.

That is, the offset connection block 600 connects the optical modules so that the optical axis for each optical module can be biased by an offset amount so that the optical axis can be maintained constant.

6, the sensor module 300 is assembled on the base assembly 100, and the first upper assembly surface 131 of the light source module 100 and the second upper assembly surface 131 of the light source module 100, The offset connection block 600 is mounted between the second lower mounting surfaces 332 of the sensor module 300 and connected to each other.

At this time, the modular optical device 1 of the present invention can obtain only an error signal with respect to the focus position through the sensor module 300 without image information.

7, the modular optical device 1 is assembled in the order of the sensor module 300, the illumination module 500 and the image module 400 on the upper side of the base assembly, Between the second upper mounting surface 331 of the lighting module 500 and the fourth lower mounting surface 532 of the lighting module 500 and between the fourth upper mounting surface 531 of the lighting module 500 and the image module 400 The offset connection block 600 is mounted between the third lower mounting surfaces 432 of the first and second lower mounting surfaces 431,

In this case, the modular optical apparatus 1 of the present invention can obtain the focus position and the image information at the same time, and the image quality can be improved through the illumination module 500.

Accordingly, since the optical axis of the optical module constituting the modular optical device 1 of the present invention is already aligned, the optical alignment can be easily performed by the assembly through the offset connection block 600, It is possible to easily configure the optical device 1 in an optimized state in accordance with process conditions.

Example 3

Embodiment 3 Referring to Figs. 8 to 11, a modular optical apparatus 1 having two different light sources will be described. Fig.

In the case of the beam generated from the light source module 100, the light source module 100 may frequently be turned on or off in the process of performing the process. An error signal obtained from the sensor module 300 may be generated only when the light source module 100 is turned on .

For this reason, the modular optical apparatus 1 of the present invention may additionally include an optical beam for obtaining a focus error signal by the sensor module 300, in addition to the beam necessary for performing the process.

8 to 11, the modular optical device 1 of the present invention can be formed by including the light source module 100 having two different wavelengths.

The light source module 100 may further include a wavelength-type beam splitter 150, a second light source 160, and a reflection mirror 170 in addition to the first light source 110 and the first beam splitter 120 .

The second light source 160 is disposed at a predetermined distance from the first light source 110 in a direction perpendicular to the first light source 110 and has a different wavelength from the first light source 110.

The wavelength-type beam splitter 150 is provided between the first light source 110 and the first beam splitter 120 and transmits a first parallel beam by the first light source 110, And the second parallel beam by the light source 160 is reflected.

The reflection mirror 170 is disposed at a predetermined distance from the second light source 160 in the horizontal direction and reflects the light emitted from the second light source 160 and transmits the reflected light to the wavelength type beam splitter 150 .

In this case, when the first and second light sources 110 and 160 are laser diodes, a first collimation lens 140 is provided between the first light source 110 and the wavelength-type beam splitter 150 A second collimation lens 180 may be provided between the second light source 160 and the reflection mirror 170. [

Referring to FIG. 8, the light source module 100 generates a first parallel beam by a point light source generated from the first light source 110 and the first collimation lens 140, A second collimated beam is generated by the point collimating light source generated from the light source 160 and the second collimation lens 180. [

At this time, since the first parallel beam and the second parallel beam have different wavelengths, the first parallel beam is transmitted through the wavelength-type beam splitter 150, and the second parallel beam is reflected.

The polarization directions of the first parallel beam and the second parallel beam are all the same and both parallel beams are reflected downward of the light source module 100 through the first beam splitter 120.

9, the modular optical apparatus 1 according to the present invention includes a sensor module 300, an illumination module 500, and an image module 400 stacked in this order on the light source module 100, , The light generated from the light source module 100 is incident on the specimen and is then reflected to be transmitted through the first beam splitter 120 and partially reflected by the second beam splitter 310, 340, and a part of the light is transmitted through the fourth beam splitter 520, reflected by the third beam splitter 410, and incident on the imaging device 440.

10 shows an example in which the illumination module 500, the image module 400, and the sensor module 300 are stacked and assembled in this order on the light source module 100, As with the modular optical device 1, both the image information and the focus error signal can be obtained.

The modular optical device 1 shown in FIG. 11 is stacked in the order of a sensor module 300, an illumination module 500, and an image module 400 on the upper side of the light source module 100 as shown in FIGS. 9 and 10 The image module 400 and the sensor module 300 are arranged in a direction different from the illumination module 500 and the light source module 100 so that the left and right shapes can be more balanced.

Accordingly, the modular optical device 1 of the present invention is capable of controlling the amount of light irradiated from the light source module 100 and the illumination module 500 and the sensitivity of the image module 400 and the sensor module 300, Optical modules can be arranged so that an appropriate image signal and an electrical signal are obtained, and various arrangements are possible considering the space and shape of the mountable optical device.

12 and 13, the polarized beam splitter 120 has S-polarized reflection 100%, P-polarized light transmission 100 (for example, , And the wavelength type beam splitter 150 is assumed to have a first wavelength transmission of 100% and a second wavelength reflection of 100%, all the remaining beam splitters 310, 410 and 520 are assumed to have a propagation field of 50% % Transmission, and 50% reflection, respectively.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. It goes without saying that various modifications can be made.

1: Modular optics
100: Light source module
110: first light source 120: first beam splitter
130: first accommodating portion
131: first upper assembling surface 132: first lower assembling surface
140: first collimation lens 150: wavelength-type beam splitter
160: second light source 170: reflection mirror
180: second collimation lens
190: Aperture
200: objective lens module
210: Objective lens
220: focus driving stage
240: Correction lens 250: 1/4 wavelength plate
300: Sensor module
310: second beam splitter 320: sensor lens
330: second accommodating portion
331: second upper assembling surface 332: second lower assembling surface
340: sensor element
400: image module
410: third beam splitter 420: imaging lens
430: Third accommodating section
431: third upper assembling surface 432: third lower assembling surface
440: Imaging element
500: Lighting module
510: illumination light source 520: fourth beam splitter
530: fourth accommodating portion
531: fourth upper assembling surface 532: fourth lower assembling surface
540: Lighting Lens
600: offset connection block 610: coaxial connection block

Claims (9)

And a first beam splitter disposed at a predetermined distance in the horizontal direction from the first light source and dividing the light emitted from the first light source, the first beam splitter having a first housing A light source module having a first upper assembling surface and a first lower assembling surface formed on an upper side and a lower side of the first module;
An objective lens disposed on the lower side of the first lower assembling surface and adapted to focus a parallel beam incident on the specimen, the parallel beam being split by the first beam splitter of the light source module and focused on the specimen; An objective lens module including a focus driving stage moved in a vertical direction so as to converge;
A sensor module for detecting an error signal with respect to a degree of focus deviation on the specimen through the light reflected from the specimen;
An image module for acquiring image information of the specimen through the light reflected from the specimen; ≪ / RTI >
Wherein at least one of the image module and the sensor module is assembled on the upper side of the base assembly including the light source module and the objective lens module.
The method according to claim 1,
The sensor module
And the second upper mounting surface and the second lower mounting surface are formed on the upper and lower sides, and part of the light reflected vertically incident from the specimen is reflected in the horizontal direction, A second beam splitter for allowing the light beam to pass through;
At least one sensor lens through which light reflected by the second beam splitter passes;
A sensor element for detecting a degree of deviation of a focus of light passing through the sensor lens from a reference point on which the specimen is formed; And the second optical element is formed to include the first optical element and the second optical element.
3. The method of claim 2,
The image module
And a third beam splitter accommodated in a third accommodating portion in which the third upper assembling surface and the third lower assembling surface are formed on the upper and lower sides and the light incident in the vertical direction in the specimen is horizontally reflected again, ;
At least one imaging lens through which light reflected from the third beam splitter passes; And
An imaging element in which a shape of light passing through the imaging lens is imaged; And the second optical element is formed to include the first optical element and the second optical element.
The method of claim 3,
The modular optical device
And a fourth beam splitter disposed at a predetermined distance in the horizontal direction from the illumination light source and dividing the light irradiated from the illumination light source, wherein the fourth beam splitter is disposed on an upper side And a fourth upper assembling surface and a fourth lower assembling surface are formed on the lower side; Further comprising: a light source for emitting the modulated light.
5. The method of claim 4,
The modular optical device
Wherein at least one of the sensor module, the illumination module, and the image module is stacked and assembled on the base assembly,
Wherein the first to fourth upper assembling surfaces and the first to fourth lower assembling surfaces are all parallel and a parallel beam is emitted or incident in a direction perpendicular to the first to fourth lower assembling surfaces. Optical device.
6. The method of claim 5,
The modular optical device
At least one of the sensor module, the illumination module, and the image module is stacked on the base assembly,
And the offset type connection block is mounted on the space between the modules to be stacked and connected to each other.
The method according to claim 1,
The light source module
When the first light source is a laser diode,
Further comprising a first collimation lens for generating a parallel beam between the first light source and the first beam splitter.
The method according to claim 1,
The light source module
A wavelength-type beam splitter provided between the first light source and the first beam splitter;
A second light source disposed at a predetermined distance from the first light source in a direction perpendicular to the first light source, the second light source having a wavelength different from that of the first light source;
A reflective mirror disposed at a predetermined distance in the horizontal direction from the second light source and reflecting the light emitted from the second light source to transmit the reflected light to the wavelength type beam splitter; Further comprising:
A first parallel beam of the first light source transmitted through the wavelength type beam splitter and a second parallel beam of the second light source reflected by the wavelength type beam splitter are reflected downward by the first beam splitter Wherein the modular optical device comprises:
9. The method of claim 8,
The light source module
When the first light source and the second light source are laser diodes,
A first collimation lens is provided between the first light source and the wavelength-type beam splitter,
And a second collimation lens is provided between the second light source and the reflection mirror.

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