KR20140139912A - 6-degree of freedom matching method and system for measuring detailed and large surface 3-dimension data - Google Patents

Abstract

A 6-degrees of freedom correcting method of three-dimensional measurement data includes: a process for obtaining three-dimensional measurement data measured by a shape measurement apparatus; a first calibration process for calibrating vertical straightness, rotation error (Roll) for an X-axis, and rotation error (Pitch) for a Y-axis of the three-dimensional measurement data; a second calibration process for calibrating rotation error (Yaw) for a Z-axis of the three-dimensional measurement data; and a third calibrating process for calibrating linear positioning and horizontal straightness of the three-dimensional measurement data.

Description

TECHNICAL FIELD [0001] The present invention relates to a 6-degree-of-freedom matching method and system for three-dimensional measurement data for high-precision / large-

Embodiments of the present invention relate to a 6-degree-of-freedom matching method and system for three-dimensional measurement data for high precision, large area measurement.

As the industry develops today, the demand for high precision parts is increasing. For the production of high-precision parts, it is necessary to be able to precisely measure / evaluate the fine features of the machined surface. The contact method is still widely used in the industrial field. However, there are problems such as distortion of the measurement profile due to the size of the stylus of the contact type measuring instrument, plastic deformation due to the measuring pressure, and limitation of the measuring speed.

The method of matching the measurement data includes the image processing technique of extracting the feature points of the image and the Least Squares Fitting method which minimizes the difference in the height of the common region existing between adjacent measurement regions.

The method of extracting and matching feature points has a limitation in that it can be used for image processing such as creating a panoramic image or pattern recognition, and only robust matching of images having feature points. On the other hand, in the case of the least squares joining method, the joining is performed so that the height difference within the common area (Overlap Area) existing between the plurality of measurement areas sequentially measured using the mechanical transfer device is minimized, It is suitable for matching of fine shapes such as machined surfaces.

However, the matching method using least squares bonding has a disadvantage in that the matching accuracy is limited by the error of the mechanical transferring device and the positional error between the measuring probe and the transferring device. Therefore, much research has been conducted to overcome the drawbacks of the matching method using the least squares fit suitable for matching of fine shapes.

The Sequential Least Squares Fitting, which sequentially attaches the measured data one by one to each other, is relatively easy to apply and is widely used in studies on matching using an interferometric microscope and is applied to a commercial interference microscope.

However, this method often results in the accumulation of errors due to registration and the cumulative error affecting the entire region. In contrast, there is a global least squares fit that matches the measured measurement data to an optimized value for all adjacent common areas.

This overall least squares joining method has the advantage that no cumulative error occurs, but it is difficult to clarify coordinates and relationships of adjacent common regions for all measuring regions.

As mentioned above, sequential least squares fitting is suitable for the matching of three-dimensional data measuring fine features such as machined surfaces without feature points. However, the matching method using the presently proposed least-squares conjugation corrects the data in all three degrees of freedom.

As mentioned above, least-squares bonding is suitable for matching of three-dimensional data measuring fine features such as machined surfaces without feature points. However, the matching method using the presently proposed least-squares conjugation corrects the data in all three degrees of freedom.

That is, as shown in FIG. 1, the three-degree-of-freedom matching method is performed so that the error between the rotational error (Roll, Pitch) in the X-axis and Y-axis directions and the vertical straightness with respect to the Z- . Therefore, the reliability of the use of the alignment is effective only when the stage misalignment is smaller than the lateral resolution.

However, when measuring with a high magnification objective lens, the lateral resolution must be small and the measurement data must be matched to the accuracy and precision of the corresponding stage. Therefore, in the conventional matching method, only the error due to the straightness of the stage and the attitude of the measuring probe are considered, and the operation error of the stage is not considered.

As a conventional technique, the 5-DOF matching method is proposed as a matching method considering the straightness of the stage and the driving error. The 5-degree-of-freedom matching method allows efficient control of the measurement environment over a certain level, such as a 3D microscope, and when the stage performance is similar to the lateral resolution of the instrument.

However, in a measurement environment that does not satisfy the above conditions, a more general matching method is required even if the calculation amount is larger.

One embodiment of the present invention is to provide a matching method that is available in a more general measurement environment.

More precisely, it is to replace the 3-degree-of-freedom matching method using existing least squares joining and to minimize the geometric error components of 6 degrees of freedom to correct the registration errors of the measurement data.

A method for 6-DOF matching of three-dimensional measurement data, comprising: obtaining the three-dimensional measurement data measured using a shape measuring apparatus; A first calibration step of calibrating a vertical straightness of the three-dimensional measurement data, a rotation error with respect to the X-axis, and a rotation error with respect to the Y-axis; A second calibration step of calibrating a rotation error (Yaw) with respect to the Z axis of the three-dimensional measurement data; And a third degree of correcting step of correcting linear positioning and horizontal straightness of the three-dimensional measurement data.

According to one aspect of the present invention, the first calibration step may include calculating a coefficient of a plane equation representing a relation between adjacent measurement areas of the three-dimensional measurement data by using a least squares method to calculate the vertical straightness, A rotation error and a rotation error with respect to the Y axis are corrected, and the coefficients correspond to the rotation error with respect to the X axis, the rotation error with respect to the Y axis, and the straightness straightness, respectively .

According to another aspect of the present invention, the secondary calibration step may include extracting data for each of a plurality of extraction areas included in a common area that is a region where adjacent measurement areas overlap, and correcting a rotation error with respect to the Z-axis using cross-correlation.

According to another aspect of the present invention, in the second calibration step, a spatial delay value in which the coefficient of the cross-correlation function is maximized is calculated, and a spatial delay value of the cross- And correcting a rotation error with respect to the Z-axis by estimating a rotation error of the Z-axis.

According to another aspect of the present invention, in the third calibration step, the third calibration step extracts data for each of a plurality of extraction areas included in a common area that is a region where measurement areas adjacent to each other overlap, Correcting the linear positioning and the horizontal straightness by estimating the linear positioning and the horizontal straightness using a spatial delay exhibited through a cross-correlation between the data pairs, And the extraction region of one of the plurality of extraction regions includes another extraction region of the plurality of extraction regions.

According to another aspect of the present invention, the error range of the three-dimensional measurement data is limited to the accuracy of a mechanical transfer stage.

According to another aspect of the present invention, the three-dimensional measurement data may include a plurality of measurement data sequentially measuring height information in a measurement area measured by the shape measurement device through a mechanical transfer stage .

According to another aspect, the shape of the measurement area of the three-dimensional measurement data may include a square or a circle.

According to another aspect of the present invention, in the first calibration step, the second calibration step, and the third calibration step, the execution order is changed according to the shape of the measurement object.

A six degree-of-freedom matching system for three-dimensional measurement data, comprising: an acquiring unit for acquiring the three-dimensional measurement data measured using a shape measuring apparatus; A primary calibration unit for calibrating a vertical straightness of the three-dimensional measurement data, a rotation error with respect to the X-axis, and a rotation error with respect to the Y-axis; A quadratic calibration unit for calibrating a rotation error (Yaw) with respect to the Z axis of the three-dimensional measurement data; And a tertiary calibration unit for calibrating linear positioning and horizontal straightness of the three-dimensional measurement data.

It is possible to replace the 3-degree-of-freedom matching method using the existing least squares joining method, and it is possible to calibrate the registration error of the measurement data by minimizing all the geometric error components of 6 degrees of freedom which are necessarily caused by driving.

Also, by using this 6-DOF matching method, it is possible to obtain highly reliable matching data even if a stage having a lower driving precision than the lateral resolution of the measurement data is used, thereby reducing the development / manufacturing cost of the measuring device and lowering the registration error .

Therefore, the 6-degree-of-freedom matching method of the three-dimensional measurement data can be a basis for obtaining large-area measurement data with high accuracy.

Also, the 6-degree-of-freedom matching method of three-dimensional measurement data can be applied to match the geometric relationship between two measurement data when the same area is measured using a heterogeneous measuring instrument having different resolutions.

Figure 1 shows, in one embodiment of the present invention, all six geometric errors that may be present between two adjacent measurement regions.
FIG. 2 is a plan view for explaining a geometric relationship of measurement areas caused by a rotation error with respect to the Z-axis in one embodiment of the present invention. FIG.
FIG. 3 is a flow chart illustrating a six degree of freedom matching method, in accordance with an embodiment of the present invention.
FIG. 4 is a block diagram for explaining an internal configuration of a 6-degree-of-freedom matching system according to an embodiment of the present invention.
5 is a diagram for explaining an example of a method of estimating a positioning error and a horizontal straightness using a cross-correlation function and a spatial delay in an embodiment of the present invention.
6 is a diagram showing a data extraction area for correcting a rotation error with respect to the Z-axis in an embodiment of the present invention.
7 is a diagram showing a data extraction area in a common area for calibrating linear positioning and horizontal straightness in one embodiment of the present invention.
8 is a diagram for explaining an example of a method of estimating a positioning error and a horizontal straightness using a cross-correlation function and a spatial delay in an embodiment of the present invention.
FIG. 9 is a diagram illustrating measurement areas of a measurement object in which data is sequentially measured through a mechanical transfer device in an embodiment of the present invention. FIG.
10 to 12 are diagrams showing an example of measurement data obtained by sequentially measuring an arbitrary measurement object and an arbitrary measurement object twice in one embodiment of the present invention.
FIGS. 13 to 16 are diagrams showing an example of results of sequentially performing calibration on measurement data in an embodiment of the present invention. FIG.

Hereinafter, a method of 6 degrees of freedom matching of three-dimensional measurement data and a system thereof will be described in detail with reference to the accompanying drawings.

Figure 1 illustrates, in one embodiment of the present invention, all six geometric errors that may be present between two adjacent measurement regions.

), 수평진직도(Horizontal Straightness;

), 수직진직도(Vertical Straightness;

), X축에 대한 회전오차(Roll;

), Y축에 대한 회전오차(Pitch;

), Z축에 대한 회전오차(Yaw;

)를 나타내며, 이러한 6가지의 오차를 모두 제거하거나 최소화하여 인접한 측정영역 사이의 관계를 명확히 해야 할 필요가 있다. 본 발명의 실시예들에서는 기존의 ‘5자유도 정합 방법’에서 제안하지 않았던 Z축에 대한 회전오차(Yaw;

)를 포함하여 총 6가지의 오차성분을 모두 최소화 하는 방법을 설명한다.Here, the errors are respectively represented by linear positioning

), A horizontal straightness (Horizontal Straightness;

), Vertical straightness (Vertical Straightness;

), A rotation error with respect to the X axis (Roll;

), A rotation error (Pitch;

), The rotation error (Yaw;

), And it is necessary to clarify the relationship between adjacent measurement areas by eliminating or minimizing all of these six errors. In the embodiments of the present invention, the rotation error (Yaw) with respect to the Z-axis, which was not proposed in the existing '5-degree-of-freedom matching method'

) To minimize all six error components.

FIG. 2 is a plan view for explaining a geometric relationship of measurement areas caused by a rotation error with respect to the Z-axis in one embodiment of the present invention. FIG. In FIG. 2, rotational error is generated with respect to the Z-axis because the accuracy of the linear guide is a major factor, and rotational errors can also be generated due to fabrication and assembly tolerances of the measurement probe and stage. This rotational error has a greater effect on the measured data as the size of a single measurement area increases. For example, in the case of microscopic areas such as a microscope, the influence of the rotation error on the Z axis is relatively small. However, when a general scale measurement or a single measurement area is large (for example, a Giant Magellan Telescope) (Reflection mirror)), the rotation error component with respect to the Z axis must also be considered.

FIG. 3 is a flowchart illustrating a 6-degree-of-freedom matching method according to an exemplary embodiment of the present invention, and FIG. 4 is a block diagram illustrating an internal configuration of a 6-degree-of-freedom matching system in an embodiment of the present invention . The 6 degree of freedom matching method according to the embodiment of FIG. 3 may be performed by the 6 degree of freedom matching system 400 according to the embodiment of FIG. For example, each of the steps involved in the 6 degrees of freedom matching method may be performed by a component included in the 6 degrees of freedom matching system 400 or the 6 degrees of freedom matching system 400. [ The six degree of freedom matching system 400 may include an acquiring unit 410, a primary calibration unit 420, a secondary calibration unit 430 and a tertiary calibration unit 440, as shown in FIG. have.

In step 310, the six degrees-of-freedom matching system 400 or the acquiring unit 410 may acquire three-dimensional measurement data measured using a shape measuring apparatus. Here, the three-dimensional measurement data may include a plurality of measurement data sequentially measuring height information in a measurement area (Field Of View, F.O.V.) measured by a shape measuring device through a mechanical transfer stage. At this time, a roll, a pitch, a yaw, a vertical straightness, a linear positioning, and a horizontal straight line appear between adjacent measurement data among a plurality of measurement data. straightness, the above six error components are displayed. The 6-degree-of-freedom matching method according to the present embodiment can minimize the error component and stitch the measurement data sequentially measured.

To this end, the six degrees of freedom matching method may further comprise steps 320 to 340. [ In this case, steps 320 to 340 may be performed according to the shape of the measurement object.

The shape measuring apparatus may be included in the six degrees of freedom matching system 400 or may be configured to communicate with the six degrees of freedom matching system 400 via a wired or wireless interface.

In step 320, the six degrees of freedom matching system 400 or the first order calibration unit 420 receives the vertical straightness of the three-dimensional measurement data, the rotation error on the X axis, the rotation on the Y axis Pitch can be corrected. For example, the relationship between measurement areas adjacent to each other can be represented as shown in FIG.

5 is a graph showing an example of the relationship between two adjacent measurement regions including a vertical straightness, a rotation error about the X axis, and a rotation error with respect to the Y axis in one embodiment of the present invention. Fig. Here, the coefficients a, b, and c of the plane equation shown in FIG. 5 may correspond to the rotation error with respect to the X axis, the rotation error with respect to the Y axis, and the straightness straightness, respectively. The planar equation shown in FIG. 5 is expressed by Equation 1 below.

Referring again to Figures 3 and 4, the 6-degree-of-freedom matching system 400 or the first order orthogonal 420 calculates the coefficients of the planar equation representing the relationship between adjacent measurement regions of the three- (A, b, and c described above) are calculated by using the least square method, the rotation error with respect to the X-axis, the rotation error with respect to the Y-axis, and the straightness straightness can be corrected.

In step 330, the six degree of freedom matching system 400 or the quadratic calibration unit 430 may correct the rotation error (Yaw) with respect to the z-axis of the three-dimensional measurement data. The three-dimensional measurement data may have a plurality of extraction regions at different positions within a common area (overlap area). Here, as described above, the common region may mean a region overlapping between measurement regions adjacent to each other, and the extraction region may be a region at different positions included in the common region.

6 is a diagram showing a data extraction area for correcting a rotation error with respect to the Z-axis in an embodiment of the present invention. In FIG. 6, the rotation error ' ? _Aw ' with respect to the Z axis represents two extraction regions in the common region. In the example of FIG. 6, an extraction region is determined so that the distance between two extraction regions is 1/3 of the vertical height of the measurement region.

Referring again to Figures 3 and 4, the 6-degree-of-freedom matching system 400 or the quadratic calibration unit 430 performs a cross-correlation function between the extracted data pairs for each of the plurality of extraction regions in step 330, correlation can be used to correct the rotation error with respect to the Z axis. For example, the 6-degree-of-freedom matching system 400 or the quadratic calibration unit 430 calculates a spatial delay value at which the coefficient of the cross-correlation function becomes the maximum at step 330, By estimating the rotation error with respect to the Z axis using the angular difference of the vectors, the rotation error with respect to the Z axis can be corrected.

In step 340, the 6-degree-of-freedom matching system 400 or the cubic unit 440 can calibrate the linear positioning and horizontal straightness of the three-dimensional measurement data.

FIG. 7 is a view showing a data extraction area in a common area for calibrating linear positioning and horizontal straightness in an embodiment of the present invention, and FIG. 8 is a diagram showing a cross- And a method of estimating a positioning error and a horizontal straightness using space delay. The data extraction area shown in FIG. 7 is configured such that one data extraction area includes another data extraction area. The spatial delay can be measured through the cross-correlation function between the data extracting regions as shown in FIG. 8, and linear positioning and horizontal straightness can be estimated using the measured spatial delay.

The common areas described in FIGS. 7 and 8 are obtained by the steps 330 and 320 in accordance with a vertical straightness, a rotation error with respect to the X axis, a rotation error with respect to the Y axis, and the rotation error (Yaw) with respect to the z-axis is corrected. However, as described above, the order of calibration of the error components (the order of steps 320 to 340) can be changed flexibly according to the shape of the measurement object.

Referring again to Figures 3 and 4, the 6-degree-of-freedom matching system 400 or the tertiary orthogonal unit 440 may be used to calculate the distance between extracted data pairs for each of the plurality of extraction regions included in the same measurement region at step 340 Linear positioning and horizontal straightness can be calibrated by estimating linear positioning and horizontal straightness using the spatial delay introduced by the cross correlation function. At this time, one extraction region of the plurality of extraction regions may be configured to include another extraction region of the plurality of extraction regions.

FIG. 9 is a diagram illustrating measurement areas of a measurement object in which data is sequentially measured through a mechanical transfer device in an embodiment of the present invention. FIG. FIG. 9 shows a plurality of measurement areas measured for an object to be measured, and indicates that a common area (an overlap area) exists between adjacent measurement areas among the plurality of measurement areas. At this time, as already described, measurement data for each measurement area can be generated using the mechanical transfer device and the shape measurement device, and measurement data of the measurement area adjacent to each other such that the height difference with respect to the common area is minimized Can be corrected.

10 to 12 are diagrams showing an example of measurement data obtained by sequentially measuring an arbitrary measurement object and an arbitrary measurement object twice in one embodiment of the present invention.

Fig. 10 shows two measurement areas FOV1 and FOV2 for sequentially measuring an object to be measured and an object to be measured. 11 shows the measurement data for the measurement area FOV1 and FIG. 12 shows the measurement data for the measurement area FOV2, respectively. FOV1 is used as a reference plane for the matching of FOV1 and FOV2, and FOV2 for the reference plane FOV1 shows an example in which all the six geometrical error components described above are introduced.

FIGS. 13 to 16 are diagrams showing an example of results of sequentially performing calibration on measurement data in an embodiment of the present invention. FIG.

Fig. 13 shows an example of the result of matching FOV1 and FOV2 using only the feed amount of the mechanical transfer stage.

FIG. 14 shows an example of a result obtained by calibrating the vertical straightness, the rotation error with respect to the X-axis, and the rotation error with respect to the Y-axis using the least square method in the result of FIG. 13, and minimizing each error. Calibrating the vertical straightness, the rotation error with respect to the X axis, and the rotation error with respect to the Y axis has been described in step 320 of FIG.

FIG. 15 shows an example of the result of correcting the rotation error with respect to the Z-axis using the cross-correlation function in the result of FIG. Calibrating the rotational error with respect to the Z axis has been described in step 330 of FIG.

FIG. 16 shows an example of a result of correcting the positioning error and the horizontal straightness using the cross-correlation function in the result of FIG. Calibrating the positioning error and horizontal straightness has been described in step 340 of FIG.

According to the embodiments of the present invention, it is possible to replace the 3-degree-of-freedom matching method using the existing least squares joining method, and to correct the registration error of the measurement data by minimizing all of the geometric error components of 6 degrees of freedom . Also, by using this 6-DOF matching method, it is possible to obtain highly reliable matching data even if a stage having a lower driving precision than the lateral resolution of the measurement data is used, thereby reducing the development / manufacturing cost of the measuring device and lowering the registration error . Accordingly, the 6-degree-of-freedom matching method of the three-dimensional measurement data according to the embodiments of the present invention can be a basis for obtaining large-area measurement data with high accuracy. In addition, the 6-degree-of-freedom matching method of the three-dimensional measurement data may be applied to match the geometric relationship between the two measurement data when the same area is measured using a heterogeneous measuring instrument having different resolutions.

The system described above may be implemented with hardware components, software components, and / or a combination of hardware components and software components. For example, the components of the system and system described in the embodiments may be, for example, a processor, a controller, an arithmetic logic unit (ALU), a digital signal processor, a microcomputer, a field programmable array ), A programmable logic unit (PLU), a microprocessor, or any other device capable of executing and responding to instructions. The processing device may execute an operating system (OS) and one or more software applications running on the operating system. The processing device may also access, store, manipulate, process, and generate data in response to execution of the software. For ease of understanding, the processing apparatus may be described as being used singly, but those skilled in the art will recognize that the processing apparatus may have a plurality of processing elements and / As shown in FIG. For example, the processing unit may comprise a plurality of processors or one processor and one controller. Other processing configurations are also possible, such as a parallel processor.

The software may include a computer program, code, instructions, or a combination of one or more of the foregoing, and may be configured to configure the processing device to operate as desired or to process it collectively or collectively Device can be commanded. The software and / or data may be in the form of any type of machine, component, physical device, virtual equipment, computer storage media, or device , Or may be permanently or temporarily embodied in a transmitted signal wave. The software may be distributed over a networked computer system and stored or executed in a distributed manner. The software and data may be stored on one or more computer readable recording media.

The method according to an embodiment may be implemented in the form of a program command that can be executed through various computer means and recorded in a computer-readable medium. The computer-readable medium may include program instructions, data files, data structures, and the like, alone or in combination. The program instructions to be recorded on the medium may be those specially designed and configured for the embodiments or may be available to those skilled in the art of computer software. Examples of computer-readable media include magnetic media such as hard disks, floppy disks and magnetic tape; optical media such as CD-ROMs and DVDs; magnetic media such as floppy disks; Magneto-optical media, and hardware devices specifically configured to store and execute program instructions such as ROM, RAM, flash memory, and the like. Examples of program instructions include machine language code such as those produced by a compiler, as well as high-level language code that can be executed by a computer using an interpreter or the like. The hardware devices described above may be configured to operate as one or more software modules to perform the operations of the embodiments, and vice versa.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. For example, it is to be understood that the techniques described may be performed in a different order than the described methods, and / or that components of the described systems, structures, devices, circuits, Lt; / RTI > or equivalents, even if it is replaced or replaced.

Therefore, other implementations, other embodiments, and equivalents to the claims are also within the scope of the following claims.

400: 6 degrees of freedom matching system
410:
420: primary school
430: Secondary school
440: tertiary governance

Claims (13)

In a 6-degree-of-freedom matching method of three-dimensional measurement data,
Obtaining the three-dimensional measurement data measured using a shape measuring apparatus;
A first calibration step of calibrating a vertical straightness of the three-dimensional measurement data, a rotation error with respect to the X-axis, and a rotation error with respect to the Y-axis;
A second calibration step of calibrating a rotation error (Yaw) with respect to the Z axis of the three-dimensional measurement data; And
A third calibration step of calibrating the linear positioning and the horizontal straightness of the three-dimensional measurement data;
/ RTI > The method according to claim 1,
Wherein the first calibration step comprises:
The coefficients of the planar equation representing the relationship between adjacent measurement areas of the three-dimensional measurement data are calculated using the least squares method, and the vertical straightness, the rotation error with respect to the X axis, Correcting the rotation error (Pitch)
Wherein the coefficients respectively correspond to a rotation error with respect to the X-axis, a rotation error with respect to the Y-axis, and the straightness straightness
And the 6-degree-of-freedom matching method. The method according to claim 1,
Wherein the second calibration step comprises:
Data is extracted for each of a plurality of extraction areas included in a common area that is an area where measurement areas adjacent to each other overlap with each other, To correct the rotation error for
And the 6-degree-of-freedom matching method. The method of claim 3,
Wherein the second calibration step comprises:
Calculating a spatial delay value at which the coefficient of the cross-correlation function becomes maximum, and estimating a rotation error with respect to the Z-axis using an angle difference of vectors with respect to the spatial delay value, Correcting rotation error
And the 6-degree-of-freedom matching method. The method according to claim 1,
Wherein the third calibration step comprises:
Extracting data for each of a plurality of extraction areas included in a common area that is an area where adjacent measurement areas overlap each other and extracting a spatial delay caused by a cross-correlation function between the extracted data pairs Correcting the linear positioning and the horizontal straightness by estimating the linear positioning and the horizontal straightness,
Wherein one extraction region of the plurality of extraction regions includes another extraction region of the plurality of extraction regions
And the 6-degree-of-freedom matching method. The method according to claim 1,
Limiting the error range of the three-dimensional measurement data to the accuracy of the mechanical transferring device (Stage)
And the 6-degree-of-freedom matching method. The method according to claim 1,
The three-dimensional measurement data may include a plurality of measurement data sequentially measuring height information in a measurement area measured by the shape measurement device through a mechanical transfer stage
And the 6-degree-of-freedom matching method. The method according to claim 1,
The shape of the measurement area of the three-dimensional measurement data may include a rectangle or a circle
And the 6-degree-of-freedom matching method. The method according to claim 1,
Wherein the first calibration step, the second calibration step and the third calibration step are performed in such a manner that the execution order is changed according to the shape of the measurement object
And the 6-degree-of-freedom matching method. In a six degrees of freedom matching system of three-dimensional measurement data,
An obtaining unit obtaining the three-dimensional measurement data measured using a shape measuring apparatus;
A primary calibration unit for calibrating a vertical straightness of the three-dimensional measurement data, a rotation error with respect to the X-axis, and a rotation error with respect to the Y-axis;
A quadratic calibration unit for calibrating a rotation error (Yaw) with respect to the Z axis of the three-dimensional measurement data; And
A third calibration unit for calibrating linear positioning and horizontal straightness of the three-dimensional measurement data,
6 degrees of freedom matching system. 11. The method of claim 10,
Wherein the secondary calibration unit comprises:
Data is extracted for each of a plurality of extraction areas included in a common area that is an area where adjacent measurement areas overlap each other and data is extracted by using a cross- To correct the rotation error for
A 6-degree-of-freedom matching system. 11. The method of claim 10,
The three-dimensional measurement data may include a plurality of measurement data sequentially measuring height information in a measurement area measured by the shape measurement device through a mechanical transfer stage
A 6-degree-of-freedom matching system. 11. The method of claim 10,
The order of operation of the primary, secondary, and tertiary angles is determined according to the shape of the object to be measured
A 6-degree-of-freedom matching system.

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