KR20140133534A - Substrate Processing Apparatus - Google Patents

Abstract

A transfer device for transferring substrates within a transfer chamber, the transfer chamber having a first end and a second end and two sides extending between the ends. The transfer device includes at least one base arm having a drive portion and a fixed end relative to the transfer chamber, the at least one base arm having at least one arm link rotatably coupled to the drive portion, And at least one transfer arm, possibly coupled and having two end effectors. The drive includes motors having independent rotational axes defining a degree of freedom of three. One degree of freedom moves the at least one base arm horizontally to carry the at least one transfer arm and the two degrees of freedom extend and retract the at least one transfer arm and the two end effectors, And drives at least one transfer arm.

Description

[0001] Substrate Processing Apparatus [

Cross-reference to related applications

This application is related to U.S. Patent Application No. 61 / 597,507, filed February 10, 2012; 61 / 660,900, filed June 18, 2012; 61 / 662,690, filed June 21, 2012, the disclosures of which are incorporated herein by reference in their entirety.

TECHNICAL FIELD OF THE INVENTION

Exemplary embodiments generally relate to robotic transport devices, and more particularly to robotic transport devices for transporting substrates to a plurality of substrate retention locations.

In robotic transport systems where substrates are transported to a plurality of substrate retention locations arranged side by side, as for example in a linearly elongated transfer chamber, generally more than one transport robot is used Thereby causing the substrate to be handed off from one robot to another robot along the length of the linear elongate delivery chamber. In another aspect, a single robotic transport mounted on a linear slide is used to transport substrates through a linear elongated transfer chamber.

Without transferring between the transfer robots of the substrates and without the use of linear slides, between the plurality of linearly arranged substrate holding positions and / or parallel substrate holding positions, It would be advantageous to reduce the interfaces to the sealed environment.

In addition, generally with cluster type tool arrangements, the substrate holding positions are communicably coupled to a common main transfer chamber.

It would also be advantageous to be able to seal portions of the transfer chamber for the cluster tool from other portions of the transfer chamber. Its advantages are particularly important because of the tool architecture for processing 450 mm semiconductor wafers and the dimensional increases associated therewith throughout the tool configuration.

Additionally, in general, original equipment manufacturers / process suppliers may associate vacuum cluster tools with standby equipment front end modules (EFEM) loaders to transfer the wafers to a mobile storage carrier provides a way to maintain a clean environment for transport from mobile storage carriers to process modules. During a cycle of each wafer into the process chamber, each of the wafers is transferred from the atmosphere to the vacuum and back to the atmosphere. In some instances, after the processed wafers are exposed to the atmosphere, they may become acidic by reacting with humid air, thereby promoting damage to the wafers and handling equipment.

It would be more advantageous to connect existing process modules and / or cluster tools to maintain a controlled environment during substrate transfer between adjacent tools. It would also be advantageous to remotely locate the EFEM from the processing chambers / cluster tools.

According to one or more aspects of the disclosed embodiments, there is provided a transfer device for transferring substrates within a transfer chamber, the transfer chamber having a first end and a second end and two sides extending between the ends And each side has at least two linearly arranged substrate holding stations, each end having at least one substrate holding station. The conveying device includes a driving unit; At least one base arm having one end fixed relative to the transfer chamber, the at least one base arm being rotatably coupled to the common end of the base arm and rotatably coupled to the two end effectors And a base arm including at least one transfer arm having at least one transfer arm. The drive unit includes motors having independent rotational axes that define a degree of freedom of three. Wherein one degree of freedom of the drive unit horizontally moves the at least one base arm to transport the at least one transfer arm within the transfer chamber and the two degrees of freedom of the drive unit extend the at least one transfer arm, And drives the at least one transfer arm to retract the at least one transfer arm and swap the two end effectors.

According to one or more aspects of the disclosed embodiments, the transfer device is arranged between the at least two linearly arranged substrate holding stations on each side of the transfer chamber, and between the first and second ends of the transfer chamber, And transferring the substrates to the at least one substrate holding station disposed on each of the two ends.

According to one or more aspects of the disclosed embodiments, the at least one substrate holding station disposed between at least one of the first end and the second end of the transfer chamber comprises three inline load locks or four in- Lt; / RTI >

According to one or more aspects of the disclosed embodiments, the transfer device is configured to handle 450 mm diameter wafers.

According to one or more aspects of the disclosed embodiments, the transfer device is configured to handle flat panels for flat panel displays, light emitting diodes, organic light emitting diodes or solar panels, 300 mm diameter wafers, or 200 mm diameter wafers .

According to one or more aspects of the disclosed embodiments, the drive includes a coaxial drive shaft arrangement.

According to one or more aspects of the disclosed embodiments, the drive unit is configured to linearly move the at least one transfer arm in a direction substantially perpendicular to an axis of extension and retraction of the at least one transfer arm Axis drive (z-axis drive).

According to one or more aspects of the disclosed embodiments, the at least one base arm includes at least one arm link having an end rotatably mounted to the drive at a drive axis, The transfer arm is rotatably mounted in the shoulder axis at the opposite second end of the at least one arm link.

According to one or more aspects of the disclosed embodiments, the drive includes a one degree of freedom driver disposed on the drive shaft and a two degree of freedom driver disposed on the shoulder axis.

According to one or more aspects of the aspects of the disclosed embodiments, the 1 degree of freedom driver includes a harmonic drive.

According to one or more aspects of the disclosed embodiments, the two-degree-of-freedom driver includes a coaxial drive having internal and external drive shafts, the external drive shaft being independently rotatable with respect to the internal drive shaft And is supported by a support bearing of the internal drive shaft.

According to one or more aspects of the disclosed embodiments, the at least one base arm includes an upper arm link having a first end and a second end, and a forearm link having a first end and a second end, Wherein the upper arm link is rotatably mounted about the drive shaft to the drive at the first end and the front arm link is rotatably mounted to the second end of the upper arm link at a first end . The at least one transfer arm is rotatably mounted to the second end of the front arm link at a shoulder rotational axis. In another aspect of the disclosed embodiment, the shoulder rotational axis is substantially constrained to follow a substantially linear path as the front arm link is subordinate to the driver. Wherein at least one of the upper arm and the front arm link includes at least one interchangeable spacer section and wherein the at least one interchangeable spacer section has a length of one of the upper arm link and the front arm link, To be displaceable with other removable spacer sections in order to be able to be scaled. In another aspect of the disclosed embodiment, the drive includes a motor, wherein the motor is disposed at the second end of the upper arm link to drive rotation of the front arm. In yet another aspect of the disclosed embodiment, the base arm includes an upper arm link having a first end and a second end, a front arm link having a first end and a second end, a first end having a first end and a second end, A bar including a wrist, wherein an upper arm link is rotatably mounted to the driver at the first end about the drive shaft, the front arm link rotatably supporting the second arm link at the first end, And the wrist is rotatably mounted to the second end of the front arm link at the first end.

According to one or more aspects of the disclosed embodiments, there is provided a transfer device for transferring substrates within a transfer chamber, the transfer chamber having a first end and a second end and two sides extending between the ends Each side is provided with a transfer device having at least two linearly arranged substrate holding stations. The conveying device includes a driving unit; At least one base arm having one end fixed relative to the transfer chamber, at least one base arm rotatably coupled to the base arm and rotatably coupled to the base arm and having at least two end effectors And a base arm including one transfer arm. The drive includes motors having independent rotational axes defining a degree of freedom of three. Wherein one degree of freedom of the drive moves the at least one base arm horizontally to transport the transfer arm within the transfer chamber, the two degrees of freedom of the drive extend the at least one transfer arm and the at least one transfer Drives the at least one transfer arm to retract the arm and to swap the two end effectors.

According to one or more aspects of the disclosed embodiments, the transfer device is configured to transfer substrates between the at least two linearly arranged substrate holding stations on each side of the transfer chamber.

According to one or more aspects of the disclosed embodiments, the transfer chamber comprises three in-line load locks or four in-line load locks disposed in at least one of a first end and a second end of the transfer chamber, The transfer device is configured to transfer the substrates from the three row-by-row loadlocks or the four row-by-row loadlocks and from the three row-by-row loadlocks or the four row-by-row loadlocks.

According to one or more aspects of the disclosed embodiments, the transfer device is configured to handle 450 mm diameter wafers.

According to one or more aspects of the disclosed embodiments, the transfer device is configured to handle flat panels for flat panel displays, light emitting diodes, organic light emitting diodes or solar panels, 300 mm diameter wafers, or 200 mm diameter wafers .

According to one or more aspects of the disclosed embodiments, a substrate processing apparatus is provided. The apparatus includes at least one transfer chamber forming a substantially sealed environment, and at least one transfer device disposed at least partially within each of the at least one transfer chamber. Wherein the at least one transfer device comprises: a driver; A base arm having one end fixed relative to the transfer chamber, the base arm comprising: at least one arm link rotatably coupled to the drive; and at least one arm link rotatably coupled to the common end of the base arm and having at least two end effectors, And the base arm including one transfer arm. The drive includes motors having independent rotational axes defining a degree of freedom of three. Wherein one degree of freedom of the drive moves the base arm to horizontally convey the at least one transfer arm within the transfer chamber, the two degrees of freedom of the drive extend the at least one transfer arm and the at least one transfer Drives the at least one transfer arm to retract the arm and to swap the two end effectors.

According to one or more aspects of the disclosed embodiments, each of the at least one transfer chamber has a first end and a second end, and two sides extending between the ends, each side having at least two A transfer station having at least two substrate holding stations on each side of the transfer chamber, the substrate transfer station comprising: at least two linearly arranged substrate holding stations And the at least one substrate holding station disposed on each of the first and second ends of the transfer chamber.

According to one or more aspects of the disclosed embodiments, the at least one substrate holding station disposed in at least one of the first end and the second end of the transfer chamber comprises three in-line load locks or four in- .

According to one or more aspects of the disclosed embodiments, the substrate processing apparatus is configured to handle 450 mm diameter wafers.

According to one or more aspects of the disclosed embodiments, the substrate processing apparatus is configured to handle flat panels for planar panel displays, light emitting diodes, organic light emitting diodes or solar panels, 300 mm diameter wafers, or 200 mm diameter wafers do.

According to one or more aspects of the disclosed embodiments, the at least one transfer chamber has a clustered configuration. In another aspect, the clustered configuration is a dual cluster transfer chamber configuration or a triple cluster transfer chamber configuration.

According to one or more aspects of the disclosed embodiments, at least one end of the at least one transfer chamber includes an equipment front end module for removing or inserting substrates in the substrate processing apparatus.

According to one or more aspects of the disclosed embodiments, the at least one transfer chamber comprises at least two linear elongated transfer chambers communicatively coupled to form a combined linear elongated transfer chamber. In another aspect, at least one end of the combined linear elongate delivery chamber includes an equipment front end module for removing or inserting substrates in the substrate processing apparatus.

According to one or more aspects of the disclosed embodiments, the drive comprises a coaxial drive shaft arrangement.

According to one or more aspects of the disclosed embodiments, the base arm includes at least one arm link having an end rotatably mounted to the drive in a drive shaft, the at least one transfer arm having at least one And is rotatably mounted on the opposite end of the one arm link.

According to one or more aspects of the disclosed embodiments, the drive includes a one degree of freedom driver disposed on the drive shaft and a two degree of freedom driver disposed on the shoulder axis.

According to one or more aspects of the aspects of the disclosed embodiments, the 1 degree of freedom driver includes a harmonic driver.

According to one or more aspects of the disclosed embodiments, the two degree of freedom driver includes a coaxial driver having an inner and an outer drive shaft, the outer drive shaft being independently rotatable relative to the inner drive shaft, As shown in Fig.

According to one or more aspects of the disclosed embodiments, the base arm includes an upper arm link having a first end and a second end, and a forearm link having a first end and a second end, The upper arm link is rotatably mounted to the drive at the first end about a drive shaft, and the front arm link is rotatably mounted at the first end and the second end of the upper arm link. The at least one transfer arm is rotatably mounted at the second end of the front arm link at the shoulder rotational axis. In another aspect of the disclosed embodiment, the front arm link is subordinate to the drive so that the shoulder rotational axis is substantially constrained to follow a path that is substantially linear along the length of the at least one linear elongated delivery chamber. Wherein at least one of the upper arm and the front arm link includes at least one interchangeable spacer section and wherein the at least one interchangeable spacer section has a length of one of the upper arm link and the front arm link, To be displaceable with other removable spacer sections in order to be able to be scaled. In another aspect of the disclosed embodiment, the drive includes a motor, wherein the motor is disposed at the second end of the upper arm link to drive rotation of the front arm. In yet another aspect of the disclosed embodiment, the base arm includes an upper arm link having a first end and a second end, a front arm link having a first end and a second end, a first end having a first end and a second end, A bar including a wrist, wherein an upper arm link is rotatably mounted to the drive at the first end about the drive shaft, the front arm link is rotatably attached to the second end of the upper arm link at the first end, And the wrist is rotatably mounted to the second end of the front arm link at the first end.

According to one or more aspects of the disclosed embodiments, a substrate processing apparatus is provided. The substrate processing apparatus includes at least one linear elongated transfer chamber; And a transfer device disposed at least partially within the at least one linear elongate transfer chamber. The transport apparatus includes a drive unit having a drive system having three independent rotational axes defining three degrees of freedom. The base arm portion is rotatably coupled to the driving portion, and the transfer arm portion is rotatably coupled to the base arm portion. The transfer arm portion has two end effectors. Wherein one degree of freedom of the drive unit moves the base arm horizontally to carry the transfer arm unit and the two degrees of freedom are such that the transfer arm unit is stretched and the transfer arm unit is contracted and the two end effectors are swapped, .

According to one or more aspects of the disclosed embodiments, the substrate processing apparatus is configured to handle 450 mm diameter wafers.

According to one or more aspects of the disclosed embodiments, the substrate processing apparatus is configured to handle flat panels for planar panel displays, light emitting diodes, organic light emitting diodes or solar panels, 300 mm diameter wafers, or 200 mm diameter wafers do.

According to one or more aspects of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport apparatus includes a driving unit having three independent rotational axes defining three degrees of freedom, a base arm connected to the driving unit, and a transfer arm rotatably mounted on the base arm and having two end effectors. One degree of freedom of the driving unit moves the base arm horizontally to carry the transfer arm. Wherein the motor of the driving unit having two degrees of freedom is a unit and is configured to be removably coupled to the base arm so that when the transfer arm is coupled to the base arm, The arm is coupled.

According to one or more aspects of the disclosed embodiments, the substrate transport apparatus is configured to handle 450 mm diameter wafers.

According to one or more aspects of the disclosed embodiments, the substrate transport apparatus is configured to handle flat panel displays for flat panel displays, light emitting diodes, organic light emitting diodes or solar panels, 300 mm diameter wafers, or 200 mm diameter wafers do.

According to one or more aspects of the disclosed embodiments, the motor of the drive with the two degrees of freedom comprises a coaxial driver having internal and external drive shafts, the external drive shaft being rotatable independently of the internal drive shaft And is supported by a support bearing of the internal drive shaft.

According to one or more aspects of the disclosed embodiments, a substrate processing tool is provided. The substrate processing tool includes a polygonal transfer chamber and at least two substrate holding stations disposed on each side of the transfer chamber. At least two substrate transport devices are disposed at least partially within the transfer chamber. Wherein each of the at least two substrate transfer devices includes a base arm rotatably mounted in the transfer chamber in a drive shaft and at least one transfer arm rotatably mounted on the base arm and having two end effectors do. Each base arm being independently rotatable about the drive axis and the at least one transfer arm being independently rotatable relative to a respective base arm so that the extension and retraction of each transfer arm An axis allows transfer of substrates between any of the substrate holding stations and the transfer arm.

According to one or more aspects of the disclosed embodiments, the substrate processing tool is configured to handle 450 mm diameter wafers.

According to one or more aspects of the disclosed embodiments, the substrate processing tool is configured to handle flat panel displays, light emitting diodes, flat panels for organic light emitting diodes or solar panels, 300 mm diameter wafers, or 200 mm diameter wafers do.

According to one or more aspects of the disclosed embodiments, each substrate transport apparatus includes a one-degree-of-freedom drive motor and a two-degree-of-freedom drive motor, The two degree of freedom drive motor is configured to effect rotation, extension and contraction of the at least one transfer arm independently of the base arm.

According to one or more aspects of the disclosed embodiments, a substrate processing apparatus is provided. Wherein the substrate processing apparatus is a composite transfer chamber including a grid formed by a two dimensional array of interconnected transfer chamber modules, each transfer chamber module including a plurality of transfer chamber modules that are selectively sealable from other ones of the transfer chamber modules, And a transfer chamber. One or more substrate holding stations are communicatively coupled to each of the transfer chamber modules. Each transfer chamber module includes substrate holding stations communicatively coupled to the composite transfer chamber and a transfer arm disposed within each transfer chamber module for transferring substrates between the transfer chamber modules.

According to one or more aspects of the disclosed embodiments, the two-dimensional arrangement of interconnecting transfer chamber modules comprises at least a two-by-two arrangement of transfer chamber modules.

According to one or more aspects of the disclosed embodiments, the substrate processing apparatus includes substrate holding stations at multiple horizontal levels.

According to one or more aspects of the disclosed embodiments, a substrate processing tool is provided. The substrate processing tool includes a polygonal transfer chamber and at least two substrate holding stations disposed on each side of the transfer chamber. At least one substrate transport apparatus is disposed at least partially within the transfer chamber. Wherein each of the at least one substrate transfer devices includes a hub spacer link, the hub spacer link is coupled to a hub mounted in the transfer chamber in a drive shaft, and at least one transfer arm is coupled to the hub And is rotatably mounted on the spacer link. The hub is rotatably indexable so that an axis of extension and retraction of each transfer arm is positioned between any of the substrate holding stations and the transfer arm Thereby allowing the substrates to be transported. A motor module is disposed on the opposite side of the hub, at the end of each hub spacer link, to drive the at least one transfer arm.

According to one or more aspects of the disclosed embodiments, a substrate processing apparatus is provided. The substrate processing apparatus includes at least a first transfer chamber module and a second transfer chamber module that are communicatively coupled to each other and disposed side by side and a second transfer chamber module that is arranged next to the first transfer chamber module and the second transfer chamber module and a third transfer chamber module extending along the first transfer chamber module and communicatively coupled to both the first transfer chamber module and the second transfer chamber module. At least one substrate holding station is communicatively coupled to each of the first transfer chamber module, the second transfer chamber module and the third transfer chamber module. Wherein each of the first transfer chamber module, the second transfer chamber module, and the third transfer chamber module includes at least one of the first transfer chamber module, the second transfer chamber module and the third transfer chamber module, And at least one transfer arm disposed within each of the first transfer chamber module, the second transfer chamber module and the third transfer chamber module for transferring substrates between the stations.

According to one or more aspects of the disclosed embodiments, the third transfer chamber module comprises a drive, and at least one arm link rotatably coupled to the drive, and at least one As shown in FIG. The at least one transfer arm of the third transfer chamber module is rotatably coupled to a common end of the base arm, the at least one transfer arm having two end effectors. The drive includes motors having independent rotational axes defining three degrees of freedom. Wherein one degree of freedom of the drive moves the at least one base arm horizontally to carry the at least one transfer arm within the third transfer chamber module and the two degrees of freedom of the drive extend the at least one transfer arm To retract the at least one transfer arm and to swap the two end effectors.

According to one or more aspects of the disclosed embodiments, a substrate processing apparatus is provided. The substrate processing apparatus includes a transport tunnel and an automation module communicatively coupled to the transport tunnel. Wherein the automation module includes a first end and a second end and two sides extending between the ends, each side having at least two connection ports, at least one of the ends having a first end and a second end, Wherein the at least two connection ports on at least one side of the automation module are configured for connection to a cluster tool module. Wherein the automated module further comprises a transfer device including at least one base arm having at least one arm link rotatably coupled to the drive and being fixed at one end to the transfer chamber, And at least one transfer arm rotatably coupled to a common end of the base arm, wherein the at least one transfer arm has at least one end effector.

According to one or more aspects of the disclosed embodiments, the at least one transfer arm includes two end effectors, and the drive includes motors with independent rotational axes defining three degrees of freedom. Wherein one degree of freedom of the drive moves the at least one base arm horizontally to transport the at least one transfer arm in the transfer chamber, the two degrees of freedom of the drive extend the at least one transfer arm, And actuates the two end effectors to swap.

According to one or more aspects of the disclosed embodiments, a substrate processing apparatus is provided. The substrate processing apparatus includes a carrier tunnel, and at least one module coupled to the carrier tunnel. Wherein the transport tunnel comprises at least one transport cart configured to travel between longitudinal ends of the transport tunnel, the at least one transport cart comprising: a substantially rigid substrate holder . Wherein when the transfer cart is disposed adjacent at least one of the longitudinal ends of the conveyance tunnel to transfer substrates between the transfer cart and the at least one module, At least one of the first and second ends.

According to one or more aspects of the disclosed embodiments, the substrate processing apparatus further comprises an automation module, the automation module having a first end and a second end and two sides extending between the ends, Has at least two connection ports, and at least one of the ends is coupled to the conveying tunnel. Wherein the automated module further comprises a transfer device having at least one arm link rotatably coupled to the drive, at least one base having a fixed end relative to the transfer chamber, And at least one transfer arm rotatably coupled to a common end of the base arm, the at least one transfer arm having at least one end effector. The transfer device is configured to extend beyond at least one of the first end and the second end through the at least two connection ports on each side. The automation module is communicatively connected to the conveying tunnel at one of the first end and the second end.

According to one or more aspects of the disclosed embodiments, the substrate processing apparatus includes a processing tool module coupled to the two connection ports on at least one of the sides of the automation module.

According to one or more aspects of the disclosed embodiments, the substrate processing apparatus includes an equipment front end module (EFEM), which communicatively connects the equipment front end module and the automation module.

According to one or more aspects of the disclosed embodiments, the substrate processing apparatus includes a second conveying tunnel, the second conveying tunnel including a first one of the first and second ends of the automation module, And connects the automation module with another automation module.

According to one or more aspects of the disclosed embodiments, the carrier tunnel comprises one or more tunnel modules.

According to one or more aspects of the disclosed embodiments, at least one of the one or more tunnel modules is sealable from the other ones of the one or more tunnel modules.

According to one or more aspects of the disclosed embodiments, a substrate processing apparatus is provided. The substrate processing apparatus includes an automation module and a connection module communicatively coupled to the automation module, the automation module including a first end, a second end, two sides extending between the ends, , Each side having at least two connection ports, and at least one of the ends being coupled to the connection module. Wherein the automated module further comprises a transfer device having at least one arm link rotatably coupled to the drive, at least one base having a fixed end relative to the transfer chamber, And at least one transfer arm rotatably coupled to a common end of the base arm, the at least one transfer arm having at least one end effector. The transfer device is configured to extend beyond at least one of the first end and the second end through the at least two connection ports on each side.

According to one or more aspects of the disclosed embodiments, the at least two connection ports of at least one side of the automation module are configured for connection to a cluster tool module.

According to one or more aspects of the disclosed embodiments, the substrate processing apparatus includes an equipment front end module, wherein the connecting module communicatively connects the equipment front end module to the automation module.

According to one or more aspects of the disclosed embodiments, the connecting module comprises at least one of a vacuum module and a carrying tunnel.

According to one or more aspects of the disclosed embodiments, the connecting module comprises a carrying tunnel, the carrying tunnel comprising at least one carrying cart arranged in the carrying tunnel and configured to pass between longitudinal ends of the carrying tunnel do.

According to one or more aspects of the disclosed embodiments, the substrate processing apparatus includes a processing tool module, wherein the processing tool module is coupled to the at least two connection ports on at least one side of the automation module.

According to one or more aspects of the disclosed embodiments, the transfer device of the automation module is configured to transfer the substrate from the connection module through all of the individual ports disposed on the sides of the automation module, .

According to one or more aspects of the disclosed embodiments, a substrate processing apparatus is provided. The substrate processing apparatus includes a housing in which the substrate is transported into and out of the chamber through the substrate port openings by forming a chamber capable of maintaining a sealed environment therein and by having substrate port openings therein. The housing has sides defining a mating interface for mating with a side of the process tool assembly. Wherein at least one side of the housing has one or more substrate transfer openings and substrate transfer openings on the side of the process tool assembly are engaged with the mating mating portions at the substrate transfer openings, Wherein the processing tool assemblies define equipment boundaries between the housing and the process tool assembly in association with substrate transfer openings on a side of the process tool assembly and wherein the different processing tool assemblies have predetermined different characteristics, And can be interchangeably engaged with the mating fitting portion.

According to one or more aspects of the disclosed embodiments, the substrate processing apparatus includes a carrier apparatus disposed at least partially within the housing. The transfer device comprising a base link and at least one transfer arm mounted on the base link, the at least one transfer arm being adapted for transferring substrates to the transfer device of the process tool assembly, To transfer the substrates into the process tool assembly.

BRIEF DESCRIPTION OF THE DRAWINGS The foregoing aspects and other features of the disclosed embodiments, which are set forth in the following description in conjunction with the accompanying drawings,
1 is a schematic diagram of a processing device according to an aspect of the disclosed embodiment;
Figure 2a is a schematic view of a delivery device according to an aspect of the disclosed embodiment;
Figures 2b-2d are schematic illustrations of portions of the conveyance apparatus of Figure 2a according to aspects of the disclosed embodiment;
Figures 2e and 2f are schematic diagrams of a delivery device according to an aspect of the disclosed embodiment;
Figure 2G is a schematic diagram of a portion of a processing device in accordance with an aspect of the disclosed embodiment;
Figures 2h-2j are schematic illustrations of portions of a conveyance device according to aspects of the disclosed embodiment;
Figures 3a and 3b are schematic diagrams of portions of a processing device according to aspects of the disclosed embodiments;
Figures 4A and 4B are schematic illustrations of portions of a processing device according to aspects of the disclosed embodiments;
Figures 5A, 5B, 5C and 5D are schematic diagrams of different processing device configurations in accordance with aspects of the disclosed embodiments;
6 is a schematic diagram of a processing device according to an aspect of the disclosed embodiment;
6A is a schematic view of a portion of a conveyance apparatus according to an aspect of the disclosed embodiment;
7A is a schematic view of a delivery device according to an aspect of the disclosed embodiment;
Figure 7b is a schematic view of a portion of the delivery apparatus of Figure 7a according to an aspect of the disclosed embodiment;
Figures 7C-7E are schematic diagrams of a portion of a conveyance apparatus according to an aspect of the disclosed embodiment;
Figures 8A, 8B and 8C are schematic diagrams of portions of a processing device according to aspects of the disclosed embodiments;
Figures 9A, 9B, and 9C are schematic diagrams of portions of a processing device in accordance with aspects of the disclosed embodiments;
Figures 10a, 10b, 10c and 10d are schematic diagrams of different processing device configurations in accordance with aspects of the disclosed embodiments;
11 is a schematic diagram of a process apparatus according to aspects of the disclosed embodiments;
Figures 11A-11C are schematic diagrams of portions of a processing device according to aspects of the disclosed embodiments;
12 is a schematic diagram of a process apparatus according to aspects of the disclosed embodiments;
13 is a schematic diagram of a process apparatus according to aspects of the disclosed embodiments;
13A is a schematic diagram of a portion of a process apparatus according to aspects of the disclosed embodiments;
Figure 14 is a schematic diagram of a process apparatus according to aspects of the disclosed embodiments;
14A is a schematic diagram of a process apparatus according to aspects of the disclosed embodiments;
15 is a schematic diagram of a process apparatus according to aspects of the disclosed embodiments;
16 is a schematic diagram of a process apparatus according to aspects of the disclosed embodiments;
17 is a schematic diagram of a process apparatus according to aspects of the disclosed embodiments;
18 is a schematic diagram of a process apparatus according to aspects of the disclosed embodiments;
19 is a schematic diagram of a process apparatus according to aspects of the disclosed embodiments;
19A is a schematic diagram of a process apparatus according to aspects of the disclosed embodiments;
Figures 20A, 20B, 20C, 20D and 20E are schematic diagrams of portions of a processing device according to aspects of the disclosed embodiments;
Figures 21A, 21B and 21C are schematic diagrams of a processing device according to aspects of the disclosed embodiments;
Figures 22A, 22B and 22C are schematic diagrams of a processing device according to aspects of the disclosed embodiments;
Figures 23A and 23B are schematic diagrams of a processing device according to aspects of the disclosed embodiments;
24A, 24B, 24C and 24D are schematic diagrams of parts of a processing tool according to aspects of the disclosed embodiments;
25A and 25B are schematic diagrams of a transport tunnel according to aspects of the disclosed embodiments;
Figures 26A, 26B, and 26C are schematic views of portions of a conveyance tunnel in accordance with aspects of the disclosed embodiments;
27A and 27B are schematic diagrams of a conveyance tunnel according to aspects of the disclosed embodiments;
28A, 28B, and 28C are schematic views of portions of a conveyance tunnel according to aspects of the disclosed embodiments;
29 is a schematic view of a substrate transfer cart in accordance with aspects of the disclosed embodiments;
30A and 30B are schematic diagrams of a substrate transfer cart according to aspects of the disclosed embodiments;
Figures 31A, 31B and 31C are schematic diagrams of portions of a processing device according to aspects of the disclosed embodiments;
32 is a schematic diagram of a portion of a processing device in accordance with aspects of the disclosed embodiments;
33 is a schematic diagram of a portion of a processing device according to aspects of the disclosed embodiments;
34A and 34B are schematic diagrams of portions of a processing device according to aspects of the disclosed embodiments;
35A, 35B and 35C are schematic diagrams of a portion of a processing device according to aspects of the disclosed embodiments;
Figures 36A, 36B, 36C and 36D are schematic diagrams of a portion of a processing device according to aspects of the disclosed embodiments;
37 is a schematic diagram of a delivery device according to an aspect of the disclosed embodiment.

In accordance with aspects of the disclosed embodiments, the processing apparatus described herein may be implemented using a stationary drive unit, one in sequential linear arrangement to enable transport of substrates to at least two processing stations, Or more. Aspects of the disclosed embodiments relate to the use of static bearings or linear motors for rotation axes that are both held in a common base or drive of the transfer robot (when the robot is used in a vacuum environment) Enabling a linear robot architecture that enables the use of vacuum seals. It should also be appreciated that aspects of the disclosed embodiments may also be implemented using one or more transfer robots having stationary base portions to transfer substrates between the linearly placed or clustered processing stations and the load locks (generally referred to herein as substrate holding stations) . Aspects of the disclosed embodiments will be described with reference to the drawings, but it is to be understood that aspects of the disclosed embodiments may be embodied in many alternative forms. In addition, any suitable size, shape or type of elements or materials may be utilized.

Referring to Figure 1, a processing device, such as, for example, a semiconductor tool station 100, is illustrated in accordance with aspects of the disclosed embodiments. Although semiconductor tools are shown in the Figures, aspects of the disclosed embodiments described herein may be applied to any tool station or application that employs robotic manipulators. In this aspect, the tool 100 is shown, for illustrative purposes, as being able to be referred to as a cluster type tool with a linear elongated delivery chamber (shown as a elongated dual cluster delivery chamber) Aspects of the invention may be found in any suitable tool station, such as, for example, U.S. Patent Application No. 11 / 442,511 entitled " Linearly Distributed Semiconductor Workpiece Processing Tool ", filed May 26, , The disclosure of which is incorporated herein by reference in its entirety. The tool station 100 generally includes an atmospheric front end 101, one or more vacuum load locks 102, and a vacuum back end 103. In other aspects, the tool station 100 may have any suitable configuration. Each of the components of the front end 101, load lock (s) 102 and back end 103 may be coupled to a controller 120, which may be part of any suitable control architecture, Can be connected. The control system may be implemented as is disclosed in U.S. Patent Application No. 11 / 178,615, now U.S. Patent No. 7,904,182, filed July 11, 2005, entitled "Scalable Motion Control System" Loop controller having one master controller, cluster controllers, and autonomous remote controllers, the disclosure of which is incorporated herein by reference in its entirety. Any suitable controller and / or control system may be utilized.

In aspects of the disclosed embodiment, the front end 101 generally includes a load port module 105 and a mini-environment 106, such as an equipment front end module (EFEM). The stacking port modules 105 may be used to hold SEMI standards E15.1, E47.1, E62, E47.1, E9.5 or E1.9 E15.1, E47.1, E62, E19.5 or E1.9. In other aspects, the stacking pot modules may be used for 200mm, 300mm or 450mm wafer matching interfaces or for example for flat panel displays, light emitting diodes, organic light emitting diodes or solar arrays. Larger or smaller wafers or any other suitable substrate matching portions such as flat panels. Thus, as will be described in greater detail below, other components and associated features may be individually (or alternatively) configured to be interfaced or operated on or on corresponding wafers or fabrication process workpieces respectively. Although three stacking port modules are shown in FIG. 1, any suitable number of stacking port modules may be incorporated into the front end 101 in other aspects. The stacking port modules 105 may be any of a variety of types including, but not limited to, an overhead transport system, automatic guided vehicles, person guided vehicles, rail guided vehicles, May be configured to receive substrate carriers or cassettes 110 from any other suitable transport method. The load port modules 105 may be interfaced with the mini-environment 106 via the load ports 104. The loading ports 104 may enable the passage of substrates between the substrate cassettes 110 and the mini environment 106.

The mini environment 106 generally includes any suitable transfer robot 113. In one aspect of the disclosed embodiment, the robot 113 may be a track mounted robot as described, for example, in U.S. Patent No. 6,002,840, the disclosure of which is incorporated herein by reference in its entirety Incorporated herein by reference. In other aspects, the transfer robot may be substantially similar to the transfer robot 130 in the vacuum back end 103, which will be described in more detail below. The small environment 106 can provide a controlled and clean zone, for example, for substrate transfer between a plurality of stacked port modules.

The vacuum load lock 102 may be disposed between the small environment 106 and the back end 103 and connected to the small environment 106 and the back end 103. The load lock 102 generally includes atmospheric and vacuum slot valves. The slot valves can provide environmental isolation employed when venting the lock with an inert gas, such as nitrogen, after loading the substrate from the standby front end and emptying the loadlock. The loadlock 102 may include any suitable substrate processing features, such as an aligner and / or heating, cooling, etc., for aligning the fiducials of the substrate to the locations required for processing . In other aspects, the vacuum load lock may be disposed at any suitable position of the processing apparatus and may have any suitable configuration. As described in more detail below with respect to Figures 11A-11C, the load lock (s) are stacked above one in a two dimensional array or substantially vertical rows, another, it is noted that the number of loadlocks can be increased without increasing the footprint of the tool 100.

The vacuum back end 103 generally includes a transfer chamber 125, one or more processing stations (s), generally referred to as processing stations (s) 140, and one or more transfer robot (s) . It is noted that the processing stations may be arranged in a two-dimensional array or stacked in substantially vertical rows as described in more detail in Figs. 11A-11C. The transfer robot 130 will be described below and may be disposed within the transfer chamber 125 to transfer substrates between the load lock 102 and the various processing stations 140. The processing stations 140 may operate on the substrates through deposition, etching, or other types of processes to form electrical circuits or other desired structures on the substrates. Typical processes include thin film processes using vacuum, such as plasma etch or other etch processes, chemical vapor deposition (CVD), metal organic chemical vapor deposition, MOCVD, plasma vapor deposition (PVD), implantation such as ion implantation, metrology, rapid thermal processing (RTP), dry strip atomic deposition but not limited to, layer deposition (ALD), oxidation / diffusion, formation of nitrogenous materials, vacuum lithography, epitaxy (EPI), wire bonder and evaporation, or vacuum pressures Do not. The processing stations 14 are connected to the transfer chamber 125 so that substrates can be passed from the transfer chamber 125 to the processing stations 140 and vice versa.

2A, 2B, 2C, and 2D, the transfer robot 130 generally includes a driving unit 200, a mounting flange 202, and a transfer arm unit 210, (202) is configured to mount the transfer robot (130) in one of the standby front end (101) or the vacuum back end (103).

The transfer arm unit 210 may include a base arm link or boom 220 and a transfer arm 214. The transfer arm 214 may be mounted on the base arm link 220 do. The base arm link 220 is shown as a single link having a pivot axis X at the proximal end and a pivot axis SX at the distal end (the words "proximal" and "distal" frame). The base arm link 220 is substantially rigid between the pivot axes and has no articulated joints and will be referred to herein as being a monolink for purposes of discussion herein. It is noted that the other arm "links " described herein are substantially similar to the base arm link 220 in that they can also be considered monolinks. The base arm link 220 may have any suitable length L and configuration. In one aspect, a substrate aligner 230 (e.g., for positioning an alignment feature of a substrate at a predetermined location) is formed by transferring substrates to the aligner 230 by the transfer arm 214, May be mounted to the base arm link 220 at any suitable location so that the base arm link 220 can be transported from the base arm link 230.

The transfer arm 214 may be rotatably mounted on the base arm link 220 on the shoulder axis SX. As shown in Figure 2d, the transfer arm is configured to allow both horizontal surfaces (e.g., "top" and "bottom") of the base arm link 220 to communicate with the transfer chamber TC) or the bottom (TCB) of the vehicle (e.g., the upper (TCT) or lower (TCB) of the vehicle). 2d, the transfer arm 214 is shown mounted to the top of the base arm link 220 while the transfer arm 214 'is mounted at the bottom of the base arm link, do. It is noted that one of the transfer arms 214, 214 'or both transfer arms 214, 214' may be mounted to the base arm link 220. As can be realized, when two transfer arms are mounted on the same base arm link, the drive unit 200 has a single drive shaft for rotating the base arm link 220 and a single drive shaft for rotating the two transfer arms Wherein the transfer arm links of the individual transfer arms are connected to separate drive shafts in a manner substantially similar to that described below (here, one base arm A suitable number of drive shafts and transmissions are added to the coaxial drive shaft configuration to drive the two transfer arms on the link. In other aspects, the transfer arms can be driven by any suitable number of drive axes. A number of transfer robots may also be provided in a single transfer chamber in a manner substantially similar to that described below. As also can be realized, when two or more transfer arms (and / or two or more transfer robots - see Figures 2g, 2f, 13, 14 and 15-18) are disposed in the transfer chamber, Controllers, such as the controller 120, may be configured to operate the transfer arms / robots such that operation of one arm / robot does not interfere with operation of the other of the arms / robots have.

The transfer arm 214 may be a combination of Selective Compliant Articulated Robot (SCARA) arms, frog leg arms, leapfrog arms, bi-symmetric arms but may be any suitable transfer arm including, but not limited to, one or more arms, one or more end effectors, one or more end effectors, one or more end effectors, The arm may be driven using a two degree of freedom driver. When the plurality of transfer arms are provided, the end effectors may be arranged in a horizontally side-by-side arrangement and / or vertically stacked arrangement, or in any combination thereof, Of the substrate. Suitable examples of transfer arms that may be adapted or utilized for use with aspects of the disclosed embodiments are disclosed in U.S. Patent Application Serial No. 11 / 179,762, filed May 8, 2008, herein incorporated by reference in its entirety herein. U.S. Patent Application No. 12 / 117,415, and U.S. Patent No. 5,899,658; 5,720,590; 5,180, 276; 5,743,704; 6,299,404; 5,647,724; 6,485, 250; And 7,946, 800, the disclosures of which are incorporated herein by reference in their entirety. In other aspects, the transfer arm may be driven by a driver having any suitable number of degrees of freedom. It will be noted that the transfer arm portion will generally be referred to herein as the transfer arm portion 210 and will be illustrated in various figures having different transfer arm configurations. 2A, the transfer arm 214 includes an upper arm link 213, a switch link 212 coupled to the upper arm 213 to be rotatable about an elbow axis E, Type arm having an end effector 211 coupled to the front arm link 212 to be rotatable about a wobble axis W. However, as mentioned above, the transfer arm may have two degrees of freedom and one or more ends For example, wherein rotation of the end effector may be slave to the upper arm link to follow the path of extension and contraction of the arm. In other aspects, the transfer arm may have three degrees of freedom, wherein each of the upper arm link, the front arm link, and the end effector is independently rotatable.

In one aspect, the drive 200 may include, for example, a housing 201, the housing 201 may include horizontally offset drive motors to drive a coaxial drive shaft arrangement, Any suitable three-axis drive system with coaxial drive motors or any other suitable drive system. In other aspects, the drive motors may have any suitable spatial arrangement with respect to each other. The driving unit includes a driving motor 1701MB for rotationally driving the base arm link 220 about a shaft X, a driving motor 1702MB for rotating the upper arm link 213 around the shoulder axis SX, A driving motor 1701MU for driving the front arm link 213 and a driving motor 1701MF for rotationally driving the front arm link 213 about the elbow axis E. [ In other aspects, the drive 200 may include any suitable number of drive motors, and any suitable number of corresponding shafts within the coaxial drive shaft configuration.

One drive shaft may be used to rotate and / or extend the base arm 220, while the other two drive shafts may be used independently of the base arm 220, Retraction, and rotation of the shaft 214. In other aspects, where the transfer arm has three degrees of freedom, the drive may include four drive motors having any suitable configuration (e.g., one drive shaft may rotate and / or extend the base arm 220) While the other three drive shafts can be used to stretch, contract and rotate the transfer arm 214 independently of the base arm 220).

Suitable examples of drive systems that may be adapted or used for use with aspects of the disclosed embodiments are disclosed in U.S. Patent Application No. 11 / 179,762, filed July 11, 2005, U.S. Patent Application No. 11 / 179,762, filed October 11, U.S. Patent Nos. 7,891,935, 6,845,250, 5,899,658, 5,813,823 and 5,720,590, and U.S. Patent Application No. 12 / 163,996, filed June 27, 2008, U.S. Patent Application No. 61 / 391,380, filed October 8, and U.S. Patent Application No. 61 / 490,864, filed May 27, 2011, the disclosures of which are incorporated herein by reference in their entirety Reference merged. In other aspects, the drive may be any suitable drive with any suitable number of drive shafts, e.g., the drive motors may be integrated into the walls of the transfer chamber, for example, the base arm link 220 One or more drive motors may be disposed in the arm links to drive the transfer arm 214 and / Or the joints of the arms, which are described in greater detail below and are described in more detail in U.S. Patent Application No. 61 / 507,276, filed July 13, 2011, and filed July 22, 2011 U.S. Patent Application Serial No. 61 / 510,819, U.S. Patent Application No. 13 / 270,844 filed October 11, 2011, and U.S. Patent No. 7,578,649, In a similar manner, the disclosures of which are incorporated herein by reference in their entirety. In one aspect, the driving unit 200 includes a Z-axis driver Z-axis for linearly moving the transfer arm unit 210 in a direction substantially perpendicular to the axis of extension and contraction of the transfer arm unit 210, axis drive 203 as shown in FIG. As described herein, when the loadlocks and processing stations are stacked one above the other, the Z-axis driver 203 may be configured to move the stacked loadlocks and / To provide sufficient travel to transfer the substrate to the substrate. While the sealing or controlled atmosphere (e.g., the sealed environment of the transfer chamber 125 or the controlled environment of the EFEM 106) in which the transfer arm 210 operates is maintained, the Z- A bellows or other suitable compliant sealing member 250 may be disposed between the drive portion 200 and the mounting flange 202 to enable the drive portion 200 (see FIG. 299). In other aspects, the driver 200 may not include a Z-axis driver.

The motors 201MB, 201MU and 201MF (see FIG. 2D) of the driving unit 2200 in one aspect include an internal driving shaft 262, an intermediate driving shaft 261, and an external driving shaft 260, And a coaxial drive shaft arrangement. And may be configured to track the rotation of the drive shafts in order to control the rotation of the drive shafts and corresponding arm links and to rotate the drive shafts in any suitable manner with the motors and / Encoders may be provided. The one or more drive motors may be a harmonic drive motor substantially similar to U.S. Patent Application Serial No. 13 / 270,844, filed October 11, 2011, the disclosure of which is incorporated herein by reference in its entirety. When two transfer arms are mounted on a single base arm link as mentioned above, two additional drive shafts are provided to drive the additional transfer arms through transmissions substantially similar to those described below, May be added to the coaxial drive shaft configuration. The outer drive shaft 260 may be coupled to the base arm link 220 such that the base arm link 220 rotates therewith when the outer drive shaft 260 rotates. In one aspect, the base arm link 220 includes a plurality of base arm links 220 extending substantially axially about the axis X to allow a substantially 360 degree placement of the shoulder axis SX relative to the axes X. [ And can be configured for substantially infinite rotation. The intermediate drive shaft may be coupled to the first drive shaft pulley 280 such that the first drive axis pulley 280 rotates therewith when the intermediate drive shaft 261 rotates. The inner drive shaft 262 may be coupled to the second drive shaft pulley such that the second drive shaft pulley 281 rotates therewith when the inner drive shaft 262 rotates. A second coaxial shaft arrangement may be mounted within the base arm link 220 at least partially at the end of the distal base arm link 220 from the axis of rotation X of the base arm link 220. The second coaxial shaft configuration includes an external drive shaft 271 and an internal drive shaft 270. The inner drive shaft 270 may be coupled to the pulley 282 such that the inner drive shaft 270 rotates therewith when the first shoulder pulley 282 rotates. The outer drive shaft may be coupled to the second shoulder pulley 283 such that the outer drive shaft 271 rotates therewith when the second shoulder pulley 283 rotates. The inner drive shaft 270 (its pulley 282) and the outer drive shaft 271 (and its pulleys 282) can be supported in any suitable manner from the base arm link, And they are independently rotatable independently of each other and are rotatable independently of the base arm link 220. In addition, The first shoulder pulley 282 can be coupled to the first drive shaft pulley 280 by any suitable transmission 291, such as, for example, belts, bands, etc., The inner drive shaft 270 may be driven by a motor of the drive unit 200 corresponding to the intermediate drive shaft 261. The second shoulder pulley 283 can be coupled to the second drive shaft pulley 281 by any suitable transmission 290 so that the external drive shaft 271 can be coupled to the internal drive shaft 262, The transmission 290 may be driven by a motor of the drive 200 corresponding to the transmission 290, which may be substantially similar to the transmission 291. In one aspect, the pulley pairs 280, 282 and 281, 283 each have a 1: 1 (1: 1) drive ratio, while in other aspects the pulley pairs have any other suitable drive ratio . The external drive shaft 271 and the internal drive shaft 270 may be attached to the transfer arm 214 in any suitable manner such that the transfer arm 214 may be stretched and retracted or rotated about the shoulder axis SX. Lt; / RTI > The outer shaft 271 may be coupled to the upper arm link 213 and the inner shaft 270 may be coupled to the front arm link 212 Where the end effector may remain slaved to the upper arm and aligned substantially with the axis of extension and retraction of the transfer arm 214. [ The combined rotation of the shafts 270 and 271 may allow for substantially infinite rotation (e.g., greater than about 360 degrees), or may be independent of rotation of the base arm link 220 It is noted that the transfer arm 214 may be enabled to rotate, thereby allowing the transfer arm 214 to extend along any desired path with respect to the base arm 220.

Referring to Figure 2E, in another aspect, the drive motors 201MB, 201MU, 201MF are arranged along the transfer arm 210 in a manner substantially similar to that described in U.S. Patent No. 7,578,649 the disclosure of which is incorporated herein by reference in its entirety. For example, a single motor 201MB (which may be a harmonic drive motor) may be positioned about the axis X or adjacent the axis X to rotationally drive the base arm link 220. The motor 201MU for driving the upper arm link 213 of the transfer arm 214 is connected to the upper arm link 213 via the upper arm link 213 to drive the upper arm link 213 substantially directly And may be disposed on the base arm link 220 at the shoulder axis SX. The motor 201MF for driving the front arm link 212 of the transfer arm 214 is configured to move the front arm link 212 substantially horizontally to drive the front arm link 212 directly (or to drive through any suitable transmission) And may be disposed on the upper arm link 213 at the elbow axis E. [ As may be realized, in one aspect the end effector 211 may be subject to the upper arm, while in another aspect an additional drive motor may be used to rotate the end effector 211 independently Location. ≪ / RTI >

Referring to Figures 2h, 2i and 2j, a drive motor 201MB (which may be a harmonic drive motor) for rotationally driving the base arm link 220 is driven about the axis X And may be disposed adjacent to the axis X. [ Motors 201MU and 201MF for rotationally driving the front arm link 212 and the upper arm link 213 of the transfer arm 214 can be included in the motor module 201M, Is removably mounted (substantially aligned with the base arm link 22) at the end of the base arm link 220 to form a portion of the base arm link 220, . The motor module 201M may include a housing 201MH having a matching portion 201MS. The motor module 201M may also be used to seal at least portions of the interior of the motor module (as described above) and to allow any particles generated by the motor module to be placed in the motor module Any suitable seals 201SS and shields (not shown), such as, for example, ferro-fluidic seals, and covers (not shown) may be used to substantially prevent contamination of the substrates and processing environment . The mating portion 201MS may be configured to removably mount the motor module 201M to the base arm link 220 in any suitable manner. In one aspect, any suitable seal (s) 289 may be provided between the mating portion 201MS and the base arm such that at least a portion of the interior of the motor module 201M is coupled to the base arm 220 ) At substantially the same pressure and atmosphere as described herein, as will be described below. In this aspect, the motor module includes motors 201MU and 201MF coaxially disposed one above the other to drive the individual shafts 270 ', 271' in the coaxial shaft configuration. The motor 201MU may include a stator 201MUS mounted on the housing 201MH and a rotor 201MUR mounted on the shaft 271 '. The motor 201MF may include a stator 201MFS mounted on the housing 201MH and a rotor 201MFR mounted on the shaft 270 '. To seal the environment in which the stators are located from the environment in which the rotors are disposed, so that the module 201M can be used in a vacuum environment, seals or sleeves (not shown) are provided for each of the stators 201MUS, 201MFS, seals or sleeves 245 may be provided wherein the drive shafts and rotors are disposed in a vacuum environment and the stators 201MUS and 201MFS are disposed outside the vacuum environment. As can be realized, the seals 245 need not be provided if the module 201M is used in an atmospheric environment.

The shaft 270 'may be the inner shaft and may be rotatably supported by the housing 201 MH through any suitable bearings 241. The shaft 271 'may be the outer shaft and may be rotatably supported within the housing 201MH by any suitable bearings 242. It is noted that the bearings 242 of the outer shaft 271 'may be supported by the bearings 241 of the inner shaft 270' in any suitable manner (e.g., Coupled to the bearings). An example of such a support arrangement is provided in U.S. Patent Application Serial No. 13 / 417,837, filed March 12, 2012, the disclosure of which is incorporated herein by reference in its entirety. By supporting the outer shaft 271 'with the inner shaft 270', alignment of the shafts 270 ', 271' is maintained, so that the motor module 201M is modularized It is not necessary for the shafts to be substantially aligned when the motor module 201M is mounted on the base arm link 220. [

Any suitable encoders 240A and 240B may be provided to track the rotational movement of the shafts 270 'and 271' to provide the housing 201MH (and encoder tracks ). ≪ / RTI > The encoders 240A and 240B may be coupled to a suitable controller, such as, for example, a controller 120, which may be adapted to transmit appropriate encoder signals to the controller to control rotation of the respective drive shafts and arm links . Suitable control wires for the encoders 240A and 240B and the motors 201MU and 201MF can be passed for connection to the controller 120 as can be realized, The housing 201MH may include a through hole through the matching portion 201MS. The interior of the base arm link 220 may be maintained as a non-vacuum environment that allows passage of the wires through the base arm link 220 to the controller 120, as noted above. In other aspects, the encoders and motors may be coupled to the controller via any suitable wireless connection.

Referring to Figures 3a and 3b, a portion of a processing device is shown in accordance with aspects of the disclosed embodiment. Wherein the transfer chamber 126 is a linear elongated transfer chamber that is substantially similar to the transfer chamber 125 but the transfer chamber 126 is configured to have a different processing station 140 configuration than the transfer chamber 125 . For example, both ends of the transfer chamber 126 are substantially identical so that each end is aligned with two processing stations 140A, 140B or two load locks 102A, 102B (or a combination thereof) While the ends of the transfer chamber 125 are different from each other such that one end can mate with two loadlocks (shown in Figure 1) or two process modules (not shown) and the other end And is configured to match three process modules 140A, 140B, 140C or one load lock (see FIG. 5B). It should be understood that in other aspects the transfer chambers may have any suitable configuration for attaching any suitable number of process modules and / or loadlocks in any suitable arrangement. In the aspects illustrated in Figures 1, 3a and 3b of the disclosed embodiment, the transfer chambers 125 and 126 are of sufficient length so that two process modules 140 are provided in each of the transfer chambers 125 and 126 And is arranged linearly on the lateral side. The transfer robot 130 is placed in the transfer chamber 125, 126 such that the drive rotation axis X is substantially disposed between the substrate transfer paths TP into the process modules 140S1, 140S2, and 140S3, 140S4. . The drive shaft X is moved by any suitable distance such that the shoulder axis SX is disposed at the point 399 in the transfer chamber 125, 126 when the base arm link 220 is rotated in the first direction May be offset from a centerline (CL) of the transfer chamber (125, 126). The point 399 may be located, for example, at the intersection of the transfer paths into the processing stations 140A, 140B, 140S1, 140S3, or in other words, 140D may be located at the center of the cluster formed by the processing stations 140A-140D relative to the center of the cluster formed by the processing stations 140A-140D, 140B, 140S1, 140S3 or the chamber 125 of FIG. The shoulder axis SX may be disposed at a point 398 in the transfer chamber when the base arm link is rotated in a second direction. The point 398 may be located, for example, at the intersection of the transport paths into the processing stations 140S2, 140S4 and the loadlocks 102A, 102B, or in other words the processing stations 140S2, 140S4, And the load locks 102A, 102B. In other aspects, the drive 200 may be disposed in any suitable position within the transfer chamber 125, 126.

4A and 4B illustrate that the end effector of the transfer arm 214 is accessible to each of the processing stations 140S2 and 140S4 and the load locks 102A and 102B, The base arm link 220 is positioned so that it is disposed in the base arm link 398, as shown in FIG. For illustrative purposes only, the transfer arm 214 is shown in Figure 4A as a SCARA type arm with a dual blade (double ended) end effector, while in Figure 4B, It is noted that the arm 214 is shown as a SCARA type arm with a single blade end effector. In other aspects, the transfer arm 214 may have any suitable configuration. In an aspect, the independent rotation of each of the upper arm link and the front arm link may enable the transfer arm to extend on opposite sides of the shoulder axis SX, such that the shoulder axis SX, The end effector EE1 can access the processing station 140S4 as a unit and the end effector EE2 can access the processing station 140S2 without rotation of the transfer arm 214 about the processing station 140S2 It is also noted that it can be done. The rotation of the transfer arm 214 about the shoulder axis SX as a unit can be enabled by the independent rotation of the transfer arm 214 relative to the base arm 220, It is also noted that the end effector EE1 can access the processing station 140S2 and the end effector EE2 can access the processing station 140S4. Fast swapping of the substrates as can be realized is achieved by inserting one end effector into one of the processing stations, rotating the transfer arm about the shoulder axis SX, Or by inserting another end effector into the one of the processing stations. Referring to FIG. 4B, the transfer arm 214 can rotate about the shoulder axis SX as a unit by independently rotating the transfer arm 214 relative to the base arm 220 So that the end effector EE3 of the single blade SCARA arm can access both of the two processing stations 140S2 and 140S4. As described herein, the driving units of the transfer robots include three independent rotational axes defining three degrees of freedom. Wherein one degree of freedom of the drive moves the at least one base arm horizontally to carry at least one transfer arm in the transfer chamber, the two degrees of freedom of the drive extend the at least one transfer arm, To actuate the at least one transfer arm to retract the transfer arm of the two end effectors and to swap the two end effectors.

5B and 5C, the transfer arm 214 is shown as a double arm SCARA transfer arm. In this aspect, the double-arm SCARA transfer arm may be independently driven with two drive motors (e.g., via shafts 270, 271) using, for example, mechanical switches or a lost motion mechanism , Which is a manner substantially similar to that described in U.S. Patent No. 7,946,800 and U.S. Patent Application Serial No. 12 / 117,415, filed May 8, 2008, the disclosures of which are incorporated herein by reference in their entirety Lt; / RTI > For example, a first one of the drive shafts 270, 271 is connected to the housing of the transfer arm to rotate the double arm SCARA transfer arm about the shoulder axis SX as a unit While the second one of the drive shafts 270 and 271 is coupled to both arms through the mechanical switch so that the second drive shafts 270 and 271 in one direction Rotation causes the first one of the arms to extend while the second arm remains in the substantially retracted configuration and rotation of the second drive shaft (270, 271) in the opposite direction causes the first arm to substantially The second arm is allowed to stretch while remaining in the retracted configuration. The first and second driving shafts 270 and 271 may be substantially simultaneous rotated so that the double arm 241 around the shoulder axis SX as a unit, The rotation of the SCARA transfer arm can be provided. It is noted that the end effectors may be subordinate to the upper arm in any suitable manner.

In another aspect, the dual SCARA transfer arm may be driven by two motors, wherein the upper arm of the first SCARA arm and the front arm of the second SCARA arm are actively coupled to the shaft 270 (i.e., a common drive motor), the upper arm of the second SCARA arm and the front arm of the first SCARA arm are drivably coupled to the shaft 271 (i.e., a common drive motor). Rotation of the shafts 270, 271 in the same direction may cause rotation of the double arm SCARA transfer arm about the shoulder axis SX as a unit and may cause rotation of the shafts 270, The rotation of the arms 270, 271 can cause the arms to stretch or contract, the manner being substantially similar to that described in U.S. Patent Application No. 13 / 293,717, filed November 10, 2011, The disclosure of U.S. Patent Application No. 13 / 293,717 is incorporated herein by reference in its entirety. It is noted that the end effectors may be subordinate to the upper arm in any suitable manner.

In another aspect, the double arm SCARA transfer arm may be driven using three drive motors through the shafts 270, 271 and one additional shaft (not shown) (e.g., in this case, Has four drive axes that are independent of any Z-axis drive axes), which is described in U.S. Patent No. 6,485,250 and U.S. Patent Application Serial No. 13 / 417,837, filed March 12, , The disclosures of which are incorporated herein by reference in their entirety.

6 and 6A, the transfer arm 214 is shown as a bi-symmetric frog leg transfer arm. The frog leg transfer arm may include drive arm links 651, 652 and driven arm links 661-664. The driven arm links 661 and 664 connect the end effector EE4 to the drive arm links 651 and 652, respectively. The driven arm links 662 and 663 connect the end effector EE 5 to the drive arm links 651 and 652. The drive arm link 651 may be coupled to the shaft 270 (Figure 2b) in any suitable manner and the drive arm link 652 may be coupled to the shaft 271 (Figure 2b) in any suitable manner, Such that rotation of the drive shafts in opposing directions causes extension and contraction of the end effector EE4 to and / or from the processing station 140C, and / or rotation of the end effector EE5, And the manner is substantially similar to that described, for example, in U.S. Patent Nos. 5,899,658 and 5,720,590, the disclosures of which are incorporated herein by reference in their entirety . Rotation of the shafts 270, 271 in the same direction can cause rotation of the frog leg transfer arm about the shoulder axis SX, Rotation causes elongation and contraction of the end effector EE5, for example, to and from the processing station 140C, and expansion and contraction of the end effector EE4, for example, to / from the processing station 140G. , It is noted that the manner is substantially similar to that described, for example, in U.S. Patent Nos. 5,899,658 and 5,720,590. As can be realized, the rapid swap of substrates inserts one end effector into one of the processing stations, rotates the transfer arm about the shoulder axis SX, and then rotates the processing stations Or by inserting another end effector into the one of the two end effectors.

Referring now to Figures 5A, 5B, and 5C, processing apparatuses of different configurations, including elongated dual cluster transfer chambers, are shown in accordance with aspects of the disclosed embodiments. In some aspects, the processing device may include multiple levels of processing stations and / or loadlocks (e.g., superimposed on each other) as described with respect to Figures 11a-11c so that processing stations and / It is also noted that the number of locks can be substantially increased without increasing the contour of the processing device. 5A, a transfer chamber 126 is shown having a different processing station configuration than the transfer chamber 125 (e.g., a transfer chamber 125 ), Two processing stations are disposed at the end of the transfer chamber. 5b shows a tandem transfer chamber configuration wherein two transfer chambers 125 are arranged in a single load lock (not shown) so that the environments within the joined transfer chambers can be selectively sealed from each other 502, respectively. In other aspects, the two transfer chambers may be connected in any suitable manner in which the environments within the transfer chambers communicate with each other. Another configuration is shown in Figure 5c wherein the two transfer chambers 126 are separated by two load locks 502A and 502B so that the environments in the combined transfer chambers can be selectively sealed from each other Lt; / RTI > In other aspects, the two transfer chambers may be connected in any suitable manner in which the environments within the transfer chambers communicate with each other. Any suitable number of transfer chambers 125, 126 as may be realized may be constructed in any suitable manner to form an associated transfer chamber with process modules, load locks, EFEMs of any suitable length and configuration , And may be coupled to each other through any suitable number of load locks. 5d, the three transfer chambers 126 are joined together to form a combined linear elongated transfer chamber such that each end of the combined linear elongate transfer chamber is in a separate miniature environment (EFEM) 106A, 106B, but in a manner substantially similar to that shown in Figures 5B and 5C, the transfer chambers 125 may be coupled to each other or with transfer chambers 126 It should be appreciated that the combined linear, elongated delivery chambers may be combined to have end portions with respective miniature environments 106A, 106B. In this aspect, the substrates may be introduced into the processing apparatus at one end of the processing apparatus through one of the mini environments 106A, 106B and may be introduced into the processing apparatus through another of the mini environments 106A, And may be removed from the processing device at the end. A compact environment substantially similar to the mini environments 106A, 106B may be substituted for one of the processing stations 140 as may be realized, such that the ends of the combined linear elongated transfer chamber The substrates can be introduced into or removed from the processing apparatus. Similarly, a processing apparatus with a single linear elongate delivery chamber as shown in Figures 1 and 5a may be provided between the ends of the chamber 125, 126 in a manner substantially similar to that described with respect to Figure 5d Or a small environment disposed at each end of the chamber 125, 126.

Referring now to FIG. 6, in this aspect, the tool 600 includes a linear elongated transfer chamber 625 (shown as an elongated triple cluster transfer chamber, e.g., one cluster is connected to the processing stations 140C-140G) One cluster is formed by processing stations 140B and 140H and one cluster is formed by processing stations 140A and 140I and load locks 102A and 102B) Type tool. The tool 600 may be substantially similar to the tool station 100, and like features have the same reference numerals. In some aspects, the tool 600 (and portions of the tool shown in Figures 8A-9C) may include multiple levels of processing stations and / or load locks (e.g., overlapping with each other) ) So that the number of processing stations and / or loadlocks can be increased without substantially increasing the contour of the processing device.

In general, the vacuum back end 103 includes a transfer chamber 625, one or more processing stations (s) 140A-140I, commonly referred to as processing station (s) 140, and a transfer robot 630 . The transfer robot 630 may be disposed in the transfer chamber 625 to transfer substrates between the load lock (s) 102 and the various processing stations 140, as will be described below . In one aspect, the transfer robot 113 of the small environment 106 may be substantially similar to the transfer robot 630, while in other aspects the transfer robot 113 may be any suitable transfer robot It is noted.

7A and 7B, the transfer robot 630 includes a driving unit 700 and a transfer arm unit 710. The driving unit 700 includes a housing 701 and a mounting flange 702 And the mounting flange 702 is configured to mount the transfer robot 630 in one of the atmospheric front end 101 or the vacuum back end 103. The transfer arm portion 710 may include a base arm or an articulated boom 720 and a transfer arm 214 mounted on the base arm 720 rotatably in the shoulder axis SX. have. The base arm 720 may include an upper arm link 721 and a front arm link 722 rotatably coupled to the upper arm link 721. In one aspect, the base arm 720 includes an aligner 230 (FIG. 2C) mounted on one of the upper arm link 721 or the front arm link 721 in a manner substantially similar to that described above. . It is noted that the transfer arm 214 may be substantially similar to that described above and may be rotatably coupled to the front arm link 722 of the base arm 720. [ It is also noted that the transfer arm will generally be referred to herein as the transfer arm 214 and will be shown in various figures as having different transfer arm configurations. For example, in FIG. 7A, the transfer arm 214 includes an upper arm link 213, a front arm link 212 rotatably coupled to the upper arm 213, and a front arm link 212 rotatably coupled to the front arm link 212 Type arm with an end effector 211 coupled to the transfer arm 214. However, as mentioned above, the transfer arm 214 can be any suitable type of transfer arm with two degrees of freedom and one or more end effectors, Lt; / RTI >

The driving unit 700 may be substantially similar to the driving unit 200 described above. In one aspect, the driving unit 700 is configured to move the transfer arm unit 710 linearly in a direction substantially perpendicular to the axis of extension and contraction of the transfer arm unit 710, And may include a similar Z-axis driver 203. In other aspects, the driver 700 may not include a Z-axis driver. It is noted that the drive 700 may be disposed at any suitable position within the transfer chamber to allow the transfer arm to be accessible to each of the load locks and processing stations coupled to the transfer chamber. For example, in FIG. 6, the drive 700 is shown as being substantially aligned with the substrate transfer path into the processing stations 140B, 140H, but in other aspects the drive may be disposed at any suitable location.

The motors 201MB, 201MU and 201MF of the drive unit 700 drive the coaxial drive shaft configuration with the internal drive shaft 262, the intermediate drive shaft 261 and the external drive shaft 260 . ≪ / RTI > The outer drive shaft 260 is rotated about the drive rotation axis X so that the upper arm link 721 rotates together with the outer drive shaft 260 when the outer drive shaft 260 rotates. May be coupled to the link 721. The front arm link 722 of the base arm 720 may be dependent on the housing 701 of the driving unit 700 so that the shoulder rotation axis SX of the front arm link 722 (E.g., a single drive motor is coupled to the base arm 720 to move the transfer arm along the length of the transfer chamber), and the base arm 720 is constrained to pass along a substantially linear path as the base arm 720 is stretched and contracted. Lt; RTI ID = 0.0 > and / or < / RTI > The drive shaft pulley 780 is mounted substantially concentrically with the drive rotation axis X such that the drive shaft pulley 780 is rotationally stationary with respect to the upper arm link 721, And may be grounded in any suitable manner, for example, to the housing 701 of the drive portion 700 (or any other suitable portion of the transfer device 630). In other aspects, the drive shaft pulley 780 may be rotationally fixed in any suitable manner. The slave pulley 783 can be rotatably mounted in the elbow axis EX of the base arm 720 in any suitable manner, such as by any suitable bearings EXB. The slave pulley 783 is connected to the front arm link 722 by a shaft 763, for example, so that the front arm link 722 rotates therewith when the slave pulley 783 is rotated. Lt; / RTI > The pulleys 780, 783 may be coupled to each other in any suitable manner, such as by any suitable transmission 791 including, for example, bands, belts, and the like. In one aspect, the pulleys 780, 783 may be coupled to each other with at least two belts or cables terminating on opposite ends of the pulleys, and then slack and backlash may be substantially And may be tensioned against each other. In other aspects, any suitable transmission member may be utilized to couple the pulleys 780, 783. (2: 1) from the drive rotation axis X to the elbow rotation axis EX between the pulleys 780, 783 to drive the linear movement of the shoulder axis SX of the front arm link 722 A pulley ratio can be used. Any suitable pulley ratio may be utilized in other aspects. As can be realized, the dependent nature of the front arm link 722 allows for extension and retraction of the base arm with a single drive motor through the shaft 260, while the shoulder axis SX can be moved Is constrained to pass along a substantially linear path (P) in the chamber (625).

A coaxial spindle (drive shaft configuration) with an outer shaft 271 and an inner shaft 270 is configured to rotate about the shoulder axis of the front arm link 722 in a manner substantially similar to that described above with respect to FIG. (SX). The outer shaft 271 may be driven by the intermediate drive shaft 261, for example, in any suitable manner. For example, when the intermediate drive shaft 261 is rotated, the drive shaft pulley 781 may be coupled to the drive shaft 261 such that the drive shaft pulley 781 rotates with the drive shaft pulley 781. An idler pulley 784 may be disposed within the upper arm link 721 for rotation about an elbow axis EX. The idler pulley 784 can be coupled to the shaft 765 such that the shaft 765 rotates therewith when the idler pulley 784 rotates. The shaft 765 and the pulley 784 may be supported in any suitable manner, such as with any suitable bearings (EXB). The idler pulley 784 can be coupled to the pulley 781 in any suitable manner, such as through any suitable transmission 790 substantially similar to those described above. A second idler pulley 787 may be coupled to the shaft 765 within the front arm link 722 such that the pulleys 784 and 787 rotate in unison. A shoulder pulley 789 can be coupled to the shaft 271 so that the shaft 271 and the shoulder pulley 789 rotate together. The second idler pulley 787 can be coupled to the shoulder pulley 789 in any suitable manner, such as through any suitable transmission substantially similar to those described above.

The inner shaft 270 of the coaxial spindle may be driven, for example, by the inner drive shaft 262 in any suitable manner. The drive shaft pulley 782 may be coupled to the drive shaft 262 such that, for example, the drive shaft pulley 782 rotates therewith when the internal drive shaft 262 rotates. The idler pulley 785 may be disposed within the upper arm link 721 for rotation about the elbow axis EX. The idler pulley 785 may be coupled to the shaft 764 such that the shaft 764 rotates therewith when the idler pulley 785 rotates. The shaft 764 and pulley 785 may be supported in any suitable manner, such as with any suitable bearings (EXB). The idler pulley 785 may be coupled to the pulley 782 in any suitable manner, such as through any suitable transmission 792 substantially similar to those described above. A second idler pulley 786 may be coupled to the shaft 764 within the front arm link 722 such that the pulleys 785 and 786 rotate together. A shoulder pulley 788 may be coupled to the shaft 270 such that the inner shaft 270 and the shoulder pulley 788 rotate together. The second idler pulley 786 can be coupled to the shoulder pulley 788 in any suitable manner, such as through any suitable transmission 793 substantially similar to those described above. Although the pulleys 781, 784, 782, 785, 786, 788, 787, 789 may have individual 1: 1 (1: 1) drive ratios, any suitable drive ratios may be used in other aspects . In other aspects, drive motors 201MU and 201MF may be disposed along the transfer arm 214 in a manner substantially similar to that described above with respect to Figure 2E. In still other aspects, the drive motors 201MU and 201MF may be disposed in the motor module in a manner substantially similar to that described above with respect to Figures 2h-2j. As can be realized, the transfer arm 214 is placed on the top and / or bottom of the base arm 720 in a manner substantially similar to that described above with respect to Figures 2d and 2g. .

In order to allow the transfer arm 214 to rotate or elongate and contract about the shoulder axis SX as a unit, the external drive shaft 271 and the internal drive shaft 271 may be rotated in any suitable manner, (270) can be coupled to the transfer arm (214).

7C-7E, the motor (s) for driving the base arm 720, for example, may be disposed at any suitable one or more positions of the base arm 720 . For example, in one aspect, a linear or Z-axis driver 203 may be used to drive a lift shaft 203LS to provide a linear Z-axis movement in the direction of arrow 799 to the base arm May be disposed at the shoulder axis X of the base arm 720 or adjacent the shoulder axis X. [ A first motor 3800M1 may be provided on the lift shaft 203LS, for example, in any suitable manner to drive the rotation of the upper arm link 721. [ The motor 3800M1 may be disposed at least partially within the upper arm link 721 while in other aspects the motor 3800M1 may be mounted on the outer surface of the upper arm link. In one aspect, the motor 3800M1 may directly drive the upper arm link, while in other aspects the motor 3800M1 may drive pulley 3800P1. The pulley 3800P1 may be coupled to the pulley 3800P2 in any suitable manner, such as as one or more bands, belts, chains, and the like. The pulley 3800P1 rotates about the shoulder axis X of the base arm 720 as the motor 3800M1 rotates the pulley 3800P1 so that the upper arm link 721 rotates about the shoulder axis X of the base arm 720, And can be fixed to the arm link 721. The second motor 3800M2 may be disposed at the elbow axis EX of the base arm 720. [ The motor 3800M2 may be at least partially disposed within at least one of the upper arm link 721 and the front arm link 722. [ In one aspect, the motor 3800M2 may be coupled to the front arm link 722 in any suitable manner. As the upper arm link 721 and the front arm link 722 rotate, the shoulder axis SX of the transfer arm 214 passes along a substantially straight path in a manner substantially similar to that described below , Motors 3800Ml, 3800M2 may be driven in any suitable manner and by any suitable controller. In this aspect, the front arm link 722 may include a forearm base section 722B and an interchangeable forearm spacer section 722S. One end of the front arm spacer 722S may be coupled to or otherwise fixed to the front arm base 722B while the other end of the front arm spacer 722S may be coupled to the motor module 201M Or otherwise fixed. Any suitable number of exchangeable front arm spacer portions 722S1, 722S2 may be provided, as may be realized, wherein each front arm spacer portion has a different length than the other front arm spacer portions, The length of the arm link 722 can be scaled. As may be realized, a spacer link may be provided in the upper arm link 721 in a manner substantially similar to that described above so that the length of the upper arm link 721 may be any suitable And may be scaled in length.

8A-8C, another transfer chamber 626 substantially similar to the transfer chamber 625 is shown. However, the transfer chamber 626 includes, for example, eight processing stations 140A-140H, wherein one of the clusters includes processing stations 140C, 140D, 140E, 140F, The other of the chambers includes processing stations 140B and 140G while the remaining clusters include processing stations 140A and 140H and loadlocks 102A and 102B. 8A-8B, the base arm 720 is shown, for example, in three positions, the three positions defining the shoulder axis SX of the transfer arm 214 in a central portion , The transfer arm 214 can pick substrates into a respective processing station / load lock of the respective cluster in a manner substantially similar to that described above. 9A-9C show a transfer arm 214 disposed on the base arm 720 at a location within the transfer chamber 626 for access to the processing stations 140A, 140H and load locks 102A, Respectively. 9A) with a double-bladed end effector (FIG. 9A), a bilateral symmetrical frog leg transfer arm (FIG. 9B), a double arm SCARA arm (Fig. 9c) It should also be noted that any suitable transfer arm, such as a two-degree-of-freedom transfer arm, as described above, may be mounted to the base arm 720 in any suitable manner.

Figures 10a, 10b and 10c illustrate processing apparatuses of different configurations, including elongated triple cluster transfer chambers, in accordance with aspects of the disclosed embodiments. 10A shows a single transfer chamber configuration substantially similar to that shown in FIG. 6, wherein the transfer chamber 626 is shown in FIG. 10A. 10B, there is shown a tandem transfer chamber configuration in which two transfer chambers 625 are joined together by a single load lock 1002. Figure 10C shows another configuration in which two transfer chambers 625 and 626 are coupled together by two load locks 1002A and 1002B. Any suitable number of transfer chambers 625, 626 may be coupled to one another in any suitable manner to provide any suitable configuration and length of process modules, load locks, and EFEM, Can be formed. For example, referring to FIG. 10d, three transfer chambers 626 are coupled together so that a combined linear, elongated transfer chamber is formed so that each end of the combined linear elongate transfer chamber has a respective The transfer chambers 625 may be coupled to each other in a manner substantially similar to that illustrated in Figures 10B and 10C or may be coupled together with the transfer chambers 626 to form individual mini environments 106A, 106A, 106B, respectively, as shown in Figures < RTI ID = 0.0 > 1, < / RTI > In this aspect, the substrates may be introduced into one of the processing devices at one end of the processing device through one of the small environments 106A, 106B and at another end through the other of the small environments 106A, 106B, / RTI > As can be realized, a miniature environment substantially similar to the mini environments 106A, 106B can replace the processing stations 140, so that the substrate (s) between the ends of the combined linear elongated transfer chamber May be introduced into or removed from the processing device. Similarly, a processing device with a single linear elongated delivery chamber as shown in Figures 6 and 10a may be configured to move between the ends of the chamber 625, 626 in a manner substantially similar to that described with respect to Figure 10d, Or at the end of each of the chambers 625 and 626. As shown in FIG.

37, in one aspect of the disclosed embodiment, the base arm may include more than two arm links 721,722. For example, the base arm 720 'may be substantially similar to that described above with respect to FIG. 7A and may include a driver 700, an upper arm link 721 rotatably coupled to the driver 700' And a front arm link 722 coupled to the upper arm link 721 rotatably. In this aspect, the base arm further includes a wrist link 723 coupled to the front arm link 722 rotatably. The transfer arm 214 is mounted on the motor module 201M and the motor module 201M can be coupled to the end of the wrist link 723. [ 7C-7E, the shoulder axis X of the base arm 720 'may be mounted to the Z-drive lift shaft 203LS. The lift shaft 203LS may be drivably coupled to a Z-axis driver 203 disposed in the driving unit 700 '. In a manner substantially similar to that described above with respect to Figures 7C-7E, the motor 3800M1 is configured to rotate the upper arm link 721 in substantially the same manner as described above, May be disposed at the shoulder axis X. The motor 3800M2 may be disposed at an elbow axis EX of the base arm 720'wherein the motor is at least partially positioned between the upper arm link 721 and the front arm link 722 May be disposed within one or more of them. The motor 3800M2 may be operatively coupled to a drive pulley substantially similar to the pulley 3800P1 and may be disposed in the elbow axis (in a manner substantially similar to the motor 3800M1 of Figures 7C-7E) have. A driven pulley substantially similar to pulley 3800P2 may be disposed at the wrist axis WX of base arm 720'and may be disposed in any suitable manner, Lt; / RTI > A third motor 3800M3 that may be substantially similar to motor 3800M2 may be disposed at the wrist axis WX of the base arm 720' so that the motor 3800M2 may be positioned at least partially The arm link 722 and the wrist link 723. The motor 3800M3 is connected to the motor 3800M2 and the front arm link 722 as described above (see FIGS. 7C-7E) to rotate the wrist link 723 about the wrist axis WX Such as a wrist link 723, as shown in FIG. The motors 3800M1, 3800M2, and 3800M3 can be controlled in any suitable manner by any suitable controller so that the transfer arm 214 can be moved relative to the base arm 720 Is conveyed along a substantially straight path by the base arm 720 'in a manner substantially similar to that described above.

11, 12 and 13, a semiconductor tool station 1100 is shown in accordance with aspects of the disclosed embodiments. In this aspect, the tool station 1100 includes a front end 101, for example, the front end 101 includes a small environment 106 and loading port modules 105 that are substantially similar to those described above. . The tool station also includes a vacuum back end 1103 connected to the front end 101 via one or more load locks 102A, 102B. The back end 1103 may be substantially similar to the back end 103 described above, but in this aspect the back end 1103 includes a substantially rectangular transfer chamber 1125. [ One side of the transfer chamber 1125 is connected to the front end 101 via the load locks 102A and 102B and the other sides of the transfer chamber 1125 are connected to any suitable number of processing stations 1140A -1140F. In this aspect there are two processing stations connected to the respective sides of the transfer chamber 1125, but in other aspects any suitable number of processing stations may be connected to each of the respective sides. In other aspects, the loadlocks or buffer stations are arranged in place of one or more processing stations, for example in a manner substantially similar to that described above with respect to Figures 5b-5d and 10b-10d, Two or more substantially rectangular transfer chambers 1125 are connected together. It is noted that the processing stations 1140A-1140F may be substantially similar to the processing stations described above.

11A-11C, it is contemplated that the processing stations 1140 and load locks 102 may be arranged in a stacked configuration (e. G., Stacked on top of each other) the transfer chamber 1125 can be configured to be connected to the transfer chamber 1125 in a two dimensional array, one above the other and side by side. For example, referring to FIG. 11A, in one aspect, the loadlocks 102 may overlap one another (and may be arranged side by side to form an array of loadlocks), and the processing stations 1140 may overlap each other (And arranged side by side so that an array of processing stations can be formed). Referring to FIG. 11B, in another aspect, the load locks 102 may be disposed one above the other (and arranged side by side to form an array of load locks), and the processing stations 1140 may be a single horizontal And may be arranged in a single horizontal row. Referring to FIG. 11C, in another aspect, the loadlocks 102 may be arranged in a single horizontal row, and the processing stations 1140 may be placed over one another (and arranged side by side, An array can be formed). In other aspects, the loadlocks 102 and processing stations 1140 may be connected to the transfer chamber 1125 in any suitable manner. One or more of the processing stations and / or load-locks in Figures 1, 3a-6, and 8a-10d may be configured in any of a number of ways, such as any of the single rows and stacks in a manner substantially similar to that described above with respect to Figures 11A- It should be noted that they may be arranged in combination.

The transfer robot 1130 may be substantially similar to the transfer robot 130 or 630 described above and may be disposed in the transfer chamber 1125 to be rotatable about the rotation axis X11. For illustrative purposes, the transfer robot 1130 is shown as being substantially similar to the transfer robot 130. It is noted that while the rotational axis X11 is shown as being substantially centered within the transfer chamber 1125, in other aspects the rotational axis may be disposed at any suitable position within the transfer chamber 1125 . 11 is shown as a single SCARA arm and in Figure 12 the transfer arm 1130R1 is shown as a double SCARA arm and in Figure 13 the transfer arms 1130R1 and 1130R2 are shown as a single SCARA arm and a double SCARA, all of which are substantially similar to the individual arm types described above for the transfer arm 214, 214 '. However, in other aspects (as described above, for example, each robot includes a single SCARA, wherein each robot includes a dual SCARA, one robot includes a single SCARA and the other includes dual SCARAs Any suitable combination of transfer arm types (e.g., each arm including a frog leg arm, etc.) may be disposed on the base arm 220 of the individual transfer robots 1130A, 1130B. Independent rotation of the transfer arm 214 relative to the base arm 220 causes the axes of extension and contraction of the individual transfer arms to move relative to each of the processing stations 1140A-1140F and the load locks 102 It is noted that any of the transferring arms may transfer substrates from any of the processing stations and loadlocks and from any of the transferring arms.

Referring to Figures 2g, 2f, and 13, more than one transport robot may be disposed in any of the transport chambers described herein. For example, in one aspect, two transfer robots 1130A, 1130B are disposed within the transfer chamber 1125, while in other aspects any suitable number of transfer robots may be disposed within the transfer chamber 1125. [ In one aspect, one transfer robot 1130A may be mounted to the top (TCT) (FIG. 2G) of the transfer chamber 1125 while the other transfer robot 1130B may be mounted at the bottom of the transfer chamber 1125 bottom; TCB) (Fig. 2g). The axes X11 of each of the transfer robots 1130A and 1130B are shown substantially in line with each other while in other aspects the axes X11 of each of the transfer robots are connected to each other Such that the axes X11 are disposed on substantially opposite ends of the transfer chamber or have any suitable spatial relationship with respect to each other. In another aspect, each of the transfer arms 1130A and 1130B may be disposed coaxially and connected to the common driver 200 as shown in FIG. 2F. In this aspect, the drive unit will include a suitable coaxial drive shaft arrangement (and corresponding motors) for driving at least the base arms 220, 220 ', wherein the transfer arms 214, 214' Are arranged to drive the transfer arm 214, 214 'as described above.

Referring now to Figure 13A, a portion of a processing device is shown. The transfer chamber 1125 includes closable ports 1196A-1196H, as can be seen in the figure, and the closable ports 1196A-1196H include process modules, load locks, Or any other suitable substrate processing equipment to the transfer chamber 1125. In this aspect, the transfer device 1199 in the transfer chamber 1125 may be a hub type transfer device. For example, a rotating hub 1199H may be disposed at any suitable position within the transfer chamber 1125. [ The hub 1199H may be rotatably driven in any suitable manner by any suitable actuator. In this aspect, the hub 1199H is illustrated as having four hub couplings 1199C, but in other aspects the hub may have any suitable number of hub couplings. Hub spacer links 1198 (which may be substantially similar to the spacer links 722S described above) may be coupled to a respective one of the hub couplings 1199C. One end of the hub spacer link 1198 is coupled to the hub coupling 1199C and the other end of the hub spacer link 1198 can be coupled to the motor module 201M, Any suitable transfer arms 214A, 214B (which may be substantially similar to the transfer arms) are mounted to the motor module 201M. The hub 1199H may be indexed in the direction of arrow 1197 rotatably to move the transfer arms 214A and 214B from the pair of ports to the other pair of ports, The ports of the pairs are disposed at the corners of the transfer chamber 1125. The transfer arms 214A and 214B disposed at the desired port can be extended and retracted by the motor module 201M to transfer substrates to and from the transfer chamber 1125. [ In other aspects, the transfer arms 214A, 214B may be positioned to approach a single port. In an aspect, a substrate holding station 1199S may be disposed on the hub 1199H. The substrate holding station 1199S may be a buffer, an aligner, or any other suitable wafer holding station. The substrate holding station may enable wafer transfer between the transfer arms 214A, 214B.

17, there is shown a semiconductor tool station 1100 ', which is substantially similar to the semiconductor tool station 1100. As shown in FIG. However, there are four load locks 1702A-1702D coupled to the transfer chamber 1125 in this aspect. In other aspects, any suitable number of load locks may be coupled to the transfer chamber 1125. Each of the load locks 1702A-1702D, as can be seen in FIG. 17, may include a transfer robot and may include a plurality of load locks (not shown) Lt; / RTI > The substrate cassette 110 may be configured such that the interior of the substrate cassette 110 is kept vacuum when coupled to the load locks 1702A-1702D, It is noted that the load lock may be configured to circulate the internal environment of the substrate cassette at each time that it is transported between chambers 1125.

Referring now to FIG. 14, a semiconductor tool station 1400 is shown. The tool station 1400 may be substantially similar to the tool station 1100 described above, but in this aspect the transfer chamber is formed by individual transfer chambers 1125A-1125D, 1125D are rectilinearly arranged to transport substrates between the loadlocks 102A, 102B and the processing stations 1140A-1140F. This aspect includes a transfer chamber that is communicatively coupled to one another via loadlocks and / or buffer stations 1401-1404 to form transfer chambers of a two-by-two array or grid, There are four transfer chambers 1125A-1125D. In other aspects, any suitable number of transfer chambers may be provided and coupled to each other to provide for the transfer of any suitable sized linear transfer chambers (e.g., transfer chambers of N x M grids, where N and M are integers) . As can be realized, the tool station 1400 (and other tool stations described herein) may include multiple levels of substrate holding stations, as described with respect to Figures 11A-11C, So that the grating becomes a three-dimensional grating (transfer chambers of N x M gratings with Y vertically spaced levels of substrate holding stations). Each transfer chamber is described in U.S. Patent Application Serial No. 11 / 442,511, filed May 26, 2006, and U.S. Patent Application No. 11 / 679,829, filed February 27, 2007, and U.S. Patent No. 7,458,763, And may be modular in a manner substantially similar to what has been described, the disclosures of which are incorporated herein by reference in their entirety. It is noted that when the load locks communicatively engage the transfer chambers 1125A-1125D, the internal environment of each transfer chamber can be selectively sealed from the internal environment of the other transfer chambers. As can be realized, each transfer chamber 1125A-1125D can include a transfer arm 1430 substantially similar to the arm 214 described above. The transfer arms transfer substrates (e.g., robot to robot transfer) between the transfer chambers or directly between the robots via the loadlocks and / or buffer stations 1401-1404 . In other aspects, the transfer chambers 1125A-1125D may comprise any suitable transfer arm for transporting substrates through the individual transfer chambers to the processing stations and / or to the loadlocks associated therewith.

Referring to FIG. 14A, a semiconductor tool station 1400 " is shown that is substantially similar to the semiconductor tool station 1400. FIG. In this aspect, two of the transfer chambers 1125A and 1125D are replaced by a transfer chamber 1125E. The transfer chamber 1125E includes two transfer robots 1450 and 1451 in a single chamber. The transfer robots 1450 and 1451 may be substantially similar to those described above. In one aspect, the transfer arm (or any other one (s) of the transfer arms (s) described herein) on one or more transfer robots of the transfer robots 1450, 1451 is an unequal length arm Links (the upper arm may be shorter or vice versa than the front arm), which method is substantially similar to that described in U.S. Patent Application No. 11 / 179,762, filed July 11, 2005 , The disclosure of which is hereby incorporated by reference in its entirety. Wherein the transfer chamber 1125E includes two ends 1125E1 and 1125E2 and sides extending between the ends 1125E1 and 1125E2. The transfer chamber 1125E is communicatively coupled to three load locks 102A-102C on one side and is communicatively coupled to two transfer chambers 1125B, 1125C on the other side. In other aspects there may be more or less than three loadlocks communicatively coupled to the sides of the transfer chamber and more or fewer than two transfer chambers communicatively coupled to the other side of the transfer chamber . The transfer chambers 1125B and 1125C may be coupled to the transfer chamber 1125E in any suitable manner, such as through load locks 1401 and 1403 or through any suitable buffer module. As can be realized, the transfer robots 1450, 1451 and 1430 can transfer substrates directly between robots (for example, robot to robot handoff) or transfer them to a loadlock or buffer station And may be configured to transport substrates through the use of any suitable substrate holding station. One or more processing stations 1140A, 1140F may be disposed on each of the ends 1125E1, 1125E2 of the transfer chamber 1125E. One arm 1451 serves its role in a first portion of the transfer chamber (e.g., load locks 102A, 102C, 1403 (e.g., transfer chamber 1125B) and processing station 1140F) An arm 1450 is positioned between the two robots so that they serve a second portion of the transfer chamber (e.g., load locks 102C, 102B, 1401 (e.g., transfer chamber 1125C) and processing station 1140A) The two robots 1450 and 1451 may be disposed in the transfer chamber 1125E such that the individual drive axes X of the actuators 1450 and 1451 are horizontally spaced from each other. As can be realized, the first and second portions of the transfer chamber 1125E may overlap, but in other aspects the first portion and the second portion may not overlap. In still other aspects, the transfer chamber 1125E may include a single transfer robot similar to the transfer robot 630, the single transfer robot may include a plurality of transfer chambers, such as the substrate holding stations, and / or the transfer chamber 1125E The transfer arm is configured to pass the length of the transfer chamber 1125E to access other transfer chambers communicatively coupled to the transfer chamber 1125E.

Referring also to FIG. 19, a semiconductor tool station 1400 ', which is substantially similar to the semiconductor tool station 1400, is shown. This aspect, however, includes two load locks (not shown) that communicatively couple the linear transfer chamber to the substrate cassettes 110 located at the individual loading ports 105 in a manner substantially similar to that described above with respect to FIG. 1702A, and 1702B. As can be seen in FIG. 19, each of the load locks 1702A, 1702B may also include a transfer robot in a manner substantially similar to that described above with respect to FIG. Additional load locks may replace processing stations so that substrates can be inserted and / or removed from any of the sides or sides of the tool station 1400 'from the tool station 1400', and vice versa . For example, referring to FIG. 19A, processing stations 1140 and load locks 1702A, 1702B are arranged such that load locks 1702A, 1702B are disposed on opposing ends of tool station 1140 & do. In other aspects, the loadlocks and processing stations may have any suitable configuration.

Referring now to FIG. 15, a semiconductor tool station 1500 is shown in accordance with aspects of the disclosed embodiments. The tool station 1500 may be substantially similar to the tool station 1100, wherein one side S1 of the transfer chamber 1525 includes angled surfaces, 1140C, and 1140D are angled with respect to each other at any suitable angle [alpha]. As can be realized, a multifaceted transfer chamber can be formed, including more than one side S1-S3 including angled surfaces substantially similar to those on the side S1. One or more transfer robots 1530 substantially similar to those described above may be disposed in the transfer chamber 1525 to transfer substrates between the processing stations and load locks through the transfer chamber. Due to the ability of the transfer arm (s) 214 of the one or more robots 1530 to rotate independently as a unit relative to the base arm 220 as described above, each of the transfer chambers The axis of elongation and contraction of the transfer arm can be aligned with the transfer path into and out of the processing stations and load locks regardless of the shape of the wall. FIG. 18 shows a semiconductor tool station 1500 'substantially similar to tool station 1500. However, in this aspect shown in FIG. 18, the tool station 1500 'includes three loadlocks 1702A-1702C that are substantially similar to those described with respect to FIGS. In other aspects, the tool station 1500 'may include any suitable number of load locks.

16, a tool station 1600 is shown in accordance with aspects of the disclosed embodiment. In this aspect, the tool station may be substantially similar to the tool station 1100, but an increased number of processing stations 1640A-1640H may be coupled to the transfer chamber 1625 to be communicatively coupled to the transfer chamber 1625. [ (1625) may have a pentagonal shape. In some aspects, such as the tool stations described above, the tool station 1600 may include loadlocks and / or processing stations of multiple levels (e.g., superimposed on one another) as described with respect to Figures 11A-11C. Thereby further increasing the number of processing stations and / or loadlocks without substantially increasing the contour of the tool station. One or more transfer robots 1630 substantially similar to those described above may be disposed within the transfer chamber 1625 to transfer substrates between the processing stations and the load locks through the transfer chamber. Due to the ability of the transfer arm (s) 214 of the one or more robots 1630 to rotate independently as a unit relative to the base arm 220 as described above, the shape of the transfer chamber The axis of extension and contraction of the transfer arm can be aligned with the transfer path into and out of any one of the processing stations and load locks.

While aspects of the disclosed embodiments are shown as having one or more cluster transfer chambers, it should be understood that in other aspects the transfer chambers may have any suitable number of processing stations / load lock clusters. In addition, while the base arm of the aspects of the disclosed embodiments are shown as having one base link (Figures 2a and 17) and two base links (Figure 7a), while in other aspects, the linear elongated transfer chambers And / or a substantially rectangular transfer chamber (1125, 1525) and / or a substantially pentagonal transfer chamber (1625) to transfer the transfer arm (214) along the length of the transfer chamber (125, 126, 625, 626) 1130R1, 1130R2, 1130R3) about the axis of rotation within the base arm (not shown) or other suitable multi-sided transfer chamber And may include any suitable number of links to allow the axis SX (with the transfer arm 214 mounted about the shoulder axis) to extend to any suitable distance.

Referring now to FIG. 20A, a schematic diagram of a processing device 2000 in accordance with aspects of the disclosed embodiment is shown. With reference to Figures 20e, 34a, and 34b, the processing device 200 generally includes one or more processing tool assemblies / modules 2020 coupled to one or more other processing tool modules 2020A, 2020B, 2020C, and / Or other suitable substrate processing equipment such as an EFEM or batch loader interface (EFEM) 2060 by one or more vacuum tunnels 2010, 2010A, 2010B, 2050. The processing tool modules may be existing or "off the shelf" processing / cluster tools provided by various aid equipment manufacturers. The processing tool modules 2020, 2020A, 2020B may have a cluster configuration or the processing tool modules 2020C may have a linear configuration or any suitable combination thereof, as shown in Figure 20E. Lt; / RTI > Each of the processing / cluster tools may have predetermined and different processing characteristics to process the substrates. Aspects of the disclosed embodiments allow these existing processing tool modules to be communicatively coupled to each other, e.g., in an opposing configuration, e.g., by the automation module 2030, Through the automation module, into the opposing processing tool modules by being contacted once as described below. Also as discussed below, the processing tools may be connected to one another in a substantially linear configuration, such as by the conveyance tunnels 2010A, 2010B, 2050. [

While the above "tunnels" 2010A, 2010B, 2050 are described herein as vacuum tunnels with a vacuum atmosphere, in other aspects the "tunnels" It should be understood that it may have any suitable atmosphere, such as a vacuum atmosphere, a vacuum atmosphere, or any combination thereof. In other aspects, one or more modules (e. G., Vacuum modules, automation modules, orientation modules, interface modules, etc.) that form the " May be sealable from other modules in the tunnel in any suitable manner (such as a gate valve that allows transfer carts to pass through) so that the one or more modules can be sealed from other modules in the tunnel (Such as those mentioned above) which are different from those of the above.

The processing tool modules 2020 may include one or more processing chambers 2021-2023, a transfer chamber 2024, and loadlocks 2025, 2026. In one aspect, the processing tool modules 2020 may be substantially similar to those described above with respect to Figures 3a-6 and 8a-19a, while in other aspects, the processing tool modules may be configured in any suitable configuration configuration and / or components. 20B, in one aspect, the processing tool modules 2020 and other modules / components of the processing apparatus, such as, for example, the automation modules 2030, are coupled to the processing chambers 2022 and / Or the loadlocks 2025 and 2026 may be configured to be coupled in a stacked configuration to the ports of the modules (i.e., the processing chambers 2022 and / or loadlocks 2025 and 2026) Vertically spaced or stacked planes PL). In other aspects, the processing chambers are not stacked, but rather can be placed in a common plane. 20C, the automation modules 2030 and the EFEMs 2060 can also be configured as stacked transfer planes (PLs), so that the vacuum tunnels 2010 can be configured with different planes (PL). It is also noted that substrate indexers / elevators 2030IN can be placed in the tunnel to raise / lower substrates into / out of the tunnel. As can be realized, the indexers / elevators 2030IN can connect the stacked tunnels so that substrates can be transported between the stacked tunnels if the tunnels are stacked.

An automation module 2030 configured to transfer one or more wafers at substantially the same time may connect the processing tool modules 2020 to the vacuum tunnels 2010A, 2010B, 2050 in any suitable manner. The automation module may include a housing, wherein the housing defines a chamber capable of maintaining a sealed environment therein and has substrate port openings, thereby transporting the substrates into and out of the chamber through the substrate port openings. The housing of the automation module 2030 may include a first end 2030E1, a second end 2030E2 and two sides 2030S1 and 2030S2 extending between the ends. Each of the sides may be coupled to a load module such as, for example, load locks of the processing tool modules 2020, a vacuum tunnel, an EFEM, a load port module (e.g., the load port module may be connected directly to the automation module, At least two substrate transport openings or connection ports 2030P1, 2030P2, 2030P4, 2030P5, 2030P2, 2030P4, 2030P2, 2030P4, 2030P2, (Figs. 24A and 24B). The side portions 2030S1 and 2030S2 may define a mating interface for mating with the sides of the process tool assemblies 2020,2020A, 2020B and 2020C. At least one side 2030S1, 2030S2 of the housing has more than one connection ports 2030P1, 2030P2, 2030P4, 2030P5, and the connection ports are aligned with the mating mating portions at the connection ports 2020A, 2020B, 2020C between the housing of the automation module 2030 and the process tool module (s) 2020, 2020A, 2020B, 2020C in conjunction with the substrate transfer openings at the side of the process tool assembly, ). It is noted that different processing tool modules 2020, 2020A, 2020B, and 2020C may have predetermined different characteristics and may be interchangeably engaged with the mating mating portion of the housing. The spacing or distance between the connection ports of the processing tool modules may vary and the automation module 2030 may be configured to receive the richness and accommodating this variation in the distance between the connection ports of the processing tool modules, via a variety of mounting configurations that can couple the automation modules to the processing tool modules .

In one aspect, it is noted that the automation module 2030 may have any suitable shape (e.g., an orthogonal shape), such as having orthogonal sides as shown, for example, in Figure 21A. In other aspects, the automation module 2030 'may have a wedge shape, wherein the sides of the automation module 2030' may include any suitable processing tools, such as shown in Figure 20d, It has a face for coupling to other automation equipment. 20D, facetted sides of the automation module 2030 'are shown having a convex shape with respect to the interior of the automation module 2030', while in other aspects, It is noted that one or more of the engaging sides can have a concave shape relative to the interior of the automation module 2030 '. In other aspects, one side of the automation module may be orthogonal to the ends, while the other side may have a side as shown in FIG. 20A. As can be realized, a wedge adapter may be provided for the orthogonal shaped transfer chamber to allow the orthogonal shaped transfer chamber to be connected to the angled ports of the processing tool module . Similarly, an orthogonal adapter may be provided for the wedge-shaped automation module such that the wedge-shaped automation module can be connected to orthogonally arranged ports of the processing tool module.

At least one of the ends of the automation module 2030 may be configured to allow the automation module 2030 to be coupled to the conveying tunnel, the load lock, the load port module, and / or any other suitable automated equipment (e.g., (Fig. 24A, 24B) for coupling to a device (e.g. At least one transport robot 2080, which may be substantially similar to the transport robots described above, is configured to transport one or more substrates to the transport tunnel (and / or the transport tunnel 2080) Carts) to any one of the load locks of the processing tool modules 2020. In some embodiments, When one or more components of the processing apparatus are disposed in stacked planes (as shown in FIG. 20B), the transport robot 2080 may be positioned in each of the stacked processing planes And may include sufficient Z-motion capability to provide access. In one aspect, the automation module 2030 may be connected to the vacuum tunnels 2010A, 2010B (or one or more EFEMs) through any suitable vacuum module 2040 or any other suitable connection module. The vacuum module 2040 includes a pass through vacuum pod, a load lock, a buffer module, a substrate aligner module, a shuttle for shuttles or carts disposed within the vacuum tunnels 2010A, 2010B, interface) and / or any other suitable module. In another aspect, the automation module 2030 may be substantially directly coupled to the vacuum tunnel, e.g., a vacuum tunnel 2050, such that the transfer robot 2080 in the automation module 2030 may directly couple the substrates To the vacuum tunnel, for example, into a shuttle or cart in the vacuum tunnel 2050. In another aspect, as will be described below, another processing tool module may be coupled to the automation module 2030 instead of the vacuum tunnel 2050 so that the opposing processing tool modules are coupled to each other, and And is communicatively coupled to the vacuum tunnel (s) 2010A, 2010B.

Referring to FIG. 21A, a schematic diagram of a processing device 2100 substantially similar to the processing device 2000 is shown. In this aspect, the automation module 2030 couples the opposed processing tool modules 2120A, 2120B to the EFEM 2060, for example. The EFEM 2060 includes a housing having a controlled atmosphere therein, loading ports 2061-2064 for transferring one or more substrates between the substrate cassettes 2065 and the EFEM 2060, And a transfer robot 2180 configured to transfer the substrates between a vacuum module 2040 and a vacuum module 2040, for example. In one aspect, the transport robot 2180 may be substantially similar to those described above, while in other aspects the transport robot may be any suitable transport robot. The vacuum module 2040 connects the EFEM 2060 to the automation module 2030 and in this aspect between the atmosphere of the EFEM 2060 and the atmosphere of the automation module 2030 Lt; RTI ID = 0.0 > transition. ≪ / RTI > In other aspects, the vacuum module 2040 can be replaced with an atmospheric module that has features similar to the vacuum module 2040, but the module of the atmosphere and the tunnel junction 2040, (e.g., when the substrates are transferred to the processing tool modules 2120A, 2120B), the tunnel interface 2030 may be configured to maintain a non-vacuum environment in the module of the atmosphere to be non-vacuum modules Transition between vacuum and vacuum can occur at loadlocks 2140A, 2140B).

Referring to FIG. 24A, the automation module 2030 includes a transfer robot 2080 as described above. In an aspect, the transfer robot 2080 may be substantially similar to the transfer robots described above. The driving unit 2081 of the transfer robot 2080 may be substantially similar to the driving units 200 and 700 described above. The drive unit 2081 may be configured to rotate the arm (s) 2082 and the end effector (s) 2083 about the shoulder axis SX as a unit, ) 2082 may be used to transfer substrates (e.g., a vacuum tunnel) to both lateral sides of the automation module 2030 (e.g., to load locks 2025, 2026 of both opposing processing tool modules) And / or along the longitudinal axis of the automation module 2030) in the direction of arrow 2400 and in the direction of arrow 2401. Referring to FIG. 24B, in other aspects, the transfer robot 2439 of the automation module 2030 may include a base link 2450 rotatable about an axis X24. It should be understood that the transfer robot 2439 can be employed in each of the aspects of the disclosed embodiments described herein in a manner substantially similar to that described herein for the transfer robot 2080. [ The base link 2450 may be in the form of a double sided boom and may extend longitudinally in opposite directions from the axis X24 so as to extend in two longitudinal directions It is possible to form a substantially rigid link with the ends. Selective Compliant Articulated Robot (SCARA) arms, frog leg arms, leapfrog arms, bi-symmetric arms, orbital mechanical switch type arms Any suitable transfer arm or arms 2451, 2452, including, but not limited to, lost motion mechanical switch type arms, or any other suitable arm with one or more end effectors (described above) May be mounted at each end of the base link 2450 in the respective shoulder axes SX1, SX2.

The transfer robot 2439 may include a driving unit 2450D disposed substantially adjacent to the rotation axis X24 or adjacent to the rotation axis X24 and the driving unit 2450D may include a driving unit And to rotate the base link 2450. The driver 2450D may be any suitable driver and may be connected to the base link 2450 in any suitable manner, such as via any suitable transmission. For example, a driver 2451D, 2452D, substantially similar to that described above with respect to Figures 2h-2j, may be provided at each of the ends of the base link 2450 to drive an individual one of the arms 2451, . In other aspects, the driver 2451D, 2452D may be any suitable driver with any suitable configuration. Picking the substrates from / to any of the load locks 2025, 2026 of the process tool modules, the cards passing through the vacuum tunnels, or any other suitable substrate holding position connected to one of the ports, The actuators 2451D and 2452D are driven in the directions of the arrows 2400 and 2401 along the individual axes 2490, 2491 and 2492 of the extension / contraction through the automation module 2030, May be configured to cause elongation and contraction of the arm (s). In one aspect, the actuators 2451D and 2452D may be configured to rotate the individual arms of the actuators around the respective shoulder axes SX1 and SX2 as a unit, Link 2450 so that each arm 2451 and 2452 can extend / retract along shaft 2492 to transfer substrates through ports 2030P3 and 2030P6 have. In addition to stretching / contracting through both ports 2030P3 and 2030P6, the arms 2451 and 2452 can be configured for a substantially straight line extension, as can be seen in Figure 24B And the side by side configuration of the arms 2451 and 2452 may be such that the arm 2451 extends through the ports 2030P1 and 2030P4 (by rotation of the base link 2450) And may allow arm 2452 to extend through ports 2030P2 and 2030P5 (by rotation of base link 2450). In other aspects, the side-by-side configuration of the arms 2451, 2452 can be such that the arm 2451 (with the rotation of the arm 2451 about the axis SXl without rotation of the base link 2450) The arms 2452 can be extended through ports 2030P2 and 2030P4 so that the arm 2452 can be extended through the arms 2452 without rotation of the base link 2450 but by rotation of the arm 2451 about the axis SX2. Ports 2030P1 and 2030P5, respectively.

The arms 2451 and 2452 of the transfer robot 2439 can be configured to hand off the substrates from one arm 2451 and 2452 to the other arms 2451 and 2452, 120) (FIG. 1). For example, in one aspect, the substrates may be taken over substantially directly between the arms 2451, 2452. In another aspect, the substrates can be positioned by one of the arms 2451, 2452 in a substrate holding position 2471 disposed in the automation module 2030, except for the transfer arm 2439 So that one of the arms 2451 and 2452 can pick up the substrate from the holding position 2471 to transfer the substrates from one arm 2451 or 2452 to another arm. In other aspects, the base arm 2450 may include a substrate holding position similar to the substrate holding position 2471 (e.g., the substrate holding position is mounted to the base arm 2450) , The substrate holding position 2471 can be transferred from one arm to another in a manner substantially similar to that described above.

Referring to Figures 24C and 24D, the transfer robots 2080 and 2439 are connected to the automation module < RTI ID = 0.0 > (i. E. 2030). For example, in one aspect, the arm 2080 may be mounted at the top of the automation module 2030 while the arm 2439 may be mounted at the bottom of the automation module 2030, The opposite is also true. In other aspects, a first transfer arm 2080 may be mounted on top of the automation module, and a second arm 2080 may be mounted on the bottom of the automation module. In other aspects, the first transfer arm 2439 may be mounted on the top of the automation module, and the second arm 2439 may be mounted on the bottom of the automation module. As can be realized, each of the transfer arms 2080, 2439 is configured to transfer a substrate carried by the transfer arms 2080, 2439 to the transfer planes < RTI ID = 0.0 > Such as by the controller 120, to align with the transfer planes of the processing tool modules PL and the processing tool modules 2020, 2020A, 2020B, 2020C, Can be controlled in a suitable manner. The transfer robots 2080 and 2439 are connected to any one or more of the tunnels 2010 and between the automation module 2030 and the processing tool modules 2020, 2020A, 2020B and 2020C (By reaching the tunnel for transporting the substrates to and / or from a substrate holder on the cart that extends into the automation module) . As can be realized, the transporting robots are arranged around the individual axes (X, X24) of the transporting robots so that one transporting robot 2080, 2439 does not interfere with the operation of the other transporting robots 2080, 2439 Can be rotated.

The processing tool modules 2120A and 2120B are configured to communicate with the automation module 2120A and 2120B such that the processing tool modules 2120A and 2120B (or any other suitable modules capable of holding or processing substrates) 2030, respectively. The processing tool modules 2120A and 2120B may be substantially similar to those described above. In other aspects, the processing tool modules may have any suitable configuration. For example, the processing tool modules 2120A and 2120B may include a transfer module 2121 that includes one or more transfer chambers 2121TC1 and 2121TC2, And the processing chambers 2122 coupled to the processing chambers. Each of the transfer chambers 2121TC1 and 2121TC2 may comprise any suitable transfer robot 2150 so that the substrates may be transferred directly to a robot by robot transfer or by any suitable means such as (a buffer, an aligner, a heater, a cooler, 2121TC2 via substrate holding stations 2160A, 2160B (which can be a holding station). In one aspect, the transfer module 2121 may be coupled to the automation module 2030, for example, by loadlocks 2140A, 2140B, while in other aspects, the transfer module 2121 may be coupled to the automation module 2030). ≪ / RTI >

Referring to FIG. 21B, other substrate holding stations, processing chambers, and / or vacuum tunnels may be connected to the automation module 2030 in any suitable manner. For example, any suitable module 2170 (e.g., a substrate aligner, heater, cooler, buffer, etc.) may be coupled to the automation module 2030 on the opposite side of the vacuum module 2040. 21C, a vacuum module 2040a and / or a vacuum tunnel 2010 (which may be substantially similar to the vacuum module 2040) may be used to modularly increase the processing capability of the processing device And may be coupled to the automation module on the opposite side of the vacuum module 2040. As can be seen, for example, in FIG. 21C, additional processing tool modules (2120C, 2120D) (coupled to the automation module in a manner substantially similar to that described above) may be added to the processing device One automation module 2030A is coupled to the vacuum tunnel 2010. Any suitable number of additional vacuum modules 2040, vacuum tunnels 2010, vacuum interface modules and processing tool modules may be implemented in a manner substantially similar to that described above, May be added to the processing device.

Referring to Figure 22A, a processing device 2200 is conceptually illustrated in accordance with aspects of the disclosed embodiment. The processing module 2200 may be substantially similar to the processing device 2100 described above in which the automation module 2030 is connected to the EFEM 2060 through a vacuum tunnel 2010 and a vacuum module 2040. [ Lt; / RTI > Each of vacuum modules 2040 and / or vacuum tunnels 2010 may be configured to carry or maintain one or more substrates simultaneously, as described below. As may be realized, in order to increase the processing capability of the processing device, the processing device 2200 may be configured to include any suitable number of additional vacuum modules, as shown in Figure 22B, , Vacuum tunnels 2010A, and / or automation modules 2030A. Coupled or connected vacuum modules 2040, vacuum tunnels 2010 and automation modules 2030 extend along a transport axis (TX) to form a modular tunnel, It is noted that the modular tunnel can be extended to any suitable length, for example by adding the vacuum modules 2040, vacuum tunnels 2010 and automation modules 2030 mentioned above. Vacuum modules, such as vacuum module 2040 ', may be connected to one or more vacuum modules 2040' such that other modules may be connected to the vacuum module 2040 'so that the direction in which the transport axis TX extends may be changed, And may include ports 2040C1-2040C4 on the sides. The vacuum module 2040'is configured to maintain the crystal structure of the substrate at a predetermined alignment position when the substrate transitions from the transfer path TX1 to the transfer path TX2, And a rotation module 2040RR capable of rotating the rotation module 2040RR. The rotating module 2040RR is connected to an indexer / elevator 2020 that can facilitate the transfer of substrates between transporting carts traveling along the transporting paths TX1, TX2 and two or more transporting robots in the automation module 2030. [ Or a part of the substrate buffer.

The processing apparatus described herein may be configured to enable entry / exit of substrates to / from the processing apparatus at more than one location in the processing apparatus. For example, referring to FIG. 23A, the EFEMs 2060A and 2060B are connected to both ends of a conveyance tunnel formed by the vacuum modules 2040A, 2040B and 2040C, the vacuum tunnel 2010 and the automation modules 2030A and 2030B, Lt; / RTI > Here, in one aspect, substrates may enter the processing device through EFEM 2060A and exit through EFEM 2060B, or vice versa. In other aspects, the substrates may enter and exit through any one or more of EFEMs 2060A and 2060B. 23B, an input / output point for adding / removing substrates to / from the processing apparatus may be disposed between the ends of the conveyance tunnel. For example, vacuum modules, such as vacuum module 2040 ', may be added to the conveyance tunnel to enable connection of the EFEM 2060C at midpoints or any other point between the ends of the conveyance tunnel . Here, in an aspect, substrates may enter the processing device through EFEM 2060A and exit through EFEM 2060B and / or EFEM 2060C; Substrates may enter the processing device through EFEM 2060B and exit through EFEM 2060A and / or EFEM 2060C; Substrates may enter the processing device through EFEM 2060C and exit through EFEM 2060A and / or EFEM 2060B. In other aspects, the substrates may enter and exit through any one or more of the EFEMs 2060A, 2060B, and 2060C to form any suitable process flow through the processing apparatus.

25a and 25b, the vacuum tunnel 2010 may include one or more vacuum tunnel modules 2500A-2500n, the one or more vacuum tunnel modules may be sealed together to form a vacuum having any suitable length Tunnel can be formed. Each vacuum tunnel module 2500A-2500n is coupled to the vacuum tunnel module 2500A-2500n so as to enable connection of the vacuum tunnel modules to each other or to any other suitable module of the processing device described herein. 2500n at the respective ends of the connection ports 2500P. In this aspect, each vacuum tunnel module 2500 is configured to drive at least one transport cart guide 2510, and at least one carry cart 2530 through a respective vacuum tunnel module 2500 And at least one motor component 2520 for the motor. It is noted that the ports 2500P may be sized to allow passage of the carts through the ports. As can be realized, when the two or more vacuum tunnel modules 2500 are coupled to each other, the at least one transfer cart guide 2510 of each vacuum chamber module 2500 is substantially continuous Wherein the substantially continuous transport cart guide is configured to guide the vacuum tunnel (2010E2) to allow passage of the cart (2530) between the longitudinal ends (2010E1, 2010E2) of the vacuum tunnel 2010). The at least one motor component 2520 of each of the vacuum chamber modules 2500 also forms a substantially continuous motor component that is connected to the ends of the vacuum tunnel 2010 (2010E1, 2010E2) to enable substantially continuous driving movement of the cart.

26A, 26B, 26C and 27B, each of the at least one transport carts 2530, 2531, 2530 ', 2531' extends from the bases 2530B, 2530B 'and the bases 2530B, 2530B' And at least one substrate holder 2530S, 2531S, 2530S ', 2531S'. In one aspect, the substrate holders 2530S, 2531S, 2530S ', and 2531S' may be cantilevered from separate bases 2530B and 2530B ', while in other aspects the substrate holders 2530S, 2531S' , 2530S ', 2531S') can be supported from separate bases 2530B, 2530B 'in any suitable manner. The substrate holders 2530S, 2531S, 2530S ', 2531S' actively or passively gripping / holding one or more substrates S as will be described in more detail below ). ≪ / RTI > The bases 2530B and 2530B 'are connected to the at least one motor component 2520, 2521' to enable movement through the vacuum tunnel 2010 of the transport carts 2530, 2531, 2530 ', and 2531' , 2520 ', 2521' and an individual one of the at least one transport cart guide (2510, 2510 '). As can be realized, when the vacuum tunnel comprises more than one transport carts, each of the transport carts can transport substrates within the tunnel while other transport carts are transporting the substrates within the tunnel (I.e. more than one substrate can be simultaneously transported in the tunnel). In one aspect, the transport cart 2530 is described and illustrated herein as being a passive transport cart (e.g., the cart has a substantially stationary and stationary substrate holder), while in other aspects, The cart may be an active cart including a cart borne transfer arm, the cart carrying conveyor arm may be a one that can extend past the ends of the vacuum tunnel 2010 The above articulated links are provided. Suitable examples of transport carts are described in U.S. Patent Nos. 8,197,177; 8,129,984; 7,959, 395; 7,901,539; 7,575,406; And 5,417,537, and U.S. Patent Publication No. 2012/0076626; 2011/0158773; 2010/0329827; 2009/0078374 and 2009/0191030, the disclosures of which are incorporated herein by reference in their entirety.

As can be seen in FIGS. 26A, 26B, 26C and 27B, the bases 2530B and 2530B 'are generally oriented towards the lateral sides of the vacuum chamber modules 2500 and 2500', but in other aspects, May be disposed at any suitable location. The substrate holders 2530S, 2531S, 2530S ', and 2531S' extend from the bases 2530B and 2530B 'toward the centerline CL of the vacuum chamber modules 2500 and 2500' In other aspects, however, the substrate holders 2530S, 2531S, 2530S ', and 2531S' may extend in any suitable direction to support the substrates S within the vacuum chamber modules 2500, 2500 ' . As can be realized, the substrate holders 2530S, 2531S, 2530S ', 2530S', and 2530S ', when there are more than one transfer carts 2530, 2531, 2530', and 2531 'in the vacuum chamber module 2500, 2500' 2531 'may be disposed in different spaced apart planes 2698, 2699 such that the transfer carts 2530, 2531, 2530', 2531 'are connected to the vacuum chamber modules 2500 , 2500 ') to pass by one another. It should be understood that while there are only two planes 2698, 2699 shown in the figures, there may be any suitable number of transport planes and corresponding substrate holders operating within their transport planes. As can be realized, the carrying robots interfacing with the conveying carts 2530, 2531, 2530 ', 2531' are adapted to access the substrates being moved along both conveying planes 2698, 2699 Lt; RTI ID = 0.0 > Z-motion < / RTI >

The at least one motor component 2520 and the conveyance cart guide 2510 of each vacuum chamber module 2500 are configured to drive the conveyance cart 2530 through the vacuum tunnel 2010, 2530. In one embodiment, In one aspect, as shown in FIGS. 25A-26C, the at least one motor component may be disposed on each of the lateral sides of the vacuum chamber modules 2500. In other aspects, referring to FIGS. 27A and 27B, the at least one motor component may be disposed at the bottom or top of each of the vacuum chamber modules 2500. For example, the motor component 2520 may include a magnetic levitation device (e.g., having stationary windings that drive and lift the transport cart), a magnetic levitation device that drives the cart A ball screw drive (e.g. a ball screw drive in which the cart is pulled / pushed through the vacuum tunnel by a ball screw), a movable screw (e.g., Wherein the transport cart comprises magnets magnetically coupled to the movable magnet such that as the movable magnet is driven along the length of the vacuum tunnel the transport cart is moved by the movable magnet Magnetic coupling drive, or any combination thereof, or any other suitable actuator, , It can be any component of any suitable drive system, or may comprise any of the components of the any suitable drive system. The conveyance cart guide 2510 may include a guide guide member (e.g., one or more rails, rollers, bearings, etc.) or a contactless guide member Floating) guide members. Suitable examples of contactless carriage guide and contact carriage guide and drive systems are described, for example, in U.S. Patent Nos. 8,197,177; 8,129,984; 7,959, 395; 7,901,539; 7,575,406; And 5,417,537, and U.S. Patent Publication No. 2012/0076626; 2011/0158773; 2010/0329827; 2009/0191030; And 2009/0078374, the disclosures of which are incorporated herein by reference in their entirety.

In one aspect as shown in Figures 26a, 26b, 26c and 27b, the at least one carriage guide portion 2510 includes a rail or bearing < RTI ID = 0.0 > . As can be realized, in this aspect, the at least one cart guide 2510, 2510 'can physically support (e.g., contact) the individual cart 2530. The at least one motor component 2520 may include one or more stationary windings 2520W and the transport carts 2530, 2531, 2530 ', 2531' may include at least one transport cart 2530 , 2531, 2530 ', 2531' to interface with the windings 2520W to drive one of the at least one of the at least one transport cart guide 2510, 2510 ' And may include one or more magnetic platens 2530P. The magnetic platens 2530P may be integrated with or affixed to the transport cart bases 2530B and 2530B 'in any suitable manner. The at least one motor component 2520,2521 may be coupled to any suitable controller, such as controller 120 (Fig. 1), wherein the controller 120 is coupled to the transport carts 2530, 2531, 2530 ', 2531' to control the windings to drive one of the individual ones. Any suitable shield (s) 2620, 2620 'may be provided between the at least one transport cart guide 2510, 2510' and the at least one transport cart 2530, 2531, 2530 ', 2531' To prevent the particles from migrating to the substrates S transported in the vacuum tunnel 2010 by substantially taking away any particles generated by the interaction of the particles in the vacuum tunnel 2010, shields 2620 and 2620 'may be disposed adjacent to the at least one transport cart guide 2510 and 2510'. In order to track the position of the at least one carry cart 2530 between the ends of the transport kernels formed by the combined vacuum chamber modules 2500A-2500n as may be realized, Suitable position feedback device (s) 2610 may be included on at least one of the at least one carry cart 2530 and the vacuum chamber module 2500. The position feedback device (s) 2610 may be coupled to the controller 120 to transmit signals to the controller 120, such that the controller 120 may control the position feedback device (s) May be used to control the windings 2520W (to drive the at least one cart 2530). Suitable examples of position feedback devices can be found, for example, in U.S. Patent No. 8,129,984 and U.S. Patent Publication No. 2009/0033316, the disclosures of which are incorporated herein by reference in their entirety.

28A, a portion of a vacuum tunnel 2800 (which may be substantially similar to a vacuum tunnel 2010) is shown having two vacuum tunnel modules 2500 for illustrative purposes only. The substrate holders 2530S and 2531S of the transport carts 2530 and 2531 operating in the vacuum tunnel 2800 extend in the longitudinal direction in the vacuum tunnel 2800 so that the substrate holders 2530S, 2030A, 2040B, or any suitable substrate holding station such as, for example, an EFEM 2060 or an automation module 2030. The vacuum module 2040, 2040A, 2040B, Each substrate holder 2530S, 2531S may be configured to extend out of the tunnel by a predetermined distance DE to take over the substrates S substantially directly to the transfer robot. In other aspects, the substrate holders 2530S, 2531S may have any suitable configuration or shape. In this aspect, the substrate holders 2530S and 2531S face a common direction, for example toward the longitudinal end 2800E1 of the vacuum tunnel 2800 so that the substrate holders 2530S and 2530S1 May extend past the end 2800E1 for transfer of the substrates S. As can be realized, any automation that is disposed at the longitudinal end 2800E2 of the vacuum tunnel 2800, such as the transfer robots described herein, may be substantially directly connected to the substrate holders 2530S, 2531S, to extend the vacuum tunnel 2800 by a predetermined amount DL to pick and position the substrates S.

28B and 28C, a portion of the vacuum tunnel 2800 'is shown having two vacuum tunnel modules 2500 and a matching module 2820 for illustrative purposes only. There are two transport carts 2530 and 2531 (which may be substantially similar to the transport carts described above with respect to Fig. 28A) operating within the vacuum tunnel 2800 'as can be seen in Fig. 28 . In this aspect of the disclosed embodiment, the substrate holders 2530S, 2531S of the transport carts extend longitudinally in the vacuum tunnel 2800 ', but the substrate holders extend in opposite directions rather than extend in a common direction (Substrate holder 2530S extends toward end 2800E1 and substrate holder 2531S extends toward end 2800E2). In this aspect, the substrate holder 2530S can be used to transfer substrates between the substrate holder 2530S and any suitable substrate holding station and / or transfer robot in a manner similar to that described above with respect to Figure 28A, Extends beyond the end 2800E1 of the tunnel 2800 '. Similarly, the substrate holder 2531S may be coupled to the substrate holder 2531S in a manner similar to that described above with respect to Fig. 28A, for transferring substrates between the substrate holder 2531S and any suitable substrate holding station and / Extends beyond the end 2800E2 of the second end 2800 '. In one aspect, the substrates positioned on the substrate holder 2531S are transferred to the substrate holder 2530S so that when the substrate holder 2531S can not extend past the end 2800E1, To be transported to a location, and vice versa. Thereby, at least one matching module 2820 can be disposed between the vacuum tunnel modules 2500 and configured to enable transfer of the substrates S between the substrate holders 2530S, 2531S. have. For example, the registration module 2820 may include a substrate support 2820E that is movable in the direction of arrow 2899 (e.g., in a direction substantially perpendicular to the transport plane of the substrates). The matching module 2820 may include guide rails and motor components for the transport carts 2530, 2531 in a manner substantially similar to that described above for the vacuum chamber modules. The substrate support 2820E is configured to enable the transport carts 2530 and 2531 to pass through the registration module 2820 for transfer between the substrate holders 2530S and 2531S of the substrates And alignment of the substrates S held on the substrate holders 2530S and 2531S with the substrate support 2820E. For example, the controller 120 (FIG. 1) may be mounted to the transport cart 2531 so that the substrate is aligned with the substrate support 2820E, for transporting the substrate from the transport cart 2531 to the transport cart 2530. [ Can be positioned, as shown in FIG. The substrate support 2820E may move in the direction of an arrow 2899 to lift the substrate S from the substrate holder 2531S. The controller 120 may cause the transport cart 2531 to move away from the substrate support 2820E and the transport cart 2530E to align the substrate holder 2530S with the substrate support 2820E. Can be controlled. The substrate support 2820E may be moved in the direction 2899 to position the substrate S on the substrate holder 2530S. Any suitable sensors 2820SS in one aspect may be provided in the matching module 2820 as may be realized and may be provided in the substrate support 2820E to align the substrate in a predetermined orientation The substrate support 2820E may be rotatable such that the sensors may be scanned by the substrate support 2820E. In another aspect, the substrate support 2820E may be movable in the direction of arrow 2898 by any suitable drive mechanism so that the sensors 2820SS may scan the substrate, The substrate holder 2820E can be moved in the direction of arrow 2898 to center the substrate on the substrate holders of the transport carts.

Referring to Figures 30A and 30B, in one aspect of the disclosed embodiment, the transport carts operating within the vacuum tunnels may include rotatable substrate holders such that each transport cart can extend past opposite ends of the vacuum tunnel have. For example, the transport cart 3030 (which may be substantially similar to the carts 2530 and 2531) comprises a base 3030B configured to ride on the guide members 2510 and 2510 ' And a substrate holder support section 3030S. The substrate holder 3030S1 may be rotatably mounted to the substrate holder support 3030S in any suitable manner such that the substrate holder 3030S1 rotates about an axis RX. A drive coupling member 3030M may be used to rotate the substrate holder 3030S1 about the axis RX by at least about 180 DEG so that the substrate holder may extend past both ends of the vacuum tunnel , And may be coupled to the substrate holder 3030S1. In order to enable the substrate holder to extend past the ends of the vacuum tunnel to transport substrates from and to the substrate holder, as can be realized, the substrate holder 3030S1 and / The drive engagement member 3030M includes any suitable mechanical or solid state locking mechanism (s) 3030L for holding the substrate holder 3030S1 in a predetermined position can do. In one aspect, the length LL of the substrate holder 3030S1 and its configuration may be such that the substrate holder 3030S1 can rotate at any point within the vacuum tunnel. In other aspects, the length LL of the substrate holder 3030S1 may be such that the substrate holder 3030S1 can not rotate within the width WW of the vacuum tunnel (Fig. 31A). 31A, the vacuum tunnel 3100 (which may be substantially similar to the vacuum tunnel 2010) to enable rotation of the substrate holder 3030S1 includes an orientation module 3120 . The orientation module 3120 may include guide rails and motor components in a manner substantially similar to that described above to allow the transport cart 3030 to pass through the orientation module 3120. [ The orientation module 3120 may include a housing configured to enable the substrate holder 3030S1 to rotate to change the orientation of the substrate holder 3030S1. In this aspect, the orientation module 3120 is illustrated as having a substantially circular shaped portion 3120R to enable rotation of the substrate holder 3030S1, although other aspects The housing may have any suitable shape and / or configuration. A driver 3110 may be disposed in the orientation module 3120 to match the drive coupling member 3030M of the carry cart 3030. [ For example, the drive coupling member 3030M and the driver 3110 may include one or more magnets for magnetically coupling the drive coupling member 3030M to the driver in a non-contact manner. In other aspects, the drive combining member 3030M and the driver 3110 may be coupled to each other in any suitable manner. The locking mechanism (s) 3030L is configured such that when the driving coupling member 3030M and the driving device 3110 are coupled, the locking mechanism (s) is released to enable rotation of the substrate holder 3030S1, The locking mechanism (s) 3030L may be configured to engage when the driving engagement member 3030M and the driver 3110 are de-coupled. In operation, the controller 120 (FIG. 1) may move the transport cart 3030 to align the drive 3110 in the orientation module 3120 with the drive engagement member 3030M. Such that the substrate holder 3030S1 extends substantially beyond opposite ends of the vacuum tunnel 3100 so that the substrate holder 3030S1 is substantially opposite to the direction of the substrate holder before rotation, May be actuated to rotate the substrate holder 3030S1 by at least about 180 DEG.

As can be realized, and as noted above, the substrate holders described herein can be configured to hold more than one substrate. For example, referring to FIG. 29, the substrate holders may be configured for batch transfer of substrates. For example, the bulk substrate holder 2930 may include any suitable number of spaced apart substrate supports 2930S1, 2930S2 to hold the substrates within the different spaced planes. The substrate holders include double ended substrate holders 3030S2 capable of holding at least two substrates in line with each other in substantially the same plane as shown in Figure 31C, . In other aspects, the substrate holders may comprise any suitable combination of spaced apart substrate holders (e.g., to hold substrates within different planes) and double end substrate holders. As may be realized, transport carts, such as those described above, may enable rapid swapping of substrates. For example, if each cart has substrate holders facing the same direction, one cart can pick the substrate and the other cart can position the substrate substantially in immediate succession . If the transfer cart comprises a bulk substrate holder, one of the supports in the bulk holder may remain empty, thereby allowing the processed substrate to continue substantially immediately, while the unprocessed substrate is being removed from the other support, Can be located, and vice versa. An alignment chamber 3120 may be positioned at the ends of the vacuum tunnel if the substrate holder comprises a dual end substrate holder so that substantially immediately thereafter the one side of the double end substrate holder The holder can be rotated and the other side of the double end substrate holder can position the substrate.

As mentioned above, in an aspect, at least one of the transport carts described herein may include a transfer arm disposed on the transfer cart, the transfer arm picking the substrate and moving the outer side of the vacuum tunnel Or extend and retract to position the substrate beyond the ends of the vacuum tunnel. For example, referring to FIG. 32, the transport cart 3200 includes an arm 3200A with extendable arm links. The links may be connected to each other in any suitable manner such that the substrate holder 3203 is constrained to extend / retract along the transport path TX when the base link 3201 is rotated. In one aspect, the transport cart 3200 may include a base arm driver, which is adapted to engage the base arm driver as the transport cart passes through a cam (3200C) (E.g., at the end of the vacuum tunnel, or within the vacuum tunnel module 2500) to cause rotation of the base arm 3201 to extend the holder 3203, (E.g., in a suitable position of the cam 3200C). The transfer cart may be moved away from the cam to retract the substrate holder 3203. [ The arm 3200A can be biased in the retracted configuration, e.g., via springs or other biasing members, such that the arm is retracted when the base arm actuator is disengaged from the cam . In other aspects, the elongation of the arm may be driven through a magnetic coupling actuator. For example, motor components 3301 and 3302 may be positioned within the vacuum tunnel at predetermined locations (e.g., at the end of the vacuum tunnel, or at any suitable location where the arm is to be extended to transport substrates) May be located within the module (2500). The motor components 3301 and 3302 may be used to move the arm 3320A in the manner described in U.S. Patent No. 7,959,395, the disclosure of which is incorporated herein by reference in its entirety, 3320 can be configured to drive movable platens 3310A, In yet other aspects, the arm transferred by the transport cart can be driven in any suitable manner.

As can be realized, in the aspects of the disclosed embodiments described herein, when the substrates are transported, for example, by a transport cart moving within the vacuum tunnel, any automated part (e.g., Buffers, etc.) may include Z-motion capabilities for picking and positioning the substrate to / from the substrate holder on the transport cart. In other aspects, the transport carts may include Z-movement capabilities for picking and positioning substrates.

Referring to Figures 34A and 34B, a bulk load lock 3400A-D is shown. The bulk load locks 3400A-D may be substantially similar to those described in U.S. Patent No. 12 / 123,391, filed May 19, 2008, the disclosure of which is incorporated herein by reference in its entirety. In one aspect, the bulk load lock 3400 may be substantially directly coupled to the loading port 3420 in any suitable manner. The bulk load lock 3400 may include any suitable automated portion, such as a transfer arm, for transferring substrates to and from the substrate carrier 3420A-3420D. The bulk load locks 3400A-D may form an automation interface similar to that described above for the automation module 2030. [ For example, in Figure 34A, a portion of a processing device according to aspects of the disclosed embodiments is shown. The processing device includes process tool modules 2120A and 2020B, each having, for example, load locks 3530 coupled thereto. Batch load locks 3400A, 3400B, 3400C, and 3400D may be coupled to the load locks 3530, respectively. One or more vacuum tunnels 2010A, 2010B may be connected to the bulk load locks 3400A, 3400B, 3400C, 3400D. The vacuum tunnel 2010A may couple the bulk load lock 3400B with the bulk load lock 3400C and the bulk load lock 3400C may also connect the processing tool modules 2120A and 2120B to each other The processing tools modules 2120A and 2120B can be used for transporting on any suitable automated material handling system (AMHS) 3510 without the substrates returning to the substrate carrier 3430. [ For transporting the substrates between. Vacuum module 2040 couples the vacuum tunnel 2010B to the bulk load lock 3440D to connect the bulk load lock 3400D (and the rest of the processing device) to, for example, EFEM or other automated equipment. . In this aspect each of the bulk load locks 3400A, 3400B, 3400C, 3400D may be substantially directly coupled to the load ports 3420A, 3420B, 3420C, 3420D and the load ports may be coupled to the bulk load locks 3400A, , 3400C, and 3400D to the AHMS 3510. [ Figure 34B illustrates a portion of a processing device similar to that shown in Figure 34A, in accordance with aspects of the disclosed embodiment. 34B, the bulk load locks 3400A, 3400B, 3400C, and 3400D are substantially directly coupled to the processing tool modules 2120A and 2120B and are coupled to the loading ports 3420A, 3420B, 3420C, and 3420D And serves as a loadlock between the respective processing tool modules 2120A and 2120B.

35A, 35B, and 35C, a portion of a processing apparatus is shown in accordance with aspects of the disclosed embodiments. In this aspect, the processing tool modules 2120A and 2120B may be connected to each other through a vacuum tunnel 2010B, and the vacuum tunnels 2010A,

 2010C) to other processing tool modules (or other suitable automation equipment). Where the vacuum tunnels 2010A, 2010B are connected to the processing tool module through bulk load locks 3400A, 3400B. As can be seen in FIG. 35A, stacking ports 3420A and 3420B are coupled to each of the bulk load locks 3400A and 3400B, respectively. The vacuum tunnels 2010B and 2010C are connected to the processing tool 2120B via load locks 3500A and 3500B and the load locks 3500A and 3500B may be any suitable load locks. The load locks 3500A and 3500B are coupled to the automation module 2030 and the automation module is coupled to the bulk load locks 3400C and 3400D. The load ports 3420C and 3420D are coupled to the bulk load locks 3400C and 3400D in any suitable manner. The bulk load locks are shown matched with front opening unified pods (FOUPs) while in other aspects the bulk load locks are shown as bottom opening carriers or top loading carriers and may be configured to match any suitable substrate carriers, such as loading carriers.

Referring to Figures 36A-36C, a portion of a processing device is shown in accordance with aspects of the disclosed embodiments. Processing tool modules 2120A and 2120B are disposed on the lateral sides of load lock 3610. [ In this aspect, the load lock 3610 is shown as having a wedge shape to engage the transfer chamber 2120TC of the processing tool modules 2120A, 2120B. As can be realized, substrates positioned at, for example, two substrate holding positions (e.g., 3620A, 3620B) are moved along a converging / diverging path corresponding to the angle of the wedge shape, 2120B, and from the processing tool modules 2120A, 2120B. In other aspects, the loadlock may be configured as an orthogonal shape (see load lock 3610 'of FIG. 36D) configured to enable engagement with the processing tool modules 2120A', 2120B ' And may have any suitable shape and / or configuration. As can be realized, the orthogonal shaped load lock 3610 'is disposed between each of the substrate holding positions 3620A and 3620B along substantially parallel paths as shown in Figure 36D and between the processing tool modules Lt; RTI ID = 0.0 > a < / RTI > As can be realized, the wedge adapters and orthogonal adapters are provided for the orthogonal load lock 3610 'and the wedge load lock 3610 in a manner substantially similar to that described above for the automation module So that the wedge load lock 3610 can be connected to the orthogonally disposed ports of the processing tool module and the orthogonal load lock is connected to the angularly arranged ports of the processing tool module . Vacuum tunnels 2800 'may be coupled to each of the longitudinal ends of the load locks 3610 and 3610'. As described above, each of the vacuum tunnels includes one or more double end substrate holders 3030S2 capable of holding at least two substrates aligned in a line in substantially the same plane as shown in Figure 31C And may include a transport cart. Also, as described above, each of the vacuum tunnels 2800 'may include an interface module 2820. The registration module 2820 may include a substrate support 2820E (Fig. 28C), which is movable in the direction of arrow 2899 (e.g., in a direction substantially perpendicular to the transport plane of the substrates) ). As can be realized, if there are two or more transport carts with double end substrate holders 3030S2 that pass through the tunnel, each of the transport carts may be holding at least one substrate at the same time (E.g., all of the carts in the carts can transport and pick or place the substrates into both ends of the respective tunnel 2800 ', independent of other transport carts in the individual vacuum tunnel 2800'). In this aspect, the matching module may enable each of the carts to transfer substrates to both ends of the vacuum tunnels 2800 '. For example, the transport cart 3670 can pick up the substrate from any suitable substrate holding position at the end 2800E1 of the vacuum tunnel 2800 'with the end 3650 of the double end substrate holder 3030S2 have. To place the substrate in any suitable substrate holding position at the end 2800E2 of the vacuum tunnel 2800'that the carrying cart 3670 is mounted on a substrate support 2820E of the matching module 2820, So that it can be positioned. The substrate support 2820E can be moved in the direction of arrow 2899 to lift the substrate at the end 3650. The transfer cart 3670 can be moved to position the end 3651 of the double ended substrate holder 3030S2 on the substrate support 2820E and the substrate support can be moved to place the substrate in the vacuum tunnel 2800 ' In the direction of arrow 2899 to position the substrate on end 2651 so that it can be positioned at end 2800E2.

As may be seen in FIGS. 36A-36C, and as described above, the vacuum tunnels 2800 ', 3600 may overlap and stack together. In this aspect, the loadlock 3610 may include at least one indexer 3620A, 3620B, and the at least one indexer may be positioned between the different transport planes of the vacuum tunnels 2800 ', 3600, And is configured to move in the direction of arrow 3899 for transporting the substrates. The indexers 3620A and 3620B may be configured such that substrate holders of transport carts passing in the vacuum tunnels can pick substrates and place them in the indexer where the indexer is on- off) raise or lower substrates on the substrate holders. The indexers 3620A and 3620B may provide rotation of the substrates to align the substrates in a manner substantially similar to that described above for the matching module 2820. [ In one aspect, one of the stacked vacuum tunnels 3600 may be an " express "tunnel, the " express" tunnel, While other ones of the vacuum tunnels 2800 'may be provided with a stop at the two locations and the intermediate destination.

It is to be understood that the foregoing description is only illustrative of the aspects of the disclosed embodiments. Various alternatives and modifications may be devised by those skilled in the art without departing from the aspects of the disclosed embodiments. Accordingly, the aspects of the disclosed embodiments are intended to embrace all such alternatives, modifications, and variations. Moreover, the fact that different features are mentioned in different independent or dependent claims does not imply that such a combination of features can not be used advantageously if it is a combination that falls within the scope of the aspects of the invention.

Claims (71)

A transfer device for transferring substrates within a transfer chamber, the transfer chamber having a first end and a second end and two sides extending between the ends, each side having at least two linear Each substrate holding station having at least one substrate holding station, wherein each of the ends has at least one substrate holding station,
A driving unit; And
At least one base arm having one end fixed relative to the transfer chamber, the base arm comprising: at least one arm link rotatably coupled to the drive; and at least one arm link rotatably coupled to the common end of the base arm, The base arm including at least one transfer arm, possibly coupled and having two end effectors,
Wherein the drive portion includes motors having independent rotational axes defining a degree of freedom of three, wherein one degree of freedom of the drive portion moves the at least one base arm horizontally to transport the at least one transfer arm within the transfer chamber Wherein the two degrees of freedom of the drive are adapted to extend the at least one transfer arm and retract the at least one transfer arm and swap the two end effectors, In order to drive the arm,
Conveying device. 2. The apparatus of claim 1, wherein the transfer device is configured to transfer substrates between the at least two linearly disposed substrate holding stations on each side of the transfer chamber, and between the first and second ends of the transfer chamber And to transfer the substrates to the at least one substrate holding station disposed on the at least one substrate holding station. 3. The apparatus of claim 2, wherein the at least one substrate holding station disposed between at least one of the first end and the second end of the transfer chamber comprises three inline load locks or 4 < RTI ID = 0.0 >Lt; RTI ID = 0.0 > of: < / RTI > 2. The transfer device according to claim 1, wherein the transfer device is configured to handle 450 mm diameter wafers. 2. The transfer device of claim 1, wherein the transfer device is configured to handle flat panels for planar panel displays, light emitting diodes, organic light emitting diodes or solar panels, 300 mm diameter wafers, or 200 mm diameter wafers. 2. The transfer device of claim 1, wherein the drive comprises a coaxial drive shaft arrangement. The apparatus of claim 1, wherein the drive comprises a z-axis configured to linearly move the at least one transfer arm in a direction substantially perpendicular to an axis of extension and retraction of the at least one transfer arm. And a z-axis drive. The apparatus of claim 1, wherein the at least one base arm includes at least one arm link having an end rotatably mounted to the drive at a drive axis, And is rotatably mounted on a second end opposite the at least one arm link at the shoulder axis. 2. The transfer device according to claim 1, wherein the drive unit includes a one-degree-of-freedom driver disposed on the drive shaft and a two-degree-of-freedom driver disposed on the shoulder axis. 10. The transporting device as claimed in claim 9, wherein the one-degree-of-freedom driver comprises a harmonic drive. 10. The apparatus of claim 9, wherein the two-degree-of-freedom driver includes a coaxial drive having internal and external drive shafts, the external drive shaft is independently rotatable with respect to the internal drive shaft, And is supported by a support bearing of the shaft. 2. The apparatus of claim 1, wherein the at least one base arm includes an upper arm link having a first end and a second end, and a forearm link having a first end and a second end, Wherein the upper arm link is rotatably mounted about the drive shaft to the drive at the first end and the front arm link is rotatably mounted to the second end of the upper arm link at a first end, . 13. The transfer device of claim 12, wherein the at least one transfer arm is rotatably mounted to the second end of the front arm link at a shoulder rotational axis. 14. The transfer device of claim 13, wherein the front arm link is substantially constrained to follow the substantially linear path by being subject to the drive. A transfer device for transferring substrates within a transfer chamber, the transfer chamber having a first end and a second end and two sides extending between the ends, each side having at least two linear Wherein the transfer device comprises:
A driving unit; And
At least one base arm having one end fixed relative to the transfer chamber, at least one base arm rotatably coupled to the base arm and rotatably coupled to the base arm and having at least two end effectors And a base arm including one transfer arm,
Wherein the drive comprises motors with independent rotational axes defining a degree of freedom of 3 and wherein one degree of freedom of the drive moves the at least one base arm horizontally to carry the transfer arm within the transfer chamber, Wherein the two degrees of freedom of the drive unit drive the at least one transfer arm to elongate the at least one transfer arm and retract the at least one transfer arm and to swap the two end effectors,
Conveying device. 16. The transfer device of claim 15, wherein the transfer device is configured to transfer substrates between the at least two linearly disposed substrate holding stations on each side of the transfer chamber. 17. The apparatus of claim 16, wherein the transfer chamber comprises three in-line load locks or four in-line load locks disposed in at least one of a first end and a second end of the transfer chamber, The three stacked loadlocks or the four stacked loadlocks, and the three stacked loadlocks or the four stacked loadlocks. 16. The transfer device of claim 15, wherein the transfer device is configured to handle 450 mm diameter wafers. 16. The transfer device of claim 15, wherein the transfer device is configured to handle flat panels for planar panel displays, light emitting diodes, organic light emitting diodes or solar panels, 300 mm diameter wafers, or 200 mm diameter wafers. A substrate processing apparatus, comprising:
At least one transfer chamber forming a substantially sealed environment; And
At least one transfer device disposed at least partially within each of the at least one transfer chamber,
Wherein the at least one transfer device comprises: a driver; A base arm having one end fixed relative to the transfer chamber, the base arm comprising: at least one arm link rotatably coupled to the drive; and at least one arm link rotatably coupled to the common end of the base arm and having at least two end effectors, The base arm including one transfer arm,
Wherein the drive comprises motors having independent rotational axes defining a degree of freedom of three, wherein one degree of freedom of the drive moves the base arm to horizontally convey the at least one transfer arm within the transfer chamber, Wherein the two degrees of freedom of the drive unit drive the at least one transfer arm to elongate the at least one transfer arm and retract the at least one transfer arm and to swap the two end effectors,
Substrate processing apparatus. 21. The apparatus of claim 20, wherein each of the at least one transfer chamber has a first end and a second end and two sides extending between the ends, each side having at least two linear Each of the substrates having at least one substrate holding station,
Wherein the transfer device is configured to transfer the substrate between the at least two linearly arranged substrate holding stations on each side of the transfer chamber and between the at least two linearly arranged substrate holding stations, Wherein the substrate processing apparatus is configured to transfer substrates to a single substrate holding station. 22. The method of claim 21, wherein the at least one substrate holding station disposed in at least one of the first end and the second end of the transfer chamber comprises three in-line load locks or four in- Substrate processing apparatus. 21. The apparatus of claim 20, configured to handle 450 mm diameter wafers. 21. The substrate processing apparatus of claim 20, configured to handle flat panel displays, light emitting diodes, flat panels for organic light emitting diodes or solar panels, 300 mm diameter wafers, or 200 mm diameter wafers. 21. The apparatus of claim 20, wherein the at least one transfer chamber has a clustered configuration. 26. The apparatus of claim 25, wherein the clustered configuration is a dual cluster transfer chamber configuration or a triple cluster transfer chamber configuration. 21. The apparatus of claim 20, wherein at least one end of the at least one transfer chamber comprises an equipment front end module for removing or inserting substrates in the substrate processing apparatus. 21. The apparatus of claim 20, wherein the at least one transfer chamber comprises at least two linear elongated transfer chambers communicatively coupled to form a combined linear elongated transfer chamber, . 29. The apparatus of claim 28, wherein at least one end of the combined linear elongate delivery chamber comprises an equipment front end module for removing or inserting substrates in the substrate processing apparatus. 21. The apparatus of claim 20, wherein the drive comprises a coaxial drive shaft arrangement. 21. The apparatus of claim 20, wherein the base arm includes at least one arm link having one end mounted to the drive to be rotatable in a drive shaft, the at least one transfer arm comprising: And is rotatably mounted on a second, opposite end of the link. 21. The apparatus of claim 20, wherein the drive includes a one degree of freedom driver disposed on the drive shaft and a two degree of freedom driver disposed on the shoulder axis. 33. The apparatus of claim 32, wherein the one degree of freedom driver comprises a harmonic driver. 34. The apparatus of claim 32, wherein the two-degree-of-freedom driver includes a coaxial driver having internal and external drive shafts, the external drive shaft being independently rotatable about the internal drive shaft, Is supported by the substrate processing apparatus. 21. The method of claim 20,
The base arm includes an upper arm link having a first end and a second end, and a forearm link having a first end and a second end, the upper arm link having a first end and a second end, Wherein the front arm link is rotatably mounted to the second end of the upper arm link at a first end thereof. 36. The apparatus of claim 35, wherein the at least one transfer arm is rotatably mounted to the second end of the front arm link at the shoulder rotational axis. 36. The apparatus of claim 35, wherein the front arm link is subordinate to the drive to cause the shoulder rotational axis to be substantially constrained to follow a substantially linear path along the length of the at least one linear elongated delivery chamber. , ≪ / RTI > 1. A substrate processing apparatus comprising:
At least one linear elongated transfer chamber; And
A transfer device disposed at least partially within the at least one linear elongated transfer chamber,
The transfer device includes a drive unit having a drive system having three independent rotational axes defining three degrees of freedom, a base arm unit rotatably coupled to the drive unit, and a transfer arm unit rotatably coupled to the base arm unit Wherein the transfer arm portion comprises two end effectors, one degree of freedom of which moves the base arm horizontally to carry the transfer arm portion, the two degrees of freedom extend the transfer arm portion, The end effector is retracted to retract the end effector,
Substrate processing apparatus. 39. The apparatus of claim 38, configured to handle 450 mm diameter wafers. 39. The apparatus of claim 38, configured to handle flat panel displays, light emitting diodes, flat panels for organic light emitting diodes or solar panels, 300 mm diameter wafers, or 200 mm diameter wafers. A substrate transport apparatus comprising:
A driver having three independent rotational axes defining three degrees of freedom;
A base arm connected to the driving unit; And
And a transfer arm rotatably mounted on the base arm and having two end effectors,
Wherein the motor of the driving unit having two degrees of freedom is configured to be removably coupled to the base arm as a unit by moving the base arm horizontally to transport the transfer arm, Wherein the transfer arm is coupled to the motor of the drive unit having the two degrees of freedom when the transfer arm is coupled to the base arm. 42. The apparatus of claim 41, configured to handle 450 mm diameter wafers. 42. The apparatus of claim 41, configured to handle flat panel displays, light emitting diodes, flat panels for organic light emitting diodes or solar panels, 300 mm diameter wafers, or 200 mm diameter wafers. 42. The motor of claim 41, wherein the motor of the drive with two degrees of freedom comprises a coaxial driver having internal and external drive shafts, the external drive shaft being independently rotatable about the internal drive shaft, And is supported by a support bearing of the shaft. As substrate processing tool:
A polygonal transfer chamber;
At least two substrate holding stations disposed on each side of the transfer chamber; And
At least two substrate transport devices disposed at least partially within the transfer chamber,
Wherein each of the at least two substrate transfer devices includes a base arm rotatably mounted in the transfer chamber in a drive shaft and at least one transfer arm rotatably mounted on the base arm and having two end effectors Wherein each base arm is independently rotatable about the drive shaft and the at least one transfer arm is independently rotatable relative to the respective base arm so that the extension and retraction of each transfer arm Wherein an axis of the substrate holding stations is capable of transferring substrates between any of the substrate holding stations and the transfer arm,
Substrate processing tool. 46. The substrate processing tool of claim 45, configured to handle 450 mm diameter wafers. 46. The substrate processing tool of claim 45, configured to handle flat panel displays, light emitting diodes, flat panels for organic light emitting diodes or solar panels, 300 mm diameter wafers, or 200 mm diameter wafers. 46. The apparatus of claim 45, wherein each substrate handling apparatus comprises a one degree of freedom drive motor and a two degree of freedom drive motor, wherein the one degree of freedom drive motor is configured to rotatably drive the base arm, Wherein the drive motor is configured to effect rotation, extension and retraction of the at least one transfer arm independently of the base arm. 1. A substrate processing apparatus, comprising:
A composite transfer chamber comprising a grid formed by a two dimensional array of interconnected transfer chamber modules, each transfer chamber module comprising: a composite transfer chamber selectively sealable from the other of the transfer chamber modules; And
And one or more substrate holding stations communicatively coupled to each of the transfer chamber modules,
Each transfer chamber module comprising substrate transfer stations communicatively coupled to the composite transfer chamber and transfer arms disposed within each transfer chamber module for transferring substrates between the transfer chamber modules,
Substrate processing apparatus. 50. The apparatus of claim 49, wherein the two-dimensional arrangement of interconnecting transfer chamber modules comprises at least a two-by-two arrangement of transfer chamber modules. 50. The apparatus of claim 49, including substrate holding stations at multiple horizontal levels. 1. A substrate processing apparatus comprising:
At least a first transfer chamber module and a second transfer chamber module that are communicatively coupled to each other and disposed side by side, and a second transfer chamber module that extends alongside the first transfer chamber module and the second transfer chamber module, A composite transfer chamber having a third transfer chamber module communicatively coupled to both the first transfer chamber module and the second transfer chamber module;
And at least one substrate holding station communicatively coupled to each of the first transfer chamber module, the second transfer chamber module, and the third transfer chamber module,
Wherein each of the first transfer chamber module, the second transfer chamber module, and the third transfer chamber module has a first transfer chamber module, a second transfer chamber module, and a third transfer chamber module, And at least one transfer arm disposed within each of the first transfer chamber module, the second transfer chamber module and the third transfer chamber module for transferring substrates between the substrate holding stations.
Substrate processing apparatus. 53. The apparatus of claim 52, wherein the third transfer chamber module comprises at least one arm link including a driver and a rotatably coupled arm link, and at least one arm link having a fixed end relative to the third transfer chamber. A base arm,
Wherein the at least one transfer arm of the third transfer chamber module is rotatably coupled to a common end of the base arm, the at least one transfer arm having two end effectors,
Wherein the drive portion includes motors having independent rotational axes defining three degrees of freedom and wherein one degree of freedom of the drive portion is selected to move the at least one base arm horizontally to transport the at least one transfer arm within the third transfer chamber module, Wherein the two degrees of freedom of the drive extend the at least one transfer arm and retract the at least one transfer arm and drive the at least one transfer arm to swap the two end effectors. 1. A substrate processing apparatus comprising:
Transport tunnel; And
And an automation module communicatively coupled to the conveying tunnel, the automation module comprising:
A first end and a second end, two sides extending between the ends, and a transfer device,
Each of the sides having at least two connection ports, at least one of the ends being coupled to the transport tunnel, and the at least two connection ports of at least one side of the automation module for connection to a cluster tool module Respectively,
At least one base arm having at least one arm link rotatably coupled to the drive unit and having one end fixed relative to the transfer chamber, and at least one base arm rotatably coupled to the common end of the base arm, Wherein the at least one transfer arm comprises at least one end effector,
Substrate processing apparatus. 55. The apparatus of claim 54, wherein the at least one transfer arm comprises two end effectors, the drive comprising motors having independent rotational axes defining three degrees of freedom, Wherein the at least one base arm is horizontally moved to carry the at least one transfer arm, the two degrees of freedom of the drive extend the at least one transfer arm, retract the at least one transfer arm, And drives the at least one transfer arm to swap the effectors. 1. A substrate processing apparatus comprising:
Transport tunnel; And at least one module coupled to the conveying tunnel,
Wherein the transport tunnel comprises at least one transport cart configured to travel between longitudinal ends of the transport tunnel, the at least one transport cart comprising: a substantially rigid substrate Wherein when the transfer cart is disposed adjacent at least one of the longitudinal ends of the conveyance tunnel for transferring substrates between the transfer cart and the at least one module, the substantially rigid substrate holder And extend beyond the at least one of the longitudinal ends. 58. The apparatus of claim 56, wherein the substrate processing apparatus further comprises an automation module, the automation module having a first end and a second end and two sides extending between the ends, At least one of the ends is coupled to the conveying tunnel, and the automation module includes a conveying device, the conveying device including a driving part, at least one arm rotatably coupled to the driving part, At least one base arm including a link and one end fixed relative to the transfer chamber and at least one transfer arm rotatably coupled to a common end of the base arm, Wherein the transfer device comprises at least one end effector on each side, The first end and the second is adapted to be extended beyond at least one end, the automation module is the first end and the second substrate processing apparatus, which is connected to enable communication to said transport tunnel, from one of the ends through. 58. The apparatus of claim 56, further comprising a processing tool module coupled to the two connection ports on at least one of the sides of the automation module. 57. The apparatus of claim 56, wherein the substrate processing apparatus further comprises an equipment front end module (EFEM), wherein the transport tunnel communicably connects the equipment front end module and the automation module. 58. The system of claim 56, wherein the substrate processing apparatus further comprises a second transport tunnel, wherein the second transport tunnel is communicatively coupled to the other of the first end and the second end of the automation module, And connecting the module with another automation module. 57. The apparatus of claim 56, wherein the transport tunnel comprises one or more tunnel modules. 63. The apparatus of claim 61, wherein at least one of the one or more tunnel modules is sealable from the other ones of the one or more tunnel modules. 1. A substrate processing apparatus comprising:
Automation module; And a connection module communicatively coupled to the automation module,
The automation module includes a first end, a second end, two sides extending between the ends, and a transfer device, each side having at least two connection ports, at least one of the ends One coupled to the connection module,
At least one base arm having at least one arm link rotatably coupled to the drive unit and having one end fixed relative to the transfer chamber, and at least one base arm rotatably coupled to the common end of the base arm, Wherein the at least one transfer arm comprises at least one end effector and wherein the transfer device is operatively connected to the first end and the second end through the at least two connection ports on each side, And extend beyond at least one of the second ends. 64. The apparatus of claim 63, wherein the at least two connection ports on at least one side of the automation module are configured for connection to a cluster tool module. 64. The apparatus of claim 63, wherein the substrate processing apparatus further comprises an equipment front end module, wherein the connection module communicably connects the equipment front end module to the automation module. 64. The apparatus of claim 63, wherein the connecting module comprises at least one of a vacuum module and a transport tunnel. 64. The apparatus of claim 63, wherein the connection module comprises a transport tunnel, the transport tunnel comprising at least one transport cart arranged in the transport tunnel and configured to pass between longitudinal ends of the transport tunnel, Processing device. 64. The apparatus of claim 63, wherein the substrate processing apparatus further comprises a processing tool module, wherein the processing tool module is coupled to the at least two connection ports on at least one of the sides of the automation module, . 64. The system of claim 63, wherein the transfer device of the automation module is configured to carry the substrate from the connection module through all of the individual ports disposed on the sides of the automation module, by contacting the substrate substantially once , ≪ / RTI > 1. A substrate processing apparatus comprising:
Wherein the substrate is transported in and out of the chamber through the substrate port openings by forming a chamber capable of maintaining a sealed environment therein and having substrate port openings, the housing comprising: Wherein at least one side of the housing has more than one substrate transfer opening and wherein the substrate on the side of the process tool assembly Wherein the substrate transfer openings are in communication with substrate transfer openings on the side of the process tool assembly and between the housing and the process tool assembly Device boundary, and the different processing tool assemblies define a pre- Having different properties, which may be fit coupled interchangeably to suit the coupling mating portion of the housing,
Substrate processing apparatus. 71. The apparatus of claim 70, wherein the substrate processing apparatus further comprises a carrier apparatus disposed at least partially within the housing, the carrier apparatus including a base link and at least one transfer arm mounted on the base link, Wherein the at least one transfer arm is operable to transfer the substrates into the process tool assembly through the substrate port openings for transfer of substrates to a transfer device of the process tool assembly.

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