KR20140108829A - Method for separating graphene thin film by roll to roll - Google Patents
Method for separating graphene thin film by roll to roll Download PDFInfo
- Publication number
- KR20140108829A KR20140108829A KR1020130022523A KR20130022523A KR20140108829A KR 20140108829 A KR20140108829 A KR 20140108829A KR 1020130022523 A KR1020130022523 A KR 1020130022523A KR 20130022523 A KR20130022523 A KR 20130022523A KR 20140108829 A KR20140108829 A KR 20140108829A
- Authority
- KR
- South Korea
- Prior art keywords
- film
- graphene
- roll
- heating roller
- metal film
- Prior art date
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/05—Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
The present invention relates to a method of separating and transferring a graphene film using a roll-to-roll method, and a method of separating and transferring a graphene film using a roll-to-roll method capable of separating and transferring a graphene film without chemical etching .
Low-dimensional nanomaterials composed of carbon atoms include fullerene, carbon nanotube, graphene, and graphite. That is, when the carbon atoms form a hexagonal shape and become a ball, fullerene as a zero-dimensional structure, carbon nanotubes as a one-dimensional dried material, graphene as a two-dimensional atom, and graphite as a three- Can be distinguished.
Among them, graphene is not only very stable and excellent in electrical, mechanical and chemical properties, but also an excellent conductive material that can move
Graphene is a material in which carbon is hexagonally connected to form a honeycomb-like two-dimensional planar structure. Its thickness is very thin, transparent, and has high electrical conductivity. Attempts have been made to apply graphene to transparent displays or warpable displays using these properties of graphenes, and in recent years, attempts have been made to synthesize graphene in large quantities.
These graphenes are generally synthesized using chemical vapor deposition using a catalytic metal. Since graphene is synthesized on a wafer or a metal substrate in a large area, a process of transferring graphene synthesized to an electrode substrate of an electronic device or the like is essential to use graphene in an electronic device. In 2004, a method of separating graphene from graphite was discovered and proved through experiments.
Conventionally, a dry process, a wet process, or the like has been used for transferring graphene onto a substrate. As an example of such a method, there is a method for transferring graphene synthesized on the surface of a catalyst metal by a chemical vapor deposition method to an arbitrary substrate by attaching a thermal peeling tape to graphene, removing the catalyst metal by etching, A method of transferring the graphene of the heat peeling tape to an arbitrary substrate was used.
However, since the conventional etching method chemically removes the catalytic metal, there is a problem that the catalytic metal must be used newly every time the graphene transfer is performed. Due to the time-inefficiency and the high cost problem of transferring a large amount of graphene, There was a difficult problem.
Therefore, in order to use graphene industrially, a large-area graphene transferring method capable of transferring graphene in a short time at a low cost is required.
SUMMARY OF THE INVENTION It is an object of the present invention to provide a novel method for separating and transferring graphene without using an etching process or a heat peeling film and to provide a graphen roll manufactured thereby.
The present invention has been made to solve the above problems
A graphene synthesis step of forming at least one layer of graphene on one surface of the catalytic metal film;
Preparing a substrate film and stacking the catalyst metal film having the graphenes formed on the upper and lower portions of the substrate film and the graphene formed on one surface of the catalyst metal film so as to be in contact with both surfaces of the substrate film;
Placing the laminated substrate film and the catalyst metal film on which the graphen is formed between a first heating roller and a second heating roller; And
A first heating roller for applying the catalyst film on the substrate film and the catalyst metal film on which the graphen layer is formed, a first heating roller for applying the pressure to the second heating roller, a temperature of the first heating roller and the second heating roller, The gap between the second heating rollers and the rotation speed (rpm) of the first heating roller and the second heating roller are adjusted to separate the graphene formed on one surface of the catalyst metal film from the catalyst metal film, And separating and transferring the graphene film using the roll-to-roll method.
In the method of separating and transferring a graphene film using the roll-to-roll method of the present invention, the catalytic metal film may be formed of a metal such as iron (Fe), nickel (Ni), cobalt (Co), platinum (Pt), iridium A material including at least a part of gold (Au), aluminum (Al), chromium (Cr), copper (Cu), magnesium (Mg), manganese (Mn), silicon (Si), titanium (Ti) or rubidium .
In the method of separating and transferring a graphene film using the roll-to-roll method according to the present invention, the substrate film may be formed of thermoplastic elastomer, styrenic materials, olefinic materials, polyolefin but are not limited to, polyolefin, polyurethane thermoplastic elastomers, polyamides, synthetic rubbers, polydimethylsiloxane (PDMS), polybutadiene, polyisobutylene, Is selected from the group consisting of poly (styrene-butadiene-styrene), polyurethanes, polychloroprene, silicon, and combinations thereof.
In the method of separating and transferring a graphene film using the roll-to-roll system of the present invention, the substrate film is a perfluorosulfonic acid polymer electrolyte film.
The present invention also provides a graphene roll produced by the method of the present invention.
The graphene roll according to the present invention further includes a protective layer formed on the graphene layer.
The method of separating and transferring a graphene film using the roll-to-roll method according to the present invention is a method of separating and transferring a graphene film from a catalytic metal film by controlling a pressure and a temperature applied in a roll- And transferred to a film for a substrate.
1 and 2 are schematic views showing a method of separating and transferring a graphene film using a roll-to-roll method according to the present invention.
Hereinafter, the present invention will be described in detail with reference to the drawings.
The separation and transfer method of the graphene film using the roll-to-roll system of the present invention
A graphene synthesis step of forming at least one layer of graphene on one surface of the catalytic metal film;
Preparing a substrate film and stacking the catalyst metal film having the graphenes formed on the upper and lower portions of the substrate film and the graphene formed on one surface of the catalyst metal film so as to be in contact with both surfaces of the substrate film;
Placing the laminated substrate film and the catalyst metal film on which the graphen is formed between a first heating roller and a second heating roller; And
A first heating roller for applying the catalyst film on the substrate film and the catalyst metal film on which the graphen layer is formed, a first heating roller for applying the pressure to the second heating roller, a temperature of the first heating roller and the second heating roller, The gap between the second heating rollers and the rotation speed (rpm) of the first heating roller and the second heating roller are adjusted to separate the graphene formed on one surface of the catalyst metal film from the catalyst metal film, And a step of transferring.
Fig. 1 shows an example of carrying out the separation and transfer method of the graphene film using the roll-to-roll method of the present invention.
First, at least one layer of
FIG. 2 shows a process in which the graphene formed on the catalyst metal film is transferred to the substrate film by the pressure and heat of the
< Example > Substrate separation experiment
The temperatures of the
Claims (6)
Preparing a substrate film and stacking the catalyst metal film having the graphenes formed on the upper and lower portions of the substrate film and the graphene formed on one surface of the catalyst metal film so as to be in contact with both surfaces of the substrate film;
Placing the laminated substrate film and the catalyst metal film on which the graphen is formed between a first heating roller and a second heating roller; And
A first heating roller for applying the catalyst film on the substrate film and the catalyst metal film on which the graphen layer is formed, a first heating roller for applying the pressure to the second heating roller, a temperature of the first heating roller and the second heating roller, The gap between the second heating rollers and the rotation speed (rpm) of the first heating roller and the second heating roller are adjusted to separate the graphene formed on one surface of the catalyst metal film from the catalyst metal film, And separating and transferring the graphene film using the roll-to-roll method.
The catalytic metal film may include,
(Fe), nickel (Ni), cobalt (Co), platinum (Pt), iridium (Ir), gold (Au), aluminum (Al), chromium (Cr), copper (Cu) And a method of separating and transferring a graphene film using a roll-to-roll method comprising a material containing at least a part of Mn, Si, Ti, or Ru.
The substrate film may be formed of a thermoplastic elastomer, styrenic materials, olefinic materials, polyolefin, polyurethane thermoplastic elastomers, polyamides, Synthetic rubbers, polydimethylsiloxane (PDMS), polybutadiene, polyisobutylene, poly (styrene-butadiene-styrene), and the like. Wherein the graft film is at least one selected from the group consisting of polyurethanes, polychloroprene, silicon, and combinations thereof.
Wherein the substrate film is a perfluorosulfonic acid polymer electrolyte film. A method of separating and transferring a graphene film using a roll-to-roll method.
And a protective layer formed on the graphene layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020130022523A KR20140108829A (en) | 2013-02-28 | 2013-02-28 | Method for separating graphene thin film by roll to roll |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020130022523A KR20140108829A (en) | 2013-02-28 | 2013-02-28 | Method for separating graphene thin film by roll to roll |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20140108829A true KR20140108829A (en) | 2014-09-15 |
Family
ID=51755692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020130022523A KR20140108829A (en) | 2013-02-28 | 2013-02-28 | Method for separating graphene thin film by roll to roll |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR20140108829A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160100710A (en) * | 2015-02-16 | 2016-08-24 | 연세대학교 산학협력단 | Apparatus and method for transferring graphene directly using centrifugal force |
KR20190101235A (en) * | 2018-02-22 | 2019-08-30 | 성균관대학교산학협력단 | Polymer for transferring graphene and transfer method of graphene using the same |
CN114211831A (en) * | 2021-12-24 | 2022-03-22 | 中科合肥智慧农业协同创新研究院 | Preparation method of degradable thickened graphene photothermal conversion mulching film |
-
2013
- 2013-02-28 KR KR1020130022523A patent/KR20140108829A/en not_active Application Discontinuation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160100710A (en) * | 2015-02-16 | 2016-08-24 | 연세대학교 산학협력단 | Apparatus and method for transferring graphene directly using centrifugal force |
KR20190101235A (en) * | 2018-02-22 | 2019-08-30 | 성균관대학교산학협력단 | Polymer for transferring graphene and transfer method of graphene using the same |
CN114211831A (en) * | 2021-12-24 | 2022-03-22 | 中科合肥智慧农业协同创新研究院 | Preparation method of degradable thickened graphene photothermal conversion mulching film |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101303930B1 (en) | Transfering method of graphene using hot press | |
Kang et al. | Inking elastomeric stamps with micro‐patterned, single layer graphene to create high‐performance OFETs | |
JP5787113B2 (en) | Graphene roll and element | |
Kasry et al. | Chemical doping of large-area stacked graphene films for use as transparent, conducting electrodes | |
US9728605B2 (en) | Roll-to-roll doping method of graphene film, and doped graphene film | |
Kim et al. | Vapor-phase molecular doping of graphene for high-performance transparent electrodes | |
Unarunotai et al. | Layer-by-layer transfer of multiple, large area sheets of graphene grown in multilayer stacks on a single SiC wafer | |
JP7176411B2 (en) | Flexible electrodes and sensor elements | |
KR101920718B1 (en) | Graphene device manufacturing apparatus and graphene device manufacturing method using the apparatus | |
US9214559B2 (en) | Graphene-transferring member, graphene transferrer, method of transferring graphene, and methods of fabricating graphene device by using the same | |
TW201114940A (en) | Debonding and transfer techniques for hetero-epitaxially grown graphene, and products including the same | |
KR101273695B1 (en) | Method for forming graphene pattern and method for manufacturing electronic element having graphene pattern | |
US20160304352A1 (en) | Graphene tape | |
Das et al. | Facile synthesis of multi-layer graphene by electrochemical exfoliation using organic solvent | |
US20130266739A1 (en) | Process for forming carbon film or inorganic material film on substrate by physical vapor deposition | |
Juvaid et al. | Direct growth of wafer-scale, transparent, p-type reduced-graphene-oxide-like thin films by pulsed laser deposition | |
KR20160005504A (en) | Method for preparing graphene having controled layer number and method for fabricating electronic device using the same | |
Seo et al. | Defect-free mechanical graphene transfer using n-doping adhesive gel buffer | |
KR20140108829A (en) | Method for separating graphene thin film by roll to roll | |
JP6241398B2 (en) | Method for producing graphene laminate | |
Li et al. | Direct growth of nanographene at low temperature from carbon black for highly sensitive temperature detectors | |
KR20150011989A (en) | Healing method of defect using atomic layer deposition | |
Verguts et al. | Single-layer graphene synthesis on a Al2O3 (0001)/Cu (111) template using chemical vapor deposition | |
Han et al. | Unprecedented flexibility of in-situ layer-by-layer stacked graphene with ultralow sheet resistance | |
KR101716187B1 (en) | Method for transferring graphene |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |