KR20140108829A - Method for separating graphene thin film by roll to roll - Google Patents

Method for separating graphene thin film by roll to roll Download PDF

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Publication number
KR20140108829A
KR20140108829A KR1020130022523A KR20130022523A KR20140108829A KR 20140108829 A KR20140108829 A KR 20140108829A KR 1020130022523 A KR1020130022523 A KR 1020130022523A KR 20130022523 A KR20130022523 A KR 20130022523A KR 20140108829 A KR20140108829 A KR 20140108829A
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South Korea
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film
graphene
roll
heating roller
metal film
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KR1020130022523A
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Korean (ko)
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최현광
전민현
박윤재
임영진
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인제대학교 산학협력단
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Publication of KR20140108829A publication Critical patent/KR20140108829A/en

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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/05Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
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  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

The present invention relates to a separating and transferring method of a graphene film using a roll-to-roll method and, more specifically, to a separating and transferring method of a graphene film using a roll-to-roll method capable of separating and transferring the graphene film without a process of chemical etching unlike an existing invention. The separating and transferring method of a graphene film using a roll-to-roll method according to the present invention can perform transferring on a film for substrate by separating the graphene film from a catalyst metal film by controlling the pressure and the temperature applied in the roll-to-roll method without using an adhesive film and a chemical etching process.

Description

METHOD FOR SEPARATING GRAPHENE THIN FILM BY ROLL TO ROLL BACKGROUND OF THE INVENTION 1. Field of the Invention [0001]

The present invention relates to a method of separating and transferring a graphene film using a roll-to-roll method, and a method of separating and transferring a graphene film using a roll-to-roll method capable of separating and transferring a graphene film without chemical etching .

Low-dimensional nanomaterials composed of carbon atoms include fullerene, carbon nanotube, graphene, and graphite. That is, when the carbon atoms form a hexagonal shape and become a ball, fullerene as a zero-dimensional structure, carbon nanotubes as a one-dimensional dried material, graphene as a two-dimensional atom, and graphite as a three- Can be distinguished.

Among them, graphene is not only very stable and excellent in electrical, mechanical and chemical properties, but also an excellent conductive material that can move electrons 100 times faster than silicon and about 100 times more current than copper.

Graphene is a material in which carbon is hexagonally connected to form a honeycomb-like two-dimensional planar structure. Its thickness is very thin, transparent, and has high electrical conductivity. Attempts have been made to apply graphene to transparent displays or warpable displays using these properties of graphenes, and in recent years, attempts have been made to synthesize graphene in large quantities.

These graphenes are generally synthesized using chemical vapor deposition using a catalytic metal. Since graphene is synthesized on a wafer or a metal substrate in a large area, a process of transferring graphene synthesized to an electrode substrate of an electronic device or the like is essential to use graphene in an electronic device. In 2004, a method of separating graphene from graphite was discovered and proved through experiments.

Conventionally, a dry process, a wet process, or the like has been used for transferring graphene onto a substrate. As an example of such a method, there is a method for transferring graphene synthesized on the surface of a catalyst metal by a chemical vapor deposition method to an arbitrary substrate by attaching a thermal peeling tape to graphene, removing the catalyst metal by etching, A method of transferring the graphene of the heat peeling tape to an arbitrary substrate was used.

However, since the conventional etching method chemically removes the catalytic metal, there is a problem that the catalytic metal must be used newly every time the graphene transfer is performed. Due to the time-inefficiency and the high cost problem of transferring a large amount of graphene, There was a difficult problem.

Therefore, in order to use graphene industrially, a large-area graphene transferring method capable of transferring graphene in a short time at a low cost is required.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a novel method for separating and transferring graphene without using an etching process or a heat peeling film and to provide a graphen roll manufactured thereby.

The present invention has been made to solve the above problems

A graphene synthesis step of forming at least one layer of graphene on one surface of the catalytic metal film;

Preparing a substrate film and stacking the catalyst metal film having the graphenes formed on the upper and lower portions of the substrate film and the graphene formed on one surface of the catalyst metal film so as to be in contact with both surfaces of the substrate film;

Placing the laminated substrate film and the catalyst metal film on which the graphen is formed between a first heating roller and a second heating roller; And

A first heating roller for applying the catalyst film on the substrate film and the catalyst metal film on which the graphen layer is formed, a first heating roller for applying the pressure to the second heating roller, a temperature of the first heating roller and the second heating roller, The gap between the second heating rollers and the rotation speed (rpm) of the first heating roller and the second heating roller are adjusted to separate the graphene formed on one surface of the catalyst metal film from the catalyst metal film, And separating and transferring the graphene film using the roll-to-roll method.

In the method of separating and transferring a graphene film using the roll-to-roll method of the present invention, the catalytic metal film may be formed of a metal such as iron (Fe), nickel (Ni), cobalt (Co), platinum (Pt), iridium A material including at least a part of gold (Au), aluminum (Al), chromium (Cr), copper (Cu), magnesium (Mg), manganese (Mn), silicon (Si), titanium (Ti) or rubidium .

In the method of separating and transferring a graphene film using the roll-to-roll method according to the present invention, the substrate film may be formed of thermoplastic elastomer, styrenic materials, olefinic materials, polyolefin but are not limited to, polyolefin, polyurethane thermoplastic elastomers, polyamides, synthetic rubbers, polydimethylsiloxane (PDMS), polybutadiene, polyisobutylene, Is selected from the group consisting of poly (styrene-butadiene-styrene), polyurethanes, polychloroprene, silicon, and combinations thereof.

In the method of separating and transferring a graphene film using the roll-to-roll system of the present invention, the substrate film is a perfluorosulfonic acid polymer electrolyte film.

The present invention also provides a graphene roll produced by the method of the present invention.

The graphene roll according to the present invention further includes a protective layer formed on the graphene layer.

The method of separating and transferring a graphene film using the roll-to-roll method according to the present invention is a method of separating and transferring a graphene film from a catalytic metal film by controlling a pressure and a temperature applied in a roll- And transferred to a film for a substrate.

1 and 2 are schematic views showing a method of separating and transferring a graphene film using a roll-to-roll method according to the present invention.

Hereinafter, the present invention will be described in detail with reference to the drawings.

The separation and transfer method of the graphene film using the roll-to-roll system of the present invention

A graphene synthesis step of forming at least one layer of graphene on one surface of the catalytic metal film;

Preparing a substrate film and stacking the catalyst metal film having the graphenes formed on the upper and lower portions of the substrate film and the graphene formed on one surface of the catalyst metal film so as to be in contact with both surfaces of the substrate film;

Placing the laminated substrate film and the catalyst metal film on which the graphen is formed between a first heating roller and a second heating roller; And

A first heating roller for applying the catalyst film on the substrate film and the catalyst metal film on which the graphen layer is formed, a first heating roller for applying the pressure to the second heating roller, a temperature of the first heating roller and the second heating roller, The gap between the second heating rollers and the rotation speed (rpm) of the first heating roller and the second heating roller are adjusted to separate the graphene formed on one surface of the catalyst metal film from the catalyst metal film, And a step of transferring.

Fig. 1 shows an example of carrying out the separation and transfer method of the graphene film using the roll-to-roll method of the present invention.

First, at least one layer of graphene 20 is formed on one surface of the catalytic metal film 10. 1, a catalyst metal film 10 having the graphenes formed on the upper and lower portions of the substrate film 30 is coated on one surface of the catalyst metal film 30, The formed graphenes are laminated so as to be in contact with both sides of the film for the substrate. The laminated substrate film and the catalyst metal film 10 on which the graphen is formed are put between the first heating roller 50 and the second heating roller 60 and the laminated substrate film 30 and The pressure of the first heating roller 50 and the second heating roller 60 applied to the graphene formed catalyst metal film 10 and the temperature of the first heating roller 50 and the second heating roller 60 The graphene formed on one side of the catalytic metal film is separated from the catalytic metal film and transferred to the film for the substrate.

FIG. 2 shows a process in which the graphene formed on the catalyst metal film is transferred to the substrate film by the pressure and heat of the first heating roller 50 and the second heating roller 60.

< Example > Substrate separation experiment

The temperatures of the first heating roller 50 and the second heating roller 60 are changed to 80 캜, 100 캜 and 120 캜 and the temperatures of the first heating roller 50 and the second heating roller 60 When the spacing is 100 占 퐉 and 150 占 퐉, resistance was measured during graphene separation, and the results are shown in Table 1 and Fig. 3 below.

80 100 ℃ 120 DEG C 100 탆 2.1 to 2.6 kΩ / □ x 9.07 to 14 kΩ / □ 150 탆 x 16 to 38 kΩ / □ x

Claims (6)

A graphene synthesis step of forming at least one layer of graphene on one surface of the catalytic metal film;
Preparing a substrate film and stacking the catalyst metal film having the graphenes formed on the upper and lower portions of the substrate film and the graphene formed on one surface of the catalyst metal film so as to be in contact with both surfaces of the substrate film;
Placing the laminated substrate film and the catalyst metal film on which the graphen is formed between a first heating roller and a second heating roller; And
A first heating roller for applying the catalyst film on the substrate film and the catalyst metal film on which the graphen layer is formed, a first heating roller for applying the pressure to the second heating roller, a temperature of the first heating roller and the second heating roller, The gap between the second heating rollers and the rotation speed (rpm) of the first heating roller and the second heating roller are adjusted to separate the graphene formed on one surface of the catalyst metal film from the catalyst metal film, And separating and transferring the graphene film using the roll-to-roll method.
The method according to claim 1,
The catalytic metal film may include,
(Fe), nickel (Ni), cobalt (Co), platinum (Pt), iridium (Ir), gold (Au), aluminum (Al), chromium (Cr), copper (Cu) And a method of separating and transferring a graphene film using a roll-to-roll method comprising a material containing at least a part of Mn, Si, Ti, or Ru.
The method according to claim 1,
The substrate film may be formed of a thermoplastic elastomer, styrenic materials, olefinic materials, polyolefin, polyurethane thermoplastic elastomers, polyamides, Synthetic rubbers, polydimethylsiloxane (PDMS), polybutadiene, polyisobutylene, poly (styrene-butadiene-styrene), and the like. Wherein the graft film is at least one selected from the group consisting of polyurethanes, polychloroprene, silicon, and combinations thereof.
The method according to claim 1,
Wherein the substrate film is a perfluorosulfonic acid polymer electrolyte film. A method of separating and transferring a graphene film using a roll-to-roll method.
A graphene roll produced by the method of any one of claims 1 to 4.
6. The method of claim 5,
And a protective layer formed on the graphene layer.
KR1020130022523A 2013-02-28 2013-02-28 Method for separating graphene thin film by roll to roll KR20140108829A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160100710A (en) * 2015-02-16 2016-08-24 연세대학교 산학협력단 Apparatus and method for transferring graphene directly using centrifugal force
KR20190101235A (en) * 2018-02-22 2019-08-30 성균관대학교산학협력단 Polymer for transferring graphene and transfer method of graphene using the same
CN114211831A (en) * 2021-12-24 2022-03-22 中科合肥智慧农业协同创新研究院 Preparation method of degradable thickened graphene photothermal conversion mulching film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160100710A (en) * 2015-02-16 2016-08-24 연세대학교 산학협력단 Apparatus and method for transferring graphene directly using centrifugal force
KR20190101235A (en) * 2018-02-22 2019-08-30 성균관대학교산학협력단 Polymer for transferring graphene and transfer method of graphene using the same
CN114211831A (en) * 2021-12-24 2022-03-22 中科合肥智慧农业协同创新研究院 Preparation method of degradable thickened graphene photothermal conversion mulching film

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