KR20140075905A - Neural stimulation and recording electrode array and method of manufacturing the same - Google Patents

Abstract

An electrode array for stimulating and recording a nerve includes an insulation layer, multiple electrodes, a conduction part, a first cover part, and a second cover part. The electrodes are formed to be mutually separated on the insulation layer and deliver an electrical signal. The conduction part is formed on the insulation layer and electrically connects the electrodes. The first cover part covers the lower part of the insulation layer and the second cover part covers the upper part of the insulation layer by being connected with the first cover part and exposes the electrodes. The insulation layer has different widths in an area forming the electrodes and an area forming the conduction part and, especially, the width of the area forming the conduction part may be narrower than the width of the area forming the electrodes. Thereby, flexibility can be obtained in the tangential direction of the electrode array.

Description

TECHNICAL FIELD [0001] The present invention relates to an electrode array for nerve stimulation and recording, and a method for manufacturing the same,

The present invention relates to a nerve stimulation and recording electrode array and a method of manufacturing the same, and more particularly, to a nerve stimulation and recording electrode array that performs functions such as nerve stimulation, biological signal detection, And a manufacturing method thereof.

The electrode array for nerve stimulation and recording (hereinafter referred to as " fine electrode array ") refers to an array of electrodes (hereinafter referred to as " fine electrode arrays ") that are biochemically reacted and collected by converting electrical signals into electrical signals, It is a collective term. Such a microelectrode array can be inserted into a place where nerve stimulation such as a womb (or cochlea) of a living body, artificial retina, or cerebral cortex is required, and can stimulate a cell. In addition, it performs functions such as detection of a living body signal and recording of a living body signal. Hereinafter, the cochlear implant which is inserted into the wau as one of the microelectrode arrays will be described in detail.

The ear consists largely of outer ear, middle ear, inner ear. The inner ear consists of a wah (or cochlea), a vestibule, and a vagal gang. The vestibule and the vagus are mainly involved in body balance and dizziness, and auditory cells are responsible for auditory cells called auditory cells. In addition, the vibration of the sound transmitted through the ossicles causes vibrations of the outer lip and the endolymph of the liquid contained in the woW through the lumen. These vibrations cause waves of waves like waves that strike the lake, which motivate auditory cells in the endolymph to turn the transmission of sound into an electrical signal.

The auditory neurons connect with these auditory cells to transmit the signals to the brain, and the brain recognizes them as sounds. In other words, when the auditory cells in the cochlea are damaged or the auditory nerve becomes obstructed, it is impossible to transmit the sound, which is called sensory nerve impairment.

A cochlear implant is a device that provides hearing by electrical stimulation of the auditory nerve to patients with severe sensory nerve impairment due to damage to the inner ear. That is, the cochlear implant replaces the function of auditory cells by directly electrically stimulating the spinal nerve cells or auditory nerve cells when the auditory cells in the cochlea are damaged or disappeared.

The structure of the cochlear implant can be divided into the extracorporeal part and the body part. The external body installed outside the body consists of a microphone (transmitter), a speech processor (language synthesizer), and a transmission antenna (transmitter). In this case, the microphone and the transmission antenna are collectively referred to as a headset. Inside the body implanted in the body is composed of a receptive / stimulator (circuit) and an electrode.

The process of listening through the cochlear implant is as follows. When sound is detected by a small microphone installed on a headset behind the ear, that is, a sounder, the sound transmitted from the microphone is transmitted along a thin wire to a powerful small computer sound processor.

The speech processor filters and analyzes the sound and converts it into an encoded digital signal. This signal is sent from the speech processor to the transmitting antenna via wire. The transmitting antenna transmits a signal to the receiving / stimulating unit, that is, the circuit unit, in the skin through the skin. The receiver / stimulator transfers the appropriate electrical energy to the electrodes with a constant array inserted into the wah.

Electrodes stimulate live auditory fibers in the woof by sending out the appropriate level of current signal to the outside. As a result, electrical sound information is transmitted to the cerebrum through the auditory nerve, so that the hearing impaired or the hearing impaired can hear the sound.

The wah is a tube with an open hollow and a closed end wound about 2.5 turns. Flexibility is required because the electrode inserted into the wah should be wound according to the wah shape. However, even if the electrodes are made in a tapered shape and the flexibility in the direction of advance of the electrode is ensured, they are still rigid in the tangential direction of the advancing direction and there is a risk of damaging the auditory cells.

Therefore, when the nerve stimulation and recording electrode array are inserted into a living body, a structural improvement is required to minimize nerve and tissue damage.

KR 2003-0035758 A

SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above problems, and it is an object of the present invention to provide a flexible nerve stimulation and recording electrode array capable of adjusting rigidity.

Another object of the present invention is to provide a method for easily manufacturing the nerve stimulation and recording electrode array.

According to an embodiment of the present invention, there is provided an electrode array for nerve stimulation and recording, comprising: an insulating layer; A plurality of electrodes spaced apart from each other on the insulating layer and transmitting an electrical signal; A conductive line formed on the insulating layer and electrically connecting the electrodes; A first cover portion covering a lower portion of the insulating layer; And a second cover portion covering the upper portion of the insulating layer in cooperation with the first cover portion and exposing the electrodes, wherein the insulating layer has a different width in a region where the electrodes are formed and a region where the lead portions are formed .

In an embodiment of the present invention, the width of the insulating layer may be narrower than the width of the region where the electrodes are formed.

In an embodiment of the present invention, the insulating layer may be in the shape of a probe, which repeats a relatively wide width and a relatively narrow width, and tapers down in width toward the distal end of the electrode array.

In an embodiment of the present invention, the insulating layer may be formed of multiple layers having different lengths from each other, and the thickness may be thinner toward the distal end of the electrode array.

In an embodiment of the present invention, the insulating layer includes a first insulating layer formed between the first cover portion and the plurality of electrodes; And a second insulating layer formed between the first insulating layer and some of the plurality of electrodes.

In an embodiment of the present invention, the insulating layer may be formed in a lattice shape having the electrode as a lattice point.

In an embodiment of the present invention, the size of the electrodes may be the same.

In an embodiment of the present invention, the insulating layer may comprise a liquid crystal polymer.

In an embodiment of the present invention, the first cover part may have an outer groove of the insulating layer, and the insulating layer may be inserted into the groove to a predetermined depth.

According to an embodiment of the present invention, openings for exposing the electrodes are formed in the second cover part, and the second cover part is formed in the groove of the first cover part inserted into the insulating layer to a predetermined depth The first cover portion may be engaged with the first cover portion to seal the insulating layer except for the electrodes.

In an embodiment of the present invention, the first and second cover portions may be made of an elastomer, and the elastomer may include silicone.

According to another aspect of the present invention, there is provided a method of manufacturing a nerve stimulation and recording electrode array, comprising: forming a plurality of electrodes spaced apart from each other on a dielectric layer and a lead portion electrically connecting the electrodes; ; Removing a region of the insulating layer other than the region where the electrodes and the conductive line are formed; Forming a first cover portion having an outer circumferential groove of the insulating layer; Inserting the insulating layer formed with the electrodes and the lead wire into the groove of the first cover portion; And forming a second cover portion covering the upper portion of the insulating layer and exposing the electrodes.

In the exemplary embodiment of the present invention, the step of removing the region other than the region in which the electrodes and the conductive line are formed in the insulating layer may include removing a portion of the insulating layer that is spaced apart from the electrodes and the conductive line portion Can be cut.

In an embodiment of the present invention, the step of forming the first cover part includes aligning the lower mold and the first upper mold; Injecting an elastomer between the lower mold and the first upper mold; And removing the first upper mold.

In an embodiment of the present invention, the step of forming the second cover portion includes aligning the lower mold and the second upper mold; And injecting an elastomer between the lower mold and the second upper mold.

In an embodiment of the present invention, the forming of the electrodes and the lead portion includes: depositing a metal layer on the insulating layer; And patterning the metal layer.

In the embodiment of the present invention, the nerve stimulation and the manufacturing method of the electrode array for recording may further include the step of forming an insulating layer having a different length from each other as a multilayer.

According to the nerve stimulation and recording electrode array and the manufacturing method thereof, since the width of the insulating layer between the electrodes is minimized and the flexibility of the electrode array is excellent, the nerve stimulation and the tissue cell can be inserted into the living body without damaging them . In addition, the mechanical stiffness of the electrode array can be controlled by controlling the thickness of the insulating layer under the electrode.

Furthermore, since a cover having an insulating layer-shaped groove is manufactured using a mold, the error of the alignment between the insulating layer and the cover portion can be reduced, so that the electrode array can be manufactured accurately and easily.

1 is an exploded view of a nerve stimulation and recording electrode array according to an embodiment of the present invention.
Fig. 2 is an enlarged view of the areas A and B of Fig. 1;
3 is an electron micrograph of the nerve stimulation and recording electrode array of Fig. 1;
FIG. 4 is a cross-sectional view taken along the line II 'of the nerve stimulation and recording electrode array of FIG. 3;
5 is a cross-sectional view taken along the line II-II 'of the nerve stimulation and recording electrode array of FIG. 3;
FIG. 6 is a cross-sectional view taken along the line III-III 'of the nerve stimulation and recording electrode array of FIG. 3;
7 is a cross-sectional view of a nerve stimulation and recording electrode array according to another embodiment of the present invention.
8 is a graph showing a force applied to the nerve stimulation and the recording electrode array according to the distance to be inserted into the wow.
9 is an exploded view of a nerve stimulation and recording electrode array according to another embodiment of the present invention.
Fig. 10 is a flowchart for explaining the nerve stimulation and the method of manufacturing the recording electrode array of Fig. 1;
11 is a plan view of a mold for forming the first cover portion of Fig.
12 is a perspective view of the first cover portion formed by the mold of FIG.
13 is a plan view of a mold for forming the second cover portion of Fig.
FIG. 14 is a perspective view showing the alignment of the second cover part and the first cover part of FIG. 1; FIG.
FIG. 15 is a perspective view showing the alignment of the second cover part and the first cover part of FIG. 9; FIG.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the drawings.

1 is an exploded view of a nerve stimulation and recording electrode array according to an embodiment of the present invention. Fig. 2 is an enlarged view of the areas A and B of Fig. 1;

1 and 2, the nerve stimulation and recording electrode array 1 according to the present embodiment includes an insulating layer 10, electrodes 30, a lead portion 50, a first cover portion 70, And a second cover portion (90).

In FIG. 1, the insulating layer 10 on which the electrodes 30 and the lead portions 50 are formed, the first cover portion 70 covering the insulating layer 10, (90). The electrode array 1 is formed by combining the insulating layer 10, the first cover portion 70 and the second cover portion 90 to form one package.

The electrode array 1 is inserted into a living body (for example, a cochlea, an artificial retina, a cerebral cortex, etc.) to stimulate nerve cells that require nerve stimulation, and performs functions such as biological signal detection and biological signal recording. The electrode array 1 is hermetically packaged with an elastomer, except for a plurality of electrodes 30. That is, the first cover portion 70 and the second cover portion 90 seal the insulating layer 10 in which the electrodes 30 and the lead portions 50 are formed.

The upper end of the electrode array 1 may be in the form of a probe connected to a circuit unit (not shown) for transmitting electrical energy and becoming thinner toward the distal end of the electrode array 1. This is for allowing the electrode array 1 to be easily inserted into the living body.

The electrodes 30 are formed on the insulating layer 10 so as to be spaced apart from each other. The electrodes 30 may be formed on the insulating layer 10 at regular intervals and may have the same size as each other. The electrodes 30 may include a metal such as titanium (Ti), platinum (Pt), iridium (Ir), and gold / Pt. ≪ / RTI > The electrodes 30 may be structurally single-layered or multi-layered.

The electrodes 30 are exposed by the second cover 90 and stimulate the auditory nerve fibers using an electrical signal transmitted from the circuit unit (not shown). In addition, the electrodes 30 may sense or record a biological signal and transmit the biological signal to the circuit unit (not shown).

For example, the electrodes 30 may include 8 to 16 electrodes. The electrodes 30 may be formed in a row, but may be formed in several rows as required. In FIG. 1, the electrodes 30 are shown to have a rectangular shape. However, the shape of the electrodes 30 is not limited thereto.

2) is formed on the insulating layer 10 and electrically connects the electrodes 30. The conductive layer 50 is formed on the insulating layer 10, The lead portion 50 may include the same material as the electrodes 30. [ The lead portions 50 are connected to each other to transmit an electrical signal provided from the circuit portion to the electrodes 30 or to transmit the bio signal collected by the electrodes 30 to the circuit portion .

2, the lead portions 50 are formed on one side of the electrodes 30, but they may be formed on both sides of the electrodes 30. In addition, the lead portion 50 may be alternately formed on one side and the other side of the electrodes 30, and may have various shapes as needed.

The insulating layer 10 is formed along the outer edges of the electrodes 30 and the lead portions 50 and is formed in a region A where the electrodes 30 are formed and the lead portions 50 are formed Regions B have different widths. In other words, the insulating layer 10 is removed at a predetermined distance from the electrodes 30 and the lead portion 50. The width Wb of the region B where the lead portion 50 is formed may be smaller than the width Wa of the region A where the electrodes 30 are formed.

The insulating layer 10 may be formed by repeating a relatively wide width Wa and a relatively narrow width Wb. Since the insulating layer 10 repeats a wide width Wa and a narrow width Wb, flexibility can be ensured in the tangential direction of the electrode array 1 in the longitudinal direction.

The insulating layer 10 has a width Wa extending a predetermined distance from an end of the electrodes 30 in an area A where the electrodes 30 are formed in an island shape, (Wa) may gradually become smaller toward the distal end of the electrode array (1).

Likewise, the width Wb of the region B where the lead portion 50 is formed may gradually become narrower toward the distal end of the electrode array 1. [ Therefore, the insulating layer 10 has a shape in which the width gradually decreases toward the distal end of the electrode array 1 while repeating a relatively wide width Wa and a relatively narrow width Wb. Thus, flexibility in the longitudinal direction of the electrode array 1 can be secured.

The insulating layer 10 may be made of a polymer such as polyimide and parylene, but it may be made of a liquid crystal polymer. For example, a liquid crystal polymer film may be used.

The first cover portion 70 covers a lower portion of the insulating layer 10. The first cover portion 70 is formed with an outer groove 75 of the insulating layer 10. The depth of the groove 75 is formed to be deeper than the thickness of the insulating layer 10. For example, the depth of the groove 75 may be about 200 [mu] m.

The insulating layer 10 having the electrodes 30 and the lead portions 50 is inserted into the groove 75 of the first cover portion 70 to a predetermined depth. The predetermined depth may be the same as the height of the second cover portion 90.

Since the insulating layer 10 is inserted into the groove 75 of the first cover portion 70, the groove 75 is formed to have a relatively wide width Wc and a relatively narrow width Wd . The width Wc corresponds to the wide width Wa of the insulating layer 10 and the width Wd corresponds to the narrow width Wb of the insulating layer 10. [

The width of the partitions 71 formed on the side surface of the first cover part 70 may be adjusted to adjust the width of the groove 75 of the first cover part 70. [ That is, the width of the barrier ribs 71 can be narrowed corresponding to the relatively wide width Wc, and the width of the barrier ribs 71 can be increased corresponding to the relatively narrow width Wd.

The second cover 90 covers the upper portion of the insulating layer 10 and exposes the electrodes 30. The second cover portion 90 is engaged with the first cover portion 70 while being inserted into the groove 75 of the first cover portion 70 into which the insulating layer 10 is inserted to a predetermined depth .

The second cover 90 covers an upper portion of the insulating layer 10 except for the electrodes 30. The second cover 90 is formed with openings 95 for exposing the electrodes 30. The shapes of the openings 95 may be changed according to the shapes of the electrodes 30. [

The second cover portion 90 may have the same shape as the insulating layer 10 except for the openings 95. Accordingly, the second cover portion 90 may be formed by repeating a relatively wide width We and a relatively narrow width Wf.

The first cover portion 70 and the second cover portion 90 may be made of an elastomer, and the elastomer may include silicone.

3 is an electron micrograph of the nerve stimulation and recording electrode array of Fig. 1; FIG. 4 is a cross-sectional view taken along the line I-I 'of the nerve stimulation and recording electrode array of FIG. 3; 5 is a cross-sectional view taken along the line II-II 'of the nerve stimulation and recording electrode array of FIG. 3; FIG. 6 is a cross-sectional view taken along the line III-III 'of the nerve stimulation and recording electrode array of FIG. 3;

3, the insulating layer 10, the first cover portion 70, and the second cover portion 90, on which the electrodes 30 and the lead portions 50 are formed, The actual shape of the array 1 can be confirmed. The electrode array 1 has a shape that becomes thinner from the upper end to the distal end. For example, when the electrode array 1 is inserted into the wow, it is wound about 2.5 turns according to the wow shape, and inserted into the wow.

FIG. 4 shows a cross section of the electrode array 1 near the upper end, and FIG. 5 shows a cross section of the electrode array 1 near the distal end.

4 and 5, the width W3 of the insulating layer 10 near the distal end is narrower than the width W1 of the insulating layer 10 near the upper end. Similarly, the width W4 of the first cover portion 70 near the distal end is narrower than the width W2 of the first cover portion 70 near the upper end. For example, the width W2 of the first cover portion 70 near the top end is about 850 um, and the width W4 of the first cover portion 70 near the distal end is about 500 um have.

The thickness of the first cover portion 70 may be reduced from the upper end portion to the distal end portion of the electrode array 1. For example, the thickness T1 of the first cover portion 70 near the top portion may be about 625 um, and the thickness of the first cover portion 70 near the distal portion may be about 450 um. The insulating layer 10 may have a thickness of about 50 μm and may be inserted into the first cover portion 70 at a depth of about 150 μm.

6 shows a cross-sectional view of the electrode array 1 cut in the longitudinal direction.

Referring to FIG. 6, as the thickness of the first cover part 70 becomes thinner from the upper end to the distal end of the electrode array 1, the first cover part 70 is tapered, Shape. For example, the length L1 of the electrode array 1 may be about 32 mm.

The electrode array 1 is packaged in a sealed package except for the electrodes 30, and stimulates nerve cells and the like that require nerve stimulation through the exposed electrodes 30, And so on.

According to the present embodiment, since the portion other than the portions where the electrodes 30 and the lead portions 50 are formed is removed, the width of the insulating layer 10 is minimized, so that flexibility is secured in the tangential direction of the electrode array can do. Therefore, the electrode array can be easily inserted into the living body without fear of damaging nerves and tissues such as auditory cells.

7 is a cross-sectional view of a nerve stimulation and recording electrode array according to another embodiment of the present invention. 8 is a graph showing a force applied to the nerve stimulation and the recording electrode array according to the distance to be inserted into the wow.

Referring to FIG. 7, the nerve stimulation and recording electrode array 3 according to the present embodiment includes a first insulating layer 11, a second insulating layer 12, electrodes 30, a lead portion (not shown) A first cover portion 70, and a second cover portion 90. As shown in FIG.

The electrodes 30, the lead portions 50, and the first and second cover portions 70 and 90 of FIG. 1 are electrically connected to the electrodes 30, the lead portions (not shown), the first cover portions 70, Are substantially the same as those of the first cover portion 70 and the second cover portion 90, and a description thereof will be omitted. The electrode array 3 according to this embodiment differs from the electrode array 1 of Fig. 1 in that it has multiple layers of insulating layers 11, 12. Fig.

The electrode array 3 includes a first insulating layer 11 formed between the first cover portion 70 and the entire electrodes 30 and a second insulating layer 11 between the first cover portion 70 and the electrodes 30 And a second insulating layer 12 formed between the electrodes 30.

For example, when the length L2 of the electrode array 3 is about 32 mm, the first insulating layer 11 and the second insulating layer 12 are formed from the upper end to about 20 mm, Only the first insulating layer 11 may be formed from about 20 mm to about 32 mm from the upper end portion.

Alternatively, when the electrode array 3 has sixteen electrodes 30, the first insulating layer 11 and the second insulating layer 12 are formed under the first through ninth electrodes 30 from the upper end, And only the first insulating layer 11 may be formed under the 10th to 16th electrodes 30 from the upper end.

The first insulating layer 11 and the second insulating layer 12 may be made of a polymer such as polyimide and parylene, but may be made of a liquid crystal polymer. For example, a liquid crystal polymer film may be used.

In FIG. 7, the insulating layer is formed as a double layer. However, the insulating layer is not limited thereto, and may have multiple layers of three or more layers as necessary. The insulating layer is gradually thinner from the upper end to the distal end of the electrode array 3, and thus the rigidity of the electrode array 3 can be controlled. The thickness of the insulating layer can be compensated for by the thickness of the first cover 70 or the thickness of the electrodes can be increased to compensate for the height.

Referring to FIG. 8, the x-axis represents the distance that the electrode array is inserted into the wah, and the y-axis represents the force required to be inserted according to the distance. It can be seen that the force required to be inserted after the distance of about 15 mm from the electrode array rises sharply. That is, after a certain distance is inserted into the electrode array, the force required to push the electrode array increases.

Therefore, as in the present embodiment, the upper end of the insulating layer is made thicker than the distal end portion, so that the electrode array can be easily inserted deep into the living body. According to the present embodiment, the number of layers of the insulating layer formed under the electrodes can be partially controlled to adjust the mechanical stiffness of the electrode array as needed.

9 is an exploded view of a nerve stimulation and recording electrode array according to another embodiment of the present invention.

9, the nerve stimulation and recording electrode array 5 according to the present embodiment includes an insulating layer 10a, electrodes 30a, a lead portion (not shown), a first cover portion 70a, 2 cover portion 90a.

The insulating layer 10a, the electrodes 30a, the lead portions (not shown), the first cover portion 70a, and the second cover portion 90a are formed on the insulating layer 10, Are substantially the same as those of the electrodes 30, the lead portion 50, the first cover portion 70, and the second cover portion 90 except for their shapes. The electrode array 5 according to the present embodiment has a lattice shape unlike the electrode array 1 of Fig. 1 having a probe shape.

The electrodes 30a are formed at the lattice points of the lattice formed by the electrode array 5. [ In FIG. 9, the electrodes 30a are shown to have a circular shape. However, the electrodes 30a are not limited to the circular shape, but may be rectangular, triangular, or the like.

The insulating layer 10a is formed in a shape removed along the outer edges of the electrodes 30a and the lead portions (not shown) and has a region where the electrodes 30a are formed and a region where the lead portions (not shown) Respectively. In other words, the insulating layer 10a is separated from the electrodes 30a and the lead portions (not shown) by a predetermined distance. The insulating layer 10a may have a width smaller than that of the region where the electrodes 30a are formed. In FIG. 9, since the electrodes 30a have a circular shape, the insulating layer 10a from which the electrodes 30a are separated from the electrodes 30a has a circular shape.

Since the insulating layer other than the electrode and the portion where the lead wire is formed is removed in the electrode array according to the present embodiment, flexibility can be secured in the tangential direction of the electrode array when the electrode array is inserted into the living body. In addition, the shape of the nerve stimulation and the electrode array for recording and the constituent elements according to the present invention is not limited, and may be formed into various shapes as necessary.

Fig. 10 is a flowchart for explaining the nerve stimulation and the method of manufacturing the recording electrode array of Fig. 1; 11 is a plan view of a mold for forming the first cover portion of Fig. 12 is a perspective view of the first cover portion formed by the mold of FIG. 13 is a plan view of a mold for forming the second cover portion of Fig. FIG. 14 is a perspective view showing the alignment of the second cover part and the first cover part of FIG. 1; FIG.

10, a method of manufacturing the electrode array 1 includes a plurality of electrodes 30 spaced apart from each other on an insulating layer 10 and a lead portion 50 electrically connecting the electrodes 30, (Step S100), removing an area of the insulating layer 10 other than the area where the electrodes 30 and the lead part 50 are formed (step S300) The method comprising the steps of forming a first cover portion 70 having an outer shape groove 75 of the electrode 30 and the conductive portion 50 on the first insulating layer 10, (Step S700) of inserting the insulating layer 10 into the groove 75 of the cover part 70 and forming a second cover part 90 covering the upper part of the insulating layer 10 and exposing the electrodes 30 (Step S900).

In the step of forming the electrodes 30 and the lead portions 50 (Step S100), a semiconductor manufacturing process may be used. Specifically, the insulating layer 10 is formed on a silicon wafer. For example, a liquid crystal polymer film is deposited on the silicon wafer to form the insulating layer 10.

A metal layer is deposited on the insulating layer 10 to a thickness of, for example, about 1000 to 3000 ANGSTROM. The insulating layer 10 may have multiple insulating layers having different lengths from each other. Then, the metal layer is patterned to form the electrodes 30 and the lead portions 50. The metal layer may be a patterned photomask.

The electrodes 30 and the conductive portion 50 may include metals such as titanium (Ti), platinum (Pt), iridium (Ir), and gold / Au / IrOx, and Ti / Pt. The electrodes 30 and the lead portion 50 may be structurally single-layered or multi-layered. The electrodes 30 and the lead portions 50 are formed on the insulating layer 10 and then separated from the silicon wafer.

In the step of removing an area other than the area where the electrodes 30 and the lead part 50 are formed (step S300), the unnecessary insulating layer 10 may be cut off by using a laser. When the insulating layer 10 is cut with a laser, a design drawing showing the outer shape of the insulating layer 10 may be used.

The step of forming the first cover portion 70 having the groove 75 of the insulating layer 10 (Step S500) can be formed using a mold.

11 (a) is a bottom mold 100 for forming the first cover part 70, and FIG. 11 (b) is a bottom mold 100 for forming the first cover part 70. Referring to FIG. 11, 1 < / RTI > The lower mold 100 is formed with a groove 150 of a lower shape of the first cover part 70 and a projection 150 of an upper shape of the first cover part 70 250 are formed.

A first alignment hole 110 is formed in the lower mold 100 and a second alignment hole 210 is formed in the first upper mold 200 to correspond to the alignment hole 110. The lower mold 100 and the first upper mold 200 are aligned using the first and second alignment holes 110 and 210. An alignment pin (not shown) may be inserted into the first and second alignment holes 110 and 210 to prevent the alignment position from moving.

After the lower mold 100 and the first upper mold 200 are aligned, a silicone elastomer is injected between the lower mold 100 and the first upper mold 200 and cured.

Referring to FIG. 12, the first cover part 70 is separated from the lower mold 100 and the first upper mold 200. In the actual process, only the first upper mold 200 may be removed, and the next process may be performed in a state where the first cover portion 70 is seated in the lower mold 100.

Next, the insulating layer 10 that has undergone the step S300 is inserted into the groove 75 of the first cover part 70 (step S700). At this time, the first cover 70 may be inserted into the insulation layer 10 formed with the electrodes 30 and the lead portions 50 in a state where the first cover 70 is seated in the lower mold 100.

Next, a second cover 90 covering the upper portion of the insulating layer 10 and exposing the electrodes 30 is formed (Step S900). The first cover part 70 and the second cover part 90 seal the insulating layer 10 except for the electrodes 30 to form one package.

The step of forming the second cover part 90 (step S900) aligns the second upper mold 400 with the lower mold 100 on which the first cover part 70 is seated. Therefore, the lower mold 100 is used as it is, and only the first upper mold 200 is replaced with the second upper mold 400.

13 (a) is the same as the lower mold 100 shown in Fig. 11 (a), and Fig. 13 (b) is a sectional view of the second upper mold 400). The second upper mold 400 has a protrusion 450 and a third aligning hole 410 in the form of the second cover 90. A protrusion 450 in the form of the second cover portion 90 is formed to expose the electrodes 30 formed on the insulating layer 10. In other words, since the projecting portion 450 of the second cover portion 90 is in contact with the electrodes 30, the electrodes 30 are prevented from being covered by the elastomer injected later.

The lower mold 100 and the second upper mold 400 are aligned using the first and third alignment holes 110 and 410. An alignment pin (not shown) may be inserted into the first and third alignment holes 110 and 410 to prevent the alignment position from moving.

After the lower mold 100 and the second upper mold 400 are aligned, a silicone elastomer is injected between the lower mold 100 and the second upper mold 400. After the silicone elastomer is cured, the lower mold 100 and the second upper mold 400 are removed to form the second cover 90. Thus, the electrode array 1 in which the second cover portion 90 and the first cover portion 70 are coupled is formed. That is, the electrode array 1 is sealed and packaged except for the electrodes 30.

14, the first cover part 70 is coupled with the second cover part 90 in a state where the insulating layer 10 formed with the electrodes 30 and the lead part 50 is inserted, . At this time, in reality, the first cover part 70 is seated in the lower mold 100 with the insulation layer 10 inserted, and the second cover part 90 is also molded.

The design of the lower mold 100, the first upper mold 200, and the second upper mold 400 may be a design used to cut the outer surface of the insulating layer 10. In this case, the alignment error can be reduced to less than about 5 [mu] m. In addition, the lower mold 100, the first upper mold 200, and the second upper mold 400 may be formed of a metal such as stainless steel.

According to this embodiment, since the cover portion having the groove of the insulating layer is manufactured by using the mold, the flexible electrode array 1 can be easily manufactured without any error. In addition, since the insulating layer 10 can be formed in multiple layers according to the position, the mechanical stiffness of the electrode array can be controlled, so that the electrode array 3 of FIG. have.

According to the nerve stimulation and recording electrode array as described above, the insulating layer is excellent in flexibility in the tangential direction of the electrode array, since portions other than the portions where the electrodes and the lead portions are formed are removed to minimize the width. Therefore, the electrode array can be easily inserted into the living body without fear of damaging nerves and tissues where stimulation such as auditory cells is required.

According to the method for manufacturing an electrode array as described above, it is possible to accurately and easily manufacture an electrode array having excellent flexibility through self-alignment using grooves having an outer shape of an insulating layer.

FIG. 15 is a perspective view showing the alignment of the second cover part and the first cover part of FIG. 9; FIG.

Referring to FIG. 15, the first cover portion 70a is formed with the insulating layer 10a in which the electrodes 30a and the lead portions (not shown) are formed, as in the case of FIG. 14, It can be seen that it is coupled with the cover portion 90a.

The nerve stimulation and the manufacturing method of the recording electrode array 5 of FIG. 9 are substantially the same as those of the nerve stimulation and the manufacturing method of the recording electrode array 1 except for the different components, .

According to the nerve stimulation and recording electrode array and the manufacturing method thereof according to the present invention, since the width of the insulating layer between the electrodes is minimized and the flexibility of the electrode array is excellent, . In addition, the mechanical stiffness of the electrode array can be controlled by partially controlling the thickness and the number of layers of the insulating layer under the electrodes. Furthermore, since a cover having an insulating layer-shaped groove is manufactured using a mold, the error of the alignment between the insulating layer and the cover portion can be reduced, so that the electrode array can be manufactured accurately and easily.

The nerve stimulation and recording electrode array according to the present invention stimulates nerve cells that are implanted in a living body such as a cochlea, artificial retina, or cerebral cortex to perform nerve stimulation and perform functions such as detecting biological signals and recording biological signals. Accordingly, the nerve stimulation and recording electrode array according to the present invention can be used variously for the treatment of cochlear implant, retinal stimulation, or cranial nerve disease.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims. You will understand.

1, 3, 5: Nerve Stimulation and Recording Electrode Array
10, 10a: insulating layer 11: first insulating layer
12: second insulating layer 30, 30a: electrode
50: lead portion 70, 70a: first cover portion
75: groove 90, 90a: second cover portion
95: opening portion 100: lower mold
200: first upper mold 400: second upper mold
110, 210, 410: alignment holes 150: grooves formed in the mold
250, 450: protrusions formed on the mold

Claims (18)

Insulating layer;
A plurality of electrodes spaced apart from each other on the insulating layer and transmitting an electrical signal;
A conductive line formed on the insulating layer and electrically connecting the electrodes;
A first cover portion covering a lower portion of the insulating layer; And
And a second cover portion that covers the upper portion of the insulating layer in combination with the first cover portion and exposes the electrodes,
Wherein the insulating layer has a different width in a region where the electrodes are formed and in a region where the lead portion is formed.
The semiconductor device according to claim 1,
Wherein the width of the region where the lead is formed is narrower than the width of the region where the electrodes are formed.
The semiconductor device according to claim 2,
Wherein the electrode array is a probe shape having a relatively wide width and a relatively narrow width while being gradually narrowed toward a distal end of the electrode array.
The semiconductor device according to claim 1,
Wherein the electrode array is formed of multiple layers having different lengths, and the thickness of the electrode array is decreased toward the distal end of the electrode array.
The semiconductor device according to claim 4,
A first insulating layer formed between the first cover part and the plurality of electrodes; And
And a second insulating layer formed between the first insulating layer and some of the plurality of electrodes.
The semiconductor device according to claim 2,
Wherein the electrode is formed in a lattice shape with the electrode as a lattice point.
The electrode array for nerve stimulation and recording according to claim 1, wherein the size of the electrodes is the same.
The semiconductor device according to claim 1,
Wherein the electrode array comprises a liquid crystal polymer.
The recording and reproducing apparatus according to claim 1, wherein an outer groove of the insulating layer is formed in the first cover portion, and the insulating layer is inserted into the groove to a predetermined depth. Array.
The electrode array for nerve stimulation and recording according to claim 9, wherein openings for exposing the electrodes are formed on the second cover part.
11. The apparatus according to claim 10,
Wherein the insulating layer is inserted into the groove of the first cover portion inserted at a predetermined depth and is engaged with the first cover portion to seal the insulating layer except for the electrodes. .
[2] The apparatus of claim 1, wherein the first and second cover portions comprise:
Wherein the electrode array is made of an elastomer.
13. The method of claim 12,
Characterized in that it comprises silicone. ≪ RTI ID = 0.0 > 11. < / RTI >
Forming a plurality of electrodes spaced apart from each other on the insulating layer and a lead portion electrically connecting the electrodes;
Removing a region of the insulating layer other than the region where the electrodes and the conductive line are formed;
Forming a first cover portion having an outer circumferential groove of the insulating layer;
Inserting the insulating layer formed with the electrodes and the lead wire into the groove of the first cover portion; And
And forming a second cover portion covering the top of the insulating layer and exposing the electrodes. ≪ Desc / Clms Page number 19 >
15. The method of claim 14, wherein removing the region of the insulating layer other than the region in which the electrodes and the lead are formed,
Wherein a portion of the insulating layer spaced apart from the electrodes and the lead portion is cut using a laser.
15. The method of claim 14, wherein forming the first cover comprises:
Aligning the lower mold and the first upper mold;
Injecting an elastomer between the lower mold and the first upper mold; And
And removing the first upper mold. ≪ Desc / Clms Page number 19 >
17. The method of claim 16, wherein forming the second cover comprises:
Aligning the lower mold and the second upper mold; And
And injecting an elastomer between the lower mold and the second upper mold. ≪ RTI ID = 0.0 > 11. < / RTI >
15. The method of claim 14,
And forming an insulating layer having a different length from each other in a multilayered structure.

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