KR20140045107A - Quantitative transfer apparatus of chemical and vaporizer using the same - Google Patents

Abstract

The present invention relates to an apparatus for controlling the quantitative transfer of a compound, wherein the apparatus transfers a compound stored in a canister to a vaporizer. The apparatus of the present invention comprises: a first valve installed at a first location of a pipe through which a compound is transferred and opening or closing the flow of the compound in the pipe; a second valve installed at a second location of the pipe and opening or closing the flow of the compound in the pipe; and a third valve installed at a third location of the pipe and opening or closing the flow of the compound in the pipe. As the first valve, the second valve, and the third valve are sequentially opened or closed, the amount of compound transferred from the canister to the vaporizer can be reliably controlled. [Reference numerals] (600) Controller; (AA) Inert gas; (BB) Processing unit

Description

TECHNICAL FIELD [0001] The present invention relates to a device for controlling quantitative transfer of a compound, and a vaporization system using the same. BACKGROUND ART [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for controlling quantitative transfer of a compound, and a vaporization system using the same, and more particularly, to a quantitative transfer control device for a compound capable of reliably and accurately transferring a compound and a vaporization system using the same.

1 is a view for explaining a conventional vaporization system.

Referring to FIG. 1, a conventional vaporization system will be described. A compound stored in the canister 10 is transferred to the vaporizer 20, and the amount of transfer is controlled and measured by the LMFC 30. Here, the LMFC 30 has an orifice, and uses a feedback principle that changes the size of the orifice by measuring the flow rate of the compound when the compound passes through the orifice at a constant pressure (ultrasonic wave or temperature change).

When inert gas is provided to the canister 40 by the pressurizing means 40, the gas stored in the canister 40 is transferred to the vaporizer 20 through the LMFC 30. Thereafter, the compound in the vaporizer 20 is vaporized and transported back to the processing unit.

On the other hand, in the compound transfer in the vaporizer system using the LMFC, for example, an initial driving time for obtaining feedback data in the LMFC is required, and the constant flow rate can not be maintained during this time. In addition, the allowable limit value according to the pressure difference between the outlet of the canister and the outlet of the vaporizer is in a narrow range, and the indirect flow measurement means such as indirectly measuring the flow rate through the change of the ultrasonic velocity or analyzing the lost heat amount The accuracy of the flow measurement is degraded.

According to an embodiment of the present invention, a compound quantitative transfer regulating device capable of reliably and accurately transferring a compound in a vaporizer system can be provided.

According to one embodiment of the present invention, there is provided a device for controlling quantitative transfer of a compound to transfer a compound stored in a canister to a vaporizer, the device comprising: a valve for opening and closing a flow of a compound in the conduit, A first valve; A second valve installed at a second position of the conduit to open or close the flow of the compound in the conduit; And a third valve installed at a third position of the conduit for opening or closing the flow of the compound in the conduit, wherein the conduit comprises a pathway through which the compound from the compound stored in the canister can be transferred to the vaporizer Wherein the second position is between the first position and the third position and as each of the first valve, the second valve, and the third valves is sequentially opened or closed, The amount of the compound to be delivered to the reaction chamber is controlled.

A first state in which only the first valve among the valves is open; A second state in which only the second valve among the valves is open; And a third state in which only the third valve among the valves is in an open state;

A first state in which only the first valve among the valves is open; A second state in which only the first valve and the second valve of the valves are open; A third state in which only the second valve among the valves is open; A fourth state in which only the second valve and the third valve among the valves are opened; And a fifth state in which only the third valve among the valves is in an open state.

Each of the valves may have a structure in which the valve can accommodate the compound in the open state and at least a part of the compound contained in the space is discharged in the closed state.

The first valve may be a valve connected to an output port of the canister, or the third valve may be a valve connected to an input port of the vaporizer.

According to another embodiment of the present invention, there is provided a vaporizer system with an apparatus for controlling quantitative transfer of a compound, comprising: a canister for storing a compound; A vaporizer to vaporize the compound; A conduit for providing a path through which the compound stored in the canister can be transferred to the vaporizer; And a metered dose delivery regulator disposed on the conduit and configured to include a first valve, a second valve, and a third valve, wherein the first valve is configured to open or close the flow of the compound in the conduit And wherein the second valve opens or closes the flow of the compound in the conduit and the third valve opens or closes the flow of the compound in the conduit and the first valve, The amount of the compound delivered from the canister to the vaporizer may be controlled as each of the components is sequentially opened or closed.

Wherein the compound quantitative transfer control device comprises: a first state in which only the first valve among the valves is in an open state; A second state in which only the second valve among the valves is open; And a third state in which only the third valve among the valves is in an open state;

Wherein the compound quantitative transfer control device comprises: a first state in which only the first valve among the valves is in an open state; A second state in which only the first valve and the second valve of the valves are open; A third state in which only the second valve among the valves is open; A fourth state in which only the second valve and the third valve among the valves are opened; And a fifth state in which only the third valve among the valves is in an open state.

Each of the valves may have a structure in which the valve can accommodate the compound in the open state and at least a part of the compound contained in the space is discharged in the closed state.

According to one or more embodiments of the present invention, it is possible to reliably and accurately transfer the compound in a vaporizer system.

According to one or more embodiments of the present invention, since a constant volume of compound can be transferred for each state change of the valves, there is no need for an LMFC, so that there can be no initial drive of the LMFC.

According to one or more embodiments of the present invention, a negative pressure (suction force) generated when the valves are opened can be generated, and the external force can be reduced because the direction of the suction force coincides with the transport direction of the compound.

According to one or more embodiments of the present invention, since a constant volume is transferred for each state change of the valve, there is no need for a means for measuring the transfer of the compound in the canister and the vaporization period.

According to one or more embodiments of the present invention, the flow rate can be easily controlled through a PLC or the like.

According to one or more embodiments of the present invention, by reversing the order of the state changes, the opposite direction may also be possible.

1 is a view for explaining a conventional vaporization system,
FIG. 2 is a view for explaining a vaporization system using a compound quantum transfer control apparatus according to an embodiment of the present invention,
FIG. 3 is a view for explaining an exemplary operation of the embodiment of FIG. 2,
4 is a view for explaining another exemplary operation of the embodiment of FIG. 2,
5 is a view for explaining valves that can be used in the embodiment of the present invention,
FIG. 6 is a view for explaining a vaporization system using a compound quantum transfer control apparatus according to another embodiment of the present invention, and FIG.
7 is a view for explaining a vaporization system using a compound quantum transfer control apparatus according to another embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features, and advantages of the present invention will become more readily apparent from the following description of preferred embodiments with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are provided so that the disclosure can be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

In addition, when an element (or component) is referred to as connecting (combining) with another element (or component) on (ON), the element (or component) is directly connected to another element (or component) or Or indirectly connected through at least one other component.

The terminology used herein is for the purpose of illustrating embodiments and is not intended to be limiting of the present invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. As used herein, the terms "comprises" and / or "comprising" do not exclude the presence or addition of one or more other elements. As used herein, the components referred to as "for example" are illustratively described for the purpose of describing the present invention, and the scope of the present invention is not limited to such components only.

Hereinafter, the present invention will be described in detail with reference to the drawings. In describing the specific embodiments below, various specific details have been set forth in order to explain the invention in greater detail and to assist in understanding it. However, those skilled in the art can understand that the present invention can be used without these various specific details. In some cases, it is mentioned in advance that parts of the invention which are commonly known in the description of the invention and which are not highly related to the invention are not described in order to prevent confusion in explaining the invention without cause.

FIG. 2 is a view for explaining a vaporization system using a compound quantum transfer control apparatus according to an embodiment of the present invention.

Referring to FIG. 2, a vaporization system (hereinafter, referred to as 'vaporization system according to an embodiment of the present invention') using a compound quantum transfer control apparatus according to an embodiment of the present invention is a vaporization system according to an embodiment of the present invention And a vaporizer (200).

The apparatus for controlling quantitative transfer of a compound according to an embodiment of the present invention may include a valve group 500 composed of a plurality of valves and a controller 600. In addition, for the purpose of description of the present invention, a canister 100 And the vaporizer 200 will be further illustrated and described.

The compound stored in the canister 100 can be transferred to the vaporizer 200 by a predetermined amount by the compound quantitative transfer control device according to an embodiment of the present invention.

The compound stored in the canister 100 may be, for example, a high purity organometallic compound or an inorganic metal compound used for forming a metal thin film, a metal nitride film, a metal oxide thin film, or the like in a manufacturing process related to semiconductors and electronic materials.

 The gas injected into the input port of the canister 100 is a conveying gas, and the conveying gas may be, for example, an inert gas such as argon (Ar), nitrogen (N), or helium (He).

When the transfer gas is injected into the canister 100, the compounds stored in the canister 100 can be transferred to the vaporizer 200 through the conduit, with all the valves constituting the valve group 500 opened.

The vaporizer 200 can vaporize when the compound is introduced, and can flow out to the processing unit.

The vaporizer 200 may be, for example, as disclosed in Korean Patent Laid-open Publication No. 10-2011-0111935 (20111012), which is an illustrative example, and the present invention is not limited to the vaporizer 200 disclosed in the above- (Hereinafter " those skilled in the art ") to which the present invention pertains.

Meanwhile, the vaporizer 200 that can be used in the present invention may be, for example, in the form of a canister equipped with a heating unit.

The valve group 500 included in the compound quantitative transfer regulating device may include at least three or more valves, a first valve 501, a second valve 502, and a third valve 503.

These valves can be two-way valves, but three-way valves are also available. The valves included in the valve group 500 according to an embodiment of the present invention will be described later with reference to Fig.

The first valve 501, the second valve 502, and the third valve 503 may be installed in a conduit through which the compound is transferred.

The first valve 501 is installed in a first position to open or close the flow of the compound in the conduit and the second valve 502 is installed in the second position of the conduit to open the flow of the compound in the conduit Or the third valve 503 may be installed in the third position of the conduit to open or close the flow of the compound in the conduit.

Here, the second position may be between the first position and the third position, and the first position may be located closer to the canister 100 than the third position.

The conduit may provide a path through which the compounds stored in the canister 100 may be transferred to the vaporizer 200 and may be a compound that is delivered from the canister 100 to the vaporizer 200 by various combinations of opening or closing of these valves. Can be controlled.

Meanwhile, the valves included in the valve group 500 according to an embodiment of the present invention may be opened or closed respectively under the control of the controller to block or allow the compounds flowing in the conduit.

The controller controls the opening or closing operation of the valves contained in the valve group 500 so that the compound quantitative feed regulating device operates in at least one kind of operation mode.

Hereinafter, operation modes controlled by the controller will be described.

Continuous feed operation mode

In this mode of operation, the compound stored in the canister 100 is continuously delivered to the vaporizer 200 for a period of time. In this operation mode, the first valve 501, the second valve 502, and the third valve 503 constituting the valve group 500 are both opened.

In the compound continuous transfer operation mode, it may be performed when it is necessary to continuously supply the compound stored in the canister 100 to the vaporizer 200 for a predetermined time.

Quantitative feed operation mode

In this mode of operation, the compound stored in the canister 100 is delivered in a quantitative manner to the vaporizer 200. In this operation mode, opening or closing of the first valve 501, the second valve 502, and the third valve 503 constituting the valve group 500 is performed sequentially in terms of time, (Which may be as much as the inner space of the second valve 502, according to one embodiment of the invention).

For example, the quantitative transfer operation mode may be defined as a mode in which a state for OPEN or CLOSE of the valves sequentially occurs as shown in Table 1 below.

condition V1 (first valve) V2 (second valve) V3 (third valve) 1 state OPEN CLOSE CLOSE 2 states CLOSE OPEN CLOSE 3 states CLOSE CLOSE OPEN

In this example, the quantitative feed operation mode can be defined as a state in which the valves are repeated one or more times in the order of 1 state -> 2 state -> 3 state.

As another example, the quantitative feed operation mode may be defined as a mode in which a state for opening (OPEN) or closing (CLOSE) for valves sequentially occurs as shown in the following Table 2. [Table 2]

condition V1 (first valve) V2 (second valve) V3 (third valve) 0 state CLOSE CLOSE CLOSE 1 state OPEN CLOSE CLOSE 2 states CLOSE OPEN CLOSE 3 states CLOSE CLOSE OPEN 4 states OPEN CLOSE CLOSE

In this example, the quantitative feed operation mode can be defined as a state in which the valves are repeated one or more times in the order of 0 state -> 1 state -> 2 state -> 3 state -> state 4 .

As another example, the quantitative feed operation mode may be defined as a mode in which the states for OPEN or CLOSE for the valves sequentially occur as shown in the following Table 3. [

condition V1 (first valve) V2 (second valve) V3 (third valve) 1 state OPEN CLOSE CLOSE 1 'state OPEN OPEN CLOSE 2 states CLOSE OPEN CLOSE 2 'state CLOSE OPEN OPEN 3 states CLOSE CLOSE OPEN

In this example, the quantitative feed operation mode is defined as a state in which the valves are repeated one or more times in the order of 1 state -> 1 'state -> 2 state ->2' state -> 3 state .

Now, the quantitative feed operation mode will be described in detail with reference to FIG. 3 and FIG.

3 and 4 are diagrams for explaining the quantitative feed operation mode as defined in <Table 2> and <Table 3>. As illustrated in these figures, the controller includes a first valve 501, 2 valve 502, and the third valve 503 are sequentially controlled to perform the quantitative feed operation mode.

3 and 4, for purposes of this embodiment, the line may be configured as an area denoted by L1, L2, L3, L4, where L1 is the distance between the canister 100 and the first valve 501 L2 is the area between the first valve 501 and the second valve 502 and L3 is the area between the second valve 502 and the third valve 503 and L4 is the area between the third valve 503 and the vaporizer 200. In this case,

3 and 4, for the purpose of describing the present embodiment, it is assumed that no compounds are stored in the pipelines L2 and L3 as shown in FIG. Of course, those skilled in the art will appreciate that the present invention is not limited to these premises.

3 and 4, those skilled in the art should understand that the hatched portion is a compound and the amount of compound stored in each valve is exemplary.

First, the quantitative feed operation mode, which is exemplarily shown in accordance with FIG. 3, will be described.

Referring to FIG. 3 (a), all the valves are closed, and the compound is located in the channel L1 region.

Referring to FIG. 3 (b), only the first valve 501 is in an open state, and the compound is positioned (or also referred to as 'storage') to the inner space of the first valve 501.

Referring to FIG. 3 (c), only the second valve 502 is in an open state, wherein the compound is located in the inner space of the second valve 502.

Referring to FIG. 3 (d), only the third valve 503 is in the open state, and the compound is in the inner space of the third valve 503.

Referring to FIG. 3 (e), all the valves are in a closed state. The state of FIG. 3 (e) is an example, and it is also possible to convert from the state of FIG. 3 (d) to the state of FIG. 3 (a) without the state of FIG. 3 (e).

In the quantitative feed operation mode according to Fig. 3, for example, the states a) to e) may be sequentially generated. Although the states a) to e) include other states between the states of a) to e), when the states a) to e) occur sequentially in time and do not deviate from the spirit of the present invention, .

The quantitative feed operation mode exemplarily shown in Fig. 4 will now be described.

Referring to Figure 4 (a), all the valves are closed, the compound is located in the pipeline L1 region.

Referring to FIG. 4B, only the first valve 501 and the second valve 502 are in an open state, and the compound is positioned up to an inner space of the first valve 501 and the second valve 502. (Or "save").

Referring to FIG. 4 (c), only the second valve 502 is in an open state, wherein the compound is located in the inner space of the second valve 502.

Referring to FIG. 4D, only the second valve 502 and the third valve 503 are in an open state, and the compound is located in the inner space of the third valve 503 and the fourth valve 503 .

Referring to FIG. 4 (e), only the third valve 503 is open.

In the quantitative feed operation mode according to Fig. 4, for example, the states a) to e) may be sequentially generated. Although the states a) to e) include other states between the states of a) to e), when the states a) to e) occur sequentially in time and do not deviate from the spirit of the present invention, .

On the other hand, the state of d) is for the purpose of explanation of the present invention, and the amount of the compound stored in the inner space of each of the second valve 502 and the third valve 503 may not be the same, At least a part of the compound stored in the inner space of the third valve 503 is transferred to the inner space of the third valve 503 and stored.

For example, when the vaporizer 200 is in a vacuum state (a state in which the atmospheric pressure is lower than the canister 100), a part of the compound introduced from the second valve 502 is not in the state d) May be present in the inner space of the valve 503 and the remaining compound may be located in the channel L4 region.

5 is a view for explaining valves that can be used in an embodiment of the present invention.

Referring to FIG. 5, there is shown an example of valves that may be used in the present invention described above.

Like the valves shown in Figs. 5 (a), 5 (b) and 5 (c), have an internal space capable of accommodating the compound in the open state and at least A valve having a structure in which a part is discharged may be used in the present invention. As such a valve having such a structure, for example, a pneumatic valve using a diaphragm (or a bellows) can be used (for example, pneumatic valves of swagelok, pneumatic valves of Benkan UCT).

On the other hand, as long as the valve has the above structure, a two-way valve, a three-way valve, or more can be used in the present invention.

A three-way valve as shown in Fig. 5 (c) can also be used in the present invention. Referring to FIG. 5 (c), there is an internal space, and detailed operation of this valve is disclosed in US Pat. No. 6,966,348. The contents of US 6,966,348 are incorporated herein by reference in their entirety, unless they are inconsistent with the present invention.

FIG. 6 is a view for explaining a vaporization system using a compound quantum transfer control apparatus according to another embodiment of the present invention.

6, an input port valve V4 and an output port valve V5 exist in the canister 100 and an input port valve V6 and an output port valve V7 exist in the vaporizer 200. [

2, the input port valve V4 and the output port valve V5 of the canister 100, the input port valve V6 of the vaporizer 200 and the output port valve V7 are additionally present And therefore the operation of the embodiment of FIG. 2 and the embodiment of FIG. 6 are the same or similar except for these valves. The input port valve V4 and the output port valve V5 of the canister 100 and the input port valve V6 and the output port valve V7 of the evaporator 200 are both opened , The operations described with reference to Figs. 2 to 4 can be performed.

7 is a view for explaining a vaporization system using a compound quantum transfer control apparatus according to another embodiment of the present invention.

7, the first valve 501 of the valve group 500 serves as an output port valve on the side of the canister 100 (blocking or allowing the outflow of the compound on the side of the canister 100) .

That is, the valves V1, V2, and V3 shown in FIG. 7 can perform the compound quantitative transfer mode that is exemplarily defined in the above Tables 1 to 3.

In the above-described embodiments, although not shown, a configuration may be adopted in which the valve V3 serves as a role as an input port valve of the vaporizer 200 (blocking or allowing the introduction of a compound toward the vaporizer 200 side).

Further, although not shown, a pressurizing means for allowing an inert gas to flow into the canister 100 may be additionally employed.

The valves used for the input port and the output port on the side of the canister 100 and the side of the vaporizer 200 are not limited to those shown in Figs. 6 and 7, and various methods can be used for the present invention have.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

10, 100: canister 20, 200: vaporizer
30: LMFC 40: Pressurizing means
500: Valve Group
501: first valve 502: second valve
503: third valve

Claims (9)

A compound quantitative transfer regulator for transferring a compound stored in a canister to a vaporizer,
A first valve installed at a first location of the conduit through which the compound is transported to open or close the flow of the compound in the conduit;
A second valve installed at a second position of the conduit to open or close the flow of the compound in the conduit; And
And a third valve installed at a third position of the conduit for opening or closing the flow of the compound in the conduit,
Wherein the conduit provides a path through which the compound from the compound stored in the canister can be transferred to the vaporizer,
The second position being between the first position and the third position,
And each of the first valve, the second valve, and the third valve are sequentially opened or closed, so that the amount of the compound transferred from the canister to the vaporizer is controlled. The method of claim 1,
A first state in which only the first valve among the valves is open;
A second state in which only the second valve among the valves is open; And
Further comprising: a third state in which only the third valve among the valves is opened; and a controller for controlling the valves so that the third state is sequential. The method of claim 1,
A first state in which only the first valve among the valves is open;
A second state in which only the first valve and the second valve of the valves are open;
A third state in which only the second valve among the valves is open;
A fourth state in which only the second valve and the third valve among the valves are opened;
And a fifth state in which only the third valve among the valves is opened; and a controller for controlling the valves so that the fifth state is a sequential state. The method of claim 1,
Wherein each of the valves has a structure capable of accommodating a compound in an open state and at least a part of a compound contained in the space is discharged in a closed state. The method of claim 1,
The first valve is a valve connected to an output port of the canister, or
Wherein the third valve is a valve connected to an input port of the vaporizer. A carburetor system comprising a compound quantitative transfer regulator,
A canister for storing the compound;
A vaporizer to vaporize the compound;
A conduit for providing a path through which the compound stored in the canister can be transferred to the vaporizer; And
And a compound quantum conveyance regulating device installed on the conduit and configured to include a first valve, a second valve, and a third valve,
Wherein the first valve opens or closes the flow of the compound in the conduit,
Wherein the second valve opens or closes the flow of the compound in the conduit,
The third valve opens or closes the flow of the compound in the conduit,
The amount of compound transferred from the canister to the vaporizer is controlled as each of the first, second, and third valves is sequentially opened or closed. The method according to claim 6,
The compound quantitative transfer regulating device comprises:
A first state in which only the first valve among the valves is open;
A second state in which only the second valve among the valves is open; And
Further comprising: a third state in which only the third valve among the valves is opened; and a controller for controlling the valves so that the third state is sequential. The method according to claim 6,
The compound quantitative transfer regulating device comprises:
A first state in which only the first valve among the valves is open;
A second state in which only the first valve and the second valve of the valves are open;
A third state in which only the second valve among the valves is open;
A fourth state in which only the second valve and the third valve among the valves are opened;
And a fifth state in which only the third valve among the valves is opened; and a controller for controlling the valves so that the fifth state is sequentially opened. The method according to claim 6,
Wherein each of the valves has a space capable of accommodating the compound in the open state and at least a part of the compound contained in the space is discharged in the closed state.

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