KR20140021859A - Cooling water suppling device - Google Patents

Cooling water suppling device Download PDF

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KR20140021859A
KR20140021859A KR1020120088170A KR20120088170A KR20140021859A KR 20140021859 A KR20140021859 A KR 20140021859A KR 1020120088170 A KR1020120088170 A KR 1020120088170A KR 20120088170 A KR20120088170 A KR 20120088170A KR 20140021859 A KR20140021859 A KR 20140021859A
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equipment
cooling water
cathode
header
cathode unit
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KR1020120088170A
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Korean (ko)
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KR101426239B1 (en
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이진규
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한일에스티(주)
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

The present invention relates to a coolant supply system for uniformly adjusting an internal temperature of a cooling device, in particular, to a coolant supply device for uniformly adjusting an internal temperature of a cooling device allowing coolant to be controlled and supplied in the center in a cooling device of multiple equipment used to manufacture an LCD or an OLED. The coolant supply system for uniformly adjusting an internal temperature of a cooling device is characterized in that a water supply header (10) is connected to a PCW main line (1) for supplying coolant to multiple equipment (2) having cooling pipes of different thicknesses; the water supply header (10) is connected to a cathode unit (20); the cathode unit (20) is connected to the multiple equipment (2) to supply coolant supplied by the PCW main line (1); a flow measurement device and a solenoid valve are installed in lines connected to the equipment (2) so that the coolant can be supplied to the equipment (2) as much as the set flow; the cathode unit (20) is connected to a drainage header (30) to collect coolant which is used to cool the equipment (2); and the drainage header (30) is connected to the PCW main line (1). [Reference numerals] (1) PCW main line; (10) Water supply header; (2) Equipment; (20) Cathode receptacle; (30) Water out header

Description

냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치 {Cooling Water suppling device}BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cooling water supply device for uniformly adjusting an internal temperature of a cooling device,

본 발명은 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 시스템에 관한 것으로서, 더욱 상세하게는 엘씨디 또는 오엘이디 제조에 사용되는 다수의 장비의 냉각장치에 냉각수를 중앙에서 제어하여 공급하도록 구비된 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치에 관한 것이다.
The present invention relates to a cooling water supply system for uniformly controlling the internal temperature of a cooling apparatus, and more particularly, to a cooling water supply system for uniformly controlling the internal temperature of a cooling apparatus, To a cooling water supply device for uniformly controlling the internal temperature of the device.

일반적으로 엘씨디 제조공정이나, 오엘이디 제조공정에 사용되는 장비에서는 많은 열이 발생되고, 이를 식혀주기 위해 냉각장치가 구비된다.In general, a lot of heat is generated in the equipment used in the LCD manufacturing process and the O LED manufacturing process, and a cooling device is provided to cool the same.

이러한 장비에는 외벽이나 내부의 온도를 하강시키기 위해 냉각수로가 형성되어 있고, 장비에 발생하는 열의 정도에 따라 물의 양이 다르게 공급되어야 하지만, 이러한 냉각장치에 물을 공급하는 수반에는 이러한 물 조절 장치가 없어 작업자가 각각 장비에서 발생하는 열의 정도에 따라 밸브를 열거나 닫아 물의 공급량을 조절하여 불편하였다.Such equipment is provided with a cooling water path for lowering the temperature of the outer wall or the inside of the apparatus. Depending on the degree of heat generated by the equipment, the amount of water must be supplied differently. However, There was no worker to control the supply of water by opening or closing the valve depending on the degree of heat generated by each equipment.

그리고 엘씨디, 엘이디, 오엘이디 등의 제품은 그 생산과정에서 온도를 제어하는 것이 중요하고, 정밀한 온도제어가 이루어지지 못하면 제품의 품질에 영향을 미치는 문제가 있었다.In addition, it is important to control the temperature in the production process of products such as LCD, LED, and LED, and if the precise temperature control is not performed, there is a problem that the quality of the product is affected.

이러한 장비에 물을 공급하는 수반은 냉각이 필요한 장비마다 각각 냉각수를 공급하여 왔으므로 냉각수가 작은 경우에는 장비의 온도가 올라가 많은 문제를 일으키게 된다.As a result of the supply of water to these equipments, the cooling water has been supplied to each of the equipments requiring cooling. Therefore, when the amount of the cooling water is small, the temperature of the equipments is increased.

따라서 여러개의 장비에 냉각수를 공급할 때 각각의 장비에 들어가는 냉각수양을 한곳에서 제어하여 각각의 장비로 필요한 만큼의 양의 물을 효과적으로 공급할 수 있는 장치가 필요하다.
Therefore, when supplying cooling water to several equipment, it is necessary to control the amount of cooling water to be supplied to each equipment in one place, and to efficiently supply the necessary amount of water to each equipment.

본 발명은 전술한 문제를 해결하기 위하여 안출한 것으로서, 다수개의 장비에 동시에 물을 공급하는 PCW(Process Cooling Water) 메인라인으로부터 물을 급수헤더가 공급받아 캐소드수반을 통해 유량제어를 한 다음 챔버나 장비들을 냉각하도록 물을 공급하고, 장비를 냉각시킨 물은 캐소드수반을 통해 배수헤더로 보내져 다시 PCW 메인라인으로 순환하는 냉각수 공급장치를 제공하고자 하는 목적이 있습니다.SUMMARY OF THE INVENTION The present invention has been conceived to solve the above-mentioned problems, and it is an object of the present invention to provide a system and method for supplying water from a PCW (Process Cooling Water) main line for simultaneously supplying water to a plurality of equipments, The purpose is to supply water to cool the equipment and to provide cooling water that circulates the equipment back to the PCW main line via the cathode head to the drain header.

각 장비로 들어가는 냉각수를 한 곳에서 유량체크 및 유량 조절을 하여 각각의 장비에서 필요한 냉각수 만큼 공급하여 적절한 냉각이 이루어지도록 구성하고자 한다.The cooling water entering each equipment should be checked in one place for flow rate control and flow rate so that the necessary cooling water is supplied to each equipment so that proper cooling is achieved.

본 발명은 전술한 목적을 달성하기 위해 각각 다른 굵기의 냉각 배관을 구비한 다수의 장비(2)에 냉각수를 공급하는 PCW 메인라인(1)에 급수헤더(10)를 연결하고, 급수헤더(10)는 캐소드유닛(20)에 연결되며, 캐소드유닛(20)은 다수의 장비(2)에 연결되어 PCW메인라인(1)으로 부터 공급된 냉각수를 공급하되 각각의 장비(2)에 설정된 유량만큼 공급하도록 각각의 장비(2)와 연결된 라인에 유량측정기와 솔레노이드밸브가 설치되고, 캐소드유닛(20)은 배수헤더(30)와 연결되어 장비(2)를 냉각한 냉각수를 회수하며, 배수헤더(30)는 PCW메인라인(1)과 연결된 것을 특징으로 하며, 캐소드 유닛(20)은 케이스(21)에 다수개의 캐소드인(22) 연결구가 형성되고, 캐소드인(22)은 내부 배관을 통해 장비 인(26) 연결구가 연결되며, 장비 인(26) 라인은 냉각수가 유입될 장비와 연결되어 공급되는 냉각수에 의해 장비가 냉각되고. 장비로 공급되는 냉각수는 캐소드 유닛(20)의 전면에 형성된 디스플레이창(28)을 통해 그 유량이 표시되며, 캐소드 유닛(20)의 유량측정기에 알람이 설치되어 측정된 유량이 설정된 유량보다 작거나 커지면 알람이 발생시켜 수동으로 조작하도록 구성된 것을 특징으로 하는 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치를 제공한다. 그리고 캐소드유닛(20)은 선택적으로 메인유닛(40)과 연결되고, 메인유닛(40)은 매니폴드에 냉각수를 공급하도록 연결되며, 매니폴드는 펌프 또는 작은장비를 냉각하도록 연결되고, 캐소드유닛(20)은 챔버 또는 문짝 장비를 냉각하도록 연결되는 것을 특징으로 하는 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치를 제공한다.
In order to achieve the above-mentioned object, the present invention is characterized in that a water supply header (10) is connected to a PCW main line (1) for supplying cooling water to a plurality of equipments (2) Is connected to the cathode unit 20 and the cathode unit 20 is connected to the plurality of equipments 2 to supply the cooling water supplied from the PCW main line 1, A flow meter and a solenoid valve are installed in a line connected to each of the equipment 2 and the cathode unit 20 is connected to a drain header 30 to recover the cooling water that has cooled the equipment 2, 30 are connected to the PCW main line 1 and the cathode unit 20 is formed with a plurality of cathode inlets 22 in the case 21 and the cathode inlets 22 are connected through the internal piping (26) is connected, and the equipment (26) line is connected to the equipment to which the cooling water is to be introduced The equipment is cooled by the cooling water that class. The cooling water supplied to the equipment is displayed through the display window 28 formed on the front surface of the cathode unit 20 and an alarm is installed in the flow meter of the cathode unit 20 so that the measured flow rate is smaller than the set flow rate And an alarm is generated when the temperature of the cooling water is increased, thereby manually operating the cooling water supply device. The cathode unit 20 is selectively connected to the main unit 40 and the main unit 40 is connected to supply cooling water to the manifolds. The manifold is connected to cool the pump or small equipment, 20 are connected to cool the chamber or the door equipment. The cooling water supply device uniformly regulates the internal temperature of the cooling device.

본 발명은 다수의 장비로 공급되는 냉각수를 한 곳에서 종합적으로 관리할 수 있어 편리하고, PCW메인라인과 냉각수가 작용하는 각 장비 사이에 캐소드유닛을 두어 유량체크 및 자동 조절이 되는 효과가 있다.The present invention is advantageous in that the cooling water supplied to a plurality of equipment can be collectively managed in one place, and the cathode unit is installed between the PCW main line and each equipment in which the cooling water operates to check the flow rate and automatically adjust the flow rate.

따라서 정밀한 온도제어가 이루어져야 하는 장비의 냉각수를 필요에 따라 조절할 수 있는 효과가 있다.Therefore, it is possible to control the cooling water of equipment that requires precise temperature control as needed.

장비에 공급되는 배관의 굵기에 따라 공급되는 냉각수의 양이 달라져야 하지만 종래에는 같은 유량을 공급하되 각 장비에서 유량을 조절했던 것을 개선하여 각 장비가 필요한 유량을 캐소드 유닛에서 설정하여 필요한 양만큼 냉각수를 공급할 수 있게 되어 개개의 장비에서 수동으로 유량조절을 할 필요가 없게 되었다.
The amount of cooling water to be supplied must be changed according to the thickness of the piping supplied to the equipment. However, in the past, the same flow rate was supplied, but the flow rate was adjusted in each equipment so that the required flow rate of each equipment was set in the cathode unit, This eliminates the need for manual flow control on individual instruments.

도 1은 본 발명의 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치가 작동하는 플로우를 도시한 순서도.
도 2는 본 발명의 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치의 캐소드유닛을 도시한 배면도.
도 3은 본 발명의 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치의 캐소드유닛의 내부를 도시한 일부 생략 측면도.
도 4는 본 발명의 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치의 캐소드 유닛을 도시한 정면도.
도 5는 본 발명의 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치의 메인유닛을 도시한 도면.
도 6은 본 발명의 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치의 급수헤더를 도시한 도면.
도 7은 본 발명의 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치의 배수헤더를 도시한 도면.BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing the flow of operation of a cooling water supply device that uniformly regulates the internal temperature of the cooling device of the present invention; Fig.
Fig. 2 is a rear view showing a cathode unit of a cooling water supply device for uniformly controlling the internal temperature of the cooling device of the present invention. Fig.
3 is a partially omitted side view showing the inside of a cathode unit of a cooling water supply device that uniformly regulates the internal temperature of the cooling device of the present invention.
4 is a front view showing a cathode unit of a cooling water supply device for uniformly controlling the internal temperature of the cooling device of the present invention.
5 is a view showing a main unit of a cooling water supply device for uniformly controlling the internal temperature of the cooling device of the present invention.
6 is a view showing a water supply header of a cooling water supply device for uniformly controlling the internal temperature of the cooling device of the present invention.
7 is a view showing a drain header of a cooling water supply device that uniformly regulates the internal temperature of the cooling device of the present invention.

이하 첨부된 도면을 참조하여 본 발명의 구성을 상세히 설명하면 다음과 같다.Hereinafter, the configuration of the present invention will be described in detail with reference to the accompanying drawings.

본 명세서 및 청구범위에 사용된 용어나 단어는 통상적이거나 사전적인 의미로 한정해서 해석하여서는 되지 않고, 발명자는 그 자신의 발명을 가장 최선의 방법으로 설명하기 위해 용어의 개념을 적절하게 정의할 수 있다는 원칙에 입각하여 본 발명의 기술적 사상에 부합하는 의미와 개념으로 해석되어야만 한다.The terms and words used in the present specification and claims are not to be construed as limited to ordinary or dictionary terms and the inventor can properly define the concept of the term to describe its invention in the best way And should be construed in accordance with the principles and meanings and concepts consistent with the technical idea of the present invention.

본 발명의 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 시스템은 메인유닛(MAIN WATER UNIT), 캐소드 유닛(CATHODE WATER UNIT), 매니폴드(MANIFOLD), 급수헤더(WATER IN HEADER), 배수헤더(WATER OUT HEADER)가 구비된다.The cooling water supply system for uniformly controlling the internal temperature of the cooling device of the present invention includes a main unit (MAIN WATER UNIT), a cathode unit (CATHODE WATER UNIT), a manifold (MANIFOLD), a water header (WATER IN HEADER) WATER OUT HEADER).

수반에서, 메인유닛(MAIN WATER UNIT)과 매니폴드를 통하여 이루어지는 냉각수의 흐름은 메인유닛(40)을 통해 PCW 메인라인(1)에서 냉각수가 유입되고, 물공급매니폴드(42)를 통해 펌프, 작은 장비들을 냉각한다. 펌프, 작은 장비를 냉각한 후에 각각의 리턴매니폴드(43)를 통해 물이 회수되고 다시 메인유닛(40)을 통해 PCW 메인라인(1)으로 보내진다. 이때 캐소드 유닛(20)의 매니폴드인(24), 매니폴드아웃(25) 라인을 통해 공급될 수 있다.The cooling water flowing through the main unit and the manifold flows in the PCW main line 1 through the main unit 40 and flows through the water supply manifold 42 to the pump, Cool small appliances. After the pump and the small equipment are cooled, water is recovered through each return manifold 43 and sent back to the PCW main line 1 through the main unit 40 again. At this time, the manifold 24 of the cathode unit 20 can be supplied through the manifold out 25 line.

본 발명의 캐소드 유닛(CATHODE WATER UNIT)을 이용한 냉각수 공급 시스템은 도면에 도시된 바와 같이 다음 같은 냉각수 공급 순서를 가지게 된다. 펌프나 작은 장비들은 전술한 메인유닛(40)을 통해 공급하고, 챔버, 문짝 장비들은 캐소드 유닛(20)을 통해 공급된다.The cooling water supply system using the cathode unit of the present invention has the following order of supplying cooling water as shown in the figure. The pump or small equipment is supplied through the main unit 40 described above, and the chamber and door equipment are supplied through the cathode unit 20.

PCW 메인라인(1)과 급수헤더(10)가 연결되어 PCW 메인라인(1)으로 부터 냉각수가 급수헤더(10)의 몸체(11) 내부로 유입된다. 급수헤더(10)의 몸체(11)에는 다수개의 캐소드인 연결부(14)가 형성되어 캐소드 유닛(20)의 캐소드인(22) 라인과 연결된다.The PCW main line 1 and the water supply header 10 are connected so that the cooling water flows into the body 11 of the water supply header 10 from the PCW main line 1. A plurality of cathode connection portions 14 are formed in the body 11 of the water supply header 10 and connected to the cathode 22 line of the cathode unit 20.

캐소드 유닛(20)은 케이스(21)에 다수개의 캐소드인(22) 연결구가 형성되고, 캐소드인(22)은 내부 배관을 통해 장비 인(26) 연결구가 연결된다. 장비인(26) 라인은 냉각수가 유입될 장비와 연결되어 공급되는 냉각수에 의해 장비가 냉각된다. 이때 유입되는 냉각수는 캐소드 유닛(20)의 전면에 형성된 디스플레이창(28)을 통해 그 유량이 표시된다.The cathode unit 20 is formed with a plurality of cathode inlets 22 in the case 21 and the cathode in 22 is connected to the equipment inlets 26 through internal pipes. The equipment (26) line is connected to the equipment to which the cooling water is to be introduced and the equipment is cooled by the cooling water supplied. At this time, the flow rate of the incoming cooling water is displayed through the display window 28 formed on the front surface of the cathode unit 20.

수반장비는 냉각수 유닛 구성품이고, 각 장치 중 급수헤더(10)는 PCW 메인라인(1)에서 캐소드 유닛(20)으로 냉각수를 분배해 주는 서브 메일 역할을 한다.The accompanying equipment is a component of the cooling water unit, and the water supply header 10 of each device serves as a sub-mail for distributing the cooling water from the PCW main line 1 to the cathode unit 20. [

급수헤더(10)는 도 6에 도시된 바와 같이 몸체(11)의 단부에 메인연결부(12)가 형성되어 PCW메인라인(1)에 연결되어 냉각수가 몸체(11) 내부로 공급된다. 몸체(11)의 일측에 다수의 캐소드인연결부(14)가 형성되는데, 캐소드인연결부(14)와 캐소드유닛(20)의 케소드인(22) 연결부에 배관으로 연결된다.6, the main header 12 is formed at the end of the body 11 and connected to the PCW main line 1 to supply the cooling water into the body 11. A plurality of cathode connection portions 14 are formed on one side of the body 11 and connected to the cathode connection portion 14 and the cathode connection portion 22 of the cathode unit 20 by piping.

급수헤더(10)의 일측에 압력게이지(13)가 형성되어 공급되는 냉각수의 수압을 측정하게된다.A pressure gauge 13 is formed on one side of the water supply header 10 to measure the water pressure of the cooling water supplied.

캐소드유닛(20)은 급수 헤더(10)에서 냉각수를 공급받아 장비 측 외벽이나 내부의 온도를 하강시키는 장비인데 각 위치마다 냉각수 양을 조절할 수 있도록 형성된다.The cathode unit 20 receives cooling water from the water supply header 10 and lowers the temperature of the outer wall or the inside of the equipment. The cathode unit 20 is formed so as to control the amount of cooling water for each position.

즉 각 장비 위치마다 필요한 냉각수의 양이나 온도를 측정할 수 있도록 센서가 부착되어 있고, 센서의 측정량에 따라 캐소드유닛(20)에서 밸브의 잠금을 조절하여 공급하는 유량을 조절할 수 있게 된다.That is, a sensor is attached to measure the amount and temperature of the cooling water required for each equipment position, and the flow rate of the cathode unit 20 can be adjusted by controlling the locking of the valve according to the measured amount of the sensor.

그리고 각 장비(2)에서 냉각수의 양, 온도의 설정치 보다 냉각수의 양이 적거나 많을 때에는 알람이 작동하도록 알람장치가 설치된다. 이와 같이 알람이 작동하면 수동으로 장치를 조절한다.An alarm device is installed in each equipment (2) so that the alarm is activated when the amount of cooling water is less or more than the set value of the amount of cooling water and the temperature. If the alarm is activated, adjust the device manually.

이와 같이 캐소드 유닛(20)에서 다수의 장비(2)로 들어가는 냉각수를 한 장치에서 조절할 수 있게 되어 편리하고, 관리 인력이 절감된다.As described above, the cooling water entering the plurality of equipments 2 from the cathode unit 20 can be controlled by one device, which saves the manpower.

배수헤더(30)는 캐소드 수반에서 장비로 거쳐 가는 냉각수를 모아서 PCW 메인라인(1)으로 보내는 역할을 한다.The drain header 30 collects the cooling water passing from the cathode to the equipment and sends it to the PCW main line 1.

도 7에 도시된 바와 같이 배수헤더(30)는 몸체(31)의 단부에 PCW 메인라인(1)과 연결되는 메인연결부(32)가 형성되고, 몸체(31) 일측에는 다수의 캐소드유닛(20)에 캐소드아웃연결부(33)가 연결된다.7, the drain header 30 includes a main connection portion 32 connected to the PCW main line 1 at an end of the body 31, and a plurality of cathode units 20 The cathode out connection portion 33 is connected.

매니폴드는 장비 구성품 중 PUMP를 냉각시키는 역할을 하며 메인유닛(40)은 PCW 메인라인에서 매니폴드로 냉각수를 급수 및 배수 역할을 하는 장치이다.The manifold serves to cool the PUMP of the equipment components and the main unit 40 serves to feed and drain the cooling water from the PCW main line to the manifold.

메인유닛(40)은 매니폴드 류에 냉각수 급수 및 배수 역할 외에 N2가스, Air라인을 공급하는 서브 메인 역할을 한다.The main unit 40 serves as a sub-main to supply N2 gas and Air line in addition to the cooling water supply and drainage to the manifolds.

캐소드 유닛(20)의 내부에는 솔레노이드밸브가 설치되어 유량을 조절할 수 있고, 장비로 들어가는 라인에 유량측정기가 설치되며, 그 측정값은 디스플레이창(28)에 표시된다.A solenoid valve is provided inside the cathode unit 20 to adjust the flow rate. A flow meter is installed in the line to enter the equipment. The measured value is displayed on the display window 28.

이와 같이 각각의 장비에서 필요한 냉각수량을 캐소드 유닛(20)에서 한번에 연결하여 각각의 장비에 필요한 냉각수 양만큼 공급할 수 있게 된다.
As described above, the cooling water required in each of the equipments can be connected to the cathode unit 20 at a time, and the amount of cooling water required for each equipment can be supplied.

1 : PCW 메인라인 2 : 장비
10 : 급수헤더 11 : 몸체
12 : 메인연결부 13 : 압력게이지
14 : 캐소드인 연결부 20 : 캐소드 유닛
21 : 케이스 22 : 캐소드인
23 : 캐소드아웃 24 : 매니폴드인
25 : 매니폴드아웃 26 : 장비인
27 : 장비아웃 28 : 디스플레이창
29 : 조절밸브 30 : 배수헤더
31 : 몸체 32 : 메인연결부
33 : 캐소드아웃연결부 40 : 메인유닛
41 : 케이스 42 : 물공급매니폴드
43 : 리턴매니폴드1: PCW main line 2: Equipment
10: water supply header 11: body
12: main connection part 13: pressure gauge
14: cathode connection 20: cathode unit
21: Case 22:
23: cathode out 24: manifold in
25: manifold out 26: equipment
27: Equipment out 28: Display window
29: Control valve 30: Drain header
31: body 32: main connection part
33: cathode out connection part 40: main unit
41: Case 42: Water supply manifold
43: return manifold

Claims (4)

각각 다른 굵기의 냉각 배관을 구비한 다수의 장비(2)에 냉각수를 공급하는 PCW 메인라인(1)에 급수헤더(10)를 연결하고, 급수헤더(10)는 캐소드유닛(20)에 연결되며, 캐소드유닛(20)은 다수의 장비(2)에 연결되어 PCW메인라인(1)으로 부터 공급된 냉각수를 공급하되 각각의 장비(2)에 설정된 유량만큼 공급하도록 각각의 장비(2)와 연결된 라인에 유량측정기와 솔레노이드밸브가 설치되고, 캐소드유닛(20)은 배수헤더(30)와 연결되어 장비(2)를 냉각한 냉각수를 회수하며, 배수헤더(30)는 PCW메인라인(1)과 연결된 것을 특징으로 하는 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치.
The water supply header 10 is connected to the PCW main line 1 for supplying cooling water to a plurality of equipments 2 having cooling pipes of different thicknesses, and the water supply header 10 is connected to the cathode unit 20. , The cathode unit 20 is connected to a plurality of equipment (2) is connected to each of the equipment (2) to supply the cooling water supplied from the PCW main line (1) at a set flow rate to each equipment (2) A flow meter and a solenoid valve are installed in the line, and the cathode unit 20 is connected to the drainage header 30 to recover the cooling water cooling the equipment 2, and the drainage header 30 is connected to the PCW main line 1. Cooling water supply device for uniformly adjusting the internal temperature of the cooling device, characterized in that connected.
제 1 항에 있어서,
캐소드 유닛(20)은 케이스(21)에 다수개의 캐소드인(22) 연결구가 형성되고, 캐소드인(22)은 내부 배관을 통해 장비 인(26) 연결구가 연결되며, 장비 인(26) 라인은 냉각수가 유입될 장비와 연결되어 공급되는 냉각수에 의해 장비가 냉각되고. 장비로 공급되는 냉각수는 캐소드 유닛(20)의 전면에 형성된 디스플레이창(28)을 통해 그 유량이 표시되는 것을 특징으로 하는 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치.
The method of claim 1,
The cathode unit 20 is formed with a plurality of cathode inlets 22 in the case 21 and the cathode in 22 is connected to the equipment inlets 26 through the internal piping, The cooling water is cooled by the cooling water supplied to the equipment to be introduced. Wherein the cooling water supplied to the equipment is displayed through the display window (28) formed on the front surface of the cathode unit (20).
제 1 항 또는 제 2 항에 있어서,
캐소드 유닛(20)의 유량측정기에 알람이 설치되어 측정된 유량이 설정된 유량보다 작거나 커지면 알람이 발생시켜 수동으로 조작하도록 구성된 것을 특징으로 하는 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치.
3. The method according to claim 1 or 2,
Wherein an alarm is provided to the flow meter of the cathode unit (20) so that an alarm is generated when the measured flow rate is smaller than or greater than the set flow rate, thereby manually operating the internal temperature of the cooling device.
제 1 항에 있어서,
캐소드유닛(20)은 선택적으로 메인유닛(40)과 연결되고, 메인유닛(40)은 매니폴드에 냉각수를 공급하도록 연결되며, 매니폴드는 펌프 또는 작은장비를 냉각하도록 연결되고, 캐소드유닛(20)은 챔버 또는 문짝 장비를 냉각하도록 연결되는 것을 특징으로 하는 냉각장치의 내부온도를 균일하게 조절하는 냉각수 공급 장치.
The method of claim 1,
The cathode unit 20 is optionally connected to the main unit 40 and the main unit 40 is connected to supply cooling water to the manifold which is connected to cool the pump or small equipment and the cathode unit 20 ) Is connected to cool the chamber or the door equipment.
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