KR20140015832A - Fine optical axis adjuster - Google Patents

Fine optical axis adjuster Download PDF

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KR20140015832A
KR20140015832A KR1020120081214A KR20120081214A KR20140015832A KR 20140015832 A KR20140015832 A KR 20140015832A KR 1020120081214 A KR1020120081214 A KR 1020120081214A KR 20120081214 A KR20120081214 A KR 20120081214A KR 20140015832 A KR20140015832 A KR 20140015832A
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South Korea
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thermal field
field emission
optical axis
emission tip
bellows
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KR1020120081214A
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Korean (ko)
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박만진
장동영
김기환
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서울과학기술대학교 산학협력단
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Priority to KR1020120081214A priority Critical patent/KR20140015832A/en
Publication of KR20140015832A publication Critical patent/KR20140015832A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/023—Means for mechanically adjusting components not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

The present invention relates to a fine optical axis adjustment device and a thermal emission module device including the same. The fine optical axis adjustment device according to the present invention comprises a left and right directional shifting means that can move thermal field emission tips, which have an electric bean emitting hole of which generated electrons pass through to be emitted as an electric beam, to the left and right directions corresponding to the x-axis on a plane; and a longitudinal direction shifting means that can move the thermal field emission tips in the front and back directions corresponding to the Y-axis. The fine optical axis adjustment device according to the present invention makes the operation of integrally matching the optical axis easier and quicker and the volume of the device is small compared with others since only the thermal field emission tips including the electric beam emitting hole is moved on the X and Y axis instead of moving the whole electric beam emitting unit. The present invention has a characteristic of being more simple and compact by implementing the left and right directional shifting means or the longitudinal direction shifting means, if the structure is composed of a bellows, an adjusting bolt, and an elastic body.

Description

미세 광축조정장치 및 이를 포함한 열전계방출형 건모듈 장치{omited}Fine optical axis adjusting device and thermoelectric emission type gun module device including the same

본 발명은 주사전자현미경이나 투과전자현미경에서 방출되는 전자빔을 소정의 광축에 일치시킬 수 있도록 된 구조에 관한 것이다.
The present invention relates to a structure in which an electron beam emitted from a scanning electron microscope or a transmission electron microscope can be matched to a predetermined optical axis.

반도체 제조분야 등 다양한 산업분야에서 각종 전자현미경이 사용되고 있다. Various electron microscopes are used in various industrial fields such as semiconductor manufacturing.

전자현미경은 크게 주사전자현미경(Scanning Electron Microscope)과 투과전자현미경(Transmission Electron Microscope)으로 구분되는데 모두 전자빔을 방출하여 시료를 관찰할 수 있도록 된 것이다.The electron microscope is divided into a scanning electron microscope and a transmission electron microscope. The electron microscope is capable of observing a sample by emitting an electron beam.

일반적으로 투과전자현미경(Transmission Electron Microscope)은 물질의 상(phase), 성분, 특성 및 불량을 분석하기 위한 것으로서 박막(약 1000Å 이하)의 시료를 제조하여 고정시킨 후 고전위차로 가속시킨 전자빔을 시료에 입사 및 투과시켜서 물질의 상 및 성분 등을 얻는 구조이다.Generally, a transmission electron microscope is used to analyze phase, component, characteristic and defect of a material. A sample of a thin film (about 1000 Å or less) is prepared and fixed, and an electron beam accelerated by a high potential difference is sampled So that the phases and components of the material are obtained.

주사전자현미경은 시료면 위에 전자빔이 주사(scanning)될 때 시료에서 발생되는 여러 가지 신호 중 이차전자(secondary electron) 또는 반사전자(back scattered electron)를 검출하는 것으로 대상 시료를 관찰한다.The scanning electron microscope observes the target sample by detecting secondary electrons (back scattered electrons) among various signals generated in the sample when the electron beam is scanned on the sample surface.

주사전자현미경이나 투과전자현미경 모두 광원과 광원렌즈를 대신하여 전자선과 전자 렌즈가 사용되며, 전자빔은 고진공 상태에서 방출된다.In both the scanning electron microscope and the transmission electron microscope, an electron beam and an electron lens are used in place of the light source and the light source lens, and the electron beam is emitted in a high vacuum state.

전자현미경에서 전자빔이 방출되는 방식은 발생된 전자가 써멀필드이미션팁(thermal field emissoin tip)의 작은 전자빔방출홀을 통과하면서 전자빔이 되어 방출되는 방식이다.In the electron microscope, the electron beam is emitted by passing the small electron beam emission hole of the thermal field emissoin tip.

한국 특허출원 제10-1999-0039586호 및 한국 특허출원 제10-2008-0133625호에는 주사전자현미경과 투과전자현미경의 구조에 대하여 제시되어 있다. Korean Patent Application No. 10-1999-0039586 and Korean Patent Application No. 10-2008-0133625 disclose structures of a scanning electron microscope and a transmission electron microscope.

이러한 전자현미경에서 시료의 관찰을 위해서는 방출되는 전자빔을 광축에 일치시키는 광축 조정작업이 요구된다.(광축은 상, 하로 연장된 하나의 직선 형태로서 시료의 관찰을 위한 직선이 됨)In order to observe the sample under such an electron microscope, an optical axis adjustment operation is required to match the emitted electron beam to the optical axis. (The optical axis is a straight line extending up and down, and becomes a straight line for observation of the sample.)

종래에는 광축을 일치시키기 위해서 전자빔방출부(전자총과 팁 등으로 이루어진 부분) 전체를 움직이는 구조로 되어 있어 광축을 일치시키는 작업에 상당한 어려움과 숙련도가 요구되는 문제점이 있었다. Conventionally, since the entire structure of the electron beam emitter (part consisting of an electron gun and a tip) is moved to match the optical axis, there is a problem that a considerable difficulty and skill are required to match the optical axis.

또, 광축 조정장치로 인해 전자현미경의 부피가 커지는 문제점도 있었다.
In addition, there is a problem that the volume of the electron microscope becomes large due to the optical axis adjusting device.

한국 특허출원 제10-1999-0039586호Korean Patent Application No. 10-1999-0039586 한국 특허출원 제10-2008-0133625호Korean Patent Application No. 10-2008-0133625

본 발명은 상기와 같은 문제점을 해소하려는 것으로서, 더욱 상세하게는 전자현미경의 광축을 일치시키는 작업이 용이하고 신속하게 이루어지도록 할 수 있으며, 부피가 작아 소형화가 가능하게 하는 미세 광축조정장치 및 이를 포함한 열전계방출형 건모듈 장치를 제공하려는데 목적이 있다.
The present invention is to solve the above problems, more specifically, it is possible to make the operation of matching the optical axis of the electron microscope to be made easily and quickly, the micro-optical adjustment device that allows the miniaturization of the small volume and including the same It is an object of the present invention to provide a thermal field emission type gun module device.

본 발명에서는 전자빔방출부 전체를 움직이는 것이 아니라 전자빔방출홀을 갖는 써멀필드이미션팁(thermal field emissoin tip)만을 평면상의 X축과 Y축으로 이동시켜 광축의 조정작업이 이루어지도록 함으로써 광축을 일치시키는 작업이 용이하고 신속하게 이루어질 수 있도록 한다.In the present invention, instead of moving the entire electron beam emitter, only the thermal field emissoin tip having the electron beam emitter hole is moved to the X and Y axes on a plane to adjust the optical axis so that the optical axis is adjusted. This can be done easily and quickly.

이러한 본 발명의 광축 조정장치는, 발생된 전자가 통과하여 방출되면서 전자빔이 되도록 하는 전자빔방출홀을 갖는 써멀필드이미션팁(thermal field emissoin tip)을 평면상의 X축에 해당하는 좌, 우 방향으로 이동시킬 수 있는 좌우방향이동수단을 갖는다.The optical axis adjusting device of the present invention moves a thermal field emissoin tip having an electron beam emission hole for generating generated electrons as it passes through and is emitted in a left and right direction corresponding to the X axis on a plane. It has a horizontal movement means that can be made.

또, 써멀필드이미션팁을 평면상의 Y축 방향에 해당하는 전,후 방향으로 이동시킬 수 있는 전후방향이동수단을 갖는다.
Moreover, it has the front-back direction movement means which can move a thermal field emission tip to the front-back direction corresponding to the Y-axis direction on a plane.

본 발명의 미세 광축조정장치는, 전자빔방출부 전체를 움직이는 것이 아니라 전자빔방출홀을 갖는 써멀필드이미션팁(thermal field emissoin tip)만을 평면상의 X축과 Y축 방향으로 이동시켜 광축의 조정작업이 이루어지도록 하는 것이므로 광축을 일치시키는 작업이 용이하고 작업이 신속하게 이루어지며, 부피가 작은 특징이 있다.The fine optical axis adjusting device of the present invention does not move the entire electron beam emitting unit but moves only the thermal field emissoin tip having the electron beam emitting hole in the X- and Y-axis directions on a plane to adjust the optical axis. It is easy to match the optical axis, the work is done quickly, and it is small in volume.

본 발명의 좌우방향이동수단이나 전후방향이동수단을 구현함에 있어 벨로즈, 조정볼트, 탄성체, 연결축을 갖는 형태로 이루어진 경우 구조가 간단하고 더욱 더 소형화가 가능한 특징이 있다.
When implementing the left and right direction moving means or the front and rear direction moving means of the present invention has a feature that the bellows, the adjustment bolt, the elastic body, the form having a connecting shaft is simple and even more compact.

도 1은 종래 일반적인 주사전자현미경의 개략도
도 2는 본 발명의 구성요소인 좌우방향이동수단과 전후방향이동수단을 설명하기 위한 개략도1 is a schematic view of a conventional scanning electron microscope
Figure 2 is a schematic diagram for explaining the left and right direction moving means and the front and rear direction moving means of the components of the present invention;

이하, 첨부된 도면을 사용해서 본 발명을 더욱 구체적으로 설명하나 첨부된 도면은 본 발명을 구체적으로 설명하기 위한 하나의 예를 도시한 것에 불과하므로 본 발명의 기술적 사상 및 특허청구범위의 기재가 첨부된 도면의 형태로 한정되는 것은 아님을 밝힌다.Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings, but the accompanying drawings show only one example for describing the present invention in detail, and thus, the description of the technical idea and the claims of the present invention is attached. It is not limited to the form of the drawings.

본 발명은 주사전자현미경이나 투과전자현미경과 같은 전자현미경에서 광축의 일치를 위해 광축을 조정하는 장치에 관한 것이다.The present invention relates to an apparatus for adjusting the optical axis for coincidence of the optical axis in an electron microscope such as a scanning electron microscope or a transmission electron microscope.

그런데 본 발명은 전자현미경의 광축을 일치시키는 작업이 용이하고 신속하게 이루어지며, 부피를 적게 차지하는 광축 조정장치가 되도록 하려는 목적을 갖는다. However, the present invention has an object to make the operation of matching the optical axis of the electron microscope is made easily and quickly, and to be an optical axis adjusting device occupying less volume.

이를 위하여 본 발명에서는 전자빔방출부(1) 전체를 움직이는 것이 아니라 전자빔방출홀을 갖는 써멀필드이미션팁(2, thermal field emissoin tip)만을 평면상의 X축과 Y축 방향으로 이동시켜 광축의 조정작업이 이루어지도록 한다.To this end, in the present invention, instead of moving the entire electron beam emitting unit 1, only the thermal field emission tip 2 having the electron beam emitting hole is moved in the X-axis and Y-axis directions on a plane to adjust the optical axis. To be done.

따라서 본 발명의 미세 광축조정장치는, 발생된 전자가 통과하여 방출되면서 전자빔이 되도록 하는 전자빔방출홀(2a)을 갖는 써멀필드이미션팁(2, thermal field emissoin tip)을 평면상의 X축에 해당하는 좌, 우 방향으로 이동시킬 수 있는 좌우방향이동수단(10)을 갖는다.Therefore, the fine optical axis adjustment device of the present invention corresponds to the X-axis on the plane of the thermal field emission tip (2) having an electron beam emission hole (2a) for generating the electron beam as the generated electrons pass through It has a left and right moving means 10 that can move in the left, right direction.

또, 써멀필드이미션팁(2)을 평면상의 Y축 방향에 해당하는 전,후 방향으로 이동시킬 수 있는 전후방향이동수단(20)을 갖는다.Moreover, it has the front-back direction movement means 20 which can move the thermal field emission tip 2 to the front-back direction corresponding to the Y-axis direction on a plane.

본 발명의 구성요소인 좌우방향이동수단(10)이나 전후방향이동수단(20)은 다양한 형태로 구현할 수 있다.The left and right direction moving means 10 or the front and rear direction moving means 20, which is a component of the present invention, may be implemented in various forms.

그러나 전자현미경의 외형을 형성하는 하우징(3, 내부에 써멀필드이미션팁(2)을 내장하고 있는 형태임)은 내부가 진공상태이기 때문에 하우징(3)의 내부와 외부를 연결하기 위해 천공된 홀(3a. 조정장치의 구동 제어를 위한 것)을 차단하는 것에 어려움이 있다.However, the housing 3 forming the external shape of the electron microscope (in which the thermal field emission tip 2 is embedded) has a perforated hole for connecting the inside and the outside of the housing 3 because the inside is in a vacuum state. (3a. For driving control of the regulating device).

따라서 좌우방향이동수단(10)이나 전후방향이동수단(20)은 도 2와 같은 형태로 구현하는 것이 좋다.Therefore, the left and right direction moving means 10 or the front and rear direction moving means 20 may be implemented in the form as shown in FIG.

도 2의 좌우방향이동수단(10)은 진공을 형성하면서 내부에 써멀필드이미션팁(2)을 내장하고 있는 하우징(3)의 홀(3a)을 차단하여 하우징(3)의 내부가 진공상태를 유지하도록 하면서 하우징(3)의 내부와 외부를 연결하고 있는 벨로즈(11, bellows)를 가지고 있다.The left and right movement means 10 of FIG. 2 blocks a hole 3a of the housing 3 in which the thermal field emission tip 2 is incorporated while forming a vacuum, so that the inside of the housing 3 is vacuumed. It has bellows 11 connecting the inside and the outside of the housing 3 while maintaining it.

또, 벨로즈(11)와 연결되어 벨로즈(11)가 써멀필드이미션팁(2) 방향으로 늘어나도록 하는 조정볼트(12)를 가지고 있다.In addition, it has an adjustment bolt 12 connected to the bellows 11 so that the bellows 11 extends in the direction of the thermal field emission tip 2.

또, 써멀필드이미션팁(2)을 조정볼트(12) 방향으로 이동시키고 있는 탄성체(13)를 가지고 있다.Moreover, it has the elastic body 13 which moves the thermal field emission tip 2 to the adjustment bolt 12 direction.

또, 어느 한쪽은 벨로즈와 연결되고 다른 한쪽은 써멀필드이미션팁(2)과 연결되어 있어 조정볼트(12)의 회전에 의해 벨로즈(11)가 써멀필드이미션팁(2) 방향으로 늘어나면 상기 탄성체(13)를 수축시키면서 써멀필드이미션팁(2)을 이동시키는 연결축(14)을 가지고 있다.In addition, one end is connected to the bellows and the other end is connected to the thermal field emission tip 2, so that the bellows 11 extends toward the thermal field emission tip 2 by the rotation of the adjusting bolt 12. It has a connecting shaft 14 for moving the thermal field emission tip 2 while contracting the elastic body 13.

따라서 조정볼트(12)를 회전시켜 벨로즈(11)가 써멀필드이미션팁(2) 방향으로 늘어나면 써멀필드이미션팁(2)이 전진되고 조정볼트(12)를 반대방향으로 회전시키면 벨로즈가 줄어들고 탄성체(13)가 써멀필드이미션팁(2)을 밀어 써멀필드이미션팁(2)이 후진한다. Therefore, when the adjustment bolt 12 is rotated so that the bellows 11 extends in the direction of the thermal field emission tip 2, the thermal field emission tip 2 is advanced and the adjustment bolt 12 is rotated in the opposite direction. The thermal field emission tip 2 is retracted by shrinking and the elastic body 13 pushing the thermal field emission tip 2.

첨부된 도면에서와 같이 전후방향이동수단(20)도 좌우방향이동수단(10)과 같이 벨로즈(21), 조정볼트(22), 탄성체(23), 연결축(24)을 갖는 형태로 구현할 수 있다.
As shown in the accompanying drawings, the forward and backward movement means 20 may also be embodied in a form having a bellows 21, an adjustment bolt 22, an elastic body 23, and a connecting shaft 24, like the left and right movement means 10. Can be.

본 발명에 있어서, 써멀필드이미션팁에는 고전압이 인가되므로 인가되는 접압에 영향을 미치지 않고 조정볼트(12)를 잡는 사용자의 보호를 위해서 써멀필드이미션팁(2)에 인가되는 전류가 조정볼트(12)에 전달되지 않도록 할 필요성이 있다.In the present invention, since the high voltage is applied to the thermal field emission tip, the current applied to the thermal field emission tip 2 is applied to the thermal field emission tip 2 for the protection of the user grasping the adjustment bolt 12 without affecting the applied voltage. It is necessary to prevent transmission to).

이를 위해서 전술한 좌우방향이동수단(10)이나 전후방향이동수단(20)의 연결축(14) 등은 절연체로 구현하는 것이 좋다.To this end, the connecting shaft 14 or the like of the left and right direction moving means 10 or the front and rear direction moving means 20 may be implemented with an insulator.

연결축(14)이 절연체인 경우 하우징(3) 등의 다른 구성요소에 전압이 인가되는 것이 방지되기 때문이다.
This is because when the connecting shaft 14 is an insulator, voltage is prevented from being applied to other components such as the housing 3.

1. 전자빔방출부
2 써멀필드이미션팁
2a. 전자빔방출부
3. 하우징
3a. 홀
10. 좌우방향이동수단
11. 벨로즈
12. 조정볼트
13. 탄성체
14. 연결축
20. 전후방향이동수단
21. 벨로즈
22. 조정볼트
23. 탄성체
24. 연결축1. Electron beam emitter
2 Thermal Field Mission Tips
2a. Electron beam emitter
3. Housing
3a. hall
10. Right and left movement means
11. Bellows
12. Adjusting bolt
13. Elastic body
14. Connecting shaft
20. Forward and backward movement means
21. Bellows
22. Adjusting bolt
23. Elastomers
24. Connecting shaft

Claims (4)

전자현미경의 광축을 일치시키기 위한 광축 조정장치에 있어서,
발생된 전자가 통과하여 방출되면서 전자빔이 되도록 하는 전자빔방출홀(2a)을 갖는 써멀필드이미션팁(2, thermal field emissoin tip)을 평면상의 X축에 해당하는 좌, 우 방향으로 이동시킬 수 있는 좌우방향이동수단(10);
상기 써멀필드이미션팁(2)을 평면상의 Y축 방향에 해당하는 전,후 방향으로 이동시킬 수 있는 전후방향이동수단(20);을 포함하여 구성된 미세 광축 조정장치.
In the optical axis adjusting device for matching the optical axis of the electron microscope,
The left and right sides of the thermal field emission tip (2) having an electron beam emission hole (2a) for generating the electron beam as the generated electrons pass through it can be moved in the left and right directions corresponding to the X-axis on the plane Direction moving means (10);
And the front and rear direction moving means (20) capable of moving the thermal field emission tip (2) in the front and rear directions corresponding to the Y axis direction on a plane.
제 1항에 있어서,
상기 좌우방향이동수단(10)이나 전후방향이동수단(20)은 진공을 형성하면서 내부에 써멀필드이미션팁(2)을 내장하고 있는 하우징(3)의 홀(3a)을 차단하여 하우징(3)의 내부가 진공상태를 유지하도록 하면서 하우징(3)의 내부와 외부를 연결하고 있는 벨로즈(11, 21, bellows);
상기 벨로즈(11, 21)와 연결되어 벨로즈(11, 21)가 써멀필드이미션팁(2) 방향으로 늘어나도록 하는 조정볼트(12, 22);
상기 써멀필드이미션팁(2)을 조정볼트(12) 방향으로 이동시키고 있는 탄성체(13, 23);
어느 한쪽은 벨로즈(11, 21)와 연결되고 다른 한쪽은 써멀필드이미션팁(2)과 연결되어 있어 조정볼트(12)의 회전에 의해 벨로즈(11, 21)가 써멀필드이미션팁(2) 방향으로 늘어나면 상기 탄성체(13)를 수축시키면서 써멀필드이미션팁(2)을 이동시키는 연결축(14, 24);을 포함하여 구성된 미세 광축 조정장치.
The method of claim 1,
The left and right direction moving means 10 or the front and rear direction moving means 20 blocks the hole 3a of the housing 3 in which the thermal field emission tip 2 is built therein while forming a vacuum, and thereby the housing 3 Bellows 11 and 21 connecting the inside and the outside of the housing 3 while maintaining the inside of the vacuum state;
Adjusting bolts 12 and 22 connected to the bellows 11 and 21 to extend the bellows 11 and 21 in the direction of the thermal field emission tip 2;
An elastic body (13, 23) for moving the thermal field emission tip (2) in the direction of the adjustment bolt (12);
One end is connected to the bellows (11, 21) and the other is connected to the thermal field emission tip (2), the bellows (11, 21) by the rotation of the adjustment bolt 12, the thermal field emission tip (2) And a connecting shaft (14, 24) for moving the thermal field emission tip (2) while contracting the elastic body (13) when it is stretched in the direction of (1).
제 1항 또는 제 2항에 있어서,
상기 연결축(14, 24)은 절연체인 것을 특징으로 하는 미세 광축 조정장치.
3. The method according to claim 1 or 2,
The connecting shaft (14, 24) fine optical axis adjustment device, characterized in that the insulator.
제 1항 또는 제 2항에 기재된 미세 광축조정장치를 포함한 열전계방출형 건모듈 장치.

A thermoelectric field type gun module device comprising the fine optical axis adjusting device according to claim 1.

KR1020120081214A 2012-07-25 2012-07-25 Fine optical axis adjuster KR20140015832A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105047510A (en) * 2015-06-30 2015-11-11 北京中科科仪股份有限公司 Deep ultraviolet laser and photo-emission electron microscope docking system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105047510A (en) * 2015-06-30 2015-11-11 北京中科科仪股份有限公司 Deep ultraviolet laser and photo-emission electron microscope docking system
CN105047510B (en) * 2015-06-30 2017-03-22 北京中科科仪股份有限公司 Deep ultraviolet laser and photo-emission electron microscope docking system

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