KR20140013647A

KR20140013647A - Fluid inner packaging container, method of manufacturing the same, and method of filling the fluid using the same

Info

Publication number: KR20140013647A
Application number: KR1020120081591A
Authority: KR
Inventors: 홍기동; 이영근; 강성호; 유석운
Original assignee: 삼성디스플레이 주식회사; (주)에스티아이
Priority date: 2012-07-26
Filing date: 2012-07-26
Publication date: 2014-02-05

Abstract

The present invention relates to a fluid inner packaging container which includes a liner including a flexible material with an airtight inner space, a method for manufacturing the same, and a method for filling a fluid using the same method. Moreover, the fluid inner packaging container includes an inner tube structure which is elongated to the outside, the top side, the bottom of the liner, and the bottom inside of the liner, with a generally circular shape, and of which both ends are respectively fused and fixed to the top and the bottom side of the liner, so as to present an all-in-one style. The fluid inner packaging container can be manufactured by a simple process, and a fluid filling step can be reduced thereby.

Description

FLUID INNER PACKAGING CONTAINER, METHOD OF MANUFACTURING THE SAME, AND METHOD OF FILLING THE FLUID USING THE SAME}

The present invention relates to a fluid-packed container, a manufacturing method thereof and a fluid filling method using the same. More particularly, the present invention relates to a fluid-packed container suitable for handling high-purity fluids used in semiconductor and LCD manufacturing processes, a method for preparing the same, and a method for filling the fluid using the same.

In the semiconductor and LCD manufacturing process, various liquids such as acids, solvents, bases, photoresists, slurries, dopants, etching liquids and cleaning liquids are used. Of these liquids, photoresist must be kept of high purity, so care must be taken in their handling. In particular, since photoresists used in semiconductor and LCD manufacturing processes are very expensive, care must be taken to prevent contamination and defects of the photoresists during storage, transportation and distribution of the photoresists. Therefore, there is a need for a fluid packaging container suitable for handling high purity fluids used in the semiconductor and LCD manufacturing processes.

It is an object of the present invention to provide a fluid containment vessel suitable for containing a high purity fluid.

Another object of the present invention is to provide a method for producing the fluid-packed container described above.

Another object of the present invention is to provide a method for filling a fluid in the fluid-packed container described above.

The fluid container according to an embodiment of the present invention for achieving the above object is provided with a liner that is a closed inner space is created and containing a flexible material. It extends to the outside of the liner, the upper surface of the liner, the inner and the lower surface of the liner, and has a cylindrical shape as a whole, and both ends are fused and fixed to the upper and lower surfaces of the liner, respectively, integrally with the liner An inner tube structure configured.

In one embodiment of the invention, the inner tube structure is perfluoroalkoxy (PFA), polyetrafluoroethylene (PTFE), polypropylene (PP), low density polyethylene (LDPE), linear low density polyethylene (LLDPE), It may include at least one selected from the group consisting of medium density polyethylene (MDPE) and high density polyethylene (HDPE).

In one embodiment of the invention, the inner tube structure may comprise the same material as the liner.

In one embodiment of the present invention, the inner tube structure, the upper ejection nozzle fused to the upper surface of the liner, a dip tube that is in contact with the interior of the upper ejection nozzle and adhering to the upper ejection nozzle and extending into the liner And a lower ejection nozzle having a shape in which a lower portion of the dip tube is inserted and fused with a lower surface of the liner in the liner.

The upper ejection nozzle, the dip tube and the lower ejection nozzle may be integrally formed without being separated and recombined with each other.

The upper ejection nozzle may include a first fusion unit fused to an upper surface of the liner, a protrusion provided on the first fusion unit and protruding out of the liner, and a disc attached to a side wall of the protrusion and generating a gas flow passage. It may include a ring of the shape and a support attached to the side wall of the protrusion for supporting the lower portion of the ring.

The lower ejection nozzle may have a cylindrical shape so that the lower part of the dip tube is inserted, and a guide part having a through hole that serves as a fluid passageway on the lower sidewall. The lower part of the guide part may include a second fusion part fused to the bottom surface of the liner.

One end of the dip tube may be located higher than the bottom surface of the guide part in the cylinder of the guide part.

In one embodiment of the present invention, the liner may have a shape in which one film or two or more films are overlapped.

In a method of manufacturing a fluid-packed container according to an embodiment of the present invention for achieving the above another object, the liner film and the inner tube structure is each cleaned in a clean room. The cleaned liner film and inner tube structure are dried. The inner tube structure is disposed between the upper and lower liner films overlapped with each other, and the inner tube structure and the liner film portion are thermally fused in the horizontal direction. The liner film is thermally fused in the longitudinal direction.

In one embodiment of the present invention, the inner tube structure, the upper ejection nozzle, a lower tube having a shape that is in communication with the inside in the upper ejection nozzle and adhered to the upper ejection nozzle and the bottom of the dip tube is inserted And a nozzle, wherein the upper ejection nozzle, the dip tube, and the lower ejection nozzle may be integrally formed without being separated and recombined with each other.

In a fluid filling method according to an embodiment of the present invention for achieving the above object, there is provided a canister having an internal volume. Inside the canister, a closed inner space is created and extends to the outside of the liner, the top surface of the liner, the inside of the liner and the bottom surface of the inside of the liner, and has an overall cylindrical shape. And inserting a fluid-containing container, the both ends of which are respectively fused and fixed to the upper and lower surfaces of the liner, the inner tube structure being integrally formed with the liner. Nitrogen gas is introduced into the canister. In addition, the fluid flows into the liner of the fluid inner container.

According to embodiments of the present invention, the fluid packaging container includes a liner in which an inner space is created and includes a flexible material, and an inner tube structure integrally formed with the liner in the liner.

As such, since the liner and the inner tube structure are integrally formed, there is no need to separately join the liner and the inner tube structure when filling the fluid into the liner. Therefore, contamination and defects in the coupling alignment which occurred in the process of joining the liner and the inner tube structure are suppressed. In addition, the process steps for filling fluid in the fluid containment vessel are reduced, which simplifies the process.

In addition, the fluid-packed container according to an embodiment of the present invention is a disposable that is discarded after one use. Therefore, it is not necessary to perform a cleaning process or the like for reusing some members of the fluid-packed container, and contamination of the fluid due to contamination of the reused members does not occur.

1 is a cross-sectional view of a fluid packaging container according to an embodiment of the present invention.
2A-2D are perspective views illustrating liners of various structures included in the fluid containment vessel of FIG. 1.
FIG. 3 is a perspective view illustrating an inner tube structure included in the fluid inner container of FIG. 1. FIG.
4A and 4B are perspective views illustrating an upper portion of an inner tube structure included in the fluid package container of FIG. 1.
5A and 5B are perspective views illustrating a lower portion of the inner tube structure included in the fluid package container of FIG. 1.
FIG. 6 is a cross-sectional view illustrating a lower portion of the inner tube structure included in the fluid inner container of FIG. 1. FIG.
FIG. 7 is a flowchart illustrating a method of manufacturing the fluid-packed container shown in FIG. 1.
FIG. 8 is a flowchart illustrating a method of filling a fluid into the fluid packaging container shown in FIG. 1.
9 is a perspective view showing a state in which a fluid is filled.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the drawings.

Fluid Inner Container

1 is a cross-sectional view of a fluid packaging container according to an embodiment of the present invention.

2A-2D are perspective views illustrating liners of various structures included in the fluid containment vessel of FIG. 1.

FIG. 3 is a perspective view illustrating an inner tube structure included in the fluid inner container of FIG. 1. FIG.

4A and 4B are perspective views illustrating an upper portion of an inner tube structure included in the fluid package container of FIG. 1. 5A and 5B are perspective views illustrating a lower portion of the inner tube structure included in the fluid package container of FIG. 1. FIG. 6 is a cross-sectional view illustrating a lower portion of the inner tube structure included in the fluid inner container of FIG. 1. FIG.

Hereinafter, a description will be given with reference to FIGS. 1 to 6.

Referring to FIG. 1, the fluid containment container 100 includes a liner 110 in which a closed interior space is created and formed of a flexible material (eg, vinyl). In addition, the outer surface of the liner 110, the upper surface of the liner 110, the inner and the lower surface of the inner liner 110 extends to have an overall cylindrical shape, both ends of the liner 110, respectively. Upper and lower surfaces are fusion-fixed, respectively, and include an inner tube structure integrally formed with the liner 110. The fluid container 100 may be contained in a canister, which is an outer container, and fluids may be filled in the fluid container.

The liner 110 may be folded or stand independently by having flexibility. The inner space of the liner 110 may be filled with high purity fluids used in the semiconductor and LCD manufacturing process mentioned above. For example, photoresists may be filled in the inner space of the liner 110, and the photoresist may include a photoresist for a color filter, a photoresist for a photo process, and the like. The liner may be composed of a fluid filled therein, that is, materials that do not contaminate the photoresists.

The liner 110 may be made using one or more polymers, including plastic, nylon, polyolefin, or other natural or synthetic polymers. For example, the materials used for the liner 110 are polyethylene terephthalate (PET), polyethylene naphthalate (PEN), poly (butylene 2,6-naphthalate) (PBN), polyethylene (PE), linear Low density polyethylene (LLDPE), low density polyethylene (LDPE), medium density polyethylene (MDPE), high density polyethylene (HDPE), polypropylene (PP) and the like.

The liner 110 may have a shape in which one film or two or more films are overlapped. That is, the films have a shape in which the films are fused to each other at an edge portion, thereby creating a closed interior space.

As shown in FIGS. 2A-2D, the liner may have various designs that maintain a three-dimensional shape.

However, the shape of the liner is not limited thereto, and may be variously modified.

1 and 3, the inner tube structure 120 includes an upper spout nozzle 122, an upper tube 124, a deep tube, and a lower spout nozzle 126. It consists of one body. The inner tube structure 120 has a shape in communication from the outside of the liner 110 to the bottom portion of the inside of the liner 110. In addition, the inner tube structure 120 does not have a form of being coupled to or detached from the liner 110, but is fused and fixed to the upper and lower surfaces of the liner 110 to be integrally formed with the liner 110. .

4A and 4B, the upper jet nozzle 122 has a cylindrical shape as a whole. The upper jet nozzle 122 protrudes 122a protruding out of the liner 110 onto the first fusion portion 122b and the first fusion portion 122b fused to the upper surface of the liner 110. It includes.

In the upper jet nozzle 122, the protrusion 122a may be coupled to the dispensing head of the outer canister. A disk-shaped ring 122c may be attached to a side wall portion of the cylinder corresponding to the protrusion 122a. The ring 122c is provided with a hole, and the hole is provided to the gas flow passage 122d. The gas flow passage 122d may be a passage through which gas for compressing or expanding the liner 110 is introduced. In addition, support members 122e (Rib) for supporting the ring may be provided below the ring 122c on the sidewall of the protrusion 122a. The support 122e is provided to maintain sufficient strength when engaged with the dispense head.

The first fusion portion 122b is a portion that is fused with the upper surface of the liner 122. That is, the first fusion portion 122b and the upper surface of the liner 122 are thermally fused to have a shape fixed to each other. The first fusion portion 122b may have various shapes such as a quadrangular, circular or elliptical shape depending on the surface shape of the liner 122.

Referring to FIG. 3, the dip tube 124 communicates with the inside of the upper jet nozzle 122 and has a tube shape extending below the first fusion part 122b. The lower portion of the dip tube 124 is shaped to be inserted into the lower jet nozzle 126. The dip tube 124 is guided in the lower jet nozzle 126 to have a structure that can flow up and down. The dip tube 124 may be used to pump and dispense fluid in the liner 110. As shown in FIGS. 5A, 5B and 6, one end of the dip tube 124 is positioned higher than the bottom of the guide portion 126a in the cylinder of the guide portion 126a.

5A and 5B show lower ejection nozzles of different shapes.

5A, 5B, and 6, the lower jet nozzle 126 has a cylindrical shape into which the lower part of the dip tube 124 is inserted, and a guide part 126a having a through hole 126c in the lower sidewall. And a second fusion portion 126b provided below the guide portion 126a and fused with the bottom surface of the liner 110.

An end portion of the dip tube 124 is provided in the guide portion 126a, and the dip tube may flow up and down inside the guide portion 126a. The through hole 126c may be positioned on the lower sidewall of the guide part 126a to move the fluids positioned at the bottom or bottom portion of the liner 110.

The second fusion portion 126b is a portion that is fused with the lower surface of the liner 110. That is, the second welding portion 126b and the upper surface of the liner 110 are thermally fused to have a shape fixed to each other. The second fusion portion 126b may be a three-dimensional figure having various shapes such as a quadrangle, a circle, or an oval, depending on the surface shape of the liner 110.

The guide part 126a has a shape in which a bottom is fixed by the second fusion part 126b and extends in the vertical direction.

As such, an end portion of the dip tube 124 is inserted into the guide part 126a so that the dip tube 124 is always fixed in the vertical direction in the liner 110.

In general, the fluid packaging container having the structure in which the dip tube 124 is not fixed may damage the liner 110 by the flow of the dip tube 124. In addition, to reduce this damage, the dip tube 124 is positioned significantly higher than the bottom surface of the liner 110. As a result, a significant amount of fluid remained at the bottom of the liner 110.

However, in the case of the fluid container according to the present embodiment, since the dip tube 124 has a top and bottom fixed shape, the dip tube 124 is left or right or up and down even if the liner 110 flows. It is positioned stably without flowing or bending. Therefore, damage to the liner 110 due to the flow of the dip tube 124 can be suppressed.

In addition, the insertion structure of the dip tube 124 and the guide portion 126a extends to the bottom surface of the liner 110 and may transfer fluid through the through holes 126c of the lower sidewall of the guide portion 126a. have. Therefore, the fluid remaining on the bottom portion of the liner 110 may be minimized.

Materials that can be used for the inner tube structure 120 include perfluoroalkoxy (PFA), polyetrafluoroethylene (PTFE), polypropylene (PP), low density polyethylene (LDPE), linear low density polyethylene (LLDPE), Medium density polyethylene (MDPE), high density polyethylene (HDPE), etc. are mentioned.

The inner tube structure 120 does not require high rigidity because it is not reused for a single use, and uses a low cost material without causing contamination of the fluid (eg, photoresist) filled therein. It is desirable to. In addition, the inner tube structure 120 preferably uses a material having a high bonding strength with the liner 110. Thus, the inner tube structure 120 preferably comprises low density polyethylene (LLDPE) or high density polyethylene (HDPE) that meets the conditions among the materials.

In addition, the inner tube structure 120 may be formed of the same material as the liner 110.

The fluid-containing container 100 according to the present embodiment is discarded after one use, since all members included in the fluid-containing container 100 are disposable. Therefore, not all members of the fluid inner container 100 are configured to be separated and recombined, and each member may be integrally formed. That is, the members included in the fluid-packed container 100 may be fused and bonded to each other and thus have a simple configuration.

On the other hand, in the case of a general fluid-packed container configured to be able to reuse some members, members such as a fitment, retainer ring, O ring, etc. are combined for fixing and airtightness. Although it should have a form, the fluid-packed container according to the present embodiment can be manufactured at a low cost since the above-mentioned members are omitted.

In addition, in the case of using the fluid-packed container of the general configuration, poor contamination may be caused by the reuse of the members and alignment failure may occur in the process of separating and recombining the members. In addition, there is a problem that a cleaning process or the like for reusing the members must be added. However, in the fluid-packed container according to the present embodiment, since all the members are disposable, no separation and recombination of the members is required and no process for cleaning the members is required.

Preparation of Fluid Inner Containers

FIG. 7 is a flowchart illustrating a method of manufacturing the fluid-packed container shown in FIG. 1.

Referring to FIG. 7, the liner film and the inner tube structure 120 included in the fluid-containing container 100 are respectively provided (S10). The liner film and the inner tube structure 120 are each super pure water in a clean room. After washing with water, it is dried and kept free of contamination.

The inner tube structure 120 is disposed between the upper and lower liner films overlapping each other. Thereafter, the inner tube structure 120 and the liner film portion are thermally fused in the horizontal direction (S12). That is, when the liner film is thermally fused in the horizontal direction, the first and the first tube of the inner tube structure 120 are formed. The second fusion portions 122b and 126b are also fused together. Thus, the liner film and the inner tube structure 120 are integrally bonded.

The liner film is thermally fused in the longitudinal direction (S14). Thus, the liner film is fused in the horizontal and vertical directions to form a liner 110 having a space therein.

Thereafter, the liner film is cut to complete the fluid packaging container 100 shown in FIG. 1 (S16).

As described, when the liner film is fused in the horizontal direction, the inner tube structure is also fused and fixed to the liner film. Therefore, the fluid-packed container can be manufactured through a simpler process.

In particular, in the case of a general fluid-packed container, since the inner tube structure is configured to engage and detach, additional processes such as a punching process for punching the liner film and a process for attaching a fitment to the hole portion of the liner film. Process is required. However, in the present embodiment, the processes can be omitted and can be manufactured at low cost. In addition, as manufacturing processes become simpler, defects occurring during the manufacture of the fluid-packed container can also be reduced.

How to fill fluid into a fluid-packed container

FIG. 8 is a flowchart illustrating a method of filling a fluid into the fluid packaging container shown in FIG. 1. 9 is a perspective view showing a state in which a fluid is filled.

First, a canister 150 having an internal volume is prepared. The canister 150 is an outer container for receiving the fluid inner packaging container 100. The fluid-containing container 100 is inserted into the canister 150 (S50). That is, the liner 110 of the fluid-containing container 100 is inserted into the canister 150. do. The liner 110 may expand and contract within the canister 150.

Thereafter, a gas such as nitrogen is introduced into the canister 150. (S52)

A fluid is introduced into the liner 110 of the fluid packaging container 100 by using a nozzle (S54). The fluid may be filled with high purity fluids used in a conductor and an LCD manufacturing process. For example, the fluid filled in the inner space of the liner may include a photoresist for a color filter or a photoresist for a photo process.

As such, in order to fill the fluid in the fluid-containing container 100 of the present invention, only three steps of inserting a liner, adding nitrogen, and introducing a fluid may be performed.

That is, since the liner 110 and the inner tube structure 120 are integrally provided in the fluid inner container 100, the process of joining the inner tube structure 120 does not proceed while filling the fluid. .

When filling a fluid into a general fluid packaging container, a process of coupling the inner tube structure to a liner during filling of the fluid is required. That is, during filling of fluids, processes such as retaining retainers, checking O-rings, and inserting dip tubes must be performed. In addition, a defect may occur in that the dip tube is not inserted into the dip tube when the dip tube is inserted.

However, when filling the fluid according to the method of the present invention, the above-mentioned processes do not have to be performed, so the process of filling the fluid is simplified. In addition, a defect such as that the dip tube is not inserted into the home position does not occur.

The fluid container according to the present invention is not reused since all members are disposable. Therefore, there is no need to separate, clean, dry and recombine the members of the fluid-packed container after the fluid in the fluid-packed container is used up. Thus, it is possible to reduce the cost required to reuse the members of the fluid tightly packed container.

As described, the fluid-packed container of the present invention is suitable for handling high purity fluids. Fluid packaging containers of the present invention can be used to handle liquid chemical reactants for various industrial processes in addition to semiconductor devices and LCDs.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined in the appended claims. It will be possible.

100 fluid packaging container 110 liner
120: inner tube structure 122: upper jet nozzle
124: dip tube 126: lower blowing nozzle

Claims

A liner that creates a sealed interior space and includes a flexible material; And
It extends to the outside of the liner, the upper surface of the liner, the inner and the lower surface of the liner, and has a cylindrical shape as a whole, and both ends are fused and fixed to the upper and lower surfaces of the liner, respectively, integrally with the liner A fluid containment vessel comprising an inner tube structure configured.

The method of claim 1, wherein the inner tube structure is perfluoroalkoxy (PFA), polyetrafluoroethylene (PTFE), polypropylene (PP), low density polyethylene (LDPE), linear low density polyethylene (LLDPE), medium density A fluid packaging container comprising at least one selected from the group consisting of polyethylene (MDPE) and high density polyethylene (HDPE).

The fluid tight container of claim 1, wherein the inner tube structure comprises the same material as the liner.

The method of claim 1, wherein the inner tube structure,
An upper jet nozzle fused to an upper surface of the liner;
A dip tube in communication with the interior of the upper jet nozzle and adhering to the upper jet nozzle and extending into the liner; And
A fluid packaging container having a shape in which a lower portion of the dip tube is inserted and including a lower jet nozzle fused to a lower surface of the liner inside the liner.

5. The fluid-packed container according to claim 4, wherein the upper ejection nozzle, the dip tube and the lower ejection nozzle are integrally formed and are not separated from or recombined with each other.

The method of claim 4, wherein the upper blowing nozzle,
A first fusion unit fused to an upper surface of the liner;
A protrusion provided on the first fusion portion and protruding to the outside of the liner;
A disk-shaped ring attached to the side wall of the protrusion and generating a gas flow passage; And
And a support attached to the sidewall of the protrusion to support a lower portion of the ring.

The method of claim 4, wherein the lower jet nozzle,
A guide portion having a cylindrical shape so that a lower portion of the dip tube is inserted, and a through hole formed at a lower sidewall thereof to serve as a fluid passageway; And
And a second welding portion provided under the guide portion and fused with the bottom surface of the liner.

The fluid packaging container according to claim 4, wherein one end of the dip tube is positioned higher than a bottom surface of the guide part in the cylinder of the guide part.

The fluid packaging container according to claim 1, wherein the liner has a shape in which one film or two or more films are overlapped.

Cleaning each of the liner film and the inner tube structure in a clean room;
Drying the cleaned liner film and inner tube structure;
Disposing the inner tube structure between the upper and lower liner films overlapping each other, and thermally fusion bonding the inner tube structure and the liner film portion in a transverse direction; And
Thermally fusion bonding said liner film in a longitudinal direction.

12. The method of claim 10, wherein the inner tube structure, the upper ejection nozzle, a deep tube in contact with the inside of the upper ejection nozzle while adhering to the upper ejection nozzle and a lower ejection nozzle having a shape in which the lower portion of the dip tube is inserted. And the upper ejection nozzle, the dip tube, and the lower ejection nozzle are integrally formed so as not to be separated and recombined with each other.

Providing a canister having an internal volume;
Inside the canister, a closed inner space is created and extends to the outside of the liner, the top surface of the liner, the inside of the liner and the bottom surface of the inside of the liner, and has an overall cylindrical shape. Inserting a fluid-packaged container having an inner tube structure integrally formed with the liner, each end of which is fused and fixed to the upper and lower surfaces of the liner, respectively;
Injecting nitrogen gas into the canister; And
Injecting fluid into the liner of the fluid containment vessel.