KR20130068861A - Cu-zr composite having 3-dimensionally interconnected structure and method for preparing the same - Google Patents

Abstract

PURPOSE: A copper-zirconium 2 membered alloy with 3-dimension network structure is provided not to contain harmful Be, to cast in the air, and to indicate the high intensity and elongation. CONSTITUTION: A copper-zirconium two membered alloy with three-dimension network structure is a copper base alloy composed of copper and zinc, and is indicated as Cu100-xZrx (0<x<20). A three-dimensional network structure is formed by the hot working process. The three-dimensional network structure has the eutectic structure of massive structure that Cu5Zr superlattice phase and Cu crystalline are repeatedly indicated. The eutectic structure of massive structure includes the Cu5Zr superlattice phase which has thickness of 0.5 μm to 1.5 μm in a three-dimensional network structure, and has a structure that the Cu crustalline, which has diameter of 1.0 μm to 1.5 μm, is distributed between the thickness of Cu5Zr superlattice phase.

Description

Cu-Zr composite having 3-dimensionally interconnected structure and method for preparing the same}

The present invention relates to a Cu-Zr binary alloy having a high-strength and having a high strength by having a three-dimensional mesh structure and a method of manufacturing the same.

Recently, attention has been focused on the development of multifunctional high strength materials in accordance with the weight reduction and integration of electronic devices. Typically, Cu-Be alloys (JC Harkness, WD Spiegelberg, and W. Raymond Cribb, DialogOndisc) Books , ASM Handbook Series (ASM International, Metals Park, OH, 1991). Vol. 2.; F. Sachslehner, Phys. Status Solidi A 119, 229 (1990)) and vitraloy alloys (F. Szuecs, CP Kim and WL Jonhson, Acta mater. 49, 1507-1513 (2001)) are representative examples of applications in commercial electronics. It is a high strength material. However, these materials are not only environmentally harmful due to toxicity exhibited by Be in the manufacturing process, but also have a problem in that they are no longer applicable to electronic devices due to the limited use of certain harmful substances such as Be. In particular, in the case of vitrloy, the content of Zr having high oxygen affinity and toxic Be content is high, so it has to be manufactured under special conditions. Therefore, there is a need for the development of materials that are more environmentally friendly, economical and have excellent mechanical properties and processability.

Recently, various studies have been reported to develop high-strength nonferrous metal materials, and have been described in terms of particle plasticization based on severe plastic deformation (R. Z, Valiev. RK Islamgaliev, IV Alexandrov, Prog . Mater . Sci . 45, 103 (2000)), amorphous based on amorphous phase (Gilbert, CJ, Ritchie, RO and Johnson, WL, Applied Physics Letter . 71 (4), 476 (1997); Zhang QS, Zhang W, Xie GQ, Inoue A. Mater Trans JIM. 48, 1626-1630 (2007)), and in-situ hybridization studies based on nanometer-level eutectic phases (G. He, J. Eckert, W. Loser, and L. Schultz, Nature Mater) 2, 33 (2003); JC Lee, YC Kim, JP Ahn, HS Kim, SH Lee, and BJ Lee, Acta Mater. 52, 1525 (2004); CC Hays, CP Kim, and WL Johnson, Phys. Rev. Lett. 84, 2901 (2000); J. Eckert, J. Das, G. He, M. Calin, and KB Kim, Mater. Sci. Eng. A 449, 24 (2007); J. Eckert, U. Kuhn, J. Das, S. Scudino, and N. Radtke, Adv. Eng. Mater. 7, 587 (2005)) are representative examples. Alloys made through these methods have strengths on the order of 1-5 GPa, but rarely exhibit elongation under tension, either because these alloys show severe strain localization under tension (C. Biselli and DG Morris, Acta). Mater. 44, 493 (1996)), because they do not have structures that can prevent crack propagation (YF Sun, BC Wei, YR Wang, WH Li, TL Cheung, and CH Shek, Appl. Phy. Lett) 87, 051905 (2005)). Thus, in order to improve plasticity: 1) it must have a structure capable of accumulating dislocations; 2) It must have a structure that can effectively prevent the propagation of cracks.

In-situ compounding is one of the traditional techniques among various practical methods that can simultaneously achieve high strength and plasticity, and this method is a technique for spontaneously generating a high strength reinforcement phase on a soft base material. To date, most of the materials manufactured using this method are Ti-based materials and consist of layered process structures hundreds of nanometers thick (G. He, J. Eckert, W. Loser and L. Schulta. Nature. 2. 33-37 (2003); G. He, J. Eckert, W. Loser, M. Hagiwara, Acta Mater. 52, 3035-3046 (2004); BB Sun, ML Sui, YM Wang, G. He, J. Eckert, E. Ma, Acta Mater. 54, 1349-1357 (2006)).

Recently, the present inventors have also reported a very fine process alloy of several tens of nanometers based on Cu (KH Kim, JP Ahn, JH Lee, JC Lee, J. Mater. Res. 23, 1987-1994 (2008) KH Kim, JP Ahn, YM Kim, BJ Lee and JC Lee, Scripta Mater. 58, 5-8 (2008); SJ Lee, SW Lee, KH Kim, JH Hahn and JC Lee, Scripta Mater. 56, 457 -460 (2007)), specifically, Korean Patent Laid-Open Publication No. 10-2007-0100215, which is a copper-based alloy including a superlattice phase composed of Cu and Zr, wherein Cu _{100 - x} Zr _x (where A copper-based alloy including a superlattice phase represented by 0 <x <20) and a method of manufacturing the same are disclosed. However, the materials based on these process structures show a high strength, but they do not exhibit elongation under tension because it is difficult to accumulate potentials that can absorb externally applied energy.

Therefore, in the present invention, not only does not contain harmful Be, but also can be cast in the atmosphere, can be formed using a conventional metal processing or forming process, exhibits high strength and elongation, absorbs external energy and propagates cracks To provide a Cu-based alloy reinforced with a Cu ₅ Zr phase that can effectively prevent and a method of manufacturing the same.

In the present invention, to solve the first problem,

A copper-based alloy composed of Cu and Zr, which is represented by the general formula Cu _{100 - x} Zr _x (where 0 <x <20), provides a Cu-Zr binary alloy having a three-dimensional network structure.

According to one embodiment of the invention, the three-dimensional network structure may be formed by a hot working process (hot working) process.

According to another embodiment of the present invention, the three-dimensional network structure may have a process structure of a bulk structure in which the Cu ₅ Zr superlattice phase and the Cu crystal phase appear repeatedly.

According to another embodiment of the present invention, the process structure of the mass structure is Cu ₅ Zr superlattice form a three-dimensional network structure of 0.5 ㎛ to 1.5 ㎛ thickness, between the Cu 1.0 ㎛ to 1.5 ㎛ It may have a structure in which the crystal phase is distributed.

In the present invention, to solve the second problem,

Measuring Cu and Zr to satisfy the composition of Cu _{100 - x} Zr _x (where 0 <x <20) and then arc melting to prepare an ingot;

Suction casting the manufactured ingot into a mold; And

It provides a method for producing a Cu-Zr binary alloy having a three-dimensional mesh structure, comprising the step of hot working the cast alloy.

According to one embodiment of the invention, the hot working may be performed at a temperature of 600 ℃ to 700 ℃.

According to the present invention, not only does not contain harmful Be, but also can be cast in the atmosphere, can be formed using a conventional metal processing or forming process, exhibits high strength and elongation, absorbs external energy and propagates cracks It is possible to provide a Cu-based alloy reinforced with a Cu ₅ Zr phase that can effectively prevent the and a method for producing the same.

1A and 1B are photographs of the microstructure of the alloy according to the present invention at low magnification (1a) and high magnification (1b), and FIGS. 1C and 1D are for regions I and II of FIG. High Resolution Transmission Electron Microscopy (HRTEM) and Selected Area Diffraction Pattern (SADP) images.
FIG. 2A is a true stress-strain curve obtained by performing compression and tensile tests on an alloy in a casting state before performing a hot working process in manufacturing an alloy according to the present invention, and FIG. 2B is a casting broken under tension. It is a photograph observing the fracture surface of the alloy in a state.
Figure 3a is a photograph showing the microstructure of the alloy according to the invention after performing the hot working, Figure 3b is a photograph observing the three-dimensional mesh structure of the alloy according to the invention, Figures 3c and 3d respectively HRTEM photographs (3c) and SADP photographs of the alloy according to the invention.
4 is a true stress-strain curve for an alloy according to the invention after performing hot working.
Figure 5a is a photograph of the side of the specimen after the destruction of the alloy according to the invention by a secondary electron microscope, Figure 5b is a scanning electron microscope (1.5mm) recorded from 1.5 to 2 mm from the wavefront (Scanning Electron Microscopy; SEM) 5c is a TEM photograph of a specimen subjected to a tensile test for the alloy according to the present invention after performing the hot working.
6 is a photograph of a fracture surface of a specimen subjected to a tensile test of the alloy according to the present invention with a secondary electron microscope.

The alloy according to the present invention is a copper alloy composed of Cu and Zr, represented by the general formula Cu _100-x Zr _x (where 0 <x <20), and a Cu-Zr binary alloy having a three-dimensional network structure. to be. The three-dimensional network structure may be formed by a hot working process such as hot rolling, and the like, and a process structure having a bulk structure in which Cu ₅ Zr superlattice and Cu crystal phase are repeatedly displayed by the hot working process. A three-dimensional network structure can be formed. Specifically, the process structure of the mass structure has a structure in which a Cu ₅ Zr superlattice phase forms a three-dimensional network structure having a thickness of 0.5 µm to 1.5 µm, and a Cu crystal phase having a diameter of 1.0 µm to 1.5 µm is distributed therebetween. Can have

In the present invention, also provided by the general formula Cu _{100 - x} Zr _x (where 0 <x <20), and provides a manufacturing method for Cu-Zr binary alloy having a three-dimensional network structure, specifically The method according to the present invention comprises the steps of: measuring Cu and Zr to satisfy a composition of Cu _{100 - x} Zr _x (where 0 <x <20) and then arc melting to prepare an ingot; Suction casting the manufactured ingot into a mold; And hot working the cast alloy.

The hot working may be performed at a temperature of 600 ° C to 700 ° C, and may also be performed until the final thickness reduction rate is 70% to 80% with a reduction ratio of 10% to 20% each time.

Hereinafter, the present invention will be described in more detail with reference to examples and drawings, but the following examples are only to aid the understanding of the present invention, and the scope of the present invention should not be construed as being limited to the following examples. will be.

Example

Manufacture of alloys

As an alloy used for the analysis, _{91 .5} Cu were prepared binary alloy of Zr _{8 .5} (at%), the process which has a composition of Cu a number of areas. Specifically, Cu (99.99%) and Zr (99.7%) were first weighed according to the composition, and then arc-dissolved in an Ar atmosphere to prepare an ingot. The ingot was repeatedly dissolved to make the constituent elements uniformly mixed. The molten ingot was cast into a copper mold in the form of a square rod having a 4 × 4 mm (width × length) using a suction casting method. The cast alloy was hot worked at 650 ° C. with a rolling reduction of 15% each time to a final thickness of 1.0 mm (75% thickness reduction).

Alloy characterization

The phases in the cast and hot worked specimens were analyzed by X-ray diffraction (XRD). The tissue of the prepared specimen and the tissue of the fracture site were observed using a scanning electron microscope (SEM). At this time, only the Cu phase was selectively corroded with 33% nital (33% nitric acid + 67% methanol) solution to increase the contrast (KC Thompson-Russell, and JW Edington, Electron Microscope Specimen Preparation Techniques in Materials Science). , p. 37, NV Philips' Gloeilampenfabrieken, Eindhoven (1977). The structure of the phase constituting the alloy was analyzed using a high resolution transmission electron microscope (HRTEM), and the composition of the phase was analyzed using an EDS mounted on the TEM. Tensile specimens were machined into plate shapes with gauges (width × length × thickness) of 3 × 15 × 1 mm. The gauge length of the specimen was 10 mm, and the tensile test was conducted at a strain rate of 5.0 × 10 ⁻³ s ⁻¹ . Elongation of the alloy was measured using a non-contact video extensometer.

Figure 1a is a photograph showing the microstructure of the alloy according to the present invention cast into a square rod having a cross section of 4 × 4 mm. When observed at a low magnification, it appears to be a single phase, but when it is enlarged, a rod-like process phase having an interlayer distance of 60-100 nm is uniformly dispersed throughout the specimen as shown in FIG. Given that the interlayer spacing of the micro processes known to date is 160-500 nm (J. Das, KB Kim, F. Baier, W. Loser, A. Gebert, and J. Eckert, J. Alloy . Compd . 434, 28 (2007); LC Zhang, J. Das, HB Lu, C. Duhamel, M. Calin, and J. Eckert, Scripta Mater . 57, 101 (2007)), according to the invention It can be seen that the process phase present in the alloy is very fine. This alloy is composed of two main phases, as shown in FIG. 1B, that is, a Cu crystal phase and a Cu ₅ Zr intermetallic compound. Since the Cu crystal phase and Cu ₅ Zr calculated from the equilibrium diagram do not change in solid solution until cooling from 972 ° C. to room temperature, the process structure is approximately 1: 1 at room temperature. FIG. 1C is a HRTEM photograph recorded from part I of FIG. 1B, showing a Cu phase. FIG. 1D is an HRTEM photograph taken from the II part of FIG. 1B, which has a typical superlattice structure in which dark and light layers are repeated periodically, and the limited field diffraction diagram (SADP) also has a superlattice structure. Reflect that.

The present inventors have analyzed the structure of these phases by using high resolution (HR) simulation and molecular statics in previous studies, and the superlattice phase basically has a Cu ₅ Zr structure (FCC, F43m, 216). , A metastable phase formed by substituting a Zr Cu atom at a specific face center (KH Kim, JP Ahn, JH Lee, JC Lee, J. Mater. Res. 23, 1987-1994 (2008)). Such superlattice phase is a phase whose shape is not well known in nature, and it is very rare to uniformly distribute it in an alloy manufactured by a general quenching method. Superlattices have very high strength in addition to crystallographic specificities, and are expected to have yield strengths of about 1.9 GPa (SJ Lee, SW Lee, KH Kim, JH Hahn and JC Lee, Scripta Mater. 56, 457-460 ( 2007)). Therefore, when the superlattice phase is uniformly distributed on the matrix of the crystalline metal, it may serve as an excellent reinforcing material.

In order to correlate the microstructure of the alloy according to the present invention with mechanical properties, the compression and tensile properties of the alloy were measured, and the results are shown in FIGS. 2A and 2B. 2A is a true stress-strain curve obtained from compression and tensile tests for an alloy according to the invention in its cast state. The alloy according to the present invention exhibits high compressive strength despite being a crystalline alloy having a very high Cu composition, which corresponds to Ti-based nanoalloys and Cu-based amorphous alloys reported so far (G. He, J). . Eckert, W. Loser and L. Schulta Nature 2. 33-37 (2003);..... MR Lee, KW Park, HJ Sa and JC Lee, Kor J. Met Mater 47, 11 687 ~ 693 (2009 );... KS Yoon, MR Lee and JC Lee, Kor J. Met Mater 48, 8, 699 ~ 704 (2009);.. MR Lee, KW Park, HJ Sa and JC Lee, Kor J. Met Mater. 47, 11 687-693 (2009). In addition, although the alloy according to the present invention shows a very high compressive plastic strain in the casting state, it shows little tensile plasticity. This property is a common phenomenon observed in high strength alloys with grains of tens to hundreds of nm (CC Koch, DG Morris, K. Lu and A. Inoue, Mater . Res . Bull . 24, 54-58 (1999); CC Koch, Nanocryst Mater 18, 9 (2003); HS Kim, Y. Estrin, Appl Phys Lett, 79, 4115 (2001); AV Sergueeva, VV Stolyarov, RZ Valiev, AK Mukherjee, Scripta Mater. 45, 747 (2001 D. Jia, YM Wang, KT Ramesh, E. Ma, YT Zhu, RZ Valiev, Appl Phys Lett 79, 611 (2001); RZ Valiev, Mater Sci Eng A 59, 234-236 (1997)). The reason why these nanocrystalline materials exhibit limited elongation under tension is related to the structure of this alloy. For the base material (Cu) Cu _{91 .5 .5 8} Zr alloy grain size of about 100 nm of these materials because of difficult to contain a large potential in crystal grains or the surface potential is to be destroyed is processed in accordance with the plastic deformation proceeds, There is a tendency to soften. Indeed, this alloy exhibited work softening as compressive strain increased, as shown in FIG. Figure 2b it can be seen as a picture of observing the fracture surface of the cast state of Cu ₉₁ Zr _{8 .5 .5} alloy fracture under tensile specimen that is broken by cleavage fracture. Therefore, in order for this alloy to exhibit elongation under tension: it is necessary to convert it into a structure in which dislocations can accumulate, i.

On the other hand, the metastable Cu ₅ Zr phase present in the alloy in the cast state as shown in Figure 1a to 1d is very fine, it can be said to be in a high energy state. Such tissues can undergo phase changes and phase transformations upon application of thermal and mechanical energy. In the present invention, a molded Cu ₉₁ Zr _{8 .5 .5} alloy by hot working the induced change in the tissue, in this case, it can be seen that even hayeoteum fine layered tissue process changes in a lump after the hot working, such as 3a. FIG. 3b is a three-dimensional structure of Cu ₅ Zr, which forms a three-dimensional network structure (or a skeletoned structure) having a thickness of 1 μm, and a region (Cu) having a diameter of about 1.0-1.5 μm exists between them. It can be seen. This region can serve as a place where dislocations are generated when a load is applied, and where generated dislocations can accumulate (CC Koch, DG Morris, K. Lu and A. Inoue, Mater . Res . Bull . 24 , 54-58 (1999); CC Koch, Nanocryst Mater 18, 9 (2003); HV Swygenhoven, A. Caro, Nanostruct Mater 9, 669-2 (1997); J. Schiotz, FD DiTolla, KW Jacobsen.Nature 391 , 561 (1998); S. Yip, Nature 391, 669 (1998); HV Swygenhoven, A. Caro, M. Spaczer, Acta Mater. 47, 3117-26 (1999); V. Yamakov, D. Wolf, M Salazar, SR Phillpot, H. Gleiter, Acta Mater. 49, 2713-22 (2001); V. Yamakov, D. Wolf, SR Phillpot, AK Mukherjee, Nature 1, 45 (2002)).

Figure 3c is a high-resolution image and an electron diffraction pattern obtained from a Cu ₅ Zr existing in the Cu ₉₁ Zr _{8 .5 .5} alloy hot working in accordance with the invention. It can be seen that the Cu ₅ Zr phase maintains the superlattice structure even when the shape of the tissue is changed from the acicular tissue to the massive structure through hot working. In addition, Figure 3d is a XRD result of the cast state Cu ₉₁ Zr _{8 .5 .5} alloy and writes it from the hot working specimens. These results demonstrate once again that the superlattice phase (Cu ₅ Zr) does not decompose or transform into another phase even if the specimen in the casting is hot worked (rolled). However, the peak intensity of the hot-worked specimens was slightly higher compared to the peak intensity of the cast Cu ₅ Zr phase, which reflects the fact that the crystallinity of Cu ₅ Zr was further improved after hot working. . Nevertheless, as confirmed by HRTEM, Cu ₅ Zr maintained the superlattice structure, which suggests that Cu ₅ Zr phase has excellent thermal stability.

In the present invention, it could be changed in a very fine state of the cast composed of the layered tissue Cu ₉₁ Zr _{8 .5 .5} alloy a network structure three-dimensionally connected to each other by the step of configuring the alloy by hot working. The effect of the changed microstructure on the mechanical properties of the alloy was confirmed by the tensile test, Figure 4 shows the true stress-strain curve of the specimen prepared by hot working. The yield strength and elongation of the specimens hot worked according to the invention were 1.35 GPa and 2.5%, respectively. Unlike the alloy in the cast state, in the case of the hot worked alloy as in the present invention, work hardening occurred, and as a result, a tensile strength of about 1.57 GPa was shown. Table 1 below shows commercially available Cu-Be alloys (WF Gale, and TC Totemeier, Smithells Metals Reference Book 8th ed. (Elsevier, England, 2004); ASM metals handbook, Vol. 2 Properties and Selection: Nonferrous Alloys and Pure Metals 9th ed (ASM International, Ohio, 1986)) and the tensile strength and plastic deformation characteristics of the alloy according to the present invention. Referring to Table 1, the alloy according to the present invention exhibits very high tensile strength and is fired even under tension. It can be seen that deformation has occurred.

According to the invention excellent tensile properties, in particular plastic behavior indicated by the Cu ₉₁ Zr _{8 .5 .5} alloy hot work is judged to be associated with the generation / propagation and the accumulation of potential crack indicated by the alloy. 5A is the surface shape observed from the side of the specimen after fracture of the alloy (ε = 2.5%). Most of the plastic deformation was concentrated in the Cu phase (white arrow A) between Cu ₅ Zr, whereas the superlattice phase (black arrow B) remained largely intact without cracking. have. This fact means that the plastic strain energy applied to the specimen is absorbed by the deformation of Cu. In order to more clearly observe the site where plastic deformation occurred, the fractured specimens were observed after etching. FIG. 5B is a SEM photograph recorded at a distance of 1.5 to 2 mm from the wavefront, and many cracks having a length of several μm exist at the interface between Cu and Cu ₅ Zr, but these cracks are independently connected to each other. . These results indicate that the three-dimensional network structure of Cu ₅ Zr phase with high strength prevented crack propagation and contributed to the improvement of plasticity.

Figure according to the invention as shown in the four strain-hardening behavior shown is Cu ₉₁ Zr _{8 .5 .5} alloy by hot working is a significant development and to promote a uniform deformation of the alloy, causing tensile plastic. FIG. 5C shows the microstructure of Cu particles having a diameter of ˜2 μm, which exist between Cu ₅ Zr phases as the TEM bright field phase of the tensile test specimen after hot working. The Cu base of the tensile test specimen was cast in the state of casting (the microstructure is SJ Lee, SW Lee, KH Kim, JH Hahn and JC Lee, J. Kor. Inst. Met. & Mater. 44, 10 691 ~ 696 (2006 It can be seen that there is a high density of potentials that could not be observed, and these potentials again form subgrains of several hundred nm in size. The three-dimensional skeletal structure of Cu ₅ Zr phase which prevents the propagation of such cracks and the Cu grains having a size sufficient to accumulate dislocations promote the uniform deformation of the alloy, and thus the tensile sintering properties of the alloy according to the present invention. It is thought to be a structural source for.

According to the present invention makes it assume that the fracture mechanism is of the hot working the Cu _{91 .5} tensile elongation and work hardening the alloy is shown a Zr _{8 .5} alloy based on the ductile fracture. FIG. 6 is a photograph of the fracture surface recorded at the fracture surface of the tensile test specimen, which is in stark contrast with the fracture pattern exhibited by the alloy in the casting state shown in FIG. Dimples present at the fracture indicate that the alloy exhibited a ductile fracture overall, with a size of about 0.5 mm, similar to that of the Cu grains. This destruction aspect is thought underlying the tensile elongation percentage shown is Cu ₉₁ Zr _{8 .5 .5} alloy hot working.

From the results of the above examples, it can be seen that in the present invention, Cu-Zr binary alloys having excellent strength and plasticity were manufactured by using a conventional casting method and hot working. In addition, mechanical testing and structural analysis of these alloys led to the following conclusions:

_{i) Cu 100 - x Zr x} ( stage, 0 <x <20) alloys are Cu phase and Cu ₅ Zr different from 1: Cu ₅ Zr constituting the layered structure from a eutectic alloy consisting of 1, the cast state by hot working It has changed into a three-dimensional network. Cu ₅ Zr retained its superlattice structure despite the application of thermal and mechanical energy, and thus the phase was very stable thermally.

ii) Cu ₉₁ Zr _{8 .5 .5} alloy according to the present invention is manufactured through a hot working was a work-hardening phenomenon observed with a tensile strength of 1.57 GPa, the results showed a 2.5% elongation. The source of such tensile firing is: a) dislocations can form and accumulate in Cu crystals formed to a size of 1 to 1.5 [mu] m through hot working; b) It is thought that the superlattice formed by the three-dimensional mesh structure prevents the propagation of cracks.

iii) Since the alloy according to the present invention does not contain environmentally harmful components and can be produced by existing casting or molding processes, its application is expected in the field of requiring environmentally friendly alternative materials and environmentally friendly materials.

Claims (6)

A copper-based alloy composed of Cu and Zr, which is represented by the general formula Cu _{100 - x} Zr _x (where 0 <x <20) and has a three-dimensional network structure. The Cu-Zr binary alloy having a three-dimensional network structure according to claim 1, wherein the three-dimensional network structure is formed by a hot working process. The Cu-Zr binary alloy having a three-dimensional network structure according to claim 1, wherein the three-dimensional network structure has a process structure of a bulk structure in which a Cu ₅ Zr superlattice phase and a Cu crystal phase appear repeatedly. . According to claim 3, wherein the process structure of the bulk structure Cu ₅ Zr superlattice phase forms a three-dimensional network structure of 0.5 ㎛ to 1.5 ㎛ thickness, between the Cu crystal phase of 1.0 ㎛ to 1.5 ㎛ diameter distributed therebetween Cu-Zr binary alloy having a three-dimensional mesh structure, characterized in that having a structure. Measuring Cu and Zr to satisfy the composition of Cu _{100 - x} Zr _x (where 0 <x <20) and then arc melting to prepare an ingot;
Suction casting the manufactured ingot into a mold; And
Method of producing a Cu-Zr binary alloy having a three-dimensional mesh structure, comprising the step of hot working the cast alloy. 6. The method of claim 5, wherein the hot working is performed at a temperature of 600 ° C. to 700 ° C. 7.

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