KR20130056754A - Piezoelectric actuator and drivng method of piezoelectric actuator - Google Patents

Abstract

PURPOSE: A piezoelectric actuator and a driving method for moving a movable body are provided to enhancing the degree of freedom of motion by reducing frictional heat. CONSTITUTION: A piezoelectric actuator comprises a first piezoelectric element(1) and a substrate(40). The first piezoelectric element comprises a first piezoelectric layer(10) to be sheared in the x-axis direction according to the applied voltage; a second piezoelectric layer(20) to be sheared in the y-axis direction according to the applied voltage; a third piezoelectric layer(30) to be extended or compressed in the z-axis direction; a first separation layer(11) to bind the bottom surface of the first piezoelectric layer to the top surface of the second piezoelectric layer; and a second separation layer(21) to bind the bottom surface of the second piezoelectric layer to the top surface of the third piezoelectric layer. The substrate includes a plurality of first piezoelectric elements attached thereon, which the bottom surface of the third piezoelectric layer is combined to.

Description

Actuator using piezoelectric element and moving method using piezoelectric element {Piezoelectric actuator and drivng method of piezoelectric actuator}

) 미만의 회전각 분해능을 가지고 회전시킬 수 있는 압전소자를 이용한 액추에이터 및 압전소자를 이용한 이동체의 이동방법에 대한 것이다The present invention relates to an actuator using a piezoelectric element and a moving method of the moving body using the piezoelectric element. More specifically, the moving body is moved several angstroms to several tens of micrometers (µm) in the x, y, and z directions for one cycle, or microradians (

The present invention relates to an actuator using a piezoelectric element capable of rotating with a rotation angle resolution of less than) and a moving method using a piezoelectric element.

Actuators are mechanical devices used to move or control a system and generally use electric, hydraulic, or compressed air. Dual piezo actuators use piezoelectric materials to create displacements, which are either tensioned or compressed in a particular direction or sheared in a particular direction when a voltage is applied.

In general, piezoelectric constants of piezoelectric materials are in the order of several angstroms to several tens of nanometers per unit voltage, so they can generate atomic-level displacements. Mainly used for ultra precision equipment.

In the early application of piezoelectric actuators, it was required to have simple conditions such as limited driving range, room temperature, and atmospheric pressure, but as the range of application is expanded, such conditions as translational motion, rotational motion, cryogenic, ultrahigh vacuum of various degrees of freedom are required. In addition, they must maintain long-range resolution while maintaining atomic resolution.

Conventional piezoelectric actuators are not independent of translational motions in the x, y, and z directions, independent of translational and rotational motions, and have limited ranges of translational and rotational motions.

In addition, since friction is present during operation, wear and cracks occur during long-term use. This reduces reliability and is greatly affected by surface conditions such as dust. In addition, frictional heat affects the cryogenic environment.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, the distance from a few angstrom to several tens of micrometers (μm) through an actuator using the first piezoelectric element and the second piezoelectric element To provide an actuator using a piezoelectric element that can move the moving body without restriction.

In addition, it can have a rotation angle resolution of less than micro radians (μrad), and unlike the conventional slip-stick piezoelectric actuators using a piezoelectric element does not generate frictional heat due to movement friction affects the cryogenic environment The present invention provides an actuator using a piezoelectric element that does not affect the wearability, cracks, cracks, and reliability, and is not affected by surface conditions. In addition, it can be operated stably even in cryogenic, ultra-high vacuum, and the translational and rotational movement in the x, y, z direction are all independent to provide an actuator using a piezoelectric element that can increase the freedom of movement of the moving body.

Other objects, specific advantages and novel features of the present invention will become more apparent from the following detailed description and preferred embodiments in conjunction with the accompanying drawings.

An object of the present invention is provided between the first piezoelectric layer sheared in the x-axis direction in response to the application of voltage, the second piezoelectric layer sheared in the y-axis direction in response to the application of voltage, and is provided between the first piezoelectric layer and the second piezoelectric layer. A first separation layer coupling the lower surface of the first piezoelectric layer and the upper surface of the second piezoelectric layer, between the third piezoelectric layer stretched or compressed in the z-axis direction according to the application of a voltage, and between the second piezoelectric layer and the third piezoelectric layer. A first piezoelectric element having a second separation layer provided to couple the bottom surface of the second piezoelectric layer and the top surface of the third piezoelectric layer; A substrate on which a lower surface of the third piezoelectric layer is coupled to an upper surface to which the plurality of first piezoelectric elements are attached; And a voltage applying means for applying a voltage to each of the first piezoelectric layer, the second piezoelectric layer, and the third piezoelectric layer. The moving body placed on the upper surface of the first piezoelectric element includes at least one of x, y, and z directions. It can be achieved as an actuator using a piezoelectric element, characterized in that moving to.

It may be characterized in that it further comprises a plurality of protrusions attached to the upper surface of the substrate and disposed between each of the first piezoelectric elements, and having a height equal to the height of the first piezoelectric element in a state where no voltage is applied. .

It may be characterized by further comprising a control unit for controlling the displacement of the first piezoelectric layer, the second piezoelectric layer and the third piezoelectric layer by controlling the voltage applied by the voltage applying means.

In addition, an object of the present invention is a method of moving a moving body using the above-mentioned actuator, the first step of placing the moving body on the upper surface of the first piezoelectric element attached to the substrate; A second step of moving the moving body in the z-axis direction by tensioning the third piezoelectric layer by applying a + voltage to the third piezoelectric layer of the first piezoelectric element belonging to one column of the first piezoelectric elements attached to the substrate by the voltage applying means; ; A third step of applying a + voltage or a -voltage to the first piezoelectric layer or the second piezoelectric layer of the first column first piezoelectric element to which the voltage is applied by the voltage applying means to move the movable body in the x-axis or y-axis direction; The voltage applying means applies a + voltage to the third piezoelectric layer of the two-column first piezoelectric element, in which the voltage is not applied in the second step, to tension the first piezoelectric element in the z-axis direction, so that the upper portion of the two-column first piezoelectric element A fourth step of contacting the surface with the moving body and releasing the voltage of the first-row first piezoelectric element or compressing it in the z-axis direction by applying a negative voltage to the third piezoelectric layer of the first-row first piezoelectric element; And applying a + voltage or a -voltage to the first piezoelectric layer or the second piezoelectric layer of the two-column first piezoelectric element to which the voltage is applied in the fourth step by the voltage applying means to move the movable body in the x-axis or y-axis direction. It can be achieved as a method of moving the moving body using a piezoelectric element comprising a fifth step.

After the fifth step, + voltage is applied to the third piezoelectric layer of the first row of first piezoelectric elements by the voltage applying means to tension the first piezoelectric element in the z-axis direction so that the upper surface of the first row of first piezoelectric elements is moved to the movable body. Contact with each other, release the voltage of the first two piezoelectric elements of the second row, or apply a negative voltage to the third piezoelectric layer of the second row of the first piezoelectric elements to compress them in the z-axis direction. Alternatively, the method may further include moving the moving body in the x-axis or y-axis direction by applying a + voltage or a −voltage to the second piezoelectric layer.

In addition, the object of the present invention is a method of moving the moving body using the above-mentioned actuator, the first step of placing the moving body on the upper surface of the first piezoelectric element and the projection attached to the substrate; A second step of applying a + voltage to the third piezoelectric layer of the first piezoelectric element attached to the substrate by the voltage applying means to tension the third piezoelectric layer to move the movable body in the z-axis direction; A third step of applying a + voltage to the first piezoelectric layer or the second piezoelectric layer of the first piezoelectric element to move the moving body in the + x or + y direction; The voltage applying means applies a negative voltage to the third piezoelectric layer of the first piezoelectric element to compress the first piezoelectric element in the z-axis direction to contact the upper surface of the protruding portion with the movable body, and the first piezoelectric layer of the first piezoelectric element. Or a fourth step of applying a negative voltage to the second piezoelectric layer; The voltage applying means applies a + voltage to the third piezoelectric layer to contact the upper surface of the first piezoelectric element to the moving body, and applies a + voltage to the first piezoelectric layer or the second piezoelectric layer to move the moving object to the + x axis or the +. The fifth step of moving in the y-axis direction; it can be achieved by a method of moving the moving body using a piezoelectric element comprising a.

The method may further include continuously moving the movable body in the x-axis or y-axis direction by repeating the above-described fourth and fifth steps.

Still another object of the present invention is to provide a tubular cylindrical piezoelectric material composed of a piezoelectric material in which a portion to which voltage is applied is stretched or compressed, a first electrode attached to an inner surface of the cylindrical piezoelectric body, and receiving a zero or constant voltage, and a cylindrical piezoelectric body. A plurality of second piezoelectric elements coupled to one side of the outer surface and having a plurality of second electrodes disposed to be spaced apart from each other in a circumferential direction; A substrate to which a lower surface of the cylindrical piezoelectric body is coupled to an upper surface to which the plurality of second piezoelectric elements are attached; And a voltage applying means for applying a voltage to the second electrode. The cylindrical piezoelectric member is stretched or compressed in the z-axis direction by a voltage difference from the first electrode when a positive voltage or a negative voltage is applied to all of the second electrodes. When the + voltage or the-voltage is applied to any one of the second electrodes, the cylindrical piezoelectric body forms a bending moment based on a parallel axis parallel to the xy plane due to the voltage difference with the first electrode. It can be achieved as an actuator using a piezoelectric element, characterized in that the moving object placed in the to move in the direction of at least one of x, y and z.

The second electrode is composed of four electrodes in which the longitudinal direction of the second electrode is parallel to the central axis direction of the cylindrical piezoelectric body and spaced apart from each other by a specific distance in the circumferential direction of the cylindrical piezoelectric body, and is applied to the second electrode by voltage applying means. It may be characterized by further comprising a control unit for controlling the moving distance of the moving object moved by the second piezoelectric element by controlling the voltage.

The method may further include attaching a spherical object to the upper surface of the second piezoelectric element in order to improve contact characteristics between the upper surface of the second piezoelectric element and the movable body.

Each of the second piezoelectric elements attached to the upper surface of the substrate may be characterized in that it further comprises a plurality of protrusions having the same height as the height of the second piezoelectric element in a state where no voltage is applied.

In another category, an object of the present invention is to provide a method for moving a mobile body using the above-mentioned actuator, comprising: a first step of placing a mobile body on an upper surface of a second piezoelectric element attached to a substrate; A voltage applying means for applying a positive voltage to all of the second electrodes of the second piezoelectric elements in the first column of the second piezoelectric elements attached to the substrate to tension the cylindrical piezoelectric member in the z-axis direction to move the movable body in the z-axis direction. Step 2; A third step of moving the movable body in the x-axis or y-axis direction by further applying a + voltage to any one of the second electrodes of the first column second piezoelectric element to which the voltage is applied by the voltage applying means; By the voltage applying means, a positive voltage is applied to all of the second electrodes of the second row second piezoelectric element to which the voltage is not applied in the second step, so that the second row second piezoelectric element is stretched in the z-axis direction so that the second row second piezoelectric element A fourth step of contacting the upper surface of the substrate with a moving body, releasing the voltage of the second row of piezoelectric elements or compressing it in the z-axis direction by applying a negative voltage to all of the second electrodes of the first row of second piezoelectric elements; And a fifth step of applying a positive voltage to any one of the second electrodes of the second column second piezoelectric element to which the voltage is applied in the fourth step by the voltage applying means to move the moving body in the x-axis or y-axis direction. It can be achieved by a method of moving the moving body using a piezoelectric element comprising a.

In still another aspect of the present invention, there is provided a method of moving a movable body using an actuator, comprising: a first step of placing a movable body on an upper surface of a second piezoelectric element and a protrusion attached to a substrate; A second step of applying a positive voltage to all of the second electrodes of the second piezoelectric element attached to the substrate by the voltage applying means to tension the cylindrical piezoelectric body to move the movable body in the z-axis direction; A third step of moving the moving body in the x-axis or y-axis direction by further applying a + voltage to any one of the second electrodes of the second piezoelectric element to which the voltage is applied by the voltage applying means; A fourth step of applying -voltage to all of the second electrodes of the second piezoelectric element by the voltage applying means to compress the second piezoelectric element in the z-axis direction to contact the upper surface of the protrusion with the movable body; And + voltage is applied to both of the second electrodes by voltage applying means to contact the upper surface of the second piezoelectric element to the movable body, and + voltage is applied to any one of the second electrodes to move the movable body in the x-axis or y-axis direction. The fifth step of the movement; can be achieved by a method of moving the moving body using a piezoelectric element comprising a.

Another object of the present invention, the substrate; The lower surface is attached to the upper surface of the substrate spaced apart from each other at a specific interval, the first piezoelectric layer is a shear stress in the x-axis direction when the voltage is applied, the shear stress is generated in the y-axis direction when the voltage is applied The second piezoelectric layer, the first separation layer provided between the first piezoelectric layer and the second piezoelectric layer to combine the lower surface of the first piezoelectric layer and the upper surface of the second piezoelectric layer, tension or compression in the z-axis direction according to the application of voltage A plurality of first piezoelectric elements having a third piezoelectric layer and a second separation layer provided between the second piezoelectric layer and the third piezoelectric layer to couple the lower surface of the second piezoelectric layer and the upper surface of the third piezoelectric layer; It is attached to the upper surface of the substrate and provided between each of the first piezoelectric element, the cylindrical piezoelectric in the form of a tube formed of a piezoelectric material to which the voltage- applied portion is tensioned or compressed, attached to the inner surface of the cylindrical piezoelectric, 0 or a constant voltage A plurality of second piezoelectric elements having a first electrode receiving a plurality of second electrodes attached to one side of an outer surface of the cylindrical piezoelectric body, and having a plurality of second electrodes spaced apart from each other at specific intervals; And a voltage applying means for applying a voltage to each of the first piezoelectric layer, the second piezoelectric layer, the third piezoelectric layer, and the second electrode, wherein the moving body placed on the upper surface of the first piezoelectric element and the second piezoelectric element is x, It can be achieved as an actuator using a piezoelectric element characterized by moving in the direction of at least one of y and z.

The moving distance of the movable body moved by the first piezoelectric element or the second piezoelectric element by controlling the voltage applied to the second electrode by the voltage applying means and the voltage applied to the first piezoelectric layer, the second piezoelectric layer and the third piezoelectric layer. It may be characterized in that it further comprises a control unit for adjusting the.

In another category, an object of the present invention is to provide a method of moving a moving body using the above-mentioned actuator, comprising: a first step of placing a moving body on an upper surface of a first piezoelectric element and a second piezoelectric element attached to a substrate; A second step of applying a + voltage to the third piezoelectric layer of the first piezoelectric element attached to the substrate by the voltage applying means to tension the first piezoelectric element to move the movable body in the z-axis direction; A third step of applying a + voltage or a -voltage to the first piezoelectric layer or the second piezoelectric layer of the first piezoelectric element to which the voltage is applied by the voltage applying means to move the moving body in the x-axis or y-axis direction; A fourth step of applying a positive voltage to all of the second electrodes of the second piezoelectric element by means of voltage applying means, bringing the upper surface of the second piezoelectric element into contact with the movable body, and releasing the voltage of the first piezoelectric element; And a fifth step of applying a + voltage to any one of the second electrodes of the second piezoelectric element by the voltage applying means to move the movable body in the x-axis or y-axis direction. It can be achieved by the moving method of the moving body.

After the fifth step, a positive voltage is applied to the third piezoelectric layer of the first piezoelectric element by the voltage applying means, the upper surface of the first piezoelectric element is brought into contact with the movable body, and the voltage of the second piezoelectric element is released. The method may further include moving the moving body in the x-axis or y-axis direction by applying + voltage or − voltage to the first piezoelectric layer or the second piezoelectric layer of the first piezoelectric element.

And a plurality of elastic members provided on the lower side of the substrate and spaced apart from the substrate at predetermined intervals, and a plurality of elastic members provided between the lower substrate and the substrate.

An inner cylinder whose outer surface contacts the upper surfaces of the first piezoelectric element and the second piezoelectric element; And an inner cylinder whose inner surface is coupled to the lower surface of the lower base to move or rotate the inner cylinder that is in contact with the upper surfaces of the first piezoelectric element and the second piezoelectric element with respect to the central axis.

Therefore, according to one embodiment of the present invention, as described, the distance is limited by a step from several angstroms to several tens of micrometers (μm) through an actuator using the first piezoelectric element and the second piezoelectric element. It has the effect of moving the moving object without. In addition, there is an effect that can have a rotation angle resolution of less than micro radians (μrad). And, unlike the conventional actuator using the piezoelectric element of the slip-stick (slip-stick) method, the actuator using the piezoelectric element according to an embodiment of the present invention is stable against temperature because there is no movement friction, wear and crack There is no advantage to improve the reliability. In addition, since it is stable to temperature, it can be operated stably even in cryogenic and ultra-high vacuum, and both translational and rotational motions in the x, y, and z directions are independent, thereby increasing the degree of freedom of movement of the moving object.

Although the present invention has been described in connection with the above-mentioned preferred embodiments, it will be appreciated by those skilled in the art that various other modifications and variations can be made without departing from the spirit and scope of the invention, All fall within the scope of the appended claims.

1 is a perspective view of a first piezoelectric element according to an embodiment of the present invention;
2A is a front view of a first piezoelectric element tensioned in the z-axis direction by applying a voltage to a third piezoelectric layer according to one embodiment of the present invention;
2B is a front view of the first piezoelectric element sheared in the y-axis direction by applying a voltage to the second piezoelectric layer according to one embodiment of the present invention;
2C is a side view of the first piezoelectric element sheared in the x-axis direction by applying a voltage to the first piezoelectric layer according to one embodiment of the present invention;
3A is a perspective view of a second piezoelectric element according to an embodiment of the present invention;
3B is a plan view of a second piezoelectric element according to an embodiment of the present invention;
3C is a front view of a second piezoelectric element in a state where a voltage is applied to all of the second electrodes according to one embodiment of the present invention;
3D is a front view of a second piezoelectric element in a state where a voltage is applied to any one of the second electrodes according to an embodiment of the present invention;
4A is a front view of an actuator in a state where a movable body is placed on an upper surface of a piezoelectric element in a movable body moving method according to a first embodiment of the present invention;
4B is a front view of an actuator in a state where the piezoelectric element is stretched along the z-axis in the moving body moving method according to the first embodiment of the present invention;
Figure 4c is a front view of the actuator of the piezoelectric element is tensioned in the z-axis and bent in the + x or + y direction in the moving body moving method according to the first embodiment of the present invention,
4D is a front view of an actuator in which the piezoelectric element is compressed in the z-axis direction and bent in the -x or -y direction in the moving body moving method according to the first embodiment of the present invention;
4E is a front view of an actuator in which the piezoelectric element is bent in the -x or -y direction and is stretched in the z-axis direction in the moving body moving method according to the first embodiment of the present invention;
4F is a front view of an actuator in a state where the piezoelectric element is stretched in the z-axis direction and bent in the + x or + y direction in the moving body moving method according to the first embodiment of the present invention;
5A is a front view of an actuator in a state in which a mobile body is placed on an upper surface of a first piezoelectric element and a second piezoelectric element in a moving body moving method according to a second embodiment of the present invention;
5B is a front view of the actuator in a state in which the first piezoelectric element is stretched along the z axis in the moving body moving method according to the second embodiment of the present invention;
5C is a front view of the actuator in a state in which the first piezoelectric element is stretched in the z-axis and bent in the + x or + y direction in the moving body moving method according to the second embodiment of the present invention;
5D is a front view of the actuator in a state in which the second piezoelectric element is bent in the -x or -y direction and is stretched in the z-axis in the moving body moving method according to the second embodiment of the present invention;
5E illustrates a state in which the second piezoelectric element is bent in the -x or -y direction, stretched in the z-axis direction, and the voltage applied to the first piezoelectric element is released in the moving body moving method according to the second embodiment of the present invention. Front view of the actuator,
5F is a front view of the actuator in a state in which the second piezoelectric element is stretched in the z-axis direction and bent in the + x or + y direction in the moving body moving method according to the second embodiment of the present invention;
6 is a front view of an actuator using a piezoelectric element having an elastic member and a lower substrate according to a third embodiment of the present invention;
7A is a perspective view of an actuator using a piezoelectric element having an elastic member and a lower substrate provided between an outer cylinder and an inner cylinder according to a third embodiment of the present invention;
7B is a plan view of an actuator using a piezoelectric element having an elastic member and a lower substrate provided between an outer cylinder and an inner cylinder according to a third embodiment of the present invention;
7C is a cross-sectional view of an actuator using a piezoelectric element having an elastic member and a lower substrate provided between an outer cylinder and an inner cylinder according to a third embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the detailed description of known functions and configurations incorporated herein will be omitted when it may unnecessarily obscure the subject matter of the present invention.

The same reference numerals are used for portions having similar functions and functions throughout the drawings. Throughout the specification, when a part is connected to another part, this includes not only the case where it is directly connected, but also the case where it is indirectly connected with another element in between. In addition, the inclusion of an element does not exclude other elements, but may include other elements, unless specifically stated otherwise.

Hereinafter, the configuration and operation of the actuator using the first piezoelectric element 1 and the first piezoelectric element 1 according to an embodiment of the present invention will be described. First, FIG. 1 shows a perspective view of a first piezoelectric element 1 according to an embodiment of the present invention. As shown in FIG. 1, the first piezoelectric element 1 according to an embodiment of the present invention may include a first piezoelectric layer 10, a second piezoelectric layer 20, a third piezoelectric layer 30, and a first piezoelectric layer 30. And a separation layer 11 and a second separation layer 21.

Piezoelectric elements used in piezoelectric elements are directional when a voltage is applied and have a property of being stretched in a specific direction or compressed when a voltage of the opposite pole is applied (that is, a physical displacement is generated). Materials used for such piezoelectric materials include quartz, rosell salt, barium titanate (BaTiO₃), artificial ceramics (PZT), and the like as piezoelectric materials. According to an embodiment of the present invention, the first piezoelectric element 1 includes a first piezoelectric layer 10 at an upper end portion, a second piezoelectric layer 20 at an interruption portion, and a third piezoelectric layer 30 at an lower end portion thereof. And a second separation coupling the first separation layer 11 and the second piezoelectric layer 20 and the third piezoelectric layer 30 to couple between the first piezoelectric layer 10 and the second piezoelectric layer 20. Layer 21 is provided.

2A illustrates a front view of the first piezoelectric element 1 tensioned in the z-axis direction by applying a voltage to the third piezoelectric layer 30 according to an embodiment of the present invention. As shown in FIG. 2A, when a voltage (+ voltage) is applied to the third piezoelectric layer 30, that is, when a current flows in a predetermined direction to the third piezoelectric layer 30, the third piezoelectric layer 30 is applied. Becomes tension in the z-axis direction. When the current flows in the opposite direction (hereinafter, -voltage is applied), the third piezoelectric layer 30 is compressed in the z-axis direction. In addition, the value of the displacement ΔZ in the Z-axis direction is proportional to the magnitude of the applied voltage.

FIG. 2B illustrates a front view of the first piezoelectric element 1 in which a + voltage is applied to the second piezoelectric layer 20 to move the upper side in the + y-axis direction according to an embodiment of the present invention. As shown in FIG. 2B, when a voltage (+ voltage) is applied to the second piezoelectric layer 20, the second piezoelectric layer 20 gradually increases from the lower surface to the upper surface in the + y direction (see FIG. 2B). It is shifted to the right side with reference to the right side (i.e., sheared in the + y direction. In addition, when a voltage of the opposite pole is applied, it gradually increases from the lower side to the upper side in the -Y direction (as shown in FIG. 2B). Reference to the left side, and the displacement (Δy) in the y-axis direction is generated in the second piezoelectric layer 20. The displacement (ΔY) in the y-axis direction is the magnitude of the applied voltage. Will be proportional to

FIG. 2C illustrates a side view of the first piezoelectric element 1 moved in the x-axis direction by applying a voltage to the first piezoelectric layer 10 according to an exemplary embodiment of the present invention. As shown in FIG. 2C, when a voltage (+ voltage) is applied to the first piezoelectric layer 10, the first piezoelectric layer 10 gradually increases from the lower surface to the upper surface in the + x direction (see FIG. 2C). As shown, it is moved to the right side, that is, sheared in the x direction. In addition, when the voltage of the opposite pole is applied, the voltage gradually moves from the lower surface to the upper surface in the -x direction (left side as shown in FIG. 2C). As a result, the upper surface of the first piezoelectric layer 10 causes displacement (Δx) in the x-axis direction. The displacement Δx in the x-axis direction is proportional to the magnitude of the applied voltage.

Accordingly, when the first piezoelectric element 1 is used, the first piezoelectric layer 10 may be formed according to the polarity and magnitude of the voltage applied to the first piezoelectric layer 10, the second piezoelectric layer 20, and the third piezoelectric layer 30. The movable body 3 placed on the upper surface of the element 1 can be moved in the x, y and z directions.

Hereinafter, the configuration and operation of the actuator using the second piezoelectric element 2 and the second piezoelectric element 2 according to an embodiment of the present invention will be described. First, FIG. 3A illustrates a perspective view of a second piezoelectric element 2 according to an embodiment of the present invention, and FIG. 3B illustrates a plan view of the second piezoelectric element 2 according to an embodiment of the present invention. will be. As shown in FIGS. 3A and 3B, the second piezoelectric element 2 according to the exemplary embodiment of the present invention is formed of a piezoelectric material and has a tubular cylindrical piezoelectric body 60 having a predetermined thickness and a first electrode 61. ) And a second electrode 62 or the like.

The cylindrical piezoelectric member 60 constituting the second piezoelectric element 2 is made of the piezoelectric material described above, and physical displacement occurs at a portion to which a voltage is applied, thereby being stretched or compressed. The second piezoelectric element 2 according to an embodiment of the present invention includes a first electrode 61 attached to the entire front surface of the inner surface of the cylindrical piezoelectric body 60 and four second second surfaces attached to the outer surface of the cylindrical piezoelectric body 60. Electrode 62. The first electrode 61 is grounded or a constant voltage is constantly applied. 3A and 3B, the second electrode 62 is coupled to the outer surface of the cylindrical piezoelectric member 60 so that its longitudinal direction is coincident with the axial direction of the cylindrical piezoelectric member 60 and is spaced at a specific interval from each other. do.

3C is a front view of the second piezoelectric element 2 in which + voltage is applied to all of the second electrodes 62 in accordance with one embodiment of the present invention. As shown in FIG. 3C, a positive voltage (for example, when the potential of the second electrode 62 is higher than that of the first electrode 61) is applied to all of the second electrodes 62. The cylindrical piezoelectric member 60 is stretched in the z-axis direction by the voltage difference with the one electrode 61. Then, a negative voltage (ie, when the current flow is reversed (for example, when the potential of the first electrode 61 is higher than the potential of the second electrode 62) is applied to all of the second electrodes 62. In this case, the cylindrical piezoelectric member 60 is compressed in the z-axis direction.

In addition, FIG. 3D illustrates a front view of the second piezoelectric element 2 in which the + voltage is applied to any one of the second electrodes 62 according to one embodiment of the present invention. As shown in FIG. 3D, when a positive voltage or a negative voltage is applied to any one of the four second electrodes 62, a portion of the cylindrical piezoelectric body 60 to which the second electrode 62 is applied is tensioned. Or it is compressed and bends in a specific direction as a whole (i.e., a bending moment occurs around the x-axis or y-axis. This applies a positive voltage or a negative voltage to all four second electrodes 62). The same effect can be obtained by changing the voltage of any one of the second electrodes 62 while being stretched or compressed in the z-axis direction.

As shown in FIG. 3D, in order to bend the second piezoelectric element to the left side, a + voltage is applied to the second electrode 62 coupled to the right side or the second coupled side of the second piezoelectric element is coupled to the left side. The − voltage is applied to the electrode 62. In addition, the second piezoelectric element may be bent to the left by applying a + voltage to the second electrode 62 coupled to the right side and applying a − voltage to the second electrode 62 coupled to the left side. Therefore, the upper surface of the cylindrical piezoelectric member 60 generates displacements Δx and Δy in the x-axis direction or the y-axis direction. That is, according to the potential difference between the second electrodes 62, the cylindrical piezoelectric member 60 causes a bending moment about the x-axis or the y-axis.

Accordingly, when the second piezoelectric element 2 is used, the moving body 3 placed on the upper surface of the second piezoelectric element 2 according to the polarity and magnitude of the voltage applied to the second electrode 62 is x, y. , it can be moved in the z direction.

In order to improve contact characteristics between the upper surface of the second piezoelectric element 2 and the lower surface of the movable body, a spherical material may be further attached to the upper surface of the second piezoelectric element 2. This prevents abrasion of the second piezoelectric element 2 and always maintains the same contact area regardless of the degree of bending.

Hereinafter, a method of moving the moving body 3 according to the first embodiment using an actuator having at least one of the first piezoelectric element 1 and the second piezoelectric element 2 described above will be described. The actuator using the piezoelectric element according to the first embodiment of the present invention has a plurality of the first piezoelectric element 1 or the second piezoelectric element 2 described above attached to the upper surface of the substrate 40, the first piezoelectric element Voltage is applied to the first piezoelectric layer 10, the second piezoelectric layer 20 and the third piezoelectric layer 30 of the element 1, or the second electrode 62 of the second piezoelectric element 2. Means, a projection 50 provided between each of the piezoelectric elements (the first piezoelectric element 1 or the second piezoelectric element 2).

First, FIG. 4A shows a front view of an actuator in a state where the movable body 3 is placed on the upper surface of the piezoelectric element in the movable body 3 moving method according to the first embodiment of the present invention (FIGS. 4A to 4F). Although one piezoelectric element is shown, the use of a second piezoelectric element is obviously within the scope of the present invention). As shown in FIG. 4A, in the actuator using the piezoelectric element according to the first embodiment, a piezoelectric element (first piezoelectric element 1 or second piezoelectric element 2) is attached to the upper surface of the substrate 40. A protrusion 50 having the same height as that of the piezoelectric element to which no voltage is applied is attached to the upper surface of the substrate 40 between the piezoelectric elements 1 or 2.

4B shows a front view of the actuator in a state where the piezoelectric element is stretched along the z-axis in the moving method of the movable body 3 according to the first embodiment of the present invention. As shown in FIG. 4B, a + voltage is applied to the piezoelectric element (that is, in the case of the first piezoelectric element 1, a + voltage is applied to the third piezoelectric layer 30 and the second piezoelectric element 2 is removed. In this case, a positive voltage is applied to all of the second electrodes 62) to tension the piezoelectric element in the z-axis direction.

Then, + voltage or − voltage is applied to the piezoelectric element 1 or 2 to move in the x or y direction placed on the upper surface of the piezoelectric element 1 or 2. FIG. 4C shows a front view of the actuator in a state in which the first piezoelectric element 1 is stretched in the z-axis and bent in the + x or + y direction in the method of moving the movable body 3 according to the first embodiment of the present invention. That is, in the case of the first piezoelectric element 1, a positive voltage is applied to the first piezoelectric layer 10 or the second piezoelectric layer 20, and in the case of the second piezoelectric element 2, the second electrode 62 is applied. + Voltage or minus voltage is further applied to either. Therefore, in this step, the moving body 3 is moved in the + x or + y direction.

Then, the piezoelectric element is compressed in the z-axis direction (that is,-voltage is applied to the third piezoelectric layer 30 in the case of the first piezoelectric element 1, and in the case of the second piezoelectric element 2, the second electrode ( 62) to apply -voltage to all), -x or -y directions. FIG. 4D shows a front view of the actuator in which the piezoelectric element is compressed in the z-axis direction and bent in the -x or -y direction in the moving method of the movable body 3 according to the first embodiment of the present invention. As shown in FIG. 4D, in this step, the lower surface of the movable body 3 comes into contact with the upper surface of the protrusion 50.

In addition, in the z-axis direction, a tension (ie, a + voltage is applied to the third piezoelectric layer 30 in the case of the first piezoelectric element 1, and in the case of the second piezoelectric element 2 is applied to all of the second electrodes 62. + Voltage is applied). 4E shows a front view of the actuator in a state where the piezoelectric element is bent in the -x or -y direction and is stretched in the z-axis direction in the moving method of the movable body 3 according to the first embodiment of the present invention. As shown in Fig. 4E, in this step, the lower surface of the movable body 3 comes into contact with the upper surface of the piezoelectric element.

Then, a voltage is applied to the piezoelectric element to move the moving body 3 to the + x direction or the + y direction (that is, the first piezoelectric layer 10 or the second piezoelectric layer 20 in the case of the first piezoelectric element 1). A voltage is applied, and in the case of the second piezoelectric element 2, a voltage is further applied to any one of the second electrodes 62). FIG. 4F shows a front view of the actuator in a state where the piezoelectric element is stretched in the z-axis direction and bent in the + x or + y direction in the moving method of the movable body 3 according to the first embodiment of the present invention. As shown in Fig. 4E, in this step, the movable body 3 is moved in the + x direction or the + y direction. In addition, by repeating the above-described process of Figures 4d to 4f, it is possible to continue to move the moving body 3 placed on the upper surface of the piezoelectric element on the x-y plane.

In addition, the actuator according to the first embodiment further includes a control unit to control the voltage applied to the first piezoelectric element 1 by the voltage applying means to the first piezoelectric layer 10 and the second piezoelectric layer 20 and The tensile length of the third piezoelectric layer 30 is adjusted. In addition, by controlling the voltage applied to the second electrode 62 of the second piezoelectric element 2, the moving distance and the moving direction of the moving body 3 to be moved are adjusted.

Hereinafter, the moving method of the movable body 3 according to the second embodiment using the actuator having the first piezoelectric element 1 and the second piezoelectric element 2 described above will be described. First, FIG. 5A illustrates an actuator in a state where the movable body 3 is placed on the upper surfaces of the first piezoelectric element 1 and the second piezoelectric element 2 in the moving method of the movable body 3 according to the second embodiment of the present invention. The front view is shown. As shown in FIG. 5A, in the actuator using the piezoelectric element according to the second embodiment, a plurality of first piezoelectric elements 1 are attached to an upper surface of the substrate 40, and between the first piezoelectric elements 1, respectively. The second piezoelectric element 2 is attached (i.e., as shown in FIG. 5A, the first piezoelectric element 1 is provided in the odd column (first column) and the second column in the even column (second column). The piezoelectric element 2 is provided, and the movable body 3 is placed on the upper surface of the first piezoelectric element 1 and the second piezoelectric element 2, and the first piezoelectric element 1 and the second piezoelectric element are placed. And a control unit for controlling the polarity and magnitude of the voltage applied by the voltage applying unit.

First, a + voltage is applied to the third piezoelectric layer 30 of the first piezoelectric element 1 to tension the first piezoelectric element 1 in the z-axis direction. FIG. 5B shows a front view of the actuator in a state in which the first piezoelectric element 1 is tensioned in the z-axis direction in the moving method of the movable body 3 according to the second embodiment of the present invention. As shown in FIG. 5B, in this step, the lower surface of the movable body 3 comes into contact only with the upper surface of the first piezoelectric element 1.

Then, a voltage is applied to the first piezoelectric element 1 to move the first piezoelectric element 1 in the + x direction (+ voltage applied to the first piezoelectric layer 10) or the + y direction (second piezoelectric layer 20). Bent to + voltage). FIG. 5C shows a front view of the actuator in a state in which the first piezoelectric element 1 is stretched in the z-axis and bent in the + x or + y direction in the method of moving the movable body 3 according to the second embodiment of the present invention. As shown in FIG. 5C, the moving body 3 is moved in the + x direction or the + y direction by the first piezoelectric element 1 in this step.

Then, a positive voltage or a negative voltage is applied to any one of the second electrodes 62 of the second piezoelectric element 2 to bend in the -x direction or the -y direction, and a predetermined voltage is applied to all of the second electrodes 62. And is stretched in the z-axis direction while being bent in the -x direction or -y direction. 5d shows a front view of the actuator in which the second piezoelectric element 2 is bent in the -x or -y direction and is stretched in the z-axis in the moving method of the movable body 3 according to the second embodiment of the present invention. As shown in FIG. 5D, it can be seen that the lower surface of the moving body 3 is in contact with both the first piezoelectric element 1 and the upper surface of the second piezoelectric element 2 in this step.

Then, the voltage applied to the first piezoelectric element 1 is released. At this time, the voltage for controlling the displacement in the z direction is first released so that the moving body 3 does not move by the movement in the -x or -y direction of the first piezoelectric element 1. 5E shows that the second piezoelectric element 2 is bent in the -x or -y direction, stretched in the z-axis direction, and the first piezoelectric element 1 in the method of moving the movable body 3 according to the second embodiment of the present invention. The front view of the actuator in the state in which the voltage applied to) is released. As shown in FIG. 5E, it can be seen that the lower surface of the movable body 3 is in contact with the upper surface of the second piezoelectric element 2 at this stage.

Then, a voltage is applied to any one of the second electrodes 62 of the second piezoelectric element 2 to bend the second piezoelectric element 2 in the + x direction or the + y direction. FIG. 5F illustrates a front view of the actuator in a state in which the second piezoelectric element 2 is stretched in the z-axis direction and bent in the + x or + y direction in the moving method 3 according to the second embodiment of the present invention. . As shown in FIG. 5F, it can be seen that the moving body 3 is moved in the + x or + y direction by the second piezoelectric element 2 in this step. In addition, by repeating the above-described process of FIGS. 5A to 5F, the movable body 3 placed on the upper surfaces of the first piezoelectric element 1 and the second piezoelectric element 2 can be continuously moved on the xy plane.

Hereinafter, an actuator using another type of piezoelectric element including a lower substrate 70 and an elastic member 71 and a method of moving the movable body 3 using the actuator will be described. First, FIG. 6 illustrates a front view of an actuator using a piezoelectric element having an elastic member 71 and a lower substrate 70 according to a third embodiment of the present invention. As shown in FIG. 6, in the actuator using the piezoelectric element, a plurality of first piezoelectric elements 1 are attached to the upper surface of the substrate 40 as in the second embodiment, and between the first piezoelectric elements 1, respectively. The second piezoelectric element 2 is attached to the upper surface of the substrate 40. As shown in FIG. 6, a lower substrate 70 is disposed to be spaced apart from the substrate 40 at predetermined intervals, and an elastic member 71 such as a spring is provided between the lower substrate 70 and the substrate 40. It can be seen that is provided.

Hereinafter, the moving method of the movable body 3 using the actuator using the piezoelectric element having the lower substrate 70 described above will be described. The mechanism of the moving method of the movable body 3 using such an actuator is basically the same as the moving method of the movable body 3 according to the second embodiment described above.

First, FIG. 7A illustrates a perspective view of an actuator using a piezoelectric element having an elastic member 71 and a lower substrate 70 provided between an outer cylinder 80 and an inner cylinder 90 according to a third embodiment of the present invention. It is shown. 7B illustrates a plan view of an actuator using a piezoelectric element having an elastic member 71 and a lower substrate 70 provided between an outer cylinder 80 and an inner cylinder 90 according to a third embodiment of the present invention. It is shown. In addition, FIG. 7C illustrates a cross-sectional view along line A-A in FIG. 7B.

As shown in FIGS. 7A to 7C, an actuator using the piezoelectric elements 1 and 2 according to the third embodiment is attached between the inner cylinder 90 and the outer cylinder 80. That is, the lower substrate 70 is coupled to the inner surface of the outer cylinder 80 and the upper surfaces of the first piezoelectric element 1 and the second piezoelectric element 2 attached to the upper surface of the substrate 40 are elastic members. The elastic force of 71 makes contact with the outer surface of the inner cylinder 90. Therefore, by applying a voltage to the first piezoelectric element 1 and the second piezoelectric element 2 by the moving method of the movable body 3 according to the above-described second embodiment to rotate the inner cylinder around the axis or in the axial direction You can move it to.

1: first piezoelectric element
2: second piezoelectric element
3: moving body
10: first piezoelectric layer
11: first separation layer
20: second piezoelectric layer
21: second separation layer
30: third piezoelectric layer
40: Substrate
50: protrusion
60: cylindrical piezoelectric
61: first electrode
62: second electrode
70: lower substrate
71: Spring
80: outer cylinder
90: inner cylinder

Claims (15)

A first piezoelectric layer sheared in the x-axis direction upon application of voltage, a second piezoelectric layer sheared in the y-axis direction upon application of voltage, and disposed between the first piezoelectric layer and the second piezoelectric layer A first separation layer for coupling the lower surface of the piezoelectric layer and the upper surface of the second piezoelectric layer, a third piezoelectric layer which is stretched or compressed in the z-axis direction according to the application of a voltage, and between the second piezoelectric layer and the third piezoelectric layer A first piezoelectric element provided in the second piezoelectric layer, the first piezoelectric element having a second separation layer coupling the lower surface of the second piezoelectric layer and the upper surface of the third piezoelectric layer;
A substrate on which a lower surface of the third piezoelectric layer is coupled to an upper surface to which the plurality of first piezoelectric elements are attached; And
At least any one of x, y, and z for the movable body disposed on the upper surface of the first piezoelectric element, including voltage applying means for applying a voltage to each of the first piezoelectric layer, the second piezoelectric layer, and the third piezoelectric layer. Actuator using a piezoelectric element, characterized in that moving in one direction.
The method of claim 1,
And a plurality of protrusions attached to an upper surface of the substrate and disposed between each of the first piezoelectric elements, and having a height equal to that of the first piezoelectric element in a state where no voltage is applied. Actuator using a piezoelectric element.
In the method of moving the moving body using the actuator of claim 1,
A first step of placing a movable body on an upper surface of the first piezoelectric element attached to the substrate;
The moving object is moved in the z-axis direction by tensioning the third piezoelectric layer by applying a + voltage to a third piezoelectric layer of the first piezoelectric element belonging to one column of the first piezoelectric elements attached to the substrate by a voltage applying means. Making a second step;
A third step of moving the movable body in the x-axis or y-axis direction by applying a positive voltage or a negative voltage to the first piezoelectric layer or the second piezoelectric layer of the first column first piezoelectric element to which voltage is applied by a voltage applying means; ;
The two-column first in the state in which the voltage is applied or not applied to the first piezoelectric layer or the second piezoelectric layer of the two-column first piezoelectric element to which the voltage is not applied in the second step by the voltage applying means. A positive voltage is applied to the third piezoelectric layer of the piezoelectric element to tension the first piezoelectric element in the z-axis direction so that the upper surface of the second row of first piezoelectric elements is brought into contact with the movable body. A fourth step of releasing the voltage of the three piezoelectric layers or compressing the same by applying a voltage, and releasing the voltage of the first piezoelectric layer or the second piezoelectric layer of the first row of first piezoelectric elements;
A voltage applying means applies + voltage or-voltage to the first piezoelectric layer or the second piezoelectric layer of the second column first piezoelectric element to which the voltage is applied in the fourth step to move the movable body in the x-axis or y-axis direction. A fifth step of moving; And
The voltage applying means compresses the third piezoelectric layer of the second column first piezoelectric element to which the voltage is applied in the fifth step by applying a negative voltage, and compresses the first piezoelectric layer or the second piezoelectric element of the second column first piezoelectric element. And a sixth step of releasing the voltage of the third piezoelectric layer of the first and second columns of the first piezoelectric elements after releasing the voltages of the layers.
The method of claim 3,
Between the fifth step and the sixth step,
In the fifth step by the voltage applying means, the first column first column with or without the + voltage or the negative voltage applied to the first piezoelectric layer or the second piezoelectric layer of the first column first piezoelectric element to which the voltage is not applied. A positive voltage is applied to the third piezoelectric layer of the piezoelectric element to tension the first piezoelectric element in the z-axis direction so that the upper surface of the first row of first piezoelectric elements is brought into contact with the movable body. Releasing the voltage of the third piezoelectric layer or compressing by applying a voltage, and releasing the voltage of the first piezoelectric layer or the second piezoelectric layer of the first two piezoelectric elements;
And repeating the third to fifth 'steps to continuously move the movable body in the x-axis or y-axis direction.
In the method of moving the moving body using the actuator of claim 2,
A first step of placing a movable body on an upper surface of the first piezoelectric element and the protrusion attached to the substrate;
A second step of applying a + voltage to the third piezoelectric layer of the first piezoelectric element attached to the substrate by a voltage applying means to tension the third piezoelectric layer to move the movable body in the z-axis direction;
A third step of applying a + voltage to the first piezoelectric layer or the second piezoelectric layer of the first piezoelectric element by a voltage applying means to move the movable body in the + x-axis or + y-axis direction;
The voltage applying means applies a negative voltage to the third piezoelectric layer of the first piezoelectric element to compress the first piezoelectric element in the z-axis direction so that the upper surface of the protruding portion is brought into contact with the movable body. And releasing the voltage applied to the first piezoelectric layer or the second piezoelectric layer, and then releasing the voltage applied to the third piezoelectric layer of the first piezoelectric layer. Method of moving the moving object.
6. The method of claim 5,
Between the third step and the fourth step,
The voltage applying means applies a negative voltage to the third piezoelectric layer of the first piezoelectric element to compress the first piezoelectric element in the z-axis direction so that the upper surface of the protruding portion is brought into contact with the movable body. The upper surface of the first piezoelectric element is brought into contact with the movable body by applying a + voltage to the third piezoelectric layer of the first piezoelectric element with or without a-voltage applied to the first piezoelectric layer or the second piezoelectric layer. Add step 3 ';
And repeating the third to fifth 'steps to continuously move the movable body in the x-axis or y-axis direction. Moving method using a piezoelectric element comprising a.
A tubular cylindrical piezoelectric body composed of a piezoelectric material that is tensioned or compressed to a voltage applied portion, a first electrode attached to an inner surface of the cylindrical piezoelectric body and applied with zero or a constant voltage, and coupled to one side of an outer surface of the cylindrical piezoelectric body, A plurality of second piezoelectric elements having a plurality of second electrodes arranged to be spaced apart from each other in a circumferential direction;
A substrate on which a lower surface of the cylindrical piezoelectric body is coupled to an upper surface to which the plurality of second piezoelectric elements are attached; And
Including a voltage applying means for applying a voltage to the second electrode; when the + voltage or-voltage is applied to all of the second electrode, the cylindrical piezoelectric member is stretched in the z-axis direction by the voltage difference with the first electrode Alternatively, when the + voltage or-voltage is applied to any one of the second electrodes, the cylindrical piezoelectric body forms a bending moment based on a parallel axis parallel to the xy plane by the voltage difference with the first electrode. An actuator using a piezoelectric element, characterized in that the moving body placed on the upper surface of the second piezoelectric element is moved in at least one of x, y and z directions.
8. The method of claim 7,
The second electrode is composed of four arranged in the longitudinal direction of the second electrode parallel to the central axis direction of the cylindrical piezoelectric body, spaced apart from each other in the circumferential direction of the cylindrical piezoelectric body,
And a control unit for controlling the moving distance of the moving object moved by the second piezoelectric element by controlling the voltage applied to the second electrode by the voltage applying means.
8. The method of claim 7,
It is provided between each of the second piezoelectric elements attached to the upper surface of the substrate, characterized in that it further comprises a plurality of protrusions having the same height as the height of the second piezoelectric element in the state that no voltage is applied; Actuator using piezoelectric element.
8. The method of claim 7,
An actuator using a piezoelectric element, characterized in that the contact surface between the second piezoelectric element and the moving body is always kept constant by additionally attaching a spherical object to the upper surface of the second piezoelectric element.
In the method of moving the moving body using the actuator of claim 7,
A first step of placing a movable body on an upper surface of the second piezoelectric element attached to the substrate;
A positive voltage is applied to all of the second electrodes of the second piezoelectric elements belonging to one column of the second piezoelectric elements attached to the substrate by a voltage applying means to tension the cylindrical piezoelectric body in the z-axis direction, thereby moving the movable body in the z-axis direction. Moving to a second step;
A third step of moving the movable body in the x-axis or y-axis direction by further applying a + voltage to any one of the second electrodes of the first column second piezoelectric element to which voltage is applied by a voltage applying means;
By the voltage applying means in the second step of the second column of the second piezoelectric element in the state that the + or-voltage is applied or not applied to any one of the first electrode of the second column of the second piezoelectric element A predetermined + voltage is further applied to both of the second electrodes to tension the second row of second piezoelectric elements in the z-axis direction so that the upper surface of the second row of second piezoelectric elements is brought into contact with the movable body, and the first row of second piezoelectric elements A fourth step of releasing the voltage of the device or compressing it in the z-axis direction by applying a negative voltage to all of the second electrodes of the first row second piezoelectric elements; And
A fifth step of moving the movable body in the x-axis or y-axis direction by further applying a + voltage to any one of the second electrodes of the second row second piezoelectric element to which the voltage is applied in the fourth step by a voltage applying means;
After applying the voltage to both of the second electrodes of the second column second piezoelectric element to which the voltage was applied in the fifth step by the voltage applying means, compressing the voltage in the z-axis direction, and then in the fifth step, the second column second piezoelectric element. And a sixth step of releasing the + voltage applied to any one of the second electrodes of the second electrode and releasing all the voltages applied to the second electrodes of the second column second piezoelectric elements. Moving method of moving object.
12. The method of claim 11,
Between the fifth step and the sixth step,
A predetermined + voltage is applied to both the second electrodes of the first column second piezoelectric elements with or without a voltage applied to either one of the first electrodes of the first column second piezoelectric elements by the voltage applying means. Further, the first column of second piezoelectric element is stretched in the z-axis direction to contact the upper surface of the first column of second piezoelectric element to the movable body, and the voltage of the second column of second piezoelectric element is released or the second column of second piezoelectric element is released. Adding a fifth voltage to all of the second electrodes of the second piezoelectric element to compress in the z-axis direction;
And repeating the third to fifth steps to continuously move the movable body in the x-axis or y-axis direction.
In the method of moving the moving body using the actuator of claim 9,
A first step of placing a moving body on an upper surface of the second piezoelectric element and the protrusion attached to the substrate;
A second step of applying a positive voltage to all of the second electrodes of the second piezoelectric element attached to the substrate by voltage applying means to tension the cylindrical piezoelectric body to move the movable body in the z-axis direction;
A third step of moving the movable body in the x-axis or y-axis direction by further applying a + voltage to any one of the second electrodes of the second piezoelectric element to which voltage is applied by a voltage applying means;
A fourth step of applying a -voltage to all of the second electrodes of the second piezoelectric element by a voltage applying means to compress the second piezoelectric element in the z-axis direction to contact the upper surface of the protrusion with the movable body; And
A voltage applying means applies a positive voltage to all of the second electrodes to contact the upper surface of the second piezoelectric element with the movable body, and applies a + voltage to any one of the second electrodes to form the x-axis or The fifth step of moving in the y-axis direction; Moving method using a piezoelectric element comprising a.
8. The method of claim 1 or 7,
A lower substrate spaced apart from the substrate at a predetermined interval on a lower side of the substrate;
Actuator using a piezoelectric element further comprises a; a plurality of elastic members provided between the lower substrate and the substrate.
The method of claim 14,
An inner cylinder whose outer surface contacts the upper surfaces of the first piezoelectric element and the second piezoelectric element; And
An inner surface includes an outer cylinder coupled to the lower surface of the lower base to move or rotate the inner cylinder in contact with the upper surface of the first piezoelectric element and the second piezoelectric element relative to the central axis. Actuator using piezoelectric element.

Images