KR20130027133A - Transfer apparatus - Google Patents

Abstract

PURPOSE: A transfer system is provided to maintain heating temperature by preventing a substrate from being excessively cooled because heat transferred from a returning roller to a rotary shaft is controlled by a temperature control member. CONSTITUTION: A transfer system comprises a returning roller(18), a rotary shaft(16), a magnetism seal bearing, and a cooling path. The returning roller is arranged in a vacuum container and returns a substrate(42). The rotary shaft is fixed in order to transfer heat to the returning roller and is extended from the vacuum container to the outside of the vacuum container. The magnetism seal bearing is arranged in a through hole(22b) penetrating a wall generating the vacuum container and seals the through hole while rotatably supporting the rotary shaft. The cooling path is formed in a longitudinal direction in the rotary shaft and circulates a cooling medium from the outside of the vacuum container to the inside of the vacuum container. The transfer system comprises a cooling device cooling the magnetism seal bearing. The transfer system is arranged between the returning roller and the rotary shaft and comprises a temperature control member controlling thermal transmission between the returning roller and the rotary shaft.

Description

Transfer apparatus

This invention relates to the conveying apparatus which conveys a board | substrate in a vacuum container.

BACKGROUND ART A conveying apparatus for conveying a substrate while heating the substrate under a vacuum atmosphere is widely used. For example, Patent Literature 1 provides one drive motor for each vacuum container, and transfers the driving force from the drive motor provided outside the vacuum container to the distribution shaft provided in the vacuum container through the bevel gear, and from the distribution shaft. Disclosed is a technique related to a so-called in-chamber dispensing conveying apparatus which transmits to a plurality of rotating shafts each of which a conveying roller is mounted via a bevel gear.

Japanese Utility Model Publication H1-129258

However, in the conveying apparatus of the said patent document 1, there are many component parts installed in a vacuum container, and the structure is complicated. In addition, there is a problem that the bevel gear for distributing the driving force from the drive motor to each rotation shaft is worn.

With respect to such a problem, as shown in FIGS. 6 and 7, a mechanism for distributing a driving force from the drive motor 52 to the transfer roller 57 through each rotation shaft 56 is provided outside the vacuum container 61. Consider the device 51. That is, the conveying apparatus 51 is a drive motor 52, the toothed pulley 53, the toothed belt 54, the magnetic seal bearing (as shown to FIG. 6 and FIG. 7). 55, a rotating shaft 56, a conveying roller 57, a reflecting plate 58, a water cooling tube 59 and a left and right connecting shaft 60 are provided.

The drive motor 52 is provided outside the vacuum container 61. One drive motor 52 is provided per vacuum container. The toothed pulley 53 is provided outside the vacuum container 61 and is attached to the rotating shaft 56 and the rotating shaft 52a of the drive motor 52 which will be described later. The toothed belt 54 is provided outside the vacuum container 61 and spans the toothed pulleys 53 adjacent to each other. The drive force from the drive motor 52 is distributed to each conveyance roller 57 arrange | positioned at the right side with respect to a conveyance direction (A direction shown in FIG. 7) by the continuous connection by this toothed belt 54. As shown in FIG. In addition, the driving force is transmitted to the left-right connecting shaft 60 by the above-mentioned method, and the driving force from the drive motor 52 is distributed to each conveyance roller 57 arrange | positioned at the left side with respect to a conveyance direction.

The magnetic seal bearing 55 is arrange | positioned at the through-hole 61b which penetrates the wall 61a which forms the vacuum container 61. As shown in FIG. The magnetic seal bearing 55 rotatably supports the rotating shaft 56 extending out of the vacuum vessel 61 from within the vacuum vessel 61, and seals the through hole 61b to vacuum the vacuum in the vacuum vessel 61. Maintaining state The rotating shaft 56 is supplied with a driving force from the drive motor 52 outside the vacuum vessel 61, and transmits a driving force to each conveying roller 57 in the vacuum vessel 61. The conveyance roller 57 supports the tray 71 on which the substrate 72 is placed in the vertical direction, and rotates by the driving force transmitted from the rotation shaft 56 to the tray 71. To return.

The reflecting plate 58 is fixed to the inner wall of the vacuum container 61. The reflecting plate 58 is arrange | positioned so that the rotation shaft 56 and the conveyance roller 57 may be covered, and heat-radiates the rotation shaft 56 and the conveyance roller 57. The water cooling tube 59 is disposed in contact with the reflecting plate 58 and cools the reflecting plate 58 by flowing a cooling medium.

According to such a conveying apparatus 51, the structure in the vacuum container 61 can be simplified by providing the drive force distribution part which distributes the driving force from the drive motor 52 to each conveying roller 57 outside the vacuum container 61. FIG. Can be. In addition, since the driving force distribution portion is provided outside the vacuum container 61, it becomes possible to use a belt for driving force transmission, which is difficult to use in a vacuum environment, in place of the bevel gear. As a result, the problem of wear of the bevel gear can be solved.

However, in the conveying apparatus 51 which conveys the tray 71 in which the board | substrate 72 was mounted, heating the board | substrate 72 in the vacuum container 61, the rotation shaft 56 and the conveyance roller 57 dissipate heat. In order to do this, it is necessary to arrange the multilayer reflector 58 and the plurality of water cooling tubes 59. For this reason, it is required to improve heat resistance and to simplify the structure in the vacuum container 61 further.

This invention is made | formed in order to solve such a subject, and an object of this invention is to provide the conveying apparatus which can improve heat resistance.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, the conveying apparatus of this invention is a conveying apparatus which conveys the board | substrate heated in a vacuum container, is arrange | positioned in a vacuum container, and it is fixed so that heat transfer with the conveyance roller which conveys a board | substrate, and a conveyance roller is possible. And a magnetic seal bearing disposed in the through shaft extending from the vacuum vessel to the outside of the vacuum vessel and through holes penetrating the walls forming the vacuum vessel, and rotatably supporting the rotating shaft and sealing the through holes. And a cooling passage formed in the rotary shaft along the axial direction and extending from the outside of the vacuum vessel to the inside of the vacuum vessel for distributing the cooling medium.

In such a conveying apparatus, by passing a cooling medium in a cooling passage formed in the rotating shaft, heat of the rotating shaft is transmitted to the cooling medium, whereby the rotating shaft is cooled. In addition, since the conveying roller is fixed to the rotating shaft so as to be capable of heat transfer, the heat of the conveying roller is transmitted to the rotating shaft, and the heat of the rotating shaft is transmitted to the cooling medium flowing in the shaft. As a result, the conveying roller and the rotating shaft are cooled, whereby the heat resistance performance can be improved. The cooling passage is composed of, for example, a cooling medium supply pipe inserted into an inner space of the rotating shaft, and a gap formed between the outer peripheral surface of the cooling medium outer peripheral surface and the inner peripheral surface of the rotating shaft.

Moreover, it is preferable to further provide the cooling mechanism which cools a magnetic seal bearing. As a result, even in a high temperature environment, the magnetic fluid filled in the magnetic seal bearing can be maintained in a good state, so that it is possible to maintain good rotational performance.

Further, it is preferable to further include a temperature adjusting member which is disposed in contact with each other between the conveying roller and the rotating shaft and adjusts heat transfer between the conveying roller and the rotating shaft. When the substrate is directly supported by the conveying roller and conveyed, when the substrate contacts the conveying roller, the heat of the substrate is transferred to the cooled conveying roller and cooled. In this conveying apparatus, since the amount of heat transmitted from the conveying roller to the rotating shaft is adjusted by the temperature adjusting member, the substrate is prevented from being excessively cooled, and the appropriate heating temperature of the substrate can be maintained.

According to the conveying apparatus of this invention, it becomes possible to improve heat resistance.

1 is a cross-sectional view showing the configuration of a conveying apparatus according to the first embodiment.
FIG. 2 is a plan sectional view taken along the line II-II of the transport apparatus shown in FIG. 1.
3 is a cross-sectional view showing the configuration of the vicinity of the magnetic seal bearing shown in FIG. 1.
4 is a cross-sectional view showing the configuration of the rotary joint shown in FIG. 1.
5 is an enlarged cross-sectional view of the vicinity of a conveying roller included in the conveying apparatus according to the second embodiment.
6 is a cross-sectional view showing an example of the configuration of a conveying apparatus that solves the problems of the prior art.
FIG. 7: is sectional drawing along the line VII-VII of the conveyance apparatus of FIG.

(First embodiment)

EMBODIMENT OF THE INVENTION The 1st Embodiment of the conveying apparatus which concerns on this invention is described with reference to drawings. In addition, in description, the same code | symbol is used for the same element or the element which has the same function, and the overlapping description is abbreviate | omitted. 1 is a cross-sectional view showing the configuration of a conveying apparatus according to the first embodiment. FIG. 2 is a plan sectional view taken along the line II-II of the transport apparatus shown in FIG. 1. 3 is a cross-sectional view showing the configuration of the vicinity of the magnetic seal bearing shown in FIG. 1. 4 is a cross-sectional view showing the configuration of the rotary joint shown in FIG. 1.

The conveying apparatus 10 shown in FIG. 1 and FIG. 2 is applied to the film-forming apparatus which forms a board | substrate, for example, and conveys the board | substrate 42 in the vacuum container 31. FIG. The vacuum container 31 has a box shape, the front wall 31a (see FIG. 2) formed on the inlet side of the transport path of the substrate 42, the back wall 31b formed on the outlet side of the transport path, and the transport path. And a pair of side walls 31c and 31c formed on both sides (both in the left and right directions in the illustration), a top plate 31d (see FIG. 1) formed above the transport path, and a bottom plate 31e provided below the transport path. have. And the vacuum container 31 is supported from below by the mount 32. As shown in FIG.

Moreover, the opening-closing gates 31g and 31g through which the board | substrate 42 passes are provided in the front wall 31a and the back wall 31b (refer FIG. 2). In the vacuum container 31, the opening / closing gates 31g and 31g are closed to form a sealed state, and are depressurized by a vacuum pump (not shown) to form a vacuum state. Moreover, the through-hole 31f for inserting the magnetic seal bearing unit 21 mentioned later is formed in the side wall 31c which mutually opposes.

In addition, a heating heater 6 for heating the substrate 42 is provided inside the vacuum container 31, and the heating heater 6 is disposed on both sides of the substrate 42 in a vertical direction with a conveyance path therebetween. Is placed on. The opening 41a which exposes the lower surface of the board | substrate 42 is formed in the tray 41 on which the board | substrate 42 is mounted. In addition, it is preferable that the heating heater 6 is controlled so that the board | substrate 42 may become the temperature (for example, 550 degreeC) suitable for the film-forming process which is the next process. At this time, the temperature in the vacuum container 31 has reached 550 degreeC-600 degreeC.

Moreover, as shown in FIG. 1, the reflecting plate 33 which reflects the heat by the heating heater 6 is provided in the inside of the vacuum container 31 (However, in FIG. 2, the reflecting plate 33 is shown. Is omitted). The reflecting plate 33 is formed to cover the inner wall of the vacuum container 31 (for example, the side wall 31c and the ceiling plate 31d), and is fixed to the inner wall by a bolt or the like. In addition, the reflecting plate 33 is formed so as to cover the conveying roller 18 and the rotating shaft 16 which will be described later, and the conveyance on the side of the side in contact with the tray 41 about the position facing the peripheral surface of the conveying roller 18. Since the circumferential surface of the roller 18 is exposed, the reflecting plate 33 is arranged. The reflecting plate 33 is formed of stainless steel, for example, and is disposed in duplicate in this embodiment. In addition, the reflecting plate 33 may be formed so that the other site | part may be covered, for example, may be formed so that the front wall 31a, the back wall 31b, and the bottom plate 31e may be covered.

Moreover, inside the vacuum vessel 31, as shown in FIG. 1, the cooling water pipe 34 which distributes cooling water is provided. The cooling water pipe 34 is arranged in contact with the reflecting plate 33 and has a configuration capable of heat transfer with the reflecting plate 33. The heat of the reflecting plate 33 is transmitted to the cooling water flowing in the cooling water pipe 34, and the reflecting plate 33 is cooled. The cooling water pipe 34 is fixed to the inner surface of the vacuum vessel 31 of the reflecting plate 33, and for example, the cooling water pipe 34 is a reflecting plate provided between the conveying roller 18 and the side wall 31c. It is arranged on 33.

The conveying apparatus 10 uses the drive motor 12 which is a drive source, the some conveyance drive mechanism 20 arrange | positioned along the conveyance direction A on both sides of a conveyance direction, and the drive force which the drive motor 12 generate | occur | produced. The power transmission mechanism 11 which transmits to the some conveyance drive mechanism 20 is provided.

The drive motor 12 generates rotational torque in response to the supply of electric power. In the conveying apparatus 10, for example, one drive motor 12 is provided for one vacuum container 31. The drive motor 12 is arrange | positioned outside the vacuum container 31, for example, is arrange | positioned outside the side wall 31c of one side (for example, the right side of illustration). In addition, a plurality of (eg two) toothed pulleys 13 are fixed to the output shaft 12a of the drive motor 12.

The power transmission mechanism 11 transmits the driving force from the drive motor 12 outside the vacuum vessel 31, and includes a plurality of winding transfer mechanisms disposed on both sides of the vacuum vessel 31, and a vacuum. It has a left and right connecting shaft 15 for transmitting a driving force to a series of take-up electric mechanism disposed on the opposite side to the drive motor 12 with the container 31 in between. The power transmission mechanism 11 is provided with a pulley 13 and a toothed belt 14 as a plurality of winding transmission mechanisms. The toothed pulley 13 is provided on the output shaft 12a of the drive motor 12, on both ends of the left and right connecting shafts 15, and on the rotation shaft 16 of the conveyance drive mechanism 20. The toothed belt 14 spans the toothed pulley 13 adjacent in the conveying direction A, and drives the driving force of the toothed pulley 13 functioning as a prime mover. It transmits to the toothed pulley 13 which functions as a part, and distributes a driving force to the some conveyance drive mechanism 20. As shown in FIG.

The conveyance drive mechanism 20 rotates together with the rotary shaft 16 to which the said toothed pulley 13 is fixed, and the rotary shaft 16, and conveys the conveyance roller 18 and the rotary shaft 16 which convey the tray 41. FIG. The magnetic seal bearing unit 21 rotatably supported and the rotary joint 35 arrange | positioned at the outer side of the magnetic seal bearing unit 21 in an axial direction are provided.

The rotating shaft 16 is made of stainless steel, for example, and extends from the vacuum vessel 31 to the outside of the vacuum vessel 31. However, the inner side of the vacuum vessel 31 will be referred to as the front end side of the rotating shaft 16, and the outer side of the vacuum vessel 31 will be described as the rear end side of the rotating shaft 16.

In addition, an internal space 17 extending in the axial direction is formed in the rotation shaft 16, and a cooling water supply pipe 45 for circulating the cooling water is inserted into the internal space 17. That is, the rotating shaft 16 has the double pipe | tube structure provided with the cooling water supply pipe 45 extended in an axial direction. Instead of the cooling water, other cooling media may be circulated.

The rotating shaft 16 is provided with the rotating shaft main body 16A supported by the magnetic seal bearing unit 21, and the rotor 16B connected to the rear end side of the rotating shaft main body 16A. The rotary shaft main body 16A extends out of the vacuum vessel 31 from within the vacuum vessel 31, and the rear end of the rotary shaft main body 16A is disposed outside the magnetic seal bearing unit 21. The toothed pulley 13 is fitted to the rear end of the rotary shaft main body 16A disposed outside the magnetic seal bearing unit 21 (opposite to the vacuum container 31). On the outer circumferential surface of the rotation shaft main body 16A and the inner circumferential surface of the central opening of the toothed pulley 13, a key groove is formed and a key 13k is attached. And the driving force of the toothed pulley 13 which becomes a driven vehicle is transmitted to the rotating shaft 16 by the key 13k, and the rotating shaft 16 rotates. Moreover, the driving force of the rotating shaft 16 is transmitted to the toothed pulley 13 which becomes a motor vehicle by the key 13k.

In addition, the rear end of the rotation shaft main body 16A is opened, and an internal space 17 continuous in the axial direction is formed to the vicinity of the front end of the rotation shaft 16. In addition, the rotor 16B has a cylindrical shape, and both ends thereof are opened. Then, the rotation shaft main body 16A and the rotor 16B form a continuous internal space 17. The inner diameter of the inner space 17 of the rotating shaft 16 is larger than the outer diameter of the cooling water supply pipe 45 to be inserted.

As described above, the cooling water supply pipe 45 is inserted into the internal space 17 of the rotating shaft 16 to form a passage for supplying the cooling water into the rotating shaft 16. The cooling water supply pipe 45 is arranged coaxially with the rotation shaft 16, and the rear end portion is fixed by a rotary joint 35 described later to prevent rotation. In addition, the gap 17a formed between the outer circumferential surface of the cooling water supply pipe 45 and the inner circumferential surface of the rotating shaft 16 is used as a drainage path of the cooling water. That is, the cooling water supplied from the rear end side to the front end side by the cooling water supply pipe 45 flows from the front end side of the rotary shaft 16 to the rear end side through the outer side of the cooling water supply pipe 45.

The conveying roller 18 is made of stainless steel, for example, and is attached to the distal end of the rotating shaft 16. In the center of the conveying roller 18, an opening through which the rotating shaft 16 is inserted is formed, and the conveying roller 18 is fitted to the distal end of the rotating shaft 16. As shown in FIG. 3, the key groove is formed in the outer peripheral surface of the rotating shaft 16, and the inner peripheral surface of the conveyance roller 18, and the key 18k is attached. And the conveyance roller 18 is being fixed to the rotating shaft 16 using the bolt. The conveyance roller 18 transmits the torque of the rotating shaft 16 via the key 18k, and rotates with the rotating shaft 16. As shown in FIG. In addition, since the circumferential surface of the opening portion of the conveying roller 18 and the circumferential surface of the distal end portion of the rotating shaft 16 are fixed in direct contact with metals, the rows of the conveying roller 18 are adapted to the rotating shaft 16. Heat transfer. However, the conveyance roller 18 and the rotating shaft 16 may not be in direct contact with each other. For example, the conveyance roller 18 may be attached to the rotating shaft 16 via another member, and may be heat-transfer- able.

The magnetic seal bearing unit 21 shown in FIG. 3 includes a pair of bearings 24 and 24 supporting the rotating shaft 16, a magnetic seal 23 disposed between the pair of bearings 24 and 24, and The housing | casing 22 which accommodates these bearings 24 and 24 and the magnetic seal 23 is provided.

The housing 22 has a cylindrical shape and is formed of a nonmagnetic material. On the outer circumferential surface of the housing 22, a flange 22a for fixing the magnetic seal bearing unit 21 to the vacuum container 31 is provided. The magnetic seal bearing unit 21 is fitted into the through hole 31f of the side wall 31c of the vacuum container 31, and the inner circumferential surface of the through hole 31f and the outer circumferential surface of the housing 22 are in contact with each other. . Further, a round ring groove is formed in the seal face of the flange 22a, and the O-ring 27 is attached. The flange 22a is fixed to the side wall 31c by using a bolt or the like, and the outer surface of the side wall 31c and the seal surface of the flange 22a abut, and the O-ring 27 prevents the side wall 31c. The gap between the outer surface and the seal surface of the flange 22a is sealed.

The magnetic seal 23 is a shaft sealing device using a magnetic fluid, and the permanent magnet 25 in the axial direction of the rotary shaft 16 and the permanent magnet 25 disposed to face the circumferential surface of the rotary shaft 16. A pair of pole pieces 26A, 26B arranged on both sides is provided.

The permanent magnet 25 is formed in a round ring shape to allow the rotation shaft 16 to be inserted into and supported between the pole pieces 26A and 26B from both sides in the axial direction. The pole pieces 26A and 26B are formed in a round ring shape to allow the rotation shaft 16 to pass through and form a magnetic force line circuit formed by a magnetic field generated from the permanent magnet 25. In addition, the pole pieces 26A and 26B have O-rings 28 and 28 mounted on the outer circumferential surface thereof, respectively, and are fitted in the housing 22. The inner circumferential surface of the housing 22 and the pole pieces 26A, 26B abut, and the gap between the inner circumferential surface of the housing 22 and the outer circumferential surface of the pole pieces 26A, 26B is sealed by the O-rings 28, 28. It is.

Further, on the outer circumferential surface of the rotating shaft 16, a plurality of stages 16f are formed in a portion facing the inner circumferential surfaces of the pole pieces 26A and 26B to form a gap for retaining the magnetic fluid. The stage 16f is formed in the circumferential direction over the whole circumference. On the outer circumferential surface of the rotating shaft 16, a plurality of groove portions adjacent in the axial direction are formed in the circumferential direction, and the protrusions formed between the groove portions become the stage 16f. In the magnetic seal 23, a magnetic line circuit flowing through the pole piece 26A, the rotating shaft 16, and the pole piece 26B is formed by the permanent magnet 25, and the magnetic attraction force by the magnetic line circuit is generated. As a result, the magnetic fluid is held in the gap between the pole pieces 26A and 26B and the stage 16f. In other words, the gap between the inner circumferential surfaces of the pole pieces 26A and 26B and the outer circumferential surface of the rotary shaft 16 is sealed by the magnetic fluid.

In addition, the conveyance drive mechanism 20 includes a cooling mechanism for cooling the magnetic seal bearing unit 21. In the housing 22, a through hole 22b for introducing a cooling medium (cooling water) is formed therein, a cooling medium is supplied through the through hole 22b, and the magnetic seal 23 is cooled. The through hole 22b is formed near the permanent magnet 25, and the permanent magnet 25 is cooled by the supplied cooling medium.

The rotary joint 35 supports the rear end side of the rotation shaft 16 rotatably, and supports the cooling water supply pipe 45 inserted into the rotation shaft 16. The rotary joint 35 includes a casing 36 having a cylindrical shape, and in the casing 36, a bearing 38 for rotatably supporting the rotating shaft 16 and a biasing of the rotating shaft 16 are provided. The spring 39 is accommodated.

The casing 36 has a substantially cylindrical shape and is formed of a copper alloy or the like, and part of the inner space of the casing 36 is used as a flow path for distributing a cooling medium. The bearing 38 is fixed to the inner circumferential surface of the casing 36 and rotatably supports the rotor 16B of the rotation shaft 16. The spring 39 is disposed in the axial direction of the rotation shaft 16 to bias the rotation shaft 16.

Further, a cylindrical boss 36a protruding rearward in the axial direction is provided at the rear end of the casing 36 (the side opposite to the vacuum container 31). The boss 36a forms a flow path of the cooling medium and supports the rear end of the cooling water supply pipe 45. The thread part is formed in the inner peripheral surface of the front-end | tip part of the boss 36a, and the rear end side of the cooling water supply pipe 45 is joined by screwing. Then, a pipe 46 for supplying cooling water is joined to the rear end side of the boss 36a, and the pipe 46, the boss 36a, and the cooling water supply pipe 45 communicate with each other to supply cooling water. Form a passage.

Moreover, the spring 39 is arrange | positioned in the axial direction of the rotating shaft 16 between the rear end surface of the rotating shaft 16, and the front end surface of the boss 36a. The inner space of the casing 36 accommodating the spring 39 communicates with a gap 17a formed between the inner circumferential surface of the rotating shaft 16 and the outer circumferential surface of the cooling water supply pipe 45, and opens a flow path 37a for draining the cooling water. Form. Moreover, the opening part 37b which communicates with the flow path which drains cooling water is formed in the peripheral surface of the casing 36, The piping 47 for discharging cooling water is joined. And the clearance gap 17a in the rotating shaft 16, the flow path 37a of the casing 36, and the piping 47 communicate with each other, and form the channel | path which drains cooling water.

Next, operation | movement of the conveying apparatus 10 of the structure as mentioned above is demonstrated. First, the conveyance roller 18 conveys the board | substrate 42 mounted on the tray 41 toward the conveyance direction A shown in FIG. The heating heater 6 heats the board | substrate 42 mounted on the tray 41 in conveyance. Specifically, the heating heater 6 is controlled so that the substrate 42 is at a temperature suitable for film formation. The temperature in the vacuum vessel 31 reaches 550 degreeC-600 degreeC by the heating by the heating heater 6. As shown in FIG. And the tray 41 which mounted the board | substrate 42 is also heated, and the heat of the tray 41 is transmitted to the conveyance roller 18 which contacts this tray 41. As shown in FIG.

During the conveyance of the tray 41, a cooling medium is supplied into the rotating shaft 16. The cooling medium flows in the cooling water supply pipe 45 from the rear end side to the front end side. The cooling medium flows out from the front end of the cooling water supply pipe 45 near the front end of the rotating shaft 16 (mounting part of the conveying roller 18). The cooling medium flowing out of the cooling water supply pipe 45 flows from the front end side to the rear end side through the gap 17a formed between the outer circumferential surface of the cooling water supply pipe 45 and the inner circumferential surface of the rotation shaft 16. As a result, heat of the rotating shaft 16 is transferred to the cooling medium, and the rotating shaft 16 is cooled. However, the circulation of the cooling medium is basically performed continuously without interruption.

In the conveying apparatus 10 of this embodiment, a cooling medium is supplied to the magnetic seal bearing unit 21. The cooling medium is introduced inside through the through hole 22b of the housing 22 to cool the magnetic seal 23. As a result, the magnetic fluid filled in the magnetic seal bearing unit 21 can be maintained in a good state, and it is possible to maintain good rotational performance.

In addition, in the conveying apparatus 10 of this embodiment, the cooling medium is supplied to the cooling water pipe 34, and the reflecting plate 33 is cooled. The heat of the reflecting plate 33 is transferred to the cooling medium and discharged out of the vacuum vessel 31. And since the reflecting plate 33 is arrange | positioned so that the wall, the conveyance roller 18, and the rotation shaft 16 of the vacuum container 31 may be covered, heat transfer to these members is alleviated.

In the conveying apparatus 10 of 1st Embodiment demonstrated above, the cooling medium is distribute | circulated in the cooling channel 17a formed in the rotating shaft 16, and the heat of the rotating shaft 16 is transmitted to the cooling medium, and the rotating shaft 16 ) Itself is cooled. Moreover, since the conveyance roller 18 is being fixed to the rotation shaft 16 so that heat transfer is possible, the heat of the conveyance roller 18 is transmitted to the cooled rotation shaft 16, and the conveyance roller 18 is also cooled. By these, improvement of heat resistance performance is aimed at. And since the cooling performance is improved compared with the conveying apparatus which is not equipped with the cooling passage 17a in the rotating shaft 16, for example, the reflecting plate 33 which covers the rotating shaft 16 and the conveyance roller 18 is carried out. It becomes possible to reduce the number of sheets or to reduce the number of cooling water pipes 34 for cooling the reflecting plate 33, thereby simplifying the inside of the vacuum container 31.

In addition, in the conveying apparatus 10 of 1st Embodiment, the vacuum container 31 is provided by providing the drive force distribution part which distributes the driving force from the drive motor 12 to each conveyance roller 18 outside the vacuum container 31. As shown in FIG. ), The configuration is simplified. In addition, since the driving force distribution portion is provided outside the vacuum vessel 31, a belt which is difficult to use in a vacuum environment can be used instead of the bevel gear, and the problem of wear of the bevel gear can also be eliminated.

(Second Embodiment)

Next, 2nd Embodiment of the conveying apparatus which concerns on this invention is described using FIG. FIG. 5: is sectional drawing which expanded the vicinity of the conveyance roller 18 contained in the conveyance apparatus which concerns on 2nd Embodiment. However, the point that the conveying apparatus of 2nd Embodiment differs from the conveying apparatus mentioned above is arrange | positioned in contact with each other between the conveying roller 18 and the rotating shaft 16, as shown in FIG. 5, and the conveying roller 18 And a temperature adjusting member 19 for adjusting heat transfer between the rotary shaft 16. Here, the description is abbreviate | omitted about the structure which is the same as or equivalent to the conveying apparatus 10 of the said embodiment, and the structure different from the conveying apparatus 10 of the said 1st Embodiment is demonstrated.

The temperature adjusting member 19 is a cylindrical member formed of, for example, engineering plastic or stainless steel. The outer circumferential surface 19a of the temperature adjusting member 19 is in direct contact with the inner circumferential surface 18a of the conveying roller 18. The inner circumferential surface 19b of the temperature adjusting member 19 is in direct contact with the outer circumferential surface 16e of the mounting portion 16b on the rotating shaft 16.

An uneven portion 19c is formed on the inner circumferential surface 19b of the temperature adjusting member 19. For this reason, compared with the case where the uneven part 19c is not formed in the inner peripheral surface 19b, the outer peripheral surface 16e of the inner peripheral surface 19b of the temperature adjusting member 19, and the mounting part 16b in the rotating shaft 16 is carried out. ) Area of contact with each other becomes small. Thereby, the quantity of heat transmitted from the conveyance roller 18 to the rotating shaft 16 through the temperature adjusting member 19 can be adjusted. In the second embodiment, by reducing the amount of heat transferred from the conveying roller 18 to the rotating shaft 16, the conveying roller 18 can be prevented from being excessively cooled, and the appropriate heating temperature of the substrate 42 can be maintained. . The conveying apparatus which concerns on 2nd Embodiment is especially effective in the trayless conveyance etc. which support and convey the board | substrate 42 directly with the conveyance roller 18, without using a tray.

In the above, this invention was demonstrated in detail based on 1st Embodiment and 2nd Embodiment. However, the present invention is not limited to the above embodiment. The present invention can be modified in various ways without departing from the gist of the invention.

In the said embodiment, although the heating heater 6 is arrange | positioned in the vacuum container 31 and demonstrated as the example conveyed while heating the board | substrate 42, it is not limited to this. For example, it is also applicable to the conveying apparatus which conveys the board | substrate 42 heated in an upstream process.

In addition, in the said embodiment, although the board | substrate 42 was mounted and conveyed in the tray 41, it demonstrated, but is not limited to this. For example, the board | substrate 42 may be directly mounted by the conveyance roller 18, and the method of conveyance may be sufficient.

In addition, the temperature adjusting member 19 of the second embodiment may be detachably attached to the rotating shaft 16. Thereby, it becomes possible to flexibly adjust the amount of heat transferred from the conveying roller 18 to the rotating shaft 16 cooled via the temperature adjusting member 19. As a result, the board | substrate can be controlled by appropriate temperature according to the kind of board | substrate 42 and a conveying method.

In addition, although the temperature adjusting member 19 of the said 2nd Embodiment demonstrated and demonstrated the example which the semicircular uneven part 19c is formed in the inner peripheral surface 19b, it is not limited to this, For example, a rectangular uneven part (19c) may be sufficient. In addition, a groove may be formed in the inner circumferential surface 19b of the temperature adjusting member 19.

6... Heating heater, 10.. Conveying apparatus, 11... Power transmission mechanism; Drive motor, 12a... Output shaft, 13A to 13G... Toothed pulley, 14A to 14F. Toothed belt, 15.. Left and right connecting shaft, 16.. Axis of rotation, 16A... Rotating shaft body, 16B... Rotor, 16f... Stage, 17... Internal space of the rotating shaft, 17a... Drainage path (cooling passage), 18... Conveying roller, 19... Temperature adjusting member, 19b... If you give up, 19c ... Uneven portion, 20... Return drive mechanism, 21... Magnetic seal bearing unit, 22... Housing, 22a... Flange, 22b... Through hole (cooling mechanism), 23... Magnetic seal, 24... Bearing, 25... Permanent magnets, 26A, 26B... Pole pieces, 27, 28... O-ring, 31... Vacuum vessel, 31a... Front wall, 31b... Back wall, 31c... Sidewall, 31d... Ceiling panel, 31e... Base plate, 31f... Through hole, 31 g... Gate 32,... Trestle, 33. Reflector, 34... Cooling water pipe, 35... Rotary joint, 36... Casing, 36a... Boss, 37a... Drainage flow path, 37b... Opening, 38... Bearing, 39... Spring, 41... Tray, 42... Substrate, 45... Cooling water supply pipe, 46, 47... pipe.

Claims (3)

A conveying apparatus for conveying a heated substrate in a vacuum container,
A conveying roller disposed in the vacuum container and conveying the substrate;
A rotating shaft fixed to the transfer roller to be heat-transferable and extending from the vacuum vessel to the outside of the vacuum vessel;
A magnetic seal bearing disposed in the through hole penetrating through the wall forming the vacuum container, the magnetic seal bearing sealing the through hole while rotatably supporting the rotating shaft;
Cooling passages for circulating the cooling medium are formed in the rotation axis in the axial direction and extend from the outside of the vacuum vessel to the inside of the vacuum vessel.
Carrying apparatus comprising a. The method according to claim 1,
And a cooling mechanism for cooling the magnetic seal bearing. The method according to claim 1 or 2,
And a temperature adjusting member which is disposed in contact with each other between the conveying roller and the rotating shaft and adjusts heat transfer between the conveying roller and the rotating shaft.

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