KR20120119876A - Remote controller for critical dimenstion scanning electron microscope - Google Patents

Abstract

PURPOSE: A remote control device of a CD-SEM(Critical Dimension Scanning Electron Microscope) is provided to precisely control an SEM at a remote site using an input unit. CONSTITUTION: A KVM(Keyboard Video Mouse Switch) module(230) is connected to a display connector of an SEM. An SEM controller comprises an SEM interface module(220). The SEM interface module rotates angle of an SEM internal reflector at an X-axis and a Y-axis. An IP controller(210) transfers an SEM status signal received from the SEM interface module to a remote controlling device. A beam button and a stage button are pressed down and create an electric signal. An input unit comprises the beam button and the stage button. [Reference numerals] (210) IP controller; (220) SEM interface module; (230) KVM module; (240) Image distributor; (250) Scaling module; (260) Signal converter module; (270) DVR; (280) HD camera

Description

Remote control device of CD-SEM {REMOTE CONTROLLER FOR CRITICAL DIMENSTION SCANNING ELECTRON MICROSCOPE}

The present invention relates to a method for remotely controlling a critical dimension scanning electron microscope (CD-SEM) device used in a semiconductor process.

CD-SEM (Critical Dimension-Scanning Electron Microscope) equipment is used to measure the critical dimension (CD) from the images obtained by photographing the pipe, space, and contact hole of the wafer during the semiconductor process.

The operator manipulates this CD-SEM to transfer the wafer to the main chamber, then irradiates the beam and captures an image to measure the line width. At this time, the focusing is performed so that the electron beam projected from the electron gun is irradiated onto the sample requiring measurement or inspection. After the measurement is completed, the operator moves the next wafer to the main chamber to continue the work.

The line width measurement process using the SEM is generally performed by an operator in a semiconductor line.

However, the fine dust generated by the operator or the like can have a fatal result in the semiconductor process. Therefore, in order to check or operate the malfunction of the equipment, the operator must enter the semiconductor line only while wearing the dustproof suit.

Accordingly, technologies for controlling a remote site without a worker entering a clean room when various semiconductor equipment such as a semiconductor are manufactured and inspected are being developed.

SEM equipment is also no exception, requiring the development of technology to control and monitor it remotely.

However, the remote control technology for the existing process equipment is focused on the aspects of database and scheduling technology for production automation, so that the result of the technology development is applied to the SEM equipment that requires precise control and measurement by the operator. There is a problem that is difficult to do.

Therefore, there is a need for the development of a control system for intuitively and accurately operating SEM equipment at remote locations.

[Document 1] Korean Patent Registration No. 10-800899 "Wafer Width Measurement Method of Wafer" [Patent 2] Korean Patent Publication No. 10-2009-47076 "Wafer Exchanger Arm of CDS Equipment with Vacuum System"

The present invention is to solve the problems of the prior art as described above, while operating the SEM equipment using a computer at a remote location, to provide a SEM remote control device that allows to operate each function of the SEM equipment more precisely and intuitively For that purpose.

In order to achieve this object the remote control device of the CD-SEM according to an embodiment of the present invention

A track ball 111 for generating a two-dimensional coordinate value as it is rotated by a force applied from the outside; An X-axis dial 112, a Y-axis dial 113, and a focus dial 114 that produce a value that increases or decreases as it rotates left and right; An input means (110) having a beam button (115) and a stage button (116) for generating an electrical signal as it is pressed;

An SEM status monitor 120 for monitoring the status of the SEM 1 via a status signal provided from a remote SEM 1;

By interfacing with the computer 2, the input signal generated from the input means 110 is transmitted to the computer 2, and the status signal of the SEM 1 provided from the computer 2 is transmitted to the SEM status monitor 120. Remote control means having; PC interface module 130 for transmitting;

The remote control means 100 is connected to communicate with the computer (2) connected via a network, and transmits an input signal from the input means received from the remote control means 100 to the SEM interface module 220, An IP controller 210 for transmitting the SEM status signal received from the SEM interface module 220 to the remote control means 100; And

SEM interface module 220 which is interfaced to the SEM (1) to transfer the input signal received from the IP controller 210 to the SEM (1), receiving a status signal from the SEM (1); Controller 200; provided with,

As the SEM interface module 220 receives the input signals generated from the X-axis dial 112 and the Y-axis dial 113, the SEM interface module 220 reflects the angle of the internal reflector of the SEM 1 in which the beam irradiated onto the wafer is reflected. And Y axis, respectively.

In response to receiving the input signal generated from the beam button 115, the beam is irradiated to the wafer inside the SEM 1 to be controlled,

Upon receiving the input signal generated by the focus dial 114, focusing of the lens of the SEM (1) according to the value,

In response to the input signal generated by the stage button 116, the wafer stage inside the SEM 1 is moved.

In this case, the input means 110 is provided with a housing having a hexahedron shape, the track ball 111 is exposed in the center of the lower end of the upper surface,

The beam button 115 and the stage button 116 are exposed in a line to the top of the track ball 111,

The X-axis dial 112, the Y-axis dial 113 and the focus dial 114 are exposed in a line at the upper end of the housing,

In addition, the SEM status monitor 120 may be integrally mounted in the housing of the input unit 110 to notify the status of the SEM 1 through an LED lamp or a speaker.

On the other hand, the remote control device of the CD-SEM according to this embodiment of the present invention to achieve this object is a track ball 111 for generating a two-dimensional coordinate value by rotating by a force applied from the outside; An X-axis dial 112, a Y-axis dial 113, and a focus dial 114 that produce a value that increases or decreases as it rotates left and right; An input means (110) having a beam button (115) and a stage button (116) for generating an electrical signal as it is pressed;

An SEM status monitor 120 for monitoring the status of the SEM 1 via a status signal provided from a remote SEM 1;

By interfacing with the computer 2, the input signal generated from the input means 110 is transmitted to the computer 2, and the status signal of the SEM 1 provided from the computer 2 is transmitted to the SEM status monitor 120. Remote control means having; PC interface module 130 for transmitting; And

The remote control means 100 is connected to communicate with the computer (2) connected via a network, and transmits an input signal from the input means received from the remote control means 100 to the SEM interface module 220, An IP controller 210 for transmitting the SEM status signal received from the SEM interface module 220 and the display output signal received from the KVM module 230 to the remote control means 100;

An SEM interface module 220 that is interfaced to the SEM 1 to transfer the input signal received from the IP controller 210 to the SEM 1, and receives a status signal from the SEM 1; And

And a SEM controller (200) having a KVM module (230) connected to the display connector of the SEM (1) and receiving a display output signal.

As the SEM interface module 220 receives the input signals generated from the X-axis dial 112 and the Y-axis dial 113, the SEM interface module 220 reflects the angle of the internal reflector of the SEM 1 in which the beam irradiated onto the wafer is reflected. And Y axis, respectively.

In response to receiving the input signal generated from the beam button 115, the beam is irradiated to the wafer inside the SEM 1 to be controlled,

Upon receiving the input signal generated by the focus dial 114, focusing of the lens of the SEM (1) according to the value,

In response to the input signal generated by the stage button 116, the wafer stage inside the SEM 1 is moved.

According to the remote control technology of the semiconductor process equipment according to the prior art, it merely monitors the state of the process equipment and operates the function through the GUI through a remote computer.

According to the present invention, it is possible to operate the SEM more intuitively and precisely by using a specially designed input means.

1 is a network diagram illustrating a relationship between a SEM and a remote computer by a CD-SEM remote control device according to an embodiment of the present invention.
2 is a reference diagram for explaining the components of the remote control means of the remote control device of the CD-SEM according to the present invention,
3 is a reference diagram for explaining the components of the SEM controller of the CD-SEM remote control apparatus according to an embodiment of the present invention,
FIG. 4 is a functional block diagram illustrating a connection relationship between components of the SEM controller illustrated in FIG. 3.
5 is a product picture of the CD-SEM remote control device according to the present invention,
Fig. 6 is a functional block diagram illustrating the connection relationship between the components of the SEM controller of the CD-SEM remote control apparatus according to this embodiment of the present invention.

Hereinafter, with reference to the preferred embodiments of the present invention and the accompanying drawings will be described in detail the present invention. In order to clarify the present invention, contents which are not related to the configuration of the present invention will be omitted, and the same reference numerals are used for the same components.

On the other hand, when an element is referred to as being "comprising" another element in the description of the invention or in the claims, it is not interpreted as being limited to only that element, Elements may be further included.

Also, in the description of the invention or the claims, the components named as "means", "parts", "modules", "blocks" refer to units that process at least one function or operation, Each of which may be implemented by software or hardware, or a combination thereof.

1 is a network diagram illustrating a relationship between a SEM and a remote computer by a CD-SEM remote control device according to an embodiment of the present invention.

As shown in FIG. 1, the remote control means 100 is connected to a computer 2, and the SEM 1 is connected to the SEM controller 200, respectively.

At this time, preferably, the PC interface module 130 of the remote control means 100 is inserted into an internal / external slot or socket of the computer 2 or connected through a separate cable, and the input means 110 is shown in FIG. As shown, the PC interface module 130 is connected to the outside of the computer 2 through a separate cable.

The worker may use such an input means 110 when working with a computer.

On the other hand, the SEM controller 200 may be inserted into the internal and external slots or sockets of the SEM (1), or may be connected through a separate cable or the like.

The operator's computer 2 is remote and connected to the SEM controller 200 via a network and communicates via a predetermined protocol.

When the worker works by using the remote control means 100, as a result, the signal generated by the remote control means 100 is transmitted to the SEM controller 200 through the computer 2, the SEM controller 200 is The operation of the SEM 1 is applied by applying the received signal to the SEM 1.

This structure is not different from that generally applied to the technology for remotely controlling the semiconductor processing equipment, but the present invention includes a remote control means 100 specially manufactured for controlling the SEM (1) and also RCS or In combination with the KVM, it is possible to effectively control the SEM (1).

2 illustrates the structure of the input means 110, which is one element of the remote control means 100.

1 and 2, the input means 110 has three dials 112, 113, 114 at the top, three buttons 115, 116, 117 at the bottom, and the bottom center. The track ball 111 is provided.

In more detail, the input means 110 is provided with a housing having a hexahedron shape, the track ball 111 is exposed in the center of the lower end of the upper surface, and the beam button 115 above the track ball 111. ), The stage button 116 and the OFF button 117 are provided in a row. This is because the operation of the track ball 111 using the thumb or palm in consideration of the shape of the operator's hand and the length of the finger, the beam button 115, stage button 116 and OFF without moving the hand far away The button 117 is arranged to be pressed.

Meanwhile, the X-axis dial 112, the Y-axis dial 113, and the focus dial 114 may be exposed in a line at the upper end of the housing.

This is because the operator has to move his or her hand separately from the trackball for dial operation, but the movement of the reflector or focusing can be performed separately from the trackball operation.

Each of the components of the input means 110 will be described.

First, the track ball 111 generates a two-dimensional coordinate value as it rotates by a force applied from the outside.

That is, when the worker moves up, down, left, and right while raising a finger or a palm on the track ball 111, a two-dimensional coordinate value that can be displayed as (x, y) is generated according to the direction of the track ball 111 movement.

On the other hand, the X-axis dial 112 and the Y-axis dial 113, as a dial button, generates a value that increases or decreases according to the rotation direction when the operator grabs and turns it.

Focus dial 114 likewise produces a value that increases or decreases depending on the direction of rotation as the operator grabs and turns it.

Meanwhile, the beam button 115, the stage button 116, and the OFF button 117 correspond to general buttons for generating an electrical signal each time an operator presses the beam button 115.

The input means 110 according to the present invention is implemented in the form of specially designed hardware as shown in Figs.

As such, the input means 110 including the track ball 111 and a plurality of dials and buttons is designed to easily operate the SEM 1 at a remote location and easily measure the size of the wafer surface.

On the other hand, as shown in Figure 1, the remote control means 100 further comprises an SEM status monitor 120 for monitoring the status of the SEM (1) through the status signal provided from the remote SEM (1) Equipped.

That is, the SEM status monitor 120 corresponds to a hardware resource for notifying whether the SEM 1 is operating normally or whether an error has occurred through a separate LED lamp or a speaker.

Preferably it may be implemented integrally inside the housing of the input means 110 as shown in FIGS.

The PC interface module 130 processes the interface between the input means 110 and the SEM status monitor 120 and the operator's computer 2. In other words,

The PC interface module 130 is inserted into slots or sockets provided in the inside and outside of the computer 2, and transmits the signal generated by the input means 110 to the computer 2, and conversely, the SEM provided from the computer 2 ( The state signal of 1) is transmitted to the SEM state monitor 120.

Such remote control means 100 is connected to the SEM controller 200 at a remote location via a computer 2 via a network.

The SEM controller 200 may be implemented in two forms.

3 and 4 illustrate the configuration of the SEM controller 200 according to an embodiment of the present invention, respectively.

One embodiment of the present invention shown in Figures 3 and 4 is implemented in combination with the RCS system filed by the applicant in a separate patent application.

As shown in FIG. 3, the SEM controller 200 includes an IP controller 210, an SEM interface module 220, a KVM module 230, an image distributor 240, a scaling module 250, and a signal converter module. 260, a DVR module 270, and an HD camera 280.

IP controller 210 is directly connected to the network by a known wired or wireless communication method. Meanwhile, the IP controller 210 is directly connected to the SEM interface module 220, the KVM module 230, and the DVR module 270, and transfers data provided from them to the remote computer 2, or the remote computer. Distribute the data provided from (2).

For example, when the input signal generated by the input means 110 is received from the computer 2, it is transmitted to the SEM interface module 220. On the contrary, upon receiving the SEM status signal from the SEM interface module 220, it is transmitted to the computer 2.

On the other hand, the SEM interface module 220 is preferably inserted into a slot or a socket provided inside and outside the SEM (1) or connected via a separate cable, the SEM received the input signal received from the IP controller 210 Deliver to (1). That is, the input signal generated by the input means 110 is transmitted to the SEM 1 through the SEM interface module 220.

At this time, the SEM interface module 220 when the operator rotates the X-axis dial 112 or the Y-axis dial 113 using the input means 110-that is, the X-axis dial 112 or Y-axis dial ( Upon receiving the input signal generated by the rotation of 113, a control signal is applied to rotate the angles of the internal reflector of the SEM 1, which reflects the beam irradiated onto the wafer, to the X and Y axes, respectively. .

On the other hand, when the operator presses the beam button 115-that is, when an input signal generated as the beam button 115 is received, the SEM interface module 220 beams from the SEM 1 to the wafer. The control signal is applied to perform irradiation.

On the other hand, when the operator turns the focus dial 114 of the input means 110-that is, when receiving an input signal generated when the focus dial 114 is rotated, the SEM interface module 220 according to the value SEM ( In 1), a control signal for focusing the lens of the SEM 1 is applied.

On the other hand, when the operator presses the stage button 116-that is, when the input signal generated when the stage button 116 of the input means 110 is pressed, the SEM interface module 220 to the SEM (1) A control signal for moving the internal wafer stage is applied.

The OFF button 117 corresponds to a switch for turning on or off the power of the input means 110.

In addition, the SEM interface module 220 receives a status signal from the SEM 1. When an error occurs, a status signal including an error code generated by the SEM 1 is received and transmitted to the remote computer 2 via the IP controller 210.

Conventionally, the operator operated the SEM 1 through a user interface displayed on the screen using a mouse and a keyboard connected to the SEM 1, but more intuitive and accurate control is possible when the input means 110 is operated as described above. Become.

In addition, by transmitting the control signal generated by the remote control means 100 to the SEM 1 via a network, it becomes possible to control the same as directly controlling the SEM 1 at a remote location.

In particular, by checking the error signal generated from the SEM (1) through the SEM status monitor 120, which is a separate hardware resource, it is not possible to quickly respond to the error of the SEM (1) by controlling the SEM (1) remotely. Resolve the problem that cannot be solved.

However, in order to measure the wafer size by controlling the SEM (1) at a remote location, the display image output from the SEM (1) must be transmitted to the remote computer (2), and through the remote computer (2) of the SEM (1) It should be possible to control the SEM 1 by the remote control means 100 in which the display image is displayed.

To this end, according to an embodiment of the present invention, the SEM controller 200 includes a KVM module 230, an image distributor 240, a scaling module 250, a signal converter module 260, a DVR module 270, and the like. It further comprises an HD camera 280.

The KVM (Keyboard Video Mouse Switch) module 230 is connected to the display connector of the SEM 1 to receive a display signal from the SEM 1.

The SEM 1 has a display connector of a standard such as DVI or D-SUB for image output through the monitor, and the KVM module 230 is connected to the display connector of the SEM 1 to display from the SEM 1. Receive a signal.

Meanwhile, the image distributor 240 distributes the analog display signal received through the KVM module 230 to a monitor (not shown) connected to the scaling module 250 and the SEM 1.

The scaling module 250 converts the received display signal into a DVI signal of the HD standard and then transmits the converted signal to the signal converter module 260.

The signal converter module 260 converts the high-definition digital image provided from the scaling module 250 into an HD-SDI signal once more in order to transmit it to the DVR module 270. The HD-SDI video is provided to the DVR module 270 through the coaxial cable by the signal converter module 260.

Conventional DVR equipment has a resolution limit of 320 * 240 due to the bus specification because it is connected by the BNC method to store the image, but in the present invention 720P (1280 * 720) HD or Full HD 1080P (1920 * 1080) The above video recording is possible.

You can check the cause of the error and malfunction through the recorded equipment video, but there is a problem that can not clearly recognize the letters reflected on the equipment video with the resolution of the existing 320 * 240, but by storing in such a way to bypass the resolution The problem is solved.

The DVR (Digital Video Recorder) module 270 stores the high resolution image provided from the signal converter module 260. Meanwhile, the DVR module 270 further stores the video signal transmitted from the HD camera 280.

On the other hand, the DVR module 270 provides an image stored at the request of the remote computer 2 or transmits the image provided from the HD camera 280 in real time.

Generally, the SD camera supports 490,000 pixels, but the HD camera 280 supports 2 million pixels, so that the recording can be made more clearly and clearly.

The HD camera 280 may be installed toward the SEM 1 in a line.

As a result, the operator can check the state of the SEM 1 in real time through the remote computer 2 as well as work while viewing the display signal output by the SEM 1 through the screen of the computer 2.

In addition, by recording the display signal output by the SEM (1), and by recording the SEM (1) from the outside, it is possible to analyze the recorded image in the event of an error to identify and analyze the cause.

Figure 5 shows a product picture of the remote control device of the CD-SEM according to the present invention. As shown in FIG. 5, the appearance of the input means 110, the PC interface module 130, and the SEM controller 200 developed by the present applicant can be confirmed.

On the other hand, with reference to Figure 6 will be described the configuration of the remote control device of the CD-SEM according to this embodiment of the present invention.

6 is a functional block diagram illustrating the connection relationship between the components of the SEM controller 200 of the CD-SEM remote control apparatus according to this embodiment of the present invention.

This embodiment of the present invention, in contrast to the above-described embodiment, the configuration of the remote control means 100 is the same, but different in the structure of the SEM controller 200.

While one embodiment is combined with the RCC system patented separately by the applicant, this embodiment is different in that the SEM interface module 220 and the KVM module 230 are combined.

The IP controller 210 communicates with the computer 2 to which the remote control means 100 is connected through a network.

At this time, the IP controller 210 receives the input signal by the input means 110, and transmits it to the SEM interface module 220. When receiving the SEM status signal from the SEM interface module 220, the IP controller 210 receives the input signal. To pass).

In addition, when receiving the display output signal of the SEM (1) from the KVM module 230 and transmits it to the remote computer (2).

Meanwhile, the SEM interface module 220 is interfaced to the SEM 1 to transfer the input signal received from the IP controller 210 to the SEM 1, and receives a status signal from the SEM 1.

In this case, the application of the predetermined control signal to the SEM 1 according to the input signal from the input means 110 provided by the SEM interface module 220 is as described above.

On the other hand, the KVM module 230 is connected to the display connector of the SEM (1) receives a display output signal.

In this case, the network is referred to as a local area network (WLAN), a wide area network (WAN), and an intranet, a VPN (virtual private network) WiBro, WiFi, and the like.

While the present invention has been described with reference to the accompanying drawings and embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. . Accordingly, the scope of the present invention should be determined only by the technical idea of the appended claims, and is not limited to the above embodiments.

The present invention can be applied to the field of semiconductor processing technology and semiconductor processing equipment.

1: SEM
2: computer
100: remote control means
110: input means
111: Trackball
112: X-axis dial
113: Y-axis dial
114: focus dial
115: Beam button
116: stage button
117: OFF button
120: SEM status monitor
130: PC interface module
200: SEM controller
210: IP controller
220: SEM interface module
230: KVM Module
240: video distributor
250 scaling module
260: Signal Converter Module
270: DVR Module
280: HD camera

Claims (6)

A track ball 111 to generate a two-dimensional coordinate value as it rotates by a force applied from the outside; An X-axis dial 112, a Y-axis dial 113, and a focus dial 114 that produce a value that increases or decreases as it rotates left and right; An input means (110) having a beam button (115) and a stage button (116) for generating an electrical signal as it is pressed;
An SEM status monitor 120 for monitoring the status of the SEM 1 via a status signal provided from a remote SEM 1;
By interfacing with the computer 2, the input signal generated from the input means 110 is transmitted to the computer 2, and the status signal of the SEM 1 provided from the computer 2 is transmitted to the SEM status monitor 120. Remote control means having; PC interface module 130 for transmitting;
The remote control means 100 is connected to communicate with the computer (2) connected via a network, and transmits an input signal from the input means received from the remote control means 100 to the SEM interface module 220, An IP controller 210 for transmitting the SEM status signal received from the SEM interface module 220 to the remote control means 100; And
SEM interface module 220 which is interfaced to the SEM (1) to transfer the input signal received from the IP controller 210 to the SEM (1), receiving a status signal from the SEM (1); Controller 200; provided with,
As the SEM interface module 220 receives the input signals generated from the X-axis dial 112 and the Y-axis dial 113, the SEM interface module 220 reflects the angle of the internal reflector of the SEM 1 in which the beam irradiated onto the wafer is reflected. And Y axis, respectively.
In response to receiving the input signal generated from the beam button 115, the beam is irradiated to the wafer inside the SEM 1 to be controlled,
Upon receiving the input signal generated by the focus dial 114, focusing of the lens of the SEM (1) according to the value,
CD-SEM remote control device, characterized in that for moving the wafer stage inside the SEM (1) in response to the input signal generated by the stage button (116). The method of claim 1,
The SEM controller 200 is connected to the display connector of the SEM (1) KVM module 230 for receiving a display output signal;
An image divider 240 receiving the display signal output from the SEM 1 from the KVM module 230 and distributing it to the scaling module 250;
A scaling module 250 for converting an analog display signal input from the image divider 240 into an HD class digital signal and providing the converted signal to a signal converter module;
A signal converter module 260 for converting an image received from the scaling module 250 into an HD-SDI image and applying it to the DVR module;
A DVR module 270 for storing the HD-SDI image provided from the signal converter module 260; And
One or more HD camera 280 is installed toward the semiconductor equipment to shoot an image, and outputs the photographed image to the DVR module;
The DVR module 270 further stores an image captured by the HD camera 280, and provides a pre-stored image via the IP controller 210 at the request of the computer 2 connected from a remote location. , CD-SEM remote control device, characterized in that for transmitting in real time the image provided from the HD camera (280). The method of claim 2,
As the KMV module 230 receives a two-dimensional coordinate value generated by the track ball 111 from the IP controller 210, the KMV module 230 controls an image transmitted to the computer 2 in response to the input coordinate value. Remote control device of the CD-SEM characterized in that. The method of claim 2,
The input means 110 is provided with a housing having a hexahedron shape, the track ball 111 is exposed in the center of the lower end of the upper surface,
The beam button 115 and the stage button 116 are exposed in a line to the top of the track ball 111,
The X-axis dial 112, the Y-axis dial 113 and the focus dial 114 are exposed in a line at the upper end of the housing, characterized in that the CD-SEM remote control device. The method of claim 2,
The SEM status monitor 120 is a remote control device of the CD-SEM, characterized in that integrally mounted in the housing of the input means (110). A track ball 111 to generate a two-dimensional coordinate value as it rotates by a force applied from the outside; An X-axis dial 112, a Y-axis dial 113, and a focus dial 114 that produce a value that increases or decreases as it rotates left and right; An input means (110) having a beam button (115) and a stage button (116) for generating an electrical signal as it is pressed;
An SEM status monitor 120 for monitoring the status of the SEM 1 via a status signal provided from a remote SEM 1;
By interfacing with the computer 2, the input signal generated from the input means 110 is transmitted to the computer 2, and the status signal of the SEM 1 provided from the computer 2 is transmitted to the SEM status monitor 120. Remote control means having; PC interface module 130 for transmitting; And
The remote control means 100 is connected to communicate with the computer (2) connected via a network, and transmits an input signal from the input means received from the remote control means 100 to the SEM interface module 220, An IP controller 210 for transmitting the SEM status signal received from the SEM interface module 220 and the display output signal received from the KVM module 230 to the remote control means 100;
An SEM interface module 220 that is interfaced to the SEM 1 to transfer the input signal received from the IP controller 210 to the SEM 1, and receives a status signal from the SEM 1; And
And a SEM controller (200) having a KVM module (230) connected to the display connector of the SEM (1) and receiving a display output signal.
As the SEM interface module 220 receives the input signals generated from the X-axis dial 112 and the Y-axis dial 113, the SEM interface module 220 reflects the angle of the internal reflector of the SEM 1 in which the beam irradiated onto the wafer is reflected. And Y axis, respectively.
In response to receiving the input signal generated from the beam button 115, the beam is irradiated to the wafer inside the SEM 1 to be controlled,
Upon receiving the input signal generated by the focus dial 114, focusing of the lens of the SEM (1) according to the value,
CD-SEM remote control device, characterized in that for moving the wafer stage inside the SEM (1) in response to the input signal generated by the stage button (116).

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