KR20120060695A - Manufacturing Method of Acrylic Pressure Sensitive Adhesive Composition Comprising Vinyl Group on Polymer Side Chain - Google Patents

Manufacturing Method of Acrylic Pressure Sensitive Adhesive Composition Comprising Vinyl Group on Polymer Side Chain Download PDF

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KR20120060695A
KR20120060695A KR1020100122320A KR20100122320A KR20120060695A KR 20120060695 A KR20120060695 A KR 20120060695A KR 1020100122320 A KR1020100122320 A KR 1020100122320A KR 20100122320 A KR20100122320 A KR 20100122320A KR 20120060695 A KR20120060695 A KR 20120060695A
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acrylate
meth
sensitive adhesive
adhesive composition
group
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KR101270976B1 (en
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김형일
유종민
김경만
남영희
이승현
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충남대학교산학협력단
한국화학연구원
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04Homopolymers or copolymers of esters
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/20Adhesives in the form of films or foils characterised by their carriers
    • C09J7/22Plastics; Metallised plastics
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/30Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/38Pressure-sensitive adhesives [PSA]
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/30Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/38Pressure-sensitive adhesives [PSA]
    • C09J7/381Pressure-sensitive adhesives [PSA] based on macromolecular compounds obtained by reactions involving only carbon-to-carbon unsaturated bonds
    • C09J7/385Acrylic polymers
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00Additional features of adhesives in the form of films or foils
    • C09J2301/30Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
    • C09J2301/302Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier the adhesive being pressure-sensitive, i.e. tacky at temperatures inferior to 30°C
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00Additional features of adhesives in the form of films or foils
    • C09J2301/40Additional features of adhesives in the form of films or foils characterized by the presence of essential components
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00Additional features of adhesives in the form of films or foils
    • C09J2301/40Additional features of adhesives in the form of films or foils characterized by the presence of essential components
    • C09J2301/408Additional features of adhesives in the form of films or foils characterized by the presence of essential components additives as essential feature of the adhesive layer

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Adhesives Or Adhesive Processes (AREA)

Abstract

PURPOSE: A manufacturing method of an adhesive composition is provided to provide to have simple manufacturing process, to provide adhesive composition having excellent wettability, low releasing force after ultraviolet irradiation, and excellent curing stability, and not remaining residues to an object. CONSTITUTION: A manufacturing method of an adhesive composition comprises: a step of polymerization by mixing a (meth)acrylate based monomer containing a C1-14 alkyl group, a (meth)acrylate based monomer containing a hydroxy group, a carboxy group, or a glycidiyl group, or a mixture thereof, and an initiator; and a step of addition polymerization by putting a photocurable monomer with carbon-carbon double bond having a carbon-carbon double bond, a catalyst, and polymerization inhibitor into the side chain of the polymer.

Description

고분자 측쇄에 비닐기를 함유하는 아크릴계 점착제 조성물의 제조방법{Manufacturing Method of Acrylic Pressure Sensitive Adhesive Composition Comprising Vinyl Group on Polymer Side Chain}Manufacturing Method of Acrylic Pressure Sensitive Adhesive Composition Comprising Vinyl Group on Polymer Side Chain

본 발명은 고분자 측쇄에 부가반응을 통해 비닐기를 함유한 아크릴계 점착제 조성물의 제조방법에 관한 것으로, 보다 상세하게는 점착력 및 경시 안정성이 우수하고 초박형 웨이퍼에서 쉽게 박리되며 점착 잔류물을 남기지 않는 점착제 조성물 및 이의 제조방법에 관한 것이다.The present invention relates to a method for producing an acrylic pressure-sensitive adhesive composition containing a vinyl group through the addition reaction to the polymer side chain, more specifically, the pressure-sensitive adhesive composition excellent in adhesion and stability over time and easily peeled off from an ultra-thin wafer, leaving no adhesive residue; It relates to a manufacturing method thereof.

반도체 제조공정에서 회로 설계된 웨이퍼는 큰 직경을 갖는 크기에서 다이싱을 통해 작은 칩들로 분리되고 각각의 분리된 칩들은 PCB 기판이나 리드프레임 기판 등의 지지부재에 접착공정을 통해 본딩되는 단계적 공정을 거치고 있다. 일반적으로 결합/비결합(Bonding/Debonding) 테이프는 기재 필름 상부의 점착층과 상기 점착층 상부의 이형 필름을 포함하는 구조로 되어 있다. 초박형 웨이퍼를 이용한 반도체 공정 중에서는 상기 이형 필름을 박리한 후 점착층을 초박형 웨이퍼 칩에 라미네이션 한 다음 설계된 회로의 크기대로 칩을 자른다. 상기 자르는 공정을 다이싱(Dicing) 공정이라고 하는바 일반적으로 점착층 아래의 하부 기재 필름의 일부 깊이까지 다이싱을 하고 개별화된 칩을 픽업하여 지지부재에 부착하기 위하여 필름 하부에서 자외선을 조사하여 점착층과 웨이퍼 칩 계면 사이의 박리력을 줄인다. 점착층이 부착된 개별화된 칩을 콜렛(Collet)이라는 픽업기를 사용하여 일정한 힘으로 픽업하여 PCB 기판이나 리드프레임과 같은 지지부재에 부착한다.In the semiconductor manufacturing process, circuit-designed wafers are separated into small chips through dicing in a size having a large diameter, and each separated chip is subjected to a step-by-step process of bonding to a supporting member such as a PCB substrate or a lead frame substrate by bonding. have. In general, the bonding / debonding tape has a structure including an adhesive layer on the base film and a release film on the adhesive layer. In the semiconductor process using an ultra-thin wafer, after peeling the release film, the adhesive layer is laminated on the ultra-thin wafer chip, and the chip is cut to the size of the designed circuit. The cutting process is called a dicing process. Generally, dicing is carried out to a depth of a lower base film under the adhesive layer, and the ultraviolet ray is applied from the lower part of the film to pick up the individualized chip and attach it to the support member. Reduces the peel force between the layer and the wafer chip interface. The individualized chip having the adhesive layer attached thereto is picked up with a constant force by using a pickup called a collet and attached to a supporting member such as a PCB substrate or a lead frame.

다이싱 테이프의 주목적은 웨이퍼 이면에 부착되어 다이싱 시에 필름이 비산하거나 유동되어 웨이퍼에 크랙이 발생하는 것을 방지하고 방사선 및 자외선을 조사한 후에 초박형웨이퍼에서 쉽게 박리하는데 있다. 다이싱 테이프를 사용하지 않으면 고속으로 회전하는 블레이드에 의해 필름이 비산하거나 유동되어 칩이 손상을 입게 되므로 적절한 점착력을 가진 다이싱 테이프를 사용하여 칩의 비산을 방지하여 불량을 줄이고 방사선 및 자외선을 조사한 후에 쉽게 박리가 되어 개별화 공정을 쉽게 했던 것이다.The main purpose of the dicing tape is to adhere to the backside of the wafer to prevent the film from scattering or flowing during dicing to prevent cracking of the wafer and to easily peel off from the ultra-thin wafer after irradiation with radiation and ultraviolet rays. If the dicing tape is not used, the film is scattered or flows due to the blade rotating at a high speed, and the chip is damaged. It was easily peeled off later to facilitate the individualization process.

기존의 다이싱 테이프에서는 (Poly vinyl chloride, PVC) 계열의 필름을 기재 필름으로 많이 적용하였으나 PVC필름 필름은 모듈러스가 높고 신장율이 낮아 익스펜딩(expanding) 효과가 좋지만 PVC 필름의 연성화를 위해 가소제 및 첨가제를 첨가하여 이러한 가소제 및 첨가제가 코팅 점착층으로 마이그레이션(Migration)되어 시간의 경과에 따라 제품의 내구성에 치명적인 문제가 발생하고 폴리 염화 비닐의 환경적이 문제 등 PVC필름 사용의 근원적인 문제를 해결하지 못했다.Existing dicing tape has applied (Poly vinyl chloride, PVC) based film as a base film, but PVC film film has high modulus and low elongation, so it has good expanding effect, but plasticizer and additive for softening PVC film These plasticizers and additives were migrated to the coating adhesive layer by adding so that it could not solve the fundamental problems of PVC film use such as the fatal problem of the durability of the product over time and the environmental problem of polyvinyl chloride. .

따라서 픽업성에 최적인 조성물과 PO(폴리올레핀)계열의 필름을 사용한 (Bonding/Debonding)용 테이프 개발이 우선시 되고 있다.Therefore, the development of the tape for (Bonding / Debonding) using the composition and the PO (polyolefin) series film which are optimal for pick-up property is given priority.

또한 대한민국특허 특2002-0001270호, 2002-0001271호에 따르면 부틸아크릴레이트, 에틸아크릴레이트, 글리시딜메타크릴레이트, 2-히드록시메타아크릴레이트를 사용하여 3원공중합체를 제조한 후 이소시아네이트계의 경화제를 넣고 올리고머로써 우레탄아크릴레이트나 에폭시아크릴레이트를 넣어서 자외선을 조사한 후 피착제 위에 점착제를 남기지 않고 점착력을 감소시키는 방법을 이용하고 있다. 일본국 특허공개 소 61-2433878호에는 플라스틱 필름으로 된 테이프기재층과 에틸렌-초산비닐공중합체로 된 점착제층 사이에 음이온계 계면 활성제를 함유한 에틸렌 공중합체로된 제1중간층 및 폴리에틸렌으로 된제 2중간층이 갖춰진 구성으로 되어, 절단 작업 후 가열처리에 의해 점착강도를 저하시켜 칩을 쉽게 추출할 수 있는 다이싱테이프의 기술이 제안되어 있다.In addition, according to the Republic of Korea Patent No. 2002-0001270, 2002-0001271 isocyanate type after preparing a terpolymer using butyl acrylate, ethyl acrylate, glycidyl methacrylate, 2-hydroxy methacrylate After adding a curing agent of the urethane acrylate or epoxy acrylate as an oligomer and irradiating ultraviolet rays, the method of reducing the adhesive strength without leaving an adhesive on the adherend is used. Japanese Patent Laid-Open No. 61-2433878 discloses a first intermediate layer made of ethylene copolymer containing anionic surfactant and a second intermediate layer made of polyethylene between a tape base layer made of a plastic film and an adhesive layer made of ethylene-vinyl acetate copolymer. The technique of the dicing tape which consists of such a structure which can reduce an adhesive strength by heat processing after a cutting operation and can extract a chip easily is proposed.

그러나 상기 방법들에서 사용된 아크릴계 점착제의 경우 자외선 조사시 광중합이 효과적으로 진행되지 않거나, 테이프 기재와 점착층 사이의 중간층이 필수적으로 구성되어 제조공정이 복잡하다는 문제점이 있어, 제조공정도 간단하고 효과적인 광중합을 할 수 있는 점착조성물이 요구된다.However, in the case of the acrylic pressure-sensitive adhesives used in the above methods, there is a problem that photopolymerization does not proceed effectively during ultraviolet irradiation, or an intermediate layer between the tape base material and the adhesive layer is essentially constituted, and thus the manufacturing process is complicated. An adhesive composition capable of doing is required.

본 발명은 상기의 문제점들을 해결하기 위한 것으로, 젖음성이 우수하여 초기 부착시 점착력이 일정하게 유지되며, 부착 후 시간이 경과함에도 경시변화가 적으며 고분자와 일체화된 광가교에 따라 피착제에 잔사가 남지 않으면서 점착력 및 재박리성이 우수한 비닐기를 함유하는 아크릴계 점착제 조성물의 제조방법을 제공하는 것을 목적으로 한다. 또한, 본 발명은 상기 제조방법으로부터 제조되는 부가반응 점착제 조성물을 제공하는 것을 목적으로 한다.The present invention is to solve the above problems, excellent wettability, the adhesive strength is maintained at the time of initial attachment, the change over time even after the time of adhesion is small, the residue on the adherend according to the optical crosslinking integrated with the polymer It is an object of the present invention to provide a method for producing an acrylic pressure-sensitive adhesive composition containing a vinyl group having excellent adhesion and re-peelability without remaining. In addition, an object of the present invention is to provide an addition reaction pressure-sensitive adhesive composition prepared from the production method.

본 발명은 방사선 및 자외선 조사 전 충분한 점착력 및 경시 안정성이 우수하며 방사선 및 자외선 조사 후 고분자와 일체화된 광가교에 따라 초박형 웨이퍼에서 효과적인 박리력을 가지며, 촉매를 포함하고 전환률이 높은 부가반응형 아크릴 점착제 조성물의 제조방법 및 그로부터 제조된 점착제 조성물을 제공 한다.The present invention has sufficient adhesive strength and stability over time before radiation and ultraviolet irradiation, and has an effective peeling force on an ultra-thin wafer according to photocrosslinking integrated with a polymer after radiation and ultraviolet radiation, and includes a catalyst and a high conversion rate. It provides a method for producing the composition and the pressure-sensitive adhesive composition prepared therefrom.

또한 본 발명은 초박형 웨이퍼에 점착 잔류물이 거의 남지 않는 점착 조성물을 제공하는 것이며, 상기 부가반응형 아크릴 점착제 조성물이 도포된 결합/비결합(bonding/debonding) 점착 테이프를 제공한다.In another aspect, the present invention is to provide a pressure-sensitive adhesive composition that hardly remains an adhesive residue on the ultra-thin wafer, and provides a bonding / debonding pressure-sensitive adhesive tape to which the addition-reactive acrylic pressure-sensitive adhesive composition is applied.

본 발명의 점착제 조성물의 제조방법은Method for producing a pressure-sensitive adhesive composition of the present invention

a) C1~C14의 알킬기를 갖는 (메타)아크릴레이트계 단량체; 히드록시기, 카르복실기 또는 글리시딜기를 갖는 (메타)아크릴레이트계 단량체 또는 이들의 혼합물; 및 개시제를 혼합하여 중합하는 단계; 및a) (meth) acrylate type monomer which has C1-C14 alkyl group; (Meth) acrylate monomers having a hydroxy group, a carboxyl group or a glycidyl group or mixtures thereof; And polymerizing by mixing an initiator; And

b) 상기 중합체의 측쇄에 탄소-탄소 이중결합을 갖는 광경화 단량체, 촉매 및 중합금지제를 투입하여 부가중합하는 단계;b) adding and polymerizing a photocurable monomer having a carbon-carbon double bond, a catalyst, and a polymerization inhibitor into the side chain of the polymer;

를 포함한다.It includes.

또한 c) 상기 부가중합체에 가교제 및 광개시제를 혼합하는 단계를 더 포함하는 것을 특징으로 한다.
In addition, c) characterized in that it further comprises the step of mixing a crosslinking agent and a photoinitiator to the addition polymer.

이하, 본 발명을 상세히 설명한다.Hereinafter, the present invention will be described in detail.

본 발명의 상기 C1~C14의 알킬기를 갖는 (메타)아크릴레이트계 단량체는 점착력을 제공하는 단량체로서, 유리전이온도가 -70 내지 130℃이며, C4~C14의 알킬기를 사용하는 것이 더욱 바람직하다. 탄소수가 상기 범위를 벗어날 경우 유리전이온도가 높아지거나 점착성의 조절이 어렵다.The (meth) acrylate-based monomer having an alkyl group of C1 to C14 of the present invention is a monomer that provides adhesion, and has a glass transition temperature of -70 to 130 ° C, more preferably using an alkyl group of C4 to C14. If the carbon number is out of the above range, the glass transition temperature is high or the adhesion is difficult to control.

상기 C1~C14의 알킬기를 갖는 (메타)아크릴레이트계 단량체는 예를들어 메틸아크릴레이트, 에틸아크릴레이트, 부틸아크릴레이트, 2-에틸부틸아크릴레이트, 2-에틸헥실(메타)아크릴레이트, 헥실아크릴레이트, 헵틸아크릴레이트, 옥틸아크릴레이트, n-펜틸아크릴레이트, 비닐아크릴레이트, 라우릴아크릴레이트, 메틸메타아크릴레이트, 에틸메타아크릴레이트, 부틸메타아크릴레이트, 2-에틸부틸메타아크릴레이트, 2-에틸헥실메타아크릴레이트 및 라우릴메타아크릴레이트에서 1종 이상 선택되어 사용하는 것을 특징으로 한다.Examples of the (meth) acrylate monomer having an alkyl group of C1 to C14 include methyl acrylate, ethyl acrylate, butyl acrylate, 2-ethyl butyl acrylate, 2-ethylhexyl (meth) acrylate and hexyl acryl. Latex, heptyl acrylate, octyl acrylate, n-pentyl acrylate, vinyl acrylate, lauryl acrylate, methyl methacrylate, ethyl methacrylate, butyl methacrylate, 2-ethylbutyl methacrylate, 2- At least one selected from ethylhexyl methacrylate and lauryl methacrylate is used.

본 발명의 상기 히드록시기, 카르복실기 또는 글리시딜기를 갖는 (메타)아크릴레이트계 단량체 또는 이들의 혼합물은 관능기 및 가교성 단량체로서, 광경화성을 위한 부가중합 단량체를 효과적으로 부여하기 위해 포함한다.The (meth) acrylate monomer having a hydroxy group, a carboxyl group or a glycidyl group of the present invention or a mixture thereof is included as a functional group and a crosslinkable monomer to effectively give an addition polymerization monomer for photocurability.

상기 히드록시기, 카르복실기 또는 글리시딜기를 갖는 (메타)아크릴레이트계 단량체 또는 이들의 혼합물은 2-히드록시에틸아크릴레이트, 2-히드록시메틸아크릴레이트, 2-히드록시프로필아크릴레이트, 2-히드록시부틸아클릴레이트, 2-히드록시에틸메타아크릴레이트, 2-히드록시메틸메타아크릴레이트, 2-히드록시프로필메타아크릴레이트, 2-히드록시부틸메타아클릴레이트, 글리시딜(메타)아크릴레이트, (메타)아크릴산, 히드록시(메타)아크릴산, 히드록시글리시딜(메타)아크릴레이트, 아민(메타)아크릴산 및 아민글리시딜(메타)아크릴레이트에서 1종 이상 선택되어 사용하며, 더욱 바람직하게는 (메타)아크릴산 또는 글리시딜(메타)아크릴레이트를 사용한다. 특히 상기 (메타)아크릴산은 높은 극성으로 피착제와의 상호작용을 통하여 점착력 및 물성 조절이 쉬우며 다른 이종 단량체 및 물질과 부가반응 및 다양한 관능기와 화학 결합시 반응성이 뛰어나다.The (meth) acrylate monomer having a hydroxy group, a carboxyl group or a glycidyl group or a mixture thereof is 2-hydroxyethyl acrylate, 2-hydroxymethyl acrylate, 2-hydroxypropyl acrylate, 2-hydroxy Butyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxymethyl methacrylate, 2-hydroxypropyl methacrylate, 2-hydroxy butyl methacrylate, glycidyl (meth) acrylate At least one selected from (meth) acrylic acid, hydroxy (meth) acrylic acid, hydroxyglycidyl (meth) acrylate, amine (meth) acrylic acid and amineglycidyl (meth) acrylate, and more preferably. Preferably, (meth) acrylic acid or glycidyl (meth) acrylate is used. In particular, the (meth) acrylic acid has a high polarity and is easy to control adhesiveness and physical properties through interaction with the adherend, and excellent reactivity when addition reactions with other heterogeneous monomers and materials and chemical bonding with various functional groups.

상기 히드록시기, 카르복실기 또는 글리시딜기를 갖는 (메타)아크릴레이트계 단량체 또는 이들의 혼합물은 C1~C14의 알킬기를 갖는 (메타)아크릴레이트계 단량체 100 중량부에 대하여 10 내지 30 중량부를 사용하는 것이 바람직하다. 상기 함량에 따라 부가중합 단량체인 광경화 단량체의 함량이 결정되며, 광경화 밀도, 응집력 및 박리력에 영향을 준다. 상기 범위가 10 중량부 미만일 경우 응집력이 낮아 재박리성이 저하되고, 30 중량부를 초과하면 극성이 증가하여 경시변화 및 가교도가 커져서 점착력이 약해지고 젖음성과 재박리성이 저하되는 문제점이 있다.The (meth) acrylate monomer having a hydroxy group, a carboxyl group or a glycidyl group or a mixture thereof is preferably used in an amount of 10 to 30 parts by weight based on 100 parts by weight of the (meth) acrylate monomer having an alkyl group of C1 to C14. Do. The content of the photocuring monomer, which is an addition polymerization monomer, is determined according to the content, and affects photocuring density, cohesion and peeling force. When the range is less than 10 parts by weight, the cohesion force is low, and the re-peelability is lowered. When the range is more than 30 parts by weight, the polarity is increased, the change over time and the degree of crosslinking are increased.

또한 본 발명의 상기 a)단계의 중합에 사용되는 개시제는 4-(2-히드록시에톡시페닐)의 광중합 개시제; 2,2′-아조비스이소부티로니트릴, 2,2′-아조비스(2-메틸부티로니트릴), 1,1′-아조비스(시클로헥산-1-카보니트릴)등의 아조계 중합 개시제; tert-부틸 히드로퍼옥사이드, 벤조일 퍼옥사이드, 쿠멘 히드로퍼옥사이드 등의 유기 퍼옥시드류, 칼륨 퍼술페이트, 과산화수소 등의 무기 퍼옥시드류의 열중합 개시제가 있으나 반드시 이에 한정하는 것은 아니다.In addition, the initiator used in the polymerization of step a) of the present invention may be a photopolymerization initiator of 4- (2-hydroxyethoxyphenyl); Azo polymerization initiators, such as 2,2'- azobisisobutyronitrile, 2,2'- azobis (2-methylbutyronitrile), and 1,1'- azobis (cyclohexane-1-carbonitrile) ; There is a thermal polymerization initiator of organic peroxides such as tert-butyl hydroperoxide, benzoyl peroxide, cumene hydroperoxide, inorganic peroxides such as potassium persulfate and hydrogen peroxide, but is not necessarily limited thereto.

상기 a)단계의 중합은 광중합 및 공중합법을 사용하고, 상기 공중합법에는 용액중합법, 광중합법, 벌크중합법, 서스펜션중합법 또는 에멀젼중합법 등이 있으며 용액중합법이 가장 바람직하다. 이때 중합은 질소분위기에서 50 내지 140℃에서 6 내지 12시간동안 반응하여 수행하는 것이 바람직하며, 단량체들을 균일하게 혼합한 후 개시제를 첨가하는 것이 좋다.The polymerization of step a) uses photopolymerization and copolymerization, and the copolymerization includes solution polymerization, photopolymerization, bulk polymerization, suspension polymerization or emulsion polymerization, and solution polymerization is most preferred. At this time, the polymerization is preferably carried out by reacting for 6 to 12 hours at 50 to 140 ℃ in a nitrogen atmosphere, it is preferable to add the initiator after mixing the monomers uniformly.

상기 a)단계의 공중합에 의해 제조된 공중합 수지는 중량평균 분자량이 100,000 내지 1,000,000이고, 더욱 바람직하게는 400,000 내지 700,000인 것을 사용한다. 상기 분자량이 400,000 이하이면 고분자 응집력이 낮아 열에 대한 저항력이 낮아지게 되고, 1,000,000 이상이면 기재와의 밀착력이 낮아져 필름에서의 전사를 초래할 수 있다. 또한 열경화 후의 적절한 초기 점착력을 얻기 위해 유리전이온도가 -70 내지 -20℃인 것이 바람직하며, 더욱 바람직하게는 -60 내지 -30℃인 것이 바람직하다. 상기 유리전이온도가 약 -10℃이면, 초기 점착력이 낮아 다이싱할 경우 링프레임에 대한 부착력이 낮아 링프레임에서 떨어지거나, 웨이퍼에 대한 부착력이 낮아 칩의 비산이 발생한다.The copolymer resin prepared by the copolymerization of step a) uses a weight average molecular weight of 100,000 to 1,000,000, more preferably 400,000 to 700,000. When the molecular weight is 400,000 or less, the cohesive force of the polymer is low, so that the resistance to heat is low. When the molecular weight is 1,000,000 or more, the adhesion to the substrate is low, which may cause transfer in the film. In addition, in order to obtain appropriate initial adhesive strength after heat curing, the glass transition temperature is preferably -70 to -20 ° C, more preferably -60 to -30 ° C. When the glass transition temperature is about −10 ° C., when the initial adhesive strength is low, the adhesion force to the ring frame may be low due to dicing, or the chip may be scattered because the adhesion force to the wafer is low.

본 발명의 부가중합단계에서는 공중합으로 만들어진 수지의 관능기에 광경화가 가능한 탄소-탄소 이중결합을 가진 광경화 단량체를 이용해 공중합 수지와 일체형이 가능하고, 촉매를 포함한 부가반응을 통하여 광경화 수지를 제조한다.In the addition polymerization step of the present invention, a photocurable monomer having a carbon-carbon double bond capable of photocuring with a functional group of a resin produced by copolymerization may be integrated with a copolymerized resin, and a photocurable resin is prepared through an addition reaction including a catalyst. .

본 발명의 상기 광경화 단량체는 탄소-탄소 이중결합을 가진 단량체로 방사선 및 자외선으로 인해 광개시제가 반응을 하여 광중합을 일으키기 위한 것으로서, 관능기 및 가교성 단량체에 부가중합하는 단량체이다. 상기 광경화 단량체의 예를 들면 (메타)아크릴산 또는 글리시딜(메타)아크릴레이트를 사용하며, 더욱 구체적으로는 글리시딜(메타)아크릴레이트, (메타)아크릴산, 히드록시(메타)아크릴산, 히드록시글리시딜(메타)아크릴레이트, 아민(메타)아크릴산 및 아민글리시딜(메타)아크릴레이트에서 1종 이상 선택되어 사용한다.The photocurable monomer of the present invention is a monomer having a carbon-carbon double bond, which is used to cause photopolymerization by reaction of photoinitiators due to radiation and ultraviolet rays, and is a monomer that is additionally polymerized to functional groups and crosslinkable monomers. Examples of the photocuring monomers include (meth) acrylic acid or glycidyl (meth) acrylate, and more specifically glycidyl (meth) acrylate, (meth) acrylic acid, hydroxy (meth) acrylic acid, At least one selected from hydroxyglycidyl (meth) acrylate, amine (meth) acrylic acid and amine glycidyl (meth) acrylate is used.

상기 광경화 단량체는 히드록시기, 카르복실기 또는 글리시딜기를 갖는 (메타)아크릴레이트계 단량체 또는 이들의 혼합물 1.0 몰(mol)에 대하여 0.5 내지 1.0 몰(mol)을 사용하는 것이 바람직하다. 상기 범위가 0.5 몰 이하이면 광경화 밀도가 낮아 응집력 및 박리력이 저하되고 잔유물이 남게 되며, 1.0 몰 이상이면 가교가 어려워 고분자의 응집력을 비롯하여 균일한 품질의 점착제를 제조하기가 어렵다. 즉, 광경화 단량체의 첨가량은 매우 중요한 요소로 작용한다.The photocuring monomer is preferably 0.5 to 1.0 mol (mol) relative to 1.0 mol (mol) of a (meth) acrylate monomer having a hydroxy group, a carboxyl group or a glycidyl group or a mixture thereof. If the range is 0.5 mole or less, the photocuring density is low, the cohesive force and the peeling force is lowered, and the residue remains. If it is 1.0 mole or more, crosslinking is difficult, so that it is difficult to prepare a pressure-sensitive adhesive of uniform quality including cohesion of the polymer. In other words, the amount of the photocuring monomer added is very important.

본 발명의 b)단계의 부가중합에 사용된 촉매는 합성과정에서 반응 시간 단축 및 전환율을 높이기 위해 사용하는 것으로, 이미다졸 화합물, 트리페닐포스핀(TPP), 파라톨루엔설퍼닉산(PTSA) 및 3급 아민에서 1종 이상 선택되어 사용하나, 이에 한정하는 것은 아니다. 상기 이미다졸 화합물의 구체적인 예로는 2-메틸이미다졸(2MZ), 2-에틸-4-메틸이미다졸(2E4MZ), 2-페닐이미다졸(2PZ), 1-시아노에틸-2-페틸이미다졸(2PZ-CN), 2-운데실이미다졸(C11Z), 2-헵타데실이미다졸(C17Z) 및 1-시아노에틸-2페닐이미다졸 트리메탈레이트(2PZ-CNS)에서 하나 이상 선택되며, 더욱 바람직하게는 2-메틸이미다졸(2MZ)을 사용한다.The catalyst used in the addition polymerization of step b) of the present invention is used to shorten the reaction time and increase the conversion rate in the synthesis process, and includes an imidazole compound, triphenylphosphine (TPP), paratoluenesulperic acid (PTSA), and 3 One or more selected from the tertiary amines are used, but not limited thereto. Specific examples of the imidazole compound include 2-methylimidazole (2MZ), 2-ethyl-4-methylimidazole (2E4MZ), 2-phenylimidazole (2PZ), 1-cyanoethyl-2- Pettylimidazole (2PZ-CN), 2-Undecylimidazole (C11Z), 2-heptadecylimidazole (C17Z) and 1-cyanoethyl-2phenylimidazole trimetalate (2PZ-CNS ) Is selected from, and more preferably 2-methylimidazole (2MZ).

상기 촉매의 함량은 광경화 단량체 100 중량부에 대하여 0.001 내지 10 중량부를 사용하며, 더욱 바람직하게는 0.01 내지 5 중량부가 바람직하다. 상기 함량이 0.001 중량부 미만이면 광경화 단량체의 부가중합의 반응율이 낮아 전환율이 낮은 경향이 있어 미반응 단량체가 존재하게 되어 물성에 영향을 주고, 10 중량부를 초과하면 경화 반응이 급격하게 일어나서 보존 안정성이 저하된다.The catalyst is used in an amount of 0.001 to 10 parts by weight based on 100 parts by weight of the photocuring monomer, and more preferably 0.01 to 5 parts by weight. If the content is less than 0.001 part by weight, the reaction rate of the addition polymerization of the photocuring monomer is low, so the conversion tends to be low, so that unreacted monomers are present, affecting physical properties. Is lowered.

또한 본 발명의 점착제 조성물은 중합금지제로 예를들면 부틸레이트하이드록시톨루엔(butylated hydroxy toluene)을 더 첨가 할 수 있으며, 이에 한정되지는 않는다.In addition, the pressure-sensitive adhesive composition of the present invention may further include, for example, butylated hydroxy toluene as a polymerization inhibitor, but is not limited thereto.

상기 b)단계의 중합은 부가중합법을 사용하여 광경화 수지를 제조하고, 상기 부가중합은 질소분위기에서 50 내지 140 ℃에서 6 내지 12시간동안 반응하여 수행하는 것이 바람직하다.The polymerization of step b) is prepared by using an addition polymerization method to produce a photocurable resin, the addition polymerization is preferably carried out by reacting for 6 to 12 hours at 50 to 140 ℃ in a nitrogen atmosphere.

본 발명의 c)단계의 상기 가교제는 이소시아네이트계 화합물, 에폭시계 화합물, 아지리딘계 화합물 및 금속 킬레이트계 화합물에서 1종 이상 선택되며, 보다 바람직하게는 에폭시계 화합물이다. 상기 에폭시계 화합물에는 에틸렌글리콜디글리시딜에테르, 트리글리시딜에테르, 트리메티올프로판트리글리시딜에테르, N,N,N’,N’-테트라글리시딜에틸렌디아민 또는 글리세린 디글리시딜에테르 등이 있으나 반드시 이에 한정하는 것은 아니다. The crosslinking agent of step c) of the present invention is one or more selected from isocyanate compounds, epoxy compounds, aziridine compounds and metal chelate compounds, more preferably epoxy compounds. Examples of the epoxy compound include ethylene glycol diglycidyl ether, triglycidyl ether, trimethol propane triglycidyl ether, N, N, N ', N'-tetraglycidyl ethylenediamine or glycerin diglycidyl ether. Etc., but is not necessarily limited thereto.

상기 가교제는 광경화 수지 100 중량부에 대하여 0.1 내지 5 중량부를 사용한다. 가교제의 함량이 0.1 중량부 미만일 경우 가교반응이 원활히 진행되지 않아 점착제의 응집력이 저하될 수 있고, 5 중량부 초과일 경우에는 가교 반응이 과도하게 진행되어 내구신뢰성이 저하될 우려가 있다. The crosslinking agent is used 0.1 to 5 parts by weight based on 100 parts by weight of the photocurable resin. When the content of the crosslinking agent is less than 0.1 part by weight, the crosslinking reaction may not proceed smoothly, and the cohesive force of the pressure sensitive adhesive may be lowered. When the content of the crosslinking agent is more than 5 parts by weight, the crosslinking reaction may be excessively progressed and durability may be lowered.

또한 본 발명의 상기 부가반응형 점착제를 방사선 및 자외선에 의해 경화시키는 경우에는 광개시제(광중합개시제)를 더 첨가 할 수 있다. 광개시제는 α-케톨계 화합물, 아세토페논계 화합물, 케탈계 화합물, 방향족 술포닐클로라이드계 화합물, 광활성 옥심계 화합물, 벤조페논계 화합물, 티오크산톤계 화합물, 캄포퀴논계 화합물, 할로겐화케톤계 화합물, 아실포스피녹시드계 화합물 및 아실포스포네이트계 화합물에서 1종 이상 선택되어 사용된다. In addition, when the addition-responsive pressure-sensitive adhesive of the present invention is cured by radiation and ultraviolet rays, a photoinitiator (photopolymerization initiator) may be further added. The photoinitiator is α-ketol compound, acetophenone compound, ketal compound, aromatic sulfonyl chloride compound, photoactive oxime compound, benzophenone compound, thioxanthone compound, camphorquinone compound, halogenated ketone compound, At least one selected from acyl phosphoxide compound and acyl phosphonate compound is used.

더욱 구체적으로 예를 들면, 4-(2-히드록시에톡시)페닐(2-히드록시-2-프로필)케톤, α-히드록시-α,α'-디메틸아세토페논, 2-메틸-2-히드록시프로피오페논, 1-히드록시시클로헥실페닐케톤 등의 α-케톨계 화합물; 메톡시아세토페논, 2,2-디메톡시-2-페닐아세토페논, 2,2-디에톡시아세토페논, 2-메틸-1-[4-(메틸티오)-페닐]-2-모르폴리노프로판-1 등의 아세토페논계 화합물; 벤조인에틸에테르, 벤조인이소프로필에테르, 아니소인메틸에테르 등의 벤조인에테르계 화합물; 벤질디메틸케탈 등의 케탈계 화합물; 2-나프탈렌술포닐클로라이드 등의 방향족 술포닐클로라이드계 화합물; 1-페논-1,1-프로판디온-2-(o-에톡시카르보닐)옥심 등의 광활성 옥심계 화합물; 벤조페논, 벤조일벤조산, 3,3'-디메틸-4-메톡시벤조페논 등의 벤조페논계 화합물; 티오크산톤, 2-클로로티오크산톤, 2-메틸티오크산톤, 2,4-디메틸티오크산톤, 이소프로필티오크산톤, 2,4-디클로로티오크산톤, 2,4-디에틸티오크산톤,2,4-디이소프로필티오크산톤 등의 티오크산톤계 화합물; 캄포퀴논; 할로겐화케톤; 아실포스피녹시드; 아실포스포네이트 등을 들 수 있다.More specifically, for example, 4- (2-hydroxyethoxy) phenyl (2-hydroxy-2-propyl) ketone, α-hydroxy-α, α'-dimethylacetophenone, 2-methyl-2- Α-ketol compounds such as hydroxypropiophenone and 1-hydroxycyclohexylphenyl ketone; Methoxyacetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxyacetophenone, 2-methyl-1- [4- (methylthio) -phenyl] -2-morpholinopropane Acetophenone compounds such as -1; Benzoin ether compounds such as benzoin ethyl ether, benzoin isopropyl ether and anisoin methyl ether; Ketal compounds such as benzyl dimethyl ketal; Aromatic sulfonyl chloride-based compounds such as 2-naphthalenesulfonyl chloride; Photoactive oxime compounds such as 1-phenone-1,1-propanedione-2- (o-ethoxycarbonyl) oxime; Benzophenone compounds such as benzophenone, benzoylbenzoic acid and 3,3'-dimethyl-4-methoxybenzophenone; Thioxanthone, 2-chloro thioxanthone, 2-methyl thioxanthone, 2,4-dimethyl thioxanthone, isopropyl thioxanthone, 2,4-dichloro thioxanthone, 2,4-diethyl thioxide Thioxanthone type compounds, such as a santon and 2, 4- diisopropyl thioxanthone; Camphorquinone; Halogenated ketones; Acylphosphinoxide; Acyl phosphonate etc. are mentioned.

상기 광개시제는 상기 방사선 또는 자외선에 의해 활성화 되어 점착층 안의 탄소-탄소 이중결합을 활성화 시켜 라디칼 반응이 발생되게 하는 기능을 한다. 상기 광개시제는 b)단계에 의한 부가반응을 통한 광경화 아크릴 점착 수지 100 중량부에 대하여 0.05 내지 10 중량부를 사용한다. 더욱 바람직하게는 2 내지 7 중량부를 사용한다. 상기 광중합 개시제의 함량이 0.05 중량부 미만이면 광경화도가 떨어져 점착층의 자외선 경화후의 끈적임의 줄어듬이 미미하게 되고, 자외선 경화 후에 점착필름의 끈적임이 남아있어 픽업공정에서 픽업성의 불량문제가 발생하고, 10중량부 이상이면 자외선 경화시 반응에 참여하지 못한 개시제 부분에서 자극적인 냄새와 더불어 미반응 개시제가 불순물로 작용하여 물성에 영향을 주게 된다. The photoinitiator is activated by the radiation or ultraviolet rays to activate a carbon-carbon double bond in the adhesive layer to generate a radical reaction. The photoinitiator uses 0.05 to 10 parts by weight based on 100 parts by weight of the photocurable acrylic adhesive resin through the addition reaction according to step b). More preferably, 2 to 7 parts by weight is used. When the content of the photopolymerization initiator is less than 0.05 parts by weight, the degree of photocurability is reduced and the stickiness of the sticky film after UV curing is insignificant. If it is 10 parts by weight or more, the unreacted initiator acts as an impurity in addition to the irritating odor in the initiator portion which does not participate in the reaction during UV curing, thereby affecting the physical properties.

또한 상기 점착제 조성물에 발명의 효과에 영향을 미치지 않는 범위에서 자외선 안정제, 산화방지제, 안료, 염료, 보강제, 충진제 등을 일반적인 목적에 따라 적절히 첨가하여 사용할 수 있다. In addition, UV stabilizers, antioxidants, pigments, dyes, reinforcing agents, fillers and the like may be appropriately added and used in the pressure-sensitive adhesive composition according to the general purpose within a range that does not affect the effect of the invention.

본 발명의 점착제조성물은 폴리올렌핀계열, 폴리에틸렌테레프탈레이트, 폴리에틸렌 또는 폴리프로필렌 필름의 일면에 코팅하여 건조시킨 후 5~30 ㎛의 균일한 점착층을 갖는 점착필름을 제공한다.The pressure-sensitive adhesive composition of the present invention provides a pressure-sensitive adhesive film having a uniform pressure-sensitive adhesive layer of 5 ~ 30 ㎛ after drying by coating on one surface of a polyolefin-based, polyethylene terephthalate, polyethylene or polypropylene film.

본 발명의 고분자 측쇄에 부가반응을 하여 비닐기를 함유한 아크릴계 점착제 조성물은 낮은 끓는점을 갖는 (메타)아크릴산이나 글리시딜메타아크릴레이트를 부가함으로써 다이싱 또는 다이싱 다이본딩필름 코팅공정에서 용제와 함께 날려 보내, 도막에 미반응 모노머의 함량을 최소화 시킬 수 있다. The acrylic pressure-sensitive adhesive composition containing a vinyl group by addition reaction to the polymer side chain of the present invention is added with (meth) acrylic acid or glycidyl methacrylate having a low boiling point together with the solvent in the dicing or dicing die-bonding film coating process. By blowing away, the content of unreacted monomer in the coating can be minimized.

종래의 방법인 (메타)아크릴산이나 글리시딜메타아크릴레이트를 고분자 구조내에 도입한 후, 글리시딜 아크릴레이트 또는(메타)아크릴산을 중합하여 완성된 고분자의 문제점이였던 미반응 글리시딜 아크릴레이트 또는 (메타)아크릴산의 잔존으로 인해 발생되던 점착필름의 경시 변화를 부가반응 단계에서 촉매 및 반응금지제를 포함한 반응에서 전환율이 향상되어 미반응물의 잔존으로 인해 발생되었던 점착필름의 경시변화 및 안정성이 상당히 개선할 수 있었다.The unreacted glycidyl acrylate which was a problem of the polymer completed by introducing a conventional method (meth) acrylic acid or glycidyl methacrylate into the polymer structure and then polymerizing glycidyl acrylate or (meth) acrylic acid. Alternatively, the change in the temporal change of the adhesive film caused by the residual of (meth) acrylic acid is improved in the reaction including the catalyst and the reaction inhibiting agent in the addition reaction step, and thus the temporal change and the stability of the adhesive film generated due to the remaining of the unreacted material I was able to improve considerably.

또한 축합부가반응에 비해 낮은 온도에서 원활히 부가반응을 시킬 수 있는 장점을 가지고 있으며, 저가인 (메타)아크릴산이나 글리시딜메타아크릴레이트를 이용함으로써, 이소시아네이트기를 갖고 비닐기를 갖는 물질의 도입보다 가격적으로 유리한 장점을 지니고 있다.In addition, it has the advantage that the addition reaction can be performed smoothly at a lower temperature than the condensation addition reaction, and by using a low-cost (meth) acrylic acid or glycidyl methacrylate, it is more expensive than the introduction of a substance having an isocyanate group and a vinyl group It has advantageous advantages.

본 발명에 따른 제조방법에 의해 제조된 점착제 조성물은 고분자 측쇄의 부가반응을 통해 탄소-탄소 이중결합을 함유한 아크릴계 점착제로써, 젖음성이 우수하여 초기 부착시 점착력이 일정하게 유지되며, 부착 후 시간이 경과함에도 초기 점착력이 일정하게 유지되어 안정한 점착력을 갖으며, 응집력과 박리력이 높아 초박형 웨이퍼를 이용한 반도체 제조 공정시 수율을 높일 수 있으며, 촉매를 사용하여 반응시간을 단축시키고 전환율을 높임으로써 광경화 수지 제조 공정도 간단하며, 생산성 및 경제성이 우수하여 반도체 공정에 적용하기에 적합하다.The pressure-sensitive adhesive composition prepared by the manufacturing method according to the present invention is an acrylic pressure-sensitive adhesive containing carbon-carbon double bonds through the addition reaction of the polymer side chain, and has excellent wettability, thereby maintaining a constant adhesive force at the time of initial attachment, The initial adhesive strength is kept constant even though it has passed, and the adhesive strength is stable. The cohesion and peeling force are high, and thus the yield can be increased in the semiconductor manufacturing process using the ultra-thin wafer, and the catalyst is used to shorten the reaction time and increase the conversion rate. The resin manufacturing process is also simple, and is excellent in productivity and economy, and is suitable for application to semiconductor processes.

이하, 실시예에 의해 본 발명을 보다 상세히 설명하나, 이는 발명의 구성 및 효과를 이해시키기 위한 것일 뿐, 본 발명의 범위를 제한하고자 하는 것은 아니다.
Hereinafter, the present invention will be described in more detail with reference to Examples. However, the present invention is not intended to limit the scope of the present invention.

[제조예 1~2] 점착제 조성물의 제조Production Example 1-2 Preparation of Pressure-Sensitive Adhesive Composition

질소가스가 충진되고 내부와 외부에 온도계와 냉각장치를 설치하여 온도조절이 용이하며 반응물의 반응속도와 발열을 제어 할 수 있는 2 L의 반응기에 하기 표 1의 조성으로 (메타)아크릴레이트계 단량체, 히드록시기, 카르복실기 또는 글리시딜기를 갖는 (메타)아크릴레이트계 단량체들을 투입하였다.Nitrogen gas is filled, and a thermometer and a cooling device are installed inside and outside to facilitate temperature control, and the (meth) acrylate monomer in the composition of Table 1 in a 2 L reactor that can control the reaction rate and heat generation of the reactants. , (Meth) acrylate monomers having a hydroxy group, a carboxyl group or a glycidyl group were added thereto.

표 1에 기재된 단량체로 구성되는 혼합물 100중량부에 대하여 용제로써 톨루엔 30중량부, 에틸아세테이트(ethylacetate, EAc) 70 중량부를 투입하였다. To 100 parts by weight of the mixture composed of the monomers shown in Table 1, 30 parts by weight of toluene and 70 parts by weight of ethylacetate (ethylacetate, EAc) were added.

그 다음, 산소를 제거하기 위하여 질소가스를 20분간 퍼징(purging)한 후, 상기 단량체 혼합물을 균일하게 교반 한 후, 반응개시제로 아조비스이소부티로니트릴(azobisisobutyronitrile, AIBN) 0.06 중량부를 투입하였다. 반응조의 온도를 90 ℃로 유지하고 반응물의 일정량을 소분하여 적하하면서 10 시간 동안 반응시켜 공중합성 수지를 제조하였다. 상기 공중합수지에 탄소-탄소 이중결합을 갖는 광경화 단량체 및 2-메틸이미다졸, 부틸레이트 히드록시 톨루엔을 표 1의 조성으로 투입하고 80 ℃에서 10시간동안 부가중합하여 부가중합수지를 제조하였다. Then, after purging nitrogen gas for 20 minutes to remove oxygen, the monomer mixture was uniformly stirred, and then 0.06 parts by weight of azobisisobutyronitrile (AIBN) was added as a reaction initiator. The temperature of the reactor was maintained at 90 ° C. and a small amount of the reactant was added dropwise to react for 10 hours to prepare a copolymerizable resin. To the copolymerization resin was added a photocuring monomer having a carbon-carbon double bond, 2-methylimidazole, and butylate hydroxy toluene in the composition of Table 1, followed by addition polymerization at 80 ° C. for 10 hours to prepare an addition polymerization resin. .

[비교제조예 1][Comparative Production Example 1]

글리시딜메타아크릴레이트(GMA), 2-메틸이미다졸(2MZ) 및 부틸레이트히드록시 톨루엔(BHT)을 넣지 않은 것을 제외하고는 실시예와 동일한 방법으로 제조하였다. Preparation was carried out in the same manner as in Example except that glycidyl methacrylate (GMA), 2-methylimidazole (2MZ) and butylate hydroxy toluene (BHT) were not added.

[비교제조예 2~3][Comparative Production Example 2 ~ 3]

2-메틸이미다졸(2MZ) 및 부틸레이트히드록시 톨루엔(BHT)을 넣지 않은 것을 제외하고는 실시예와 동일한 방법으로 제조하였다.
Preparation was carried out in the same manner as in Example, except that 2-methylimidazole (2MZ) and butyrate hydroxy toluene (BHT) were not added.

[표 1][Table 1]

Figure pat00001
Figure pat00001

주) week)

* BA : 부틸아크릴레이트(butyl acrylate)* BA: Butyl acrylate

* 2-EHA : 2-에틸헥실아크릴레이트(2-ethylhexyl acrylate)2-EHA 2-ethylhexyl acrylate

* 2-EHMA : 2-에틸헥실메타아크릴레이트 (2-ethylhexyl methacrylate)* 2-EHMA: 2-ethylhexyl methacrylate

* AA, MA : 아크릴산(acrylic acid), 메타아크릴산(methacrylic acid) * AA, MA: acrylic acid, methacrylic acid

* GMA : 글리시딜메타아크릴레이트(glycidyl metaacrylate) (AA,MA>>대비 몰비)* GMA: glycidyl methacrylate (glycidyl metaacrylate) (molar ratio compared to AA, MA >>)

* 2MZ : 2-메틸이미다졸(2-methyl imidazole) (GMA>>대비 %)* 2MZ: 2-methyl imidazole (% of GMA >>)

* BHT : 부틸레이트하이드록시톨루엔(butylate hydroxy toluene) (GMA>>대비%)* BHT: Butyl hydroxy toluene (% of GMA >>)

* AIBN : 2,2′-아조비스이소부티로니트릴(2,2'-Azobis Isobutyronitrile) * AIBN: 2,2'-Azobis Isobutyronitrile

* α-Hydroxyketone: 알파-히드록시 케톤
α-Hydroxyketone: alpha-hydroxy ketone

[실시예 1~2] 점착필름의 제조[Examples 1 and 2] Preparation of Adhesive Film

상기 제조된 제조예 1~2에 가교제(상품명 Tetra-DX : 일본제품) 2.0 중량부, 광개시제(α-Hydroxyketone) 5.0중량부를 투입하여 균일하게 혼합한 후, 두께 80 ㎛의 2축 연신 폴리올레핀 및 폴리에틸렌테레프탈레이트 필름(SKC Hass)의 일면에 코팅하여 건조시킨 후 20㎛의 균일한 점착층을 갖는 점착필름을 제조한 후 하기 표 2와 같이 하기의 물성을 평가하였다.2.0 parts by weight of a crosslinking agent (trade name Tetra-DX: manufactured by Japan) and 5.0 parts by weight of a photoinitiator (α-Hydroxyketone) were added to the prepared Preparation Examples 1 to 2, followed by uniform mixing, followed by biaxially stretched polyolefin and polyethylene having a thickness of 80 μm. After coating and drying one surface of a terephthalate film (SKC Hass) to prepare an adhesive film having a uniform adhesive layer of 20㎛ and evaluated the physical properties as shown in Table 2 below.

[비교실시예 1~3] 점착필름의 제조Comparative Example 1 to 3 Preparation of Adhesive Film

비교제조예 1~3을 사용한 것을 제외하고는 실시예와 동일한 방법으로 제조하였다.Except for using Comparative Preparation Examples 1-3 were prepared in the same manner as in Example.

(1) 점착력 테스트(1) adhesion test

상기 제조된 점착필름에 이형필름을 합판하고 43℃의 온도에서 3일 동안 보관하여 숙성한 후, 유리에 부착하여 점착력을 테스트하였다. 제조한 필름을 유리 면에 JIS Z 0.27에 의거하여 2 ㎏의 롤러로 부착한 후, 25℃의 온도와 50%의 상대습도 조건에서 24 시간 동안 보관한 후, 180°각도 및 300 mm/분 박리속도로 인장시험기 Texture analyzer(제조사: Stable Micro Systems)를 이용하여 측정하였다.The release film was laminated to the prepared pressure-sensitive adhesive film, and stored at a temperature of 43 ° C. for 3 days to mature, and then attached to glass to test adhesion. The film was attached to the glass surface with a roller of 2 kg according to JIS Z 0.27, and then stored at 25 ° C. and 50% relative humidity for 24 hours, followed by 180 ° angle and 300 mm / min peeling. Rate was measured using a tensile tester Texture Analyzer (manufacturer: Stable Micro Systems).

(2) 젖음 성질(2) wetting properties

상기 제조된 점착필름을 실리콘웨이퍼에 각각 가로 2.54㎝, 세로 10㎝의 크기로 재단하여 시료를 준비하고 보호필름을 박리시킨 후 외부 압력을 가하지 않고 스스로 보호필름이 유리 표면에 완전히 젖어드는 시간을 측정하고, 하기 기준에 따라 평가하였다. (○: 10초 미만, △: 10초 이상 30초 미만, ×: 30초 이상)The prepared pressure-sensitive adhesive film was cut into silicon wafers in a size of 2.54 cm and 10 cm, respectively, to prepare a sample, and after peeling off the protective film, measuring the time when the protective film completely wets the glass surface without applying external pressure. And evaluated according to the following criteria. (○: less than 10 seconds, Δ: 10 seconds or more, less than 30 seconds, ×: 30 seconds or more)

(3) 시간에 따른 점착력 증가(3) increased adhesion with time

시간에 따른 점착 강도를 측정하기 위해, 제조된 점착필름을 유리 표면에 점착한 후 20 분의 점착강도를 측정하고, 24시간 후의 점착강도, 7일 후의 점착강도를 20분 후 점착강도 대비 상승률을 측정하여 그 상승률을 %로 나타내었다. In order to measure the adhesive strength over time, after the adhesive film is adhered to the glass surface, the adhesive strength of 20 minutes was measured, and after 24 minutes, the adhesive strength after 24 hours and the adhesive strength after 7 days were measured. The rate of increase was expressed in%.

(4) 박리후 외관의 잔사(피착제 즉 웨이퍼 표면의 잔유물)(4) Residue of appearance after peeling (adhesive, ie residue on wafer surface)

상기의 점착력 테스트 후, 필름이 박리된 실리콘 표면의 오염도와 외관, 박리력 등을 종합적으로 평가하였다.After the adhesion test, the degree of contamination, appearance, peel strength, and the like of the silicon surface on which the film was peeled off were comprehensively evaluated.

(양호: 쉽게 박리 가능하며 유리 기판에 점착제의 잔사 없음, 불량: 유리 기판에 점착제의 잔사 있음)(Good: easily peelable, no residue of adhesive on glass substrate, poor: adhesive residue on glass substrate)

[표 2]TABLE 2

Figure pat00002
Figure pat00002

상기 표 2에 나타낸 바와 같이, 실시예 1 내지 2는 초기 점착력을 유지하면서 부착 후에도 경시변화가 적어 안정한 물성을 나타내었으며, 비교실시예 2 내지 3은 초기점착력 대비 경시변화가 심하여 피착제에 잔유물을 남기는 결과를 나타내었다. As shown in Table 2, Examples 1 to 2 exhibited stable physical properties with little change over time even after attachment while maintaining the initial adhesive force, and Comparative Examples 2 to 3 showed a change over time compared to the initial adhesive force, leaving residues on the adherend. The remaining results were shown.

촉매를 사용하지 않은 경우는 글리시딜메타아크릴레이트가 충분한 부가반응을 하지 못하고 미반응물로 잔존하여 자외선 조사후 충분한 박리력이 나오지 못하며 잔유물을 남기는 결과를 볼 수 있다.In the case of not using a catalyst, glycidyl methacrylate may not be sufficiently reacted and remains as an unreacted substance, and thus sufficient peeling force may not be obtained after UV irradiation, leaving a residue.

한편, 광경화성 단량체를 넣지 않은 비교실시예 1의 경우에는 광경화를 하여도 반응할 수 없는 탄소-탄소 이중결합이 없어 자외선 조사후 반응을 하지 못하고 경시 안정성 및 박리력이 불량한 것을 볼 수 있으며, 점착력이 상당히 높아 상대적으로 재박리성이 떨어지며, 박리시 표면 오염이 심한 것을 확인하였다. On the other hand, in the case of Comparative Example 1 without the photocurable monomer there is no carbon-carbon double bond that can not react even after photocuring, it does not react after UV irradiation, it can be seen that the stability over time and poor peeling force, It was confirmed that the adhesive strength was relatively high and the re-peelability was relatively low, and the surface contamination was severe during peeling.

Claims (12)

a) C1~C14의 알킬기를 갖는 (메타)아크릴레이트계 단량체; 히드록시기, 카르복실기 또는 글리시딜기를 갖는 (메타)아크릴레이트계 단량체 또는 이들의 혼합물; 및 개시제를 혼합하여 중합하는 단계; 및
b) 상기 중합체의 측쇄에 탄소-탄소 이중결합을 갖는 광경화 단량체, 촉매 및 중합금지제를 투입하여 부가중합하는 단계;
를 포함하는 점착제 조성물의 제조방법.
a) (meth) acrylate type monomer which has C1-C14 alkyl group; (Meth) acrylate monomers having a hydroxy group, a carboxyl group or a glycidyl group or mixtures thereof; And polymerizing by mixing an initiator; And
b) adding and polymerizing a photocurable monomer having a carbon-carbon double bond, a catalyst, and a polymerization inhibitor into the side chain of the polymer;
Method of producing a pressure-sensitive adhesive composition comprising a.
제 1항에 있어서,
c) 상기 부가중합체에 가교제 및 광개시제를 더 포함하는 점착제 조성물의 제조방법.
The method of claim 1,
c) A method for producing a pressure-sensitive adhesive composition further comprises a crosslinking agent and a photoinitiator in the addition polymer.
제 1항에 있어서,
상기 C1~C14의 알킬기를 갖는 (메타)아크릴레이트계 단량체는 메틸아크릴레이트, 에틸아크릴레이트, 부틸아크릴레이트, 2-에틸부틸아크릴레이트, 2-에틸헥실(메타)아크릴레이트, 헥실아크릴레이트, 헵틸아크릴레이트, 옥틸아크릴레이트, n-펜틸아크릴레이트, 비닐아크릴레이트, 라우릴아크릴레이트, 메틸메타아크릴레이트, 에틸메타아크릴레이트, 부틸메타아크릴레이트, 2-에틸부틸메타아크릴레이트, 2-에틸헥실메타아크릴레이트 및 라우릴메타아크릴레이트에서 1종 이상 선택되는 점착제 조성물의 제조방법.
The method of claim 1,
The (meth) acrylate monomer having an alkyl group of C1 to C14 is methyl acrylate, ethyl acrylate, butyl acrylate, 2-ethyl butyl acrylate, 2-ethylhexyl (meth) acrylate, hexyl acrylate, heptyl Acrylate, octyl acrylate, n-pentyl acrylate, vinyl acrylate, lauryl acrylate, methyl methacrylate, ethyl methacrylate, butyl methacrylate, 2-ethylbutyl methacrylate, 2-ethylhexyl meth Method for producing a pressure-sensitive adhesive composition selected from at least one of acrylate and lauryl methacrylate.
제 1항에 있어서,
상기 히드록시기, 카르복실기 또는 글리시딜기를 갖는 (메타)아크릴레이트계 단량체 또는 이들의 혼합물은 2-히드록시에틸아크릴레이트, 2-히드록시메틸아크릴레이트, 2-히드록시프로필아크릴레이트, 2-히드록시부틸아클릴레이트, 2-히드록시에틸메타아크릴레이트, 2-히드록시메틸메타아크릴레이트, 2-히드록시프로필메타아크릴레이트, 2-히드록시부틸메타아클릴레이트, 글리시딜(메타)아크릴레이트, (메타)아크릴산, 히드록시(메타)아크릴산, 히드록시글리시딜(메타)아크릴레이트, 아민(메타)아크릴산 및 아민글리시딜(메타)아크릴레이트에서 1종 이상 선택되는 점착제 조성물의 제조방법.
The method of claim 1,
The (meth) acrylate monomer having a hydroxy group, a carboxyl group or a glycidyl group or a mixture thereof is 2-hydroxyethyl acrylate, 2-hydroxymethyl acrylate, 2-hydroxypropyl acrylate, 2-hydroxy Butyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxymethyl methacrylate, 2-hydroxypropyl methacrylate, 2-hydroxy butyl methacrylate, glycidyl (meth) acrylate , (Meth) acrylic acid, hydroxy (meth) acrylic acid, hydroxyglycidyl (meth) acrylate, amine (meth) acrylic acid and amine glycidyl (meth) acrylate .
제 1항에 있어서,
상기 광경화 단량체는 글리시딜(메타)아크릴레이트, (메타)아크릴산, 히드록시(메타)아크릴산, 히드록시글리시딜(메타)아크릴레이트, 아민(메타)아크릴산 및 아민글리시딜(메타)아크릴레이트에서 1종 이상 선택되는 점착제 조성물의 제조방법.
The method of claim 1,
The photocuring monomer is glycidyl (meth) acrylate, (meth) acrylic acid, hydroxy (meth) acrylic acid, hydroxyglycidyl (meth) acrylate, amine (meth) acrylic acid and amine glycidyl (meth). Method for producing a pressure-sensitive adhesive composition selected from the group of acrylates.
제 1항에 있어서,
상기 촉매는 이미다졸 화합물, 트리페닐포스핀(TPP), 파라톨루엔설퍼닉산(PTSA) 및 3급 아민에서 1종 이상 선택되는 점착제 조성물의 제조방법.
The method of claim 1,
The catalyst is a method for producing a pressure-sensitive adhesive composition is at least one selected from imidazole compound, triphenylphosphine (TPP), paratoluenesulperic acid (PTSA) and tertiary amine.
제 2항에 있어서,
상기 가교제는 이소시아네이트계 화합물, 에폭시계 화합물, 아지리딘계 화합물 및 금속 킬레이트계 화합물에서 1종 이상 선택되고, 상기 광개시제는 α-케톨계 화합물, 아세토페논계 화합물, 케탈계 화합물, 방향족 술포닐클로라이드계 화합물, 광활성 옥심계 화합물, 벤조페논계 화합물, 티오크산톤계 화합물, 캄포퀴논계 화합물, 할로겐화케톤계 화합물, 아실포스피녹시드계 화합물 및 아실포스포네이트계 화합물에서 1종 이상 선택되는 점착제 조성물의 제조방법.
The method of claim 2,
The crosslinking agent is at least one selected from isocyanate compound, epoxy compound, aziridine compound and metal chelate compound, and the photoinitiator is α-ketol compound, acetophenone compound, ketal compound, aromatic sulfonyl chloride compound Preparation of pressure-sensitive adhesive composition selected from the group consisting of photoactive oxime compounds, benzophenone compounds, thioxanthone compounds, camphorquinone compounds, halogenated ketone compounds, acylphosphinoxide compounds and acylphosphonate compounds Way.
제 4항에 있어서,
상기 히드록시기, 카르복실기 또는 글리시딜기를 갖는 (메타)아크릴레이트계 단량체 또는 이들의 혼합물은 C1~C14의 알킬기를 갖는 (메타)아크릴레이트계 단량체 100 중량부에 대하여 10 내지 30 중량부를 사용하는 점착제 조성물의 제조방법.
The method of claim 4, wherein
The pressure-sensitive adhesive composition using 10 to 30 parts by weight based on 100 parts by weight of the (meth) acrylate monomer having a hydroxy group, a carboxyl group or a glycidyl group, or a mixture thereof, based on an alkyl group of C1 to C14. Manufacturing method.
제 5항에 있어서,
상기 광경화 단량체는 히드록시기, 카르복실기 또는 글리시딜기를 갖는 (메타)아크릴레이트계 단량체 또는 이들의 혼합물 1.0 몰(mol)에 대하여 0.5 내지 1.0 몰(mol)을 사용하는 부가반응형 점착제 조성물의 제조방법.
6. The method of claim 5,
The photocurable monomer is a (meth) acrylate monomer having a hydroxyl group, a carboxyl group or a glycidyl group or 0.5 to 1.0 mol (mol) relative to 1.0 mol (mol) of a mixture thereof. .
제 1항에 있어서,
상기 a)단계 및 b)단계의 중합은 각각 질소분위기에서 50 내지 140 ℃에서 6 내지 12 시간동안 반응하여 수행하는 것인 점착제 조성물의 제조방법.
The method of claim 1,
The polymerization of step a) and step b) is carried out by reacting for 6 to 12 hours at 50 to 140 ℃ in a nitrogen atmosphere, respectively.
제 1항 내지 10항에서 선택되는 어느 한 항의 점착제 조성물의 제조방법을 이용하여 제조된 부가반응 점착제 조성물.An addition reaction pressure-sensitive adhesive composition prepared by using the method for preparing a pressure-sensitive adhesive composition of any one of claims 1 to 10. 제 11항에 있어서,
상기 부가반응 점착제 조성물을 필름에 코팅하여 제조된 점착필름.
12. The method of claim 11,
Pressure-sensitive adhesive film prepared by coating the addition reaction pressure-sensitive adhesive composition on a film.
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KR100922684B1 (en) * 2007-08-31 2009-10-19 제일모직주식회사 Photocuring Composition for Adhesive Layer and Dicing Die Bonding Film Comprising the Same

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KR20230060811A (en) * 2021-10-28 2023-05-08 한국화학연구원 UV-curable dismantling Pressure sensitive adhesive(PSA) composition and Manufacturing method thereof

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