KR20120025194A - Sulfonium salt and method of manufacturing the same - Google Patents

Abstract

PURPOSE: A sulfonium salt and a manufacturing method thereof are provided to control acid diffusion rate by introducing cycloaliphatic ring to negative ion. CONSTITUTION: A sulfonium salt is represented by chemical formula 1. In the chemical formula 1, A stands for C3-30 monocyclic or polycyclic hydrocarbon, B stands for hydroxyl group or hydrogen, and T stands for organic counter ion. A manufacturing method of the sulfonium salt comprises the following steps: manufacturing a compound which is represented by chemical formula 4; manufacturing a compound which is represented by chemical formula 5; manufacturing a compound which is represented by chemical formula 6; and reacting the chemical formula 6 compound with a compound which is represented by chemical formula 7 in solvent. The chemical formula 4 compound is manufactured by reacting two compounds which are represented by chemical formula 2 and 3. The chemical formula 5 is manufactured by reacting inorganic salt, Na2S2O4, with chemical formula 4 compound. The chemical formula 6 compound is manufactured by reacting chemical formula 5 compound in solvent.

Description

Sulfonium salt and method of manufacturing the same

The present invention relates to a sulfonium salt as a photoacid generator and a method for manufacturing the same, and more particularly, to a sulfonium salt suitable as a photoacid generator used as a chemically amplified resist composition used in a semiconductor process and a manufacturing method thereof. will be.

In semiconductor microfabrication using lithography, chemically amplified resist compositions generally include photoacid generators and photosensitive polymers that generate acids upon exposure. The chemically amplified resist undergoes a post-exposure heating process in which the heated acid component penetrates into the resist of the non-exposed portion, thereby increasing the solubility of the non-exposed portion, thereby changing the line width of the resist pattern, or causing the pattern to collapse or line edge roughness. It causes varnish (LER, line edge roughness).

Conventionally, amines or amide compounds are used as quenchers or additives in order to effectively control the acid generated by photoacid generators at the exposure sites. Excessive use of these compounds increases the light absorption and increases the optimal exposure energy. There is a disadvantage, which leads to a decrease in productivity of the exposure equipment. In addition, the finer the pattern, the more difficult it is to control the diffusion of acid generated from the photoacid generator, so that the line edge roughness tends to increase, thereby increasing the importance of reducing the line edge roughness and changing the line width due to the post-exposure heating temperature. It is becoming.

A lithography process that has been used to date is dry lithography, which uses an exposure system in which air is filled between the exposure lens and the wafer. In order to develop a 60nm device using dry lithography, a new exposure system using an F ₂ laser or an EUV laser as a light source must be used. When using an F ₂ laser, a pellicle is difficult to develop and an EUV laser is used. In case of use, there is a problem in developing a mask and a light source.

In order to solve the above problems, an immersion lithography process has been newly developed. Immersion lithography is a technique that improves resolution by filling any water soluble liquid between the final projection lens and the wafer and increasing the numerical aperture (NA) of the optical system by the refractive index of the liquid.

In particular, by using a 193 nm light source (ArF laser) and inserting a liquid having a refractive index higher than air, such as water and ethylene glycol, between the projection lens and the wafer, the numerical aperture NA of the projection lens can be designed to 1.0 or more. ArF immersion lithography is being used which can achieve high resolution.

However, since ArF immersion lithography is filled between the final projection lens and the wafer with an arbitrary water-soluble immersion lithography liquid such as water, not air, the photoacid generator, which constitutes the resist, is dissolved in the liquid for immersion lithography upon exposure. This occurs to cause contamination of the exposure lens and deformation of the formed resist pattern.

In order to improve this problem, the development by the modification of the anion side has been progressed in terms of improving the diffusion rate and transparency of the acid and reducing the elution to water. In addition, in recent years, the anion of the photoacid generator in connection with many experimental results that the anion side may have more influence than the cation side as a physical and chemical property substantially improving the fluidity of the acid and the physical properties of the resist composition. The invention of the part has been newly made, and this focuses on the invention of the photoacid generator which reduces the diffusion rate of acid and has good permeability for 193 nm ArF light source.

Therefore, attempts have been made to introduce a bulky alicyclic ring, a high carbon number alkyl type, an alkoxy type or an ether type to an anion of a suitable salt as a photoacid generator (Korean Patent Application No. 10-2006-0114104, 10-2007-0069049, 10-2005-0107599, 10-2007-0053619).

However, some of the materials in the patent document cause the phenomenon of the photoacid generator in the resist caused by the repulsion of the immersion solution of the excessive hydrophobic photoacid generator by the bulky alicyclic ring introduced to suppress the elution to water and have.

In recent research on resist composition, the photoacid generator has been focused on the invention of photoacid generator which reduces acid diffusion rate, good permeability to 193nm ArF light source, and reduces the phenomenon of photoacid generator in resist caused by repulsion against immersion solution. It is set.

In order to solve the above problems, the present invention provides a photoacid generator exhibiting a high permeability during the ArF light source transmission by adjusting the diffusion rate of the acid by introducing an alicyclic ring to the anion, and having a hydroxyl group in the anion It is an object of the present invention to provide a photoacid generator that can improve the pulling phenomenon of photoacid generators in a resist due to repulsion of an immersion solution of a photoacid generator by introducing a cycloaliphatic ring.

It is also an object of the present invention to provide a method for producing a sulfonium salt as a photoacid generator.

According to one aspect of the invention there is provided a sulfonium salt represented by the following formula (1).

[Formula 1]

(In Formula 1, A is a monocyclic or polycyclic hydrocarbon having 3 to 20 carbon atoms, B is a hydroxy group or hydrogen, and T is an organic counterion.)

According to an embodiment of the present invention, A may be a monocyclic hydrocarbon having 3 to 12 carbon atoms.

According to an embodiment of the present invention, A may be a bicyclic hydrocarbon having 6 to 20 carbon atoms.

According to an embodiment of the present invention, T may be a sulfonium cation.

According to another aspect of the invention, the first step of preparing a compound represented by the formula (4) by reacting the compound represented by the formula (2) and the compound represented by the formula (3) in a solvent in the presence of a catalyst;

[Formula 2]

(3)

[Formula 4]

(In Formulas 2 to 4, A is a monocyclic or polycyclic hydrocarbon having 3 to 30 carbon atoms, B is a hydroxy group or hydrogen, X is 1 selected from the group consisting of F, Cl, Br and I) It's a paper.)

A second step of preparing a compound represented by Chemical Formula 5 by reacting an inorganic salt, Na ₂ S ₂ O _4, and the compound represented by Chemical Formula 4 in a solvent;

[Chemical Formula 5]

(In Formula 5, A is a monocyclic or polycyclic hydrocarbon having 3 to 30 carbon atoms, B is a hydroxy group or hydrogen, and M is one selected from the group consisting of Na, Li, and K.)

A third step of preparing a compound represented by Chemical Formula 6 by reacting an oxidizing agent with the compound represented by Chemical Formula 5 in a solvent; And

[Formula 6]

(In Formula 6, A is a monocyclic or polycyclic hydrocarbon having 3 to 30 carbon atoms, B is a hydroxy group or hydrogen, and M is one selected from the group consisting of Na, Li, and K.)

A fourth step of reacting the compound represented by Chemical Formula 6 and the compound represented by Chemical Formula 7 in a solvent;

[Formula 7]

(In Formula 7, wherein T is an organic counterion, Z is one selected from the group consisting of O _S O ₂ CH ₃ , OSO ₂ C ₄ F ₉ , PF ₆ , F, Cl, Br and I. )

Provided is a method for preparing a sulfonium salt comprising a.

According to an embodiment of the present invention, A may be a monocyclic hydrocarbon having 3 to 12 carbon atoms.

According to an embodiment of the present invention, A may be a bicyclic hydrocarbon having 6 to 20 carbon atoms.

According to an embodiment of the present invention, T may be a sulfonium cation.

According to one embodiment of the invention, the reaction temperature of the first to fourth steps may be 0 ℃ to 100 ℃.

According to one embodiment of the invention, the solvent in the first step may be one selected from the group consisting of dichloromethane, chloroform and tetrahydrofuran.

According to one embodiment of the invention, in the first step, the catalyst is a Lewis acid, 1 to 50 mol% based on the compound represented by the formula (2) Can be added.

According to one embodiment of the present invention, the Lewis acid may be one selected from the group consisting of Cu (OTf) ₂ , BF ₃ (OEt ₂ ), AgOTf, ZnCl ₂ and TsOH.

According to one embodiment of the invention, the solvent in the second step may be one selected from the group consisting of water, acetonitrile, methanol and ethanol.

According to an embodiment of the present invention, in the second step, the inorganic salt may be one selected from the group consisting of NaCO ₃ , NaHCO ₃ , NaOH and KOH.

According to one embodiment of the invention, the solvent in the third step may be one selected from the group consisting of water, methanol and ethanol.

According to an embodiment of the present invention, in the third step, the oxidant may be hydrogen peroxide or perchloric acid.

According to one embodiment of the present invention, the solvent in the fourth step may be used alone or mixed with water using one selected from the group consisting of dichloromethane, chloroform, dichloroethane, methanol and ethanol.

The photoacid generator of the present invention can introduce the hydroxy group into the alicyclic ring, which can cause the photoacid generator in the resist caused by the repulsion to the immersion solution, and has excellent physical properties in terms of diffusion rate and dispersion. This allows control of the diffusion rate and the degree of dispersion in high resolution resist implementations.

The sulfonium salt according to the present invention is a sulfonium salt represented by the following formula (1).

[Formula 1]

In Formula 1, A is a monocyclic or polycyclic hydrocarbon having 3 to 30 carbon atoms, B is a hydroxy group or hydrogen, and T is an organic counterion.

In Formula 1, A may be a monocyclic hydrocarbon having 3 to 12 carbon atoms or a bicyclic hydrocarbon having 6 to 20 carbon atoms. The T may be a sulfonium cation as an organic counterion, preferably triphenylsulfonium cation.

The method for preparing the sulfonium salt according to the present invention includes the reaction of the first to fourth steps described in detail below.

Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms “comprise” or “have” are intended to indicate that there is a feature, number, step, or combination thereof described in the specification, but one or more other features or numbers, steps, or combinations thereof. It is to be understood that the existence or addition of ones is not excluded in advance.

First stage

Reaction for preparing the sulfonium salt according to the invention The reaction of the first step is carried out at 0 ℃ to 100 ℃, using one organic solvent selected from the group consisting of dichloromethane, chloroform and tetrahydrofuran, catalyst When the compound represented by the following formula (3) and the compound represented by the following formula (3) in the presence of the ring opening reaction occurs.

[Formula 2]

In Formula 2, A is a monocyclic or polycyclic hydrocarbon of 3 to 30, preferably a monocyclic hydrocarbon having 3 to 12 carbon atoms or a bicyclic hydrocarbon having 6 to 20 carbon atoms.

(3)

In Formula 3, X may be one selected from the group consisting of F, Cl, Br, and I.

The catalyst in this step uses a Lewis acid, the Lewis acid may be one selected from the group consisting of Cu (OTf) ₂ , BF ₃ (OEt ₂ ), AgOTf, ZnCl ₂ and TsOH. The Lewis acid is preferably added in an amount of 1 to 50 mol% based on the compound represented by Chemical Formula 2, and a compound represented by Chemical Formula 4 is prepared as a result of the reaction.

[Formula 4]

In Formula 4, A is a monocyclic or polycyclic hydrocarbon having 3 to 30, preferably a monocyclic hydrocarbon having 3 to 12 carbon atoms or a bicyclic hydrocarbon having 6 to 20 carbon atoms. B is a hydroxyl group or hydrogen, preferably a hydroxyl group. In addition, X may be one selected from the group consisting of X, F, Cl, Br and I.

2nd step

Reaction for preparing the sulfonium salt according to the present invention The reaction of the second step is carried out at 0 ℃ to 100 ℃, using one water-soluble solvent selected from the group consisting of water, acetonitrile, methanol and ethanol, inorganic to when salt as NaCO _3, NaHCO _3, NaOH, and the reaction with the compound represented one species and Na ₂ S ₂ O ₄ is selected from the group consisting of KOH in the general formula (4) to produce a compound represented by the formula (5).

[Chemical Formula 5]

In Formula 5, M is one selected from the group consisting of Li, Na, and K, and A is a monocyclic or polycyclic hydrocarbon of 3 to 30, preferably a monocyclic hydrocarbon or carbon number of 3 to 12 carbon atoms. Is a bicyclic hydrocarbon of 6 to 20. In addition, said B is a hydroxyl group or hydrogen, Preferably it is a hydroxyl group.

3rd step

Reaction for preparing the sulfonium salt according to the invention The reaction of the third step is carried out at 0 ℃ to 100 ℃, using a water-soluble solvent selected from the group consisting of water, methanol and ethanol, hydrogen peroxide ( When H ₂ O ₂ ) or perchloric acid (HClO ₄ ) is added and reacted with the compound represented by Chemical Formula 5, a compound represented by Chemical Formula 6 is prepared.

[Formula 6]

In Formula 6, M is one selected from the group consisting of Li, Na, and K, A is a monocyclic or polycyclic hydrocarbon of 3 to 30, preferably a monocyclic hydrocarbon having 3 to 12 carbon atoms or It is a bicyclic hydrocarbon of 6-20 carbon atoms. In addition, said B is a hydroxyl group or hydrogen, Preferably it is a hydroxyl group.

4th step

Reaction for preparing the sulfonium salt according to the present invention The reaction of the third step is carried out at 0 ℃ to 100 ℃, using one selected from the group consisting of dichloromethane, chloroform, dichloroethane, methanol and ethanol alone or When mixed with water and reacted with a compound represented by the following formula (7), a sulfonium salt represented by the following formula (1) as a target product of the present invention is prepared.

[Formula 7]

In Chemical Formula 7, T may be a sulfonium cation as an organic counterion, preferably triphenylsulfonium. The Z may be one selected from the group consisting of O _S O ₂ CH ₃ , OSO ₂ C ₄ F ₉ , PF ₆ , F, Cl, Br and I.

[Formula 1]

In Formula 1, T may be a sulfonium cation as an organic counterion, and preferably, triphenylsulfonium. A is a monocyclic or polycyclic hydrocarbon of 3 to 30, preferably a monocyclic hydrocarbon having 3 to 12 carbon atoms or a bicyclic hydrocarbon having 6 to 20 carbon atoms. In addition, said B is a hydroxyl group or hydrogen, Preferably it is a hydroxyl group.

The sulfonium salt prepared by the method according to the present invention is excellent in terms of diffusion rate and dispersion by mitigating the phenomenon of the photoacid generator in the resist caused by the reaction of the photoacid generator to the immersion solution by introducing an alicyclic ring to the anion. It is possible to provide a high resolution resist composition having physical properties to control the rate of diffusion and the degree of dispersion.

Hereinafter, the present invention will be described in more detail with reference to Examples. However, these Examples are only for illustrating the present invention, and the scope of the present invention will not be construed as being limited by these Examples.

Analysis method

Nuclear magnetic resonance spectra ( ¹ H NMR) 300 MHz (JEOL, NMR spectrometer) and mass spectrometer (Agilent , Mass spectrometer) were used to confirm the structure of the product obtained in this experiment.

Example  One: Triphenylsulfonium  1,1,2,2,- Tetrafluoro -4- (2- Hydroxycycle  Lohexyloxy) butane-1- Sulfonate  synthesis

1. 2- ( Bromo -3,3,4,4- Tetrafluorobutoxy ) Cyclohexanol  synthesis

1-bromo-1,1,2,2-tetrafluoro-4-butanol (0.05 mol, 11.3 g) and Cu (II) (OTf) ₂ (0.005 mol, 0.36 g) in a 300 ml reaction flask under nitrogen atmosphere After adding the dichloromethane (100ml) to prepare a mixture. To the mixture, cyclohexene oxide (0.05 mol, 4.7 g) was dissolved in dichloromethane (50 ml) and slowly added, followed by stirring at 25 ° C. for 2 hours. After the reaction, the mixture was filtered through silica gel, washed with water and saturated aqueous sodium chloride solution, dried, filtered and concentrated. The concentrate was purified by column chromatography on silica gel, yielding 45% of 2- (bromo-3,3,4,4-tetrafluorobutoxy) cyclohexanol [compound represented by formula 4a]: Obtained.

[Chemical Formula 4a]

¹ H-NMR (300 MHz, CDCl ₃ , δ): 1.12 to 1.28 (m, 4H), 1.66 to 1.71 (m, 2H), 1.97 to 2.07 (m, 2H), 2.36 to 2.45 (m, 2H), 2.60 (brs, 1H), 3.03-3.05 (m, 1H), 3.38-3.39 (m, 1H), 3.63-3.67 (m, 1H), 3.90-3.93 (m, 1H)

2. Sodium 1,1,2,2- Tetrafluoro -4- (2- Hydroxycyclohexyloxy Butane-1-sul Pinate Synthesis of

2- (bromo-3,3,4,4-tetrafluorobutoxy) cyclohexanol (0.025 mol, 7.98 g) was added to a 200 ml reaction flask, followed by H ₂ O (45 ml) and acetonitrile (30 ml). Into the mixture was prepared. NaHCO ₃ (0.5mol, 4.2g) and Na ₂ S ₂ O ₄ (0.5mol, 10.3g) were added to the mixture, followed by stirring at 65 ° C for 24 hours. After the reaction, the mixture was confirmed by thin layer chromatography (TLC, Thin-Layer Chromatography) (R _f : 0.33, CH ₂ Cl ₂ : CH ₃ OH = 10: 1) and the reaction was terminated. After the reaction, the mixture was concentrated, dissolved in ethyl acetate (CH ₃ CH ₂ COOCH ₃ ), filtered, and the filtrate was concentrated again to yield 85% sodium 1,1,2,2-tetrafluoro-4- (2- Hydroxycyclohexyloxy) butane-1-sulfinate [compound represented by Formula 5a] was obtained.

 [Formula 5a]

MS (m / z): Negative mode 307.1 (equivalent to C ₁₀ H ₁₅ F ₄ O ₄ S)

3. Sodium 1,1,2,2- Tetrafluoro -4- (2- Hydroxycyclohexyloxy Butane-1-sul Phonate Synthesis of

In a 200 ml reaction flask, H ₂ O (75 ml) was added to sodium 1,1,2,2-tetrafluoro-4- (2-hydroxy cyclohexyloxy) butane-1-sulfinate (0.02 mol, 6.53 g). Was added to prepare a mixture. 30% hydrogen peroxide (0.03mol, 3.8g) was added to the mixture, followed by stirring at 25 ° C for 4 hours. After the reaction, the mixture was confirmed by thin layer chromatography (TLC, Thin-Layer Chromatography) (R _f : 0.37, CH ₂ Cl ₂ : CH ₃ OH = 10: 1) and the reaction was terminated. After the reaction, the mixture was concentrated, ethyl acetate (CH ₃ CH ₂ COOCH ₃ ) was added to the concentrate, the mixture was stirred for 1 hour, filtered, and the filtrate was concentrated. N-hexane was added to the concentrate, and the obtained crystals were filtered to give 72% of sodium 1,1,2,2-tetrafluoro-4- (2-hydroxycyclohexyloxy) butane-1-sulfonate. Compound represented by 6a] was obtained.

 [Formula 6a]

MS (m / z): Negative mode 323.1 (equivalent to C ₁₀ H ₁₅ F ₄ O ₅ S)

4. Triphenylsulfonium  1,1,2,2- Tetrafluoro -4- (2- Hydroxycyclohexyl  Oxy) butane-1- Sulfonate  synthesis

Sodium 1,1,2,2-tetrafluoro-4- (2-hydroxy cyclohexyloxy) butane-1-sulfonate (0.01 mol, 3.42 g), methanol (50 ml) and triphenyl in a 200 ml reaction flask Sulfonium chloride (0.01 mol, 2.98 g) was added thereto, stirred at 25 ° C. for 3 hours, and concentrated. The concentrate was purified by column chromatography on silica gel to yield 75% of triphenylsulfonium 1,1,2,2-tetrafluoro-4- (2-hydroxycyclohexyloxy) butane-1-sulfo Nate [compound represented by Formula 1a] was obtained.

[Formula 1a]

¹ H-NMR (300MHz, CDCl ₃ , δ): 1.07-1.25 (m, 4H), 1.66-1.71 (m, 2H), 2.00-2.09 (m, 2H), 2.59-2.72 (m, 2H), 3.03 ? 3.09 (m, 1H), 3.34? 3.37 (m, 1H), 3.63? 3.71 (m, 1H), 3.90? 3.98 (m, 1H), 7.71? 7.75 (m, 15H)

MS (m / z): Positive mode 263.1 (equivalent to (C ₆ H ₅ ) ₃ S), negative mode 323.1 (equivalent to C ₁₀ H ₁₅ F ₄ O ₅ S)

Example  2: Triphenylsulfonium  1,1,2,2- Tetrafluoro -4- (3- Hydroxybicyclo [2,2,1] heptane -2- Iloxy Butane-1- Sulfonate  synthesis

1. 2- ( Bromo -3,3,4,4- Tetrafluorobutoxy ) Bicyclo [2.2.1] heptan-2- Up of  synthesis

1-bromo-1,1,2,2-tetrafluoro-4-butanol (0.05 mol, 11.3 g) and Cu (II) (OTf) ₂ (0.005 mol, 0.36 g) in a 300 ml reaction flask under nitrogen atmosphere After adding the dichloromethane (100ml) to prepare a mixture. To this mixture, 2,3-epoxynobonan (0.05 mol, 5.5 g) was dissolved in dichloromethane (50 ml) and slowly added, followed by stirring at 25 ° C. for 2 hours. The reaction mixture was filtered through silica gel, washed with water and saturated aqueous sodium chloride solution, then dried, filtered and concentrated. The concentrate was purified by column chromatography on silica gel to yield 47% 2- (bromo-3,3,4,4-tetrafluorobutoxy) bicyclo [2.2.1] heptan-2-ol [ Compound represented by the following formula (4b)] was obtained.

[Formula 4b]

¹ H-NMR (300 MHz, CDCl ₃ , δ): 0.87-0.96 (m, 1H), 0.99-0.07 (m, 1H), 1.43-1.61 (m, 2H), 1.74-1.91 (m, 2H), 2.28 ? 2.32 (m, 2H), 2.36-2.44 (m, 2H), 3.20 (brs, 1H), 3.58-3.60 (m, 1H), 3.71 (t, J = 6.75 Hz, 2H), 3.89 (s, 1H )

2. Sodium 1,1,2,2- Tetrafluoro -4- (3- Hydroxybicyclo [2.2.1] heptane -2- Iloxy Butane-1- Sulfinate  synthesis

To a 200 ml reaction flask was added 3- (4-bromo-3,3,4,4-tetrafluorobutoxy) bicyclo [2.2.1] heptan-2-ol (0.025 mol, 8.38 g) and H ₂ O (45ml) and acetonitrile (30ml) were added to prepare a mixture. To this mixture NaHCO ₃ (0.5 mol, 4.2 g) and Na ₂ S ₂ O ₄ (0.5 mol, 10.3 g) was added and stirred at 65 ° C for 24 hours. After the reaction, the mixture was confirmed by thin layer chromatography (TLC, Thin-Layer Chromatography) (R _f : 0.41, CH ₂ Cl ₂ : CH ₃ OH = 10: 1) to terminate the reaction. After the reaction, the mixture was concentrated, dissolved in ethyl acetate (CH ₃ CH ₂ COOCH ₃ ), filtered, and the filtrate was concentrated again to yield 75% of sodium 1,1,2,2-tetrafluoro-4- (3-hydride). Roxybicyclo [2.2.1] heptan-2-yloxy) butane-1-sulfinate [Compound represented by Formula 5b] was obtained.

[Formula 5b]

MS (m / z): Negative mode 319.1 (equivalent to C ₁₁ H ₁₅ F ₄ O ₄ S)

3. Sodium 1,1,2,2- Tetrafluoro -4- (3- Hydroxybicyclo [2.2.1] heptane -2- Iloxy Butane-1- Sulfonate  synthesis

Sodium 1,1,2,2-tetrafluoro-4- (3-hydroxybicyclo [2.2.1] heptan-2-yloxy) butane-1-sulfinate (0.02 mol, 6.85 g) in 200 ml reaction flask ) Was added to H ₂ O (75 ml) to make a mixture. 30% hydrogen peroxide (0.03mol, 3.8g) was added to the mixture, followed by stirring at 25 ° C for 4 hours. After the reaction, the mixture was confirmed by thin layer chromatography (TLC, Thin-Layer Chromatography) (R _f : 0.45, CH ₂ Cl ₂ : CH ₃ OH = 10: 1) to terminate the reaction. After the reaction, the mixture After concentration, ethyl acetate (CH ₃ CH ₂ COOCH ₃ ) was added to the concentrate, followed by stirring for 1 hour, followed by filtration. The filtrate was concentrated. N-hexane was added to the concentrate, and the obtained crystals were filtered to give 69% sodium 1,1,2,2-tetrafluoro-4- (3-hydroxybicyclo [2.2.1] heptan-2-yloxy. ) Butane-1 -sulfonate [Compound represented by Formula 6b] was obtained.

 [Formula 6b]

MS (m / z): Negative mode 335.1 (equivalent to C ₁₁ H ₁₅ F ₄ O ₅ S)

4. Triphenylsulfonium  1,1,2,2- Tetrafluoro -4- (3- Hydroxycyclo  [2.2.1] heptan-2- Iloxy Butane-1- Sulfonate  synthesis

Sodium 1,1,2,2-tetrafluoro-4- (3-hydroxybicyclo [2.2.1] heptan-2-yloxy) butane-1-sulfonate (0.01 mol, 3.58 g) in a 200 ml reaction flask ), Methanol (50 ml) and triphenylsulfonium chloride (0.01 mol, 2.98 g) were added thereto, stirred at 25 ° C. for 3 hours, and then concentrated. The concentrate was purified by column chromatography on silica gel to yield 45% triphenylsulfonium 1,1,2,2-tetrafluoro-4- (3-hydroxybicyclo [2.2.1] heptane-2. -Yloxy) butane-1-sulfonate [compound represented by formula 1b] was obtained.

[Chemical Formula 1b]

¹ H-NMR (300 MHz, CDCl ₃ , δ): 0.85-1.02 (m, 2H), 1.42-1.54 (m, 2H), 1.68-1.75 (m, 1H), 1.82-1.86 (m, 1H), 2.10 2.15 (m, 2H), 2.52-2.69 (m, 2H), 3.54-3.56 (m, 1H), 3.69 (t, J = 6.75 Hz, 2H), 3.83 (s, 1H), 7.64-7.75 (m , 15H)

MS (m / z): Positive mode 263.1 (equivalent to (C ₆ H ₅ ) ₃ S), negative mode 335.1 (equivalent to C ₁₁ H ₁₅ F ₄ O ₅ S)

While the present invention has been particularly shown and described with reference to specific embodiments thereof, those skilled in the art will appreciate that such specific embodiments are merely preferred embodiments and that the scope of the present invention is not limited thereby. something to do. Thus, the substantial scope of the present invention will be defined by the appended claims and their equivalents.

Claims (18)

Sulfonium salt represented by the following formula (1).
[Formula 1]

(In Formula 1, A is a monocyclic or polycyclic hydrocarbon having 3 to 30 carbon atoms, B is a hydroxy group or hydrogen, and T is an organic counterion.)
The method of claim 1,
A is a sulfonium salt, characterized in that a monocyclic hydrocarbon having 3 to 12 carbon atoms.
The method of claim 1,
A is a sulfonium salt, characterized in that a bicyclic hydrocarbon having 6 to 20 carbon atoms.
The method of claim 1,
T is a sulfonium salt, characterized in that the sulfonium cation.
A first step of preparing a compound represented by the following Chemical Formula 4 by reacting the compound represented by the following Chemical Formula 2 with the compound represented by the following Chemical Formula 3 in a solvent in the presence of a catalyst;
(2)

(3)

[Chemical Formula 4]

(In Formulas 2 to 4, A is a monocyclic or polycyclic hydrocarbon having 3 to 30 carbon atoms, B is a hydroxy group or hydrogen, X is 1 selected from the group consisting of F, Cl, Br and I) It's a paper.)
A second step of preparing a compound represented by Chemical Formula 5 by reacting an inorganic salt, Na ₂ S ₂ O _4, and the compound represented by Chemical Formula 4 in a solvent;
[Chemical Formula 5]

(In Formula 5, A is a monocyclic or polycyclic hydrocarbon having 3 to 30 carbon atoms, B is a hydroxy group or hydrogen, and M is one selected from the group consisting of Na, Li, and K.)
A third step of preparing a compound represented by Chemical Formula 6 by reacting an oxidizing agent with the compound represented by Chemical Formula 5 in a solvent; And
[Formula 6]

(In Formula 6, A is a monocyclic or polycyclic hydrocarbon having 3 to 30 carbon atoms, B is a hydroxy group or hydrogen, and M is one selected from the group consisting of Na, Li, and K.)
A fourth step of reacting the compound represented by Chemical Formula 6 and the compound represented by Chemical Formula 7 in a solvent;
[Formula 7]

(In Formula 7, wherein T is an organic counterion, Z is one selected from the group consisting of O _S O ₂ CH ₃ , OSO ₂ C ₄ F ₉ , PF ₆ , F, Cl, Br and I. )
Method for producing a sulfonium salt comprising a.
6. The method of claim 5,
A is a method for producing a sulfonium salt, characterized in that a monocyclic hydrocarbon having 3 to 12 carbon atoms.
6. The method of claim 5,
A is a method for producing a sulfonium salt, characterized in that a bicyclic hydrocarbon having 6 to 20 carbon atoms.
6. The method of claim 5,
T is a sulfonium salt, characterized in that the sulfonium cation.
6. The method of claim 5,
The reaction temperature of the first to fourth steps is a method for producing a sulfonium salt, characterized in that 0 ℃ to 100 ℃.
6. The method of claim 5,
The solvent in the first step is a method for producing a sulfonium salt, characterized in that one selected from the group consisting of dichloromethane, chloroform and tetrahydrofuran.
6. The method of claim 5,
In the first step, the catalyst is a Lewis acid, the method for producing a sulfonium salt, characterized in that added to 1 to 50 mol% based on the compound represented by the formula (2).
12. The method of claim 11,
The Lewis acid is a method for producing a sulfonium salt, characterized in that one selected from the group consisting of Cu (OTf) ₂ , BF ₃ (OEt ₂ ), AgOTf, ZnCl ₂ and TsOH.
6. The method of claim 5,
The solvent in the second step is a method for producing a sulfonium salt, characterized in that one selected from the group consisting of water, acetonitrile, methanol and ethanol.
6. The method of claim 5,
In the second step, the inorganic salt is a method for producing a sulfonium salt, characterized in that one selected from the group consisting of NaCO ₃ , NaHCO ₃ , NaOH and KOH.
6. The method of claim 5,
The solvent in the third step is a method for producing a sulfonium salt, characterized in that one selected from the group consisting of water, methanol and ethanol.
6. The method of claim 5,
In the third step, the oxidizing agent is a method of producing a sulfonium salt, characterized in that hydrogen peroxide or perchloric acid.
The method of claim 5.
The solvent in the fourth step is a method for producing a sulfonium salt, characterized in that one selected from the group consisting of dichloromethane, chloroform, dichloroethane, methanol and ethanol alone or mixed with water.
The method of claim 5,
The sulfonium salt is a sulfonium salt production method characterized in that the sulfonium salt represented by the following formula (1).
[Formula 1]

(In Formula 1, A is a monocyclic or polycyclic hydrocarbon having 3 to 30 carbon atoms, B is a hydroxy group or hydrogen, and T is an organic counterion.)