KR20110122944A - Apparatus for detecting flaws in reflector - Google Patents

Apparatus for detecting flaws in reflector Download PDF

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Publication number
KR20110122944A
KR20110122944A KR1020100042315A KR20100042315A KR20110122944A KR 20110122944 A KR20110122944 A KR 20110122944A KR 1020100042315 A KR1020100042315 A KR 1020100042315A KR 20100042315 A KR20100042315 A KR 20100042315A KR 20110122944 A KR20110122944 A KR 20110122944A
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light
inspection object
unit
light receiving
defect
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KR1020100042315A
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Korean (ko)
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KR101185075B1 (en
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강정수
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주식회사 지노이드
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8858—Flaw counting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)

Abstract

PURPOSE: A device for detecting defects of a target with a reflective characteristic is provided to stably detect defects due to a light spreading unit between a target and a light receiving unit even if surroundings change. CONSTITUTION: A device(10) for detecting defects of a target with a reflective characteristic comprises a light transmitting unit(100), a driving unit(105), a light receiving unit(110), a light spreading unit(120), a converter(140), and a control unit(150). The light transmitting unit consists of single light-transmitting element and triggers a spot size of optical beam to a target. The driving unit is driven so that the light transmitting element is scanned. The light receiving unit consists of a plurality of light receiving elements and is arranged where optical beam scanned from the light transmitting unit is reflected by the target and progresses.

Description

Apparatus for detecting flaws in reflector

The present invention relates to a defect detecting apparatus, and more particularly, to an apparatus for accurately detecting a defect of an inspection object having reflection characteristics by using a reflection type optical sensor for a reflector.

Currently, the glass-related industry continues to grow with the development of the display industry such as LCD. In addition, as the display is enlarged, the glass substrate is also enlarged, and the thickness of the glass is also thinned for cost reduction and technology improvement. Accordingly, when a glass substrate is damaged in a glass manufacturing process and a display manufacturing process using a large glass substrate, when the glass substrate is not detected and proceeds to the final process of the display manufacturing, the production yield is lowered. There is a problem that the overall manufacturing cost is increased. In addition, when glass fragments, etc., occur due to the damage of the glass substrate, there is also a problem of contaminating manufacturing process equipment disposed in the workplace.

On the other hand, in order to determine whether or not the surface of the general object does not have reflection characteristics of the damage, by scanning a small optical beam, such as a laser to the surface of the object, by detecting the light emitted by the small light beam diffused from the object In addition, determine whether the object is damaged. However, in the case of a reflector having a reflective property such as glass, when light is incident on the surface, the light is reflected only in the direction of the reflection angle with respect to the incident angle according to the law of reflection of light, and thus cannot be diffused. Therefore, when the above-described method of detecting a defect of an object using a laser optical beam, which is spot illumination, is applied to a reflector such as a glass substrate, when the glass substrate vibrates or a displacement occurs due to a change in the surrounding environment, The position at which the beam is incident on the glass substrate changes. As a result, as the position incident on the glass substrate changes, the direction reflected from the glass substrate also changes, making it difficult for the light receiving element to integrate the optical beam reflected from the glass substrate. In particular, as the glass substrate becomes larger in size and thinner in recent years, the glass substrate vibrates greatly even when a small change occurs in the surrounding environment. Therefore, when the above-described method is applied to a glass substrate, which is a reflector, it is difficult to integrate the optical beam reflected from the glass substrate, and a problem arises in that it is impossible to perform stable sensing regardless of the surrounding environment.

Accordingly, in order to detect defects of a reflector such as a glass substrate, conventionally, an ultrasonic sensor, a diffuse reflection type optical sensor using an LED, an image pattern analysis by camera imaging, and the like are used.

First, since the ultrasonic sensor has a large detection area, the method of using the ultrasonic sensor can accurately determine the presence or absence of a glass substrate, but there is a problem in that partial breakage of the glass substrate cannot be determined. Moreover, the image pattern analysis method by camera imaging has many weak points in manufacturing cost, installation environment, processing time, etc.

The method of using the diffuse reflection type optical sensor using the LED is a method of detecting the reflected light after scanning the light in a fairly wide range using the LED. In this regard, Korean Patent Laid-Open Publication No. 10-2006-53847 discloses a method for inspecting a defect of a glass plate using a red, blue, and green LED as a light source. However, the LED light source has a problem that the distance between the light source and the inspection object should be minimized in order to detect an accurate defect on the inspection object as the area to be scanned becomes wider from the light source.

An object of the present invention for solving the above-described problems, by using a spot size laser beam to be scanned, an inspection object defect detection device that can quickly and accurately detect the defects of the cut surface of the inspection object having a reflection characteristic such as glass, etc. Is to provide.

Another object of the present invention is to detect the defects of the inspection object that can accurately detect the defects of the cutting surface of the inspection object having a reflective characteristic such as glass, even if a change in the surrounding environment such as vibration, etc. using a spot size laser beam to be scanned It is to provide a device.

A feature of the present invention for achieving the above-described technical problem relates to an apparatus for detecting a defect of an inspection object having a reflective characteristic, comprising a single light transmitting element, for scanning a spot-sized optical beam into the inspection object A light transmitting unit; A light emitting element driver for driving the light emitting element to be scanned; A light receiving unit comprising a plurality of light receiving elements, the light receiving unit being disposed at a position where the optical beam scanned from the light transmitting unit is reflected by the inspection object; A light diffusion unit disposed to be spaced apart from the light receiving surface of the light receiving unit by a predetermined distance, and configured to transmit and scatter light incident from the outside to the light receiving unit; A converter for converting the sensing signals input from the plurality of light receiving elements into digital signals and outputting the digital signals; And a control unit configured to provide a control signal for scanning the light emitting device to the light emitting device driver, and determine whether there is a defect in the cut plane of the inspection object by using a detection signal received from the converter. And,

The control unit scans the light transmitting element through the light transmitting element driver to sequentially scan the optical beam, and simultaneously receives the detection signals from the light receiving unit through the converter, and detects the defects of the cutting plane of the inspection object using the input detection signals. Detect.

In the inspection object defect detection device having a reflection characteristic according to the above-mentioned characteristics, the control unit is driven to scan the light-transmitting unit, while receiving the detection signal from the light-receiving unit sequentially while scanning the light-transmitting unit, the scanning time and By synchronizing the reception time of the detection signal input from the light receiving unit, and scanning the light transmitting unit to determine the presence or absence of the reflected light reflected from the inspection object using the detection signal sequentially input from the light receiving unit, the presence or absence of the reflected light is detected It is preferable that the position of the defect of the inspection object is calculated using the reception time.

In the inspection object defect detection device having a reflection characteristic according to the above-mentioned characteristics, the detection signal input from the light receiving unit to the control unit is preferably the sum of the signals detected by the plurality of light receiving elements constituting the light receiving unit at the same time. Do.

In the inspection object defect detection device having a reflection characteristic according to the above-described characteristics, The control unit determines the presence or absence of the reflected light based on the presence or absence of the detection signal, or determine the presence or absence of the reflected light based on a preset threshold value Do.

In the inspection object defect detection device having a reflection characteristic according to the above-described characteristics, the control unit is configured to determine the scanning speed of the light emitting device, the time (t) the presence or absence of reflected light is detected, and the initial position value (s 0 ) of the light emitting device. It is preferable to calculate the position of the defect of the inspection object by using.

In the inspection object defect detection device having a reflection characteristic according to the above-mentioned characteristics, the defect detection device further comprises a light integration element disposed between the light diffusion unit and the light receiving unit, the light integration element is transmitted through the light diffusion unit It is preferable to focus the scattered light in the direction of the light receiving unit.

In the inspection object defect detection device having a reflection characteristic according to the above-mentioned characteristics, it is preferable that the optical integration element is composed of any one of a lens, a prism and a prism sheet.

In the inspection object defect detection device having a reflection characteristic according to the above-mentioned characteristics, it is preferable that the inspection object defect detection device detects a defect with respect to the cut surface of the inspection object.

Conventional optical sensors using LEDs have a detection distance of several mm to several tens of millimeters, while an inspection object defect detecting device having reflection characteristics according to the present invention uses a spot size laser optical beam, Even when the detection distance, which is a separation distance, is 200 to 230 mm, accurate and stable detection can be performed.

In addition, the inspection object defect detection device having a reflection characteristic according to the present invention can introduce a light diffusing portion between the inspection object and the light receiving element, it is possible to perform a stable detection even if a change in the surrounding environment such as vibration or displacement occurs.

The defect detecting apparatus according to the present invention comprises a light transmitting unit by a laser scanning method, it is possible to detect the cutting surface of the inspection object in real time high speed in a fixed installation state.

In addition, the defect detecting apparatus according to the present invention can accurately calculate and determine the position of the object to be inspected using the scanning speed of the light transmitting element and the time when the presence or absence of the reflected light is detected.

In addition, the defect detecting apparatus according to the present invention uses an auto-teaching technique, which is a technique for automatically detecting a defect, and synchronizes the optical beam scanning time of the light transmitting portion with the detection signal of the light receiving portion, thereby detecting a defect. Environmental impact can be minimized.

In the defect detecting apparatus according to the present invention, by disposing a light integrated device between the light diffusing unit and the light receiving element, the light scattered by the light diffusing unit can be integrated in the direction of the light receiving element. Since the light scattered by the light diffusing unit is scanned in a wide area, the intensity of light per unit area becomes small, so that accurate detection is performed when external light incident to the light receiving element other than the light reflected from the inspection object occurs. Becomes difficult. Therefore, when the scattered light is integrated by using the light integrated device to increase the intensity of the received light, damage of the inspection object can be detected more accurately.

1 is a block diagram of an inspection object defect detection apparatus having a reflection characteristic according to a first embodiment of the present invention.
FIG. 2 is a front view schematically showing an inspection object defect detecting apparatus having reflective characteristics according to a first embodiment of the present invention.
3 is a perspective view exemplarily illustrating an inspection object defect detecting apparatus having reflective characteristics according to a first exemplary embodiment of the present invention.
4 is a cross-sectional view showing an inspection object defect detection device having a reflection characteristic according to a first embodiment of the present invention.
FIG. 5 is a cross-sectional view illustrating the path of the optical beam of the optical sensor to / from the glass substrate as the substrate shakes in the inspection object defect detecting apparatus having the reflective characteristic according to the first embodiment of the present invention. .
6 is a cross-sectional view showing an inspection object defect detection device having a reflective characteristic according to a second embodiment of the present invention.
FIG. 7 is a cross-sectional view illustrating a path of an optical sensor of an optical sensor to / from a glass substrate as the substrate shakes in the inspection object defect detecting apparatus having the reflective characteristic according to the second embodiment of the present invention. .

Hereinafter, with reference to the accompanying drawings will be described in detail the structure and operation method of the inspection object defect detection device having a reflective characteristic according to an embodiment of the present invention.

First embodiment

1 is a block diagram of an inspection object defect detection apparatus having a reflective characteristic according to a first embodiment of the present invention. Referring to FIG. 1, the inspection object defect detecting apparatus 10 having the reflective characteristic according to the present invention includes a light transmitting unit 100, a light transmitting element driving unit 105, a light receiving unit 110, a light diffusing unit 120, and a converter ( 140), a controller 150 and a housing (not shown). The housing serves as a case in which the light transmitting unit 100, the light transmitting element driving unit 105, the light receiving unit 110, the light diffusing unit 120, the converter 140, and the control unit 150 are disposed to be fixed.

The light transmitting part 100 is composed of an optical element for scanning an optical beam of the spot size, such as a laser, the light transmitting part 100 scans an optical beam of a spot size, such as a laser to the cutting plane of the inspection object.

The light emitting device driver 105 is configured as a stepper motor or a vibration motor, and is connected to the light transmitting device of the light transmitting part. The light emitting device driver is driven according to a control signal provided from the controller 150 to scan the light transmitting device.

As shown in FIGS. 2 to 3, the light receiving unit 110 includes a plurality of light receiving elements 111, 112, 113, 114, 115, and 116 and is disposed at a position adjacent to the light transmitting unit 100. do. Each of the light receiving elements 111, 112, 113, 114, 115, and 116 of the light receiving unit 110 is used to detect light reflected from the light projecting unit 100 and reflected from the inspection object, and is configured as a photo detector. Can be. Each of the light receiving elements 111, 112, 113, 114, 115, and 116 of the light receiving unit 110 may be positioned in a direction in which light emitted from the light transmitting unit 100 is reflected by the inspection object and travels. .

The light diffusing unit 120 may be composed of a diffusing film having light transmitting and scattering properties, and the structure thereof may be seen with reference to FIG. 3. The light receiving elements 111, 112, 113, 114, and 115 may be used. , 116 is disposed in front of the light receiving surface. The light diffuser 120 diffuses the light reflected from the inspection object and provides the light to the light receiver 110.

 The converter 140 converts the detection signal from the light receiver 110 into a digital signal and provides the converted signal to the controller 150. The converter 140 is structured and positioned so as to operate together with the light receiver 110, and thus the structure is not illustrated in FIGS. 2 to 4.

The controller 150 determines whether there is a defect in the inspection object by using the detection signal received from the converter 140.

Hereinafter, a process of determining whether the controller 150 is defective will be described in detail. In particular, the defect detecting apparatus according to the present invention is for inspecting the cut surface of the inspection object, which is a reflector such as glass, etc., characterized in that it checks whether the cut surface is correctly cut and detects and provides a position that is not cut properly.

FIG. 2 is a front view schematically showing an inspection object defect detecting apparatus having reflective characteristics according to a first embodiment of the present invention. Referring to FIG. 2, the light transmitting part 100 includes one light transmitting element 101, and the light transmitting element 101 is scanned according to a control signal of the control unit 150, and then the optical beam is cut onto the cut surface of the inspection object. Are injected sequentially. At this time, the control unit 150 stores the light emitting element initial position value of the scanning time and the initial scanning time (t 0 ) that the light transmitting element 101 scans the optical beam.

Next, the controller synchronizes the detection signal with the scanning time of the light emitting element 101 stored in the memory of the controller 150.

The controller determines the presence or absence of reflected light based on the presence or absence of a detection signal in order to detect a defect in the cut surface of the inspection object. For example, in the detection signal that is sequentially input to the light receiving portion 110, the entire time range other than the specific time (t = t 1) detection signal is present, and not in the detection signal is present, a specific time (t = t 1) If not (or vice versa), it can be inferred that there is a defect in the object in the location region at that particular time (t). In this case, as described above, when the detection signal does not exist only at a specific time t 1 , the defect of the cutting plane of the inspection object is broken in. When the detection signal exists only at the specific time t, the cutting plane of the inspection object This is the case when the defect of protrudes outwards.

Another embodiment of the method in which the control unit detects a defect in the cut surface of the inspection object is to set a threshold value in advance and determine the presence or absence of reflected light based on the threshold value. For example, when the detection signal is larger than the threshold value, it is determined that the reflected light exists. On the contrary, when the detection signal is smaller than the threshold value, the reflected light does not exist. The method for detecting the presence or absence of a defect according to the presence or absence of reflected light is omitted since it overlaps with the above description.

After determining whether there is a defect in the cutting plane of the inspection object according to the presence or absence of the reflected light, the controller 150 calculates the position of the defect. The controller 150 calculates the exact position of the detected defect in the following method. According to a control signal of the controller 150, the light transmitting element 101 is scanned at a preset scanning speed (v = s / t). In order to calculate the position at which the defect is detected, the reception time t 1 of receiving a detection signal corresponding to the detected defect is multiplied by the scanning speed v = s / (t 1 -t 0 ), The distance d of the light transmitting element moved from the initial time t 0 to the reception time t 1 may be known. However, for convenience of calculation, the time t 0 at the initial position of the light transmitting element is set to zero. Since the speed of light is very fast at 3 × 10 8 m / s, there is almost no time difference in the path of the light that is scanned and reflected to the inspection object, and thus the time when the optical beam is scanned by the light transmitting element 101 and the Assuming that the reception time detected by the light receiving unit 110 is the same, it can be seen that the movement distance calculated above accurately represents the position of the defect of the inspection object. At this time, if the light emitting device has a value of S 0 other than the initial position of the inspection object as a reference, the initial position s 0 should be calculated by adding the initial position s 0 to the calculated moving distance in order to calculate the exact position of the inspection object defect. do. That is, the expression representing the exact position of the defect to be inspected is s = s 0 + v / (t 1 -t 0 ).

In addition, since the scanning method of the light transmitting element 101 is a serial method, high-speed detection of a defect of the inspection object is possible.

On the other hand, the control unit may add up all the sensing signals detected by the light receiving unit 110, and detect the defects of the cut surface of the inspection object by using the summed signals. The summing of the sensing signals may be configured with a simpler logic structure than using each of the sensing signals, and may sensitively receive the sensing signal whose intensity is weakened while passing through the light diffusion unit 120.

In the above, the process of determining whether the control unit is one of the structures and components of the inspection object defect detection apparatus having the reflective characteristic according to the first embodiment of the present invention has been described in detail.

Hereinafter, an operation method of the inspection object detection device having the reflection characteristic according to the first embodiment of the present invention having the above-described configuration will be described in detail.

The inspection object defect detecting apparatus 10 according to the first embodiment of the present invention having the above-described configuration facilitates the integration of reflected light even if the inspection object vibrates or displacements occur, thereby changing the position and direction. 3 is a perspective view exemplarily illustrating an inspection object defect detecting apparatus having reflective characteristics according to a first exemplary embodiment of the present invention. Referring to FIG. 3, the inspection object defect detecting device is provided as a light receiving unit 110 disposed around the light transmitting unit 100 and sensing light. In the above-described configuration, the light diffusing unit 120 is disposed in front of the light receiving unit, and the converter, the control unit, and the light emitting device driver may be designed at any position inside and outside, and thus are not particularly illustrated. The light scanned by the light transmitting part 100 is reflected on the inspection object and transmitted through the light diffusing part 120 to be received by the light receiving unit 110 in the same manner in all areas of the inspection object defect detecting device 10. Therefore, the inspection object defect detection apparatus 10 according to the present invention to describe the operation in one cross section AA 'to represent the operation in all areas.

FIG. 5 is a cross-sectional view showing a path in which an optical beam travels in various environments in the inspection object defect detecting device 10 having reflective characteristics according to the first embodiment. Referring to FIG. 5, the light transmitting part 100 of the defect detecting apparatus 10 scans light having a specific incident angle θ i to a glass substrate a1 that is an inspection object having reflective characteristics. Unlike other inspection objects that diffuse the incident light, the inspection object having reflection characteristics has a reflection angle (θ r = θ i having the same size as a specific incident angle θ i with respect to the surface of the inspection object according to the law of reflection). ) To reflect light. The reflected light is transmitted through the light diffusing unit 120 of the optical sensor 10 to be scattered, and is spread to a wider area than the conventional spot sized optical beam and irradiated to the light receiving unit 110.

On the other hand, when the positions of the inspection objects a2 and a3 change due to environmental changes such as vibration or displacement, the reflection direction of the light reflected from the inspection object is changed. At this time, unlike the conventional optical sensor that could not detect the reflected light when it is out of the detection area of the light receiving unit 110 by the change in the direction of the reflected light, the defect detection device 10 according to the present invention is light diffusion The light scattered by the unit 120 is irradiated to the plurality of light receiving elements 111, 112, 113, 114, 115, and 116. Therefore, the inspection object defect detection apparatus 10 according to the present invention can be accurately detected even if a change in the surrounding environment, such as shaking of the glass substrate occurs.

2nd Example

Hereinafter, with reference to the accompanying drawings will be described in detail the structure and operation of the inspection object defect detection device having a reflection characteristic according to a second embodiment of the present invention. The inspection object defect detecting apparatus having the reflection characteristic according to the second embodiment has a structure similar to the inspection object defect detecting apparatus according to the first embodiment, except that the optical integrating element is further provided between the light diffusing unit and the light receiving unit. It features. Since the structure of the optical integrated device can be confirmed only in the cross-sectional view of the inspection object defect detecting device having the reflective characteristic according to the second embodiment of the present invention, it will be described with reference to FIGS. 6 to 7. Referring to FIG. 6, an inspection object defect detecting apparatus 60 having reflective characteristics according to a second exemplary embodiment of the present invention may include a light transmitting unit 600, a light transmitting element driver (not shown), a light receiving unit 610, and light diffusion. A unit 620, an optical integrated device 630, a converter (not shown), a controller (not shown) and a housing (not shown) are provided. In the second embodiment, the rest of the components except for the light integrated element 630 are the same as those of the first embodiment, and overlapping description thereof will be omitted.

 The light integrated device 630 of the second embodiment includes one of a lens, a prism, and a prism sheet, and is disposed between the light diffuser 620 and the light receiver 610. The light integrating element 630 serves to condense the light scattered by the light diffusing unit 620 to condense in the direction in which the light receiving elements 611, 612, 613, 614, 615, and 616 are located.

The inspection object defect detecting device 60 having the reflection characteristic according to the second embodiment of the present invention having the above-described configuration can accurately detect even if noise such as external light other than the light reflected from the inspection object occurs. Will be. FIG. 7 is a cross-sectional view showing a path in which an optical beam travels in various environments in the inspection object defect detecting device 60 having reflective characteristics according to the second embodiment. In the second embodiment, the description is the same as those in the first embodiment except for the path of the optical beam propagation in the optical integration element, and thus the overlapping description is omitted.

Referring to FIG. 7, the light scattered from the light diffusing unit 620 is refracted while passing through the light collecting element 630 to condense in the direction in which the light receiving element is located. Generally, scattered light has a property of decreasing light intensity per unit area instead of being diffused to a wide area. When the light scattered by the light diffusing unit 120 is directly scanned to the light receiving unit 110 as in the first exemplary embodiment, the light may be detected by the light receiving unit 110 in a large area. Since the intensity is weakened, when noise such as external light other than the light reflected from the inspection object (a1, a2, a3) occurs, it may be difficult to accurately detect. Accordingly, the inspection object defect detection device 60 having the reflection characteristic according to the second embodiment of the present invention condenses the scattered light to amplify the detection signal, so that accurate detection can be performed even when external noise is generated. do.

Although the present invention has been described above with reference to preferred embodiments thereof, this is merely an example and is not intended to limit the present invention, and those skilled in the art do not depart from the essential characteristics of the present invention. It will be appreciated that various modifications and applications which are not illustrated above in the scope are possible. And differences relating to such modifications and applications should be construed as being included in the scope of the invention as defined in the appended claims.

Reflective optical sensor for a reflector according to the present invention can be widely used in the field to detect the defects of the inspection object having the characteristics of the reflector. An inspection object having the characteristics of glass and a reflector may be broken when an impact is applied, that is, brittle, and may be broken during a cutting or processing process. When the whole process is performed without extracting the damaged inspection object, in the field of manufacturing a product based on the inspection object, not only the cost loss but also the contamination of the manufacturing process equipment may be caused by the broken fragments of the inspection object. Therefore, since it is necessary to accurately inspect whether or not the inspection object having the characteristics of the reflector, the reflective optical sensor for the reflector of the present invention can be used.

10, 60: defect detection device for inspection object
100, 600: floodlight
101, 601: light transmitting element
105: light emitting element drive unit
110, 610: light receiver
111-116, 611-616: light receiving element
120, 620: light diffusion unit
130, 630: optical integrated device
140: converter
150:

Claims (9)

An apparatus for detecting a defect of an inspection object having reflective characteristics,
A light emitting unit configured of a single light transmitting element and scanning an optical beam having a spot size to the inspection object;
A light emitting element driver for driving the light emitting element to be scanned;
A light receiving unit comprising a plurality of light receiving elements, the light receiving unit being disposed at a position where the optical beam scanned from the light transmitting unit is reflected by the inspection object;
A light diffusion unit disposed to be spaced apart from the light receiving surface of the light receiving unit by a predetermined distance, and configured to transmit and scatter light incident from the outside to the light receiving unit;
A converter for converting signals input from the plurality of light receiving elements into electrical signals and outputting the electrical signals; And
A control unit for providing a control signal for scanning the light emitting element to a light emitting element driver, and determining whether there is a defect in the inspection object by using a detection signal received from the converter;
The control unit scans the light transmitting element through the light transmitting element driver to sequentially scan the optical beam, and at the same time receives the detection signals from the light receiving unit through the converter, and using the input detection signals The inspection object defect detection apparatus which has a reflection characteristic characterized by detecting a defect.
The apparatus of claim 1, wherein the control unit
Synchronize the scanning time of the light emitting unit and the reception time of the detection signal input from the light receiving unit,
By scanning the light emitting unit, it is determined whether the reflected light reflected from the inspection object by using the detection signals sequentially input from the light receiving unit,
The presence or absence of the defect of the inspection object according to the presence or absence of the reflected light,
And an object to be inspected having a reflection characteristic, wherein the position of the object to be inspected is calculated using the reception time at which the reflected light is detected.
The inspection signal of claim 1, wherein the detection signal input from the light receiving unit to the control unit is a signal obtained by adding up the detection signals received from the plurality of light receiving elements configuring the light receiving unit at the same time. Object defect detection device.
The apparatus of claim 2, wherein the controller determines the presence or absence of reflected light based on the presence or absence of a detection signal.
The apparatus of claim 2, wherein the controller determines whether the reflected light is present based on a preset threshold value.
The apparatus of claim 2, wherein the controller is further configured to determine a position of a defect of the inspection object by using a scanning speed of the light emitting device, a reception time t of detecting the presence or absence of reflected light, and an initial position value s 0 of the light emitting device. Inspection object defect device having a reflection characteristic, characterized in that for calculating.
The method according to any one of claims 1 to 7,
The defect detecting apparatus further includes a light collecting element disposed between the light diffusing unit and the light receiving unit, and the light collecting element condenses the light scattered through the light diffusing unit in the direction of the light receiving unit. Inspection object defect detection device having characteristics.
The apparatus of claim 7, wherein the photo-integrated element comprises one of a lens, a prism, and a prism sheet.
The inspection object defect detection apparatus according to claim 1, wherein the inspection object defect detection device detects a defect on a cut surface of the inspection object.
KR20100042315A 2010-05-06 2010-05-06 apparatus for detecting flaws in reflector KR101185075B1 (en)

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JPS6035608B2 (en) 1980-09-13 1985-08-15 松下電工株式会社 Position/attitude control device
JP3830121B2 (en) 1999-06-10 2006-10-04 株式会社 ニューコム Optical unit for object detection and position coordinate input device using the same

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