KR20110069253A - A vaporization humidification device - Google Patents

Abstract

PURPOSE: A humidity control method of a direct spray style vaporization humidification apparatus in a clean room is provided to directly vaporize steam in the clean room so as to supply a required amount of deionized water. CONSTITUTION: A humidity control method using a vaporization humidification apparatus is as follows. A temperature and humidity sensor installed in a clean room senses the humidity and temperature of the inside of the clean room. The sensed humidity and temperature are transmitted to a control valve controller. When the sensed humidity is lower than predetermined humidity, the control valve controller opens a valve provided to a compressed air pipe(71) of a compressed air generator(70). A nozzle on a manifold(40) sprays deionized water in an ultrafine particle state to the clean room according to the compressed air. The deionized water in the ultrafine particle state is sprayed and evaporated simultaneously to absorb evaporated latent heat in the clean room so as to reduce the internal temperature of the clean room. When the internal humidity of the clean room becomes close to a target humidity, the temperature and humidity sensor switches off the valve to interrupt spraying of deionized water.

Description

Humidity Control Method of Direct Spray Vaporization Humidifier in Clean Room {A vaporization humidification device}

The present invention relates to a method for controlling humidity of a direct spray vaporization humidifier in a clean room. More specifically, the cooling and humidification effect of air is sprayed directly into a clean room by spraying ultrapure water in a large clean room operating condition requiring precise temperature and humidity control. At the same time, the ultra-pure particles atomized by the nozzles are in direct contact with the air, thereby enabling effective and precise control of the amount of air in the clean room aimed at cooling and humidifying the air by heat transfer and mass transfer between each other. A humidity control method for a direct spray vaporization humidifier in a clean room.

First, in an environment in which semiconductor devices are produced, the clean room circulates clean air by passing external air through a semiconductor filter such as a hepa filter or a ulpa filter to prevent inflow of dust that may cause contamination of the wafer. In order to prevent static electricity during wafer handling and to create optimum operating conditions for semiconductor production equipment, circulating air such as external air or fresh air is passed through a dehumidifier and a humidifier to circulate the fresh air with humidity control. It is formed and maintained by the method, and the removal of such dusts and the adjustment of humidity are known to a certain degree to be achieved in a conventional air conditioner used in the semiconductor manufacturing field. The dehumidifier that removes moisture in the air to lower the humidity can be roughly classified into a compression type, a cooling type, and a dry adsorption type. The compression type is a method of compressing and condensing moisture in the air to lower humidity, and there is a freezing type and an adsorption type, and the cooling type is similar to the compression type freezing type, but has the advantage of reducing energy management costs. Is made of corrugate type and dehumidified by passing moisture-containing air through a rotor containing lithium chloride (Lithium Chloride), and the rotor is deodorized by using hot air in the regeneration part. It is designed to be recycled and can be used for a wide range of air flows. It is easy to control humidity, economical maintenance cost, easy maintenance and wide range of humidity. It is widely used in clean room of semiconductor production equipment. These dehumidifiers act to lower humidity by removing moisture in the air.

In addition, the humidifier, as opposed to the dehumidifier described above, acts to increase humidity by adding water vapor to the air, and can be roughly classified into a spray type and a transmission type.

The spray type is a method in which water is vaporized by spraying water using a venturi tube, or by increasing the humidity by forcibly releasing particulate water particles in the air by using an ultrasonic generator using a crystal oscillator, the transmission type is a Teflon tube. Deionized water is put in a tube having such fine pores, and a constant temperature is maintained to increase humidity by allowing water molecules to pass through the fine pores of the tube and out of the tube to evaporate into the air.

However, in the conventional humidifier, the spray type is advantageous in controlling humidity of a large amount of air such as humidity control in a clean room, but the particle size of physically released particulate water particles is not constant, so that the process tube or process In a closed system such as a chamber, it is difficult to precisely control the humidity, and it is difficult to keep the humidity constant because water particles are likely to condense on the wall of the process tube or the process chamber and remain condensed on the wall. There was a disadvantage of difficulty.

In addition, the transmission type in the conventional humidifier can precisely control the humidity, but because the amount of moisture generated is very small, it is possible to control the ppm concentration of humidity, but there is a problem that it is not suitable for the humidity control of the percent (%) concentration. However, there is a problem that it is not suitable when a larger capacity process chamber or continuous high humidity is required.

Therefore, the control of humidity by the dehumidifier and the humidifier in the conventionally provided air conditioner is very inaccurate due to the large amount, and thus the control range of the humidity in the clean room has also been adjusted approximately 15 to 50%. .

In addition, in an oxidation process such as thermal oxidation, a special humidity control device such as a bubbler is separately used, but the humidity control device such as a bubbler, a dry steam, or a hot plate method is used to restrict high purity water to the process chamber. As it can be used only to supply the capacity, there is a disadvantage that it is not suitable for the humidity control of a large amount of air, such as the humidity control of the clean room.

 In addition, most industrial humidifiers installed in the past have been installed and operated as an essential element of humidity control by being installed directly in an air conditioner (AHU). As the interest in the eco-friendly system has been concentrated, the direct installation method in such an air conditioner has been technically satisfied to some extent, but there are problems in terms of fuel cost and efficiency in large-scale air conditioning facilities.

As shown in FIG. 1, the conventional representative air conditioner B includes a filter 101 installed at an inlet and an outlet of a duct 100 for supplying air into a clean room, and the duct 100. In the winter, a heating coil 103 connected to the boiler 102 and a humidifier 104 for humidification are installed in the winter, and a cooling coil 106 connected to the freezer 105 for cooling and humidifying the summer season. ), A blower 107 is installed, the boiler 102 is operated in winter, the heating coil 103 is operated, the humidifier 104 is operated while supplying the humidified air into the clean room, fuel costs Due to the increase in the heating load on the boiler 102 of the humidifier 104 is enormous operating costs.

In addition, the direct spray vaporization humidifier (A) in the clean room in the clean room employed in the conventional air conditioner, the vaporization humidifier (A) is located in the clean room 30 is provided with a nozzle 41 for ultrapure water spraying The ultra-pure water supply unit 60 is connected to the plurality of manifolds 40, the control valve controller 50 for checking the temperature and humidity in the clean room 30, and the manifolds 40 to supply ultrapure water. , Compressed air generating unit 70 extending to the manifold 40, a plurality of nozzles 41 are installed in each manifold 40, the ultra-pure water is stored in each manifold 40 The ultrapure water storage tank 42 is installed, and the ultrapure water storage tank 42 is provided with a hollow ball 42a which is moved up and down according to gravity, and according to the vertical movement of the hollow ball 42a of the ultrapure water supply pipe 61a. Ultra pure water supply is adjusted, the ultra pure water storage tank 42, ultra pure water supply pipe (61a) ) Is connected, branched from the ultrapure water supply pipe (61a) in the middle to prevent contamination of the ultrapure water supply pipe (61a) due to the stagnation of the ultrapure water during the non-humidification, microorganisms, and chemical action, ultrapure water supply ( It is configured to continuously circulate through the ultrapure water return pipe 61b for recovering the ultrapure water again to 60), and the vaporizing humidification device employing the vaporization humidification device to directly humidify the inside of the clean room.

In addition, the direct spray type humidity control method in a clean room employed in a conventional air conditioner detects an appropriate humidity and temperature in the clean room 30 by the temperature and humidity sensor 51 installed in the clean room 30, and controls the control valve controller 50. And the step of sending out, and when the humidity detected by the temperature and humidity sensor 51 in the clean room 30 is less than the specified humidity is recognized by the control valve control unit 50 and the compressed air generating unit 70 in the control valve control unit 50 Opening the valve 72 installed on the compressed air pipe 71 of the air) and spraying the ultrapure water in the state of ultra fine particles into the clean room 30 by the compressed air by the nozzle 41 on the manifold 40; Ultra-pure water in the state of spraying at the same time ultra-pure water in the ultra-fine state absorbs the latent heat of evaporation in the clean room 30 to lower the temperature in the clean room 30, the humidity in the clean room 30 is installed When the temperature is close to the target humidity, the temperature and humidity sensor 51 detects this and turns off the valve 72 to stop the spray of ultrapure water, and when the spray of the ultrapure water is stopped, the ultrapure water supply pipe 61a and the ultrapure water return pipe ( Humidity control was adopted by spraying the clean room directly, including the step of circulating ultrapure water through 61b).

However, in the case of the humidity control system using the vaporization humidifier A as described above, when the set humidity is reached, the spraying of the second water is stopped, and in such a non-humidifying state, in the middle of the ultrapure water supply pipe 61a, The ultrapure water in the conventional manifold 40 is adopted by adopting a method of continuously circulating through the ultrapure water return pipe 61b branched from the ultrapure water supply pipe 61a and recovering the ultrapure water back to the ultrapure water supply unit 60. Contamination, microbial generation, and chemical action in components other than the ultrapure water supply pipe 61a due to the congestion had a fundamental disadvantage.

An object of the present invention is to solve such a problem, and by supplying the required ultra-pure water accurately by vaporizing and humidifying the water vapor directly in the clean room to the absolute humidity of the dry air outside the winter in the clean room to the humidification of the existing air conditioner By eliminating the necessary heating load, the operating cost is drastically reduced, and at the same time, the ultrapure water flows in the non-humidified state to all the components including the manifold 40 of the vaporization humidifier A. It is to provide a humidity control method of a direct spray vaporization humidification apparatus in a clean room according to the present invention to prevent contamination, microorganisms, and chemical reactions in all components of the vaporization humidifier (A).

The present invention uses a principle that occurs from the place where the water vapor density (partial pressure) is high in the material transfer to a low place, the method of humidifying by spraying in the air through a nozzle with a pump, without heating or cooling ultrapure water, at this time humidifying the air The moisture to be made is the state of ultra-pure water sprayed by the nozzle, and in order to become vapor, the humidification process by spraying is an adiabatic change to obtain the latent heat of evaporation and return it to the air again (that is, In other words, this process uses the principle that there is little change in enthalpy (h1 ≒ h2) indicating heat content in each state of the wet air diagram, but the temperature in the clean room is reduced.

This object of the present invention is a control valve control unit for precisely identifying and supplying the required amount of moisture in a clean room, a manifold installed in a clean room for spraying ultra-fine water in a fine particle state to vaporize and humidify the identified required ultra pure water in the clean room, and a manifold. An ultrapure water supply unit connected to a manifold for supplying ultrapure water to a folder, and a compressed air generating unit connected to the manifold for spraying ultrapure water, are achieved by a direct spray vaporization humidification apparatus in a clean room according to the present invention.

This object of the present invention is to spray the ultra-fine water in the state of the ultrafine particles in the clean room by the step of identifying the appropriate humidity and temperature in the clean room, and the spray means for vaporizing and humidifying the ultra-pure water when the humidity and temperature found in the clean room is less than the specified humidity. According to the present invention comprising the steps of, the ultra-fine water is sprayed in the ultra-fine state and at the same time absorbing the latent heat of evaporation in the clean room to reduce the temperature in the clean room, and the spraying of ultra-pure water is stopped when the humidity in the clean room is appropriate Achieved by a humidity control method.

Direct spray vaporization humidifier in a clean room according to the present invention by supplying the ultra-pure water required by the vaporization of the steam directly in the clean room according to the absolute humidity of the dry air outside the winter season to the target, the humidification of the existing air conditioner By eliminating the necessary heating load, the operating cost is significantly reduced.

Up to now, the operation method applied for the humidity control in the clean room has been operated by the outside of the clean room through steam humidification or moisture free humidification. However, this method has to bear a large operating cost by involving the heating load by the boiler. However, the humidification method through the direct spray vaporization humidification apparatus in the clean room according to the present invention can achieve the effect of temperature reduction by absorbing the humidification effect and evaporative latent heat only by fine spray.

Direct spray evaporative humidification device (A) in a clean room according to an embodiment of the present invention after accurately detecting the current state, such as the temperature and humidity of the air in the clean room through a temperature and humidity sensor, vaporization humidification in the position required for insufficient water vapor The key is to accurately supply the required amount of water vapor through the device.

As the particle size increases in the relationship between the droplet size and the degree of vaporization, the degree of vaporization behaves like a decreasing curve in the exponential function. In other words, the smaller the droplets, the easier vaporization occurs in the atmosphere, and the larger the droplets, the greater the likelihood of condensation. In addition, if water vapor is adjacent to the structure, condensation occurs in the structure before vaporization occurs. In consideration of the vaporization and condensation relationships of the particles of the water vapor in the present invention, the direct injection vaporization humidifier is positioned in the optimal conditions between the wind tools in the clean room.

Direct spray evaporative humidification device (A) in a clean room according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

Clean room 30 according to an embodiment of the present invention is a space controlled to maintain constant in the air, air temperature and humidity, room pressure and air flow. As shown in FIG. 4, a fan filter unit 32 is installed on the ceiling of the clean room 30 to induce the flow of air to supply the clean room 30 to the clean room 30. A large number is installed and the lower or one side is provided with an air conditioner (B) for maintaining the positive pressure in the clean room (30) and supply fresh air, dry cooling coil (33, Dry Cooling Coil) for the purpose of precise temperature control room ( 30) is installed at the beginning of the air blower section 31 which is a passage through which the internal air moves from the lower part of the clean room to the upper part, and the direct spray vaporization humidification device A of the present invention minimizes the effect of the structure and reduces the vaporization distance The air inside the clean room, which can be secured to the maximum, is located and operated in the wind tool section 31 which is a passage that moves from the lower part of the clean room to the upper part.

Direct spray evaporative humidification device (A) in a clean room according to an embodiment of the present invention, as shown in Figure 2, is located in the clean room 30 and a manifold (with a nozzle 41 for ultrapure water spray) 40), the control valve control unit 50 for checking the temperature and humidity in the clean room 30, connected to the manifold 40, ultra-pure water supply unit 60 for supplying ultrapure water, up to the manifold 40 Extended compressed air generating unit 70 is included.

In this embodiment, four nozzles 41 are provided in each manifold 40. Each manifold 40 is provided with an ultrapure water storage tank 42 for storing ultrapure water. The ultrapure water storage tank 42 is provided with a hollow ball 42a that moves up and down according to gravity to adjust the ultrapure water supply of the ultrapure water supply pipe 61a according to the vertical movement of the hollow ball 42a. The ultrapure water storage tank 42 is connected to the ultrapure water supply pipe (61a), the intermediate in order to prevent the occurrence of contamination in the ultrapure water supply pipe (61a) due to the stagnation of ultrapure water during the non-humidification, microbial generation, and chemical action Branched from the ultrapure water supply pipe (61a) continues to circulate through the ultrapure water recovery pipe (61b) for recovering ultrapure water back to the ultrapure water supply unit (60). If a humidification situation occurs, the ultrapure water in the ultrapure water storage tank 42 is sprayed while compressed air is ejected, and when the water level of the ultrapure water storage tank 42 is lowered, the ultrapure water supply pipe 61a for supplying the ultrapure water is opened and the ultrapure water storage tank ( It is a structure that the water level of 42) is kept constant. The ultrapure water supply pipe 61a extends into the ultrapure water storage tank 42, extends into the manifold 40 in the ultrapure water storage tank 42, and is connected to the nozzle 41, and the ultrapure water recovery pipe 61b is supplied to the ultrapure water supply. Without being branched in the middle of the pipe (61a), it is a structure that is in line communication with the flow through the manifold 40 to the ultrapure water supply (60).

The manifold 40 should be installed to ensure a sufficient vaporization distance of about 4 m or more in the clean room 30, and ultrapure water finely sprayed by being installed in the air circulation section 31 of the air circulation passage so as to minimize the effect on the structure. It should be installed to prevent condensation.

The control valve controller 50 may always recognize the temperature and humidity state amount through the temperature and humidity sensor 51 at the end installed in the clean room 30. If the control range of the dew point temperature recognized by the controller 50 reaches the lower limit, the humidification signal is called, and the control valve controller 50 is installed on the compressed air pipe 71 of the compressed air generator 70. When the valve 72 is opened, humidification is performed through the nozzle 41 installed on the manifold 40. If the state value recognized by the control valve control unit 50 reaches the upper limit of the control range, the control valve control unit 50 is installed on the compressed air pipe 71 of the compressed air generating unit 70. Turning off) will end the humidification and the ultrapure water storage tank 42 will be closed.

The ultrapure water supply unit 60 and the ultrapure water circulating pump (61c) and the ultrapure water supply pipe (61c) is installed to maintain a constant pressure on the ultrapure water supply pipe (61a) and the ultrapure water supply pipe (61a) is supplied to the ultrapure water storage tank 42 The ultrapure water supply pipe 61a is branched in the vicinity of the pure water storage tank 42 and is composed of an ultrapure water recovery pipe 61b extending to the ultrapure water supply unit 60.

The compressed air generating unit 70 is a conventional compressor is used is provided with a compressed air pipe 71 extending to the manifold (40). The regulator 73 is arranged on the compressed air pipe 71 so as to open when the pressure is higher than a predetermined pressure.

Humidity control method according to the present invention is to determine the appropriate humidity and temperature in the clean room, when the humidity and temperature found in the clean room is less than the specified humidity by the spray means for vaporizing and humidifying the ultra-pure water in the ultra-fine state in the clean room And spraying the ultrapure water in the ultrafine state and simultaneously absorbing the latent heat of evaporation in the cleanroom to lower the temperature in the cleanroom, and stopping the spraying of the ultrapure water when the humidity in the cleanroom is appropriate.

In other words, in the vaporization humidification apparatus employing the direct spray humidity control method in the clean room using the vaporization humidification apparatus (A) according to the present invention, the ultrapure water supply pipe (61a) is extended to the ultrapure water storage tank 42 and the ultrapure water storage tank Extending into the manifold 40 at 42 and connected to the nozzle 41, the ultrapure water return pipe 61b passes through the manifold 40 without being branched in the middle of the ultrapure water supply pipe 61a. The ultrapure water supply unit 60 is configured to be in line communication with each other in a flowable manner.

In addition, the humidity control method using the vaporization humidifier, the step of detecting the appropriate humidity and temperature in the clean room 30 in the temperature and humidity sensor 51 installed in the clean room 30 and sends it to the control valve control unit 50, When the humidity sensed by the temperature-humidity sensor 51 in the clean room 30 is equal to or less than a predetermined humidity, the control valve controller 50 recognizes the compressed air pipe of the compressed air generating unit 70 in the control valve controller 50 ( The nozzle 72 on the manifold 40 is sprayed by the compressed air to spray the ultrafine water in the ultrafine particle state in the clean room 30 by opening the valve 72 installed on the 71. At the same time, ultra-pure water in the ultra-fine state absorbs the latent heat of evaporation in the clean room 30 to reduce the temperature in the clean room 30, and when the humidity in the clean room 30 approaches the set target humidity, The sensor 51 detects this and turns off the valve 72 to stop the spraying of ultrapure water, and when the spraying of the ultrapure water is stopped, the manifold 40 into which ultrapure water is introduced through the ultrapure water supply pipe 61a. Circulating ultrapure water through the ends.

In addition, the check valve unit 100 and the check valve unit installed on the side of the ultra-pure water supply pipe 61a so as to elastically open and close the flow path of the ultra-pure water supply pipe 61a and flow into the manifold 40 side. The manifold 40 is connected to the ultrapure water supply pipe 61a on the other end side of the check valve part 100 so as to flow water when a water pressure equal to or greater than a set pressure is applied by 100). It is configured to gradually reduce the elastic modulus of the spring in the check valve 100 to the far side from the inlet side of the ultra-pure water supply pipe (61a), selective depending on the distance of the check valve unit (100) It may further include the step of making the ultrapure water injection amount through the manifold 40 through the opening evenly.

In addition, the front end of the ultra-pure water supply pipe (61b) connected to the end of the manifold 40 is connected to the automatic opening and closing valve 200, the circulation in the ultra-pure water supply pipe (61a) when the spraying of the ultra-pure water is stopped. It may be configured not to include the step of stopping without making.

The operation and humidity control method of the direct spray vaporization humidifier in a clean room according to the present invention having such a configuration will be described in detail below.

First, when the humidity in the clean room 30 is insufficient, first, the temperature and humidity sensor 51 of the control valve controller 50 recognizes this and generates a signal of insufficient humidity to the control valve controller 50. When the control valve control unit 50 detects such a lack of humidity signal, the control valve control unit 50 opens a valve 72 installed on the compressed air pipe 71 of the compressed air generating unit 70. When the valve 72 is opened to send compressed air, the nozzle 41 installed on the manifold 40 is opened to spray ultrapure water. As such, when the ultrapure water is sprayed into the clean room 30, the humidity in the clean room 30 is increased and at the same time, the fine particles to be sprayed absorb the latent heat while evaporating, thereby lowering the temperature in the clean room. As described above, when the humidity in the clean room reaches an appropriate level, the temperature and humidity sensor 51 of the control valve controller 50 recognizes this, and when the signal is sent to the control valve controller 50, the control valve controller 50 recognizes this. When the valve 72 is closed, spraying of the clean room is stopped while the delivery of the compressed air is stopped.

From here,

As described above, the control of the humidity in the clean room can be easily controlled by spraying by the nozzle 41 of the manifold 40 installed in the clean room, and the cost of the humidity control can be greatly reduced.

The operation and humidity control method of the direct spray vaporization humidification apparatus in a clean room according to the present invention will be referred to as an invention that can be repeatedly applied and industrially applicable.

1 is a schematic diagram of a humidification system of a conventional air conditioner

2 is a schematic configuration diagram of a vaporization humidification system according to a conventional embodiment

3 is a schematic configuration diagram of a direct spray vaporization humidification system installed in a clean room according to a conventional embodiment.

4 is a block diagram of a vaporization humidification system according to a conventional embodiment,

5 is a schematic configuration diagram of a vaporization humidification system according to an embodiment of the present invention, and

6 is a schematic configuration diagram of a vaporization humidification system according to a second embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

30. Cleanroom 40. Spray manifold

50. Control valve control unit 60. Ultrapure water supply

70. Compressed air generator 72. Control valve

100. Check valve unit 300. Automatic open / close valve

Claims (3)

In a direct spray humidity control method in a clean room using a vaporization humidifier (A), The vaporization humidifier, The ultrapure water supply pipe 61a extends into the ultrapure water storage tank 42, extends into the manifold 40 in the ultrapure water storage tank 42, and is connected to the nozzle 41, and the ultrapure water recovery pipe 61b is supplied to the ultrapure water supply. Without branching in the middle of the pipe (61a), it is configured to be in line communication with the flow through the manifold 40 to the ultrapure water supply unit 60, Humidity control method using the vaporization humidifier, Detecting the appropriate humidity and temperature in the clean room 30 by the temperature and humidity sensor 51 installed in the clean room 30 and sending it to the control valve controller 50; When the humidity sensed by the temperature-humidity sensor 51 in the clean room 30 is equal to or less than a predetermined humidity, the control valve controller 50 recognizes the compressed air pipe of the compressed air generating unit 70 in the control valve controller 50 ( Opening the valve 72 installed on the 71 and spraying the ultrapure water in ultra-fine state into the clean room 30 by the nozzle 41 on the manifold 40 by compressed air, Absorbing the latent heat in the clean room 30 while lowering the temperature in the clean room 30 while the ultra fine water in the ultrafine state is sprayed and the ultra pure water in the ultrafine state is evaporated; When the humidity in the clean room 30 is close to the set target humidity, the temperature and humidity sensor 51 detects this and turns off the valve 72 to stop the spray of ultrapure water; And circulating the ultrapure water through an end of the manifold (40) through which the ultrapure water is introduced through the ultrapure water supply pipe (61a) when the spraying of the ultrapure water is stopped. The method of claim 1, The check valve unit 100 and the check valve unit 100 installed on the side of the ultra pure water supply pipe 61 a to elastically open and close the flow path of the ultra pure water supply pipe 61 a and flow into the manifold 40 side. The manifold 40 is connected to the ultrapure water supply pipe 61a on the other end side of the check valve part 100 so as to flow water when a water pressure equal to or greater than a set pressure is applied thereto. It is configured to gradually reduce the elastic modulus of the spring in the check valve 100 portion toward the distant side from the inflow side of the pipe (61a), to selectively open according to the distance of the check valve portion 100 Direct spray type humidity control method in a clean room comprising the step of making the ultra-pure water injection through the manifold (40) evenly. The method according to claim 1 or 2, The automatic opening / closing valve 200 is connected to the front end side of the ultrapure water supply pipe 61b connected to the end of the manifold 40, and when the spraying of the ultrapure water is stopped, the circulation in the ultrapure water supply pipe 61a is not made. Direct spray type humidity control method in a clean room comprising the step of stopping without.

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