KR20110063993A - Assembly of case for keeping mask of semiconductor and lcd manufacturing - Google Patents

Abstract

PURPOSE: A case assembly for containing a large mask for semiconductor and LCD processes is provided to carry a mask storage case while the mask storage case is tilted against the ground, thereby increasing the convenience of a work. CONSTITUTION: A horizontal frame(110) is horizontally installed on the ground. A tilt frame(120) is tiled from one end of the horizontal frame to the other end of the horizontal frame. A guide member(121) is installed in the tilt frame. A support frame(130) supports the tilt frame. A first case(210) stores masks for semiconductor and LCD processes.

Description

Assembly of case for keeping mask of semiconductor and LCD manufacturing

The present invention relates to a large mask storage case assembly for a semiconductor and LCD process, and more particularly to a large mask storage case assembly for a semiconductor and LCD process to improve the convenience to transport and storage efficiency.

Recently, a variety of display products have been produced, which have become lighter and more powerful due to the rapid development of semiconductor technology.

Among these display products, the liquid crystal display (LCD), which is currently in the spotlight, has been attracting attention as an alternative means of overcoming the shortcomings of the CRT because it has advantages such as low power consumption, and now requires a display device. It is installed and used in almost all information processing equipment.

As such, LCDs are manufactured with various characteristics and specifications required by customers in order to meet the demands of customers, which are gradually diversified. Know-how is required.

On the other hand, in the process of manufacturing the finished LCD, it is necessary to move or temporarily load a photo mask with a high-density circuit board and a liquid crystal to a certain place, in order to put in each process.

In particular, the photomask is very sensitive to external shocks, static electricity or foreign matters due to the characteristics of the product, so that defects can easily occur, the general production line is moved to a fixed state using a photomask-only loading means.

In this case, the photomask-only loading means is referred to as a 'photomask storage case' for convenience, and a look at a conventional photomask storage case with reference to the accompanying FIG. 1.

As shown in FIG. 1, the photomask storage case includes a case 1, a fastening member 3, and a wheel 5.

The case 1 constitutes an exterior of a photomask storage case, and a space portion is formed in the housing 1 to accommodate the photomask.

At this time, although not shown, the photomask is fixed so as not to flow by a separate fixing bracket installed in the space of the case (1).

In addition, the case 1 covers a first case 1a provided with a fixing bracket for fixing the photomask and a second case covering the first case 1a on which the photomask is fixed to protect the photomask from the outside. It consists of (1b).

In addition, a plurality of reinforcing members 1c are formed around the periphery of the case 1, respectively, and the durability of the case 1 is improved due to the reinforcing members 1c.

At this time, the reinforcing member (1c) may be used as a handle by forming a holding means such as a groove.

Next, the fastening member 3 serves to couple the first case 1a and the second case 1b to each other, and is installed in the first case 1a and the second case 1b, respectively.

The fastening member 3 is composed of a catching portion 3a and a catching piece 3b, the catching portion 3a is installed in the first case 1a, and the catching piece 3b is the second case 1b. It is installed in).

At this time, a plurality of fastening members 3 are installed along the circumference of the case 1 and are respectively installed between the reinforcing members 1c.

Next, the wheels 5 are provided for the convenience of the movement of the case 1, and are installed on the bottom of each case 1, respectively.

Hereinafter, a brief look at the combination of the photomask storage case consisting of the above configuration.

The photomask is fixed to the fixing bracket of the first case 1a so that the photomask does not flow, and the second case 1b covers the first case 1a to shield the photomask.

Thereafter, after the first case 1a and the second case 1b are combined using the fastening member 3, the case 1 is moved to a predetermined place while pushing or pulling the case 1.

However, the photomask storage case has the following problems.

Recently, with the development of the 10th generation LCD, the size of masks for semiconductor and LCD processes has also increased.

At this time, since the width and height of the case 1 for storing the masks for the semiconductor and LCD process are also about 2 m or more, the case 1 is pushed using only the wheels 5 on the bottom of the case 1. There was a problem that the stability is somewhat lower when pulling.

In particular, when moving the surface with an uneven surface, as the vibration directly occurs in the case 1, there is a concern that the mask for semiconductor and LCD process may be damaged.

In addition, even when the case 1 is stored in a predetermined place, the center of gravity has a high risk of falling.

In this case, when the plurality of cases 10 are arranged in a line, a problem may occur in which a plurality of cases may be damaged due to a domino phenomenon.

Of course, in order to solve such a problem, the case where the position of the wheel 5 was installed in the side surface rather than the bottom of each case 1 was also developed.

Such a photomask storage case, as shown in Figure 2, the center of gravity is formed at the bottom to provide a sense of stability for movement and transport, but the inconvenience of having to bend the operator at the time of transport occurred.

That is, given that the height of the case in the laid state is about 50 cm, the inconvenience of the worker is natural.

In addition, the storage space occupies a lot of the problem that the efficiency of storage is low.

Since the case 1 is in a lying state, there is no fear that the case 1 will fall, but it takes up a lot of area, resulting in a decrease in storage efficiency, and a problem in that the transportation cost increases even when the vehicle is loaded at the time of movement by a vehicle.

Of course, one can also think about how to load the top, but this is almost impossible considering the rigidity of the case is made of a resin (PVC) material and the stability of the wheel (5).

The present invention has been made to solve the above problems, an object of the present invention is to provide a frame that can be transported by tilting the large mask for semiconductor and LCD process inclined transport stability and convenience and efficiency for storage An object of the present invention is to provide an improved large mask storage case assembly for semiconductor and LCD processes.

To this end, the horizontal frame is horizontal to the ground, a plurality of wheels are installed; an inclined frame inclined toward one end of the horizontal frame from one end of the horizontal frame; installed between the inclined frame and the horizontal frame to the inclined frame A support frame for supporting; The first case is disposed on the inclined frame, the semiconductor and LCD process mask is stored, including; The semiconductor frame and the LCD characterized in that the fixing member for fixing the first case is installed A large mask storage case assembly for a process is provided.

In this case, a reinforcing member for reinforcing or gripping the first case is formed on a circumferential surface of the first case, and the fixing member includes a support having a recess corresponding to the reinforcing member of the first case, and the support is provided. While pushing and pulling in one case, it is preferable that the support is made of a clasp that presses and fixes the first case.

At this time, the clasp is preferably a toggle clamp (toggle clamo).

In addition, the inclined frame is further provided with a guide member for holding a reference position of the first case, the guide member is a body having a corresponding surface corresponding to the reinforcing member of the first case, and the body fixed to the inclined frame It is made of a fixed bolt to, the body is provided with a long hole for providing a flow distance of the guide member, the fixed bolt is preferably fastened to the inclined frame through the long hole.

In addition, the inclined frame is preferably installed to enable the angle adjustment on the horizontal frame and the support frame.

In this case, the horizontal frame is composed of a first horizontal frame installed on the lower end of the inclined frame and a second horizontal frame formed on the lower end of the support frame and having a larger inner diameter than the outer diameter of the first horizontal frame, the support frame The upper end of the inclined frame is preferably installed to be slidable along the inclined surface.

According to the large mask storage case assembly for semiconductor and LCD process according to the present invention has the following effects.

First, since the mask storage case is transported in an inclined state, rather than being transported in a vertical state with respect to the ground or lying down, there is an effect of providing stability and convenience for transporting.

In addition, since the mask storage case maintains the inclined state, there is an effect that the operator's convenience is improved even when the second case is covered or separated from the first case.

That is, in the conventional case in which the case is erected, such a series of processes were not inconvenient because the mask storage case must be laid on the ground to separate the second case, and the second case must be separated and placed on one side in the lying state. .

However, the mask storage case assembly according to the present invention, after releasing the fastening member, simply lifts the second case from the mask storage case in an inclined state, thereby improving the convenience of the operator.

Second, instead of directly pushing or pulling the mask storage case, the mask storage case is moved by pushing the fixed frame, thereby improving convenience for the operator during transportation.

Third, by adjusting the support frame and the horizontal frame to adjust the angle to the inclined frame, there is a feature that can reduce the overall volume of the assembly.

Accordingly, in storage and loading, not only there is a sense of stability, there is an effect that the efficiency of the space can be maximized.

Fourth, the mask storage case is guided by the guide member and then fixed by the fixing member, so that the mask storage case is not separated from the inclined frame.

In addition, by the easy removal, there is an effect that the convenience of the operator can be improved.

Hereinafter, a large mask storage case assembly (hereinafter referred to as a 'storage case assembly') for a semiconductor and LCD process according to a preferred embodiment of the present invention will be described with reference to FIGS. 3 to 6B.

The storage case assembly includes a frame 100, a mask storage case 200, and a fixing member 300.

The frame 100 supports the mask storage case 200 and includes a horizontal frame 110, an inclined frame 120, and a support frame 130.

At this time, the frame 100 is assembled form of a triangular shape when viewed from the side, the material is preferably a metal.

The horizontal frame 110 is provided in a horizontal state with respect to the ground, and includes a plurality of wheels 111.

At this time, the wheel 111 is installed on one end and the other end of the horizontal frame 110, respectively, it is preferably installed by the housing 111a to be freely rotatable on the horizontal frame (110).

At this time, the housing 111a is more preferably provided with a restraining member 111b that restrains the cloud of the wheel 111.

At this time, the restraining member 111b may have any configuration as long as it prevents the cloud from interfering with the wheel 111.

In addition, the inclined frame 120 is a portion for supporting the mask storage case 200, and is installed to be inclined with respect to the ground as shown in FIG.

At this time, the lower end of the inclined frame 120 is installed at one end of the horizontal frame 110, the upper end of the inclined frame 120 is disposed to be inclined toward the other end of the horizontal frame (110).

At this time, since the inclination frame 120 is a portion for fixing the mask storage case 200, it is provided in a rectangular shape corresponding to the mask storage case 200.

At this time, the guide member 121 is installed on the inclined frame 120.

The guide member 121 serves to guide the position of the mask storage case 200 on the inclined frame 120.

That is, the guide member 121 is to hold the mask storage case 200 so as not to flow before the fixing member 300 to the mask storage case 120 in the inclined frame 120.

At this time, the guide member 121 is installed in a plurality on the edge of the inclined frame 120, and corresponds to the circumferential surface of the mask storage case 200.

The guide member 121 includes a body 122 and a fixing bolt 123.

The body 122 is a portion that is in close contact with the circumferential surface of the mask storage case 200, and is in close contact with the reinforcing member of the mask storage case which will be described later.

At this time, the body 122 is formed in close contact with each circumferential surface of the mask storage case 200, which is referred to as the corresponding surface (122a).

At this time, the shape of the body 122, as shown in Figure 4a, 'b' shape corresponding to the edge of the mask storage case 200 and '-' shape corresponding to the surface of the mask storage case 200 Can be done.

In addition, the body 122 has a long hole (122b) is formed.

The long hole 122b is a portion for fixing the body 122 to the inclined frame 120 through the fixing bolt 123, and is provided as a space for the flow of the body 122.

That is, since the long hole 122b is formed in the body 122, the flow of the body 122 can be enabled by the length of the long hole 122b.

Accordingly, the position of the mask storage case 200 can be guided more accurately.

If a circular through hole other than the long hole 122b is formed, the body 122 may not flow, and the body 122 may not accurately contact the mask storage case 200 so that the inclined frame ( The mask storage case 200 on the 120 is difficult to be firmly fixed.

On the other hand, the long hole 122b, in the case of the guide member 121 corresponding to the edge of the mask storage case 200 is formed in the diagonal direction of the inclined frame 120, on the surface of the mask storage case 200 In the case of the corresponding guide member 121 is formed in a straight line.

The support frame 130 supports the upper end of the inclined frame 120 and is installed between the inclined frame 120 and the horizontal frame 110.

At this time, the support frame 130 is preferably installed in a vertical position with respect to the ground.

That is, the upper end of the support frame 130 corresponds to the upper end of the inclined frame 120, and the lower end of the support frame 130 corresponds to the other end of the horizontal frame 110.

Next, the mask storage case 200 stores a mask for semiconductor and LCD process, and includes a first case 210 and a second case 220.

The first case 210 is a portion that is supported after the semiconductor and LCD process masks are accommodated, and the second case 220 is a portion that covers and protects the semiconductor and LCD process masks by covering the first case 210.

That is, the second case 220 serves as a cover.

In addition, the first case 210 and the second case 220 is preferably made of a rectangular shape, each of the circumferential surface is provided with a reinforcing member 230.

At this time, the reinforcing member 230 is formed in a form padded on the circumferential surface for the rigidity of the mask storage case 200.

That is, the reinforcing member 230 is protruded from the circumferential surface of the mask storage case 200, the protruding form is preferably a rectangular shape.

At this time, the reinforcing member 230, the reinforcing member 230 formed in the portion except the corner portion of the mask storage case 200, it is preferable to also serve as a handle by forming a through hole.

Next, the fixing member 300 serves to fix the mask storage case 200 disposed on the inclined frame 120 and is installed on the inclined frame 120.

If the role of the above-mentioned guide member 121 is to hold the mask storage case 200 in order not to flow in the inclined frame 120, the fixing member 300 to the mask storage case 200 inclined frame 120 Finally fixed at).

The fixing member 300 is installed in a portion corresponding to the circumference of the mask storage case 200 of the inclined frame 120, in the present specification, for example installed on the portions corresponding to both sides of the mask storage case 200. do.

Although not shown, the fixing member 300 may be installed to hold the upper and lower surfaces of the mask storage case 200.

On the other hand, the fixing member 300 is configured to include a support 310 and the clasp 320.

The support part 310 is a part that comes into close contact with the circumference of the mask storage case 200, and is a part that comes in close contact with the reinforcing member 230 of the mask storage case 200.

In this case, the support part 310 has a rectangular corresponding groove 311 corresponding to the shape of the reinforcing member 230 to accommodate the reinforcing member 230.

In this case, the support part 310 may be made of a soft resin, if the material of the reinforcing member 9230 is a hard resin so that the bonding force between the support part 310 and the reinforcing member 230 may be firm.

In addition, the clasp 320 serves to fix or release the mask storage case 200 to the inclined frame 120 while pushing or pulling the support 310 toward the mask storage case 200.

At this time, the clasp 320 is installed around the inclined frame 120, the support 310 is to flow toward the mask storage case 200 by the action of the clasp 320.

At this time, the latch 320 is preferably a toggle clamp (toggle clamp).

Toggle clamp is a fixture used to hold the force applied to the product precisely positioned by the positioning tool and the supporter. Its type is a vertical toggle clamp, a horizontal toggle clamp, There are push / pull toggle clamps, hook toggle clamps, high gravity toggle clamps and air toggle clamps.

Hereinafter, the coupling and operation of the storage case assembly having the above-described configuration will be described.

First, the first case 210 is disposed on the inclined frame 120.

Thereafter, the body 122 of the guide member 121 installed on the inclined frame 120 is moved to closely contact the reinforcing member 230 of the first case 210.

That is, the reinforcing member 230 is in close contact with the corresponding surface 122a of each body 122.

Thereafter, the fixing bolt 123 is fastened to fix the body 122 to the inclined frame 120.

Accordingly, the first case 210 is not moved up, down, left and right on the inclined frame 120.

Next, as shown in FIG. 5A, the toggle clamp that is the clasp 320 is lowered to allow the support 310 to press the reinforcing member 230 of the first case 210.

At this time, the reinforcing member 230 of the first case 210 is in close contact with the inserted state into the corresponding groove 311 of the support 310.

Accordingly, the first case 210 is not separated from the inclined frame 120 because the first case 210 is prevented not only up, down, left and right, but also before and after flow on the inclined frame 120.

Subsequently, a mask for semiconductor and LCD process is disposed in the first case 210, and the second case 220 shields the inside of the first case 210.

At this time, since the second case 220 merely serves as a cover, the operator can easily lift the shielding of the first case 210.

Thereafter, the coupling of the mask storage case 200 is completed by locking each other using the fastening member 240 installed in the first case 210 and the second case 220.

Thereafter, the frame 100 is pushed or pulled to move the storage case assembly to a predetermined place.

The storage case assembly described so far has not described the angle adjustment to the inclination frame 120 is made.

However, by adjusting the inclination angle with respect to the inclination frame 120 may increase the space efficiency for the storage place.

This is presented as another embodiment of the present invention, and will be described with reference to FIGS. 7A and 7B.

Prior to the description, the same components as in the preferred embodiment of the present invention will be denoted by the reference numerals, and detailed description thereof will be omitted.

The frame of the storage case assembly is composed of a horizontal frame 110, the inclined frame 120, and the support frame 130.

This form also takes the form of a triangle when viewed from the side.

At this time, one end of the horizontal frame 110 and the lower end of the inclined frame 120 is coupled to the shaft 112 to be rotatable.

The horizontal frame 110 includes a first horizontal frame 110a and a second horizontal frame 110b.

That is, the first horizontal frame (110a) is configured to be slidable inside the second horizontal frame (110b), the outer diameter of the first horizontal frame (110a) is formed smaller than the inner diameter of the second horizontal frame (110b). .

In addition, the inclined frame 120 is installed in an inclined state between the horizontal frame 110 and the support frame 120, the lower end of the inclined frame 120 is coupled to the shaft 112 to the first horizontal frame (110a). .

At this time, the inclined frame 120 is formed with a sliding groove (120a).

The sliding groove 120a is for sliding the upper end of the support frame 130, and the sliding groove 120a may be replaced with a rail groove.

The support frame 130 supports the upper end of the inclined frame 120 and is installed between the second horizontal frame 110b and the upper end of the inclined frame 120.

The lower end of the support frame 130 is made to be interlocked along the second horizontal frame (110b).

At this time, the lower end of the support frame 130 may be formed integrally with the second horizontal frame (110b).

On the other hand, the upper end of the support frame 130 is provided with a sliding member 131 or a rail so as to slide in the sliding groove 120a or the rail groove of the inclined frame 120.

The configuration of such a frame is to increase the space efficiency for the storage location by reducing the volume of the storage case assembly.

At this time, look at the operation of the frame consisting of the above configuration as follows.

Figure 7a is the initial state of the storage case assembly, the total volume is somewhat larger by the length of the horizontal frame 110.

Then, in order to reduce the length of the horizontal frame 110 for storage, after loosening the locking bolt (B), the second horizontal frame (110b) by pushing the first horizontal frame (110a) inside the second horizontal frame (110b) To be inserted into

At this time, the lower end of the support frame 130 is moved along the second horizontal frame 110b, the sliding member 131 or the rail installed on the upper end of the support frame 130 is a sliding groove 120a of the inclined frame 120 Or move along the rail.

At this time, the inclination angle of the inclination frame 120 is increased as shown in Figure 7b, the total volume of the assembly is also reduced.

Therefore, there is a feature that can maximize the efficiency of the space when disposed in the loading space of the vehicle, or a separate storage location.

As described above, in the storage case assembly according to the present invention, a mask storage case in which masks for semiconductor and LCD processes are stored is disposed in an inclined state by a frame.

Accordingly, there is a technical feature to improve the stability and convenience when transporting the mask storage case 200.

In addition, it is possible to reduce the total volume by adjusting the inclination angle for the inclination frame 120, there is a technical feature that the efficiency of the loading and storage space for the vehicle increases.

1 and 2 are a perspective view and a bottom perspective view of a photomask storage case according to the prior art

Figure 3 is a side view showing a large mask storage case assembly for semiconductor and LCD process according to a preferred embodiment of the present invention

Figure 4a is a front view showing an inclined frame of the large mask storage case assembly for semiconductor and LCD process according to a preferred embodiment of the present invention

Figure 4b is a front view showing a state in which the mask storage case is fixed to the inclined frame of the large mask storage case assembly for semiconductor and LCD process according to a preferred embodiment of the present invention

5a and 5b is a functional diagram showing the action of the holding member of the large mask storage case assembly for semiconductor and LCD process according to a preferred embodiment of the present invention

6A and 6B are plan views illustrating guide members in a large mask storage case assembly for semiconductor and LCD processes according to a preferred embodiment of the present invention.

Figures 7a and 7b is a side view showing the action of the large mask storage case assembly for semiconductor and LCD process according to another embodiment of the present invention.

* Description of Major Symbols in Drawings *

100: frame 110: horizontal frame

110a: first horizontal frame 110b: second horizontal frame

111: wheels 111a: housing

111b: restraining member 112: shaft

120: inclined frame 120a: sliding groove

121: guide member 122: body

122a: corresponding surface 122b: long hole

123: fixing bolt 200: mask storage case

210: first case 220: second case

230: reinforcing member 240: fastening member

300: fixing member 310: support portion

311: corresponding groove 320: latch

Claims (6)

A horizontal frame horizontal to the ground and provided with a plurality of wheels; An inclined frame inclined toward one end of the horizontal frame from one end of the horizontal frame; A support frame installed between the inclined frame and the horizontal frame to support the inclined frame; Is disposed on the inclined frame, the first case containing a mask for semiconductor and LCD process: including, Large inclined mask storage case assembly for the semiconductor and LCD process, characterized in that the inclined frame is provided with a fixing member for fixing the first case. The method of claim 1, Reinforcing members for reinforcing or gripping the first case is formed on the circumferential surface of the first case, The fixing member, Semiconductor and LCD process characterized in that the support portion having a large groove corresponding to the reinforcing member of the first case, and the clasp for pressing and fixing the first case by the support portion while pushing the support portion to the first case Large mask storage case assembly for 3. The method of claim 2, The clasp is a large clamp storage case assembly for a semiconductor and LCD process, characterized in that the toggle clamp (toggle clamo). The method according to any one of claims 1 to 3, The inclined frame is further provided with a guide member for holding the reference position of the first case, The guide member is composed of a body having a corresponding surface corresponding to the reinforcing member of the first case, and a fixing bolt for fixing the body to the inclined frame, The body is provided with a long hole for providing a flow distance of the guide member, the fixed bolt is a large mask storage case assembly for the semiconductor and LCD process, characterized in that fastened to the inclined frame through the long hole. The method according to any one of claims 1 to 3, The inclined frame is a large mask storage case assembly for the semiconductor and LCD process, characterized in that the angle adjustable on the horizontal frame and the support frame is installed. The method of claim 5, The horizontal frame is formed of a first horizontal frame installed on the lower end of the inclined frame and a second horizontal frame formed on the lower end of the support frame and having a larger inner diameter than the outer diameter of the first horizontal frame, A large mask storage case assembly for semiconductor and LCD process, characterized in that the upper end of the support frame is slidably installed along the inclined surface of the inclined frame.

Images