KR20110032781A - Collecting device for vacuum pump - Google Patents

Abstract

PURPOSE: A collecting device for a vacuum pump to separate foreign materials is provided to minimize impurities flowed into the vacuum pump. CONSTITUTION: A collecting device for a vacuum pump comprises: a device main body; a branch pipe(20) which is diverged in side direction of the device main body; a foreign material container(30) which is connected to the lower end of the device main body and collect foreign materials at the bottom portion. The collection device further comprises an entrance and blocking part.

Description

Collection device for vacuum pump for separating foreign matters {COLLECTING DEVICE FOR VACUUM PUMP}

According to the present invention, the inlet gas is introduced into the vacuum pump through the branch pipe during operation of the vacuum pump by a collecting device including a branch pipe connected to the vacuum pump branched to the side of the main body and a foreign matter receiver connected to the lower part of the main body, In addition, the powder mass or other impurities contained in the intake gas are collected in the foreign matter receiver due to the gravity drop caused by its own weight, thereby minimizing the impurities flowing into the vacuum pump to prevent the breakdown of the vacuum pump or the accidental accident work. In addition, it is possible to extend the life of the vacuum pump, thereby reducing the cost. In particular, the collection device adopts a simple configuration in which the collection device naturally collects by gravity drop due to the foreign matter's own weight. It is possible to install, so that it is possible to separate foreign substances that can guarantee economic efficiency and installation convenience. The present invention relates to a collecting device for a vacuum pump.

In general, in the process of manufacturing a semiconductor device, various kinds of reaction gases having oxidative, flammable, and toxic properties are decomposed in a clean room (or clean room) to form a thin film on a wafer.

As such, the reaction gas supplied into the clean room through the reaction gas supply line produces various reaction byproducts such as polymer in the reaction process, and the exhaust gas including the reaction byproduct is sucked or filtered by a vacuum pump. Is released.

In this case, in the exhaust gas including the reaction by-products generated in the clean room, the reaction by-products in the form of powders are agglomerated in various sizes and weights.

When the exhaust gas is sucked by the vacuum pump, reaction byproducts in the form of powder are also sucked into the vacuum pump and accumulated in the vacuum pump to act as a direct cause of the failure of the vacuum pump or to lower the vacuum degree of the vacuum pump. do.

In addition, when foreign substances (bolts or nuts, etc.) generated during various constructions such as vacuum piping lines or vacuum pumps are left undisclosed, foreign substances can be introduced into the vacuum pump by the suction power during operation of the vacuum pump. It can act as another cause of failure.

Therefore, the service life of the vacuum pump is shortened, and additional cost burden is caused by repair or replacement therefor,

Furthermore, there is a problem that leads to a decrease in productivity and a loss of cost caused by the shutdown of the vacuum pump.

Conventional techniques for solving this problem are disclosed in Korean Patent Application No. 1998-031818 (published on July 25, 1998, hereinafter referred to as 'prior art 1') by Samsung Electronics Co., Ltd. and Kim Kwang-ho. Connection of the vacuum pump ”and

Patent Publication No. 10-2009-0025765 by SMIC Co., Ltd. (published on March 11, 2009, hereinafter referred to as “Prior Art 2”) discloses “Powder trap for vacuum piping of semiconductor device processing process”.

However, in the case of the prior art 1 can be installed on the pipe connecting the vacuum pump and the process chamber to filter the large particle size to prevent the inflow into the vacuum pump,

The foreign matter in the form of powder having a small particle size not filtered by the mesh may be introduced into the vacuum pump as it is, causing the fixing of the vacuum pump, and reducing the degree of vacuum.

In addition, in the case of the prior art 2, the powder trap is installed on the vacuum pipe to collect and cool the powder by aggregation.

In the case of the prior art 2, since the powder trapped in the trap is located on the movement path of the suction gas, there is a possibility that the condensate flows into the vacuum pump by the suction force of the vacuum pump.

In addition, there is a problem that the composition of the powder trap is too complicated to remove the condensation accumulated in the trap.

The present invention has been made to solve the above problems,

The inlet gas is introduced into the vacuum pump through the branch pipe during operation of the vacuum pump by a collecting device including a branch pipe connected to the vacuum pump branched to the side of the main body and a foreign matter receiver connected to the lower part of the main body.

In addition, agglomerates of powder or other impurities contained in the inhalation gas are collected in the foreign matter receiver due to gravity drop caused by its own weight.

By minimizing impurities introduced into the vacuum pump, it is possible to prevent the breakdown of the vacuum pump or accidental accident work and to extend the life of the vacuum pump, thereby reducing the cost.

In particular, it adopts a simple configuration in which the collection device is naturally collected by gravity drop due to the foreign matter's own weight, and it is possible to install the existing vacuum pipe through simple design change to separate the foreign matter which can guarantee economical and installation convenience. It is one object to provide a collecting device for a vacuum pump.

In the main body according to the present invention, a mandrel is provided, and the mesh net of the mandrel is arranged at the inlet of the branch pipe to prevent foreign substances having a certain weight or less from being introduced into the vacuum pump by the suction force of the vacuum pump. It is another object of the present invention to provide a vacuum pump collecting device that can further increase the foreign matter trapping efficiency.

In addition, the lower part of the filter barrel according to the present invention is provided with an opening portion and a blockage portion, the blockage portion is formed biased toward the branch pipe, it is formed to be inclined downward

Prevents foreign matters collected in the foreign matter receiver from entering the branch pipe by the suction force when starting the vacuum pump, and allows foreign substances to flow down the inclined blockages instead of accumulating in the blockages.

It is another object of the present invention to provide a vacuum pump collecting device for separating foreign matters which can further increase the reliability of the product by preventing the foreign substances collected or being collected back into the vacuum pump.

Furthermore, the mounting portion and the foreign matter receiver of the main body according to the present invention are provided to be easily attached and detached by a detachable means to easily and conveniently perform maintenance work such as discarding impurities accumulated in the foreign matter receiver or cleaning the foreign matter receiver. It is another object of the present invention to provide a vacuum pump collecting device for separating foreign matters.

Vacuum pump collecting device for separating foreign matter according to the present invention comprises a main body having a mounting portion in the lower portion; A branch pipe branched to the side of the main body and connected to a vacuum pump; And a foreign matter receiver connected to the mounting portion of the main body, and the foreign matter contained in the suction gas flowing into the vacuum pump is collected in the bottom portion by its own weight.

And it is embedded in the main body according to the invention, characterized in that it is further provided with a mandrel having a mesh network arranged at the inlet of the branch pipe.

In addition, the lower part of the strainer according to the present invention further includes an opening and a blocking portion, wherein the blocking portion is formed to be biased toward the branch pipe and is inclined downward.

Furthermore, the mounting portion and the loading box of the main body according to the invention is characterized in that it is connected by a detachment means.

The vacuum pump collecting device for separating the foreign matter in the intake gas according to the present invention is a vacuum pump by a collecting device including a branch pipe connected to the vacuum pump branched to the side of the main body, and the foreign matter receiver connected to the lower part of the main body During operation, intake gas is introduced into the vacuum pump through the branch pipe,

In addition, agglomerates of powder or other impurities contained in the intake gas are collected in the foreign matter receiver due to gravity drop caused by its own weight.

By minimizing impurities introduced into the vacuum pump, it is possible to prevent the breakdown of the vacuum pump or accidental accident work and to extend the life of the vacuum pump, thereby reducing the cost.

In particular, it is possible to adopt a simple configuration in which the collecting device is naturally collected by the gravity drop due to the foreign matter's own weight, and it is possible to install the existing vacuum pipe through a simple design change, thereby ensuring economic efficiency and convenience of installation.

In the main body according to the present invention, a mandrel is provided, and the mesh net of the mandrel is arranged at the inlet of the branch pipe to prevent foreign substances having a certain weight or less from being introduced into the vacuum pump by the suction force of the vacuum pump. It is possible to further increase the efficiency of collecting foreign substances contained in.

In addition, the lower part of the filter barrel according to the present invention is provided with an opening portion and a blockage portion, the blockage portion is formed biased toward the branch pipe, it is formed to be inclined downward

Prevents foreign matters collected in the foreign matter receiver from entering the branch pipe by the suction force when starting the vacuum pump, and allows foreign substances to flow down the inclined blockages instead of accumulating in the blockages.

It is possible to further increase the reliability of the product by preventing the trapped or collected foreign matter from flowing back into the vacuum pump.

Furthermore, the mounting portion and the foreign matter receiver of the main body according to the present invention are provided to be easily attached and detached by a detachable means to easily and conveniently perform maintenance work such as discarding impurities accumulated in the foreign matter receiver or cleaning the foreign matter receiver. It becomes possible.

Hereinafter, with reference to the accompanying drawings, a vacuum pump collecting device for separating foreign matter according to the present invention,

1 is a front view showing a vacuum pump collecting device according to the present invention, Figure 2 is a conceptual view showing a foreign material collection by the vacuum pump collecting device according to the present invention, Figure 3 is a vacuum pump collecting device according to the present invention 4 is a front view illustrating a manure tube of the vacuum pump collecting device according to the present invention, and FIG. 5 and FIG. 6 are conceptual views showing the manure function of the vacuum pump collecting device according to the present invention. Is an exploded cross-sectional view showing a detachment means of a collecting device for a vacuum pump according to the present invention.

1 and 2, the collection device for a vacuum pump for separating foreign matter according to the present invention

Main body 10; A branch pipe 20 formed to branch in the lateral direction of the main body 10 and connected to a vacuum pump VP; And a foreign matter receiver 30 connected to the lower part of the main body 10 and the foreign matter contained in the suction gas flowing into the vacuum pump VP collected in the bottom part by gravity action by its own weight. It is done by

1 to 3, 5 and 6 in the vacuum pump collecting device for separating foreign matter according to the present invention, the main body 10 is

The cylindrical shape is arranged in parallel with the gravity direction, and the flanges 11 and 13 are formed at the upper and lower portions thereof.

In addition, a vacuum pipe P connected to a clean room (or a clean room) is connected to the upper flange 11 of the main body 10, and a foreign matter receiver 30 is attached to the lower flange 13 by a detachment means 50. Connected,

In addition, a branch pipe 20 which is branched to the side of the main body 10 and connected to the vacuum pump VP is arranged.

Therefore, the suction gas introduced from the clean room is introduced into the vacuum pump VP through the branch pipe 20 from the main body 10.

Foreign substances having a predetermined volume or weight included in the intake gas are collected by falling into the foreign matter receiver 30 arranged directly below the main body 10.

1 to 3, 5 and 6 in the collecting device for a vacuum pump for separating foreign matter according to the present invention, the branch pipe 20 is

It is formed by branching in the lateral direction of the main body 10, and is connected by a vacuum pump (VP) and a vacuum pipe (P), when the operation of the vacuum pump (VP) by the suction force of the exhaust gas and air in the clean room The suction gas flows into the vacuum pump (VP),

In this case, the suction gas flowing into the vacuum pump VP may include various types of foreign substances and the like.

In general, in the process of manufacturing a semiconductor device, various kinds of reaction gases having oxidative properties, flammability, and toxicity are decomposed in a clean room (or clean room) to form a thin film on a wafer.

As such, the reaction gas supplied into the clean room through the reaction gas supply line produces various reaction byproducts such as polymer in the reaction process, and the exhaust gas including the reaction byproduct is sucked or filtered by a vacuum pump. Is released.

In this case, in the exhaust gas including the reaction by-products generated in the clean room, the reaction by-products in the form of powders are agglomerated in various sizes and weights.

Accordingly, when the exhaust gas is sucked by the vacuum pump, reaction by-products in the form of powder are also sucked into the vacuum pump and accumulated in the vacuum pump, thereby acting as a direct cause of the failure of the vacuum pump.

In addition, when foreign substances (bolts or nuts, etc.) generated during various constructions such as vacuum piping lines or vacuum pumps are left undisclosed, foreign substances can be introduced into the vacuum pump by the suction power during operation of the vacuum pump. It can act as another cause of failure.

Therefore, the service life of the vacuum pump is shortened, and the cost burden due to repair or replacement therefor is additionally generated.

Furthermore, there is a problem that leads to a decrease in productivity and a loss of cost caused by the shutdown of the vacuum pump.

That is, the present invention provides a branch pipe 20 connected to the vacuum pump VP among the exhaust gases, powder-type reaction by-products, or other foreign substances sucked together through the vacuum pipe P when the vacuum pump VP operates. Intake gas such as exhaust gas is introduced into the vacuum pump through the

Powder or other foreign matter contained in the intake gas is introduced to the foreign matter receiver 30 to be collected separately without entering the vacuum pump (VP) will be described in more detail below.

1, 2, 5 and 6 in the collecting device (AI) for vacuum pump (VP) for separating foreign matter according to the present invention, the foreign matter receiver 30 is

Is connected to the lower end of the main body 10, the foreign matter contained in the suction gas flowing into the vacuum pump VP during the operation of the vacuum pump (VP) is configured to allow the natural collection to the bottom portion by its own weight.

The foreign matter receiving device 30 according to the present invention is opened in a cylindrical form, the upper part is in communication with the main body 10, the lower part is blocked, and the foreign matter is collected and accumulated,

A flange 31 corresponding to the lower flange 13 of the main body 10 is formed at the upper end of the foreign matter receiver 30 and is coupled to the main body 10 by a detachment means 50 which will be described below. .

That is, the foreign matter receiver 30 is arranged directly below the main body 10, that is, horizontally with the gravity direction.

This is because foreign matters having a volume and weight of more than a certain amount of reaction by-products or other foreign matters in the powder form included in the suction gas flowing in when the vacuum pump (VP) is operated.

Inflow through the vacuum pipe (P) connected to the inside of the clean room is separated from the suction gas without flowing into the branch pipe 20 branched laterally from the main body 10

It is collected and accumulated in the bottom of the foreign matter receiver 30 by the gravity action by its own weight.

Therefore, the collecting device (AI) according to the present invention is the foreign matter having a predetermined volume or weight contained in the intake gas is primarily collected in the foreign matter receiver 30 by gravity action due to its own weight.

In addition, only the suction gas flows into the branch pipe 20 and is sucked into the vacuum pump VP.

In this case, since the intake gas flowing into the branch pipe 20 may include fine powder or foreign matter to be introduced into the vacuum pump (VP) without being naturally collected by gravity due to its own gravity,

Hereinafter will be described in detail with respect to the sieve (40) that is configured to increase the collection efficiency by filtering out the fine powder or foreign matter as described above.

3 to 6, in the vacuum pump collecting device for separating foreign matter according to the present invention, the strainer 40 is

It is made of a cylindrical shape is embedded in the main body 10,

The mesh net 41 is formed at one side thereof to collect the secondary powder by filtering the fine powder or the foreign matter which is not collected by the foreign matter receiver 30 into the branch pipe 20 as described above. To make it possible.

Therefore, the mesh net 41 of the manure 40 must be arranged in front of the inlet 21 of the branch pipe 20 into which the suction gas is introduced into the vacuum pump VP, and the hole size of the mesh net 41 is It is preferable that it is formed in a suitable size which can filter out fine powder or a foreign substance.

In addition, the lower part of the filter box 40 according to the present invention is further provided with an opening portion 43 and the blockage portion 45,

First, the opening 43 is formed to allow impurities falling into the foreign matter receiver 30 to pass therethrough so as to smoothly collect the impurities.

And the blocking portion 45 is formed to be biased toward the branch pipe 20, it is formed to be inclined in the downward direction,

This means that powder or foreign matter already collected in the foreign matter receiver 30 is introduced into the branch pipe 20 by the initial suction force of the vacuum pump VP at the moment of starting the vacuum pump VP. It is a configuration to prevent.

In this case, the powder or foreign matter introduced into the branch pipe 20 toward the reverse side will rise toward the branch pipe 20.

Therefore, when the blockage portion 45 is formed to be biased toward the branch pipe 20, a powder or a foreign substance to be reversed flows into the vacuum pump VP through the branch pipe 20 by the blockage portion 45. It is possible to block backflow.

In addition, the reverse flow of powder or foreign matter as described above may occur even when the vacuum pump (VP) is in operation. In this case, the powder collected in the foreign matter receiver 30 by the clogging part 45 or It is possible to block backflow of foreign substances.

In addition, the clogging portion 45 is approximately half of the lower portion of the strainer 40 and the opening portion 43 is distributed about half,

Therefore, powder or foreign matters collected in the foreign matter receiver 30 may be collected by being accumulated on the upper surface of the clogging part 45 during the dropping.

In this case, the impurity accumulated in the upper surface of the blocking portion 45 at the moment of starting to operate the vacuum pump VP immediately passes through the branch pipe 20 by the initial suction force of the vacuum pump VP. Reverse flow into (VP) occurs.

Therefore, when the blocking portion 45 is formed to be inclined at a predetermined angle in the downward direction, even if the powder or foreign matter collected falls on the upper surface of the blocking portion 45, the foreign material receiving by riding the upper surface of the inclined blocking portion 45 I can flow naturally in (30),

It is possible to prevent the accumulation of powder or foreign matter on the upper surface of the clogging portion 45, thereby preventing the impurities flowing back into the vacuum pump (VP).

And the upper part of the filter barrel 40 is formed by the flange portion of the edge portion 47 is connected,

An annular mounting groove 47a is formed inside the edge portion 47, and an upper end portion of the strainer 40 is bent to form a bent portion 46 having a constant elasticity.

Inserting the bent portion 46 of the filter tube 40 is inserted into the mounting groove 47a of the edge portion 47, and the filter tube 40 is the edge portion 47 by the elasticity of the bent portion 46 Is fixedly supported.

In addition, the edge portion 47 is arranged between the flange formed in the upper flange 11 and the vacuum pipe (P) of the main body 10, so that when the body 10 and the vacuum pipe (P) is coupled to each flange By pressing and fixed in the upper and lower by

The strainer 40 may be arranged inside the main body 10.

Furthermore, as shown in FIG. 7, the foreign matter receiver 30 connected to the lower portion of the main body 10 according to the present invention is formed to be detachable by the detaching means 50.

Separating the foreign matter receiver 30 from the body 10 to discard the collection of the powder or foreign matter accumulated in the foreign matter receiver 30, or maintenance work such as cleaning, replacement and repair of the foreign matter receiver 30 It is configured to be easily made.

It is a flange 31 is formed on the foreign matter receiver 30,

The detachment means 50 presses the flange 31 of the foreign matter receiver 30 and the lower flange 13 of the main body 10 to fix the main body 10 and the foreign matter receiver 30 or release the pressure. To separate.

That is, the detachable means 50 is made to include the upper and lower support pieces 51 and 53,

Through-hole 51a is formed in the upper support piece 51, and a screw hole 53a is formed in the lower support piece 53 so that a fastening bolt 55 of the upper support piece 51 is formed. It is inserted into the through hole 51a and fastened to the screw hole 53a to the lower support piece 53.

In this case, the lower support piece 51 and the lower support piece 53 are provided with a hook hook (51b, 53b) protruding to one side and bent end thereof, respectively,

In the lower flange 13 of the main body 10 and the flange 31 of the foreign matter receiver 30, annular engaging grooves 13a and 31a corresponding to the respective hook hooks 51b and 53b are each flanged. (13) (31) is formed inside

When the upper and lower support pieces 51 and 53 are coupled to each other by the fastening bolts 55, the hook hooks 51b and 53b are fitted into the catching grooves 13a and 31a, respectively, and the main body 10 is attached thereto. And foreign material receiving 30 is to be combined by pressing.

On the contrary, when the fastening bolts 55 are released from the upper and lower support pieces 51 and 53, the locking hooks 51b and 53b are removed from the locking grooves 13a and 31a. And the foreign matter receiver 30 is separated.

In addition, a female or male inserting portion 51c is formed below the upper support piece 51, and a male or female corresponding to the inserting portion 51c of the upper supporting piece 51 is provided on the lower support piece 53. Insertion part 53c is provided

When the support pieces 51 and 53 are fastened by the fastening bolts 55, the support portions 51 and 53 are coupled to each other while the insertion portion 51c and the corresponding insertion portion 53c are coupled to each other. By allowing them to be combined without deviating, the work efficiency can be further increased.

In addition, in the case of the vacuum pipe (P) connected to the upper portion of the main body 10 it is also preferable to introduce the same configuration as the removable means 50 so that the maintenance work can be easily and easily made.

In the above description with reference to the accompanying drawings, the present invention has been described with a focus on a specific shape and direction in the vacuum pump collecting device for separating foreign matters, the present invention can be variously modified and changed by those skilled in the art, such variations and modifications Should be construed as being included in the scope of the invention.

1 is a front view showing a collecting device for a vacuum pump according to the present invention,

2 is a conceptual diagram showing a foreign matter collection by the vacuum pump collecting device according to the present invention,

Figure 3 is a cross-sectional view showing the main body and manure of the vacuum pump collecting device according to the present invention,

4 is a front view showing the manure of the vacuum pump collecting device according to the invention,

5 and 6 is a conceptual diagram showing the manure function of the vacuum pump collecting device according to the present invention,

Figure 7 is an exploded cross-sectional view showing the detachment means of the collecting device for a vacuum pump according to the present invention.

<Explanation of Signs of Major Parts of Drawings>

10: main body 11: upper flange

11a: Hanging groove 13: Lower Flange

13a: Hanging groove

20: branch pipe 21: entrance

30: foreign material receiver 31: flange

40: filter tube 41: mesh network

43: opening 45: clogging

46: bend portion 47: the edge portion

47a: mounting groove

50: removable means 51: upper support piece

51a: through hole 51b: hook hook

51c: Insertion 53: Lower Supporting Piece

53a: screw hole 53b: hook

53c: corresponding insertion part 55: tightening bolt

VP: Vacuum Pump P: Vacuum Pipe

Claims (4)

main body; A branch pipe branched to the side of the main body and connected to a vacuum pump; And A foreign matter receiver connected to the lower end of the main body and collecting foreign matters contained in the suction gas introduced into the vacuum pump by the own weight; Collection device for a vacuum pump for separating foreign matter consisting of. The method of claim 1, Embedded in the main body, The collecting device for a vacuum pump for separating foreign matters, characterized in that the filter tank having a mesh network arranged at the inlet of the branch pipe is further provided. The method of claim 2, The lower part of the strainer is further provided with an opening and a blockage, The blockage part The vacuum pump collecting device for separating foreign matters, characterized in that formed to be biased toward the branch pipe, inclined downward. 4. The method according to any one of claims 1 to 3, Mounting unit and the loading box of the main body is a vacuum pump collecting device for separating foreign material, characterized in that connected by the detachment means.

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