KR20110021359A - Pattern blancket with improved measurement stability, and method of manufacturing the same - Google Patents

Abstract

PURPOSE: A blanket and a manufacturing method thereof are provided to minimize a pattern size location on a black matrix pattern printing and increase the numerical stability of the blanket. CONSTITUTION: A primer uses a primer for silicon attachment. A supporting layer includes PMMA(polymethyl metaacralate), PET(polyethylene terephthlate), PC(poly carbonate) or COC(cycloolefin copolymer). The supporting layer is coated on the PET. A printing layer of a blanket is coated on a black matrix master mold patterned in a wet etching.

Description

PATTERN BLANCKET WITH IMPROVED MEASUREMENT STABILITY, AND METHOD OF MANUFACTURING THE SAME

The present invention relates to a pattern blanket with improved dimensional stability, and a method of manufacturing the pattern blanket, and more particularly, to a pattern blanket for improving the size and position stability of a master mold during pattern printing of a black matrix to improve large area patterning dimensional stability, and It relates to a manufacturing method thereof.

At present, the most studied printing technique to replace photolithography for color filters in LCD is reverse off-set printing. In the case of the reverse offset, the dimensional stability is good, but the high step cannot be raised, and in the case of the black matrix (BM) in which the pattern is continuous, its printing characteristics are inferior to those of red, green, and blue. Therefore, in this study, high-level pattern printing is possible, and pattern printing of black matrix was performed by using direct soft gravure pattern printing method having good printing characteristics of black matrix. However, in the case of soft gravure, when the pattern is made from the master mold, there is a problem that the dimensional stability of the pattern is lower than that of the master mold due to the curing shrinkage of the silicon blanket.

In black matrix pattern printing, the manufacture of a silicon blanket that first formed the same replica as the master mold must be satisfied, so that position and dimensional stability can be taken in the actual pattern printing process.

In addition, in the case of direct gravure printing, since the pattern is in the blanket, the numerical error between the master mold and the pattern blanket should be minimized. This is because the pattern is in the blanket. This is because the support layer should be well fixed to minimize the distortion of the dimensions and positions of the pattern. Therefore, when the attachment conditions between the printing layer and the support layer are changed in the conventional blanket production method, the numerical stability is improved.

An object of the present invention is to provide a blanket and a method of manufacturing the same which have improved numerical stability by minimizing the position and size error of pattern size in black matrix pattern printing.

The present invention has been made to solve the problems of the prior art,

In the black matrix blanket in which the support layer, the adhesion layer, the printing layer, and the master mold are sequentially laminated, a blanket using a primer is provided as the adhesion layer.

In addition, in the blanket of the present invention, the primer provides a blanket, characterized in that the use of a primer for attaching silicon.

In addition, in the blanket of the present invention, the silicone adhesion primer provides a blanket, characterized in that the vinyl silane compound or triethoxy silane compound.

In the blanket of the present invention, the support layer is characterized in that the polyethylene terephthalate (PET), polymethyl methacrylate (PMMA), polycarbonate (PC), polyethylene, polypropylene, cuppor (SUS) or SUS foil To provide a blanket.

In addition, in the blanket of the present invention, the support layer provides a blanket, characterized in that the urethane-based compound is coated on polyethylene terephthalate (PET).

Also,

(a) applying a silicone resin coating to a black matrix master mold patterned by wet etching to prepare a printed layer of a blanket;

(b) coating a primer layer on the support layer; And

(c) attaching the print layer and the support layer of the blanket before the silicone resin is cured

It provides a blanket manufacturing method comprising a.

In addition, in the manufacturing method of the present invention, when the viscosity of the silicone resin is 1.5 to 2.5 times the initial viscosity, it provides a blanket manufacturing method characterized in that the step (c) of the adhesion is carried out.

According to the present invention, when the printing layer and the support layer of the blanket is attached to the primer layer instead of the adhesive layer applied to attach the support layer and the printing layer of the conventional blanket, the error of the blanket pattern for printing of the black matrix is more than 10%. It can be reduced, and the thickness uniformity in the blanket can also be taken as the existing adhesive layer blanket.

Hereinafter, the present invention will be described in detail.

The present invention relates to a blanket using a primer as the adhesion layer in a blanket of a black matrix in which a supporting layer, an adhesion layer, a printing layer, and a master mold are sequentially stacked.

In the present invention, a primer is used instead of a conventional adhesive to attach the support layer and the print layer of the blanket, which is used to detach the blanket from the master mold when attaching the support layer with a primer rather than using a silicone adhesive. This is because the dimensional error can be reduced to less than 10%. The primer uses a silicone adhesion primer having a vinyl capable of reacting with the silicon layer and a reactor capable of attaching to the support layer. Examples of the silicon adhesion primer include a vinyl silane compound such as vinyltrimethoxysilane or a triethoxy silane compound.

Since the dimensional and positional stability of the blanket is determined not by the blanket itself but by the degree of adhesion between the support layer and the printed layer of the blanket, the dimensional and positional stability is improved as the adhesion force is increased. In the case of the silicone adhesive used in the past, a method of attaching a fully cured silicone blanket and a support layer by interaction between layers is used.However, when a primer is used, a reaction site is introduced between the layers, and a curing agent in the silicone layer is used. Components such as vinyltrimethoxysilane used in the primer layer may be contained, and thus adhesion may be improved through the reaction.

The support layer used in the present invention is at least one selected from the group consisting of polyethylene terephthalate (PET), polymethyl methacrylate (PMMA), polycarbonate (PC), polyethylene and polypropylene, and a relatively flexible film is preferable. . In addition, materials other than the thermoplastic film, which are flexible and can be wound on a roll without wrinkles, for example, copper, stainless steel (SUS) foil, and the like are also possible.

In addition, in the case of the PET used as the support layer, in the case of ordinary PET which is not treated at all, conventionally, plasma and corona treatment may be performed to improve adhesion to the primer. . However, since the treatment method is generally not permanent and the effect of surface treatment is not great, it is preferable to use PET coated with a urethane-based compound in PET in the present invention.

In addition, since PET also causes expansion at a temperature near the glass temperature (Tg) when the silicone resin is thermally cured, it is preferable to use a grade having higher thermal stability than general grade PET if possible. Otherwise, using normal PET as a support layer after high-temperature exposure to sufficiently remove the thermal history is a way to further increase the dimensional and positional stability.

In the present invention, the master mold is a region for providing a pattern, and the black matrix pattern is replicated from the master mold to the silicon blanket. The duplicated pattern is printed on glass by gravure printing. The master mold was prepared by wet etching of glass.

The present invention also provides a blanket manufacturing method comprising the following steps.

(a) applying a silicone resin coating to a black matrix master mold patterned by wet etching to prepare a printed layer of a blanket;

(b) coating a primer layer on the support layer; and

(c) attaching the print layer and the support layer of the blanket before the silicone resin is cured.

Hereinafter, the blanket manufacturing method will be described in detail.

(a) applying a resin coating on a black matrix master mold patterned by wet etching to prepare a printed layer of a blanket;

The printed layer of the blanket is manufactured by coating a silicone resin on the black matrix master mold patterned by wet etching. Silicone resin is a basic material for making a pattern blanket.Silicone resin has a property of forming a pattern according to the pattern of a master mold, and then hardening and hardening. Since it has the property of "), silicone resin is selected and the printed layer of a blanket is manufactured.

(b) coating the primer layer on the support layer

The support layer is coated using a silicone attachment primer instead of a silicone adhesive used for attachment to a conventional master mold.

(c) attaching the print layer and the support layer of the blanket before the silicone resin is cured

Since the adhesion of the primer layer is not made after the silicone resin of the printing layer coated in step (a) is completely cured, the bonding with the primer coated support layer should be made before the curing is completed. However, when the silicon resin is coated on the master mold and the bonding is performed too early, the thickness uniformity of the silicone resin is severely lowered. In this case, although the viscosity is increased by curing for a certain period of time, the patterning blanket can be manufactured to satisfy the conditions of adhesion and thickness uniformity by selecting the conditions in which reaction sites that may be cured remain and proceeding the bonding. . Therefore, when the viscosity of the silicone resin is 1.5 to 2.5 times the initial viscosity, it is necessary to perform the attachment of step (c).

Hereinafter, the present invention will be described using examples. The following examples are provided to illustrate the present invention, and the scope of the present invention includes the inventions described in the following claims and their substitutions and modifications within the equivalent ranges, and are not limited to the scope of the present examples. .

Example

Wacker's RT607 resin is coated with chromium glass (Cr glass) on a master mold (Japanese SHIN-EI-SHA) wet-etched with a black matrix pattern (SIN-EI-SHA, Japan). Curing proceeded. If the adhesion is attempted immediately without the first room temperature curing, the thickness uniformity is severely changed, and the surface unevenness is severely generated due to the static electricity of the uncured silicon. The primer G790 was coated with a support layer of PET (toyobo A4300 grade) mayer bar # 5, followed by blowing the solvent in the primer layer at 90 ° C. for 15 minutes, and then coating the support layer PET with a semi-cured silicone resin. It was adhered to the master mold. After bonding, the adhesive force can be maximized through secondary heat curing for two days at 90 ° C.

Comparative example

Silicone resin (Wacker RT607) was coated on the master mold (Japan SHIN-EI-SHA) and then completely cured, followed by the adhesive layer of ST-910BH (peel strength> 1,150 gf / in (ASTM D3330)) of Daehyun ST. It bonded with the support layer PET using the silicone adhesive film.

1 is a viscosity increase curve over time of the embodiment according to the present invention. 1, the viscosity is increased from 60 minutes, the viscosity is less than 60 minutes, the gap between the two layers when the bonding is not maintained, the thickness uniformity is reduced during bonding, 60 minutes If exceeded, the phenomenon that the adhesion is significantly lowered can be confirmed, and it can be seen that actual bonding should be performed in 60 minutes.

Figure 2 compares the difference between the dimensional stability and the master mold by measuring the distance between the alignment of the positions marked on each position in the manufactured blanket. As a method for measuring the difference in numerical error, a non-contact three-dimensional microstructure measuring system nano-scan device capable of measuring the distance between alignments was used.

The figure on the left side of FIG. 2 shows a master mold. The master mold is designed to make two sheets of second generation WXGA-class 14.2inch, and in this patent, the distance between each alignment is measured to determine the dimensional and positional stability of the master mold and the manufactured silicon blanket. It was. Alignment is a cross shape shown in Figure 2 and a total of eight are located at the corner of each pattern. The above alignment is an alignment mark used when a photoresist (PR) operation of RGB (red, green, and blue) is performed in an actual photoresist (PR) process. The border indicated by the black line in the figure is the sealing portion of the color filter and is the black line in the actual color filter. In addition, the actual black matrices (BM) patterns are finely distributed to the WXGA level pixels in the black border line.

The numbers in the figure on the left side of FIG. 2 correspond to the numbers indicating the positions of the graphs on the right side of FIG. That is, number 1 on the left side of FIG. 2 corresponds to position 1 of the right side graph.

The improvement of the numerical stability of the blanket of each Example and a comparative example can be seen in the figure on the right side of FIG. The y-axis in the figure on the right side of Figure 2 shows the difference in dimensions between the master mold and the blanket, the x-axis shows the position marked on the master mold, it can be seen that the numerical stability of the embodiment is superior to the comparative example using a conventional adhesive.

1 is a graph of viscosity increase curve over time of the embodiment according to the present invention.

Figure 2 is a graph comparing the numerical stability of the blanket of Examples and Comparative Examples according to the present invention.

Claims (7)

A blanket of a black matrix in which a support layer, an adhesion layer, a printing layer, and a master mold are sequentially stacked, wherein a blanket is used as the adhesion layer. The blanket of claim 1, wherein the primer is a silicone adhesion primer. The blanket of claim 2, wherein the silicone adhesion primer is a vinyl silane compound or a triethoxy silane compound. The blanket of claim 1, wherein the support layer is made of polyethylene terephthalate (PET), polymethylmethacrylate (PMMA), polycarbonate (PC), polyethylene, polypropylene, cuppor or SUS foil. . The blanket of claim 1, wherein the support layer is formed by coating a urethane-based compound on polyethylene terephthalate (PET). (a) applying a silicone resin coating to a black matrix master mold patterned by wet etching to prepare a printed layer of a blanket; (b) coating a primer layer on the support layer; And (c) attaching the print layer and the support layer of the blanket before the silicone resin is cured Blanket manufacturing method comprising a. The blanket manufacturing method according to claim 6, wherein when the viscosity of the silicone resin is 1.5 to 2.5 times the initial viscosity, the step (c) is carried out.

Images