KR20110015164A - Apparatus for laminating and method thereof - Google Patents

Abstract

PURPOSE: Lamination device and method are provided to effectively bond a solar cell to a back sheet since a solar cell module is heated and pressed from its upper and lower parts and thus the EVA(Ethylene Vinyl Acetate) film of the solar cell module uniformly melts. CONSTITUTION: A lamination device comprises a lamination unit(3), pressure sensors(30a,30b) and a control unit(40). The lamination unit comprises upper and lower chambers(10,20). The upper and lower chambers tightly support and press the solar cell module. The pressure sensors measure the inner pressures of the upper and lower chambers. The control unit gradually increases the pressure difference between the upper and lower chambers based on the pressures of the measured upper and lower chambers.

Description

Laminate apparatus and its method {APPARATUS FOR LAMINATING AND METHOD THEREOF}

The present invention relates to a laminate apparatus and a method thereof, and more particularly, to a laminate apparatus and a method for controlling the internal pressure and temperature so that the EVA film can be evenly laminated on the surface of the solar cell during the lamination process of the solar cell. In providing.

Fossil fuels such as liquefied natural gas and petroleum are the most used energy sources in the world. These fossil fuels have a great impact on industrialization and industrialization, but recently, serious problems such as environmental pollution, as well as concerns about exhaustion of these fossil fuels, have been studied.

Among various alternative fuels, solar energy has the characteristics of pollution-free, indefinite, vibration-free, and noise-free, and thus, many studies have been conducted as alternative energy in the future, and recently, many solar cells that accumulate and use solar energy have been introduced.

The manufacturing method of such a solar cell is already well known in various literatures, has a long life of at least 20 years, semi-automated or easy to automate the power generation system and has the advantage of minimizing the cost of operation and maintenance.

Solar cells are manufactured in the form of cells and exposed to the outside to absorb solar energy. At this time, the post-processes can withstand the natural environment, such as rain, snow, wind or fog, and hail. As a result, a lamination process is performed to coat ethylen vinyl acetate (EVA) on the surface of the solar cell.

In the laminate of the solar cell module, a string (solar cell) is sandwiched between a vinyl film or a back sheet through a filler such as EVA (ethylene vinyl acetate) resin, and heated under vacuum to heat the interior of the laminate. This is done by melting the filler.

DESCRIPTION OF RELATED ART Conventionally, as a laminating apparatus for manufacturing such a solar cell module etc., the laminating apparatus provided with the upper chamber provided with the diaphragm which expands downward, and the lower chamber provided with the heater panel (hot plate) is known. . In such a laminate apparatus, the upper chamber and the lower chamber are sealed and depressurized to be in a vacuum (low pressure) state, and then an atmosphere is introduced into the diaphragm to pressurize the solar cell module between the diaphragm and the upper surface of the heater panel, and to the heater panel. By heating.

However, in the conventional laminate device, due to the arrangement of the heater provided inside the heater panel, a deviation occurs in the heating for the solar cell module which is the laminate body, for example, the center side of the heater panel is heated more than the end side. There is concern.

Therefore, there arises a problem that the solar cell module cannot be properly manufactured due to uneven heating during the lamination process for the conventional solar cell module.

The present invention is to solve the above problems, an object of the present invention when manufacturing a solar cell module (solar cell module), by heating and pressing a certain time in the vertical direction solar cell module (front glass plate + EVA film + solar cell) + EVA film + back sheet is sequentially laminated) to provide a laminate device and a method for bonding the solar cell and the back sheet is melted in an even distribution.

In addition, the present invention when the upper chamber and the lower chamber is in contact with each other for laminating, when the positive pressure (+ pressure) is applied to the upper chamber, the negative pressure (-pressure, vacuum pressure) in the lower chamber, the horizontal arrangement in the upper chamber The pressurized diaphragm presses the solar cell module placed on the heating plate of the lower chamber with a stepped wave pressure, and the process of post-treatment can be eliminated by putting it in a baking apparatus, which is additionally added to the laminator. In providing the technology of profit.

According to an aspect of the present invention, there is provided a laminate apparatus for a solar cell module, the laminate apparatus comprising: a laminate unit having an upper and a lower chamber for clamping and pressing a solar cell module; A pressure sensor for measuring pressure in the upper and lower chambers, respectively; And control means for controlling the pressure difference between the upper and lower chambers to be gradually increased based on the pressure value of the upper and lower chambers measured by the pressure sensor.

When the pressure difference between the upper and lower chambers is increased step by step, the control unit counts the target time for each step, and when the pressure difference between the upper and lower chambers reaches the target value before the target time, the pressure difference between the upper and lower chambers is moved to the next step. It is desirable to increase.

In addition, when the pressure difference between the upper and lower chambers is increased step by step, the control means counts the target time for each step, and determines whether or not abnormality is determined based on whether the pressure difference between the upper and lower chambers reaches the target value before the target time. desirable.

In addition, when the pressure difference between the upper and lower chambers is increased step by step, the control means counts the target time for each step, and determines whether or not abnormality is determined based on whether the pressure difference between the upper and lower chambers reaches the target value before the target time. desirable.

The control means preferably increases the pressure for the upper chamber when the upper and lower chambers are both vacuum based on the pressure value for the upper and lower chambers measured by the pressure sensor.

In addition, the control means preferably stops the increase in pressure for the upper chamber when the pressure value for the upper chamber reaches the final target value based on the pressure value for the upper and lower chambers measured by the pressure sensor.

The control means preferably stops the increase in pressure to the upper chamber when the lower chamber is vacuum and the upper chamber reaches atmospheric pressure.

On the other hand, the laminate method of a solar cell module according to an embodiment of the present invention, the pressure measuring step of measuring the pressure in the upper and lower chambers respectively sandwiching and pressurizing the solar cell module; And a control step of controlling the pressure difference between the upper and lower chambers to be gradually increased based on the pressure value of the upper and lower chambers measured by the pressure sensor.

In addition, in the control step, when the pressure difference between the upper and lower chambers is increased step by step, the target time is counted for each step. When the pressure difference between the upper and lower chambers reaches the target value before the target time, the pressure difference between the upper and lower chambers is moved to the next step. It is desirable to increase.

In the control step, when the pressure difference between the upper and lower chambers is increased step by step, the target time is counted for each step, and whether the abnormality is determined based on whether the pressure difference between the upper and lower chambers reaches the target value before the target time. desirable.

In the control step, when the pressure difference between the upper and lower chambers is increased step by step, the target time is counted for each step, and whether the abnormality is determined based on whether the pressure difference between the upper and lower chambers reaches the target value before the target time. desirable.

In the control step, when the upper and lower chambers are all vacuum based on the pressure value for the upper and lower chambers measured in the pressure measuring step, it is preferable to increase the pressure for the upper chamber.

In addition, in the control step, when the pressure value for the upper chamber reaches the final target value based on the pressure value for the upper and lower chambers measured in the pressure measuring step, it is preferable to stop increasing the pressure for the upper chamber.

Also, in the control step, it is preferable to stop the increase in pressure for the upper chamber when the lower chamber is vacuum and the upper chamber reaches atmospheric pressure.

According to the present invention, when manufacturing a solar cell module (solar cell module), by heating and pressing for a predetermined time in the vertical direction of the solar cell module (front glass plate + EVA film + solar cell + EVA film + back sheet is sequentially stacked) The EVA film is melted in an even distribution so that the solar cell and the back sheet are bonded well, thereby improving the quality of the solar cell module.

In addition, the present invention when the upper chamber and the lower chamber is in contact with each other for laminating, when the positive pressure (+ pressure) is applied to the upper chamber, the negative pressure (-pressure, vacuum pressure) in the lower chamber, the horizontal arrangement in the upper chamber The pressurized diaphragm presses the solar cell module placed on the heating plate of the lower chamber with a stepped wave pressure, and the process of post-treatment can be eliminated by putting it in a baking apparatus, which is additionally added to the laminator. Has a beneficial effect.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Repeated descriptions, well-known functions and configurations that may unnecessarily obscure the subject matter of the present invention, and detailed description of the configuration will be omitted. Embodiments of the present invention are provided to more completely describe the present invention to those skilled in the art. Accordingly, the shape and size of elements in the drawings may be exaggerated for clarity.

1 and 2 are views showing the overall configuration of the laminate device according to an embodiment of the present invention, Figure 3 is a block diagram schematically showing the control structure of the laminate device of Figure 2, Figure 4 is a view of the present invention 5 is a view illustrating a pressure control waveform in a lamination process according to an embodiment, and FIG. 5 is a view illustrating a flow of a lamination method according to an embodiment of the present invention.

1 and 2, a laminate apparatus to which a lamination method according to an embodiment of the present invention is applied includes a laminate unit 3 configured to charge a solar cell module therein to initiate lamination. For example, it is formed in the size which can laminate the pyramid body which has the predetermined size charged inside.

The lamination apparatus is provided with the conveyance sheet 5 which positions the solar cell module 1 and enters the lamination unit 3. On the right side of the lamination unit 3, the supply conveyor 6 which conveys the solar cell module 1 to which laminating process is to be performed to the lamination unit 3 direction is arrange | positioned. On the other hand, on the left side of the laminate unit 3,

The carrying-out conveyor 7 which carries out the battery module 1 from the lamination unit 3 side is arrange | positioned. Then, it is delivered in the order of the supply conveyor 6, the conveyance sheet 5, and the unloading conveyor 7.

In addition, a vacuum hole is formed in an upper portion of the laminate unit and an upper chamber 10 in which an upper vacuum chamber is formed by a diaphragm 13, and a lower chamber in which a vacuum hole is formed in a lower portion and a lower vacuum chamber is formed therein ( 20) and a vacuum flow path is formed in the upper chamber 10 in a predetermined shape around the vacuum hole.

The upper chamber 10 of the laminate unit 3 is configured to move up and down by lifting means, and to move up and down from the lower chamber 20 while maintaining a posture parallel to the lower chamber 20. Here, the lifting means employs a hydraulic cylinder to raise and lower the upper chamber 10 by a piston rod driven by the cylinder. For example, when the cylinder is operated while the tip of the piston rod of the cylinder is fixed to the upper chamber 10 and the piston rod is extended, the upper chamber 10 is raised to fall from the upper surface of the lower chamber 20, and accordingly The upper and lower chambers 10 and 20 are opened. On the other hand, when the cylinder is moved and the piston rod is shortened, the upper chamber 10 descends to be in close contact with the upper surface of the lower chamber 20, and the sealed state.

In addition, a heating plate 22 for laminating time heating is disposed above the lower chamber 20, and a diaphragm is mounted so that the inside of the upper chamber 10 is horizontally partitioned, that is, the diaphragm and the upper chamber 10. The space enclosed by the inner wall surface of) forms the upper chamber 10. As the diaphragm 30, a silicon diaphragm, a butyl diaphragm, etc. are used, for example. In addition, the suction mechanism is provided to communicate with the upper chamber 10, and is configured to vacuum the inside of the upper chamber 10 through the suction mechanism, through which the atmospheric pressure can be introduced into the upper chamber 10.

Here, the heater plate is disposed in the space surrounded by the diaphragm and the inner wall surface of the lower chamber 20. The heating plate 22 is configured to install a heater inside the metal plate made of aluminum. And the solar cell module 1 carried in the upper position of the heater panel 36 by the conveyance sheet 5 is raised and lowered by the lifting mechanism (not shown) which used the fin, and the conveyance sheet 5 It is comprised so that it may be lifted from the back side and may be located on the conveyance sheet 5.

In addition, the suction chamber 15 is formed to be in communication with the lower chamber 20, the vacuum suction into the lower chamber 20 through the suction chamber 15, the lower chamber 20 through the suction chamber 15. Is configured to introduce atmospheric pressure.

Referring to Figure 3, the control configuration of the laminate device according to an embodiment of the present invention in more detail, the laminate unit having upper and lower chambers (10, 20) for sandwiching and pressing the solar cell module; A pressure sensor measuring pressure in the upper and lower chambers 10 and 20, respectively; And control means for controlling to gradually increase the pressure difference between the upper and lower chambers 10 and 20 based on the pressure values for the upper and lower chambers 10 and 20 measured by the pressure sensors 30a and 30b. .

Here, the temperature sensor for measuring the temperature inside the upper and lower chambers (10, 20) and the pressure sensor (30a, 30b) for measuring the pressure and the position sensor for sensing the position of the solar cell module, etc. are configured together. The configuration of the temperature sensor, the pressure sensor (30a, 30b) and the position sensor configured in the laminate device can be easily understood by those skilled in the art, so detailed description thereof will be omitted.

The control means 40 receives electrical signals generated from the temperature sensors, the pressure sensors 30a and 30b, and the position sensors to control the laminating process of the laminating device step by step. Thus, the control means 40 The laminating process will be initiated according to the laminating method of the present invention described below.

Here, the control means 40, when manufacturing a solar cell module (solar cell module), by heating and pressing for a predetermined time in the vertical direction, the solar cell module (front glass plate + EVA film + solar cell + EVA film + back sheet in order) Laminated) EVA film is melted in an even distribution to control the entire process so that the solar cell and the backsheet are bonded well.

When the pressure difference between the upper and lower chambers 10 and 20 is increased step by step, the control means 40 counts the target time for each step, and the pressure difference between the upper and lower chambers 10 and 20 before the target time is increased. When the target value is reached, it is desirable to increase the pressure difference between the upper and lower chambers 10 and 20 to the next step.

Here, the control means 40 is the upper chamber 10 when the upper and lower chambers 10 and 20 are all vacuum based on the pressure values of the upper and lower chambers 10 and 20 measured by the pressure sensors 30a and 30b. To increase pressure.

In addition, when the pressure difference between the upper and lower chambers 10 and 20 is increased step by step, the control means 40 counts the target time for each step, and the pressure difference between the upper and lower chambers 10 and 20 before the target time is increased. It is preferable to determine whether an abnormality is based on whether the target value is reached.

When the pressure difference between the upper and lower chambers 10 and 20 is increased step by step, the control means 40 counts the target time for each step, and the pressure difference between the upper and lower chambers 10 and 20 before the target time is increased. The abnormality is determined based on whether the target value is reached.

On the other hand, the control means 40, the upper chamber when the pressure value for the upper chamber 10 reaches the final target value based on the pressure values for the upper and lower chambers 10, 20 measured by the pressure sensors (30a, 30b) The increase in pressure to 10 is stopped.

Here, the control means 40, it is preferable that the lower chamber 20 is a vacuum and the upper chamber 10 to stop the increase in pressure to the upper chamber 10 when the atmospheric pressure reaches.

In summary, the control means 40 applies a positive pressure (+ pressure) to the upper chamber 10 when the upper chamber 10 and the lower chamber 20 are in contact with each other for laminating, and negative pressure in the lower chamber 20. (-Pressure, vacuum pressure) is applied. Accordingly, the diaphragm 13 arranged horizontally in the upper chamber 10 presses the solar cell module placed on the heating plate of the lower chamber 20 at a pressure of the stepped waveform described below to proceed with the laminate fixing. Through this, it is possible to omit the step of post-treatment in the existing baking mechanism (baking mechanism) in addition to the laminator.

Referring to FIG. 4, the control means 40 is closed by lowering the upper chamber 10 when the solar cell module is located therein and in close contact with the upper surface of the lower chaver. In the closed state, if the internal pressure difference is generated such that the internal pressure of the upper chamber 10 is gradually increased to be higher than the internal pressure of the lower chamber 20 by using the intake / exhaust mechanism 15, the diaphragm causes the solar cell module 1 to close. Pressing stepwise to the heating plate 22 side. The pressure control waveform illustrated in FIG. 3 exemplifies an example, and the step level value for varying the pressure stepwise according to the configuration of the laminate and the size and material of the laminate may be changed.

Hereinafter, a laminating method according to an embodiment of the present invention will be described with reference to the accompanying drawings. In the description, the laminate device described above will be described as an example.

Referring to FIG. 5, first, the control means 40 initializes the upper and lower chambers 10 and 20 before starting the lamination process (S10). That is, when the conveyance sheet 6 receives the solar cell module 1, the upper chamber 10 of the laminate unit 3 is lifted and it is in an open state. In addition, the upper chamber 10 discharges the internal air through the intake and exhaust ports 15, and the lower chamber 20 introduces the atmosphere through the intake and exhaust ports 15.

Next, the control unit 40 receives the pressure values measured by the pressure sensors 30a and 30b provided in the upper chamber 10 to determine whether the upper chamber 10 is vacuum (S20). At the same time, the solar cell module 1 to be laminated is supplied to the supply conveyor 6 by means such as a robot (not shown). The solar cell module 1 located in the supply conveyor 6 is conveyed to the left direction by the operation of the supply conveyor 6, and the conveyance sheet 5 is conveyed from the supply conveyor 6 the solar cell module ( Accept 1).

Here, the control means 40 checks whether the solar cell module is in the correct position by receiving a signal for detecting the solar cell module from the position sensor provided in the laminate unit (S30). When the control means 40 confirms the correct position of the solar cell module, the upper chamber 10 is lowered and sealed (S40). That is, the upper chamber 10 is lowered, the solar cell module 1 is covered by the upper chamber 10, and the laminate unit is sealed. In this manner, the solar cell module 1 is stored inside the laminate unit 3.

Next, the control means 40 receives the pressure value measured by the pressure sensor 30b provided in the lower chamber 20 to determine whether the lower chamber 20 is vacuum (S20).

In this way, the control means 40 determines whether the initial condition of the laminate is satisfied according to whether the vacuum target value and the target time of the upper and lower chambers 10 and 20 are reached through the above-described steps S20 and S50 (S60). That is, in the laminate unit 3, the inside of the upper chamber 10 and the inside of the lower chamber are simultaneously vacuum suctioned through the inlet and outlet mechanism 15.

Subsequently, the control means 40 receives the pressure values measured by the pressure sensors 30a and 30b provided in the upper and lower chambers 10 and 20, and counts the time through an internal timer (S70). Of course, in this state, the heating plate 22 is in the heating state.

Next, the control means 40 is based on the pressure value measured by the pressure sensors 30a and 30b provided in the upper and lower chambers 10 and 20 and the counting time of the internal timer, It is determined whether the first time target value has been reached (S80). When the target is reached, the next step is taken.

If the control means 40 determines in step S70 based on the pressure values measured by the pressure sensors 30a and 30b provided in the upper and lower chambers 10 and 20 and the counting time of the internal timer, the upper chamber 10 If the first target value of does not reach the first target time value (S80; no), an error signal is generated.

Subsequently, the control means 40 receives the pressure values measured by the pressure sensors 30a and 30b provided in the upper and lower chambers 10 and 20, and counts the time again through an internal timer (S90).

Next, the control means 40 has a second target value of the upper chamber 10 based on the pressure value measured by the pressure sensors 30a and 30b provided in the upper and lower chambers 10 and 20 and the counting time of the internal timer. It is determined whether the second time target value is reached (S100). When the target is reached, the next step is taken.

If the control means 40 determines in step S100 based on the pressure value measured by the pressure sensors 30a and 30b provided in the upper and lower chambers 10 and 20 or the counting time of the internal timer, the upper chamber 10 If the first target value of 하지 does not reach the first target time value (S100; no), an error signal is generated.

Subsequently, the control means 40 receives the pressure values measured by the pressure sensors 30a and 30b provided in the upper and lower chambers 10 and 20, and counts the time again through an internal timer (S110).

By sequentially repeating the step level control set in the manner as illustrated in FIG. 3 in the above-described manner, the pressure value measured by the pressure sensors 30a and 30b provided in the upper and lower chambers 10 and 20, Based on the counting time is repeated until the final target value of the upper chamber 10, the final time target value (S120).

If the control means 40 determines in step S120 based on the pressure values measured by the pressure sensors 30a and 30b provided in the upper and lower chambers 10 and 20 and the counting time of the internal timer, the upper chamber 10 If the final target value of) does not reach the final target time value (S120; no), an error signal is generated.

Thereafter, the control means 40 receives the pressure values measured by the pressure sensors 30a and 30b provided in the upper and lower chambers 10 and 20, and counts the time again through an internal timer (S130). The upper chamber 10 is a vacuum, the lower chamber 20 is exhausted (S140).

Finally, the control means 40 opens the upper chamber 10 and outputs and stores information about the chamber.

In the above-described manner, the laminating process of the solar cell module 1 is performed by pressing the step-by-step in a state where the solar cell module is sandwiched in the upper and lower chambers 10 and 20. In other words, when manufacturing a solar cell module (solar cell module), the EVA film of the solar cell module (front glass plate + EVA film + solar cell + EVA film + back sheet is laminated sequentially) by heating and pressing in a vertical direction for a certain time. By melting in an even distribution to bond the solar cell and the back sheet well, it has the effect of improving the quality of the solar cell module.

In addition, when the upper chamber 10 and the lower chamber 20 are in contact with each other for laminating, a positive pressure (+ pressure) is applied to the upper chamber 10, and a negative pressure (-pressure, vacuum pressure) in the lower chamber 20. If the diaphragm 13 arranged horizontally in the upper chamber 10 presses the solar cell module placed on the heating plate of the lower chamber 20 with a stepped waveform pressure, it is added to the laminator. It has the effect of gaining the advantage that the process which puts into a baking apparatus (baking mechanism) and post-processes can be eliminated.

As mentioned above, although embodiment of this invention was shown and demonstrated, this invention is not limited to the specific embodiment mentioned above, Comprising: It is common in the art to which this invention pertains without deviating from the summary of this invention claimed in the Claim. Various modifications can be made by those skilled in the art, and these modifications should not be individually understood from the technical spirit or the scope of the present invention.

1 and 2 schematically show the configuration of a laminate apparatus according to an embodiment of the present invention.

Figure 3 illustrates a pressure control waveform during the lamination process according to an embodiment of the present invention.

4 shows a flow of a laminate method according to an embodiment of the invention.

* Description of the symbols for the main parts of the drawings *

1 solar cell module 3 laminate unit

5: conveying sheet 6: supply conveyor

7: unloading conveyor 10: upper chamber

13: diaphragm 15: intake and exhaust

20: lower chamber 22: heating plate

30a, 30b: pressure sensor 40: control means

Claims (14)

In the laminate device of a solar cell module, A laminate unit having upper and lower chambers for clamping and pressing the solar cell module; A pressure sensor measuring pressure in the upper and lower chambers, respectively; And And control means for controlling the pressure difference between the upper and lower chambers to be gradually increased based on the pressure value of the upper and lower chambers measured by the pressure sensor. The method according to claim 1, The control means, When the pressure difference between the upper and lower chambers is gradually increased, the target time is counted for each step, and when the pressure difference between the upper and lower chambers reaches the target value before the target time, the pressure difference between the upper and lower chambers is increased to the next step. Laminate device. The method according to claim 1, The control means, When the pressure difference between the upper and lower chambers is increased step by step, the target time is counted for each step, and whether the abnormality is determined based on whether the pressure difference between the upper and lower chambers reaches the target value before the target time. Device. The method according to claim 1, The control means, When the pressure difference between the upper and lower chambers is increased step by step, the target time is counted for each step, and whether the abnormality is determined based on whether or not the pressure difference between the upper and lower chambers reaches the target value before the target time. . The method according to any one of claims 1 to 4, The control means, Laminating apparatus, characterized in that for increasing the pressure on the upper chamber when the upper and lower chambers are all vacuum based on the pressure value for the upper and lower chambers measured by the pressure sensor. The method according to any one of claims 1 to 4, The control means, And the increase in pressure to the upper chamber is stopped when the pressure value for the upper chamber reaches a final target value based on the pressure value for the upper and lower chambers measured by the pressure sensor. The method according to claim 6, The control means, And the lower chamber is vacuum and the upper chamber stops increasing pressure on the upper chamber when it reaches atmospheric pressure. In the lamination method of a solar cell module, A pressure measuring step of measuring a pressure inside the upper and lower chambers which sandwich and pressurize the solar cell module; And And a control step of controlling the pressure difference between the upper and lower chambers to be gradually increased based on the pressure value of the upper and lower chambers measured by the pressure sensor. The method according to claim 8, The control step, When the pressure difference between the upper and lower chambers is gradually increased, the target time is counted for each step, and when the pressure difference between the upper and lower chambers reaches the target value before the target time, the pressure difference between the upper and lower chambers is increased to the next step. Laminating method. The method according to claim 8, The control step, When the pressure difference between the upper and lower chambers is increased step by step, the target time is counted for each step, and whether the abnormality is determined based on whether the pressure difference between the upper and lower chambers reaches the target value before the target time. . The method according to claim 8, The control step, When the pressure difference between the upper and lower chambers is increased step by step, the target time is counted for each step, and whether the abnormality is determined based on whether the pressure difference between the upper and lower chambers reaches the target value before the target time. . The method according to any one of claims 8 to 11, The control step, Laminate method, characterized in that for increasing the pressure on the upper chamber when the upper and lower chambers are all vacuum based on the pressure value for the upper and lower chambers measured in the pressure measuring step. The method according to any one of claims 8 to 11, The control step, And increasing the pressure on the upper chamber when the pressure value for the upper chamber reaches a final target value based on the pressure value for the upper and lower chambers measured in the pressure measuring step. 14. The method of claim 13, The control step, And the lower chamber is vacuum and the upper chamber stops increasing in pressure upon the upper chamber when it reaches atmospheric pressure.

Images