KR20100121882A - Apparatus of manufacturing molding products using vibrational load and molding products by employing the same - Google Patents

Abstract

PURPOSE: A device of manufacturing molding products using vibration load and a molding product manufactured by the same are provided to magnify the range of a material using a micro plasticity method. CONSTITUTION: A vibration load is applied by a load controller(50). The load controller comprises a frequency generator(52), a vibration actuator(58) and a punch(60). The frequency generator generates a frequency signal. The vibration actuator vibrates by receiving the frequency generator of the frequency generator. The punch receives the vibrating force of the vibration actuator and applies vibration load to materials.

Description

Apparatus of manufacturing molding products using vibrational load and molding products by employing the same}

The present invention relates to an apparatus for manufacturing a molded article and a molded article produced by the same, and more particularly, to a manufacturing apparatus for mass production of a molded article using a vibration load, and a molded article manufactured by the apparatus.

High-performance small parts and products in high-tech industries such as telecommunications, automobiles, precision medical, precision machinery, etc., require the technology to manufacture molded articles that can be lightweight and integrated. The production technology of the molded article should be capable of mass production, low production cost and reproducibility, and the like, in particular, it is required that the micro formability corresponding to the three-dimensional structure is excellent and the material is not limited.

On the other hand, due to the size effect (size effect) due to the miniaturization of the component (macro) molding technology can not be applied directly to the micro (micro) molding technology, various attempts to overcome this have been progressed. The manufacturing technology of the molded article using the properties of micro plasticity has advantages in that it can be manufactured in a three-dimensional shape together with price competitiveness by mass production, and is not limited by materials, and thus can be widely used in the manufacture of the molded article. . Micro plastic processing is generally defined as molding to a size of several micrometers to several millimeters using, for example, plastic deformation capacity of a metal material or a polymer.

Recently, superplastic alloys having small grain sizes or amorphous alloys without grains are known as suitable materials for micro plastic processing, but there are still many challenges to overcome. Among these problems, there is a need to improve micro formability and to improve the surface roughness of micro molded products. In other words, the micro plasticity technology has a large surface area ratio by volume compared to the general bulk molding, and thus surface characteristics such as friction and coalescence are important. Accordingly, it is necessary to minimize friction and adhesion between the mold and the material during the micro molding.

Further, in the manufacturing of parts with micro-firing, it is required to constitute an extension to micro-firing technique without remaining in the superplastic alloy and amorphous alloy on the alloy or the like described earlier full, further materials, such as polymers and.

Therefore, the technical problem to be achieved by the present invention is to improve the surface characteristics such as friction and adhesion between the mold and the material during micro-molding, and to use the apparatus for manufacturing a molded article using vibration load to expand the range of the material to be manufactured by using the micro plasticity technology To provide. In addition, another technical problem to be achieved by the present invention is to provide a molded article manufactured by improving the surface properties such as friction and adhesion between the mold and the material using the apparatus.

The molded article manufacturing apparatus of the present invention for achieving the above technical problem is an apparatus for manufacturing a molded article by a mold having a pattern for molding, and a material causing plastic deformation under the influence of the surface area-related factor rather than the volume-related factor corresponding to the pattern. In the present invention, a vibration load is applied to the material to suppress an air static bearing effect between the mold and the material.

In the manufacturing apparatus of the present invention, the vibration load is a frequency generator for generating a frequency signal, a vibration actuator that receives the signal of the frequency generator and vibrating the vibration actuator and the vibration load of the vibration actuator to impose a vibration load on the material It can be applied by a load control unit including a punch to.

In this case, the vibration actuator may be a PZT actuator, and the frequency generator may generate any one signal selected from an AC (AC) signal, a DC (DC) signal, or a signal mixed with an AC signal and a DC signal. In addition, a temperature control unit for adjusting the temperature of the mold and the material may further include.

In a preferred apparatus of the present invention, the vibration load may be added in the form of a composite load by further adding a static load.

In the device, the material may be any one selected from superplastic metal alloys and amorphous metal alloys, and may be a polymer or a mixture containing a polymer, as the case may be. In addition, the width of the pattern may be a size of several μm to several mm.

The molded article of the present invention for achieving the above another technical problem is that the surface area than the volume-related factors due to the vibration load in the direction of the material to suppress the air static bearing effect between the mold and the material placed on the mold, the pattern for forming The material causes plastic deformation under the influence of relevant factors.

In the molded article of the present invention, the molding height of the molded article is greater than the molding height of the static load compared to 50% of the energy applied to the static load, and the molded article transferred by the pattern is at least one selected from pyramids, columns, domes, and grooves. It can have one or more shapes.

In the molded article of the present invention, it is preferable that the average grain size of the material is smaller than the width of the pattern of the mold so that the material causes plastic deformation under the influence of the surface area related factor rather than the volume related factor. It may be any one selected from a calcined metal alloy and an amorphous metal alloy, and in some cases, may be a polymer or a mixture including the polymer. The width of the pattern may be several micrometers to several millimeters in size.

According to the molded article manufacturing apparatus and the molded article according to the present invention, by vibrating load, it is possible to improve the surface characteristics such as friction and adhesion between the mold and the material during micro-molding, and to easily mold the most advanced part of the fine pattern. In addition, the range of materials manufactured using the micro plasticity technology may be expanded.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. The embodiments described below may be modified in various other forms, and the scope of the present invention is not limited to the embodiments described below. Embodiments of the present invention are provided to more fully explain the present invention to those skilled in the art.

In the following embodiments will be presented an apparatus for manufacturing a molded article using the vibration load in order to minimize the friction and adhesion between the mold and the material in the micro plastic technology. To this end, the method of applying a vibration load, and thus the relationship between the vibration load and the molded article will be considered. And it will be described in detail characterized by the molded article produced by the apparatus.

In addition, in the embodiment of the present invention will be described with a superplastic alloy or an amorphous alloy material using the micro-calcination technology. However, it may be applied to other alloys and materials other than the superplastic alloy or the amorphous alloy within the scope of the present invention. For example, even in the case of a polymer, the plastic deformation characteristics are exhibited under certain conditions, and thus the micro plasticity technology of the present invention may be applied to a polymer.

Superplastic alloys applied to embodiments of the present invention have an elongation of several hundred percent or more until tensile fracture occurs at a specific temperature, and amorphous alloys deform in a section of a supercooled liquid state in which a pseudo-superplastic phenomenon occurs. It shows Newtonian viscous flow behavior with little restriction. Therefore, superplastic alloys and amorphous alloys are suitable for micro molding because they can be molded with a small load and have excellent moldability.

1 is a view schematically showing an apparatus for manufacturing a molded article using a vibration load according to an embodiment of the present invention.

Referring to FIG. 1, the manufacturing apparatus includes a mold 80 in a state in which a material 90 to be molded into a molded article placed on a micro mold 80 disposed in a main body 20 installed on a support 10 is mounted. It includes a load control unit 50 for adjusting the vibration load applied to the material 90 and the temperature control unit 70 for adjusting the temperature.

The temperature control unit 70 may adjust the amount of heat generated in the coil heater 74 surrounding the sides of the mold 80 and the material 90 by the temperature adjusting unit 72. Although not illustrated in the drawings, the temperature may be controlled by measuring and correcting the actual temperature using a thermocouple.

The load control unit 50 includes a punch 60 for applying a load in the direction of the workpiece 90 and a vibration actuator 58 for controlling the position of the punch 60 by vertical vibration. At this time, the driving of the actuator 58 is controlled by the magnitude and frequency of the voltage applied thereto. Specifically, the control signal generates a DC (direct current) and AC (AC) signal in the frequency generator 52, the signal is amplified while passing through the amplifier 56 is input to the actuator 58, an oscilloscope (oscilloscope 54) Through the control signal can be observed in real time. Vibration actuator 58 is supported by actuator support 62.

The frequency generator 52 may generate signals of various waveforms. For example, a sine wave that varies the amplitude and frequency of an AC (AC) signal and a square wave through conversion of a step wave or an AC (AC) signal by adjusting the amplitude of DC (DC) differently in time. And the like. Furthermore, the AC (AC) signal and the DC (DC) signal may be mixed to generate a signal of arbitrary waveform.

The vibrating actuator 58 induces the flow of air present between the mold 80 and the workpiece 90. By inducing the flow of air, the micro formability of the raw material 90 can be increased to increase the molding height and reduce the surface roughness.

Experimental Example

The apparatus for manufacturing a molded article using the vibration load used in the experimental example of the present invention is described with reference to FIG. 1, wherein the material placed on the micro mold 80 disposed in the main body 20 installed on the support 10. In the state where 90 is mounted, the temperature is maintained by measuring and correcting the actual temperature by the temperature controller 70 using a thermocouple. In this case, the actuator 58 uses a PZT vibration actuator, and generates a displacement of about 55 μm when a voltage of 100 V is applied, and the maximum force is about 825 N.

In the present experimental example, a method of confirming the transfer property of the molded material in the micro mold 80 was used to evaluate the micro formability. That is, in order to evaluate the micro formability, the transferability of the shape into the micro mold 80 was evaluated, and photographed with a scanning electron microscope (SEM) to observe the surface of the micro molded part, In order to confirm, a high resolution non-contact three-dimensional microstructure measuring equipment was used.

At this time, the mold 80, as shown in Fig. 2 using a (100) silicon single crystal substrate to produce pyramidal patterns having a side length of 100㎛ by this anisotropic etching. The size of one mold 80 is approximately 5mm * 5mm in width and length, and the pyramidal patterns are arranged in an array form. For convenience, the pyramidal pattern located at the center of the mold 80 is referred to as the center pattern 82. Here, the shape of the pattern is a pyramid shape, but is not limited thereto, and of course, a hexagonal shape, a pillar, a dome, and a groove shape may be possible.

Since the experimental example of the present invention uses the vibration load, the characteristics of the molded article manufactured by the vibration load will be described by comparing the case of the static load in contrast thereto. Accordingly, first, the micro formability due to the static load will be described, and then the moldability due to the vibration load will be described while comparing with the case of the static load as necessary.

Micro Formability by Static Load

FIG. 3 is a SEM photograph showing a shape transferred to a central pattern 82 located at the center of the pyramid-shaped micro mold 80 after a molding experiment in a static load state, and FIG. 4 conceptually shows the result of the photograph of FIG. 3. It is a figure for demonstrating. At this time, Al5083 superplastic alloy and Zr ₆₂ Cu ₁₇ Ni ₁₃ Al ₈ (hereinafter referred to as Zr-BMG) amorphous alloy was used, and to investigate the micro formability of the Al5083 superplastic alloy and Zr-BMG, as shown in FIG. Molding experiments were performed using a micro mold 80 in which pyramidal patterns having a side length of 100 μm were arranged. The molding temperature was 530 ℃ for Al5083 superplastic alloy and 420 ℃ for Zr-BMG, which is the best moldability confirmed by basic experiment. The molding load was 477 N and the molding time was 30 minutes.

As shown in FIG. 3, the Al5083 superplastic alloy had a height formed in the center pattern 82 (hereinafter referred to as a molding height) of about 42.5 μm, and in the case of Zr-BMG, a molding height of about 63.2 μm was about 20.7 μm. There was a difference. This result is due to the difference in grain size between the Al5083 superplastic alloy and Zr-BMG, and in the case of the amorphous alloy, the molding continued to occur inside the center pattern 82 as long as the load was applied.

Referring to FIG. 4, in the case of an Al5083 superplastic alloy having grains of about 10 μm or less, deformation occurs by spin and slip deformation mechanisms at grain boundaries. When the grains are trapped in the narrow space inside, it is difficult to progress the molding. Accordingly, it can be seen that deformation in the center pattern 82 can be continued when a load that can cause deformation of the grains itself is applied.

Specifically, in the case of a polycrystalline alloy such as an Al5083 superplastic alloy, the deformation is almost as long as the average grain size (D _g (average)) is approximately equal to the width W _d of the center pattern 82 in the form of a V groove. As it does not proceed, deformation hardly occurs inside the center pattern 82. In addition, when the average grain size D _g (average) is relatively smaller than the width W _d of the center pattern 82, plastic deformation proceeds to the inside of the pattern 82, but the deformation is limited. However, since Zr-BMG, which is an amorphous alloy, does not have crystal grains and thus has high fluidity, it may be easily filled into the center pattern 82.

In addition, when looking at the surface state after molding, in the case of Al5083 superplastic alloy having fine grains, minute spaces (a) are observed on the surface of the fired superplastic alloy, but in the case of amorphous alloy, the surface that borders the mold is very It was found to be smooth. It was confirmed that the grain size of the material is an important factor in the quality of the parts of the micro-molded by the static load.

Micro formability due to vibration load

In the experimental example of the present invention by the vibration load, in order to observe the micro formability of the superplastic alloy and the amorphous alloy according to the vibration load, pyramidal patterns having a length of 100 μm of one side as shown in FIG. 2 are arranged. Micro mold 80 was used. At this time, the molding experiment temperature was Al53083 superplastic alloy was 530 ℃, Zr-BMG was 420 ℃.

FIG. 5 shows that in the experimental example of the present invention, in the case of Al5083 superplastic alloy, the molding time was formed for 10 minutes, 20 minutes, and 30 minutes under the vibration load (0 to 477 N) of a sine waveform having a frequency of 50 Hz. It is a chart showing the results of measuring the molding height in the center pattern (82 in FIG. 2).

According to FIG. 5, the molding heights were about 25.7 μm, about 29.8 μm, and about 31.5 μm at 10, 20, and 30 minutes, respectively. In other words, the molding height increased linearly with time to apply the vibration load. In other words, as the molding time increases, the amount of micro firing into the center pattern 82 increases, so that the molding height increases linearly.

6 is a graph showing the results of molding the Al5083 superplastic alloy to compare the formability due to the static load and the vibration load which is an experimental example of the present invention. At this time, the static load at 530 ℃ was molded for 10 minutes, 20 minutes and 30 minutes to 477N, respectively, and the vibration load was molded for 10 minutes, 20 minutes and 30 minutes to 0 ~ 477N, respectively. Where? Represents a static load and? Represents a vibration load.

Referring to Figure 6, the molding height due to the static load appeared larger than the results of the vibration load. Specifically, the molding height of the center pattern by the vibration load has a size of about 75% with respect to the molding height by the static load. Specifically, when molded for 30 minutes, the forming height of the static load was about 45㎛, the molding height of the vibration load was about 35㎛. In terms of the total energy applied to the alloy, however, the energy Ev of the vibration load is about 50% of the magnitude of the energy Es applied to the alloy at the static load. Therefore, in terms of energy applied to the alloy, it can be seen that a molding height of about 75% can be obtained with an energy of about 50% for static load.

FIG. 7 is a diagram showing a result of forming Zr-BMG at 420 ° C. for 30 minutes under the same load condition as in FIG. 6 together with the case of Al5083 superplastic alloy of FIG. 5.

According to FIG. 7, the molding height of the Zr-BMG formed by the static load (477N) was about 63.2 μm, and the molding height formed by the vibration load (0 to 477N) 100 Hz was about 42.9 μm. The vibration load has a molding height of about 68% of the static load. In other words, in the case of Zr-BMG, the molding height can be obtained by 68% of the static load with 50% of the energy. Therefore, if substantially equal energy is applied, the molding height due to the vibration load is larger than that of the static load, and this can be applied to all materials belonging to the scope of the present invention in addition to the superplastic alloy or amorphous alloy of the present experimental example.

Figure 8 is a graph showing the results of measuring the molding height according to the position of the mold by a non-contact three-dimensional shape measuring machine after molding the Al5083 superplastic alloy according to the experimental example of the present invention to form a composite load to add a static load and a vibration load together to be. Herein, the composite load means that the vibration load having a magnitude of 0 to 238.5N is applied to the static load (238.5N) at frequencies of 1 Hz, 10 Hz, 100 Hz, 200 Hz, and 250 Hz, and the average load was 357 N. Experiment temperature was 530 degreeC and molding time was 20 minutes.

At this time, the molding height according to the position of the mold (80 in FIG. 2) is taken into consideration the entire pattern arrayed in the mold, expressed as the molding height according to the position to distinguish from the molding height of the center pattern (82 in FIG. 2). The center of the mold is C / R, and marked off from 2R to 8R as it exits to the center.

According to FIG. 8, the forming height of each micro mold according to the position tends to increase with increasing frequency and closer to the center. Therefore, the maximum molding height is shown in the center pattern of the center part. The maximum molding height at the center of micro mold (C / R) is about 20.7㎛, about 22.4㎛, for frequency 1Hz (■), 10Hz (●), 100Hz (▲), 200Hz (▼), 250Hz (◆), respectively. It was about 27.6 micrometers, about 35.6 micrometers, and about 40.1 micrometers.

FIG. 9 is a graph comparing forming heights according to frequencies of superplastic alloys subjected to the static load and the composite load of FIG. 8 based on the amount of energy applied to the material.

9, it can be seen that the molding height is greater than the static load when the frequency of the compound load is about 125 Hz (b) or more. Molding height (29 µm) expected to be obtained when a load equal to the average load of 357 N of the composite loads was applied under the experimental conditions under the experimental conditions was the result of static load of 301 N (about 24.1 µm) and 477 N (about 39.9 µm). Predicted from When the load applied to the material is in the form of a compound load, it shows that the vibration frequency is more effective than the static load in formability when the vibration frequency is more than 125 Hz. When the frequency of about 125 Hz (b) is a critical frequency, the critical frequency may vary depending on the material, the waveform of the vibration load, the molding temperature, and the shape of the pattern to be molded.

In the compound load, the molding height increases with increasing frequency, and this result can be interpreted as follows. That is, a difference in the impact force applied to the punch by the change of the frequency occurs, which can be explained through the relationship between the frequency and the impact force. That is, as the frequency of the vibration load increases, the load applied to the material is applied in the form of impact force. As the frequency increases, the punch speed increases together, and the magnitude of the impact force increases proportionally.

As a result of observing the influence of the vibration load in the micro molding experiments on the Al5083 superplastic alloy and Zr-BMG of the present invention, when the load of the same frequency and the same frequency is applied, the molding height is proportional to the time of loading. Was found to grow. In addition, from the viewpoint of the amount of energy applied to the material, 75% of the static load forming height can be obtained by applying 50% of the static load energy in the case of Al5083 superplastic alloy, and 50% of the static load is applied in the case of Zr-BMG. 68% of the static load forming height was obtained.

In addition, when the composite load is applied to the material, when the composite load is applied at a frequency of about 125 Hz or more, when compared with the static load, the molding height is greater than the static load.

As described above, in the molding of the Al5083 superplastic alloy and Zr-BMG in the micro region, the effect due to the dimensional effect can be mentioned among the factors in which the vibration load is more effective than the static load. Looking at the reason with reference to Figure 10, in the molding of the macro (macro) region, the factors related to the molding load and the molding quality has a large influence on the volume. However, in the formation of the micro area, the influence of the surface area factor becomes greater than that of the volume related factor. Such a state can be defined as causing plastic deformation under the influence of surface area related factors rather than volume related factors.

Specifically, in contrast to the S / V ratio of the volume to the surface area, in the macro area, the length unit is large, so the S / V ratio value is small, so that the influence of the surface area is relatively weak and negligible. In S, the S / V ratio value is no longer negligible and the surface area effect is relatively large. Therefore, the influence of the surface area factor rather than the volume factor is increased in the region where the micro molding is performed.

That is, the material applied to the present invention may be applied to any material causing plastic deformation under the influence of the surface area-related factor rather than the volume-related factor. For example, since the polymer causes plastic deformation under conditions of constant temperature and pressure, it can be applied if plastic deformation under the influence of surface area related factors. Furthermore, mixtures containing polymers, such as mixtures of polymers and metals, and mixtures of polymers and ceramics may be equally applicable.

FIG. 11A conceptually illustrates friction and sticking between a micro mold and a material among factors related to surface area in the case of Al5083 superplastic alloy, and FIG. 11B illustrates the case of Zr-BMG. Drawing.

11A and 11B, in the case of the superplastic alloy and Zr-BMG, friction and adhesion exist between the material and the mold. In particular, in the case of Zr-BMG, since the contact area between the material and the mold is larger than that of the superplastic alloy having fine grains, friction and adhesion occurring therebetween act more. The vibratory load can be said to be helpful for molding inside the micro mold due to the effect of relieving friction and adhesion between the mold and the material.

12A and 12B are diagrams for explaining the role of air in the micro-molding of the present invention and illustrate the case of the static load and the vibration load, respectively.

12A and 12B, in the case of a static load, an air static pressure bearing effect is generated, so that air particles trapped in a narrow area generate static pressure as the load is applied, thereby preventing microforming. Affects the direction. However, the vibration load helps to improve the micro formability because it suppresses the occurrence of the air static bearing effect that can occur between the mold and the material. In particular, the shaping of the most advanced portion, which is the sharp portion of the fine pattern, is easy.

The meaning of suppressing the air static bearing effect is to include minimizing its role in forming the material by suppressing the effect. Accordingly, it was found that the micro formability of the superplastic alloy and the amorphous alloy used as the experimental example of the present invention was improved.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but many variations and modifications may be made without departing from the scope of the present invention. It is possible.

1 is a view schematically showing an apparatus for manufacturing a molded article using a vibration load according to the present invention.

Figure 2 is a photograph showing a micro mold used in the present invention.

FIG. 3 is a SEM photograph showing a shape transferred to a central pattern located at the center of a pyramid-shaped micro mold after a molding experiment in a static load state, and FIG. 4 is a diagram for conceptually explaining the results of the photograph of FIG. 3.

FIG. 5 shows the result of measuring the molding height in the center pattern after molding the molding time for 10 minutes, 20 minutes and 30 minutes respectively under the vibration load condition of the sine wave having a frequency of 50 Hz for the Al5083 superplastic alloy. Is a chart showing.

Figure 6 is a graph showing the result of molding the Al5083 superplastic alloy in order to compare the formability by the static load and the vibration load of the present invention.

FIG. 7 is a diagram showing a result of forming Zr-BMG at 420 ° C. for 30 minutes under the same load condition as in FIG. 6 together with the case of Al5083 superplastic alloy of FIG. 5.

Figure 8 is a graph showing the results of measuring the molding height according to the position of the mold by a non-contact three-dimensional shape measuring machine after molding the Al5083 superplastic alloy according to the present invention to form a composite load to add a static load and a vibration load together.

FIG. 9 is a graph comparing forming heights according to frequencies of superplastic alloys subjected to the static load and the composite load of FIG. 8 based on the amount of energy applied to the material.

10 is a conceptual diagram for explaining the dimensional effect of the static load and the vibration load.

FIG. 11A conceptually illustrates friction and sticking between a micro mold and a material among factors related to surface area in the case of Al5083 superplastic alloy, and FIG. 11B illustrates the case of Zr-BMG. Drawing.

12A and 12B are diagrams for explaining the role of air in the micro-molding of the present invention and illustrate the case of the static load and the vibration load, respectively.

* Description of the symbols for the main parts of the drawings *

10; Support 20; main body

50; Load control unit 52; Frequency generator

54; Oscilloscope 56; amplifier

58; Vibration actuator 60; punch

70; Temperature control unit 72; Temperature controller

74; Coil heater 80; mold

82; Center pattern 90; Material

Claims (16)

A mold having a pattern for molding; And In the apparatus for producing a molded article from a material causing plastic deformation under the influence of the surface area related factor rather than the volume related factor, corresponding to the pattern, Apparatus for producing a molded article using a vibration load by applying a vibration load to the material to suppress the air static bearing effect between the mold and the material. The vibration load of claim 1, wherein A frequency generator for generating a frequency signal; A vibration actuator that vibrates upon receiving the signal of the frequency generator; And Apparatus for producing a molded article using a vibration load, characterized in that applied to the vibration control of the vibration actuator is applied by a load control unit including a punch for imposing a vibration load on the material. The apparatus of claim 2, wherein the vibration actuator is a PZT actuator. The molded part of claim 2, wherein the frequency generator generates one signal selected from an AC (AC) signal, a DC (DC) signal, or a signal mixed with an AC signal and a DC signal. Manufacturing equipment. The apparatus of claim 1, further comprising a temperature controller configured to adjust temperatures of the mold and the material. The apparatus of claim 1, wherein the vibration load may be added in the form of a compound load by further adding a static load. The apparatus of claim 1, wherein the material is any one selected from superplastic metal alloys and amorphous metal alloys. The apparatus of claim 1, wherein the material is a polymer or a mixture containing a polymer. The apparatus of claim 1, wherein the pattern has a width of several μm to several mm. The vibration load in the direction of the material, which suppresses the air static bearing effect between the mold and the material on which the pattern is formed, causes the plastic deformation due to the influence of the surface area related factor rather than the volume related factor. A molded article manufactured by an apparatus using a vibration load characterized by the above-mentioned. 11. The molded article of claim 10, wherein the molding height of the molded article is greater than the molding height of the static load compared to 50% of the energy applied to the static load. The molded article manufactured by the apparatus using the vibration load according to claim 10, wherein the molded article transferred by the pattern has at least one shape selected from pyramids, columns, domes, and grooves. The apparatus of claim 10, wherein the average grain size of the material is smaller than the width of the pattern of the mold so that the material causes plastic deformation under the influence of the surface area related factor rather than the volume related factor. Molded article manufactured by. The molded article of claim 10, wherein the material is any one selected from a superplastic metal alloy and an amorphous metal alloy. The apparatus of claim 10, wherein the material is a polymer or a mixture containing the polymer. The apparatus of claim 10, wherein the pattern has a width of several μm to several mm.

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