KR20100117426A - Cylinder valve having stoppers and stopper setting system of cylinder valve - Google Patents

Abstract

PURPOSE: A cylinder valve with a stopper and a system for setting a stopper of a cylinder valve are provided to enable a user to easily set the stopper of a cylinder valve to obtain a desired flowrate coefficient based on the fowrate data and the pressure difference between the inlet and the outlet of the cylinder valve. CONSTITUTION: A cylinder valve with a stopper comprises a body(110), a shut-off valve chamber(120), a closing member(130), a diaphragm(140), a push rod(150), a cylinder(160), a sleeve(170) and a handle wheel(190). The body comprises an inlet bore(102), an inlet path(104), an outlet bore(112) and an outlet path. The shut-off valve chamber is communicated with the inlet bore and the inlet path. The shut-off valve chamber is communicated with the outlet bore and the outlet path. The closing member is held in the shut-off valve chamber. The diaphragm surrounds the stem(132) of the closing member and variably operates. The push rod is connected to the stem of the closing member and presses the stem. The push rod is connected to one side of the cylinder and the cylinder operates according to the operation of the handle wheel. The sleeve is screwed to the cylinder and a stopper guide(210) is installed on one side of the sleeve.

Description

Cylinder valve having stoppers and stopper setting system of cylinder valves

The present invention relates to a cylinder valve with a stopper and a stopper setting system of a cylinder valve, in particular to a cylinder valve with a stopper capable of maintaining a constant flow rate and to set a stopper on the cylinder valve to be set to a predetermined flow rate. The stopper setting system of the cylinder valve for the

Conventionally, the cylinder valve has a body 10 provided with a thread 12 at the bottom thereof to thread the valve onto a gas cylinder (not shown), as shown in FIG.

The body 10 of the cylinder valve has an intersection of which is located in the chamber 18, has an axial inlet duct 14 and a radial outlet duct 16, and tightly connects the axial inlet duct 14. It is to be provided with a closing element 20 for opening or closing.

The cylinder valve shown in FIG. 1 is a diaphragm valve and the externally spaced sealing element is a flexible metal diaphragm surrounding the stem 24 of the closing element 20. The stem 24 of the closing element 20 is connected to a push rod 26 fixed to a cylinder 28 screwed into a sleeve 30 connected to the body 10 of the valve. In addition, rotation of the cylinder 28 is generated by the operation wheel 32 which rotates integrally with the cylinder.

Latch system 34 prevents rotation of actuation wheel 32 in the direction of the opening when actuation wheel 32 is positioned in the position shown in FIG. The latch system 34 has an upper ring 36 integral with the sleeve 30, and a lower ring 40 integral with the operating wheel 32 is also provided on the lower surface thereof. The upper ring and the lower ring 36, 40 is made of a synthetic resin material.

The operating wheel 32 is configured to rotate integrally with the cylinder 28 but cannot be changed in the axial direction with respect to the cylinder. The helical spring 44 bears against the actuation wheel 32 and also against the upper ring 36 of the latch system 34.

The conventional cylinder valve configured as described above does not have a separate device capable of maintaining a constant flow rate coefficient of gas provided in the pipe.

Therefore, in the conventional cylinder valve, since the flow coefficient is not constant in the pipe, the gas supply is not made constant, and therefore, when the flow coefficient must be set to be the same and constant, the cylinder valve is adjusted depending on the user's sense. As a result, when the conventional cylinder valve is used, a process defect may occur when a constant process gas supply desired by a user, such as a semiconductor manufacturing process, needs to be precisely controlled.

The cylinder valve configured as in the related art has a problem in that the user cannot accurately maintain the desired flow coefficient and thus cannot accurately adjust the cylinder valve.

SUMMARY OF THE INVENTION The present invention has been made in view of the problems of the prior art, and an object thereof is to provide a cylinder valve having a stopper capable of maintaining a constant flow rate in a cylinder valve for supplying gas used in a semiconductor manufacturing process. .

It is another object of the present invention to provide a stopper setting system of a cylinder valve which can set the stopper to the cylinder valve so that a constant flow coefficient value desired by the user is obtained based on the pressure difference and the flow rate data between the inlet and the outlet of the cylinder valve. have.

A cylinder valve having a stopper of the present invention comprises: a body having an inlet bore, an inlet passage, an outlet bore and an outlet passage; A shutoff valve chamber in communication with the inlet bore and the inlet passage and in communication with the outlet bore and the outlet passage; A closing element housed in the shutoff valve chamber; A diaphragm variably operated surrounding the stem of the closure element; A push rod connected to the stem of the closing element for pressing the stem; The push rod is connected to one side thereof, and the cylinder is configured to rotate according to the operation of the handle wheel; A sleeve coupled to the cylinder and installed, and a stopper guide installed at one side thereof; It characterized by consisting of a handle wheel having a handle stopper on the lower side.

In this case, the handle stopper of the handle wheel is set so that it is no longer rotated by the guide stopper of the stopper guide when the preset value of the flow coefficient of the valve is reached at the turn-on of the handle wheel.

The stopper setting system of the cylinder of the present invention includes a body having an inlet and an outlet bore, a shutoff valve chamber in communication with the inlet and outlet bores, a closing element accommodated in the shutoff valve chamber, a diaphragm that is variably operated, and a closure. A push rod connected to the stem of the element, a cylinder which is rotated according to the operation of the handle wheel, a sleeve which is installed in a threaded manner with the cylinder, and a stopper guide having a stopper formed on one side thereof, and a handle on the lower one side thereof. A cylinder valve consisting of a handle wheel with a stopper; First and second connecting pipes respectively installed at the inlet and outlet bores of the cylinder valve; A third connector installed between the first and second connectors; First and second pressure gauges installed on the first and third connecting pipes; A flow meter installed on one side of the second connecting pipe; It is connected to the first connection pipe and the second connection pipe, respectively, characterized in that the signal processing device for obtaining the flow coefficient value by receiving the pressure difference and the flow rate data of the inlet and outlet bore of the cylinder valve.

In the cylinder valve having the stopper of the present invention, since the stopper is set to have a predetermined flow coefficient value in the cylinder valve, the supply of the gas to be supplied is accurate and constant, for example, a defect caused by an incorrect gas supply in the semiconductor manufacturing process. It provides an advantage that can be minimized.

Further, in the stopper setting system of the cylinder valve according to the present invention, the stopper can be easily set on the cylinder valve so that a constant flow coefficient value desired by the user can be obtained based on the pressure difference and the flow rate data between the inlet and the outlet of the cylinder valve.

(Example)

An embodiment of a cylinder valve with a stopper and a stopper setting system of a cylinder valve according to the present invention will be described with reference to the accompanying drawings.

Figure 2 is a cross-sectional view schematically showing a cylinder valve with a stopper of the present invention, Figure 3 is a perspective view of the stopper which is the main part of Figure 2, Figure 4 is a schematic diagram showing a stopper setting system of the cylinder valve according to the present invention.

Cylinder valve 100 with a stopper of the present invention is large body 110, shut-off valve chamber 120, closing element 130, diaphragm 140, push rod 150, cylinder 160, sled It consists of the Eve 170 and the handle 190.

As shown in FIG. 2, the body 110 has an inlet bore 102 and an inlet passage 104 installed at one lower side thereof, and an outlet bore 112 and an outlet passage 114 formed at one left side thereof. do. In addition, a bursting disk 302 is installed on one side of the right side of the body 110, and a molten alloy 304 is formed at a predetermined portion by addressing the safety disk 302. The safety nut 306 surrounds the fusible alloy 304 on the outside thereof. ) Is installed. The burst disk 302 is made of a nickel material.

The shut-off valve chamber 120 communicates with the inlet bore 102 and the inlet passage 104, and communicates with the outlet bore 112 and the outlet passage 113. In addition, the closing element 130 is accommodated inside the shutoff valve chamber 120. The closure element 130 is also referred to as a stem. A seat 312 is installed inside the closure element 130, and the seat 312 is fixed by the seat fixing part 314.

The diaphragm 140 surrounds the stem 132 of the closing element 130 and is variably operated, typically using stainless steel. The push rod 150 is connected to the stem 132 of the closing element 130 and is configured to press the stem 132. In addition, a ball 152 is installed on the push rod 150. Here, the push rod 150 is also referred to as the upper stem.

The support packing 322 is installed on the diaphragm 140, and the support packing 322 is fitted by the clamp 324. In addition, the backup ring 326 is inserted between the support packing 322 and the clamp 324.

One side of the cylinder 160 is connected to the push rod 150, and is rotated according to the operation of the handle wheel 190.

The sleeve 170 is screwed and installed with the cylinder 160, the stopper guide 210 is installed on the outside thereof. In addition, as shown in FIG. 3, the stopper guide 210 has a guide stopper 205 formed on one side thereof, and at least one through hole 212 is formed at an outer circumference thereof. Here, the number of the through holes 212 is preferably selected in the range of 1-3. The through hole 212 is fastened by a stopper guide fixing screw 202 when a flow coefficient value determined by a user is selected (set).

The handle wheel 190 has a handle cover 332 is installed in the center, the handle cover 332 is to be fixed by the handle nut 334. And, as shown in Figure 3, the lower side of the handle wheel 190, the handle stopper 220 is installed. In addition, the handle stopper 220 is configured such that the stopper 205 of the stopper guide 120 is no longer rotated in the on (On) direction.

2 and 3, the non-explained member No. 172 is a through hole of the stopper guide 210 when the handle wheel 190 and the stopper guide 210 are rotated so that a flow coefficient value determined by a user is selected (set). 2 is a sleeve cap 172 for protecting the stopper guide fixing screw 202 fastened to 212 from being released.

For the assembly and operation of the cylinder valve with a stopper of the present invention configured as described above will be referred to the stopper setting system of the cylinder valve of FIG. And, before describing the stopper setting system of the cylinder valve of the present invention will be described schematically with respect to the flow coefficient.

First, the flow coefficient (Cv) refers to the flow rate of the water flowing when the valve is completely opened at a pressure difference of 1 psi, and the opening degree of the valve is kept constant and fresh water of 60 ° F. (15.6 ° C.) is applied. It is a coefficient expressed in US gallon / minute for the flow rate that flowed for 1 minute while maintaining the differential pressure (P2-P1) before and after the valve inlet and outlet at 1 psi (0.703 kgf / cm ² ).

On the other hand, the flow coefficient (Cv) can be obtained as follows by applying the calculation formula prescribed in CGA (Compressed Gas Association) V-9, that is, the following equation (1) and (2).

In the cylinder valve system of the present invention, the flow coefficient Cv was calculated by applying Equations 1 and 2 of CGA V-9.

The CGA stands for Compressed Gas Association and defines standards for compressed gas.

If P2 / P1≤0.53 (Sonic flow),

If P2 / P1≥0.53 (Subsonic flow),

Where 0.53 is applied to air, Q is flow rate ft ³ / hr at 1 atmosphere 80 ° F, P1 is inlet pressure (psi), P2 is outlet pressure (psi), T is inlet gas temperature and G is 14.7 psi The specific gravity of the gas.

High purity cylinder valves in manufacturing require, for example, Cv = 0.2 Cv = 0.3, Cv = 0.35, but may be set to different results than the flow coefficient of the valve provided depending on the manipulator of the valve.

For example, turning on the handle with excessive force on a valve provided with Cv = 0.3 can actually lead to Cv = 0.3-0.32 (eg 0.32), and with a weak force on the valve's handle By turning on, Cv = 0.28 ~ 0.3 (eg 0.28) can be derived. Therefore, in order to maintain a constant flow coefficient desired by the user, an additional regulator or the like has to be used.

By applying the above equations 1 and 2, the flow coefficients of the cylinder valve and the applied cylinder without the stopper were measured, and the following table was obtained.

Table 1 is for applying a flow coefficient of 0.25, the experimental results for the case of turning on a conventional cylinder valve without a stopper are as follows.

Table 2 is for applying a flow coefficient of 0.25, the experimental results for the cylinder valve of the present invention to which the stopper is applied are as follows.

As shown in Equation 1 results of Table 1 and Table 2, the cylinder valve of the present invention to which the stopper is applied can obtain a significantly constant flow rate coefficient compared to the conventional cylinder valve without the stopper. That is, when the cylinder valve of the present invention is used, a flow coefficient close to the predetermined flow coefficient 0.25 can be obtained.

On the other hand, the stopper setting system of the cylinder valve of the present invention, as shown in Figure 4, the first connecting pipe 410 is installed on one side of the inlet bore 102, the second connection to one side of the outlet bore 112 The pipe 420 is installed. In addition, the cylinder valve 100 of the present invention is positioned in a jig or a fixing device (not shown).

The first pressure gauge 412 is installed on one side of the first connecting pipe 410, and the flow meter 440 is installed on one side of the second connecting pipe 420. In addition, a third connecting pipe 430 is installed between the first and second connecting pipes 410 and 420, and a second pressure gauge 432 is installed at one side of the third connecting pipe 430.

On the other hand, the first connector 410 and the second connector 420 are each connected to a signal processing device (PC) 500 that can be made, for example, a personal computer. In addition, the valve 450 is installed on the second connecting pipe 420.

The operation of the stopper setting system of the cylinder valve configured as described above is as follows.

First, the user presses the inlet bore 102 by a predetermined pressing means (not shown). Then, the handle wheel 190 is turned on. Flow rate from the signal processing device 500 to the pressure difference P2-P1 of the first and second pressure gauges 412 and 432 of the first and third connection pipes 410 and 430 and the flow meter 440 of the second connection pipe 420. The data Q is calculated to calculate the flow rate coefficient value Cv.

In addition, when the handle wheel 190 is continuously turned and reaches a predetermined flow coefficient value from a design specification, the rotation of the handle wheel 190 is stopped. In this case, the handle stopper 220 of the handle wheel 190 and the guide stopper 205 of the stopper guide 210 should rotate in the same rotational direction.

In this state, the stopper guide fixing screw 202 is fastened to the through hole 212 of the stopper guide 210. At this time, the stopper guide 210 having the guide stopper 205 is fixed by the stopper guide fixing screw 202. Therefore, the handle stopper 220 is no longer rotated in the on direction by the guide stopper 205 of the stopper guide 210. Then, the remaining parts are assembled.

Therefore, the cylinder valve 100 of the present invention is set to be turned on only up to the flow coefficient (Cv) in accordance with the specification it is possible to manufacture a cylinder valve for a semiconductor manufacturing process using high purity gas.

The cylinder valve having the stopper of the present invention and the cylinder system using the same can be widely applied to the field of the cylinder valve for supplying the gas used in the semiconductor process as well as the field of the high purity precision gas valve which can supply the flow rate precisely and uniformly.

1 is a cross-sectional view schematically showing a conventional cylinder valve,

2 is a schematic cross-sectional view of a cylinder valve with a stopper of the present invention;

3 is a perspective view of a stopper which is a main part of FIG. 2;

4 is a schematic view showing a stopper setting system of a cylinder valve according to the present invention;

Explanation of symbols on the main parts of the drawings

110: body 120; Shut-off Valve Chamber

130: closing element 140: diaphragm

150: push rod 160: cylinder

170: sleeve 190: handle wheel

205: guide stopper 210: stopper guide

220: handle stopper 500: signal processing device

Claims (5)

 A body 110 having an inlet bore 102, an inlet passage 104, an outlet bore 112, and an outlet passage 114; A shutoff valve chamber 120 in communication with the inlet bore 102 and the inlet passage 104 and in communication with the outlet bore 112 and the outlet passage 113; A closing element (130) received in the shutoff valve chamber; A diaphragm 140 variably operated surrounding the stem 132 of the closing element 130; A push rod (150) connected to the stem (132) of the closing element (130) for pressing the stem; The push rod 150 is connected to one side, the cylinder 160 to rotate in accordance with the operation of the handle wheel 190; The cylinder 160 is screwed and installed, the stopper guide 210 is installed on one side, the stopper guide 210 is a sleeve 170 having a guide stopper 205 on the upper side; It is made of a handle wheel 190 having a handle stopper 220 on the lower side, The handle stopper 220 of the handle wheel 190 is no longer rotated by the guide stopper 205 of the stopper guide 120 when it reaches a preset flow coefficient value of the valve at turn-on of the handle wheel 190. A cylinder valve having a stopper, characterized in that it is set to not. The stopper guide 210 of the sleeve 170 has at least one through hole 212 formed at an outer circumference thereof to fasten a screw to fix a predetermined position of the stopper guide 210. A cylinder valve having a stopper, characterized in that. 3. The cylinder valve with a stopper according to claim 2, wherein the through hole (212) is fastened by a stopper guide fixing screw (202) when a flow coefficient value is set. A body 110 having an inlet bore 102 and an outlet bore 112, a shutoff valve chamber 120 in communication with the inlet bore 102 and an outlet bore 112, and a closing element 130 housed in the shutoff valve chamber. A variable pressure diaphragm 140 and a push rod 150 connected to the stem 132 of the closing element 130; The cylinder 160, which is rotated according to the operation of the handle wheel 190, is installed by screwing the cylinder 160, the stopper guide 210 is provided with a stopper guide 210 formed with a stopper 205 on one side And, the cylinder valve consisting of a handle wheel 190 having a handle stopper 220 on the lower side; First and second connection pipes 410 and 420 respectively installed at the inlet and outlet bores of the cylinder valve; A third connecting pipe 430 disposed between the first and second connecting pipes 410 and 420; First and second pressure gauges (412 and 432) installed in the first and third connecting pipes (410 and 430); A flow meter 440 installed at one side of the second connecting pipe 420; It is connected to the first connecting pipe 410 and the second connecting pipe 420, respectively, the signal processing device 500 for receiving the pressure difference and the flow rate data of the inlet and outlet bore of the cylinder valve to obtain the flow coefficient value Stopper setting system for cylinder valve. According to claim 4, The stopper 205 formed on the stopper guide 210 of the sleeve 170 of the cylinder valve and the handle stopper 220 provided on the handle wheel 190 is a flow coefficient value of the signal processing device 500 If the set value is a stopper setting system of the cylinder valve, characterized in that the stopper guide 210 is fastened by the stopper guide fixing screw 202 to fix the stopper guide 210 while rotating in the same direction.

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